CN202030645U - Metal mould for manufacturing crucible - Google Patents
Metal mould for manufacturing crucible Download PDFInfo
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- CN202030645U CN202030645U CN 201120164939 CN201120164939U CN202030645U CN 202030645 U CN202030645 U CN 202030645U CN 201120164939 CN201120164939 CN 201120164939 CN 201120164939 U CN201120164939 U CN 201120164939U CN 202030645 U CN202030645 U CN 202030645U
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- crucible
- metal die
- side wall
- vacuumizes
- macropore
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a metal mould for manufacturing a crucible, and belongs to the technical field of a high-temperature smelting mould. The metal mould comprises an outer wall and an inner cavity, wherein the outer wall comprises a side wall and a bottom; the cylindrical side wall is divided into a side wall upper part and a side wall lower part; the side wall upper part is thicker than the side wall lower part; the bottom is thicker than the side wall upper part; a large vacuuming hole is longitudinally formed in the cylindrical side wall, a small vacuuming hole A is transversely formed in the cylindrical side wall, and a small vacuuming hole B is longitudinally formed at the bottom; the internal diameter of the metal mould for the crucible is 16 to 26 inches; the thickness (s) of the side wall upper part is 30mm to 60mm; the height of the side wall upper part is 60 to 90 percent of the total height; the thickness (h) of the center at the bottom is 40mm to 80mm; the diameter phi 1 of the large vacuuming hole is 8mm to 18mm; and the diameters phi 2 and phi 3 of the small vacuuming holes A and B are equal to each other and are both 3mm to 9mm. The metal mould has the advantages of rationally designing the overall structure, including thickness and eyelets, keeping certain strength at a high temperature, avoiding deformation and prolonging the service life of a product.
Description
Technical field
The utility model is a kind of crucible metal die, and particularly a kind of making quartz crucible metal die belongs to the high melt technical field of mold.
Background technology
Translucent quartz crucible with the electric arc legal system is to draw large-diameter monocrystalline silicon, and the requisite base mateiral of development large-scale integrated circuit is as sun power, the requisite container of semicon industry Czochralski technique (cz) pulling monocrystal silicon.The quality of quartz crucible directly has influence on the purity and the cost of semiconductor material.When making quartz crucible, must keep the crucible die inner chamber is vacuum state, because at high temperature melting, quartz sand (sio2) produces a lot of gases, if vacuum tightness is not enough, gas can not be discharged when founding crucible fully, the whole sidewall of crucible of being made under ultramicroscopic observation has a lot of micro-bubbles, because the bubble of sidewall of crucible is a lot, the situation therapeutic method to keep the adverse qi flowing downward that temperature is very high when the pulling monocrystal generation swelling fracture of steeping oneself-meeting causes gas after the crucible bubble breaks and impurity just to sneak in the pulled crystal rod, makes monocrystalline oxygen level height, density difference, purity is affected, and net result is that monocrystalline silicon piece is not long work-ing life, and turnover ratio is not up to standard.When making quartz crucible now, adopt graphite crucible mold usually, under high temperature fused state, easily fall slag, vacuum pumping rate is affected, also directly have influence on the purity and the quality product of quartz crucible; Graphite crucible mold needs watercooling jacket, complex structure; And graphite crucible mold is easily loss at high temperature, and work-ing life is short.
The utility model content
The purpose of this utility model is in the above-mentioned prior art, graphite crucible mold is when making, easily falling slag under high temperature fused state is affected vacuum pumping rate, also directly have influence on the purity and the quality product of quartz crucible, and easy loss under complex structure, the high temperature, the defective that work-ing life is short, a kind of crucible metal die is provided, can reach a high temperature down Stability Analysis of Structures, do not fall slag, internal structure can be guaranteed vacuum pumping rate, guarantee quality product, assembling is simple, the purpose of long service life.
