CN201456253U

CN201456253U - A special jig for silicon single crystal cutting seed crystal

Info

Publication number: CN201456253U
Application number: CN2009201032907U
Authority: CN
Inventors: 赵士锋; 冯志军; 蔡中锁
Original assignee: NINGJIN SAIMEI GANGLONG ELECTRONIC MATERIAL CO Ltd
Current assignee: NINGJIN SAIMEI GANGLONG ELECTRONIC MATERIAL CO Ltd
Priority date: 2009-06-16
Filing date: 2009-06-16
Publication date: 2010-05-12
Anticipated expiration: 2019-06-16

Abstract

A special jig for cutting seed crystals of silicon single crystal is used to solve the problem of cutting orientation of seed crystals. The technical solution is: the composition includes a reference bending plate, a reference plate, an adjustment plate and a graphite pad, the reference bending plate is composed of a vertical plate and a flat plate perpendicular to each other, the reference plate is parallel to the flat plate and fixed on the flat plate, and the adjustment plate is located on the reference plate The upper part forms an adjustable fixed connection with the reference plate, and the graphite pad is glued on the upper surface of the adjustment plate. The utility model can adjust the silicon single crystal according to the crystal orientation error and determine its cutting angle while the X-ray orientation instrument is measuring the crystal orientation of the silicon single crystal, so as to ensure the quality of the cut seed crystal. Using the jig to cut the seed crystal not only does not need to remove the silicon single crystal raw material with a large crystal orientation deviation, but also can strictly control the seed crystal orientation error within plus or minus 30 seconds.

Description

A kind of silicon single crystal cutting seed crystal special fixture

Technical field

The utility model relates to a kind of anchor clamps, particularly the silicon single crystal cutting is the special fixture of seed crystal, belongs to the semi-conducting material processing technique field.

Background technology

In monocrystalline silicon production, need utilize seeded growth monocrystalline silicon, seed crystal is crystal growth " seed ", seed crystal answers choice structure silicon crystal complete, that do not have defective to cut.The different crystal face crystal growth rate of same crystal is different, therefore will carry out crystal-cut according to the selected specific direction of the situation of crystal, and such seed crystal just can grow the crystal of anticipation.At present, the seed crystal production process is to select the less silicon single crystal raw material in drift angle, crystal orientation by x ray direction finder, directly its cutting is about the cuboid seed crystal of 100mm * 100mm * 150mm then, and the silicon single crystal bigger to the drift angle, crystal orientation then can not be used to cut seed crystal.The drawback of this conventional method is as follows: 1. can not make full use of the silicon single crystal raw material, increase enterprise's production cost; 2. even if with the seed crystal of the less silicon single crystal in drift angle, crystal orientation cutting, also have certain crystal orientation error, might cause monocrystalline silicon in growth course, to distort, the drift angle, crystal orientation is big or exceed standard, and can cause product quality significantly to descend.

Summary of the invention

A kind of silicon single crystal cutting seed crystal special fixture that silicon single crystal is accurately located cut out the high-quality seed crystal thereby being used to solve the defective of above-mentioned prior art, the utility model is provided.

The alleged problem of the utility model solves by the following technical programs:

A kind of silicon single crystal cutting seed crystal special fixture, its special feature is: comprise benchmark bent plate, datum plate, adjustment plate and graphite pads in the formation, described benchmark bent plate is made of orthogonal riser and flat board, described datum plate is with dull and stereotyped parallel and be fixed on the flat board, described adjustment plate is positioned at datum plate top, forms adjustable fixedlying connected with datum plate, described graphite pads is bonded in adjusts the plate upper surface, and its upper surface is the bonding plane of silicon single crystal.

Above-mentioned silicon single crystal cutting seed crystal special fixture, described datum plate is square plate with adjusting plate, and above-mentioned two plates are connected by clamping screw at four drift angle places, also is provided with four on the datum plate and adjusts bolt, each is adjusted bolt and is positioned at adjacent two clamping screw line centers, adjusts the bolt top and touches the adjustment plate.

Above-mentioned silicon single crystal cutting seed crystal special fixture, it is recessed that described adjustment plate is provided with four adjustment, and each adjusts the corresponding respectively bolt of adjusting of recessed position, and described adjustment bolt top is a convex globoidal.

Above-mentioned silicon single crystal cutting seed crystal special fixture, described flat board is provided with limited impression, and described adjustment plate is positioned at limited impression and is fixed by centre bolt.

The utility model can't detect the problem of adjusting its cutting orientation according to the crystal orientation at silicon single crystal cutting seed crystal and design a kind of special fixture, adopt these anchor clamps can be when x ray direction finder is measured the silicon single crystal crystal orientation, silicon single crystal is adjusted and definite its cutting angle according to the crystal orientation error, thus the quality that guarantees to cut seed crystal.Adopt this anchor clamps cutting seed crystal not only to need not to reject the bigger silicon single crystal raw material in drift angle, crystal orientation, and seed crystal crystal orientation error can be strict controlled in positive and negative 30 seconds.The design of employing the utility model can make full use of the silicon single crystal raw material, reduces production costs, and can improve the seed crystal cut quality greatly.

