CN201864558U - Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester - Google Patents
Photosensitive mixed polymer photoconductive film control chip based on poly-3-hexylthiophene (P3HT) and C60 derivate [6, 6]-phenyl-C61-butyric acid methyl ester Download PDFInfo
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Abstract
本实用新型公开一种基于聚3-己基噻吩(P3HT)和C60衍生物PCBM的光敏混合聚合物光电导薄膜操控芯片,所述芯片包括上层基片、下层基片、液体腔;所述上层基片设置上导电薄膜层;所述下层基片设置一基于P3HT:PCBM的光电导薄膜层及下导电薄膜层;所述上导电薄膜层和下导电薄膜层均设置连接外部交流电压的引线;所述光电导薄膜层的上面设置绝缘层,下面设置过渡层。本实用新型具有如下特点:1.制备工艺非常简单,可在常温下进行,对制备环境无特殊要求,因此,大大降低了芯片的制备周期和成本;2.由于利用了光敏材料的光电导特性,降低了芯片的制备成本;3.通过计算机控制投影图像照射到芯片上生成虚拟电极,可实现完全数字化的操作。
The utility model discloses a photosensitive mixed polymer photoconductive film control chip based on poly 3-hexylthiophene (P3HT) and C60 derivative PCBM. The chip includes an upper substrate, a lower substrate and a liquid cavity; the upper substrate The sheet is provided with an upper conductive film layer; the lower substrate is provided with a photoconductive film layer and a lower conductive film layer based on P3HT:PCBM; the upper conductive film layer and the lower conductive film layer are all provided with leads connected to an external AC voltage; An insulating layer is arranged on the upper side of the photoconductive thin film layer, and a transition layer is arranged on the lower side. The utility model has the following characteristics: 1. The preparation process is very simple, can be carried out at normal temperature, and has no special requirements for the preparation environment, so the preparation cycle and cost of the chip are greatly reduced; 2. Due to the use of the photoconductive properties of the photosensitive material , which reduces the preparation cost of the chip; 3. The projection image is irradiated on the chip by computer to generate virtual electrodes, which can realize completely digital operation.
Description
技术领域technical field
本实用新型涉及微纳米自动化制造领域、微流控领域以及微纳生物技术领域,具体说是一种规模化、自动化、可重复、低成本的微纳米粒子操作与装配技术,进一步说是一种光电导薄膜操控芯片及制备方法。The utility model relates to the field of micro-nano automatic manufacturing, microfluidic control and micro-nano biotechnology, specifically a large-scale, automatic, repeatable, low-cost micro-nano particle operation and assembly technology, and further a Photoconductive thin film control chip and its preparation method.
背景技术Background technique
微纳米科学和技术是在微纳米尺度上研究物质的特性和相互作用,并利用这些特性的一个新型科学。其最终目标是直接以物质在微纳米尺度上表现出来的特性,制造具有特定功能的产品。微纳米尺度下的物质,如无机的纳米管线、纳米颗粒,在电、磁、光、力、热等物理学及化学方面具有许多新奇性能,以这些纳米材料作为构筑单元的纳米电子器件,将为电子、信息、材料、先进制造、生物医学等领域的技术发展提供新的契机与技术途径;而有机的细胞、蛋白质、DNA等是生命的基本组成单元,对其进行研究并构成的纳米生物系统,将会给生物医学带来革命性的突破,同时也将促进人类在更微小的尺度上探索生命与研究生命的奥秘。微纳米材料的批量/单体传输、筛选、搬运、定位及装配等自动化操控技术对规模化微纳米样品制备,尤其是面向生物实体的操纵,对促进微纳米技术发展,特别是生物医学技术的发展具有非常重要的意义。微纳米物质(如粒子、管线、分子等)的操控技术已成为研究微纳米科学和实现纳米制造技术的核心技术之一,也是当前极端制造技术领域研究中亟待解决的重要难题。它不仅是微纳米科学研究和拓展的技术手段,而且也是微纳米科技走向应用领域,微纳米高技术产业的支柱。Micro-nano science and technology is a new type of science that studies the properties and interactions of substances at the micro-nano scale and utilizes these properties. Its ultimate goal is to directly manufacture products with specific functions based on the properties of substances at the micro-nano scale. Substances at the micro-nano scale, such as inorganic nanotubes and nanoparticles, have many novel properties in physics and chemistry such as electricity, magnetism, light, force, and heat. Nanoelectronic devices using these nanomaterials as building blocks will Provide new opportunities and technical approaches for the development of technologies in the fields of electronics, information, materials, advanced manufacturing, and biomedicine; organic cells, proteins, and DNA are the basic components of life, and nanobiology is studied and formed The system will bring revolutionary breakthroughs to biomedicine, and will