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CN201083500Y - Auto-tuning F-P fiber optic sensor - Google Patents

Auto-tuning F-P fiber optic sensor Download PDF

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CN201083500Y
CN201083500Y CNU2007200751773U CN200720075177U CN201083500Y CN 201083500 Y CN201083500 Y CN 201083500Y CN U2007200751773 U CNU2007200751773 U CN U2007200751773U CN 200720075177 U CN200720075177 U CN 200720075177U CN 201083500 Y CN201083500 Y CN 201083500Y
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coupler
port
fiber
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陈建永
陈迪俊
蔡海文
耿健新
方祖捷
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

一种自动调谐F-P光纤传感器,包括光源和传感头,该光源包括一个带有温控电路的激光器,该激光器经光纤与耦合器的第一端口相连,该耦合器的第三端口经单模光纤接所述的传感头,所述的耦合器的第四端口经第二光电探测器接主动控制单元,该耦合器的第二端口接第一光电探测器的输入端口,该第一光电探测器5输出端口分别连接所述的主动控制单元和信号输出单元,所述的主动控制单元的输出端接所述的温控电路,所述的传感头的构成包括F-P腔,该F-P腔的两腔面分别接硅膜和导光光纤,所述的硅膜、F-P腔和导光光纤由一石英套固定,所述的导光光纤的另一端接所述的单模光纤。本实用新型具有调谐方便、造价低廉、灵敏度高和适应环境变化的特点。

Figure 200720075177

An automatic tuning F-P optical fiber sensor includes a light source and a sensor head. The light source includes a laser with a temperature control circuit. The laser is connected to the first port of a coupler via an optical fiber. The third port of the coupler is connected to the sensor head via a single-mode optical fiber. The fourth port of the coupler is connected to an active control unit via a second photodetector. The second port of the coupler is connected to the input port of the first photodetector. The output port of the first photodetector is respectively connected to the active control unit and the signal output unit. The output end of the active control unit is connected to the temperature control circuit. The sensor head includes an F-P cavity. The two cavity surfaces of the F-P cavity are respectively connected to a silicon film and a light-guiding optical fiber. The silicon film, the F-P cavity and the light-guiding optical fiber are fixed by a quartz sleeve. The other end of the light-guiding optical fiber is connected to the single-mode optical fiber. The utility model has the characteristics of convenient tuning, low cost, high sensitivity and adaptability to environmental changes.

Figure 200720075177

Description

自动调谐F-P光纤传感器 Auto-tuning F-P fiber optic sensor

技术领域technical field

本实用新型涉及光纤传感,是一种利用光纤作为传输光介质的基于微机电系统(MEMS)工艺的法布里-帕罗谐振腔(以下简称为F-P腔)的高灵敏度工作点(简称为Q点)稳定的光纤位移/振动传感器。特别涉及到使用镀膜的F-P腔和利用一定的腔长,得到具有低精细度干涉的条纹最大对比度,通过信号输出反馈来控制可调谐激光器波长进而锁定系统Q值点的传感器系统。本实用新型适用于对环境温度或者外界介质不稳定的地方的位移、压力、超声波等进行测量。The utility model relates to optical fiber sensing, which is a high-sensitivity working point of a Fabry-Perot resonator (hereinafter referred to as F-P cavity) based on micro-electromechanical system (MEMS) technology using optical fiber as a transmission light medium (referred to as Q point) stable fiber optic displacement/vibration sensor. In particular, it involves the use of a coated F-P cavity and a sensor system that uses a certain cavity length to obtain the maximum contrast of fringes with low-precision interference, controls the wavelength of the tunable laser through signal output feedback, and then locks the Q value point of the system. The utility model is suitable for measuring the displacement, pressure, ultrasonic wave, etc. of places where the ambient temperature or the external medium is unstable.