Description of drawings

Fig. 1 is the utility model structural representation;

Fig. 2 is Figure 1A portion zoomed-in view;

Fig. 3 is datum plate structural representation (looking up);

Fig. 4 adjusts plate structure schematic diagram (looking up).

Label is as follows in the accompanying drawing: 1. benchmark bent plate, 1-1. riser; 1-2. dull and stereotyped, the 1-3. installing hole, 2. silicon single crystal, 3. graphite pads is 4. adjusted plate, and 4-1. adjusts recessed, 5. datum plate, 6. clamping screw; 7. limited impression, 8. centre bolt is 9. adjusted bolt.

The specific embodiment

Referring to Fig. 1, comprise benchmark bent plate 1, datum plate 5 during the utility model constitutes, adjust plate 4 and graphite pads 3, the benchmark bent plate is made of orthogonal riser 1-1 and dull and stereotyped 1-2, and the riser lateral surface is the anchor clamps datum clamp face, and riser is provided with the installing hole 1-3 that is used for sectional fixture.Datum plate is with dull and stereotyped parallel, and it is positioned on the dull and stereotyped limited impression 7, and limited impression is to install spacing and be provided with for ease of datum plate, and datum plate is fixed on the flat board by centre bolt 8.Adjusting plate is positioned at datum plate top, forms adjustable fixedlying connected with datum plate.Graphite pads is bonded in adjusts the plate upper surface, and its effect is to make cutter should guarantee cutting thoroughly when the cutting silicon single crystal, is unlikely to again to damage cutter because of cutting to the adjustment plate.

Referring to Fig. 1, Fig. 3, Fig. 4, datum plate 5 and adjustment plate 4 are square plate, and above-mentioned two plates are connected by clamping screw 6 at four drift angle places, also are provided with four on the datum plate and adjust bolts 9, each adjusts the center that bolt is positioned at adjacent two clamping screw lines, adjusts the bolt top and touches the adjustment plate.

Referring to Fig. 1, Fig. 2, Fig. 4, for ease of realizing adjusting the fine setting of plate relative datum plate, to adjust plate and be provided with four recessed 4-1 of adjustment, each adjusts the corresponding respectively bolt 9 of adjusting of recessed position, adjusting bolt 9 tops is convex globoidal, adjusts the bolt end and becomes point to contact with the adjustment spill.

Still referring to Fig. 1, when the utility model is used to cut seed crystal, datum plate 5, adjustment plate 4 and graphite pads 3 are connected and installed successively, silicon single crystal 2 is bonded to graphite pads top, then datum plate is placed on the operating desk of x ray direction finder together with each part integral body on it, crystal orientation deviation by x ray oriented detection silicon single crystal 2, unclamp clamping screw then, adjust bolt according to the testing result turn, make and adjust the angle that plate changes the relative datum plate, satisfy the cutting parameter requirement up to silicon single crystal, again that clamping screw is fastening, this moment, the correct cutting orientation of silicon single crystal promptly was fixed.Silicon single crystal is installed to datum plate on the bent plate together with each part on it after the said process orientation is fixing, and bent plate is installed on the cutting equipment, can cut silicon single crystal.Adopt the seed crystal crystal orientation error of said method cutting to can be controlled in positive and negative 30 seconds.

Claims

1. A special clamp for cutting seed crystals of silicon single crystal, characterized in that: comprise a reference bending plate (1), a reference plate (5), an adjustment plate (4) and a graphite pad (3) in the composition, the reference bending plate It is composed of a vertical plate (1-1) and a flat plate (1-2) perpendicular to each other. The reference plate is parallel to the flat plate and fixed on the flat plate. The adjustment plate is located on the top of the reference plate and forms an adjustable fixed connection with the reference plate. , the graphite pad is bonded on the upper surface of the adjustment plate, the upper surface of which is the bonding surface of the silicon single crystal (2).

2. The special jig for cutting silicon single crystal seed crystals according to claim 1, characterized in that: the reference plate and the adjustment plate are both square plates, and the four corners of the two plates are fixed by locking bolts (6) connection, the reference plate is also provided with four adjustment bolts (9), each adjustment bolt is located at the center of the line connecting two adjacent locking bolts, and the top of the adjustment bolt touches the adjustment plate.

3. The special jig for cutting silicon single crystal seed crystals according to claim 2, characterized in that: the adjustment plate is provided with four adjustment recesses (4-1), the positions of each adjustment recess correspond to the adjustment bolts respectively, and the The top end of the adjusting bolt is a convex arc surface.

4. The special jig for silicon single crystal cutting seed crystal according to claim 1, 2 or 3, characterized in that: the flat plate is provided with a limiting groove (7), and the adjusting plate is located in the limiting groove and Secured by central bolt (8).