also promote human beings to explore life and study the mysteries of life on a smaller scale. Automatic control technologies such as batch/monomer transmission, screening, handling, positioning and assembly of micro-nano materials are of great help to the preparation of large-scale micro-nano samples, especially for the manipulation of biological entities, and to the promotion of micro-nano technology development, especially the development of biomedical technology. Development is of great significance. The manipulation technology of micro-nano substances (such as particles, pipelines, molecules, etc.) has become one of the core technologies for studying micro-nano science and realizing nano-manufacturing technology, and it is also an important problem to be solved urgently in the field of extreme manufacturing technology. It is not only a technical means for the research and development of micro-nano science, but also the pillar of micro-nano technology to the application field and the micro-nano high-tech industry.
十几年来,国内外大批学者尝试了多种方法,发展出了多种微/纳米操控技术。其中,可实现微/纳米材料在特定位置操作与装配的技术主要包括:通过控制探针运动和施加力进行纳米观测和操作的扫描探针显微镜(AFM)技术。尽管AFM能够在可控、可重复的条件下完成各种高精度纳米操作任务,然而这种方法的扫描成像与操作都必须通过探针来实现的,操作效率非常低,并且,扫描范围很小,因此很难实现规模化自动化的纳米加工与操控。利用磁场梯度对磁性微纳米粒子产生足够强的静态或动态作用力,进而实现拉伸或捕获的磁镊(Magnetic tweezers)技术。由于磁镊技术只能操作磁性粒子,磁性粒子的堆积行为和诱发的磁力矩通常很小等问题,大大限制了该种技术的发展与应用。利用光场制动力原理实现为微小物体的夹持与操作的光镊(Optical tweezers)技术;光镊操作被认为是一种潜在的纳米加工方法,但将其用于生物样品操作时,由于光源功率非常大,所产生的热量会对样品造成很大损害,甚至因为热量过高而杀死活性生物样,因此,这项技术仍然存在很多的局限性。利用电场的操作技术又被称为介电泳(DEP),是指处于空间非均匀电场中的中性粒子,由于被极化而受到电场力的作用产生运动的现象。其运动规律是由所施加电场的频率和粒子的感应偶极矩决定的。尽管介电泳技术在很多领域得到了广泛的应用,但随着微纳米技术不断向应用领域发展,该项技术的缺点逐渐显露出来。介电泳技术必须要通过物理微电极才可以实现,而现有的微电极制作都是经过复杂的MEMS工艺,并且,一种结构尺寸的微电极芯片可操作的样品种类及大小是有限的,当被操作对象变化时,就需要重新设计制作电极芯片。因此,这就要花费大量的时间和制作成本。光诱导介电泳技术(ODEP)是将光学技术与介电泳技术相结合的一种新兴操作技术,它首先在沉积有光敏材料的氧化铟锡(ITO)玻璃上施加AC电压,当光照射到其上时,被光照射到的区域就呈导通状态,从而在该区域诱导生产虚拟电极,进而产生介电泳现象。光诱导介电泳技术由于不再需要制备物理电极,完全靠计算机实时控制的投影光诱导产生虚拟电极,因此是一种实现了数字化,可重构、自动化的微/纳米操作方法,一出现就在微/纳米操作技术领域引起极大反响和强烈关注,被认为是实现纳米自动化制造最有前途的技术之一。Over the past ten years, a large number of scholars at home and abroad have tried various methods and developed various micro/nano manipulation technologies. Among them, the technologies that can realize the operation and assembly of micro/nano materials at specific positions mainly include: scanning probe microscopy (AFM) technology for nanometer observation and manipulation by controlling probe movement and applying force. Although AFM can complete a variety of high-precision nanomanipulation tasks under controllable and repeatable conditions, the scanning imaging and operation of this method must be realized through probes, the operating efficiency is very low, and the scanning range is very small. , so it is difficult to achieve large-scale automated nanoprocessing and manipulation. Magnetic tweezers (Magnetic tweezers) technology that uses magnetic field gradients to generate sufficiently strong static or dynamic forces on magnetic micro-nano particles to achieve stretching or trapping. Since the magnetic tweezers technology can only manipulate magnetic particles, the accumulation behavior of magnetic particles and the induced magnetic moment are usually very small, which greatly limits the development and application of this technology. Optical tweezers (Optical tweezers) technology that uses the principle of optical field braking force to realize the clamping and manipulation of tiny objects; The power is very high, and the heat generated will cause great damage to the sample, and even kill the living biological sample because of the high heat. Therefore, this technology still has many limitations. The operation technology using electric field is also called dielectrophoresis (DEP), which refers to the phenomenon that neutral particles in a spatially non-uniform electric