CN202049738U - Master Disk for Blu-ray Disc - Google Patents
Master Disk for Blu-ray Disc Download PDFInfo
- Publication number
- CN202049738U CN202049738U CN2011200966729U CN201120096672U CN202049738U CN 202049738 U CN202049738 U CN 202049738U CN 2011200966729 U CN2011200966729 U CN 2011200966729U CN 201120096672 U CN201120096672 U CN 201120096672U CN 202049738 U CN202049738 U CN 202049738U
- Authority
- CN
- China
- Prior art keywords
- light
- photoresist layer
- ray disc
- absorption layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 230000031700 light absorption Effects 0.000 claims abstract description 48
- 238000003763 carbonization Methods 0.000 claims abstract description 33
- 239000011521 glass Substances 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 13
- 241001025261 Neoraja caerulea Species 0.000 abstract description 5
- 206010070834 Sensitisation Diseases 0.000 abstract description 3
- 230000008313 sensitization Effects 0.000 abstract description 3
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 87
- 238000004528 spin coating Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000000975 dye Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 2
- 235000011613 Pinus brutia Nutrition 0.000 description 2
- 241000018646 Pinus brutia Species 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 206010057040 Temperature intolerance Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 230000008543 heat sensitivity Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012782 phase change material Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010023 transfer printing Methods 0.000 description 1
Images
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
The utility model discloses a mother disk for blue-ray disc, it is formed with a carbonization light-absorption layer between photoresist layer and substrate, and be formed with the photoresist layer on carbonization light-absorption layer, therefore, in follow-up exposure and development process, carbonization light-absorption layer can effectively reduce the reflection of light on the interface, increase the light energy absorption of photoresist layer lower surface, and then improve the absorptivity of light, improve the sensitization resolution ratio of photoresist, with the exposure width that increases the photoresist bottom, make the exposure width of photoresist layer bottom be close to the width of upper surface, increase the slot slope, thereby improve the required precision of slot density in order to satisfy blue-ray disc.
Description
Technical field
The utility model relates to a kind of CD master-disc, relates in particular to a kind of stamper that is applicable to that Blu-ray Disc is used.
Background technology
Blu-ray Disc (Blue-ray Disc, be abbreviated as BD) be a kind of CD storage technique of vast capacity, along with constantly bringing forth new ideas of optical disc, high density compact disc is constantly gushed out, a kind of Blu-ray Disc that has proposed, the recording capacity that it has the about 25GB of single-surface single-layer (Gbytes) perhaps has the recording capacity of the about 50GB of single-surface double-layer; On structure, single-layer blue ray disc has the substrate of 1.1mm thickness, is transferred on the surface of substrate by the pit of injection mo(u)lding operation with stamper (master disc), applies reflectance coating again on substrate, also has overlayer on the reflectance coating; For double-layer blue ray disc, its structure and single layer structure are similar, and it forms the reflectance coating as total reflection film on the thick substrate of 1.1mm, light-transmitting layer also is called the middle layer, it is formed on the reflectance coating, forms semitransparent reflecting film on light-transmitting layer, and is coated with overlayer thereon.
When making Blu-ray Disc, at first apply resist at glass substrate surface, by laser beam exposure pit or channel patterns, have corresponding to the pit of pit on the resist or groove and the dish type stamper of bossing by the formation of developing, utilize this dish type stamper to form metal stamper by plating or sputter, by stamper being attached on the die of injection mo(u)lding operation device, and will be for example the resin of PC etc. be injected in the cavity, thereby form the compact disc substrate that transfer printing has the pit/bossing of stamper; When the compact disc substrate through injection molding be cooled to 30 ℃ or lower after, form reflectance coating by forming a thin metallic film by sputter equipment in pit surface one side; Then, will evenly be coated on the reflection horizon, and the coated film that the UV hardening resin forms is maintained at relative position with the PC film as UV (ultraviolet ray) hardening resin of bonding agent, and bonding subsequently; Then, to the CD irradiation ultraviolet radiation that is bonded with the PC film and this UV hardening resin that hardens, thereby make this compact disc substrate and PC film bonding; In addition, UV constrictive type hard coating material evenly be coated to the bonding PC film of CD on, and by this hard coating material that hardens of irradiation ultraviolet radiation once more, thereby produce a hard coat, finish the preparation of CD thus.
