CN202091298U - Bulk flow and high frequency response electrohydraulic vibrating device based on parallel connection of servo valves - Google Patents
Bulk flow and high frequency response electrohydraulic vibrating device based on parallel connection of servo valves Download PDFInfo
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Abstract
本实用新型公开一种基于伺服阀并联的大流量高频响电液振动装置。电液振动装置有两个以上伺服阀,各伺服阀的进油口均与油源相连接,各伺服阀的回油口均与回油箱相连接,各伺服阀的第一工作油口均与双出杆对称液压缸的第一油口相连接,各伺服阀的第二工作油口均与双出杆对称液压缸的第二油口相连接;位移传感器与双出杆对称液压缸的活塞杆连接;位移传感器和各伺服阀均与控制器电连接。本实用新型电液振动装置可以满足电液振动装置的大流量、高频响要求,并实现伺服阀并联时的阀芯同步运动。
The utility model discloses a large-flow high-frequency-response electro-hydraulic vibration device based on the parallel connection of servo valves. The electro-hydraulic vibration device has more than two servo valves, the oil inlet of each servo valve is connected with the oil source, the oil return port of each servo valve is connected with the oil return tank, and the first working oil port of each servo valve is connected with the oil source. The first oil port of the double-rod symmetrical hydraulic cylinder is connected, and the second working oil port of each servo valve is connected with the second oil port of the double-rod symmetrical hydraulic cylinder; the displacement sensor is connected to the piston of the double-rod symmetrical hydraulic cylinder. The rod is connected; the displacement sensor and each servo valve are electrically connected with the controller. The electro-hydraulic vibration device of the utility model can meet the requirements of large flow rate and high frequency response of the electro-hydraulic vibration device, and realize the synchronous movement of the valve core when the servo valves are connected in parallel.
Description
技术领域 technical field
本实用新型属于流体传动与控制领域,涉及一种电液伺服振动装置,适用于液压系统中采用液压油缸驱动负载做正弦或周期性运动的场合。The utility model belongs to the field of fluid transmission and control, and relates to an electro-hydraulic servo vibrating device, which is suitable for occasions where a hydraulic oil cylinder is used to drive a load to perform sinusoidal or periodic motion in a hydraulic system.
背景技术 Background technique
在液压振动台、线性摩擦焊机等液压振动装置中,液压缸的位置和速度被要求按一定频率的正弦曲线做往复运动。一般采用由伺服阀驱动液压缸的电液伺服控制系统实现上述功能。伺服阀的开口根据控制系统的指令信号按正弦曲线变化,液压缸的速度和位置也将按同样的频率做正弦曲线运动。通过调节指令信号的直流偏置和幅值可以控制液压缸运动的零位和幅值。随着设备对振动装置的振幅和频率的要求不断提高,对伺服阀的流量和频响的需求同时随之上升。为了满足这种需求,传统的电液振动装置有以下几种结构形式:In hydraulic vibration devices such as hydraulic vibration tables and linear friction welding machines, the position and speed of the hydraulic cylinder are required to reciprocate according to a sinusoidal curve of a certain frequency. Generally, the above functions are realized by an electro-hydraulic servo control system driven by a servo valve to a hydraulic cylinder. The opening of the servo valve changes sinusoidally according to the command signal of the control system, and the speed and position of the hydraulic cylinder will also move sinusoidally according to the same frequency. The zero position and amplitude of hydraulic cylinder movement can be controlled by adjusting the DC bias and amplitude of the command signal. As the equipment's requirements for the amplitude and frequency of the vibrating device continue to increase, the demand for the flow rate and frequency response of the servo valve also rises accordingly. In order to meet this demand, traditional electro-hydraulic vibration devices have the following structural forms:
一是仍然采用单个伺服阀驱动液压油缸,并尽量提高该伺服阀的流量和频响,比如增加先导级的级数,或采用并联式先导级,或采用新技术新设计以提高电机械转换器的频响。但其缺陷在于,一方面由于各种条件的限制使得上述方式所起的效果有限,单独一个伺服阀,随着额定流量的增加,其频率响应会随之大幅降低,难以同时实现大流量和高频响。另一方面,即使存在满足大流量和高频响要求的伺服阀产品,其价格一般也高得难以接受。One is to still use a single servo valve to drive the hydraulic cylinder, and try to improve the flow rate and frequency response of the servo valve, such as increasing the number of pilot stages, or using parallel pilot stages, or adopting new technologies and designs to improve electromechanical converters. frequency response. But its disadvantage is that, on the one hand, due to the limitations of various conditions, the effect of the above method is limited. With the increase of the rated flow rate of a single servo valve, its frequency response will be greatly reduced, and it is difficult to achieve large flow and high frequency response. On the other hand, even if there are servo valve products that meet the requirements of large flow and high response, their prices are generally unacceptably high.
