CN201820002U

CN201820002U - Phase compensation membrane

Info

Publication number: CN201820002U
Application number: CN201020178014XU
Authority: CN
Inventors: 王贵海
Original assignee: CHONGQING TIANDI PHOTOELECTRIC Co Ltd
Current assignee: CHONGQING TIANDI PHOTOELECTRIC Co Ltd
Priority date: 2010-04-30
Filing date: 2010-04-30
Publication date: 2011-05-04
Anticipated expiration: 2020-04-30

Abstract

The utility model discloses a phase compensation membrane; an optical substrate sequentially and externally comprises a first zirconia layer, a second silicon oxide layer, a third zirconia layer and a fourth silicon oxide layer; the phase compensation membrane is coated by a vacuum coating machine made in China, adopts an irregular membrane system which is precisely calculated and designed, organically controls the composition, geometric thickness and physical thickness of the membrane layer, so that the reflectivity of the coated anti-reflection membrane layer within the range of 420 to 700NM is less than 0.5 percent; the light penetration and reverse ratio of a spectro film are less than 3 percents; the reflectivity of a medium high-reflectivity film is 99.9 percents, simultaneously the number of the coated membrane layer is reduced from dozens when imported equipment is used to four, and the number of coated materials is reduced to two; in addition, the surface of a coated optical element plays the roles of preventing enzyme and fog; and the phase compensation membrane changes the coating formula of an optical element film, facilitates the promotion and use of coating machines made in China, improves the added value of the element, and simultaneously has very important significance in the improvement of the quality of optical instruments made in China and mass production.

Description

Phase compensation film

Technical field

The utility model relates to a kind of optical anti-reflective film, particularly a kind of phase compensation film.

Background technology

High-grade optical instrument is according to the requirement of using, need to improve luminous energy transmitance or with light beam in proportion separately or want catadioptric light path loss of energy luminous energy not again by request for utilization, especially in the rear-projection imaging system, this requirement is higher relatively: broad-band transparence-increased wavelength requires height to see through in the 420-700NM scope, and light reflectivity is less than 0.5%; The reflectivity of Dielectric High Reflective Films otherwise less than 99.9% or the like, so optics will reach this requirement, must use the high-grade coating machine of Japan or Korea S or other country that optical element is coated with film.It is good that this class coating machine repeats performance, can be simultaneously with several Coating Materials (having 14 crucibles can plate 14 kinds of coating materials at most), use the control of brilliant control instrument, adopt the geometric thickness of regular membrane system control rete, repeat to be coated with tens tunics and reach above-mentioned technical requirement.But this mode equipment infusion of financial resources is big, and staff's working time is long, the labour intensity height.Because the homemade repeatability of coating machine cheaply, poor stability, can't finish the needs of tens of layers of plated film, cause the optical imagery product of China to be in low-grade level always, must be as using high-grade optical instrument from the external import of complete machines, parts or import coating machine.Fast development along with optical technology, the rear-projection imaging technique is also flourish thereupon, its core component---light engine (especially color-combination prism) uses optical element many, corresponding film kind is more, must be from the external import of complete machines, parts or import coating machine, improve cost greatly, restricted the development of domestic optical technology simultaneously.

Therefore, need a kind of phase compensation film that utilizes homemade coating machine to be coated with of exploitation, the composition of organic control rete, geometric thickness and physical thickness, make the antireflective coating that is coated with in the 420-700NM scope light reflectivity less than 0.5%; The luminous energy of spectro-film is saturating, inverse ratio is less than 3%; The Dielectric High Reflective Films reflectivity reaches 99.9%, and which floor coating layers reduces to by the tens layers of using import equipment simultaneously, and Coating Materials reduces to the 2-3 kind.

The utility model content

In view of this, the utility model provides a kind of phase compensation film, the composition of organic control rete, geometric thickness and physical thickness, make the antireflective coating that is coated with in the 420-700NM scope light reflectivity less than 0.5%; The luminous energy of spectro-film is saturating, inverse ratio is less than 3%; The Dielectric High Reflective Films reflectivity reaches 99.9%, and which floor coating layers reduces to by the tens layers of using import equipment simultaneously, and Coating Materials reduces to the 2-3 kind.

