CN201525089U

CN201525089U - Square machine tool for wire cutting

Info

Publication number: CN201525089U
Application number: CN200920110075XU
Authority: CN
Inventors: 秦建国
Original assignee: Beijing Jinglianfa CNC Technologies Co Ltd
Current assignee: Beijing Jinglianfa CNC Technologies Co Ltd
Priority date: 2009-07-15
Filing date: 2009-07-15
Publication date: 2010-07-14
Anticipated expiration: 2019-07-15

Abstract

The utility model discloses a square machine tool for wire cutting, which comprises a left upright column and a right upright column, wherein linear guide rails are respectively arranged on the eft upright column and the right upright column, an upper and lower worktables are arranged between the left and the right upright columns, a servo motor group is connected with the upper worktable through a speed reducer and a ball screw arranged on the left upright column , and the upper worktable can reciprocate up and down along the linear guide rail; a driving shaft is arranged below the upper worktable, and a plurality of driving wheels are arranged on the driving shaft; a plurality of driven wheels are arranged above the upper worktable; the servo motor group is connected with the driving shaft in a driving manner, and the driving shafts are connected in a driving manner through a gear box; the square machine tool also comprises a take-up and pay-off mechanism which includes steel wires, wherein the steel wires are wound around the driving wheels and the driven wheels repeatedly so as to form a plurality of intersecting grids. Compared with the prior art, the utility model has the advantage that 25 monocrystalline rods with length of 500mm and polycrystalline rods can be processed once for all, and the knife-edge width is only 0.25mm, which solves the problems of low material utilization rate and low processing efficiency.

Description

Wire butting machine tool

Technical field

The utility model relates to the manufacture field of semi-conducting material monocrystalline silicon, polysilicon, particularly a kind of wire butting machine tool.

Background technology

Along with the electron trade develop rapidly, the demand of silicon electronic material is increasing, output rapid growth, silicon electronic material price high.Therefore, also more and more higher for the requirement of silicon electronic material process equipment, especially efficiency of equipment and machining accuracy there have been higher requirement, need the production efficiency height equipment of economical with materials again more.

At present, China uses disk knife butt machined monocrystalline silicon mostly.Disk knife butt machine adopts the cutting disc of gold-plated emery that crystal bar is cut, and the cutting disc otch once can only be processed a crystal bar about 2.2mm, and the utilization rate of working (machining) efficiency and material is all very low.

The utility model content

Technical problem to be solved in the utility model is, at above-mentioned prior art present situation, and provides the wire butting machine tool of a kind of stock utilization height, high efficiency.

The utility model solves the problems of the technologies described above the technical scheme that is adopted: a kind of wire butting machine tool, comprise left and right column, and it is provided with line slideway; Between described left and right column, be provided with upper and lower workbench, one servo motor set is by a reductor and be arranged at ball-screw on the left column and drive with described upper table and be connected, and described upper table can pump along described line slideway; The upper table below is provided with driving shaft, and described driving shaft is provided with some driving wheels; The upper table top is provided with driven axle, and described driven axle is provided with some followers; Described servo motor set drives with described driving shaft and is connected, and drives connection by a gear-box between the described driving shaft; It is characterized in that: also comprise a retractable cable mechanism, described retractable cable mechanism includes the wire that is used to cut; Described retractable cable mechanism can carry out retractable to described wire; Described wire is by the output of retractable cable mechanism, and order through coiling repeatedly, is forming several checked spun antungs around to described each driving wheel and each follower below the upper table, between the driving shaft; Described checked spun antung can be 16 or 25, and correspondingly, driving wheel is set to 32 or 40, and follower is set to 30 or 38;