二是采用多个液压缸并联驱动负载的方式。这样单个油缸及其驱动它的伺服阀所需的流量可以不变或者增加不大,伺服阀只要满足高频响要求即可,而多缸并联后又能显著提高其驱动力。但这种方法也存在诸多缺点,如油缸和伺服阀都需要配置多套、多个油缸并联涉及到复杂的解耦控制问题、结构复杂、在一些场合由于安装空间的限制不允许采用多执行器并联的结构。The second is to use multiple hydraulic cylinders in parallel to drive the load. In this way, the required flow rate of a single oil cylinder and its servo valve can be unchanged or increased slightly, and the servo valve only needs to meet the high-frequency response requirements, and the parallel connection of multiple cylinders can significantly increase its driving force. However, this method also has many disadvantages, such as the need to configure multiple sets of cylinders and servo valves, the parallel connection of multiple cylinders involves complex decoupling control problems, complex structure, and in some cases, it is not allowed to use multiple actuators due to the limitation of installation space. Parallel structure.
实用新型内容 Utility model content
本实用新型的目的是克服现有电液振动装置中的不足,提供一种结构简单的基于伺服阀并联的大流量高频响电液振动装置。The purpose of the utility model is to overcome the deficiencies in the existing electro-hydraulic vibrating device, and provide a large flow and high-response electro-hydraulic vibrating device based on the parallel connection of servo valves with simple structure.
为实现上述目的,本实用新型所采取的技术手段是:其基于伺服阀并联的大流量高频响电液振动装置包括油源、回油箱、两个以上伺服阀、双出杆对称液压缸、控制器和位移传感器;所述各伺服阀的进油口均与油源相连接,各伺服阀的回油口均与回油箱相连接,各伺服阀的第一工作油口均与双出杆对称液压缸的第一油口相连接,各伺服阀的第二工作油口均与双出杆对称液压缸的第二油口相连接;所述位移传感器与双出杆对称液压缸的活塞杆连接;所述位移传感器和各伺服阀均与所述控制器电连接。In order to achieve the above purpose, the technical means adopted by the utility model are: its large-flow high-frequency electro-hydraulic vibration device based on servo valve parallel connection includes oil source, oil return tank, more than two servo valves, double-rod symmetrical hydraulic cylinders, Controller and displacement sensor; the oil inlet of each servo valve is connected with the oil source, the oil return port of each servo valve is connected with the oil return tank, and the first working oil port of each servo valve is connected with the double outlet rod The first oil port of the symmetrical hydraulic cylinder is connected, and the second working oil port of each servo valve is connected with the second oil port of the double-rod symmetrical hydraulic cylinder; the displacement sensor is connected with the piston rod of the double-rod symmetrical hydraulic cylinder. connected; the displacement sensor and each servo valve are electrically connected to the controller.
进一步地,本实用新型所述伺服阀为两个。Further, there are two servo valves in the utility model.