Phase compensation film of the present utility model outwards comprises ground floor zirconia layer, second layer silicon oxide layer, the 3rd layer of zirconia layer and the 4th layer of silicon oxide layer successively by optical substrate; The thickness of ground floor zirconia layer is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.806+ transmissivity minimal value; The thickness of second layer silicon oxide layer is the pairing minimum thickness+4.3nm of transmissivity minimal value; The thickness of the 3rd layer of zirconia layer is the pairing minimum thickness+3.5nm in transmissivity maximum value * 0.8225; The thickness of the 4th layer of silicon oxide layer is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.535+ transmissivity minimal value; Calculating transmissivity maximum value and minimizing transmitted light centre wavelength is 480nm.

The beneficial effects of the utility model: phase compensation film of the present utility model, utilize homemade vacuum coating equipment to be coated with, adopt the non-regular membrane of accurate calculation Design to be, the composition of organic control rete, geometric thickness and physical thickness, make the antireflective coating that is coated with in the 420-700NM scope light reflectivity less than 0.5%; The luminous energy of spectro-film is saturating, inverse ratio is less than 3%; The Dielectric High Reflective Films reflectivity reaches 99.9%, and coating layers reduces to four layers by the tens layers of using import equipment simultaneously, and Coating Materials reduces to two kinds; And the optical element surface behind the plated film has anti-effect of giving birth to enzyme, fog; The utility model utilizes the medium of different refractivity to dissolve under vacuum, the condition of high temperature, then be adsorbed onto on the optical substrate by the evaporation of the film of design code system, through the optical element of surface coating, its optical property can reach the various user demands of optical instrument; The utility model changes the fixed pattern that is coated with of optical element film, is beneficial to promoting the use of of homemade coating machine, improves the element added value, has extremely important meaning to improving homemade optical instrument quality and batch process simultaneously.

Description of drawings

Below in conjunction with drawings and Examples the utility model is further described.

Accompanying drawing is a structural representation of the present utility model.

Embodiment

Accompanying drawing is a structural representation of the present utility model, and as shown in the figure: the phase compensation film of present embodiment outwards comprises ground floor zirconia layer 2, second layer silicon oxide layer 3, the 3rd layer of zirconia layer 4 and the 4th layer of silicon oxide layer 5 successively by optical substrate 1; The thickness of ground floor zirconia layer 2 is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.806+ transmissivity minimal value; The thickness of second layer silicon oxide layer 3 is the pairing minimum thickness+4.3nm of transmissivity minimal value; The thickness of the 3rd layer of zirconia layer 4 is the pairing minimum thickness+3.5nm in transmissivity maximum value * 0.8225; The thickness of the 4th layer of silicon oxide layer 5 is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.535+ transmissivity minimal value; Calculating transmissivity maximum value and minimizing transmitted light centre wavelength is 480nm.

Among the present invention, according to rete transmissivity formula:

n ₁, n ₂, t and r be all relevant with film with substrate, incident medium, for being constant with a kind of material;

Nd=K (λ/4), nd is an independent variable;

As K=0,2,4 ... the time, then in the function T

The maximum value of Xiang Youzheng, promptly Substitution rete transmissivity formula, then

Maximum value appears;

As K=1,3,5 ... the time, then in the function T

Item has negative maximum value, promptly

Substitution rete transmissivity formula, then

Minimal value appears;

The transmissivity maximum value and the minimal value of zirconia and monox are drawn by above formula, promptly draw corresponding minimum thickness after in the coating film thickness formula of substitution technical solutions of the utility model.

Periodically occur because transmissivity maximum value and minimal value are the increases along with thickness, so the present invention refers to minimum thickness.

Explanation is at last, above embodiment is only unrestricted in order to the explanation the technical solution of the utility model, although the utility model is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can make amendment or be equal to replacement the technical solution of the utility model, and not breaking away from the aim and the scope of technical solutions of the utility model, it all should be encompassed in the middle of the claim scope of the present utility model.

Claims

1. a phase compensation film is characterized in that: outwards comprise ground floor zirconia layer, second layer silicon oxide layer, the 3rd layer of zirconia layer and the 4th layer of silicon oxide layer successively by optical substrate; The thickness of ground floor zirconia layer is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.806+ transmissivity minimal value; The thickness of second layer silicon oxide layer is the pairing minimum thickness+4.3nm of transmissivity minimal value; The thickness of the 3rd layer of zirconia layer is the pairing minimum thickness+3.5nm in transmissivity maximum value * 0.8225; The thickness of the 4th layer of silicon oxide layer is the pairing minimum thickness of (transmissivity maximum value-transmissivity minimal value) * 0.535+ transmissivity minimal value; Calculating transmissivity maximum value and minimizing transmitted light centre wavelength is 480nm.