CN201863310U - Clamping device of silicon wafer cutting equipment - Google Patents
Clamping device of silicon wafer cutting equipment Download PDFInfo
- Publication number
- CN201863310U CN201863310U CN201020576841.4U CN201020576841U CN201863310U CN 201863310 U CN201863310 U CN 201863310U CN 201020576841 U CN201020576841 U CN 201020576841U CN 201863310 U CN201863310 U CN 201863310U
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- CN
- China
- Prior art keywords
- side plate
- push rod
- clamping
- clamping device
- connector
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本实用新型提供了一种硅片切割设备的夹紧装置，包括连接件，卡紧构件，推杆，所述卡紧构件固定设置在所述连接件的前端，所述推杆一端穿过所述连接件，并与所述连接件螺纹连接成一体，所述卡紧构件为V形构件，由第一侧板与第二侧板组成，所述第一侧板与所述第二侧板固定连接成一体，夹紧时，将连接件移到适当位置，将推杆拧紧，通过推杆夹紧在固定架上，将夹紧装置定位；将硅晶板卡入卡紧构件内，通过卡紧构件的第一、第二侧侧将硅晶板夹紧；拆卸时，只要将推杆反向拧动，将硅晶板松开即可，因此，本实用新型使用比较方便，且夹紧由卡紧构件实现，操作方便，且夹紧力均匀。
The utility model provides a clamping device for silicon wafer cutting equipment, which comprises a connector, a clamping member, and a push rod. The clamping member is fixedly arranged at the front end of the connector, and one end of the push rod passes through the The connecting piece is screwed into one body with the connecting piece. The clamping member is a V-shaped member consisting of a first side plate and a second side plate. The first side plate and the second side plate It is fixed and connected into one body. When clamping, move the connecting piece to an appropriate position, tighten the push rod, and clamp it on the fixed frame through the push rod to position the clamping device; clamp the silicon crystal plate into the clamping member, and pass The first and second sides of the clamping member clamp the silicon crystal plate; when dismounting, just turn the push rod in the opposite direction to loosen the silicon crystal plate. Therefore, the utility model is more convenient to use and clamps The tightening is realized by the clamping member, which is easy to operate and has uniform clamping force.
Description
Technical field
The present invention relates to a kind of clamping device, particularly a kind of silicon chip that cuts belongs to the technical field of silicon chip machining tool with the clamping device of anchor clamps.
Background technology
Before the silicon chip processing, earlier silicon crystal slate to be cut split and become block.In the existing silicon chip cutting equipment,, generally adopt fixedly modes such as cylinder clamping, mobile cylinder clamping or Rodless cylinder clamping to the clamping mode of silicon crystal slate.In the above-mentioned clamping mode, the mode of fixing to clamp is used the most general, but its cost height; The Rodless cylinder translational speed is slow, and owing to be monolateral clamping, clamping force is inhomogeneous, makes silicon crystal slate draw damage easily, and the silicon wafer piece of appearance processing is lack of standardization, as phenomenons such as joint-cutting and surperficial out of plumb; Though mobile cylinder clamping has overcome above-mentioned phenomenon, there is the high problem of cost.
Summary of the invention
It is even that technical problem to be solved by this invention provides a kind of clamping force, the clamping device of silicon chip cutting equipment with low cost.
In order to solve the problems of the technologies described above, the clamping device of a kind of silicon chip cutting equipment of the present invention, comprise connector, chucking member, push rod, described chucking member is fixedly installed on the front end of described connector, described push rod one end passes described connector, and is threaded with described connector and is integral, and described chucking member is a v-component, be made up of first side plate and second side plate, described first side plate is fixedlyed connected with described second side plate and is integral.
The clamping device of above-mentioned a kind of silicon chip cutting equipment wherein, is fixed with an elastomeric pad respectively on described first side plate and the described second side plate inner surface.
The clamping device of above-mentioned a kind of silicon chip cutting equipment, wherein, the surface of described elastomeric pad is provided with the annular knurl line.
The present invention can realize following beneficial effect:
1, owing to the present invention includes connector, chucking member, push rod, described chucking member is fixedly installed on the front end of described connector, and described push rod one end passes described connector, and is threaded with described connector and is integral, described chucking member is a v-component, be made up of first side plate and second side plate, described first side plate is fixedlyed connected with described second side and is integral, during clamping, connector is moved on to the appropriate location, push rod is tightened, be clamped on the fixed mount, clamping device is located by push rod; Silicon crystal slate is snapped in the chucking member, silicon crystal slate is clamped by first, second side plate that tightens member; During dismounting, as long as push rod is oppositely turned, silicon crystal slate is unclamped get final product, therefore, the present invention uses more convenient, and clamps by the realization of chucking member, and is easy to operate, and clamping force is even; And after single clamping device damages, can change individually, greatly reduce cost; In addition, the present invention is made up of the minority parts, and is with low cost.