进一步地,本实用新型还包括加速度传感器,所述加速度传感器与双出杆对称液压缸的活塞杆连接。Further, the utility model also includes an acceleration sensor, which is connected to the piston rod of the double-rod symmetrical hydraulic cylinder.
进一步地,本实用新型还包括第一压力传感器和第二压力传感器,所述第一压力传感器与双出杆对称液压缸的第一油口相连接,所述第二压力传感器与双出杆对称液压缸的第二油口相连接。Further, the utility model also includes a first pressure sensor and a second pressure sensor, the first pressure sensor is connected to the first oil port of the double-rod symmetrical hydraulic cylinder, and the second pressure sensor is symmetrical to the double-rod The second oil port of the hydraulic cylinder is connected.
与现有技术相比,本实用新型的优点是:Compared with the prior art, the utility model has the advantages of:
(1)采用多个伺服阀并联驱动同一油缸的方式,装置所需的流量是由多个阀并联同时提供的,对每个伺服阀的流量要求不大。可以选用市场上常见的中等流量、高频响的伺服阀,容易实现且节省成本,同时满足了大流量、高频响、高性能价格比的高求。(1) Using multiple servo valves in parallel to drive the same oil cylinder, the flow required by the device is provided by multiple valves connected in parallel at the same time, and there is little requirement for the flow of each servo valve. The servo valve with medium flow rate and high frequency response common in the market can be selected, which is easy to implement and saves costs, and at the same time meets the high requirements of large flow rate, high frequency response, high performance and price ratio.
(2)只采用了一个液压油缸来驱动负载,结构简单,节省安装空间。(2) Only one hydraulic cylinder is used to drive the load, which has a simple structure and saves installation space.
(3)采用本实用新型电液振动装置,可以对其并联的伺服阀进行同步控制,实现了阀芯运动过零位时的同步,控制精度高,有效地解决了并联的伺服阀之间阀芯运动不同步的问题所造成的流量减小和换向冲击等问题。(3) By adopting the electro-hydraulic vibration device of the present utility model, the parallel servo valves can be controlled synchronously, realizing the synchronization when the spool moves through the zero position, and the control accuracy is high, which effectively solves the problem of the valve between the parallel servo valves. Problems such as flow reduction and commutation shock caused by the problem of asynchronous core movement.
(4)本实用新型电液振动装置对其伺服阀的通径和并联的个数没有限制,可以根据装置的流量需求合理配置所需并联的伺服阀的个数和大小,灵活方便。(4) The electro-hydraulic vibration device of the utility model has no limitation on the diameter and the number of parallel servo valves, and the number and size of the required parallel servo valves can be reasonably configured according to the flow requirements of the device, which is flexible and convenient.
附图说明 Description of drawings
图1是本实用新型电液振动装置的一种实施方式的液压原理图;Fig. 1 is the hydraulic principle diagram of an embodiment of the electro-hydraulic vibrating device of the present invention;
图2是在50Hz,±20%满行程的输入信号下,对本实用新型电液振动装置进行同步控制方法后的并联伺服阀阀芯位移曲线图;Fig. 2 is under the input signal of 50Hz, ± 20% of the full stroke, the parallel servo valve spool displacement curve after the synchronous control method is carried out to the electro-hydraulic vibration device of the utility model;
图3是图2在并联伺服阀阀芯位移正穿越零位时的局部放大图;Fig. 3 is a partial enlarged view of Fig. 2 when the displacement of the spool of the parallel servo valve is crossing the zero position;
图4是图2在并联伺服阀阀芯位移负穿越零位时的局部放大图。Fig. 4 is a partial enlarged view of Fig. 2 when the spool displacement of the parallel servo valve crosses the zero position negatively.