背景技术Background technique

直到最近,压力传感器,例如振动传感器仍然是基于电容式或者压阻式的结构。这种结构有很多缺点,例如灵敏度低,高偏置电压,要求各层之间绝缘,要求膜电极之间的一致性等,以上问题都要有很复杂的解决方案。Until recently, pressure sensors, such as vibration sensors, were based on capacitive or piezoresistive structures. This structure has many disadvantages, such as low sensitivity, high bias voltage, insulation between layers, consistency between membrane electrodes, etc., all of which require complex solutions.

光纤F-P传感器能够解决电容式传感器受困扰的很多问题,比如无需偏置并且电磁绝缘。此外,光纤F-P传感器还有很多优点是电容式传感器无法比拟的。例如灵敏度高,抗电磁干扰,安全可靠,体积小,耐腐蚀,可构成光纤传感网络等,因而在工业探伤,材料特性分析,声音传感,变压器局部放电的检测,液位及水压的测定等方面具有很好的应用前景。但是目前,还有一些问题限制了它的广泛应用:在光源的选用上,要求光源线宽不能太窄也不能太宽,并且要求非常稳定;在传感头的制作上,要适应环境的变化,由于是基于干涉型的,传感头工作在F-P干涉谱(正弦型)的线性区域具有线性转换函数,信号处理比较方便。所以我们一般选用F-P腔干涉谱线中斜率最大的点作为传感头的工作点(以下又称为Q值点)(见Bing Yu,Anbo Wang,“Grating-assisted demodulation of interferometric optical sensors”Appl.Opt.42 6824-6829(2003)),在Q点附近,光信号对外界信号的响应是线性的,且具有最大的响应灵敏度。环境的变化很容易使传感头偏离灵敏度最大值点而到达非线性区域。Fiber-optic F-P sensors can solve many problems that capacitive sensors suffer from, such as no bias and electromagnetic isolation. In addition, fiber optic F-P sensors have many advantages that capacitive sensors cannot match. For example, high sensitivity, anti-electromagnetic interference, safe and reliable, small size, corrosion resistance, and can form an optical fiber sensor network, etc., so it is widely used in industrial flaw detection, material characteristic analysis, sound sensing, transformer partial discharge detection, liquid level and water pressure detection. It has a good application prospect in measurement and so on. But at present, there are still some problems that limit its wide application: in the selection of the light source, it is required that the line width of the light source should not be too narrow or too wide, and it must be very stable; in the production of the sensor head, it must adapt to changes in the environment , because it is based on the interference type, the sensor head works in the linear region of the F-P interference spectrum (sinusoidal type) and has a linear transfer function, and the signal processing is more convenient. Therefore, we generally choose the point with the largest slope in the F-P cavity interference spectrum line as the working point of the sensor head (hereinafter referred to as the Q value point) (see Bing Yu, Anbo Wang, "Grating-assisted demodulation of interferometric optical sensors" Appl. Opt.42 6824-6829(2003)), near the Q point, the response of the optical signal to the external signal is linear, and has the maximum response sensitivity. Changes in the environment can easily cause the sensor head to deviate from the maximum sensitivity point and reach the nonlinear region.

光纤F-P传感器在很多的论文中都有论述,针对问题也都提出了一些解决方案,比如文献1[John F.Dorighi,“Stabilization of an embedded fiber optic Fabry-Perot sensorfor ultrasound detection”IEEE Trans.Ultrason.Ferroelectr.Freq.Control 42,820-824(1995)],选用外腔激光器+反馈控制波长的方法对Q点进行调谐和控制,起到了对传感头的Q值点稳定控制的目的。然而这种方法会遇到外腔激光器的窄线宽带来的由于外界干扰引起的噪声(寄生F-P效应),并且该方法使用的外腔激光器会让该系统变得笨重而昂贵,并且没有考虑激光器光强的变化和由于信号的产生对干涉带来的影响,这种调谐过程中还要用到示波器,使这种方法的实用受到限制。Fiber optic F-P sensors have been discussed in many papers, and some solutions have been proposed for the problems, such as literature 1 [John F. Dorigi, "Stabilization of an embedded fiber optic Fabry-Perot sensor for ultrasound detection" IEEE Trans.Ultrason. Ferroelectr.Freq.Control 42, 820-824(1995)], the Q point is tuned and controlled by the method of external cavity laser + feedback control wavelength, which has achieved the purpose of stabilizing the Q value point of the sensor head. However, this method will encounter noise caused by external interference (parasitic F-P effect) brought by the narrow linewidth of the external cavity laser, and the external cavity laser used in this method will make the system bulky and expensive, and does not consider the laser Due to the change of light intensity and the influence of signal generation on interference, an oscilloscope is also used in this tuning process, which limits the practicality of this method.

