CN201311269Y - Sensor for measuring linear displacement - Google Patents
Sensor for measuring linear displacement Download PDFInfo
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- CN201311269Y CN201311269Y CNU2008201001533U CN200820100153U CN201311269Y CN 201311269 Y CN201311269 Y CN 201311269Y CN U2008201001533 U CNU2008201001533 U CN U2008201001533U CN 200820100153 U CN200820100153 U CN 200820100153U CN 201311269 Y CN201311269 Y CN 201311269Y
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 41
- 230000033001 locomotion Effects 0.000 claims abstract description 18
- 230000005284 excitation Effects 0.000 claims abstract description 14
- 238000007493 shaping process Methods 0.000 claims abstract description 11
- 239000011159 matrix material Substances 0.000 claims description 49
- 230000001939 inductive effect Effects 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000002474 experimental method Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 2
- 230000009897 systematic effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000006698 induction Effects 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract 3
- 238000010586 diagram Methods 0.000 description 6
- 238000004804 winding Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000004304 visual acuity Effects 0.000 description 3
- 230000005405 multipole Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
本实用新型提出一种用于直线位移测量的传感器，属于位移精密测量装置。传感器有两部分等分开槽的直线形基体构成绕制线圈的骨架，作为长尺或短尺；其特征在于一基体上绕有激励线圈，另一基体上绕有感应线圈；感应线圈与激励线圈相对运动；激励线圈连接激励电源，激励信号和感应线圈输出的电信号分别连接到放大电路，再经整形电路整形后，由数字比相器进行相位比较；两路信号的相位差由插补的时钟脉冲个数表示，再换算成直线位移值，直接或经微处理器及存储器处理后作直线位移数据显示。本传感器具有结构简单、成本低、分辨力高、抗干扰力强、易于产品化的优点。
The utility model provides a sensor for linear displacement measurement, which belongs to displacement precision measurement devices. The sensor has two parts of a linear substrate with equal grooves to form the skeleton of the coil, which is used as a long ruler or a short ruler; it is characterized in that an excitation coil is wound on one substrate, and an induction coil is wound on the other substrate; the induction coil is opposite to the excitation coil Movement; the excitation coil is connected to the excitation power supply, the excitation signal and the electrical signal output by the induction coil are respectively connected to the amplifying circuit, and after being shaped by the shaping circuit, the phase comparison is performed by a digital phase comparator; the phase difference of the two signals is determined by the interpolated clock The number of pulses is displayed, and then converted into a linear displacement value, and displayed as linear displacement data directly or after processing by the microprocessor and memory. The sensor has the advantages of simple structure, low cost, high resolution, strong anti-interference ability and easy commercialization.
Description
Technical field
The utility model belongs to displacement precision measurement sensor.
Background technology
Straight-line displacement and angle displacement measurement are the most basic, prevailing measurements.In order to take into account Measurement Resolution and range, many displacement transducers have adopted the grid formula structure of accurate groove on matrix, as grating, magnetic grid etc., its pulse signal that sends in motion process are carried out accumulated counts, promptly realize displacement measurement.The highdensity groove of high precision causes a lot of problems, and on the one hand groove is close more, just easy pollution the more.Seal protection no matter how, under the bad working environments of production scene, its small dust aqueous vapor all may be polluted grid line, makes it counting loss.On the other hand, groove can not be ad infinitum close, and existing density far can not satisfy the requirement of resolving power, therefore is forced to generally adopt electronic features branch mailbox, system architecture complexity.Add high-precision groove technology, make cost high.In sum, the shortcoming that exists of existing grid formula displacement transducer is: complex structure, price height, interference resistance are poor.
Summary of the invention
The purpose of this utility model is at above-mentioned the deficiencies in the prior art, a kind of straight-line displacement measured sensor that is used for is provided, need not accurate groove, without the electronic features branch mailbox, and with time clock as displacement mete-wand, thereby simple in structure, cost is low, resolving power is high, interference resistance is strong.
The technical solution of the utility model is:
A kind of straight-line displacement measured sensor that is used for, as Fig. 1 (a), Fig. 2 and shown in Figure 5, the linear matrix that sensor has two parts to wait branch to slot constitutes the skeleton of coiling, as long chi and short chi; Be wound with drive coil on one matrix, be wound with inductive coil on another matrix; Inductive coil and drive coil relative motion; Drive coil connects excitation power supply, the electric signal of pumping signal and inductive coil output is connected respectively to amplifying circuit, again after the shaping circuit shaping, carry out the phase bit comparison by digital phase comparator, the phase differential of two paths of signals is represented by the time clock number of interpolation, be converted into the straight-line displacement value again, directly or after microprocessor and memory processes, make the straight-line displacement data presentation.
