CN202074239U - Pipeline Leakage Detection Device - Google Patents

Abstract

The utility model discloses a pipeline leakage detection device, which is used to detect pipeline leakage and includes a sleeve, a reflector, a moisture-sensitive film, a light source and a light detector. The casing surrounds the pipeline, the lower part of the casing is closely connected to the pipeline, and a liquid-holding space is formed between the casing and the pipeline located above the lower part. The reflector is arranged on the outer wall of the casing. The moisture-sensitive film covers the reflector, wherein the moisture-sensitive film has a first light transmittance when dry, and has a second light transmittance after contact with the leakage, and the second light transmittance is greater than the first light transmittance . The light source is used to illuminate the moisture-sensitive film. The light detector is used to receive the reflected light from the reflector.

Description

Pipeline Leakage Detection Device

technical field

The utility model relates to a detection system, in particular to a pipeline liquid leakage detection device.

Background technique

At present, in order to improve production efficiency, semiconductor factories adopt high-density arrangements in their equipment placement design. Therefore, pipelines and various equipment for transporting various chemical liquids are arranged in a staggered manner. If the pipelines for transporting liquids accidentally leak liquid into the semiconductor machine, it will have a very serious impact on the production of semiconductors.

For example, the photoresist delivery pipe of a photoresist (photoresist) coating machine needs to be coated with a circulating water pipe for temperature control. When the pipe is aged and worn out, it will crack and leak, often causing chip defects and good rate loss. However, since the internal environment of the photoresist coating machine must avoid electrical contact with flammable liquids (such as photoresist), the detection of pipeline leakage is limited.

Utility model content

The purpose of the utility model is to provide a pipeline liquid leakage detection device, which can detect and monitor the pipeline liquid leakage in real time.

The purpose of the utility model is to provide another pipeline liquid leakage detection device, which can effectively prevent the occurrence of industrial safety problems.

In order to achieve the above purpose, the utility model proposes a pipeline leakage detection device, which is used to detect pipeline leakage, and includes a sleeve, a reflector, a moisture-sensitive film, a light source and a light detector. The casing surrounds the pipeline, and the lower part of the casing is closely connected to the pipeline, and a liquid storage space is formed between the casing above the lower part and the pipeline. The reflection mirror is arranged on the outer wall of the casing. The moisture-sensitive film covers the reflector, wherein the moisture-sensitive film has a first light transmittance when dry, and has a second light transmittance after being in contact with the leakage liquid, and the second light transmittance is greater than the first light transmittance . The light source is used to illuminate the moisture-sensitive film. The light detector is used for receiving the reflected light from the mirror.

According to an embodiment of the present invention, in the above pipeline leakage detection device, for example, there is a notch on the sleeve, and the notch is located above the moisture-sensitive film.

According to an embodiment of the present invention, in the above pipeline liquid leakage detection device, the sleeve is, for example, integrally formed or composed of multiple parts.

According to an embodiment of the present invention, in the above pipeline leakage detection device, when the sleeve is composed of multiple parts, the sleeve further includes a coupling device for assembling the parts.

According to an embodiment of the present invention, in the above pipeline leakage detection device, the sleeve is, for example, arranged at the end of the pipeline, and the end is located at a low position of the pipeline.

According to an embodiment of the present invention, in the above pipeline liquid leakage detection device, the light source and the light detector are, for example, integrally formed or separated from each other.

According to an embodiment of the present invention, the above pipeline liquid leakage detection device further includes an alarm coupled to the light detector, and the alarm is used to send out an alarm signal when the intensity of the reflected light increases.

According to an embodiment of the present invention, in the above pipeline liquid leakage detection device, the alarm is, for example, a light alarm, an audio alarm or a combination of the above alarms.

According to an embodiment of the present invention, in the above pipeline liquid leakage detection device, the pipeline is, for example, a temperature control tube used to cover the photoresist delivery tube.

The utility model proposes another detection device for pipeline liquid leakage, which is used for detecting pipeline liquid leakage, and includes a sleeve, a moisture-sensitive film, a light source and a light detector. The casing surrounds the pipeline, and the lower part of the casing is closely connected to the pipeline, and a liquid storage space is formed between the casing above the lower part and the pipeline. The moisture-sensitive film is arranged on the outer wall of the sleeve, wherein the moisture-sensitive film has a first light transmittance when dry, and has a second light transmittance after being in contact with the leakage liquid, and the second light transmittance is greater than the first light transmittance. Light penetration. The light source is used to illuminate the moisture-sensitive film. The light detector is used for receiving the penetrating light penetrating the moisture-sensitive film.

