CN201512310U - Non-contact roller device driving mechanism - Google Patents
Non-contact roller device driving mechanism Download PDFInfo
- Publication number
- CN201512310U CN201512310U CN2009201939929U CN200920193992U CN201512310U CN 201512310 U CN201512310 U CN 201512310U CN 2009201939929 U CN2009201939929 U CN 2009201939929U CN 200920193992 U CN200920193992 U CN 200920193992U CN 201512310 U CN201512310 U CN 201512310U
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- Prior art keywords
- magnetic ring
- roller
- ring sleeve
- transmission gear
- roller device
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- 230000005540 biological transmission Effects 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 claims abstract description 21
- 238000009434 installation Methods 0.000 claims description 9
- 230000003749 cleanliness Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000001360 synchronised effect Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
The utility model discloses a non-contact roller device driving mechanism, which is suitable for driving a roller device which is arranged in a vacuum cavity in parallel and used for transmitting substrates, and comprises a driving device, a magnetic transmission device and a sealing cover, wherein the cavity wall of the vacuum cavity is provided with a mounting hole, the sealing cover is arranged in the mounting hole in a sealing way, the sealing cover is provided with a bulge with a hollow structure, the magnetic transmission device comprises a transmission gear, an outer magnetic ring sleeve and an inner magnetic ring sleeve, the transmission gear is sleeved outside the outer magnetic ring sleeve, the bulge passes through the outer magnetic ring sleeve and is pivoted with the transmission gear, the transmission gear is connected with the driving device, the inner magnetic ring sleeve is fixedly sleeved on a roller shaft of the roller device and is accommodated in the bulge hollow structure, permanent magnets are embedded in the outer magnetic ring sleeve and the inner magnetic ring sleeve, the driving device drives the transmission gear to rotate, the transmission gear drives the, the inner magnetic ring sleeve drives the roller shaft of the roller device to rotate. The utility model discloses sealed effectual, not fragile, high cleanliness, noiselessness.
Description
Technical field
The utility model relates to a kind of for transmitting device provides the driver train of power, relates in particular to a kind of contactless roller device driving mechanism that drives the roller devices that is used for substrate transport in the vacuum chamber.
Background technology
Thin plates such as glass baseplate have been widely used in makes LCD-TFT read-out, organic light emitting display (OLED) panel, thin-film solar panels application and other fellows.In this type of is used mostly at cleaning plating thin film transistor on glass, the processing procedure of this class large glass base material comprises usually implements a plurality of consecutive steps, comprises as chemical vapor deposition process (CVD), physical vapor deposition (PVD) processing procedure (PVD), organic substance evaporation, magnetron sputtering deposition or etch process.The system that is used to handle glass baseplate can comprise one or more process chamber, to carry out aforementioned described processing procedure.Current trends panel processing is towards the development of large area substrates size, so that can form more multi-display on the base material or make more large-scale telltale and more large-scale solar panel.
Because the technological requirement of this type of processing procedure is relatively stricter, promptly must under vacuum state and in the clean fully space environment, carry out, evaporation processing procedure as Organic Light Emitting Diode, its sediment is for being vaporish organic substance, very easily react and then change sediment composition on the base material if any the words of existence such as air, steam, influence its luminescent effect with the organic vapor deposition material; For another example, in the magnetron sputtering deposition processing procedure process, after the plasma glow discharge mutually in the bump space unreactable gas make degree of ionization reach avalanche condition, thereby large tracts of land, clash into metal targets on a large scale, metallic atom guides deposit or/and atomic group breaks away from target to substrate at magnetic force, right this process is bad as sealing, vacuum environment is not enough will have a strong impact on the degree of glow discharge, airborne oxygen and steam also can corrode target simultaneously, cause the magnetron sputtering processing procedure to interrupt or/and deposit film is affected; Plated film, the overlay film processing procedure of base materials such as this all glass of class all must guarantee the absolute reliability of the vacuum system of whole processing procedure.Like this, in this type of processing procedure, the vacuum transmission has just highlighted significance, and the design degree of vacuum transmission is often testing the reliability of the vacuum system of whole processing procedure.