专利号为ZL200610024955的“光纤声传感器”(蔡海文等)中,声传感器选用宽带光源+可调谐滤波器的方案,获得线宽在1nm左右的光源,这种方法如果滤波器可靠,可以获得稳定的适合F-P传感头的光源,但是这种方法的缺点也是很明显的,除了可调谐滤波器一般比较昂贵外,而且经过宽带和可调谐滤波器后的光一般是比较弱的,这就会造成系统灵敏度的下降。In the "Fiber Optic Acoustic Sensor" (Cai Haiwen, etc.) whose patent number is ZL200610024955, the acoustic sensor adopts the solution of broadband light source + tunable filter to obtain a light source with a line width of about 1nm. If the filter is reliable in this method, stable It is suitable for the light source of F-P sensor head, but the disadvantage of this method is also obvious, except that the tunable filter is generally more expensive, and the light after the broadband and tunable filter is generally relatively weak, which will cause A drop in system sensitivity.

发明内容Contents of the invention

本实用新型要解决的技术问题在于克服上述现有技术的不足,提供一种自动调谐F-P光纤传感器,该传感器应具有调谐方便、造价低廉、灵敏度高和对环境的变化具有极强的适应性的特点。The technical problem to be solved by the utility model is to overcome the deficiencies of the above-mentioned prior art and provide an automatic tuning F-P optical fiber sensor. The sensor should have the advantages of convenient tuning, low cost, high sensitivity and strong adaptability to environmental changes. features.

本实用新型设计的主要依据包括:The main basis of the utility model design comprises:

对于光源中的分布反馈式激光器(简称为DFB)的反馈效应的典型过程分析可以用范德保罗方程(Van der Pol equation)来描述。外部反馈和其线宽的关系可以直接用下试来表示:The typical process analysis of the feedback effect of the distributed feedback laser (referred to as DFB) in the light source can be described by the Van der Paul equation. The relationship between external feedback and its line width can be expressed directly by the following test:

∂∂ ff == ∂∂ ff oo [[ 11 ++ 11 ++ αα 22 κτκτ ee coscos (( ωτωτ ee ++ tanthe tan -- 11 αα )) ]] 22 -- -- -- (( 11 ))

其中:fo为没有反馈时候DFB的线宽,τe为外部反馈的延迟时间,α为线宽加宽因子,k的表达式为:Among them: f o is the line width of DFB when there is no feedback, τ e is the delay time of external feedback, α is the line width widening factor, and the expression of k is:

κκ == 11 ττ sthe s 11 -- RR sthe s RR sthe s RR ee -- -- -- (( 22 ))

τs为光在分布反馈激光器半导体内部传播一周的时间,Rs是激光的前端表面的功率反射率,Re为外部能量反馈因子。τ s is the time for light to propagate in the semiconductor of the distributed feedback laser for one week, R s is the power reflectivity of the front surface of the laser, and Re is the external energy feedback factor.

从公式1可以看出,分布反馈激光器线宽的加宽由因子

Figure S2007200751773D00023
决定,也就是由外部的能量反馈大小和反馈延迟决定,在我们的系统中,外部反馈的能量一般在负十几个dB,正好处在我们的线宽加宽范围内,经实验测得线宽加宽了大约1000倍,达到10GHz左右。From Equation 1, it can be seen that the broadening of the linewidth of a distributed feedback laser is given by the factor
Figure S2007200751773D00023
It is determined by the external energy feedback and feedback delay. In our system, the energy of external feedback is generally in the range of minus ten dB, which is just within the widening range of our line width. The bandwidth has been widened by about 1000 times, reaching about 10GHz.