The technical scheme taked of the utility model is to achieve these goals: a kind of making crucible metal die, comprise outer wall and inner chamber, described outer wall comprises sidewall and bottom, described sidewall is cylindrical, the shape of described inner chamber is corresponding with the crucible profile, described cylindrical side wall is divided into side wall upper part, lower sidewall, and wall top is thicker than lower sidewall, and the bottom is thicker than side wall upper part; In the described cylindrical side wall, be vertically arranged with and vacuumize macropore, the described upper end that vacuumizes macropore is a blind hole, and the lower end and the crucible that vacuumize macropore are interlinked to the outside with metal die sidewall bottom, and become circumferential to arrange in metal die sidewall bottom; In the cylindrical side wall, be horizontally arranged with and vacuumize aperture A, vacuumize aperture A one end and communicate with inner chamber, the other end with vacuumize macropore and communicate, described crucible is vertically arranged with the metal die bottom and vacuumizes aperture B, and the upper end that vacuumizes aperture B communicates with inner chamber, its lower end and crucible exterior; Described crucible is corresponding with the crucible size of made with the metal die internal diameter size, is the 16-26 inch; Described crucible is 35-60mm with metal die upper side wall thickness (s); The height of described upper portion side wall is the 60%-90% of crucible with the metal die total height; Described bottom centre thickness (h) is 40-80mm; The described diameter that vacuumizes macropore is that φ 1 is 7-18mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3-9mm.
Crucible is more thick and heavy with the metal die bottom, is to guarantee its whole on-deformable essential condition; Crucible is generally yielding with the top of metal die, so upper portion side wall than lower side wall thickness, and when to have only height when upper portion side wall be crucible with the 60%-90% of metal die total height, could prevent the upper portion side wall distortion most effectively; In general, when crucible is big with the metal die diameter, selected upper portion side wall thickness, the diameter that vacuumizes macropore and the described diameter that vacuumizes aperture A, B are bigger comparatively speaking.Because crucible is thicker than lower sidewall with the metal die side wall upper part, and the shape of its inner chamber is corresponding with the crucible profile, so, the crucible cylindrical diameter of the cylindrical diameter of metal die lower sidewall less than side wall upper part, between cylindrical side wall top and cylindrical side wall bottom, form a ring-shaped step, when its purpose was to assemble, crucible was easy to the collet fit with the metal die bottom, and it is firm that crucible is installed with metal die.
Described crucible is 16 inches with the metal die internal diameter size; Described crucible is 35mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 40mm; The described diameter phi 1 that vacuumizes macropore is 7mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3mm.
Described crucible is 18 inches with the metal die internal diameter size; Described crucible is 40mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 50mm; The described diameter phi 1 that vacuumizes macropore is 8mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3.5mm.
Described crucible is 20 inches with the metal die internal diameter size; Described crucible is 45mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 60mm; The described diameter phi 1 that vacuumizes macropore is 10mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 4mm.
Described crucible is 22 inches with the metal die internal diameter size; Described crucible is 50mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 65mm; The described diameter phi 1 that vacuumizes macropore is 12mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 5mm.
Described crucible is 24 inches with the metal die internal diameter size; Described crucible is 55mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 70mm; The described diameter phi 1 that vacuumizes macropore is 15mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 7mm.
Described crucible is 26 inches with the metal die internal diameter size; Described crucible is 60mm with metal die side wall upper part thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 80mm; The described diameter phi 1 that vacuumizes macropore is 18mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 9mm.
Describedly vacuumize macropore setting parallel to each other on cylindrical side wall, equidistantly distribute; The described aperture A that vacuumizes vertically vacuumizes to be on the macropore at each and equidistantly distributes; Each vacuumizes on the macropore, from top to bottom identical ordinal number vacuumize aperture A, be distributed on the same of cylindrical side wall and the parallel annular cross section, bottom surface; The described aperture B that vacuumizes uses on the equal concentric(al) circles of each difference in internal diameters of metal die bottom at crucible, is to equidistantly distribute.
Described crucible uses metal die by the spheroidal graphite cast iron manufacturing.
