CN201473329U - Polysilicon Reduction Furnace - Google Patents

Abstract

The utility model discloses a polysilicon reduction furnace, which comprises a furnace body, a chassis arranged under the furnace body, an electrode arranged on the chassis and a silicon core corresponding to the electrodes, an air inlet pipe and an air outlet pipe arranged under the chassis, and The gas pipe is connected with the nozzle installed on the chassis, and the gas outlet pipe is connected with the exhaust gas outlet installed on the chassis. There is a jacket in the furnace body, and the jacket is respectively connected with the furnace cooling water inlet pipe and the furnace cooling water outlet pipe. The chassis A chassis cooling water inlet pipe and a chassis cooling water outlet pipe are arranged on the top, and the characteristic is that the electrodes are 48 pairs, that is, 96, and are evenly distributed on the chassis. The polysilicon reduction furnace of the utility model improves the number and distribution of electrodes and nozzles on the chassis, so that the output of each batch is greatly improved compared with the existing reduction furnace, and the power consumption per kilogram of polysilicon is correspondingly reduced. Production costs and energy consumption are also reduced accordingly.

Description

Polysilicon Reduction Furnace

technical field

The utility model relates to a polysilicon reduction furnace, which mainly uses trichlorosilane and hydrogen to carry out chemical vapor deposition on a heated silicon core to produce polysilicon.

Background technique

At present, the main process technology for producing polysilicon at home and abroad is the "improved Siemens method": use chlorine and hydrogen to synthesize hydrogen chloride, hydrogen chloride and silicon powder to synthesize trichlorosilane at a certain temperature, and then separate and rectify trichlorosilane to purify. The purified high-purity trichlorosilane and hydrogen are mixed in proportion and passed into the polysilicon reduction furnace. Under a certain temperature and pressure, the deposition reaction is carried out on the energized high-temperature silicon core to form polysilicon. The reaction temperature is controlled at about 1080 degrees Celsius. Finally, rod-shaped polysilicon products are generated, and by-products such as silicon tetrachloride, dichlorodihydrosilane, and hydrogen chloride are generated at the same time.

The polysilicon reduction furnace is the main equipment for the production of polysilicon by the "improved Siemens method". Body cooling water inlet pipe, furnace cooling water outlet pipe, chassis cooling water inlet pipe, chassis cooling water outlet pipe and other accessories. The main body of the furnace body is made of stainless steel to reduce the pollution of equipment materials to the product.

Utility model content

The technical problem to be solved by the utility model is to provide a polysilicon reduction furnace, the single furnace output of the polysilicon reduction furnace is greatly improved compared with the existing polysilicon reduction furnace single furnace output.

A polysilicon reduction furnace, comprising a furnace body, a chassis arranged under the furnace body, electrodes arranged on the chassis and silicon cores installed correspondingly to the electrodes, an air inlet pipe and an air outlet pipe arranged under the chassis, the air inlet pipe and the The nozzle on the top is connected, and the gas outlet pipe is connected with the exhaust gas outlet installed on the chassis. There is a jacket in the furnace body, and the jacket is respectively connected with the furnace cooling water inlet pipe and the furnace cooling water outlet pipe. The water inlet pipe and the chassis cooling water outlet pipe are characterized in that the electrodes are 48 pairs, that is, 96, and are evenly distributed on the chassis.

Wherein, the electrodes are evenly distributed along 5 circles on the chassis, from the inner circle to the outer circle, the number of electrodes is 6 in the first circle, 12 in the second circle, 18 in the third circle, and 24 in the fourth circle. , 36 in the fifth circle.

Wherein, there are 66 nozzles, which are evenly distributed on the chassis; and there is one exhaust outlet, which is arranged in the center of the chassis.

Wherein, the nozzles are evenly distributed along five circumferences on the chassis, the innermost nozzle circumference is set between the exhaust gas outlet and the innermost electrode circumference, and the other nozzle circumferences are set between two adjacent electrode circumferences, from the inner circumference to The number of nozzles on the outer circumference is 3 in the first circle, 6 in the second circle, 12 in the third circle, 18 in the fourth circle, and 27 in the fifth circle.

Wherein, for each circle of electrodes, two adjacent electrodes are connected through electrode plates, and are respectively connected in series through silicon cores arranged on the electrodes to form a circuit loop.

Beneficial effects: the polysilicon reduction furnace of the utility model improves the number and distribution of electrodes and nozzles on the chassis, so that the output of each batch is increased by 80-120% compared with the existing 24 pairs of rod reduction furnaces, and the power consumption per kilogram of polysilicon is corresponding If it is reduced by 20-50%, the comprehensive production cost and energy consumption of polysilicon will also be reduced accordingly.

Description of drawings

The following drawings illustrate the utility model in detail in conjunction with the description, but the utility model is not limited to the specific forms shown in these drawings.

Fig. 1 is a structural schematic diagram of a polysilicon reduction furnace of the present invention.

Fig. 2 is a top view of the chassis of the polysilicon reduction furnace of the present invention.