According to another embodiment of the present invention, in the above pipeline leakage detection device, for example, there is a notch on the sleeve, and the notch is located above the moisture-sensitive film.

According to another embodiment of the present utility model, in the above pipeline liquid leakage detection device, an alarm is also included, coupled to the light detector, and the alarm is used to give an alarm when the intensity of the penetrating light increases. Signal.

The advantage of the present invention is that, based on the above, when using the pipeline liquid leakage detection device proposed by the present invention, when the pipeline leaks, the leaked liquid will flow into the liquid storage space. The leakage liquid flowing out of the liquid storage space will wet the moisture-sensitive film, and increase the light transmittance of the moisture-sensitive film, so the intensity of reflected light or transmitted light detected by the photodetector increases. By detecting the increase in the intensity of reflected light or transmitted light by the light detector, the leakage of the pipeline can be known, so the leakage detection and monitoring of the pipeline can be carried out in real time.

In order to make the above and other objects, features and advantages of the present invention more comprehensible, the following specific examples are given together with the accompanying drawings and described in detail as follows.

Description of drawings

FIG. 1 is a schematic diagram of a pipeline liquid leakage detection device according to an embodiment of the present invention when no liquid leakage occurs;

Fig. 2 is a schematic diagram of a pipeline liquid leakage detection device according to an embodiment of the present invention when a liquid leakage occurs;

Fig. 3 is the schematic diagram of the sleeve pipe of another embodiment of the present invention;

4 is a schematic diagram of a pipeline liquid leakage detection device applied to a photoresist coating machine according to an embodiment of the present invention;

Fig. 5 is a schematic diagram of the pipeline liquid leakage detection device according to the second embodiment of the present invention when no liquid leakage occurs;

FIG. 6 is an enlarged schematic view of the moisture-sensitive film and the photodetector in FIG. 5;

Fig. 7 is a schematic diagram of the pipeline liquid leakage detection device according to the second embodiment of the present invention when liquid leakage occurs;

FIG. 8 is an enlarged schematic view of the moisture-sensitive film and the photodetector in FIG. 7 .

Description of main component symbols

100, 600: Pipeline leakage detection device 126: Alarm

102: Sleeve 128: Penetrating light

102a: Lower part 200: Pipeline

104: Mirror 202: End

106: Moisture-sensitive film 300: Leakage

108: Light source 400: Photoresist pipeline

110, 110′: photodetector 402: photoresist delivery tube

112: Liquid storage space 404: Temperature control tube

114: Notch 406: Adapter ring

116, 118: Components 500: Photoresist coating machine

120: Combined device 502: Mechanical arm

122: Light 504: Nozzle

124: reflected light

Detailed ways

FIG. 1 is a schematic diagram of the pipeline liquid leakage detection device according to the first embodiment of the present invention when no liquid leakage occurs. FIG. 2 is a schematic diagram of the pipeline liquid leakage detection device according to the first embodiment of the present invention when liquid leakage occurs. FIG. 3 is a schematic diagram of a casing according to another embodiment of the present invention. FIG. 4 is a flowchart showing the monitoring flow of the pipeline liquid leakage detection device according to the first embodiment of the present invention.

Please refer to FIG. 1 and FIG. 2 at the same time, the pipeline leakage detection device 100 is used to detect the leakage 300 of the pipeline 200 . The pipeline leakage detection device 100 includes a sleeve 102 , a mirror 104 , a moisture-sensitive film 106 , a light source 108 and a light detector 110 . The pipeline 200 is, for example, a liquid delivery tube.

The sleeve 102 surrounds the pipeline 200, and the lower part 102a of the sleeve 102 is closely connected to the pipeline 200, and a liquid holding space 112 is formed between the sleeve 102 above the lower part 102a and the pipeline 200, which is used to contain the liquid produced by the pipeline 200. The leakage liquid 300. The material of the casing 102 is, for example, a corrosion-resistant material, such as polyethylene (polyethylene, PE), high-density polyethylene (high-density polyethylene, HDPE), polypropylene (polypropylene, PP), polyvinyl chloride (polyvinylchloride, PVC) or High polymerization degree of polyvinylchloride (HPVC). The material of the sleeve 102 can be selected according to the composition of the leakage liquid 300 to be contained. The bushing 102 is, for example, disposed at the end 202 of the pipeline 200 , and the end 202 is located at a lower position of the pipeline 200 so that the leakage liquid 300 can flow into the liquid storage space 112 along the outer wall of the pipeline 200 by gravity. In addition, the height in the extending direction of the casing 102 can be adjusted according to actual needs, so as to control the height of the liquid containing space 112 .