Described retractable cable mechanism is made up of left driving shaft, right driving axle, left tensioning shaft, right tensioning shaft, left layout shaft, right layout shaft, left line wheel, right line wheel and idle wheel; Described left driving shaft, right driving axle, left tensioning shaft, right tensioning shaft, left layout shaft, right layout shaft all drive with described servo motor set and connect; Described right line wheel is installed on the right driving axle, be wound with wire on it, wire is under servo motor set drives, wind the line repeatedly through right layout shaft, idle wheel, right tensioning shaft and driving wheel, follower and to form several checked spun antungs, after passing through the left tensioning shaft in the retractable cable mechanism, left layout shaft again, be wound on the left line wheel that is installed on the left driving shaft, finish putting of wire; Treat that wire drains substantially, when promptly transferring on the left line wheel by right line wheel, by the counter-rotating of sensor control servo motor set, wire is under servo motor set drives, wind the line repeatedly through left layout shaft, idle wheel, left tensioning shaft and driving wheel, follower and to form several checked spun antungs, after passing through the right tensioning shaft in the retractable cable mechanism, right layout shaft again, be wound on the right line wheel that is installed on the right driving axle, finish the receipts of wire; Described left and right sides layout shaft is by the back and forth movement of a plurality of sensor control wires.

Described checked spun antung is such coiling: the place, two diagonal angle, top at described upper table is provided with first, second covert wheel; Driving wheel comprises several driving wheels, follower; Wire is through the idle wheel output of retractable cable mechanism, around to driving wheel, from driving wheel around to follower, through first, second break-in wheel, again through follower around to driving wheel, through coiling repeatedly, enter retractable cable mechanism through idle wheel;

Described gear-box comprises motor connecting axle, bevel gear, gear shaft and main shaft connecting axle; Servo motor set drives with driving shaft by described motor connecting axle and is connected; The motor connecting axle is connected with described gear shaft quadrature by described bevel gear realizes the quadrature transmission, and gear shaft is realized transmission in 1: 1 by spur gear and main shaft connecting axle, thereby makes two to intersect the transmission of driving shaft realization quadrature;

Described lower table is provided with the retainer support, and workpiece adopts vertical installation way.

Compared with prior art, advantage of the present utility model is, 25 of its can time processing 500mm long monocrystal rod, polycrystalline rods, edge of a knife width only has 0.25mm, has saved raw material, has improved operating efficiency, it is low promptly to have solved stock utilization, the problem that working (machining) efficiency is low.

Description of drawings

Fig. 1 is the structural representation of the utility model embodiment;

Fig. 2 is the structural representation of the retractable cable mechanism of the utility model embodiment;

Fig. 3 is the structural representation of upper table among Fig. 1;

Fig. 4 is the structural representation of the gear-box of the utility model embodiment.

Be labeled as among the figure:

11 left columns, 111 line slideways, 112 ball-screws, 12 right columns, 21 upper tables

22 lower tables, 3 servo motor set, 4 reductor 5A driving shafts, 5 driving wheels

611 first break-ins of 6 followers are taken turns 612 second break-ins and are taken turns 7 gear-boxes

71 motor connecting axles, 72 bevel gears, 73 gear shafts, 74 spur gears, 75 main shaft connecting axles

8 retractable cable mechanisms, 81 wires, 821 left driving shafts, 822 right driving axles

831 left tensioning shaft 832 right tensioning shaft 841 layout shafts 842 right layout shafts

851 left lines are taken turns 852 right lines and are taken turns 86 idle wheels, 9 workpiece

The specific embodiment

According to embodiment and accompanying drawing the utility model is described in further detail below.

Shown in Fig. 1,2,3,4, a kind of wire butting machine tool comprises left column 11, right column 12, and it is provided with line slideway 111; Between described left column 11, right column 12, be provided with upper table 21, lower table 22, one servo motor set 3 is by a reductor 4 and be arranged at ball-screw 112 on the left column 11 and drive with described upper table 21 and be connected, and described upper table 21 can pump along described line slideway 111; Upper table 21 belows are provided with driving shaft 5A, and described driving shaft 5A is provided with some driving wheels 5; Upper table 21 tops are provided with some followers 6; Described servo motor set 3 drives with described driving shaft 5A and is connected, and drives connection by a gear-box 7 between the described driving shaft 5A; Also comprise a retractable cable mechanism 8, described retractable cable mechanism 8 includes the wire 81 that is used to cut; Described retractable cable mechanism 8 can carry out retractable to described wire 81; Described wire 81 is by retractable cable mechanism 8 output, order around to described each driving wheel 5 again around to each follower 61, coiling repeatedly forms several checked spun antungs; Described checked spun antung can be 16 or 25, and correspondingly, driving wheel 5 is set to 32 or 40, and follower 6 is set to 30 or 38.Referring to Fig. 1.