The acquisition of vacuum environment relies entirely in sealing, job requirement at different vacuum chambers, in the vacuum driving system, propulsion source is passed to by the outside generally that inner what at first will solve like this is sealing between driving system and vacuum chamber, must guarantee that based on the requirement of making the actuating unit of all transmissions can both be synchronized with the movement simultaneously, and in the prior art, power transmission to vacuum chamber mostly adopts the dynamic seal transmission, dynamic seal transmission in the past dynamic seal on the one hand is not easy to realize, for having relatively high expectations of component, there is fugitiveness in dynamic seal on the other hand, and repeatedly the repetitive operation corrupted that causes easily sealing components and parts influences seal request.A large amount of rollers, ball push rod etc. are adopted in transmission in vacuum cavity, on the one hand roller be transmitted device contacts and can produce and keep away unavoidable wearing and tearing, adopt a large amount of roller, ball push rods also can bring pollution in a large number on the other hand to vacuum environment.The synchronous contact of inside cavity is because sprocket wheel can make the source of pollution of automatic drive device to increase with chain or/and the relative motion of synchronous pulley and synchronous interband and direct physics contact.
Therefore, be badly in need of a kind of good sealing effect, not fragile, high cleanliness, super-silent contactless contactless roller device driving mechanism.
The utility model content
The purpose of this utility model is to provide the contactless roller device driving mechanism of a kind of good sealing effect, not fragile, high cleanliness, the super-silent contactless transmission power of employing.
To achieve these goals, the technical solution of the utility model is: a kind of contactless roller device driving mechanism is provided, be applicable to and drive the parallel roller devices that is used for substrate transport that is installed in the vacuum chamber, described contactless roller device driving mechanism comprises actuating device, magnetic drive device and seal cover cap, the chamber wall of described vacuum chamber offers mounting hole, described seal cover cap is installed in the described mounting hole hermetically, described seal cover cap has the projection of hollow structure, described magnetic drive device comprises transmission gear, outer magnetic ring cover and internal magnetic ring cover, described transmission gear is placed in outside the described outer magnetic ring cover, described projection is passed described outer magnetic ring cover with articulating and is articulated with described transmission gear, described transmission gear is connected with described actuating device, described internal magnetic ring cover fixed cover is located on the roller shaft of described roller devices and is placed in the hollow structure of projection of described seal cover cap, described outer magnetic ring cover all is embedded with permanent magnet with described internal magnetic ring cover, described actuating device drives described transmission gear and rotates, described transmission gear drives the rotation of described outer magnetic ring cover, described outer magnetic ring cover drives the rotation of described internal magnetic ring cover, and described internal magnetic ring cover drives the roller shaft rotation of described roller devices.
Preferably, described outer magnetic ring puts and offers the external magnet mounting groove, and described internal magnetic ring is placed on the corresponding position of described external magnet mounting groove and offers the internal magnet mounting groove, and described permanent magnet is installed on respectively in described external magnet mounting groove and the internal magnet mounting groove.The mode that employing is offered external magnet mounting groove and internal magnet mounting groove and permanent magnet is installed within it makes to be set up magnetic between described outer magnetic ring cover and the internal magnetic ring cover and connects, and makes the simple in structure and low cost of manufacture of the contactless roller device driving mechanism of the utility model.
Preferably, described actuating device comprises first chain roller, second chain roller, chain, driving transmission shaft, driven wheel and motor, described chain is wound on described first chain roller and second chain roller and with described first chain roller and second chain roller and is meshed, described first chain roller is fixed on the output shaft of described motor, described driving transmission shaft is articulated on the outer wall of described vacuum chamber, described second chain roller is fixed on the described driving transmission shaft with described driven wheel is coaxial, described driven wheel and the engagement of described transmission gear.On the one hand, described actuating device is transferred to power by chain and drives on the transmission shaft from motor, and makes the driven wheel that is fixed thereon realize rotating synchronously by driving transmission shaft; On the other hand, described driven wheel and the engagement of described transmission gear, carry out power transmission by being meshing with each other between the gear, but actv. plays the effect of deceleration, make and to be transmitted substrate or object is more steady when transmission power, and the layout of structure is compact and reasonable more, avoids steadily not causing contactless roller device driving mechanism and vacuum chamber to vibrate because of driving the transmission shaft rotation.