For example, the sleeve 102 has a notch 114 , and the notch 114 is located above the moisture-sensitive film 106 . The notch 114 helps the leakage liquid 300 to flow out of the liquid storage space 112 more quickly, and has the function of guiding the leakage liquid 300 to flow to the moisture-sensitive film 106 .

The sleeve 102 is, for example, integrally formed or composed of multiple parts. In this embodiment, the sleeve 102 is described by taking integral molding as an example. In other embodiments, the cannula 102 can also be composed of multiple parts. Taking FIG. 3 as an example, the bushing 102 is composed of two parts 116 and 118 , but the present invention is not limited thereto, and the bushing 102 can be composed of more than three parts. In addition, the bushing 102 also includes joining means 120 for combining the components 116 , 118 . In this embodiment, the coupling device 120 is, for example, a screw set, but the present invention is not limited thereto.

Please continue to refer to FIG. 1 and FIG. 2 , the mirror 104 is disposed on the outer wall of the sleeve 102 for reflecting the light 122 generated by the light source 108 . The material of the mirror 104 is, for example, metal or glass coated with a reflective film or a flat plate.

The moisture-sensitive film 106 covers the reflector 104, wherein the moisture-sensitive film 106 has a first light transmittance when dry, and has a second light transmittance after being in contact with the leakage liquid 300, and the second light transmittance is greater than the first light transmittance. Light penetration. The material of the moisture-sensitive film 106 is, for example, a material that can change a light-transmitting state when exposed to liquid. The first light transmittance is, for example, less than 50%. The second light transmittance is, for example, greater than or equal to 50%. For example, when the moisture-sensitive film 106 has a first light transmittance of 0% when dry, the moisture-sensitive film 106 is, for example, an opaque film or a colored film (in FIG. The hatching indicates the state of “opaque” or “colored”) light 122 cannot penetrate the moisture-sensitive film 106 . When the second light transmittance after the moisture-sensitive film 106 contacts with the leakage liquid 300 is about 100%, the moisture-sensitive film 106 is a light-permeable film (in FIG. “light-transmissive” state), the light 122 can almost completely pass through the moisture-sensitive film 106 .

In addition, in this embodiment, the moisture-sensitive film 106 completely covers the mirror 104 is taken as an example for illustration. However, in other embodiments, the moisture-sensitive film 106 may only cover part of the reflector 104 , as long as the reflective light intensity of the reflector 104 is different when the moisture-sensitive film 106 is in a dry state and a wet state.

The light source 108 is, for example, disposed facing the reflector 104 for emitting light 122 to illuminate the moisture-sensitive film 106 . The light source 108 is, for example, a laser light source or an infrared light source that can be detected, but the present invention is not limited thereto.

The light detector 110 is, for example, disposed facing the reflector 104 for receiving the reflected light 124 from the reflector 104 . The light source 108 and the light detector 110 are, for example, integrally formed or separate devices. In this embodiment, the light source 108 and the light detector 110 are integrally formed for illustration, but the present invention is not limited thereto.

In addition, the pipeline liquid leakage detection device 100 can also optionally include an alarm 126 coupled to the light detector 110 . When the intensity of the reflected light 124 increases, the alarm 126 will send out an alarm signal. The alarm 126 is, for example, a light alarm, an audio alarm, or a combination of the above alarms.

Hereinafter, the monitoring method of the pipeline leakage detection device 100 will be described with an example.

Please refer to FIG. 1 and FIG. 2 at the same time. First, step S100 is performed to irradiate the moisture-sensitive film 106 with the light 122 generated by the light source 108 . In this embodiment, the first light transmittance of the moisture-sensitive film 106 when dry is 0% as an example, so the moisture-sensitive film 106 covered on the reflector 104 is opaque and can shield the light emitted by the light source 108. The light 122 , that is, the light 122 cannot irradiate the reflector 104 , so no reflected light 124 (as shown in FIG. 1 ) will be generated.

