CN201149609Y - Wafer detection device - Google Patents

Abstract

The wafer detection device of the utility model is provided with a frame body for inserting the detection interface on a machine table, a sliding table which can be driven by a first driving component and can horizontally and transversely displace relative to the frame body is arranged below the corresponding frame body, and a carrying table which can be driven by a second driving component and can vertically displace relative to the frame body is arranged on the sliding table for placing wafers; so as to form a chip detection device which is convenient for replacing the detection interface and is especially suitable for matching with automatic material taking and placing equipment to achieve full automatic operation; in particular, the lower part of the frame body and the upper part of the carrier are respectively provided with a taper hole and a taper block which are correspondingly configured, so that the accuracy of detecting the whole wafer and reading the information and the content in the wafer is improved.

Description

Wafer inspection device

technical field

The utility model relates to a chip detection device for detecting the yield rate of chip pins, which can improve the accuracy, facilitate the replacement of the detection interface, and is especially suitable for matching with automatic pick-and-place equipment to achieve fully automatic operation.

Background technique

As shown in Figure 1, it is a kind of inspection device that is conventionally used to detect the yield rate of wafer pins. This conventional detection device is fixed with a detection interface 10 on a machine table, and corresponding to the bottom of the detection interface 10. An elevating platform 30 for placing the wafer 20 is provided. Driven by the pneumatic cylinder 40, the elevating platform 30 is displaced up and down corresponding to the detection interface 10, so that the wafer 20 on the elevating platform 30 can be in contact with the detection interface 10 to perform the wafer connection. Foot yield detection action.

And, after the lifting platform 30 is lowered, the wafer that has been tested can be taken out, and another wafer to be tested is placed on the lifting platform 30, and the pneumatic cylinder 40 is repeated to drive the lifting platform 30 to rise to perform the detection action of the wafer pin yield rate However, the above-mentioned conventional detection device is not only not easy to replace the detection interface 10, but also when the wafer completes the detection action and descends, its lifting platform 30 is still located directly below the detection interface 10, which is relatively inconvenient for picking and unloading the wafer. It cannot be used with automatic loading and unloading equipment, so that the detection speed of the wafer cannot be improved.

Utility model content

In view of this, the technical problem solved by the utility model is to improve the conventional detection device for detecting the yield rate of the chip pins, aiming to provide a method that can effectively improve the accuracy, facilitate the replacement of the detection interface, and is especially suitable for matching with automatic The pick-and-place equipment achieves a fully automated wafer inspection device.

In order to achieve the purpose of exposing, the detection device of the present invention is provided with a frame on a machine for insertion into the detection interface, and a frame corresponding to the bottom of the frame is provided which can be driven by the first drive assembly and is relatively horizontal and transverse to the frame. The sliding platform for displacement is provided with a platform on the sliding platform that can be driven by the second driving component and move up and down relative to the frame body for placing wafers.

The beneficial effect of the utility model is that the assembly design of inserting the detection interface into the frame body makes the action of replacing the detection interface more convenient; and when the wafer completes the detection and descends, the first driving component drives the lateral displacement of the stage to make the empty load The space above the table is not only convenient for picking and placing wafers, but also suitable for a fully automated wafer inspection device that is equipped with automatic pick-and-place equipment; especially, the bottom of the frame and the top of the carrier are equipped with corresponding taper holes and cones. block, so as to improve the accuracy of the overall chip inspection and read the information and content in the chip.

Description of drawings

Fig. 1 is a structural schematic diagram of a conventional wafer detection device;

Fig. 2 is a perspective view of the appearance of the wafer detection device of the present invention;

Fig. 3 is the schematic diagram of the chip insertion mode of the present utility model;

Fig. 4 is the schematic diagram of the chip placement mode of the present utility model;

Fig. 5 is a schematic diagram of the clamp adjustment action of the present invention;

Figure 6 is a schematic diagram of the action of the carrier of the present invention entering under the frame;

Fig. 7 is a schematic diagram of the lifting action of the carrier of the present invention;

Fig. 8 is a schematic diagram of the structure of the taper hole and the taper block in the utility model.

【Description of figure number】

10 detection interface 20 chips

30 lifting platform 40 air cylinder

50 machines 60 frames

61 chute 62 fixing screw

63 taper hole 70 sliding table

80 stages 81 fixtures

82 assembly holes 83 taper block

91 The first drive assembly 92 The second drive assembly

93 fine-tuning mechanism

Detailed ways

The features of the utility model can be clearly understood by referring to the detailed description of the drawings and the embodiments.