From the manufacturing of above-mentioned Blu-ray Disc, can find out, stamper is the basis of making Blu-ray Disc, because the high-precision requirement of Blu-ray Disc, corresponding stamper also must reach its accuracy requirement, but still do not have special production method at present and make blue light mother disc, but adopt technology and standard 405 nanometer lasers similar to produce to the DVD stamper, it adopts common photoresist process that photoresist is spun on the substrate, with uniform temperature (being generally the 100-150 degree) baking a period of time, promptly be used for behind the natural cooling exposing and developing again.Substrate its etching groove after exposing of this method preparation presents down trapezoidal shape, be that upper surface is broad, the bottom is narrow, its edge gradient is bigger, and the reason that produces this phenomenon is that photoresist is subjected to light inhomogeneous on the cross section, and upper surface is subjected to light more, lower surface is because light attenuation, be subjected to light less, this cross sectional shape is unfavorable for improving groove density, and therefore common photoresist imprinting precision can not reach the requirement of Blu-ray Disc.
Can't improve in technology under the situation of its precision, some special materials are used to it and produce to improve precision, and phase-change material (PTM) and dyestuff polymkeric substance (Dye Polymer) etc. are adopted in blue light mother disc production at present more; The PTM material is because only to the heat sensitivity, thus under the irradiation of same size laser facula, can produce exposure less than spot size, but PTM material price costliness is difficult for acquisition; The Dye Polymer gasification of then under laser radiation, being heated, therefore the zone of shining can stay sunk structure, but because it can discharge gas in photoetching process, pollute the object lens of laser cutter, therefore need in the imprinting process, increase laser intensity gradually, increase the complicacy of laser cutter, and also need regularly object lens to be cleaned.
Therefore, be badly in need of a kind of available common photoresist process production, and the stamper that can satisfy the Blu-ray Disc accuracy requirement is again separated above-mentioned the deficiencies in the prior art.
The utility model content
The purpose of this utility model is to provide a kind of Blu-ray Disc stamper, and it can adopt common photoresist process manufacturing, and can satisfy the Blu-ray Disc accuracy requirement again.
For achieving the above object, the technical solution of the utility model is: a kind of Blu-ray Disc stamper is provided, it comprises substrate, carbonization light-absorption layer and photoresist layer, described carbonization light-absorption layer is formed on the side of described substrate, described photoresist layer is formed on the described carbonization light-absorption layer, and described photoresist layer forms the concave-convex structure.
Preferably, the thickness of described carbonization light-absorption layer is 100 nanometers.
Preferably, described substrate is glass substrate or silicon chip.
Compared with prior art, the utility model Blu-ray Disc has a carbonization light-absorption layer with stamper, and the carbonization light-absorption layer forms on substrate earlier before forming photoresist layer, photoresist layer is formed on the carbonization light-absorption layer, therefore, in follow-up exposure and developing process, the carbonization light-absorption layer can effectively reduce the reflection of laser beam on the interface, the luminous energy that increases the photoresist layer lower surface absorbs, improve the sensitization resolution of photoresist by the absorptivity that improves light,, make the width of the exposure width of photoresist layer bottom near upper surface to increase the exposure width of photoresist layer bottom, increase the groove slope, thereby improve groove density to satisfy the accuracy requirement of Blu-ray Disc.
Description of drawings
The structural representation of Fig. 1 when to be the utility model Blu-ray Disc with stamper unexposed.
Fig. 2 is the structural representation of the utility model Blu-ray Disc with stamper.
Fig. 3 is the view that the utility model Blu-ray Disc is toasted with stamper.
Embodiment
With reference now to accompanying drawing, describe embodiment of the present utility model, the similar elements label is represented similar elements in the accompanying drawing.
