CN202030822U - Exhaust pipe system suitable for large chemical vapor deposition furnace - Google Patents
Exhaust pipe system suitable for large chemical vapor deposition furnace Download PDFInfo
- Publication number
- CN202030822U CN202030822U CN2010206877103U CN201020687710U CN202030822U CN 202030822 U CN202030822 U CN 202030822U CN 2010206877103 U CN2010206877103 U CN 2010206877103U CN 201020687710 U CN201020687710 U CN 201020687710U CN 202030822 U CN202030822 U CN 202030822U
- Authority
- CN
- China
- Prior art keywords
- chemical vapor
- vapor deposition
- exhaust pipe
- pipe system
- air outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 22
- 210000003437 trachea Anatomy 0.000 claims description 8
- 239000000463 material Substances 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- 239000007770 graphite material Substances 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 239000011204 carbon fibre-reinforced silicon carbide Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Images
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
The utility model discloses an exhaust pipe system suitable for a large chemical vapor deposition furnace, wherein a horn-shaped air inlet (1) is connected with an exhaust pipe (2). The exhaust pipe system can guarantee the uniformity of the chemical vapor deposition of large materials or products and particularly materials or products of large heights and sizes, and is simple in structure, reliable in performance, convenient to manufacture, low in cost and suitable for the large chemical vapor deposition furnace.
Description
Technical field
The utility model relates to a kind of air outlet duct system that is applicable to large-scale chemical vapor deposition stove.
Background technology
Chemical vapour deposition is a kind of processing method that is widely used in producing type material (as matrix materials such as C/C, C/SiC, SiC/SiC).Along with development, the development of technology of society, numerous areas such as space flight, aviation, traffic have had higher requirement to the chemical vapour deposition material, and the size of material or goods is to large scale development.Deposition uniformity is a crucial quality index of chemical vapour deposition, but owing to be not applicable to the deposition air-channel system of large-scale chemical vapor deposition stove at present, guarantee that large-scale (particularly height dimension is very big) material or goods chemical vapour deposition homogeneity are but very difficult, the exploitation that this has just hindered large-scale chemical vapor deposition stove has restricted the chemical vapour deposition of large-scale (particularly height dimension is very big) material or goods.And in the deposition air-channel system, air outlet duct system is again very crucial device, and present air outlet duct system all can not be applicable to the deposition air-channel system of large-scale chemical vapor deposition stove.
The utility model content
The technical problems to be solved in the utility model provides a kind of energy and guarantees very big material or the inhomogeneity air outlet duct system that is applicable to large-scale chemical vapor deposition stove of goods chemical vapour deposition of large-scale particularly height dimension.
In order to solve the problems of the technologies described above, the air outlet duct system that is applicable to large-scale chemical vapor deposition stove that the utility model provides, horn-like inlet mouth is connected with trachea.
Horn-like inlet mouth and trachea are made by graphite material.
Adopt the air outlet duct system that is applicable to large-scale chemical vapor deposition stove of technique scheme, the vapor pipe comparison with general chemical vapor deposition stove the utlity model has following advantage:
1, vapor pipe adopts horn-like inlet mouth, and the getter area is big, helps the discharging of tail gas and stablizing of airflow field.
2, the inlet mouth of air outlet duct system helps preventing gas deposition obstruction in pipe from large to small.
In sum, the utility model is a kind ofly can guarantee material that large-scale particularly height dimension is very big or goods chemical vapour deposition homogeneity and simple in structure, dependable performance, the air outlet duct system that is applicable to large-scale chemical vapor deposition stove easily manufactured, with low cost.
Description of drawings
Fig. 1 is a cross-sectional view of the present utility model.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Referring to Fig. 1, horn-like air outlet 1 is connected with trachea 2, and horn-like air outlet 1 and trachea 2 are made by graphite material.
Referring to Fig. 1, the trachea 2 of air outlet duct system shown in the figure places the outside of sediment chamber, heating element and the heat insulation flue of cvd furnace, promptly places the cold-zone, and 1 of horn-like inlet mouth places in the sediment chamber.Post-depositional tail gas is collected by the horn-like air outlet 1 of air outlet duct system, is discharged by trachea 2 again.Since air intake duct system from horn-like air outlet 1 to trachea 2 in it hole dimension from large to small, and inlet end is arranged in the cold-zone, prevented that effectively gas from manufacturing into obstruction at inner hole deposition.