我们还对外部反馈对激光器的输出功率的影响进行了测量,发现在反馈信号在5KHz的调制下,反馈对激光器输出功率的影响是可以忽略的。We also measured the influence of external feedback on the output power of the laser, and found that the influence of feedback on the output power of the laser can be ignored under the modulation of the feedback signal at 5KHz.

关于传感头,本实用新型传感头的构成包括F-P腔,该F-P腔的两腔面分别接硅膜和导光光纤,所述的硅膜、F-P腔和导光光纤由一石英套固定,下面是F-P腔腔长的选择依据:Regarding the sensing head, the composition of the sensing head of the present utility model includes an F-P cavity, and the two cavity surfaces of the F-P cavity are respectively connected to a silicon film and a light-guiding optical fiber, and the silicon film, the F-P cavity and the light-guiding optical fiber are fixed by a quartz sleeve , the following is the selection basis for the F-P cavity length:

为了得到干涉的对比度最大,F-P腔的腔长和硅膜反射率有以下关系:In order to obtain the maximum contrast of the interference, the cavity length of the F-P cavity and the reflectivity of the silicon film have the following relationship:

RR 22 22 == ∫∫ 00 aa expexp (( -- 22 rr 22 ωω 00 22 )) ·&Center Dot; rr ·&Center Dot; 22 ππ ·&Center Dot; drdr ∫∫ 00 aa ωω 00 22 ωω 22 22 expexp (( -- 22 rr 22 ωω 22 22 )) ·&Center Dot; rr ·&Center Dot; 22 ππ ·&Center Dot; drdr ·&Center Dot; RR 11 22 TT 11 44 -- -- -- (( 33 ))

其中:R1和T1为导光光纤端面的反射率和透过率,R2为硅膜内侧的反射率,z0为腔的特征参数,ω0为光纤纤芯的内半径,ω2为光传播到硅膜处的光斑半径,λ为激光波长,腔长z2表示为:Among them: R 1 and T 1 are the reflectivity and transmittance of the end face of the light-guiding fiber, R 2 is the reflectivity inside the silicon film, z 0 is the characteristic parameter of the cavity, ω 0 is the inner radius of the fiber core, ω 2 is the spot radius where the light propagates to the silicon film, λ is the laser wavelength, and the cavity length z 2 is expressed as:

zz 22 == zz 00 11 -- ωω 22 22 ωω 00 22 -- -- -- (( 44 ))

zz 00 == ππ ωω 00 22 λλ -- -- -- (( 55 ))

由于受到普通半导体DFB激光器的波长调谐限制,我们的F-P腔长一般为选择大于200um,考虑到避免硅两个面的反射,我们对硅膜镀膜选择的反射率应该大于70%,所以腔长的选择是各个因素共同作用的结果。Due to the wavelength tuning limitation of ordinary semiconductor DFB lasers, our F-P cavity length is generally selected to be greater than 200um. Considering the avoidance of reflections on both sides of silicon, the reflectivity of our silicon film coating should be greater than 70%, so the cavity length Selection is the result of the joint action of various factors.

本实用新型的技术解决方案如下:The technical solution of the utility model is as follows:

一种自动调谐F-P光纤传感器,包括光源和传感头,其特点是该光源包括一个激光器和相应的驱动电路和温控电路,该激光器经光纤与耦合器的第一端口相连,该耦合器的第三端口经单模光纤接所述的传感头,所述的耦合器的第四端口经第二光电探测器接主动控制单元,该耦合器的第二端口接第一光电探测器的输入端口,该第一光电探测器输出端口分别连接所述的主动控制单元和信号输出单元,所述的主动控制单元的输出端接所述的温控电路,所述的传感头的构成包括F-P腔,该F-P腔的两腔面分别接硅膜和导光光纤,所述的硅膜、F-P腔和导光光纤由一石英套固定,所述的导光光纤的另一端接所述的单模光纤。An automatic tuning F-P fiber optic sensor, including a light source and a sensor head, is characterized in that the light source includes a laser and a corresponding drive circuit and temperature control circuit, the laser is connected to the first port of the coupler through an optical fiber, and the coupler's The third port is connected to the sensing head through a single-mode optical fiber, the fourth port of the coupler is connected to the active control unit through the second photodetector, and the second port of the coupler is connected to the input of the first photodetector port, the output port of the first photodetector is respectively connected to the active control unit and the signal output unit, the output terminal of the active control unit is connected to the temperature control circuit, and the composition of the sensing head includes F-P cavity, the two cavity surfaces of the F-P cavity are respectively connected to the silicon film and the light-guiding fiber, the silicon film, the F-P cavity and the light-guiding fiber are fixed by a quartz sleeve, and the other end of the light-guiding fiber is connected to the single mode fiber.