As shown in Figure 1 and Figure 2, the Blu-ray Disc stamper 1 that utilizes the utility model Blu-ray Disc to obtain with the stamper manufacture method, it comprises substrate 10, carbonization light-absorption layer 20 and photoresist layer 30, substrate 10 is glass substrate or silicon chip, described carbonization light-absorption layer 20 is formed on the side of described substrate 10, the thickness of carbonization light-absorption layer 20 is preferably 100 nanometers, described photoresist layer 30 is formed on the described carbonization light-absorption layer 20, and be formed with groove 31 on the described photoresist layer 30, so that photoresist layer 30 forms the concave-convex structure.
Correspondingly, make the method for the utility model Blu-ray Disc, comprise the steps: with stamper
(1) spin coating forms a light-absorption layer on a side of clean substrate;
(2) spin coating there is the substrate of light-absorption layer send into baker, described light-absorption layer is toasted it is added at high temperature pine for carbonization, form the carbonization light-absorption layer;
(3) room temperature is exported and naturally cooled to the substrate that will be formed with the carbonization light-absorption layer;
(4) spin coating one deck photoresist on described carbonization light-absorption layer forms photoresist layer;
(5) spin coating there is the substrate of photoresist layer send into baker, described photoresist layer is toasted;
(6) substrate after will toasting carries out exposure-processed, and described photoresist layer exposes;
(7) substrate after exposure-processed is carried out development treatment, make photoresist layer form the concave-convex structure;
(8) on the photoresist layer that forms the concave-convex structure, electroplate a metallic diaphragm.
For guaranteeing to be used for to make the cleanliness of the substrate of stamper, also comprise the step of described substrate being carried out surface clean before in above-mentioned steps (1); And before on-chip light-absorption layer is toasted, earlier the hot plate in the baking oven is carried out preheating, the hot plate in the baker is heated to 250 ℃, to satisfy the needs of follow-up baking light-absorption layer.
The above-mentioned step that makes its carbonization and form the carbonization light-absorption layer that described light-absorption layer is toasted, specifically comprise: have the substrate of light-absorption layer to send in the baker spin coating, and place 10 millimeters places, hot plate top, to described light-absorption layer baking 30 minutes, finish baking for the first time; To move to 2 millimeters places, hot plate top through the substrate of baking for the first time,, finish baking for the second time described light-absorption layer baking 120 seconds; To move to the contact hot plate through the substrate of baking for the second time,, finish baking for the third time, and make the light-absorption layer carbonization form the carbonization light-absorption layer described light-absorption layer baking 900 seconds.
Step to on-chip photoresist layer toasts specifically also comprises: have the substrate of photoresist layer to send in the baker spin coating, and place 2 millimeters places, hot plate top, to described photoresist layer baking 120 seconds, finish baking first; To move to the contact hot plate through the substrate after the baking first, described photoresist layer will be toasted 900 seconds once more, finish baking described photoresist layer; And before the photoresist layer that spin coating forms on to substrate toasts, also need baker is carried out preheating, the hot plate in the baker is heated to 110 ℃, to satisfy the needs of baking photoresist layer.
