[go: up one dir, main page]

CN201724796U - System for carrying out vacuum leak detection on large vacuum chambers in batches - Google Patents

System for carrying out vacuum leak detection on large vacuum chambers in batches Download PDF

Info

Publication number
CN201724796U
CN201724796U CN2010201952019U CN201020195201U CN201724796U CN 201724796 U CN201724796 U CN 201724796U CN 2010201952019 U CN2010201952019 U CN 2010201952019U CN 201020195201 U CN201020195201 U CN 201020195201U CN 201724796 U CN201724796 U CN 201724796U
Authority
CN
China
Prior art keywords
vacuum
leak detection
leak
products
batches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010201952019U
Other languages
Chinese (zh)
Inventor
张志成
徐磊
唐建强
阮根才
李天普
戴永成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hangzhou Dahe Thermo Magnetics Co Ltd
Original Assignee
Hangzhou Dahe Thermo Magnetics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hangzhou Dahe Thermo Magnetics Co Ltd filed Critical Hangzhou Dahe Thermo Magnetics Co Ltd
Priority to CN2010201952019U priority Critical patent/CN201724796U/en
Application granted granted Critical
Publication of CN201724796U publication Critical patent/CN201724796U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Examining Or Testing Airtightness (AREA)

Abstract

The utility model relates to a system for carrying out vacuum leak detection on large vacuum chambers in batches, which comprises a vacuum leak detection instrument, the vacuum leak detection instrument is connected with a vacuum roughing pump, both the vacuum leak detection instrument and the vacuum roughing pump are connected with a vacuum meter which is used for acquiring dynamic vacuum degree data when the vacuum system carries out rough vacuumization, and the other side of the vacuum meter is connected with detected products. The utility model has the following advantages: (1) the system can simultaneously roughly vacuumize a plurality of products and detect the leak rate of large vacuum products in batches, thus greatly shortening the detection time; and when an abnormal leak rate occurs, the products connected with the system can be controlled by valves in order to be identified one by one; (2) the vacuum meter is utilized to acquire the dynamic vacuum degree data of the system; (3) because the system first roughly vaccumizes the products, the air in the products is relatively purified, consequently, the air can achieve the cleanliness required by the high-precision leak detection instrument, and the leak detection instrument can be kept in a sensitive state; and the service life of the leak detection instrument is prolonged.