Detailed ways

The polysilicon reduction furnace structure schematic diagram that the utility model relates to is shown in Figure 1, and 1 is furnace body (including jacket cooling water, bell jar type, double-layer), 2 is mirror hole, 3 is chassis, 4 is chassis cooling water Water inlet pipe, 5 is the chassis cooling water outlet pipe, 6 is the air inlet pipe, 7 is the spout, 8 is the air outlet pipe, 9 is the furnace body cooling water inlet pipe, 10 is the furnace body cooling water outlet pipe, and 11 is the graphite chuck (with 12 is an electrode, 13 is a silicon core, 14 is a jacket cooling water deflector, and 15 is an exhaust gas outlet.

The polysilicon reduction furnace of the present utility model comprises a furnace body 1, and the main body of the furnace body 1 is made of stainless steel to reduce the pollution of equipment materials to products. A chassis 3 is provided below the body of furnace 1, and an electrode 12 and a silicon core 13 installed corresponding to the electrode 12 are arranged on the chassis 3. An air inlet pipe 6 and an air outlet pipe 8 are arranged below the chassis 3. The spout 7 is communicated, the gas outlet pipe 8 is communicated with the tail gas outlet 15 installed on the chassis 3, a jacket is provided in the furnace body 1, and the jacket is respectively connected with the furnace body cooling water inlet pipe 9 and the furnace body cooling water outlet pipe 10, The chassis 3 is provided with a chassis cooling water inlet pipe 4 and a chassis cooling water outlet pipe 5 . The electrodes 12 are 48 pairs, that is, 96. The chassis 3 is evenly distributed along 5 circles, from the inner circle to the outer circle. The number of electrodes is 6 in the first circle, 12 in the second circle, and 18 in the third circle. 1, 24 in the fourth circle, and 36 in the fifth circle (see Figure 2). For each circle of electrodes, two adjacent electrodes 12 are connected through electrode plates, and connected in series through the silicon cores 13 arranged on the electrodes 12 respectively to form a circuit loop. There is one exhaust gas outlet 15, which is arranged in the center of the chassis 3. The number of nozzles 7 is 66, and the chassis 3 is evenly distributed along 5 circles. The innermost nozzle circumference is set between the tail gas outlet 15 and the innermost electrode circumference, and the other nozzle circumferences are set between two adjacent electrode circles. From the inner circumference to the outer circumference, the number of spouts is 3 in the first circle, 6 in the second circle, 12 in the third circle, 18 in the fourth circle, and 27 in the fifth circle (see Figure 2).

When preparing for production, install the graphite chuck 11 connecting the silicon core 13 and the electrode 12 on each pair of electrodes 12 on the chassis 3 and install the silicon core 13, then put the bell type double-layer furnace body containing jacket cooling water 1. Hoist and install on the chassis 3, conduct an air tightness test, and after confirming that there is no air leakage, the silicon core 13 is energized and heated through the electrode 12, and the temperature is controlled to 1080 degrees Celsius, and the trichlorosilane and hydrogen are ejected through the nozzle 7 of the intake pipe The mixed gas is subjected to a chemical vapor deposition reaction on the high-temperature energized silicon core 13, and finally a rod-shaped polysilicon product is produced.

Claims (5)

1. A polysilicon reduction furnace, comprising a body of furnace (1), a chassis (3) arranged below the body of furnace (1), an electrode (12) arranged on the chassis (3) and a corresponding installation of the electrode (12) The silicon core (13), the air intake pipe (6) and the air outlet pipe (8) arranged under the chassis (3), the air inlet pipe (6) communicates with the nozzle (7) installed on the chassis (3), and the air outlet pipe (8) ) is communicated with the tail gas outlet (15) installed on the chassis (3), and the body of furnace (1) is provided with a jacket, which is respectively connected with the body of furnace cooling water inlet pipe (9) and the body of furnace cooling water outlet pipe (10 ), the chassis (3) is provided with a chassis cooling water inlet pipe (4) and a chassis cooling water outlet pipe (5), which is characterized in that the electrodes (12) are 48 pairs, namely 96, which are evenly distributed on the chassis (3) up. 2. The polysilicon reduction furnace according to claim 1, characterized in that the electrodes (12) are evenly distributed along 5 circles on the chassis (3), from the inner circle to the outer circle, the number of electrodes is respectively the first circle 6, 12 in the second circle, 18 in the third circle, 24 in the fourth circle, and 36 in the fifth circle. 3. The polysilicon reduction furnace according to claim 2, characterized in that there are 66 nozzles (7) evenly distributed on the chassis (3); one exhaust gas outlet (15) is arranged on Chassis (3) center. 4. The polysilicon reduction furnace according to claim 3, characterized in that the nozzles (7) are evenly distributed along five circumferences on the chassis, and the innermost nozzle circumference is arranged between the tail gas outlet (15) and the innermost electrode circumference In between, the circumference of other nozzles is set between two adjacent electrode circumferences. From the inner circumference to the outer circumference, the number of nozzles is 3 in the first circle, 6 in the second circle, 12 in the third circle, and 18 in the fourth circle. , and 27 in the fifth circle. 5. The polysilicon reduction furnace according to any one of claims 2 to 4, characterized in that for each circle of electrodes, two adjacent electrodes (12) are connected through electrode plates, and are arranged on the electrodes (12) The silicon cores (13) are respectively connected in series to form a circuit loop.

Images