所述的F-P的腔长≥200μm。The cavity length of the F-P is ≥200 μm.

所述的耦合器为3dB耦合器。The coupler is a 3dB coupler.

所述的光源的激光器是一分布反馈单模半导体激光器,而且该分布反馈单模半导体激光器的输出端具有光反馈。The laser of the light source is a distributed feedback single-mode semiconductor laser, and the output end of the distributed feedback single-mode semiconductor laser has optical feedback.

所述的硅膜的内侧面镀有反射膜,反射率的选择范围为70%~100%。由于在导光光纤端面镀膜会存在一定的难度和随机性,我们对导光光纤的端面不进行镀膜处理,这样导光光纤端面的功率反射率大约就是3.5%,The inner surface of the silicon film is coated with a reflective film, and the selectable range of reflectivity is 70%-100%. Due to the difficulty and randomness of coating the end face of the light guide fiber, we do not coat the end face of the light guide fiber, so that the power reflectivity of the end face of the light guide fiber is about 3.5%.

所有的连线都采用单模光纤进行连接,接头一般都尽量采用有角度的活动连接器(APC接头),以减小额外的F-P干扰。All connections are connected by single-mode optical fiber, and the joints generally try to use angled active connectors (APC joints) to reduce additional F-P interference.

本实用新型的技术效果:Technical effect of the present utility model:

(1)本实用新型采用对传感头的F-P腔的腔长进行设计,采用长的F-P腔长的传感头,以降低对激光器波长调谐范围的要求;(1) The utility model adopts the design of the cavity length of the F-P cavity of the sensor head, and adopts a sensor head with a long F-P cavity length to reduce the requirements for the wavelength tuning range of the laser;

(2)本实用新型传感头的硅膜的内侧面镀有反射膜,避免了硅膜两个反射面反射光对接收信号产生干扰,使F-P干涉条纹的对比度尽可能的大,一般大于30dB,极大地提高了系统的灵敏度;(2) The inner surface of the silicon film of the sensor head of the utility model is coated with a reflective film, which prevents the reflected light from the two reflective surfaces of the silicon film from interfering with the received signal, and makes the contrast of the F-P interference fringes as large as possible, generally greater than 30dB , greatly improving the sensitivity of the system;

(3)本实用新型的主动控制单元接收第一光电探测器的电信号主动调节光源的DFB激光器的温控,及时反馈控制传感头的工作点处于F-P腔的Q点位置,提高了系统的灵敏度和动态范围,避免了在系统校准时要用到大的光谱仪和示波器的问题,极大地简化了系统的结构。(3) The active control unit of the present utility model receives the electric signal of the first photodetector and actively adjusts the temperature control of the DFB laser of the light source, and timely feedbacks and controls the operating point of the sensing head to be at the Q point position of the F-P cavity, which improves the system performance. Sensitivity and dynamic range avoid the problem of using large spectrometers and oscilloscopes during system calibration, which greatly simplifies the structure of the system.