具体实施方式 Detailed ways
如图1所示,本实用新型基于伺服阀并联的大流量高频响电液振动装置包括油源1、回油箱2、两个以上伺服阀、双出杆对称液压缸5、控制器11和位移传感器7;各伺服阀的进油口均与油源1相连接,各伺服阀的回油口均与回油箱2相连接,各伺服阀的第一工作油口均与双出杆对称液压缸5的第一油口相连接,各伺服阀的第二工作油口均与双出杆对称液压缸5的第二油口相连接;位移传感器7与双出杆对称液压缸5的活塞杆连接;位移传感器7和各伺服阀均与所述控制器11电连接。其中,控制器11可使用美国德州仪器公司的DSP芯片,具体型号为TMS320F240。As shown in Figure 1, the utility model is based on the parallel connection of servo valves with large flow and high-response electro-hydraulic vibration device, including
如果双出杆对称液压缸5的活塞杆还连接有加速度传感器8,则可以测量活塞杆运动的加速度信号,通过积分还可算出活塞杆运动的速度,电液振动装置中的控制器11可以采集这些信号,构成加速度和速度反馈,与位移传感器7的反馈信号一起实现活塞杆的三参量闭环振动控制。If the piston rod of the double-rod symmetrical
此外,若双出杆对称液压缸5的第一油口与第一压力传感器9连接,双出杆对称液压缸5的第二油口与第二压力传感器10连接,则可以实时监测双出杆对称液压缸5两个工作油口的压力,若压力超过安全范围,控制器11可发出警报,并采取一些相应的安全措施。In addition, if the first oil port of the double-rod symmetrical
由上可见,本实用新型中,各伺服阀采取并联结构,在电液振动装置振动过程中同时工作。伺服阀的通径和数量可视电液振动装置的实际性能要求进行改变和增减。It can be seen from the above that in the utility model, each servo valve adopts a parallel structure and works simultaneously during the vibration process of the electro-hydraulic vibration device. The diameter and quantity of the servo valve can be changed, increased or decreased depending on the actual performance requirements of the electro-hydraulic vibration device.
控制器11带有多个通道的DA(数字量转模拟量)输出和AD(模拟量转数字量)输入,每个DA通道输出独立的指令信号给每个对应的伺服阀,同时通过AD通道采集该伺服阀的阀芯位置反馈信号。此外,控制器11通过AD通道采集位移传感器7的信号。The
本实用新型电液振动装置工作时,由操作人员设定目标振动频率、振幅、负载质量和油源1的供油压力等参数,控制器11由此计算出各个伺服阀的阀芯运动的频率和初始幅值。在振动过程中,控制器11会持续检测位移传感器7的信号,得到双出杆对称液压缸5的实际振幅,并与设定的目标振幅进行比较,若两者偏差超过允许范围,便对前面计算到的初始幅值进行修正。根据计算到的频率和初始幅值,控制器11输出指令信号驱动各伺服阀。然后通过控制器11内部的同步控制,调整输出给各个伺服阀的指令信号的幅值和相位,从而最终达到各个并联伺服阀之间的同步运动。此时,双出杆对称液压缸5在各个伺服阀的驱动下产生的振动振幅达到最大,即振动装置产生了足够频率和幅值的振动。When the electro-hydraulic vibration device of the utility model is working, the operator sets parameters such as the target vibration frequency, amplitude, load mass and oil supply pressure of the
工作过程中,由液压泵和蓄能器组成的油源1负责向装置提供稳定压力、足够流量的液压油,回油箱2提供畅通的低背压的回油路径。各伺服阀在控制器11的指令信号控制下,阀芯开口做周期性往复运动。液压油通过各伺服阀的开口,在设定频率下间歇地流向双出杆对称液压缸5的两个工作油口,驱动双出杆对称液压缸5的活塞杆做周期性往复运动,活塞杆带动负载产生振动。位移传感器7和加速度传感器8测量活塞杆的位移和加速度,第一压力传感器8和第二压力传感器9测量双出杆对称液压缸5的两个工作油口的压力。控制器11采集各个伺服阀的阀芯位置反馈信号,以实现对各伺服阀的同步控制,控制器11还分别采集上述位移、加速度和压力信号,构成振动装置的闭环控制。During the working process, the
本实用新型电液装置中,选择频响满足要求的普通常见的伺服阀,多个并联驱动同一个液压油缸,以此达到所需要的大流量。由于所选用的伺服阀对流量没有太高的要求,为市场上常见的产品,价格较为合理,因此多个并联可以同时满足大流量、高频响、高性价比的要求。In the electro-hydraulic device of the utility model, a common and common servo valve whose frequency response meets the requirements is selected, and a plurality of parallel drives the same hydraulic oil cylinder to achieve the required large flow. Since the selected servo valve does not have high requirements on the flow rate, it is a common product in the market and the price is relatively reasonable. Therefore, multiple parallel connections can simultaneously meet the requirements of large flow rate, high frequency response, and high cost performance.
