CN202224784U - Microelectrode array with hollow structure - Google Patents

Abstract

The utility model discloses a micro-electrode array with a hollow structure for micro-electrochemical processing, which comprises a support base plate of the micro-electrode array and a circular single electrode with a hollow structure located on the base plate. The circular single electrode with a hollow structure is composed of a solid cylindrical micro-electrode The opening is formed, and the end face of the hollow circular single electrode is provided with a single electrode end face constraining hole whose diameter is smaller than the diameter of the opened inner hole. If the utility model cooperates with the pulse power supply, and then passes the electrolyte through the hollow structure micro-electrode array in a radial flow mode, array holes with high precision and good surface quality can be obtained on the workpiece.

Description

A hollow microelectrode array

technical field

The utility model relates to a micro-electrode array, in particular to a micro-electrode array with a hollow structure, which is used for the research of group-hole micro-electrochemical processing.

Background technique

At present, the microelectrode array in the group hole microelectrochemical machining is a solid cylindrical microelectrode array. By insulating the side wall, the electric field distribution in the gap between the two electrodes can be better restricted, and the electrolyte can be sprayed from the side. Supplementing the concentration of reactants in the gap, washing away the insoluble products generated by the electrode reaction, and then applying pulse power and other measures, to a certain extent, the forming accuracy and surface quality of the group holes on the workpiece are improved. However, the side-flow replenishment method of electrolyte is difficult to maintain the stability of the flow field in the gap during the processing process. It replenishes the reactants in the gap insufficiently and unevenly, and the flushing of the reaction products is uneven and incomplete. The forming precision and surface quality of group holes are further improved.

Utility model content

In order to overcome the defect that the existing cylindrical solid microelectrode array can only carry out lateral flow replenishment of electrolyte, the utility model proposes a microelectrode array with a hollow structure, which can carry out radial flow replenishment of electrolyte, and can Faster and more uniform replenishment of the reactants consumed by the electrode reaction in the gap can also flush out the insoluble products of the electrode reaction more uniformly and effectively, further maintaining the stability of the flow field in the gap, and ensuring the continuous and effective electrolytic processing.

In order to achieve the above object, the hollow structure microelectrode array described in the utility model includes a microelectrode array support base plate and a plurality of hollow structure circular single electrodes located on the base plate, and the hollow structure circular single electrodes are composed of solid cylindrical microelectrodes The inner opening is formed, and the end face of the hollow structure circular single electrode is provided with a single electrode end face constraining hole with a diameter smaller than the diameter of the opened inner hole, so as to reduce the influence of the opening on the shape of the microelectrode.

The side wall of the hollow circular single electrode is provided with an insulating layer.

The single electrode supporting bottom plate of the circular single electrode with hollow structure is provided with an insulating layer.

The support base plate of the microelectrode array is provided with a liquid hole array, and the liquid hole array is located in the hollow structure microelectrode array.

The above-mentioned structure of the utility model is prepared by combining UV-LIGA and electrodeposition technology. The hollow cylindrical microelectrode array is arranged in M×N, and the side wall of each microelectrode and the supporting bottom plate of the microelectrode are all insulated.

The beneficial effect of the utility model is that, when micro-electrochemical processing is performed, the micro-electrode array of the hollow structure is used to replenish the electrolyte in the form of radial flow, which can effectively flush the electrode reaction products and replenish the electrolyte consumed in the gap. The reactant, combined with the microsecond pulse power supply, can make the workpiece obtain better forming accuracy and surface quality.

Description of drawings

Figure 1: Schematic diagram of the radial jet flow of the electrolyte in a single microelectrode with a hollow structure;

In Fig. 1: 1-single electrode supporting bottom plate; 2-side wall insulation layer; 3-circular single electrode with hollow structure; 4-constraining hole on the end face of single electrode; 5-workpiece; 6-electrolyte.

Figure 2: Schematic diagram of hollow structure microelectrode array;

In Fig. 2: 7-microelectrode array support base plate; 8-liquid hole array on the base plate; 9-microelectrode array with hollow structure; 4-micro-electrode end surface constraining holes.