Next, proceed to step S102 , using the light detector 110 to detect the reflected light 124 . When the leakage 300 occurs in the pipeline 200 , the second light transmittance of the moisture-sensitive film 106 after contacting the leak 300 is greater than the first light transmittance. In this embodiment, the second light transmittance is about 100% as an example, so the moisture-sensitive film 106 will be transformed into a light-permeable film. Therefore, the light 122 passes through the moisture-sensitive film 106 and irradiates the reflector 104 , thereby generating reflected light 124 , so that the light detector 110 detects the reflected light 124 (as shown in FIG. 2 ).

Then, proceed to step S104 , when the light detector 110 detects that the intensity of the reflected light 124 increases, the machine is locked (locked), and the operation of the machine is stopped. In this embodiment, the moisture-sensitive film 106 is "opaque" and "completely transparent" in a dry state and a wet state respectively for illustration. That is, the situation where the intensity of the reflected light 124 increases refers to the situation from “no” reflected light 124 to “present” reflected light 124 , but the present invention is not limited thereto.

In other embodiments, the moisture-sensitive film 106 is, for example, a film that can transmit light in both a dry state and a wet state, and the light transmittance of the moisture-sensitive film 106 increases when it changes from a dry state to a wet state. This results in an increase in the intensity of reflected light 124 . That is, the situation where the intensity of the reflected light 124 increases here refers to the situation from the “weak” reflected light 124 to the “strong” reflected light 124 .

In addition, step S106 can also be optionally performed. When the light detector 110 detects that the intensity of the reflected light 124 increases, the alarm 126 sends out an alarm signal. The alarm 126, for example, emits a light signal, a sound signal or a combination of the above signals to attract the attention of the operator. Wherein, there is no specific order between step S106 and step S104, and step S106 may be performed before or after step S104, or performed simultaneously with step S104.

Based on the above-mentioned embodiments, it can be known that when the pipeline leakage detection device 100 is used to monitor the pipeline leakage, when the pipeline 200 produces the leakage 300 , the leakage 300 will flow into the liquid storage space 112 . The leakage liquid 300 flowing out from the liquid storage space 112 will wet the moisture-sensitive film 106, and increase the light transmittance of the moisture-sensitive film 106, thereby making the intensity of the reflected light 124 detected by the light detector 110 Increase. Through the increase of the intensity of the reflected light 124 detected by the light detector 110 , it can be known that the pipeline 200 has a liquid leakage 300 , so the leakage detection and monitoring of the pipeline 200 can be performed in real time.

In addition, because the liquid leakage detection performed by the pipeline liquid leakage detection device 100 is a non-contact detection method, it can prevent industrial safety problems caused by electrical contact with flammable liquids.

FIG. 4 is a schematic diagram of a pipeline liquid leakage detection device applied to a photoresist coating machine according to an embodiment of the present invention.

Referring to FIG. 4 , the pipe leakage detection device 100 is installed in the photoresist coating machine 500 for detecting the leakage of the photoresist pipe 400 . The photoresist pipeline 400 includes a photoresist delivery tube 402 , a temperature control tube 404 and an adapter ring 406 . The temperature control pipe 404 is used to cover the photoresist delivery pipe 402 and can be used as a circulating water pipe. The temperature control tube 404 is, for example, a snake tube. The adapter ring 406 connects the photoresist delivery tube 402 to the nozzle 504 on the robot arm 502 of the photoresist coater 500 .

In this embodiment, the sleeve 102 in the pipeline leakage detection device 100 surrounds the photoresist pipeline 400, and the lower part 102a of the sleeve 102 is in close contact with the temperature control tube 404 and the adapter ring 406, and is located above the lower part 102a. A liquid containing space 112 is formed between the sleeve tube 102 and the photoresist pipeline 400 for containing the leakage liquid generated by the photoresist pipeline 400 . In addition, the materials, configurations and functions of other components in the pipeline liquid leakage detection device 100 have been described in detail in the above-mentioned embodiments, and thus will not be repeated here.