2, owing to be fixed with an elastomeric pad respectively on described first side plate and the described second side plate inner surface, can play the effect of buffering, avoid silicon crystal slate and chucking member direct friction, prevent the silicon crystal slate damage, thereby, service life of clamping device prolonged.
3, because the surface of described elastomeric pad is provided with the annular knurl line, in the time of in silicon crystal slate is stuck in the chucking member, can increase the frictional force between silicon crystal slate and the elastomeric pad, make the clamping of silicon crystal slate firm more, stable.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of elastomeric pad of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, the clamping device of a kind of silicon chip cutting equipment of the present invention comprises connector 1, chucking member 2, push rod 3, described chucking member 2 is fixedly installed on the front end of described connector 1, and described push rod 3 one ends pass described connector 1, and be threaded with described connector 1 and be integral, described chucking member 2 is a v-component, is made up of first side plate 21 and second side plate 22, and described first side plate 21 is fixedlyed connected with described second side plate 22 and is integral.During clamping, connector 1 is moved on to the appropriate location, push rod 3 is tightened, be clamped on the fixed mount, clamping device is located by push rod 3; Silicon crystal slate is snapped in the chucking member 2, and first, second side plate by chucking member 2 21,22 clamps silicon crystal slate; During dismounting, as long as push rod 3 is oppositely turned, silicon crystal slate is unclamped get final product, therefore, the present invention uses more convenient, and clamps by the realization of chucking member, and is easy to operate, and clamping force is even; And after single clamping device damages, can change individually, greatly reduce cost; In addition, the present invention is made up of the minority parts, and is with low cost.
In order to prolong the service life of clamping device, can on described first side plate 21 and described second side plate, 22 inner surfaces, be fixed with an elastomeric pad 4 respectively, owing to be fixed with an elastomeric pad 4 respectively on described first side plate 21 and described second side plate, 22 inner surfaces, can play the effect of buffering, avoid silicon crystal slate and chucking member 2 direct friction, prevent that silicon crystal slate from damaging, and prolonged the service life of clamping device.In order to make silicon crystal slate hold more firmly, stablize, can on the surface of described elastomeric pad 4, be provided with annular knurl line 5, because the surface of described elastomeric pad 4 is provided with annular knurl line 5, in the time of in silicon crystal slate is stuck in the chucking member, can increase the frictional force between silicon crystal slate and the elastomeric pad 4, make the clamping of silicon crystal slate firm more, stable.
In sum, it is even that the present invention has clamping force, with low cost, easy for installation, flexible and advantage of simple structure.
Here description of the invention and application is illustrative, is not to want that therefore, the present invention is not subjected to the restriction of present embodiment with scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (3)
1. the clamping device of a silicon chip cutting equipment, it is characterized in that, comprise connector, chucking member, push rod, described chucking member is fixedly installed on the front end of described connector, described push rod one end passes described connector, and is threaded with described connector and is integral, and described chucking member is a v-component, be made up of first side plate and second side plate, described first side plate is fixedlyed connected with described second side plate and is integral.
2. a kind of according to claim 1 clamping device of silicon chip cutting equipment is characterized in that, is fixed with an elastomeric pad respectively on described first side plate and the described second side plate inner surface.
3. a kind of according to claim 1 clamping device of silicon chip cutting equipment is characterized in that, the surface of described elastomeric pad is provided with the annular knurl line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020576841.4U CN201863310U (en) | 2010-10-25 | 2010-10-25 | Clamping device of silicon wafer cutting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201020576841.4U CN201863310U (en) | 2010-10-25 | 2010-10-25 | Clamping device of silicon wafer cutting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201863310U true CN201863310U (en) | 2011-06-15 |
Family
ID=44134476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201020576841.4U Expired - Fee Related CN201863310U (en) | 2010-10-25 | 2010-10-25 | Clamping device of silicon wafer cutting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201863310U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973078A (en) * | 2010-10-25 | 2011-02-16 | 镇江市港南电子有限公司 | Clamping device of silicon slice cutting device |
-
2010
- 2010-10-25 CN CN201020576841.4U patent/CN201863310U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973078A (en) * | 2010-10-25 | 2011-02-16 | 镇江市港南电子有限公司 | Clamping device of silicon slice cutting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110615 Termination date: 20121025 |