field move due to the action of electric field force due to polarization. Its law of motion is determined by the frequency of the applied electric field and the induced dipole moment of the particles. Although dielectrophoretic technology has been widely used in many fields, with the continuous development of micro-nano technology to the application field, the shortcomings of this technology are gradually revealed. Dielectrophoresis technology must be realized through physical microelectrodes, and the existing microelectrodes are manufactured through complex MEMS processes, and the types and sizes of samples that can be operated by a microelectrode chip with a structural size are limited. When the object to be operated changes, it is necessary to redesign and manufacture the electrode chip. Therefore, it will take a lot of time and production cost. Optically induced dielectrophoresis (ODEP) is a new operating technology that combines optical technology with dielectrophoretic technology. It first applies AC voltage on indium tin oxide (ITO) glass deposited with photosensitive materials, and when light shines on it When it is on, the area irradiated by light is in a conduction state, thereby inducing the production of dummy electrodes in this area, and then generating dielectrophoresis. Light-induced dielectrophoresis technology no longer needs to prepare physical electrodes, and completely relies on computer real-time control of projected light to induce virtual electrodes. Therefore, it is a digital, reconfigurable, and automated micro/nano operation method. The field of micro/nano manipulation technology has aroused great repercussions and intense attention, and is considered to be one of the most promising technologies for realizing nano-automated manufacturing.
光敏材料是光诱导介电泳系统的核心。光诱导介电泳技术的实现主要是靠光敏材料所具有的光电导特性,即在没有光照的条件下,光敏材料电导率非常小,成完全截止状态;光照条件下,光敏材料电导率非常大,成导通状态,进而在液体层上形成非均匀电场,对液体中的粒子产生介电泳力。现有的光诱导介电泳操作芯片及系统所采用的光敏材料主要都是氢化非晶硅,其光电导的约为暗电导的1000倍。目前最常规、最成熟的氢化非晶硅(a:Si-H)薄膜的制备方法是等离子体增强化学气相沉积法(PECVD)。此法制备的氢化非晶硅(a:Si-H)薄膜具有均匀的结构、较好的附着性以及良好的光电导特性。但a:Si-H的制备需要在专门的超洁净净化室内进行,制备设备和其成本十分高昂,制备工艺复杂,而且使用的是有毒易爆的气体(SiH4,BH3,PH3),制备过程中设备的工作温度为300~450°C。这些都大大妨碍了光诱导介电泳技术的应用于推广。Photosensitive materials are at the heart of light-induced dielectrophoretic systems. The realization of light-induced dielectrophoresis technology mainly depends on the photoconductive properties of photosensitive materials, that is, under the condition of no light, the conductivity of the photosensitive material is very small, and it is in a completely cut-off state; under the condition of light, the conductivity of the photosensitive material is very large, Into a conduction state, and then form a non-uniform electric field on the liquid layer, and generate dielectrophoretic force on the particles in the liquid. The photosensitive materials used in the existing light-induced dielectrophoresis operation chips and systems are mainly hydrogenated amorphous silicon, and its photoconductivity is about 1000 times of the dark conductance. At present, the most conventional and mature hydrogenated amorphous silicon (a:Si-H) film preparation method is plasma enhanced chemical vapor deposition (PECVD). The hydrogenated amorphous silicon (a: Si-H) film prepared by this method has uniform structure, good adhesion and good photoconductive properties. But a: The preparation of Si-H needs to be carried out in a special ultra-clean clean room, the preparation equipment and its cost are very high, the preparation process is complicated, and the use of toxic and explosive gases (SiH 4 , BH 3 , PH 3 ), The operating temperature of the equipment during the preparation process is 300-450°C. These have greatly hindered the application and popularization of light-induced dielectrophoresis technology.