It can be known from the above embodiments that when the pipeline leakage detection device 100 is used to monitor the pipeline leakage, the light 122 generated by the light source 108 will illuminate the moisture-sensitive film 106 . When the photoresist pipeline 400 leaks, the reflected light 124 detected by the photodetector 110 will be detected by utilizing the property of the light transmittance increase caused by the moisture-sensitive film 106 changing from a dry state to a wet state. increased strength. The light detector 110 detects that the intensity of the reflected light 124 increases, and it can be known that the photoresist pipeline 400 is leaking, so the leakage detection and monitoring of the photoresist pipeline 400 can be performed in real time.

In addition, since the liquid leakage detection performed by the pipeline liquid leakage detection device 100 is a non-contact detection method, fires caused by electrical contact with photoresist leakage can be avoided.

Although the pipeline leakage detection device 100 in the above embodiment is applied to a photoresist pipeline, the present invention is not limited thereto. In other embodiments, the pipeline leakage detection device 100 can be customized and installed for various types of pipelines.

FIG. 5 is a schematic diagram of the pipeline liquid leakage detection device according to the second embodiment of the present invention when no liquid leakage occurs. FIG. 6 is an enlarged schematic diagram of the moisture-sensitive film and the photodetector in FIG. 5 . FIG. 7 is a schematic diagram of the pipeline liquid leakage detection device according to the second embodiment of the present invention when liquid leakage occurs. FIG. 8 is an enlarged schematic diagram of the moisture-sensitive film and the photodetector in FIG. 7 .

Please refer to Fig. 1, Fig. 2 and Fig. 5 to Fig. 8 at the same time, the difference between the pipeline liquid leakage detection device 600 of the second embodiment and the pipeline liquid leakage detection device 100 of the first embodiment is: the pipeline liquid leakage The light detector 110' in the detection device 600 is used to receive the penetrating light 128 that penetrates the moisture-sensitive film 106, so the pipeline liquid leakage detection device 600 does not need to have the pipeline liquid leakage detection device 100 mirror 104 . The light detector 110 ′ is, for example, disposed on the light emitting side of the moisture-sensitive film 106 , such as disposed between the moisture-sensitive film 106 and the sleeve 102 . The same components of the pipeline liquid leakage detection device 600 and the pipeline liquid leakage detection device 100 are represented by the same symbols, and the materials, configurations and functions of these components have been described in detail in the above embodiments, so in This will not be repeated here.

Hereinafter, please refer to FIG. 5 to FIG. 8 at the same time. In this embodiment, the first light transmittance of the moisture-sensitive film 106 when dry is 0% as an example, so the moisture-sensitive film 106 is opaque and can shield the light 122 emitted by the light source 108, that is, light 122 cannot penetrate the moisture-sensitive film 106, so the penetrating light 128 will not be generated. Wherein, the moisture-sensitive film 106 is hatched to indicate the state of "opaque" or "colored". (Please refer to Figure 5 and Figure 6)

When the leakage 300 occurs in the pipeline 200 , the second light transmittance of the moisture-sensitive film 106 after contacting the leak 300 is greater than the first light transmittance. In this embodiment, the second light transmittance is about 100% as an example, so the moisture-sensitive film 106 will be transformed into a light-permeable film. Therefore, the light 122 passes through the moisture-sensitive film 106 to generate the transmitted light 128 , so that the light detector 110 detects the transmitted light 128 . Wherein, the moisture-sensitive film 106 is not hatched to represent the state of "transmitting light". (Please refer to Figure 7 and Figure 8)

When the light detector 110 detects that the intensity of the transmitted light 128 increases, the machine is locked (locked) to stop the operation of the machine. In this embodiment, the moisture-sensitive film 106 is "opaque" and "completely transparent" in a dry state and a wet state respectively for illustration. That is, the situation where the intensity of the transmitted light 128 increases refers to the situation from “no” transmitted light 128 to “present” transmitted light 128 , but the present invention is not limited thereto.

In other embodiments, the moisture-sensitive film 106 is, for example, a film that can transmit light in both a dry state and a wet state, and the light transmittance of the moisture-sensitive film 106 increases when it changes from a dry state to a wet state. This results in an increase in the intensity of transmitted light 128 . That is, the situation where the intensity of the transmitted light 128 increases here refers to the situation from “weak” transmitted light 128 to “strong” transmitted light 128 .

In addition, when the light detector 110 detects that the intensity of the transmitted light 128 increases, the alarm 126 sends out an alarm signal. The alarm 126, for example, emits a light signal, a sound signal or a combination of the above signals to attract the attention of the operator. Wherein, there is no specific order between the step of locking the machine and the step of sending the alarm signal, and the step of locking the machine can be performed before or after the step of sending the alarm signal, or can be carried out simultaneously with the step of sending the alarm signal.