Detailed ways

The utility model will be further described below in conjunction with the accompanying drawings and embodiments. The following examples are implemented on the premise of the technical solution of the utility model, and detailed implementation methods and processes are provided, but the protection scope of the utility model is not limited to the following examples.

As shown in Figure 1, the schematic diagram of the radial jet flow of the electrolyte in a single microelectrode with a hollow structure, in the figure: 1-single electrode support base plate; 2-side wall insulation layer; 3-circular single electrode with hollow structure; 4-single electrode end face Constraint hole; 5-workpiece; 6-electrolyte. The hollow structure circular single electrode 3 is formed by the inner opening of the solid cylindrical microelectrode, and the end face of the hollow structure circular single electrode 3 is provided with a single electrode end surface constraining hole 4 with a diameter smaller than the diameter of the opened inner hole, so as to reduce the impact of the opening. Effect of Microelectrode Shape. Both the side wall and the supporting bottom plate 1 of the hollow circular single electrode 3 are provided with an insulating layer 2 . When performing micro-electrochemical machining, the electrolyte 6 flows through the hollow circular single electrode 3 in a radial flow, and then flows through the gap between the workpiece 5 and the hollow circular single electrode 3 after passing through the constraining hole 4 .

As shown in Figure 2, in the figure: 7-microelectrode array support base plate; 8-liquid hole array on the base plate; 9-microelectrode array with hollow structure; 10-microelectrode end surface constraining holes. The hollow cylindrical microelectrode array 9 is composed of hollow circular single electrodes 3 arranged in M×N, and is located on the microelectrode array support base plate 7, and the micro electrode array support base plate 7 is provided with a plurality of bottom liquid hole arrays 8, the through The liquid hole array 8 is located in the hollow cylindrical microelectrode array 9 . An insulating layer 2 is provided on the side wall and the supporting bottom plate 1 of each hollow circular single electrode 3 .

This embodiment is prepared by combining UV-LIGA and electrodeposition technology. 36 nickel cylindrical microelectrodes with a diameter of 300um are arranged in a 6×6 array, and each circular single electrode 3 with a hollow structure is 900um apart. The method of glue is used for side wall insulation treatment. After the insulating film is formed, the insulating film on the end face is removed by the end face dissolution method to make the end face conductive.

When performing micro-electrochemical machining, the electrolyte is replenished into the gap through the hollow microelectrode array in the form of radial flow, and then combined with a pulse power supply, the consumed reactants in the gap between the processing veins It will be more fully supplemented, and the insoluble products of the electrode reaction can also be washed more effectively, so that the micro electrolytic processing can be carried out in a stable environment. After processing for a period of time, round holes with higher precision and better surface quality can be obtained on the workpiece.

Claims (6)

1. A hollow structure microelectrode array is characterized in that comprising a microelectrode array support base plate and a plurality of hollow structure circular single electrodes positioned on the base plate, and the hollow structure circular single electrode is perforated by a solid cylindrical microelectrode Formed, the end face of the hollow circular single electrode is provided with a single electrode end face constraining hole whose diameter is smaller than the diameter of the opened inner hole. 2 . The hollow structure microelectrode array according to claim 1 , wherein an insulating layer is provided on the side wall of the hollow structure circular single electrode. 3 . 3. The hollow structure microelectrode array according to claim 1 or 2, characterized in that: the single electrode support base plate of the hollow structure circular single electrode is provided with an insulating layer. 4 . The microelectrode array with hollow structure according to claim 1 , wherein an array of liquid holes is arranged on the support base plate of the microelectrode array. 5 . The hollow structure microelectrode array according to claim 1 or 4 , characterized in that: the liquid hole array on the support base plate of the microelectrode array is located in the hollow structure microelectrode array. 6 . 6 . The hollow microelectrode array according to claim 1 , wherein the plurality of hollow cylindrical microelectrode arrays are arranged in M×N to form a hollow microelectrode array located on the support base of the microelectrode array. 7 .

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