下面以两个伺服阀并联、电液振动装置做正弦曲线振动为例,详细说明对本实用新型电液振动装置的并联伺服阀进行同步控制的方法:Taking two servo valves connected in parallel and the electro-hydraulic vibration device doing sinusoidal vibration as an example, the method for synchronously controlling the parallel servo valves of the electro-hydraulic vibration device of the present invention is explained in detail:
(1)根据振动装置的目标振动频率、振幅、负载和供油压力等分别计算第一伺服阀3和第二伺服阀4的指令信号的频率和初始幅值。(1) Calculate the frequency and initial amplitude of the command signals of the
由于电液振动装置由双出杆对称液压缸5产生振动,而双出杆对称液压缸5是由第一伺服阀3和第二伺服阀4驱动的,因此,两者的振动频率相等,即第一伺服阀3和第二伺服阀4的指令信号的频率均与目标振动频率相等。根据双出杆对称液压缸5的缸径、杆径、标振动频率和振幅,可以直接计算出装置所需的最大流量,再根据第一伺服阀3和第二伺服阀4的额定流量、油源1的供油压力和负载大小便可以计算出第一伺服阀3和第二伺服阀4的指令信号的初始幅值。在振动过程中,控制器11会持续检测位移传感器7的信号,得到双出杆对称液压缸5的实际振幅,并与设定的目标振幅进行比较,若两者偏差超过允许范围,便会对计算到的初始幅值进行修正。Since the electro-hydraulic vibration device is vibrated by the double-rod symmetrical
(2)根据第一伺服阀3和第二伺服阀4的指令信号的频率和初始幅值,利用公式(I)分别得到第一伺服阀3和第二伺服阀4的初始指令信号,(2) according to the frequency and the initial amplitude of the command signal of the
式(I)中,y10(t)表示第一伺服阀3的初始指令信号,y20(t)表示第二伺服阀4的初始指令信号,A10表示第一伺服阀3的指令信号的初始幅值,A20表示第二伺服阀4的指令信号的初始幅值,ω0表示第一伺服阀3和第二伺服阀4的指令信号的频率,t表示时间。In formula (I), y 10 (t) represents the initial command signal of the
(3)由第一伺服阀3的当前指令信号驱动第一伺服阀3并由第二伺服阀4的当前指令信号驱动第二伺服阀4。第一次执行步骤(3)时当前指令信号就是步骤(2)中的初始指令信号。控制器11分别采集第一伺服阀3和第二伺服阀4的阀芯位置反馈信号,后根据第一伺服阀3和第二伺服阀4的阀芯位置反馈信号得到第一伺服阀3和第二伺服阀4的阀芯的过零位相位差其中,k代表检测的次数,且k=1,2,……,代表第k次检测时第二伺服阀4的阀芯在正穿越零位时相对于第一伺服阀3的阀芯的相位差,代表第k次检测时第二伺服阀4的阀芯在负穿越零位时相对于第一伺服阀3的阀芯的相位差。(3) The
考虑到阀芯位移信号在零位穿越处可能出现反复或震荡,在相位差检测的数据处理中,一是对穿越点间的时间间隔进行判断,若间隔过小(如明显小于半个信号周期),则判定该穿越点为干扰并剔除,二是增大检测信号的周期样本数,求取相位差平均值。Considering that the spool displacement signal may repeat or oscillate at the zero crossing point, in the data processing of the phase difference detection, the first is to judge the time interval between the crossing points, if the interval is too small (such as obviously less than half the signal period ), then it is determined that the crossing point is interference and eliminated. The second is to increase the number of periodic samples of the detection signal and calculate the average value of the phase difference.