Based on the above-mentioned embodiments, it can be seen that when the pipeline leakage detection device 600 is used to monitor the pipeline leakage, when the pipeline 200 produces the leakage 300, the leakage 300 flowing out of the liquid storage space 112 will feel wet. The thin film 106 increases the light transmittance of the moisture-sensitive thin film 106 , thereby increasing the intensity of the transmitted light 128 detected by the light detector 110 . The light detector 110 detects that the intensity of the transmitted light 128 increases, and it can be known that the pipeline 200 has a liquid leakage 300 , so the leakage detection and monitoring of the pipeline 200 can be performed in real time.

In summary, the above embodiment has at least the following advantages:

1. The liquid leakage detection device of the above embodiment can detect and monitor the liquid leakage of the pipeline in real time.

2. The pipeline liquid leakage detection device in the above embodiment adopts a non-contact detection method, so it can prevent industrial safety problems caused by electrical contact with flammable liquids.

Claims (12)

1. pipeline leakage detecting device, it is characterized in that in order to detect a leakage of a pipeline, this pipeline leakage detecting device comprises: sleeve pipe, around this pipeline, a bottom of this sleeve pipe and this pipeline driving fit, and between this sleeve pipe above this bottom and this pipeline, form a liquid holding space; Reflector is arranged on the outer wall of this sleeve pipe; Humidity-sensitive film covers this reflector, and wherein this humidity-sensitive film has one first light transmittance when drying, and with have one second light transmittance after this leakage contacts, and this second light transmittance is greater than this first light transmittance; Light source is in order to shine this humidity-sensitive film; And optical detector, in order to receive a reflected light from this reflector.

2. pipeline leakage detecting device as claimed in claim 1 is characterized in that, has a breach on this sleeve pipe, and this breach is positioned at this humidity-sensitive film top.

3. pipeline leakage detecting device as claimed in claim 1 is characterized in that this sleeve pipe is formed in one or is made from multiple components.

4. pipeline leakage detecting device as claimed in claim 3 is characterized in that, when this sleeve pipe was made up of those parts, this sleeve pipe also comprised a combination apparatus, in order to make up those parts.

5. pipeline leakage detecting device as claimed in claim 1 is characterized in that this sleeve pipe is arranged at an end of this pipeline, and this end is positioned at the low level place of this pipeline.

6. pipeline leakage detecting device as claimed in claim 1 is characterized in that, this light source and this optical detector is formed in one or for device disconnected from each other.

7. pipeline leakage detecting device as claimed in claim 1 is characterized in that, this pipeline leakage detecting device also comprises an alarm buzzer, and it is coupled to this optical detector, and this alarm buzzer sends a warning sign when being used for this catoptrical intensity and increasing.

8. pipeline leakage detecting device as claimed in claim 1 is characterized in that this alarm buzzer comprises the combination of light alarm buzzer, audible alarm or above-mentioned alarm buzzer.

9. pipeline leakage detecting device as claimed in claim 1 is characterized in that, this pipeline comprises in order to coat a temperature-controlled tube of a photoresistance delivery pipe.

10. pipeline leakage detecting device, it is characterized in that in order to detect a leakage of a pipeline, this pipeline leakage detecting device comprises: sleeve pipe, around this pipeline, a bottom of this sleeve pipe and this pipeline driving fit, and between this sleeve pipe above this bottom and this pipeline, form a liquid holding space; Humidity-sensitive film is arranged on the outer wall of this sleeve pipe, and wherein this humidity-sensitive film has one first light transmittance when drying, and with have one second light transmittance after this leakage contacts, and this second light transmittance is greater than this first light transmittance; Light source is in order to shine this humidity-sensitive film; And optical detector, penetrate one of this humidity-sensitive film in order to reception and penetrate light.

11. pipeline leakage detecting device as claimed in claim 10 is characterized in that, has a breach on this sleeve pipe, and this breach is positioned at this humidity-sensitive film top.

12. pipeline leakage detecting device as claimed in claim 10 is characterized in that, this pipeline leakage detecting device also comprises an alarm buzzer, is coupled to this optical detector, be used for this penetrate light intensity when increasing this alarm buzzer send a warning sign.

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