As shown in Figures 2 to 5, the wafer detection device of the present invention includes: a machine platform 50, a frame body 60, a sliding platform 70 and a carrier platform 80; wherein:

The frame body 60 is fixed on the top of the machine table 50, and a pair of chute 61 is provided at the bottom for inserting the detection interface 10, and a fixing screw 62 is provided at the position provided with the chute 61 to fix the detection interface 10, so it is convenient for replacement. The efficacy of the interface 10 is tested.

Above-mentioned sliding platform 70 is installed on the bottom of machine platform 50 corresponding to frame body 60, and can be driven by a first driving assembly 91 formed by a pneumatic cylinder to move horizontally and laterally relative to frame body 50; Wafer 20 is placed on the top of slide table 70, a pair of clamps 81 are provided on the carrier 80 for wafer 20 positioning, and a plurality of assembly holes 82 are provided for clamps 81 locking, so that the specifications of wafer 20 to be tested can be matched for replacement The jig 81 may change the assembly position of the jig 8 as shown in FIG. 5 .

Moreover, the stage 80 can be driven by the second drive assembly 92 formed by a pneumatic cylinder to move up and down relative to the frame body 60; accordingly, the overall wafer detection device is actually operated, as shown in FIG. 6 , by the first A driving assembly 91 drives the sliding table 70 and the carrier 80 to enter the bottom of the frame body 60, and then the second driving assembly 92 on the sliding table 70 drives the carrier 80 to rise, as shown in Figure 7, the wafer 20 on the carrier 80 Contact with the detection interface 10 on the frame body 60 to complete the detection action of the pin yield of the chip 10 and read the information and content in the chip 10 .

Moreover, after the wafer 20 has finished testing and descending, as shown in FIG. 4 , the first drive assembly 91 drives the stage 80 to move laterally, so that the space above the stage 80 is vacated, which is not only convenient for picking and placing the wafer 20, but also suitable for automatic picking and placing. The material equipment is fully automated.

It is worth mentioning that the utility model is further provided with a taper hole 63 and a taper block 83 as shown in FIG. The guidance of the taper hole 63 and the taper block 83 makes the wafer and the detection interface fit together; moreover, as shown in FIG. The connection of the assembly 91 enables the carrying platform 80 and the sliding platform 70 to have the function of fine adjustment relative to the frame body 50 .

In summary, the utility model provides a better and feasible wafer detection device, and the application for a new patent is submitted according to law; the technical content and technical characteristics of the utility model have been disclosed as above, but those who are familiar with this technology may still be based on The disclosure of the utility model makes various replacements and modifications without departing from the spirit of the utility model. Therefore, the protection scope of the present utility model should not be limited to those disclosed in the embodiments, but should include various replacements and modifications that do not deviate from the present utility model, and are covered by the scope of the following patent applications.

Claims (7)

1, a kind of wafer detection device is characterized in that, includes:

One board;

One support body is located at the board top and is detected interface for inserting;

One driven by one first driven unit and the slide unit of relative horizontal cross displacement with support body is located at the below of board corresponding to support body;

One driven by one second driven unit and with the microscope carrier of the relative upper and lower displacement of support body, be located on the slide unit for placing wafer.

2, wafer detection device as claimed in claim 1 is characterized in that, the bottom of this microscope carrier is provided with a pair of chute and detects interface for inserting, and is provided with in order to will detect the fixing fixed screw of interface at the position that is provided with chute.

3, wafer detection device as claimed in claim 1 is characterized in that, this microscope carrier is provided with a pair of anchor clamps for wafer orientation, and is provided with some pilot holes for the anchor clamps locking.

4, wafer detection device as claimed in claim 1 is characterized in that, this first, second driven unit is made of pneumatic cylinder.

5, wafer detection device as claimed in claim 1 is characterized in that, the below of this support body is respectively equipped with the taper hole of corresponding configuration and bores piece with the top of microscope carrier.

6, wafer detection device as claimed in claim 1 is characterized in that, this microscope carrier sees through micro-adjusting mechanism and second driven unit connects.

As claim 1 or 6 described wafer detection devices, it is characterized in that 7, this slide unit sees through micro-adjusting mechanism and first driven unit connects.

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