Described retractable cable mechanism 8 is made up of left driving shaft 821, right driving axle 822, left tensioning shaft 831, right tensioning shaft 832, left layout shaft 841, right layout shaft 842, left line wheel 851, right line wheel 852 and idle wheel 86; Described left driving shaft 821, right driving axle 822, left tensioning shaft 831, right tensioning shaft 832, left layout shaft 841, right layout shaft 842 all drive with described servo motor set 3 and connect; Described right line wheel 852 is installed on the right driving axle 822, be wound with wire 81 on it, wire 81 is under servo motor set 3 drives, through right layout shaft 842, idle wheel 86, right tensioning shaft 832 and driving wheel 5, follower 6 several checked spun antungs of formation that wind the lines repeatedly, after passing through left tensioning shaft 831 in the retractable cable mechanism 8, left layout shaft 841 again, be wound on the left line wheel 851 that is installed on the left driving shaft 821, finish putting of wire 81; Referring to Fig. 2.

Treat that wire 81 drains substantially, when promptly transferring on the left line wheel 851 by right line wheel 852, by 3 counter-rotatings of sensor control servo motor set, wire 81 is under servo motor set 3 drives, through left layout shaft 841, idle wheel 86, left tensioning shaft 831 and driving wheel 5, follower 6 several checked spun antungs of formation that wind the lines repeatedly, after passing through right tensioning shaft 832 in the retractable cable mechanism 8, right layout shaft 842 again, be wound on the right line wheel 852 that is installed on the right driving axle 822, finish the receipts of wire 81.Referring to Fig. 2.

Described checked spun antung is such coiling: be provided with first, second covert wheel 611,612 at the place, two diagonal angle, top of described upper table 21; Driving wheel 5 comprise driving wheel 51,52,53,54,55,56 ...; Follower 6 comprise follower 61,62,63,64,6N ...;

Wire 81 is through idle wheel 86 outputs of retractable cable mechanisms 8, around to driving wheel 51, from driving wheel 51 around to driving wheel 52, from driving wheel 52 around to follower 61, again around to follower 62, by follower 62 around to driving wheel 53, from driving wheel 53, around to driving wheel 54, from driving wheel 54 around to follower 63, again around to follower 64 ..., coiling so repeatedly, around to follower 6N the time, through first break-in wheel, 611, second break-in wheel 612 around to follower 65, through follower 65 around to driving wheel 55; Through coiling repeatedly, around to driving wheel 56, wire 81 enters retractable cable mechanism 8 through idle wheel 86 again from driving wheel 56.Referring to Fig. 3.

Upper table 21 is driven down by reductor 4 and the ball-screw 112 that is arranged on the left column 11 by servo motor set 3, move downward along described line slideway 111, during the workpiece 9 to lower table 22, placed, will cut workpiece 9 by some checked spun antungs of wire 81 coilings; Simultaneously wire 81 is sprayed the cooling mortar and cool off, the carbonization micro mist in the mortar plays abrasive action, and wire 81 has certain force of strain, is furnished with mortar again, and by the rapid movement of wire, and the drive mortar grinds, cuts workpiece 9.Referring to Fig. 2,3.

Described gear-box 7 comprises motor connecting axle 71, bevel gear 72, gear shaft 73, spur gear 74 and driven axle connecting axle 75; Servo motor set 3 drives with driving shaft 5A by described motor connecting axle 71 and is connected; Motor connecting axle 71 is connected with described gear shaft 73 quadratures by described bevel gear 72 realizes the quadrature transmission, and gear shaft 73 is realized transmission in 1: 1 by spur gear 74 and driven axle connecting axle 75, thereby makes driving shaft 5A and driven axle 6 realize the quadrature transmission.Referring to Fig. 4.