Preferably, described actuating device also comprises bearing seat, and described bearing seat is fixed on the outer wall of described vacuum chamber, and described driving transmission shaft and described bearing seat articulate.When roller shaft rotated, object can directly be carried on the described roller shaft thereupon and move, and the axle mounting frame makes and prevents roller shaft distortion or fracture by the carrying conveying objects that roller shaft can be firm.
Preferably, described roller devices also comprises support and roller, described support is installed on the roller shaft both sides in the described vacuum chamber, one end of described roller shaft is captiveed joint with described internal magnetic ring cover, the other end of described roller shaft passes two described rollers successively and articulates with described support, forms the substrate transmission range between the two described rollers that passed by same described roller shaft.Described support is installed in the vacuum chamber described roller shaft reposefully, prevents the distortion that roller shaft produces owing to own wt, or owing to carrying thereon be transmitted the overweight fracture that causes of object.Described roller makes described roller devices conveying objects easily, when described contactless roller device driving mechanism is worked, substrate or be transmitted object and directly be carried on the roller, utilize the friction force between roller and the substrate, make described substrate or be transmitted object and move, finally realize the transmission of substrate or object along with the rotation of roller shaft.
Preferably, described roller offers step, and the step of the two described rollers that passed by same described roller shaft is oppositely arranged and forms described substrate transmission range.When described contactless roller device driving mechanism is worked, substrate or be transmitted object and be carried on the lower single order of described step, and the sidewall by higher single order carries out spacing to being transmitted object, realize object when transmission steadily, and can prevent that object from the skew of transmission taking place by actv..
Preferably, described contactless roller device driving mechanism also comprises seal ring, and described seal ring is connected between described seal cover cap and the described mounting hole.Described seal ring makes that the sealing effectiveness of vacuum chamber is better, and is more stable.
Compared with prior art, the contactless roller device driving mechanism of the utility model adopts the static seal transmission of contactless transmission power, by seal cover cap vacuum chamber is sealed, and by magnetic drive device mechanical drive is transformed into magnetic drive.Because a described magnetic drive device part is positioned at outside the seal cover cap, a part is positioned at seal cover cap, and realize magnetic drive by non-contacting mode, therefore, on the one hand, by seal cover cap described vacuum chamber is sealed fully and to make the good sealing effect of the contactless roller device driving mechanism of the utility model, realize easily, overcome having relatively high expectations for component in traditional dynamic seal transmission, sealing is not easy to realize, fugitiveness, repeatedly the repetitive operation corrupted that causes easily sealing components and parts influences shortcomings such as seal request; On the other hand, connect and carry out power transmission by being arranged on the outer outer magnetic ring cover of vacuum chamber and being arranged on magnetic between the internal magnetic ring cover in the vacuum chamber, make when the contactless roller device driving mechanism of the utility model moves, exterior noise can not be transferred to vacuum chamber inside, and mechanical drive is converted to magnetic drive, overcome in traditional transmission device, because the relative motion of each parts and direct physics contact make the source of pollution of inside cavity increase during mechanical drive, influence the vacuum environment in the vacuum chamber, therefore contactless roller device driving mechanism of the present utility model has adopted contactless type of drive, good sealing effect, not fragile, high cleanliness, and super-silent noiselessness.
Description of drawings
Fig. 1 is the structural representation of the contactless roller device driving mechanism of the utility model.
Fig. 2 is the cutaway view along A-A line among Fig. 1.
Fig. 3 is the enlarged drawing of B part among Fig. 2.
The specific embodiment
As Fig. 1, Fig. 2 and shown in Figure 3, the contactless roller device driving mechanism 20 of the utility model, be applicable to and drive the parallel roller devices that is used for substrate transport 4 that is installed in the vacuum chamber 15, described contactless roller device driving mechanism 20 comprises actuating device, magnetic drive device and seal cover cap 8, the chamber wall of described vacuum chamber 15 offers mounting hole, described seal cover cap 8 is installed in the described mounting hole hermetically, described seal cover cap 8 has the projection 81 of hollow structure, described magnetic drive device comprises transmission gear 5, outer magnetic ring cover 10 and internal magnetic ring cover 12, described transmission gear 5 is placed in outside the described outer magnetic ring cover 10, described protruding 81 pass with articulating described outer magnetic ring cover 10 and with described transmission gear 5 pivot joints, described transmission gear 5 is connected with described actuating device, described internal magnetic ring overlaps on the roller shaft 13 that 12 fixed covers are located at described roller devices and is placed in the hollow structure of projection 81 of described seal cover cap 8, described outer magnetic ring cover 10 all is embedded with permanent magnet with described internal magnetic ring cover 12, described actuating device drives described transmission gear 5 and rotates, described transmission gear 5 drives described outer magnetic ring cover 10 rotations, described outer magnetic ring cover 10 drives described internal magnetic ring cover 12 rotations, and described internal magnetic ring cover 12 drives roller shaft 13 rotations of described roller devices.