Compared with prior art, the beneficial effects of the utility model are:
(1) good mechanical property, long service life: described crucible is made by spheroidal graphite cast iron QT450-10, QT500-7, QT600-3 or QT700-2 with metal die, the fusing point height of spheroidal graphite cast iron, can be high temperature resistant, and have comprehensive mechanical performances such as advantages of higher tensile strength, yield strength, plasticity, impelling strength, easy at normal temperatures perforation processing, and under the high temperature of crucible for smelting, can keep certain intensity, indeformable, not oxidation.Compare with graphite jig with former crucible, the workmanship of crucible obviously improves, the disadvantageous effect that the impurity of having avoided the graphite thawing to be produced produces crucible; And the work-ing life of having improved crucible usefulness mould greatly, crucible can only use 50-100 time with graphite jig, and existing crucible can use 500-1000 time with metal die.
(2) integral thickness is reasonable in design, not yielding: because described crucible metal die reasonable in design, the bottom is the thickest, the thickness of upper portion side wall is thicker than the bottom, and the height of its upper portion side wall reaches the 60%-90% of crucible with the metal die total height, thereby has guaranteed that crucible is not yielding at the high melt state with metal die.
(3) eyelet is provided with and is beneficial to extracting vacuum: be distributed in the bottom of crucible with metal die owing to vacuumize macropore with the outlet that vacuumizes aperture A, B, can make the designs simplification that vacuumizes, as long as it is just passable with the bottom of metal die one tightness system to be set at crucible; Simultaneously, the efficient that vacuumizes also is improved.
(4) the eyelet setting can be played effect of heat insulation: because crucible is used the sidewall and the bottom of metal die, respectively be intensively distributed with and vacuumize macropore, vacuumize aperture A, B, in working order, vacuumize macropore, vacuumize and all be vacuum state in aperture A, the B, thereby generation effect of heat insulation, need not ambient temperature is remained in the allowed band of workman's operation with the water jacket cooling.
(5) the eyelet setting is considered the homogeneity of bulk strength and is simplified technology: because crucible metal die side wall inner surface, 4 the adjacent aperture A that vacuumize in upper and lower, left and right are square profile, and vacuumize aperture B, on the concentric(al) circles that crucible equates with each difference in internal diameters of metal die bottom, be and equidistantly distribute, like this, not only make the shape that vacuumizes aperture A, B distribution attractive in appearance, the more important thing is and to guarantee the homogeneity of crucible with metal die intensity, increase its work-ing life, complete processing is simplified.
If crucible metal die side wall inner surface, 4 the adjacent aperture A that vacuumize in upper and lower, left and right are parallelogram arrangement clocklike, that also belongs to design scope of the present utility model, also can guarantee the homogeneity of crucible with metal die intensity, but will inevitably make complete processing complicated, so be worthless.
Description of drawings
Accompanying drawing 1: the utility model front view;
Accompanying drawing 2: the utility model vertical view;
The A-A sectional view of accompanying drawing 3: Fig. 2;
Accompanying drawing 4: the utility model upward view;
The B-B sectional view of accompanying drawing 5: Fig. 3.
Description of reference numerals: 1 sidewall, 101 side wall upper part, 102 lower sidewall, 103 vacuumize macropore, 104 and vacuumize aperture A, 105 ring-shaped steps, 2 bottoms, 201 and vacuumize aperture B.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments, but not as to qualification of the present utility model.