Claims (1)
1. air outlet duct system that is applicable to large-scale chemical vapor deposition stove, it is characterized in that: horn-like inlet mouth (1) is connected with trachea (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206877103U CN202030822U (en) | 2010-12-29 | 2010-12-29 | Exhaust pipe system suitable for large chemical vapor deposition furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010206877103U CN202030822U (en) | 2010-12-29 | 2010-12-29 | Exhaust pipe system suitable for large chemical vapor deposition furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202030822U true CN202030822U (en) | 2011-11-09 |
Family
ID=44893127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010206877103U Expired - Lifetime CN202030822U (en) | 2010-12-29 | 2010-12-29 | Exhaust pipe system suitable for large chemical vapor deposition furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202030822U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104278322A (en) * | 2013-07-03 | 2015-01-14 | 住友电气工业株式会社 | Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate |
| CN111379020A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | Chemical vapor deposition's sample placer and tube furnace |
-
2010
- 2010-12-29 CN CN2010206877103U patent/CN202030822U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104278322A (en) * | 2013-07-03 | 2015-01-14 | 住友电气工业株式会社 | Method of manufacturing silicon carbide single crystal and silicon carbide single crystal substrate |
| CN111379020A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | Chemical vapor deposition's sample placer and tube furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201942748U (en) | Gas inlet pipe system suitable for large-size chemical vapor deposition furnace | |
| CN102305181B (en) | Power generating device of combining solar energy with wind energy | |
| CN202030822U (en) | Exhaust pipe system suitable for large chemical vapor deposition furnace | |
| CN204006085U (en) | Flue gas waste heat recovery kitchen range | |
| CN204902545U (en) | Oven waste gas system of recycling | |
| CN204752905U (en) | A exhaust duct for vertical pulling silicon single crystal stove exhaust system | |
| CN204443992U (en) | Foodstuff drying device | |
| CN104451601B (en) | Atmospheric-pressure chemical vapor deposition coating reactor | |
| CN201967622U (en) | Drying oven | |
| CN103550944A (en) | Vacuumizing device for vacuum oven | |
| CN203224125U (en) | Exhaust system for solar sintering furnace | |
| CN201962408U (en) | Crucible shaft jacket for Czochralski single crystal furnace | |
| CN206019371U (en) | Waste-heat recovery device | |
| CN202214393U (en) | Steel cylinder quenching and tempering device | |
| CN204943600U (en) | A kind of environmental-friendly kitchen ventilator | |
| CN202881163U (en) | Hot-air apparatus in air-conveying system for producing carbon black | |
| CN202485336U (en) | Material drying system | |
| CN203577348U (en) | Vacuuming device used in vacuum oven | |
| CN203848608U (en) | Horizontal drying device | |
| CN201470286U (en) | Air inlet device used for removable adsorber | |
| CN201933152U (en) | Deposition gas-path system applicable to large chemical vapor deposition furnace | |
| CN109745821A (en) | A kind of device for recovering tail gas | |
| CN203375832U (en) | Large particle material heating device | |
| CN203362625U (en) | Circular pipeline draught fan | |
| CN209362139U (en) | A kind of contraction type unit of exhausting waste gas of kneader |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: YANG JIANGAO TAN XINGLONG Effective date: 20130208 Owner name: HUNAN DINGLI TECHNOLOGIES CO., LTD. Free format text: FORMER OWNER: DAI YU Effective date: 20130208 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20130208 Address after: 410118 Hunan province Changsha Zhongyi road two top technology park Muyun Industrial Zone Patentee after: Advanced Corporation for Materials & Equipments Co., Ltd. Address before: 410118 Hunan province Changsha Zhongyi road two top technology park Muyun Industrial Zone Patentee before: Dai Yu Patentee before: Yang Jiangao Patentee before: Tan Xinglong |
|
| CX01 | Expiry of patent term |
Granted publication date: 20111109 |
|
| CX01 | Expiry of patent term |