In conjunction with Fig. 1-Fig. 3, the manufacture process of the utility model Blu-ray Disc with stamper 1 described.Preparatory stage cleans to obtain clean substrate glass substrate 10 earlier, and behind the beginning stamper production routine, at first spin coating forms a light-absorption layer 20 on a side of glass substrate 10, and the thickness of light-absorption layer 20 is preferably 100nm; Then spin coating being had the glass substrate 10 of light-absorption layer 20 to send into baker toasts, and between glass substrate 10 is admitted to, preheating is carried out in baker inside, hot plate in the baker 2 is heated to 250 ℃, after glass substrate 10 is admitted to baker, earlier it is positioned over 10 millimeters places, hot plate 2 tops, shown in (a) among Fig. 3, light-absorption layer 20 to glass substrate 10 carries out the baking first time, and stoving time is 30 minutes; And then glass substrate 10 moved to 2 millimeters places, hot plate 2 tops, and shown in (b) among Fig. 3, the light-absorption layer 20 of glass substrate 10 being carried out the baking second time, stoving time is baking 120 seconds; At last glass substrate 10 is moved to and be contacted with on the hot plate 2, shown in (c) among Fig. 3,, finish baking for the third time light-absorption layer 20 bakings of glass substrate 10 900 seconds; Through three bakings, light-absorption layer 20 on the glass substrate 10 is added at high temperature pine for being carbonized fully, form the carbonization light-absorption layer; After baking is finished, will be formed with the substrate output of carbonization light-absorption layer 20, and naturally cool to room temperature; Follow spin coating one deck photoresist on the carbonization light-absorption layer 20 that forms, form photoresist layer 30, after finishing, spin coating needs photoresist layer 30 is dried, so that expose with development treatment, therefore, needing have the glass substrate 10 of photoresist layer 30 to send into baker interior focusing glue-line 30 at quarter spin coating toasts, particularly, before glass substrate 10 is admitted to baker, the hot plate in the baker 2 is preheated to 110 ℃, the glass substrate 10 that will have photoresist layer 30 is then sent in the baker, and place 2 millimeters places, hot plate 2 tops, shown in (b) among Fig. 3,, will move to through the glass substrate 10 after the baking again and be contacted with on the hot plate 2 described photoresist layer 30 bakings 120 seconds, shown in (c) among Fig. 3, described photoresist layer 30 was toasted 900 seconds once more, finish baking described photoresist layer 30, and the output cooling; At last cooled substrate is carried out exposure-processed, described photoresist layer 30 exposes, and the substrate after exposure-processed carried out development treatment, make and be formed with groove 31 on the photoresist layer 30, even photoresist layer 30 forms the concave-convex structure, on the photoresist layer 30 that forms the concave-convex structure, electroplate a metallic diaphragm again, obtain complete Blu-ray Disc stamper.
Because the utility model Blu-ray Disc stamper, it is before forming photoresist layer 30, on substrate, form one deck carbonization light-absorption layer 20 earlier, and photoresist layer 30 is formed on the carbonization light-absorption layer 20, therefore, in follow-up exposure and developing process, carbonization light-absorption layer 20 can effectively reduce the reflection of light on the interface, the luminous energy that increases photoresist layer 30 lower surfaces absorbs, improve photoresist sensitization resolution by the absorptivity that improves light,, make the width of the exposure width of photoresist layer 30 bottoms near upper surface to increase the exposure width of photoresist layer 30 bottoms, increase the groove slope, thereby improve groove density to satisfy the accuracy requirement of Blu-ray Disc.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (3)
1. Blu-ray Disc stamper, it is characterized in that, comprise substrate, carbonization light-absorption layer and photoresist layer, described carbonization light-absorption layer is formed on the side of described substrate, described photoresist layer is formed on the described carbonization light-absorption layer, and described photoresist layer forms the concave-convex structure.
2. Blu-ray Disc stamper as claimed in claim 1 is characterized in that, the thickness of described carbonization light-absorption layer is 100 nanometers.
3. Blu-ray Disc stamper as claimed in claim 1 is characterized in that, described substrate is glass substrate or silicon chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200966729U CN202049738U (en) | 2011-04-02 | 2011-04-02 | Master Disk for Blu-ray Disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200966729U CN202049738U (en) | 2011-04-02 | 2011-04-02 | Master Disk for Blu-ray Disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202049738U true CN202049738U (en) | 2011-11-23 |
Family
ID=44990039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011200966729U Expired - Fee Related CN202049738U (en) | 2011-04-02 | 2011-04-02 | Master Disk for Blu-ray Disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202049738U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102270472A (en) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Motherboard for blueray optical disc and manufacturing method for motherboard |