因此,在利用光诱导介电泳技术进行微纳米样品操控的时候,能否采用一种新型的光敏材料,不仅具有较高的光暗电导比,同时,制备工艺简单,最好可在室温下进行,并且普通的实验室环境既可满足制备环境的要求,成为解决光诱导介电泳技术在微纳米自动化制造领域应用的关键技术问题。这一问题的解决将大大降低光诱导介电泳操作芯片的复杂程度,降低制备成本,缩短制备时间,并将大大地推动微纳米自动化操作与装配技术的进步,促进光诱导介电泳技术在微纳米自动化制造领域,纳米生物技术领域的推广与应用。Therefore, when using light-induced dielectrophoresis technology for micro-nano sample manipulation, can a new type of photosensitive material be used, which not only has a high light-to-dark conductivity ratio, but also has a simple preparation process, and it is best to carry out at room temperature. , and the ordinary laboratory environment can meet the requirements of the preparation environment, which has become a key technical problem to solve the application of light-induced dielectrophoresis technology in the field of micro-nano automated manufacturing. The solution to this problem will greatly reduce the complexity of light-induced dielectrophoresis operation chip, reduce the preparation cost, shorten the preparation time, and will greatly promote the progress of micro-nano automatic operation and assembly technology, and promote the development of light-induced dielectrophoresis technology in micro-nano Promotion and application in the field of automated manufacturing and nano-biotechnology.
实用新型内容Utility model content
为了克服现有以a:Si-H为光电导薄膜层材料的光诱导介电泳芯片制备工艺复杂、需要专门的制备环境和制备设备、制备成本高昂,以及由于使用有毒有害气体所带来的危险性等等不足,本实用新型的目的在于提供一种制备工艺简单、成本低的、采用一种新型光敏材料的,可以实现微纳米尺度规模化自动化操控的光诱导介电泳芯片。In order to overcome the complex preparation process of the existing light-induced dielectrophoretic chip using a:Si-H as the photoconductive film layer material, the need for a special preparation environment and preparation equipment, the high preparation cost, and the dangers caused by the use of toxic and harmful gases Insufficient in terms of stability, etc., the purpose of this utility model is to provide a light-induced dielectrophoresis chip with simple preparation process, low cost, using a new type of photosensitive material, which can realize large-scale automatic control of micro-nano scale.