The better one, offer external magnet mounting groove 9 on the described outer magnetic ring cover 10, described internal magnetic ring cover 12 offers internal magnet mounting groove 11 on described external magnet mounting groove 9 corresponding positions, described permanent magnet is installed on respectively in described external magnet mounting groove 9 and the internal magnet mounting groove 11.External magnet mounting groove and mode that permanent magnet is installed were within it set up synchronous magnetic and are connected in employing was offered between described outer magnetic ring cover 10 and internal magnetic ring cover 12, made the simple in structure and low cost of manufacture of the contactless roller device driving mechanism 20 of the utility model.
The better one, described actuating device comprises first chain roller 21, second chain roller 22, chain 3, drive transmission shaft 7, driven wheel 25 and motor, described chain 3 is wound on described first chain roller 21 and second chain roller 22 and with described first chain roller 21 and second chain roller 22 and is meshed, described first chain roller 21 is fixed on the output shaft 1 of described motor, described driving transmission shaft 7 is articulated on the outer wall of described vacuum chamber 15, described second chain roller 22 and a plurality of driven wheel 25 coaxial being fixed on the described driving transmission shaft 7, described driven wheel 25 and described transmission gear 5 engagements.When described contactless roller device driving mechanism 20 is worked, the output shaft 1 of described motor drives first chain roller 21 that is fixed thereon and rotates, described first chain roller 21 drives described second chain roller 22 by described chain 3 and rotates synchronously, described second chain roller 22 drives described driven wheel 25 rotations by driving transmission shaft 7, described driven wheel 25 drives the transmission gear 5 that is engaged with and rotates, and described transmission gear 5 drives roller shaft 13 by described magnetic drive device and rotates.
Particularly, also be fixed with bearing seat 71 on the outer wall of described vacuum chamber 15, described driving transmission shaft 7 is passed in described bearing seat 71 with articulating, and be articulated in by bearing seat 71 on the outer wall of vacuum chamber 15, make that the driven wheel 25 and the meshing relation between the described transmission gear 5 that are installed on the driving transmission shaft 7 are more firm, thereby prevent to cause driven wheel 25 and transmission gear 5 dislocation because skew takes place in the position of described driving transmission shaft 7 when rotating.More specifically, also comprise annular seal space lid 6 on the described vacuum chamber 15, described annular seal space lid 6 is positioned at the top of described vacuum chamber 15, can realize the installation and the maintenance of chamber inner component by vacuum chamber 15.
The better one, described roller devices also comprises support 16 and roller 17, described support 16 is installed on roller shaft 13 both sides in the described vacuum chamber 15, one end of described roller shaft 13 overlaps 12 with described internal magnetic ring captives joint, the other end then passes two rollers 17 successively and articulates with described support 16, forms the substrate transmission range between two rollers 17 that passed by same roller shaft 13.Particularly, described roller 17 offers step, and the step of two rollers 17 that passed by same described roller shaft 13 is oppositely arranged and forms described substrate transmission range.When described contactless roller device driving mechanism 20 is worked, substrate 4 is carried on the lower single order step of described roller 17, higher single order step then carries out spacing by sidewall to substrate 4, described actuating device drives described magnetic drive device and rotates, the internal magnetic ring cover 12 of described magnetic drive device drives the roller shaft 13 that is fixed thereon and rotates, roller 17 on the described roller shaft 13 rotates thereupon, moves thereby drive carrying substrate 4 thereon.