-
2011
- 2011-04-02 CN CN2011200966729U patent/CN202049738U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102270472A (en) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Motherboard for blueray optical disc and manufacturing method for motherboard |
| CN102270472B (en) * | 2011-04-02 | 2013-11-27 | 河南凯瑞数码股份有限公司 | Motherboard for blueray optical disc and manufacturing method for motherboard |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6022604A (en) | Optical disk mastering system | |
| TWI344643B (en) | Method of manufacturing an optical data storage medium, optical data storage medium and apparatus for performing said method | |
| CN102270472B (en) | Motherboard for blueray optical disc and manufacturing method for motherboard | |
| CN202049738U (en) | Master Disk for Blu-ray Disc | |
| TW200307940A (en) | Method of manufacturing multi-layer optical information recording medium and the apparatus of the same | |
| JP4080741B2 (en) | Multilayer optical recording medium manufacturing method and multilayer optical recording medium | |
| WO2003041070A1 (en) | Method for manufacturing stamper for information medium and device for manufacturing stamper for information medium | |
| CN1244101C (en) | Optical recording medium and manufacturing method thereof | |
| KR20050007458A (en) | Stamper original and its manufacturing method, stamper and its manufacturing method, and optical disk | |
| CN101300632B (en) | Method and apparatus for producing optical recording medium | |
| CN201965910U (en) | Blu-ray disc mastering system | |
| TW200832392A (en) | Method and apparatus for manufacturing optical recording medium | |
| JP4397884B2 (en) | Method for forming fine pattern, method for manufacturing master for optical memory device, master for optical memory device, stamper for optical memory device, and optical memory device | |
| CN102054499B (en) | Blu-ray disc master disk manufacturing system and method | |
| KR0176817B1 (en) | Optical disk manufacturing method | |
| US20040166446A1 (en) | Method for manufacturing metal master of information recording disc and metal master | |
| JPH11345431A (en) | Information recording medium | |
| JP2009245508A (en) | Optical information recording medium | |
| CN201965909U (en) | Mother disc heating mechanism for Blue-ray disc | |
| KR20050025881A (en) | Recorded master for manufacturing information storage medium and method of manufacturing the same | |
| JP4014341B2 (en) | Stamper for optical disk substrate molding | |
| JP2000251335A (en) | Production of optical information recording medium | |
| JP2008192237A (en) | Transparent stamper and method for manufacturing transparent stamper | |
| JP2008217932A (en) | Manufacturing method of optical disk | |
| JP2010143161A (en) | Mold, optical substrate, and method for manufacturing the mold |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Henan Kerry Digital Co., Ltd. Assignor: Dongguan Hongwei Digital Machinery Co., Ltd. Contract record no.: 2012410000093 Denomination of utility model: Motherboard for blueray optical disc and manufacturing method for motherboard Granted publication date: 20111123 License type: Exclusive License Record date: 20121227 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| ASS | Succession or assignment of patent right |
Owner name: HE'NAN KERRY DIGITAL CO., LTD. Free format text: FORMER OWNER: DONGGUAN HONGWEI DIGITAL MACHINERY CO., LTD. Effective date: 20130702 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 523000 DONGGUAN, GUANGDONG PROVINCE TO: ANYANG, GUANGDONG PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130702 Address after: Eastern section of Haihe River Road, hi tech Industrial Development Zone, Anyang, Guangdong Patentee after: Henan Kerry Digital Co., Ltd. Address before: 523000, Guangdong City, Dongguan Province grand ambitious hi tech Development Zone Patentee before: Dongguan Hongwei Digital Machinery Co., Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Motherboard for blueray optical disc and manufacturing method for motherboard Effective date of registration: 20130918 Granted publication date: 20111123 Pledgee: Beijing AVIC Information Technology Co., Ltd. Pledgor: Henan Kerry Digital Co., Ltd. Registration number: 2013990000685 |
|
| PLDC | Enforcement, change and cancellation of contracts on pledge of patent right or utility model | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20131205 Granted publication date: 20111123 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20140905 Granted publication date: 20111123 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20140905 Granted publication date: 20111123 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20150905 Granted publication date: 20111123 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20150905 Granted publication date: 20111123 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20160305 Granted publication date: 20111123 |
|
| PP01 | Preservation of patent right |
Effective date of registration: 20160305 Granted publication date: 20111123 |
|
| RINS | Preservation of patent right or utility model and its discharge | ||
| PD01 | Discharge of preservation of patent |
Date of cancellation: 20210402 Granted publication date: 20111123 |
|
| PD01 | Discharge of preservation of patent | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111123 Termination date: 20140402 |