本实用新型提出的微纳米规模化自动化操控芯片是一种基于光诱导介电泳技术的微流控芯片。与现有光诱导介电泳芯片大多采用氢化非晶硅为光电导材料不同的是,本实用新型采用聚3-己基噻吩(P3HT)和C60衍生物PCBM([6,6]-phenyl-C61-butyric acid methyl ester)的混合光敏聚合物(P3HT:PCBM)为光电导薄膜层材料,通过被投影光照射到P3HT:PCBM薄膜层产生虚拟电极,进而在上下基板之间形成非均匀电场,对其中的微纳米样品产生介电泳力,来实现对样品的规模化自动化操作与装配。The micro-nano scale automatic control chip proposed by the utility model is a microfluidic chip based on light-induced dielectrophoresis technology. Unlike the existing light-induced dielectrophoresis chips that mostly use hydrogenated amorphous silicon as the photoconductive material, the utility model uses poly 3-hexylthiophene (P3HT) and C60 derivative PCBM ([6,6]-phenyl-C61- Butyric acid methyl ester) mixed photosensitive polymer (P3HT: PCBM) is a photoconductive film layer material, which is irradiated by projected light to the P3HT: PCBM film layer to generate a virtual electrode, thereby forming a non-uniform electric field between the upper and lower substrates, which The dielectrophoretic force generated by the micro-nano sample can realize the large-scale automatic operation and assembly of the sample.
其中,本实用新型的核心-光敏材料选用了聚3-己基噻吩和C60衍生物混合光敏聚合物(P3HT:PCBM),其作用机理及效果如下:Among them, the core of the utility model - photosensitive material selects poly 3-hexylthiophene and C60 derivative mixed photosensitive polymer (P3HT: PCBM), its mechanism and effect are as follows:
C60本身具有良好的导电性,与其它高分钟聚合物共轭可得到更好的光电导特性。上世纪90年代,国际上首次报道了以共轭聚合物作为电子给体材料(donor,D),C60作为电子受体材料(acceptor,A)之间光诱导电荷转移现象。众所周知,p型半导体材料P3HT是一种很好的电子施主材料。而PCBM是一种电子受主材料,是C60的衍生物,与C60相比,PCBM具有更好的溶解性,同时具备了C60的优点,如好的电子亲和势、透明性好和良好的电子传输性能。P3HT:PCBM共混结构增大了D/A(给体/受体)界面面积,每个D/A接触处形成了一个异质结,分散的异质结减小了光激子的扩散距离,有利于电荷的分离。同时,D/A网络是双连续结构,激子分离成的电子与空穴在各自连续网络中传输到电极,有利于电荷的传导与收集。因此,在P3HT:PCBM异质结结构中,P3HT在光照后,电子受到激发后发生跃迁,由于其周围存在受主分子PCBM,那么P3HT受激发产生的电子会以非常快(飞秒)的速度传递给附近的PCBM材料,从而使得这种光敏材料具有很快的光电转换速度以及很高的光电转换效率。C60 itself has good conductivity, and it can be conjugated with other high-density polymers to obtain better photoconductive properties. In the 1990s, the photoinduced charge transfer phenomenon between a conjugated polymer as an electron donor material (donor, D) and C60 as an electron acceptor material (acceptor, A) was reported internationally for the first time. It is well known that the p-type semiconductor material P3HT is a good electron donor material. PCBM is an electron acceptor material, which is a derivative of C60. Compared with C60, PCBM has better solubility and has the advantages of C60, such as good electron affinity, good transparency and good Electron transport properties. P3HT: The PCBM blend structure increases the D/A (donor/acceptor) interface area, and a heterojunction is formed at each D/A contact, and the dispersed heterojunction reduces the diffusion distance of photoexciton , which facilitates the separation of charges. At the same time, the D/A network is a bicontinuous structure, and the electrons and holes separated by excitons are transported to the electrodes in their respective continuous networks, which is beneficial to the conduction and collection of charges. Therefore, in the P3HT:PCBM heterojunction structure, after the P3HT is illuminated, the electrons are excited and undergo a transition. Due to the presence of the acceptor molecule PCBM around it, the electrons generated by the excitation of the P3HT will be at a very fast (femtosecond) speed. Passed to the nearby PCBM material, so that this photosensitive material has a very fast photoelectric conversion speed and high photoelectric conversion efficiency.