Description

A kind of system that is used for vacuum leak detection of large vacuum chambers in batches
Technical field
The vacuum leak rate that the utility model relates to a kind of vacuum product detects.
Background technology
Generally the vacuum product being carried out the inspection of vacuum leak rate, all is to adopt vacuum leak detector directly to be connected with product to check, as Fig. 1.There is following shortcoming in this kind method:
1, generally all smaller, bigger to the cavity volume vacuum product of power of the subsidiary roughing vacuum pump of leak locator vacuum system vacuumizes the test vacuum degree condition that reaches regulation, and is consuming time long;
2, the bigger product of cavity volume is carried out vacuum leak hunting, leak locator can be because of the operation of high load capacity for a long time, to very big influence is arranged in serviceable life of leak locator;
3, bulky vacuum product cavity, when not having specialized equipment integral body to clean, the artificial inner chamber of cleaning does not reach the cleanliness factor that the high precision leak locator requires usually, vacuumizes in this state, and the leak locator parts are fragile, particularly the molecular pump in the system;
4, leak locator generally uses under the environment in headroom room, and when environment did not reach the cleanliness factor requirement, the precise decreasing of leak locator was than very fast.
Summary of the invention
The utility model will solve existing vacuum leak hunting method and have problem time-consuming, that the inspection precision is low, the leak locator life-span is short, and the system that is used for vacuum leak detection of large vacuum chambers in batches that a kind of detection time is short, precision is high, the leak locator life-span prolongs is provided.
The technical solution of the utility model:
A kind of system that is used for vacuum leak detection of large vacuum chambers in batches, comprise vacuum leak detector, it is characterized in that: described vacuum leak detector also is connected to the vacuum roughing vacuum pump, the vacuum holder table of the vacuum tightness dynamic data when described vacuum leak detector and described roughing vacuum pump all are connected and are used to obtain vacuum system and slightly take out, the opposite side of described vacuum holder table is connected with testing product.
Further, be connected with a plurality of inspection products on the described vacuum holder table.
Further, be equipped with vacuum valve between described vacuum holder table and inspection product, vacuum roughing vacuum pump, the vacuum leak detector.
Further, the connecting line of described vacuum holder table is provided with spare interface.
Further, be connected by weldless steel tube between described vacuum holder table and the vacuum valve.
Further, all be connected between described inspection product, vacuum roughing vacuum pump, vacuum leak detector and the vacuum valve by corrugated tube.
The utility model was slightly taken out the large-scale vacuum product with the vacuum roughing vacuum pump earlier in when leak detection, treat that vacuum tightness in the detected product reaches condition of high vacuum degree after, with high-precision leak locator detected product is carried out essence and takes out and check.
The beneficial effects of the utility model:
1, system has realized that several products slightly take out simultaneously, detects at large-scale vacuum product leak rate in batches, has shortened detection time greatly; When unusual leak rate takes place, also can control the product of connecting system, confirm one by one by valve;
2, obtain the dynamic vacuum degrees of data of system by vacuum holder table;
3, this system slightly takes out product earlier, has purified the air in the product relatively, makes its cleanliness factor that reaches the requirement of high precision leak locator, makes leak locator keep sensitive state; Prolong the serviceable life of leak locator.
Description of drawings
Fig. 1 is the synoptic diagram of tradition leak detection vacuum system.
Fig. 2 is a vacuum leak detecting system synoptic diagram of the present utility model.
Embodiment
With reference to Fig. 2, a kind of system that is used for vacuum leak detection of large vacuum chambers in batches, comprise vacuum leak detector 1, described vacuum leak detector 1 also is connected to vacuum roughing vacuum pump 2, the vacuum holder table 4 of the vacuum tightness dynamic data when described vacuum leak detector 1 and described roughing vacuum pump 2 all are connected and are used to obtain vacuum system and slightly take out, the opposite side of described vacuum holder table 4 is connected with testing product 6.
Be connected with a plurality of inspection products 6 on the described vacuum holder table 4.
Be equipped with vacuum valve 3 between described vacuum holder table 4 and inspection product 6, vacuum roughing vacuum pump 2, the vacuum leak detector 1.
The connecting line of described vacuum holder table 4 is provided with spare interface 5.
Be connected by weldless steel tube between described vacuum holder table 4 and the vacuum valve 3.
All be connected between described inspection product 6, vacuum roughing vacuum pump 2, vacuum leak detector 1 and the vacuum valve 3 by corrugated tube.
Its concrete implementation step is as follows:
1, tested vacuum product is cleaned after, connect the check system gas circuit with the vacuum pipe interface;
2, the vacuum valve of closing control vacuum leak detector;
3, open the vacuum valve of vacuum roughing vacuum pump, open the vacuum roughing vacuum pump and slightly take out;
4, observe vacuum holder table, when the data of vacuum holder table reach condition of high vacuum degree;
5, the vacuum valve of closing control roughing vacuum pump stops slightly to take out;
6, open the high precision leak locator, after instrument is finished self check and entered the inspection state, open the vacuum valve of control leak locator;
7, product is carried out the inspection of vacuum leak rate;
8, unusual when system's leak rate occurring, in the time of need checking affirmation to single product, close other the several vacuum valves in the related loop, detect one by one;
The described content of this instructions embodiment only is enumerating the way of realization of utility model design; protection domain of the present utility model should not be regarded as only limiting to the concrete form that embodiment states, protection domain of the present utility model also reach in those skilled in the art according to the utility model design the equivalent technologies means that can expect.

Claims (6)

1. system that is used for vacuum leak detection of large vacuum chambers in batches, comprise vacuum leak detector, it is characterized in that: described vacuum leak detector also is connected to the vacuum roughing vacuum pump, the vacuum holder table of the vacuum tightness dynamic data when described vacuum leak detector and described roughing vacuum pump all are connected and are used to obtain vacuum system and slightly take out, the opposite side of described vacuum holder table is connected with testing product.
2. a kind of system that is used for vacuum leak detection of large vacuum chambers in batches according to claim 1 is characterized in that: be connected with a plurality of inspection products on the described vacuum holder table.
3. a kind of system that is used for vacuum leak detection of large vacuum chambers in batches according to claim 1 and 2 is characterized in that: be equipped with vacuum valve between described vacuum holder table and inspection product, vacuum roughing vacuum pump, the vacuum leak detector.
4. a kind of system that is used for vacuum leak detection of large vacuum chambers in batches according to claim 2 is characterized in that: the connecting line of described vacuum holder table is provided with spare interface.
5. a kind of system that is used for vacuum leak detection of large vacuum chambers in batches according to claim 4 is characterized in that: be connected by weldless steel tube between described vacuum holder table and the vacuum valve.
6. a kind of system that is used for vacuum leak detection of large vacuum chambers in batches according to claim 5 is characterized in that: all be connected by corrugated tube between described inspection product, vacuum roughing vacuum pump, vacuum leak detector and the vacuum valve.
CN2010201952019U 2010-05-19 2010-05-19 System for carrying out vacuum leak detection on large vacuum chambers in batches Expired - Lifetime CN201724796U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2010201952019U CN201724796U (en) 2010-05-19 2010-05-19 System for carrying out vacuum leak detection on large vacuum chambers in batches