Described sensor also has two kinds of forms in addition.Sensor has the skeleton of the linear matrix formation coiling of branch flutings such as 2 or 3 parts, as long chi or short chi.A kind of form is: shown in Fig. 1 (b), be wound with the drive coil and first inductive coil on the matrix jointly; Another kind of form is: shown in Fig. 1 (c), the drive coil and first inductive coil are respectively on the motionless matrix of two relative positions.On another matrix, be wound with second inductive coil then.For these two kinds of forms, first inductive coil and drive coil all keep the locus constant, second inductive coil and drive coil relative motion.Drive coil connects excitation power supply, on two groups of inductive coils, obtain respectively the identical and phase place of frequency fixing with the two path signal that changes, the electric signal of two-way output connects amplifying circuit respectively, after the shaping circuit shaping, carries out the phase bit comparison by digital phase comparator again; The phase differential of two paths of signals is represented by the time clock number of interpolation, is converted into the straight-line displacement value again, directly or make the straight-line displacement data presentation after microprocessor and memory processes.
Above-mentioned three kinds of structures, second and third kind structure is because the inductive coil that is consistent with the locus of drive coil produces the frequency of induced signal and the frequency and the phase place of phase place and excitation power supply is consistent, so this inductive coil can omit, and become first kind of structure, directly provide or provide one road signal to participate in comparing phase by excitation power supply by certain electrical part (as transformer), so, structure is more simplified, but precision may be subjected to some disturbing effects, is applicable to the occasion that some accuracy requirements are not high.
Can independently become an assembly of elements by traditional approach as the matrix of the signal generation apparatus of sensor and coil etc., and the follow-up signal treatment circuit is formed an electric appliance box.Also can be integrated into a sensor integral body to treatment circuit together with microprocessor.The counter result can be directly output as data or figure, also can transfer to microprocessor processes, thereby constitutes intelligentized sensor.This sensor can with for example high-precision grating sensor experiment of comparing of high-precision other same type of sensor, when comparing experiment, its omnidistance systematic error can be noted, be solidificated in the storer of this sensing system, carry out error correction.When reality was used, the displacement data that provides will be the more exact value after the sensing system error having been deducted, and sensor accuracy is further improved.
That this sensor has is simple in structure, cost is low, resolving power is high, interference resistance is strong, be easy to the advantage of commercialization.
Description of drawings
Fig. 1 is three kinds of textural association form synoptic diagram that are used for straight-line displacement measured sensor bobbin matrix;
Fig. 1 (a) is first kind of structure principle chart of this sensor;
Fig. 1 (b) is second kind of structure principle chart of this sensor;
Fig. 1 (c) is the third structure principle chart of this sensor;
Fig. 2 is used for the signal generation of straight-line displacement measured sensor and the schematic diagram of data handling system;
Fig. 3 is the long chi bobbin three-view diagram that is used for the straight-line displacement measured sensor;
Fig. 3 (a) adopts the right cylinder of two kinds of different-diameters to arrange the structural representation that branches such as laying formation is slotted;
Fig. 3 (b) is the side view of Fig. 3 (a);
Fig. 3 (c) is the vertical view of Fig. 3 (a);
Fig. 4 is the long and short chi unitized construction synoptic diagram that is used for the straight-line displacement measured sensor.
Fig. 4 (a) is the structural representation of long chi matrix;
Fig. 4 (b) is the structural scheme of mechanism of short chi matrix;
Fig. 4 (c) is the structural representation that long chi and short chi are combined;
Fig. 4 (d) is the side view of Fig. 4 (c);
Fig. 5 is the coiling synoptic diagram that is used for the straight-line displacement measured sensor.
Embodiment
Referring to Fig. 1 (a), this is first kind of structural principle of this sensor, it has first matrix 1 of relative motion and the skeleton that second matrix 2 constitutes coiling, be wound with drive coil 3 on first matrix 1, be wound with second inductive coil 4 on second matrix 2, the also relative motion of inductive coil and drive coil directly generates one the tunnel than phase signals by driving source, compares mutually with second inductive coil, 4 signals.
Referring to Fig. 1 (b), this is second kind of structural principle of this sensor, it has first matrix 1 of relative motion and the skeleton that second matrix 2 constitutes coiling, be wound with the drive coil 3 and first inductive coil 5 on first matrix 1, be wound with second inductive coil 4 on second matrix 2, drive coil 3 is relative motionless with first inductive coil 5, but second inductive coil 4 and drive coil 3 and 5 relative motions of first inductive coil, generate one road signal by first inductive coil 5, compare mutually with second inductive coil, 4 signals with drive coil 3 cobasis bodies.