具体方案如下:The specific plan is as follows:
一种基于聚3-己基噻吩(P3HT)和C60衍生物PCBM([6,6]-phenyl-C61-butyric acid methyl ester)的光敏混合聚合物(P3HT:PCBM)光电导薄膜操控芯片,其特征在于:包括上层基片、下层基片,以及位于两层基片之间的液体腔壁和其中的液体腔;所述上层基片本身为透明的,且与液体腔接触的表面设置一层透明的导电薄膜,即上导电薄膜层;所述下层基片同样是透明的,下层基片与液体腔接触的表面设置一基于P3HT:PCBM的光电导薄膜层,下层基片下部也设置导电薄膜,即下导电薄膜层;所述上导电薄膜层和下导电薄膜层均设置连接外部交流电压的引线;A photosensitive hybrid polymer (P3HT:PCBM) photoconductive film control chip based on poly 3-hexylthiophene (P3HT) and C60 derivative PCBM ([6,6]-phenyl-C61-butyric acid methyl ester), its characteristics In that: including an upper substrate, a lower substrate, and a liquid cavity wall between the two substrates and a liquid cavity therein; the upper substrate itself is transparent, and a layer of transparent layer is provided on the surface in contact with the liquid cavity The conductive film, that is, the upper conductive film layer; the lower substrate is also transparent, and the surface of the lower substrate in contact with the liquid chamber is provided with a photoconductive film layer based on P3HT:PCBM, and the lower substrate is also provided with a conductive film. That is, the lower conductive film layer; both the upper conductive film layer and the lower conductive film layer are provided with lead wires connected to an external AC voltage;
为了保护光电导薄膜层,防止其发生电解以及减小光电导薄膜层在液体环境中表现出的不稳定特性以及为了降低光电导薄膜层与基片上透明导电薄膜之间的接触电阻,提高芯片性能及工作稳定性,所述光电导薄膜层的上面设置绝缘层,所述光电导薄膜层与下导电薄膜层间设置过渡层;In order to protect the photoconductive film layer, prevent it from electrolysis and reduce the unstable characteristics of the photoconductive film layer in the liquid environment, and in order to reduce the contact resistance between the photoconductive film layer and the transparent conductive film on the substrate, improve chip performance and work stability, an insulating layer is set above the photoconductive film layer, and a transition layer is set between the photoconductive film layer and the lower conductive film layer;
所述上、下导电薄膜层由氧化铟锡(ITO)材料制作;过渡层采用3,4-乙烯二氧噻吩/聚苯乙烯磺酸(PEDOT- PSS)制作;绝缘层采用氟化锂(LiF)材料制作;液体腔壁的材料为透明导电双面胶。The upper and lower conductive film layers are made of indium tin oxide (ITO); the transition layer is made of 3,4-ethylenedioxythiophene/polystyrene sulfonic acid (PEDOT-PSS); the insulating layer is made of lithium fluoride (LiF ) material; the material of the liquid chamber wall is transparent conductive double-sided adhesive tape.