(4)判断第一伺服阀3和第二伺服阀4的阀芯的过零位相位差是否满足关系式(II),若满足,则执行步骤(5),否则执行步骤(6),(4) Judging the zero-crossing phase difference of the spools of the
式(II)中,θe表示第一伺服阀3和第二伺服阀4的阀芯在正穿越零位和负穿越零位时容许的相位差;In formula (II), θ e represents the allowable phase difference when the spools of the
如果(II)满足,说明两个伺服阀的开口在正负穿越零位时均存在较大的相位差,此时应主要采取对第二伺服阀4的指令信号进行移相的方式,逐步减小相位差,进入步骤(5)。如果(II)不满足,说明在移相的方法后,正负穿越相位差已大幅减小,此时应对相位差进行进一步的判断,进入步骤(6)。If (II) is satisfied, it means that there is a large phase difference between the openings of the two servo valves when they cross the zero position positively and negatively. If the phase difference is small, go to step (5). If (II) is not satisfied, it means that after the phase shifting method, the positive and negative crossing phase difference has been greatly reduced. At this time, the phase difference should be further judged and enter step (6).
(5)利用公式(III)和(IV)得到第一伺服阀3和第二伺服阀4的当前指令信号,后返回执行步骤(3),(5) Utilize formula (III) and (IV) to obtain the current command signal of the
式(III)、式(IV)中,表示第一伺服阀3的当前指令信号,表示第二伺服阀4的当前指令信号,表示第二伺服阀4当前指令信号的移相角度,表示第二伺服阀4上一次指令信号的移相角度,且 In formula (III), formula (IV), represents the current command signal of the
(6)判断或是否成立,如果成立,则执行步骤(7),否则完成对本实用新型电液振动装置的第一伺服阀3和第二伺服阀4的同步控制。(6) Judgment or Whether it is established, if established, then execute step (7), otherwise complete the synchronous control of the
如果上式成立,说明两个伺服阀的阀芯位移在正穿越和负穿越零位时的其中一个相位差已满足要求,但另一个相位差仍然较大,此时应进入步骤(7),采取改变指令信号幅值的方式进一步减小相位差。If the above formula is established, it means that one of the phase differences of the spool displacements of the two servo valves has met the requirements when they are positively crossing and negatively crossing the zero position, but the other phase difference is still relatively large. At this time, step (7) should be entered. The phase difference is further reduced by changing the amplitude of the command signal.
如果上式不成立,说明两个伺服阀的阀芯位移在正穿越和负穿越零位时的相位差均已满足要求,此时同步控制完成。If the above formula is not established, it means that the phase difference of the spool displacements of the two servo valves at the time of positive crossing and negative crossing zero has met the requirements, and the synchronous control is completed at this time.