Described lower table 22 is provided with the retainer support, and workpiece 9 adopts vertical installation way.Referring to Fig. 1.

Become 90 degree to install between the driving shaft 5A, synchronous in order to make between the driving shaft 5A, so adopt orthogonal motion, make wire 81 under the drive of left line wheel 851, right line wheel 852, do horizontal movement.

A plurality of AC servo motors have been used in the utility model: in the retractable cable mechanism 8, drive upper table 21 motions and all use servomotor, be referred to as servo motor set 3.

Also used the sensor control of plurality of classes in the utility model, by whole actions of numerical control CNC Based Intelligent Control complete machine, simple to operate, accurate.

Claims

1. a wire butting machine tool comprises left and right column (11,12), and it is provided with line slideway (111); At described left and right column (11,12) be provided with upper and lower workbench (21 between, 22), one servo motor set (3) is by a reductor (4) and be arranged at ball-screw (112) and described upper table (21) on the left column (11) and drive and be connected, and described upper table (21) can pump along described line slideway (111); Upper table (21) below is provided with driving shaft (5A), and described driving shaft (5A) is provided with several driving wheels (5); Upper table (21) top is provided with several followers (6); Described servo motor set (3) drives with described driving shaft (5A) and is connected, and drives connection by a gear-box (7) between the described driving shaft (5A); It is characterized in that: also comprise a retractable cable mechanism (8), described retractable cable mechanism (8) includes the wire (81) that is used to cut; Described retractable cable mechanism (8) can carry out retractable to described wire (81); Described wire (81) is by retractable cable mechanism (8) output, and order through coiling repeatedly, forms several checked spun antungs around to described each driving wheel (5) and each follower (6) between upper table (21) below, driving shaft (5A).

2. wire butting machine tool according to claim 1, it is characterized in that: described retractable cable mechanism (8) is by left and right sides driving shaft (821,822), left and right sides tensioning shaft (831,832), left and right sides layout shaft (841,842), left and right sides line wheel (851,852) and idle wheel (86) are formed; Described left and right sides driving shaft (821,822), left and right sides tensioning shaft (831,832), left and right sides layout shaft (841,842) all drive with described servo motor set (3) and connect; On the described right line wheel (852) wire (81) is housed and is installed on the right driving axle (822), wire (81) winds the line repeatedly with driving wheel (5), follower (61) through right layout shaft (842), idle wheel (86), right tensioning shaft (832) and forms several checked spun antungs, again with retractable cable mechanism (8) in left tensioning shaft (831), left layout shaft (841) and the left line wheel (851) that is installed on the left driving shaft (821) be connected, finish the retractable of wire (81); Described left and right sides layout shaft (841,842) is by the back and forth movement of a plurality of sensor control wires (81).

3. according to the described wire butting machine tool of the arbitrary claim of claim 1 to 2, it is characterized in that described gear-box (7) comprises motor connecting axle (71), bevel gear (72), gear shaft (73), spur gear (74) and driving shaft connecting axle (75); Servo motor set (3) drives with driving shaft (5A) by described motor connecting axle (71) and is connected; Motor connecting axle (71) is connected with described gear shaft (73) quadrature by described bevel gear (72) realizes the quadrature transmission, gear shaft (73) is realized transmission by spur gear (74) and driving shaft connecting axle (75), realizes the quadrature transmission between the driving shaft (5A) thereby make.

4. wire butting machine tool according to claim 3 is characterized in that: described checked spun antung can be 16 or 25; Correspondingly, driving wheel (5) is set to 32 or 40, and follower (6) is set to 30 or 38.

5. wire butting machine tool according to claim 4 is characterized in that: described lower table (22) is provided with the retainer support, and workpiece (9) adopts vertical installation way.