本实用新型的微纳米规模化自动化操控芯片是通过如下方式实现对微纳米尺度物质进行规模化自动化的操作与装配的。当在上层基片和下层基片上施加交流电压时,由于下层基片所包含的光电导薄膜在无光照的条件下,具有极小的电导率,此时在液体层上无压降,既不形成非均匀电场,因此,对于液体中的粒子不产生介电泳力,粒子保持静止状态。当投影光照射到下层基片上时,下层基片所包含的光电导薄膜在有光照的条件下,电导率迅速升高,被投影光照射到的下层基片区域相当于一个虚拟的电极,进而在液体层上形成了非均匀电场,由此,位于液体层中的粒子便受到了介电泳力。在此力的作用下,粒子要么受到正介电泳力的作用被吸附到虚拟电极区域上,要么受负介电泳力被推向远离虚拟电极的区域。当投影光受计算机的控制在下层基片上运动时,所生成的虚拟电极也发生运动,进而带动粒子在液体层中运动,从而实现对粒子的操作。由于该系统完全不依赖芯片的特殊物理结构,只要是下层基片上投影光可以照射到的区域,理论上都可以实现操作,并且,投影光斑的大小和数量只与所选择的投影设备有关,因此,可实现大规模的操作。另外,投影光的形状、数量和运动都可以由计算机直接控制,而液体中的粒子的位置也可通过视觉监控系统进行采集,因此,可实现自动化操作。The micro-nano scale automatic control chip of the utility model realizes large-scale automatic operation and assembly of micro-nano scale substances through the following methods. When an AC voltage is applied on the upper substrate and the lower substrate, since the photoconductive film contained in the lower substrate has extremely small electrical conductivity under the condition of no light, there is no pressure drop on the liquid layer at this time, neither A non-uniform electric field is formed, therefore, no dielectrophoretic force is generated for the particles in the liquid, and the particles remain at rest. When the projected light is irradiated on the lower substrate, the conductivity of the photoconductive film contained in the lower substrate increases rapidly under the condition of light, and the area of the lower substrate irradiated by the projected light is equivalent to a virtual electrode, and then A non-uniform electric field is formed on the liquid layer, whereby the particles located in the liquid layer are subjected to dielectrophoretic force. Under the action of this force, the particles are either adsorbed to the dummy electrode area by positive dielectrophoretic force, or pushed away from the dummy electrode area by negative dielectrophoretic force. When the projected light is controlled by the computer to move on the underlying substrate, the generated virtual electrodes also move, and then drive the particles to move in the liquid layer, thereby realizing the operation of the particles. Since the system does not rely on the special physical structure of the chip, as long as it is the area where the projection light can be irradiated on the underlying substrate, it can theoretically be operated, and the size and number of projection spots are only related to the selected projection equipment. Therefore, , enabling large-scale operations. In addition, the shape, quantity and movement of the projected light can be directly controlled by the computer, and the position of the particles in the liquid can also be collected by the visual monitoring system, so automatic operation can be realized.
本实用新型具有如下特点:The utility model has the following characteristics:
1)该芯片完全采用光敏聚合物材料制作。光电导薄膜层采用P3HT:PCBM材料。相对于现有的以氢化非晶硅为光电导材料的光诱导介电泳芯片,这种聚合物芯片的制备工艺非常简单,可在常温下进行,对制备环境无特殊要求,因此,大大降低了芯片的制备周期和成本;1) The chip is entirely made of photosensitive polymer materials. The photoconductive film layer adopts P3HT:PCBM material. Compared with the existing light-induced dielectrophoresis chip using hydrogenated amorphous silicon as the photoconductive material, the preparation process of this polymer chip is very simple, can be carried out at room temperature, and has no special requirements for the preparation environment, therefore, greatly reducing Chip preparation cycle and cost;
2)由于利用了光敏材料的光电导特性,该芯片无需制作任何物理电极结构,因此,大大降低了芯片的制备成本;2) Due to the use of the photoconductive properties of photosensitive materials, the chip does not need to make any physical electrode structure, so the cost of chip preparation is greatly reduced;
3)通过计算机控制投影图像照射到芯片上生成虚拟电极,可实现完全数字化的操作。并且,通过对投影图像的形状的改变,即可实现各种不同形状、尺寸的虚拟电极结构,是一种高度柔性,完全可重构的系统。3) The projected image is irradiated onto the chip by computer to generate virtual electrodes, which can realize completely digital operation. Moreover, by changing the shape of the projected image, virtual electrode structures of various shapes and sizes can be realized, which is a highly flexible and completely reconfigurable system.
附图说明Description of drawings
图1为本实用新型芯片的结构示意图;Fig. 1 is the structural representation of the utility model chip;
图2为本实用新型芯片的工作系统原理示意图。Fig. 2 is a schematic diagram of the principle of the working system of the chip of the present invention.