Referring to Fig. 1 (c), this is the third structural principle of this sensor, it has first matrix 1 of relative motion and the skeleton that second matrix 2 constitutes coiling, also have and first matrix, 1 relative the 3rd motionless matrix 6 in addition, be wound with drive coil 3 on first matrix 1, be wound with first inductive coil 5 on the 3rd matrix 6, be wound with second inductive coil 4 on second matrix 2, drive coil 3 is relative motionless with first inductive coil 5, but second inductive coil 4 and drive coil 3 and 5 relative motions of first inductive coil, by on the 3rd matrix 6 and consistent with first matrix, 1 holding position first inductive coil 5 generate one road signal, compare mutually with second inductive coil, 4 signals.
This principle of sensors as shown in Figure 2, when drive coil passes through polyphase alternating current, to on two inductive coils, obtain the alternating signal with the excitation power supply same frequency respectively, during measurement and drive coil keeps same position and the inductive coil signal phase that do not have a relative motion is maintained fixed constant; Another inductive coil signal then produces phase shifts with the displacement of the matrix that reacts tested motion.Drive coil connects excitation power supply, on two groups of inductive coils, obtain respectively the identical and phase place of frequency fixing with the two path signal that changes, the electric signal of two-way output connects amplifying circuit respectively, after the shaping circuit shaping, carries out the phase bit comparison by digital phase comparator again; The phase differential of two paths of signals is represented by the time clock number of interpolation, is converted into the straight-line displacement value again, makes the straight-line displacement data presentation after microprocessor and memory processes.If be not provided with and the relatively-stationary inductive coil of drive coil, then can directly adopt the electric signal of pumping signal and inductive coil output to be connected respectively to amplifying circuit, it is the same that follow-up signal is handled.
Referring to Fig. 3, Fig. 4 and Fig. 5, sensor is made of long chi (or scale) and short chi (or moving chi), the metal or the nonmetal basal body 7 of branches such as the matrix adopting of coiling fluting.When branches such as processing are slotted, in order to improve halving precision and to simplify technology, also can adopt the right cylinder 8 or the spheroid of two kinds of different-diameters, arrange and lay shown in Fig. 3 (a), Fig. 3 (b) and Fig. 3 (c).Cylinder that diameter is big or ball are closely arranged the one deck that fixedly becomes near matrix, and the arrangement that diameter is little is fixed in each groove between two large diameter right cylinders or the spheroid, forms another layer, thus branch such as formation bobbin of slotting naturally.Scale and moving chi adopt same structure to form, and are sample different in size.
Further as shown in Figure 4, long and short chi two part matrixes combine in the mode of rail plate.Shown in Fig. 4 (a), long chi matrix 9 provides a, b, three reference fields of c simultaneously by a metallic object, and wherein a, c face are parallel, and b face and a, c face are vertical (according to actual conditions, also can adopt modes such as dovetail groove or arc groove, then the b face is inclined-plane or arc surface etc.).The a face is long chi bobbin reference field, is used to lay the two-layer right cylinder of long chi, constitutes long chi bobbin; B, c face then are used to short chi slide block that slip helical pitch reference field is provided.Shown in Fig. 4 (b), short chi matrix 10 parts are and the b of long chi, the chute that c matches that a part is then arranged two-layer right cylinder again, constitutes short chi bobbin.Partly fit together shown in Fig. 4 (c) and Fig. 4 (d) two, short chi is installed on the long chi by the helical pitch reference field on the long chi, combine together with long chi, and can relative motion.Its simple in structure, easy processing, good integrity.Also can be according to operating position with long chi as moving chi, short chi is as scale, and the two keeps relative motion to get final product.
As shown in Figure 5, be wound with drive coil 3 and the relative first motionless inductive coil 5 on the long chi matrix, be wound with second inductive coil 4 of relative motion on the short chi matrix.The method for winding of common multipole alternating current generator is adopted in coiling, or the figure of eight, " several " word winding method and form the multipole winding that distributes along straight line.The synoptic diagram of Fig. 5 for adopting single turn line and " several " font winding method on the matrix of five equilibrium fluting, to wind the line, for clarity sake, the phase in the three phase excitation of only drawing, employing be that above-mentioned second kind of form is Fig. 1 (b) structure.When moving, scale generation relative motion, the induced signal generation phase differential on two induction windings, it is represented that with mistiming Δ T then its formula for calculating displacement is:
Wherein: x-straight-line displacement, B-constant, W-coil pitch (unit is a length value), T-signal period, f-excitation power supply frequency, the mistiming that Δ T-records, ∑ p
t-time clock cumulative number.
Claims (6)
1, the linear matrix that a kind of straight-line displacement measured sensor that is used for, sensor have two parts to wait branch to slot constitutes the skeleton of coiling, as long chi or short chi; It is characterized in that being wound with drive coil on the matrix, be wound with inductive coil on another matrix; Inductive coil and drive coil relative motion; Drive coil connects excitation power supply, and the electric signal of pumping signal and inductive coil output is connected respectively to amplifying circuit, after the shaping circuit shaping, carries out the phase bit comparison by digital phase comparator again; The phase differential of two paths of signals is represented by the time clock number of interpolation, is converted into the straight-line displacement value again, directly or make the straight-line displacement data presentation after microprocessor and memory processes.