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2010201952019U CN201724796U (en) 2010-05-19 2010-05-19 System for carrying out vacuum leak detection on large vacuum chambers in batches

Publications (1)

Publication Number Publication Date
CN201724796U true CN201724796U (en) 2011-01-26

Family

ID=43493134

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010201952019U Expired - Lifetime CN201724796U (en) 2010-05-19 2010-05-19 System for carrying out vacuum leak detection on large vacuum chambers in batches

Country Status (1)

Country Link
CN (1) CN201724796U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103822766A (en) * 2014-02-21 2014-05-28 中国第一汽车股份有限公司 Method for detecting leakage of rear oil seal of crankshaft of diesel engine
WO2018182809A1 (en) * 2017-03-29 2018-10-04 American Sterilizer Company Leak isolation system
CN108956040A (en) * 2018-06-25 2018-12-07 安庆市晶科电子有限公司 A kind of transistor intelligent checking system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103822766A (en) * 2014-02-21 2014-05-28 中国第一汽车股份有限公司 Method for detecting leakage of rear oil seal of crankshaft of diesel engine
CN103822766B (en) * 2014-02-21 2016-08-17 中国第一汽车股份有限公司 The leakage detection method of crankshaft of diesel engine Rear oil seal
WO2018182809A1 (en) * 2017-03-29 2018-10-04 American Sterilizer Company Leak isolation system
US10508967B2 (en) 2017-03-29 2019-12-17 American Sterilizer Company Leak isolation system
CN108956040A (en) * 2018-06-25 2018-12-07 安庆市晶科电子有限公司 A kind of transistor intelligent checking system

Similar Documents

Publication Publication Date Title
CN101839794A (en) Method and system for vacuum leak detection of large vacuum chambers in batches
CN101191754A (en) Checking apparatus for checking product sealing performance and checking method
CN104865026B (en) Polyethylene valve tightness room temperature low pressure test (LPT) method
CN201724796U (en) System for carrying out vacuum leak detection on large vacuum chambers in batches
CN108120805A (en) Gas concentration detection apparatus and gas concentration detection method
CN205642764U (en) Movable makes up device that leaks hunting
CN212432449U (en) Automatic leakage detection device for fuel cell stack
CN202710433U (en) Gas diffusion initial velocity measuring system by isometric variable-pressure method
CN105758990B (en) A kind of calibration system for being used for SF6 gas micro water content detectors in GIS
CN203688152U (en) Novel gas pressure reducer verifying device
CN203405325U (en) Pressure Vessel Safety Valve Online Calibration System
CN214251422U (en) Air tightness detection device
CN201974277U (en) Air-tight testing device
CN112556921A (en) Vacuum detection device for multi-joint and vacuum detection method for film gauge
CN104776962B (en) Valve detection fixture and the valve detecting system with the fixture
CN211318128U (en) Experimental device for detect rubber permeability
CN218725056U (en) Tank car flexible pipe detection device of unloading
CN203011652U (en) Automobile water pump assembly sealing test system
CN202547895U (en) Device for quickly detecting gas leakage of gas circuit
CN201867293U (en) Gas flow rate standard device
CN209910908U (en) Valve test device
CN210037114U (en) Measuring system for measuring sealing performance of sealing box by oxygen-containing method
CN210005185U (en) Sealing performance testing system of tidal current energy generator set
CN204085808U (en) A kind of air-tightness detection device
CN210981691U (en) Tightness detection device suitable for semiconductor quartz tube

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20110126

CX01 Expiry of patent term