具体实施方式Detailed ways
如图1所示,本实用新型芯片由上基片、透明液体腔壁8、液体腔9、下基片组成;上基片包括透明基底1和上导电薄膜层2;下基片由绝缘层7、光电导薄膜层6、过渡层5、下透明导电薄膜层3以及基底4。As shown in Figure 1, the utility model chip is made up of upper substrate, transparent
本实施例中,上基底1和下基底4均采用玻璃。上导电薄膜层2和下导电薄膜层3均采用ITO制作。下基片上的绝缘层采用LiF制作。光导电薄膜层采用P3HT:PCBM制作。过渡层采用PEDOT- PSS制作。液体腔壁8的材料为透明导电双面胶。被操作对象分散于液体腔9中的液体介质中。该芯片的具体的制备工艺如下:In this embodiment, both the
步骤1:先后用IPA、酒精和去离子水浸泡带有ITO薄膜的玻璃,将其洗净,然后用氮气吹干;Step 1: Soak the glass with ITO film with IPA, alcohol and deionized water successively, wash it, and then dry it with nitrogen;
步骤2:将PEDOT:PSS水溶液旋涂在下基片的下导电薄膜层上,干燥后成膜;Step 2: Spin-coat the PEDOT:PSS aqueous solution on the lower conductive film layer of the lower substrate, and form a film after drying;
步骤3:秤取等重量的P3HT和PCBM,分别加入氯苯溶液中,震荡溶解后将两者混合,并用磁力搅拌器使其混合均匀,以获得P3HT:PCBM混合液;Step 3: Take equal weights of P3HT and PCBM, add them to the chlorobenzene solution respectively, mix them after shaking and dissolving, and mix them evenly with a magnetic stirrer to obtain a P3HT:PCBM mixture;
步骤4:将步骤2得到的基片预热,把步骤3得到的P3HT:PCBM混合液旋涂到其上,然后在烘箱中热处理;Step 4: preheat the substrate obtained in
步骤5:利用热沉积设备在步骤4得到的薄膜上沉积一层LiF。Step 5: Deposit a layer of LiF on the thin film obtained in
如图2所示,本实用新型芯片的工作系统组成原理图中,交流信号发生器用于在芯片的上下基片上施加交流电压信号。由计算机101控制的投影机103将光图案通过聚光镜102照射到芯片上。下基片的光电导材料P3HT:PCBM薄膜在有光照的条件下,呈导通状态,进而在投影光图案上方,在液体层的上下表面之间形成非均匀电场,使得位于液体层中的粒子受到介电泳力的作用产生运动。当通过计算机101控制光投影图案变换形状、位置时,相应的粒子也随着投影光的移动而运动。上方的CCD104用于实时监视跟踪粒子的运动状态。As shown in FIG. 2 , in the working system schematic diagram of the chip of the present invention, the AC signal generator is used to apply AC voltage signals on the upper and lower substrates of the chip. A
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102478581A (en) * | 2010-11-29 | 2012-05-30 | 中国科学院沈阳自动化研究所 | Photosensitive mixed polymer photoconductive thin film control chip and preparation method based on poly-3-hexylthiophene and C60 derivatives |
| TWI512383B (en) * | 2012-07-04 | 2015-12-11 | Ind Tech Res Inst | Optically-induced dielectrophoresis device |
| CN109821582A (en) * | 2019-03-13 | 2019-05-31 | 京东方科技集团股份有限公司 | Particle trapping structure, particle trapping chip and particle trapping method |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102478581A (en) * | 2010-11-29 | 2012-05-30 | 中国科学院沈阳自动化研究所 | Photosensitive mixed polymer photoconductive thin film control chip and preparation method based on poly-3-hexylthiophene and C60 derivatives |
| TWI512383B (en) * | 2012-07-04 | 2015-12-11 | Ind Tech Res Inst | Optically-induced dielectrophoresis device |
| CN109821582A (en) * | 2019-03-13 | 2019-05-31 | 京东方科技集团股份有限公司 | Particle trapping structure, particle trapping chip and particle trapping method |
| CN109821582B (en) * | 2019-03-13 | 2021-12-03 | 京东方科技集团股份有限公司 | Particle capture structure, particle capture chip and particle capture method |
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