(7)利用公式(V)和(VI)得到第一伺服阀3和第二伺服阀4的当前指令信号,后返回执行步骤(3),(7) Utilize formula (V) and (VI) to obtain the current command signal of the
式(V)、(VI)中,表示第一伺服阀3的当前指令信号的幅值增益,表示第二伺服阀4的当前指令信号的幅值增益,表示第一伺服阀3的上一次指令信号的幅值增益,且 表示第二伺服阀4的上一次指令信号的幅值增益,且λ1表示第一伺服阀3的指令信号的幅值增益系数,λ2表示第二伺服阀4的指令信号的幅值增益系数,Qn1表示第一伺服阀3的额定流量,Qn2表示第二伺服阀4的额定流量。In formula (V), (VI), represents the amplitude gain of the current command signal of the
式(VI)是为了克服伺服阀指令信号幅值的改变对液压系统流量的影响,即在缩小(放大)第二伺服阀4的信号幅值的同时放大(缩小)第一伺服阀3的信号幅值,且满足由于指令信号幅值变化所引起的流量增加和减小量相互抵消。Formula (VI) is to overcome the influence of the change of servo valve command signal amplitude on the hydraulic system flow, that is, to amplify (reduce) the signal amplitude of the
以上所举是两个伺服阀并联、振动装置做正弦曲线振动的例子。针对两个及两个以上伺服阀,振动装置做正弦曲线或其它周期性曲线运动时,仍可适用以上方法对本实用新型电液振动装置的并联的伺服阀进行同步控制。The above is an example where two servo valves are connected in parallel and the vibrating device vibrates sinusoidally. For two or more servo valves, when the vibrating device moves sinusoidally or other periodic curves, the above method can still be applied to synchronously control the parallel servo valves of the electro-hydraulic vibrating device of the present invention.
如图2至图4所示,在50Hz,±20%满行程的输入信号下,经对本实用新型电液振动装置进行同步控制后,两个并联伺服阀的阀芯位移在穿越零位时的相位差减小至1°左右。在其它频率和其它幅值的输入信号下,同样表现出良好的同步控制效果,限于篇幅,未能一一列出。由此可见,本实用新型电液振动装置可以满足电液振动装置的大流量、高频响要求,并实现伺服阀并联时的阀芯同步运动。As shown in Figure 2 to Figure 4, under the input signal of 50Hz, ±20% of the full stroke, after synchronous control of the electro-hydraulic vibration device of the present invention, the displacement of the spools of the two parallel servo valves when they cross the zero position The phase difference is reduced to around 1°. Under the input signals of other frequencies and other amplitudes, they also exhibit good synchronous control effects, but due to space limitations, they cannot be listed one by one. It can be seen that the electro-hydraulic vibration device of the present invention can meet the requirements of large flow rate and high frequency response of the electro-hydraulic vibration device, and realize the synchronous movement of the valve core when the servo valves are connected in parallel.
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CN102182729A (en) * | 2011-05-15 | 2011-09-14 | 浙江大学 | Large-flow high-frequency response electrohydraulic vibration device based on parallel servo valves and control method |
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CN102182729A (en) * | 2011-05-15 | 2011-09-14 | 浙江大学 | Large-flow high-frequency response electrohydraulic vibration device based on parallel servo valves and control method |
CN102182729B (en) * | 2011-05-15 | 2013-05-01 | 浙江大学 | Large-flow high-frequency response electrohydraulic vibration device based on parallel servo valves and control method |
CN108533816A (en) * | 2018-03-30 | 2018-09-14 | 同济大学 | A kind of electrohydraulic servo valve inhibiting function with acceleration bias drift |
CN108533816B (en) * | 2018-03-30 | 2019-08-02 | 同济大学 | A kind of electrohydraulic servo valve inhibiting function with acceleration bias drift |
CN108591137A (en) * | 2018-07-12 | 2018-09-28 | 西南交通大学 | A kind of novel robot hydraulic knuckle drive system |
CN109616001A (en) * | 2018-12-11 | 2019-04-12 | 上海应用技术大学 | Electro-hydraulic position servo system test bench |
CN110594233A (en) * | 2019-09-03 | 2019-12-20 | 浙江大学 | Hydraulic cylinder structure for hydraulic systems with high frequency response requirements and limited installation space |
CN110594233B (en) * | 2019-09-03 | 2021-06-29 | 浙江大学 | Hydraulic cylinder structure for hydraulic systems with high frequency response requirements and limited installation space |
CN114811117A (en) * | 2022-02-24 | 2022-07-29 | 浙江工业大学 | High-frequency one-way sinusoidal flow control valve |
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