The crystal ingot washer
Technical field
The utility model relates to the crystal ingot flusher, especially washes the crystal ingot washer of surface impurity with High-Pressure Water.
Background technology
In the wafer workshop, after the crystal ingot evolution, surface adhesion a large amount of mortars and a spot of broken silicon bits impurity.Mortar sticks to the certainty of measurement that the crystal bar surface influences life-span and hard spot; And mortar adheres to influences angle lap, influences the board die life, also influences process velocity.Therefore need wash crystal ingot, also not have special equipment that crystal ingot is washed at present, so inefficiency, labour intensity is big.
The utility model content
The technical problems to be solved in the utility model is: in order to overcome above-mentioned technological deficiency, the utility model provides a kind of crystal ingot washer, adopts High-Pressure Water flushing surface impurity, can remove surface impurity fast, and the water that can dry up the surface again rapidly is residual.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of crystal ingot washer, has the crystalline substance holder of placing crystal ingot, the crystal ingot border is provided with the high pressure water route of crystal ingot flushing and the compression gas circuit that crystal ingot is dried up, be disposed with high-pressure hydraulic pump and water route pressure regulator valve in the high pressure water route and be communicated with conveying by pipeline, fill in the compression gas circuit by the compressed gas source of gas circuit pressure regulator valve adjusting and by pipeline and be communicated with conveying, the compression gas path pipe crosses with the high pressure waterway pipe and is communicated with, and the whole surface of crystal ingot is washed successively by automatic nozzle, dry up, brilliant holder below is provided with drainage arrangement.
Convenient, clean for the crystal ingot local surfaces is cleaned, in the high pressure water route, be provided with the distributive pipe road, distributive pipe road end is provided with the manual water shower nozzle, is provided with the gas-distributing pipe road in the compression gas circuit, and gas-distributing pipe road end is provided with manual gas blowout head.
Described drainage arrangement has buffering liquid groove, is provided with screen pack in the buffering liquid groove, and the buffering liquid groove lower end is a drainage pipeline, is convenient to the water circulation use after filtering, using water wisely.
The beneficial effects of the utility model are: clean with water under high pressure and can remove surface impurity fast, it is residual to dry up surface water fast with Compressed Gas; Washing pressure is adjustable, and flush points is evenly distributed, and covers the whole possible surface that mortar is arranged; Manual gas blowout head and manual water shower nozzle are arranged, can locally clean.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is a structural representation of the present utility model.
Among the figure: 1. brilliant holder, 2. high pressure water route, 21. high-pressure hydraulic pumps, 22. water route pressure regulator valves, 23. distributive pipe roads, 24. the manual water shower nozzle 3. compresses gas circuit, 31. gas circuit pressure regulator valves, 32. gas-distributing pipe roads, 33. manual gas blowout head, 4. automatic nozzle, 5. buffering liquid groove, 6. drainage pipeline.
The specific embodiment
A kind of as shown in Figure 1 crystal ingot washer, has the crystalline substance holder 1 of placing crystal ingot, the crystal ingot border is provided with the high pressure water route 2 of crystal ingot flushing and the compression gas circuit 3 that crystal ingot is dried up, be disposed with high-pressure hydraulic pump 21 and water route pressure regulator valve 22 in the high pressure water route 2 and be communicated with conveying by pipeline, fill in the compression gas circuit 3 by the compressed gas source of gas circuit pressure regulator valve 31 adjustings and by pipeline and be communicated with conveying, compression gas circuit 3 pipelines cross with high pressure water route 2 pipelines and are communicated with, and wash successively by 4 pairs of whole surfaces of crystal ingot of automatic nozzle, dry up, be provided with distributive pipe road 23 in the high pressure water route 2, distributive pipe road 23 ends are provided with manual water shower nozzle 24, be provided with gas-distributing pipe road 32 in the compression gas circuit 3, gas-distributing pipe road 32 ends are provided with manual gas blowout 33, brilliant holder 1 below is provided with drainage arrangement, drainage arrangement has buffering liquid groove 5, be provided with screen pack in the buffering liquid groove 5, buffering liquid groove 5 lower ends are drainage pipeline 6.
When cleaning, by water under high pressure the crystal ingot surface is cleaned earlier, and then dried up the water on crystal ingot surface is residual, if having the sordid available manual water shower nozzle 24 of local cleaning and manual gas blowout 33 pairs of parts to clean, dry up by Compressed Gas; After the cleaning, waste water need be discharged, by the screen pack in the buffering liquid groove 5 to contaminant filter, the water after the filtration can by drainage pipeline 6 discharge or recycling promptly be transported in the operation of preceding road recycling as the water source.