2, the linear matrix that a kind of straight-line displacement measured sensor that is used for, sensor have 2-3 partly to wait branch to slot constitutes the skeleton of coiling, as long chi or short chi; It is characterized in that being wound with the drive coil and first inductive coil on one matrix jointly, be wound with second inductive coil on another matrix for the situation that adopts two parts matrix; For the situation that adopts three part matrixes, the drive coil and first inductive coil are respectively on the motionless matrix of two relative positions, be wound with first inductive coil on the 3rd matrix, first inductive coil and drive coil keep the locus constant, second inductive coil and drive coil relative motion; In both cases, drive coil connects excitation power supply, and it is identical and phase place is fixing and the two path signal that changes to obtain frequency on two groups of inductive coils respectively, and the electric signal of two-way output connects amplifying circuit respectively, after the shaping circuit shaping, carry out the phase bit comparison again by digital phase comparator; The phase differential of two paths of signals is represented by the time clock number of interpolation, is converted into the straight-line displacement value again, directly or make the straight-line displacement data presentation after microprocessor and memory processes.
3, the straight-line displacement measured sensor that is used for as claimed in claim 1 or 2 is characterized in that inductive coil is made up of one or more inductive coil serial or parallel connections, and coil position is uniform by the space.
4, the straight-line displacement measured sensor that is used for as claimed in claim 3 is characterized in that five equilibrium fluting on the matrix is to divide two-layer arrangement and form with the right cylinder of two kinds of different-diameters or spheroid, and the tight arrangement that diameter is big fixedly becomes the one deck near matrix; The arrangement that diameter is little is fixed in each groove between two large diameter right cylinders or the spheroid, forms another layer, thus the fluting of formation five equilibrium naturally.
5. the straight-line displacement measured sensor that is used for as claimed in claim 3, it is characterized in that, on the conduct matrix of long chi, both had long chi bobbin reference field, has the helical pitch reference field that slides for short chi again, short chi is installed on the long chi by the helical pitch reference field on the long chi, combines together with long chi, and slides relatively along long chi.
6. the straight-line displacement measured sensor that is used for as claimed in claim 3 is characterized in that being solidified with in the described storer this time displacement transducer and other high-precision sensor omnidistance systematic error data of comparing and obtaining after the experiment, is used for error correction.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201001533U CN201311269Y (en) | 2008-09-27 | 2008-09-27 | Sensor for measuring linear displacement |
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| CNU2008201001533U CN201311269Y (en) | 2008-09-27 | 2008-09-27 | Sensor for measuring linear displacement |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103490682A (en) * | 2013-10-11 | 2014-01-01 | 重庆理工大学 | System and method for detecting location of rotor of alternating current servo motor |
| CN103994712A (en) * | 2014-04-28 | 2014-08-20 | 安徽华盛科技控股股份有限公司 | Passive linear displacement sensor |
| CN104655023A (en) * | 2015-02-11 | 2015-05-27 | 重庆理工大学 | Single-row time-grating linear displacement sensor based on tectonic movement optical field |
| CN104677258A (en) * | 2014-09-30 | 2015-06-03 | 重庆理工大学 | Two-dimensional plane displacement sensor |
-
2008
- 2008-09-27 CN CNU2008201001533U patent/CN201311269Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103490682A (en) * | 2013-10-11 | 2014-01-01 | 重庆理工大学 | System and method for detecting location of rotor of alternating current servo motor |
| CN103490682B (en) * | 2013-10-11 | 2016-01-20 | 重庆理工大学 | A kind of AC servo motor rotor position detecting system and detection method |
| CN103994712A (en) * | 2014-04-28 | 2014-08-20 | 安徽华盛科技控股股份有限公司 | Passive linear displacement sensor |
| CN103994712B (en) * | 2014-04-28 | 2016-09-14 | 安徽华盛科技控股股份有限公司 | Passive linear displacement transducer |
| CN104677258A (en) * | 2014-09-30 | 2015-06-03 | 重庆理工大学 | Two-dimensional plane displacement sensor |
| CN104655023A (en) * | 2015-02-11 | 2015-05-27 | 重庆理工大学 | Single-row time-grating linear displacement sensor based on tectonic movement optical field |
| CN104655023B (en) * | 2015-02-11 | 2016-11-16 | 重庆理工大学 | A single-row time grating linear displacement sensor based on the construction of moving light field |
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Address after: Chongqing Jiulongpo Yangjiaping Xingsheng Road 4, zip code: 400050 Patentee after: Chongqing University of Technology Address before: Chongqing Jiulongpo Yangjiaping Xingsheng Road 4, zip code: 400050 Patentee before: Chongqing Engineering College |
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