Be described in detail the working process of described contactless roller device driving mechanism 20 below in conjunction with Fig. 1-Fig. 3: when described contactless roller device driving mechanism 20 is worked, described substrate 4 is carried on the parallel row's roller shaft 13 that is installed in the vacuum chamber 15, and the step that is positioned at two rollers 13 is oppositely arranged and forms described substrate transmission range, rotate by its output shaft 1 of motor driven, output shaft 1 drives first chain roller 21 that is fixed thereon and rotates, described first chain roller 21 drives described second chain roller 22 by described chain 3 and rotates synchronously, described second chain roller 22 drives and drives transmission shaft 7 rotations, drive transmission shaft 7 and drive a plurality of driven wheels 25 rotations that are mounted thereon, driven wheel 25 drives the transmission gear 5 that is engaged with and rotates, thereby power is delivered on the magnetic drive device from actuating device; Described transmission gear 5 drives described outer magnetic ring cover 10 rotations, described outer magnetic ring cover 10 drives the rotation synchronously of described internal magnetic ring cover 12, described internal magnetic ring cover 12 drives roller shaft 13 rotations of described roller devices, thereby mechanical drive is converted to contactless magnetic drive, and power is transferred on the roller devices from magnetic drive device; The roller 17 that the rotation of described roller shaft 13 drives on it rotates, and moves thereby drive the substrate 4 that is carried on the roller 17.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201939929U CN201512310U (en) | 2009-09-03 | 2009-09-03 | Non-contact roller device driving mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201939929U CN201512310U (en) | 2009-09-03 | 2009-09-03 | Non-contact roller device driving mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201512310U true CN201512310U (en) | 2010-06-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009201939929U Expired - Lifetime CN201512310U (en) | 2009-09-03 | 2009-09-03 | Non-contact roller device driving mechanism |
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| CN (1) | CN201512310U (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106429291A (en) * | 2016-11-08 | 2017-02-22 | 天奇自动化工程股份有限公司 | Magnetic accumulating roller |
| CN107285030A (en) * | 2016-04-11 | 2017-10-24 | 由田新技股份有限公司 | Conveying device |
| CN109775288A (en) * | 2019-03-25 | 2019-05-21 | 河北视窗玻璃有限公司 | A kind of hollow magnetic seal plate means |
| CN110596916A (en) * | 2019-10-14 | 2019-12-20 | 青岛自贸激光科技有限公司 | Miniature magnetic control light polarization controller |
| CN113895967A (en) * | 2021-10-20 | 2022-01-07 | 江苏科瑞恩自动化科技有限公司 | A Magnetic Wheel Power Pipeline Mechanism |
| CN114803281A (en) * | 2022-05-05 | 2022-07-29 | 深圳市创新特科技有限公司 | Lifting machine for conversion of butt joint dust-free workshop |
| CN115285572A (en) * | 2022-07-13 | 2022-11-04 | 奥蒂玛光学科技（深圳）有限公司 | Conveyer and plate body check out test set |
-
2009
- 2009-09-03 CN CN2009201939929U patent/CN201512310U/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107285030A (en) * | 2016-04-11 | 2017-10-24 | 由田新技股份有限公司 | Conveying device |
| CN106429291A (en) * | 2016-11-08 | 2017-02-22 | 天奇自动化工程股份有限公司 | Magnetic accumulating roller |
| CN109775288A (en) * | 2019-03-25 | 2019-05-21 | 河北视窗玻璃有限公司 | A kind of hollow magnetic seal plate means |
| CN109775288B (en) * | 2019-03-25 | 2024-05-17 | 河北视窗玻璃有限公司 | Hollow magnetic sealing plate device |
| CN110596916A (en) * | 2019-10-14 | 2019-12-20 | 青岛自贸激光科技有限公司 | Miniature magnetic control light polarization controller |
| CN113895967A (en) * | 2021-10-20 | 2022-01-07 | 江苏科瑞恩自动化科技有限公司 | A Magnetic Wheel Power Pipeline Mechanism |
| CN114803281A (en) * | 2022-05-05 | 2022-07-29 | 深圳市创新特科技有限公司 | Lifting machine for conversion of butt joint dust-free workshop |
| CN114803281B (en) * | 2022-05-05 | 2024-03-29 | 深圳市创新特科技有限公司 | Hoist that conversion of butt joint dustless workshop was used |
| CN115285572A (en) * | 2022-07-13 | 2022-11-04 | 奥蒂玛光学科技（深圳）有限公司 | Conveyer and plate body check out test set |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20100623 Effective date of abandoning: 20090903 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20100623 Effective date of abandoning: 20090903 |