Embodiment 1:
Shown in Fig. 1-5, a kind of making crucible metal die, comprise outer wall and inner chamber, described outer wall comprises sidewall 1 and bottom 2, described sidewall is cylindrical, and the shape of described inner chamber is corresponding with the crucible profile, and described cylindrical side wall 1 is divided into side wall upper part 101, lower sidewall 102, wall top 101 is thicker than lower sidewall 102, and bottom 2 is thicker than side wall upper part 101; In the described cylindrical side wall 1, be vertically arranged with and vacuumize macropore 103, the described upper end that vacuumizes macropore 103 is a blind hole, and the lower end and the crucible that vacuumize macropore 103 are interlinked to the outside with metal die sidewall 1 bottom, and becomes circumferential to arrange in metal die sidewall 1 bottom; In the cylindrical side wall 1, be horizontally arranged with and vacuumize aperture A104, vacuumizing aperture A104 one end communicates with inner chamber, the other end with vacuumize macropore 103 and communicate, described crucible is vertically arranged with metal die bottom 2 and vacuumizes aperture B201, the upper end that vacuumizes aperture B201 communicates with inner chamber, its lower end and crucible exterior; Described crucible is 16 inches with the metal die internal diameter size; Described crucible is 35mm with metal die side wall upper part 101 thick (s); The height of described upper portion side wall is 80% of a crucible usefulness metal die total height; Described bottom 2 center thicknesses (h) are 40mm; The described diameter that vacuumizes macropore is that φ 1 is 7mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3mm.Because crucible is thicker than lower sidewall 102 with metal die side wall upper part 101, and the shape of its inner chamber is corresponding with the crucible profile, so, the crucible cylindrical diameter of the cylindrical diameter of metal die lower sidewall 102 less than side wall upper part 101 forms a ring-shaped step 105 between cylindrical side wall top 101 and cylindrical side wall bottom 102.
Describedly vacuumize macropore 103 setting parallel to each other on cylindrical side wall 1, equidistantly distribute; The described aperture A104 that vacuumizes vertically vacuumizes to be on the macropore 103 at each and equidistantly distributes; Each vacuumizes on the macropore 103, identical ordinal number vacuumizes aperture A104 from top to bottom, be distributed on the same of cylindrical side wall 1 and the parallel annular cross section, bottom surface, so actually, make crucible metal die sidewall 1 inner face, 4 the adjacent aperture A104 that vacuumize in upper and lower, left and right are square profile; The described aperture B201 that vacuumizes uses on the equal concentric(al) circles of metal die bottom 2 each difference in internal diameters at crucible, is to equidistantly distribute.
Described crucible uses metal die by the spheroidal graphite cast iron manufacturing.
Embodiment 2-6:
Shown in Fig. 1-5, a kind of making crucible metal die, its internal diameter, sidewall thickness (s), bottom centre's thickness (h) vacuumize macropore diameter phi 1 and vacuumize aperture A, B diameter phi 2, φ 3 as shown in the table:
Surplus with embodiment 1.
Above-described embodiment, the utility model 6 kinds of embodiment more preferably just, the common variation that those skilled in the art carries out in the technical solutions of the utility model scope and replacing all should be included in the protection domain of the present utility model.
Claims (8)
1. making crucible metal die, comprise outer wall and inner chamber, described outer wall comprises sidewall and bottom, described sidewall is cylindrical, the shape of described inner chamber is corresponding with the crucible profile, it is characterized in that: described cylindrical side wall is divided into side wall upper part, lower sidewall, and side wall upper part is thicker than lower sidewall, and the bottom is thicker than side wall upper part; In the described cylindrical side wall, be vertically arranged with and vacuumize macropore, the described upper end that vacuumizes macropore is a blind hole, and the lower end and the crucible that vacuumize macropore are interlinked to the outside with metal die sidewall bottom, and become circumferential to arrange in metal die sidewall bottom; In the cylindrical side wall, be horizontally arranged with and vacuumize aperture A, vacuumize aperture A one end and communicate with inner chamber, the other end with vacuumize macropore and communicate, described crucible is vertically arranged with the metal die bottom and vacuumizes aperture B, and the upper end that vacuumizes aperture B communicates with inner chamber, its lower end and crucible exterior; Described crucible is corresponding with the crucible size of made with the metal die internal diameter size, is the 16-26 inch; Described crucible is 35-60mm with metal die side wall upper part thick (s); The height of described side wall upper part is the 60%-90% of crucible with the metal die total height; Described bottom centre thickness (h) is 40-80mm; The described diameter that vacuumizes macropore is that φ 1 is 7-18mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3-9mm.
2. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 16 inches with the metal die internal diameter size; Described crucible is 35mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 40mm; The described diameter phi 1 that vacuumizes macropore is 7mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3mm.
3. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 18 inches with the metal die internal diameter size; Described crucible is 40mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 50mm; The described diameter phi 1 that vacuumizes macropore is 8mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 3.5mm.
4. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 20 inches with the metal die internal diameter size; Described crucible is 45mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 60mm; The described diameter phi 1 that vacuumizes macropore is 10mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 4mm.
5. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 22 inches with the metal die internal diameter size; Described crucible is 50mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 65mm; The described diameter phi 1 that vacuumizes macropore is 12mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 5mm.
6. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 24 inches with the metal die internal diameter size; Described crucible is 55mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 70mm; The described diameter phi 1 that vacuumizes macropore is 15mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 7mm.
7. a kind of making crucible metal die according to claim 1, it is characterized in that: described crucible is 26 inches with the metal die internal diameter size; Described crucible is 60mm with metal die side wall upper part thick (s); The height of described side wall upper part is 80% of a crucible usefulness metal die total height; Described bottom centre thickness (h) is 80mm; The described diameter phi 1 that vacuumizes macropore is 18mm, and described diameter phi 2, the φ 3 that vacuumizes aperture A, B equates, be 9mm.
8. a kind of making crucible metal die according to claim 1 is characterized in that: describedly vacuumize macropore setting parallel to each other on cylindrical side wall, equidistantly distribute; The described aperture A that vacuumizes vertically vacuumizes to be on the macropore at each and equidistantly distributes; Each vacuumizes on the macropore, from top to bottom identical ordinal number vacuumize aperture A, be distributed on the same of cylindrical side wall and the parallel annular cross section, bottom surface; The described aperture B that vacuumizes uses on the equal concentric(al) circles of each difference in internal diameters of metal die bottom at crucible, is to equidistantly distribute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120164939 CN202030645U (en) | 2011-05-13 | 2011-05-13 | Metal mould for manufacturing crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120164939 CN202030645U (en) | 2011-05-13 | 2011-05-13 | Metal mould for manufacturing crucible |
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| Publication Number | Publication Date |
|---|---|
| CN202030645U true CN202030645U (en) | 2011-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120164939 Expired - Fee Related CN202030645U (en) | 2011-05-13 | 2011-05-13 | Metal mould for manufacturing crucible |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102219361A (en) * | 2011-05-13 | 2011-10-19 | 宁波宝斯达坩埚保温制品有限公司 | Metal die used for producing crucible |
| CN103951170A (en) * | 2014-04-24 | 2014-07-30 | 宁波宝斯达坩埚保温制品有限公司 | Electricity-saving method and electricity-saving device for manufacturing quartz crucible |
| RU230546U1 (en) * | 2024-09-04 | 2024-12-09 | Акционерное общество "Корпорация Попов Радио" | MELTING MOLD FOR MAKING QUARTZ CRUCIBLES |
-
2011
- 2011-05-13 CN CN 201120164939 patent/CN202030645U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102219361A (en) * | 2011-05-13 | 2011-10-19 | 宁波宝斯达坩埚保温制品有限公司 | Metal die used for producing crucible |
| CN103951170A (en) * | 2014-04-24 | 2014-07-30 | 宁波宝斯达坩埚保温制品有限公司 | Electricity-saving method and electricity-saving device for manufacturing quartz crucible |
| RU230546U1 (en) * | 2024-09-04 | 2024-12-09 | Акционерное общество "Корпорация Попов Радио" | MELTING MOLD FOR MAKING QUARTZ CRUCIBLES |
| RU230547U1 (en) * | 2024-09-06 | 2024-12-09 | Акционерное общество "Корпорация Попов Радио" | MELTING MOLD FOR MAKING QUARTZ CRUCIBLES |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111109 Termination date: 20170513 |
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| CF01 | Termination of patent right due to non-payment of annual fee |