(4)采用了分布反馈单模半导体激光器作光源,解决了窄带宽激光器所带来的对外界敏感的问题,并且使光源的能量利用率高,输出能量高,提高了系统的灵敏度,并且光源变得小巧,缩小了系统的体积;(4) A distributed feedback single-mode semiconductor laser is used as the light source, which solves the problem of sensitivity to the outside world caused by the narrow bandwidth laser, and makes the energy utilization rate of the light source high, the output energy is high, and the sensitivity of the system is improved. Become compact and reduce the size of the system;

附图说明Description of drawings

图1是本实用新型自动调谐F-P光纤传感器的结构示意图Fig. 1 is the structural representation of automatic tuning F-P optical fiber sensor of the present utility model

具体实施方式Detailed ways

先请参阅图1,图1是本实用新型自动调谐F-P光纤传感器的结构示意图,也是本实用新型实施例的结构示意图,由图可见,本实施例自动调谐F-P光纤传感器,包括光源1和传感头4,该光源1是一个带温控电路的分布反馈单模半导体激光器,该激光器经光纤与耦合器2的第一端口201相连,该耦合器2的第三端口203经单模光纤3接所述的传感头4,所述的耦合器2的第四端口204经第二光电探测器6接主动控制单元7,该耦合器2的第二端口202接第一光电探测器5的输入端口,该第一光电探测器5的输出端分别连接所述的主动控制单元7和信号输出单元8,所述的主动控制单元7的输出端接所述的光源1的温控电路,所述的传感头4的构成包括F-P腔402,该F-P腔402的两腔面分别接硅膜401和导光光纤404,所述的硅膜401、F-P腔402和导光光纤404由一石英套403固定,所述的导光光纤404的另一端接所述的单模光纤3。First please refer to Fig. 1, Fig. 1 is the structural representation of the automatic tuning F-P fiber optic sensor of the present invention, also is the structural representation of the utility model embodiment, as can be seen from the figure, the present embodiment automatic tuning F-P fiber optic sensor, comprises light source 1 and sensor Head 4, the light source 1 is a distributed feedback single-mode semiconductor laser with a temperature control circuit, the laser is connected to the first port 201 of the coupler 2 through an optical fiber, and the third port 203 of the coupler 2 is connected through a single-mode optical fiber 3 The sensor head 4, the fourth port 204 of the coupler 2 is connected to the active control unit 7 through the second photodetector 6, and the second port 202 of the coupler 2 is connected to the input of the first photodetector 5 port, the output end of the first photodetector 5 is respectively connected to the active control unit 7 and the signal output unit 8, the output end of the active control unit 7 is connected to the temperature control circuit of the light source 1, and the The composition of the sensing head 4 includes an F-P cavity 402, and the two cavity surfaces of the F-P cavity 402 are respectively connected to a silicon film 401 and a light-guiding fiber 404, and the silicon film 401, the F-P cavity 402 and the light-guiding fiber 404 are formed by a quartz sleeve 403 is fixed, and the other end of the light-guiding fiber 404 is connected to the single-mode fiber 3 .

在本实施例中所述的耦合器2为3dB耦合器。所述的硅膜401的内侧面镀有高反射膜。所有的连线都采用单模光纤进行连接,接头一般都尽量采用有角度的活动连接器连接,以减小额外的F-P干扰。The coupler 2 described in this embodiment is a 3dB coupler. The inner surface of the silicon film 401 is coated with a high reflection film. All connections are connected by single-mode optical fiber, and the joints are generally connected by angled movable connectors to reduce additional F-P interference.

所述的第一光电探测器5和第二光电探测器6选为1550nm附近的光电探测器。The first photodetector 5 and the second photodetector 6 are selected as photodetectors near 1550nm.

本实施例的工作情况如下:The working conditions of this embodiment are as follows:

光从光源1出发,经耦合器2的第一端口进,从第三端口203、第四端口204分两路输出,一路从第四端口204输出由第二光电探测器6探测,转变为电信号,称为光束电信号G,进入主动控制单元7,另一路由第三端口203输出经单模光纤3进入传感头4,传感头4由硅膜401、F-P腔402、石英套403和导光光纤404构成,在光纤端面未镀膜,反射率为3.5%,硅膜内侧镀金,反射率100%,腔长362um,经测量表明该F-P腔402的干涉对比度达到22.88dB。当光束进入传感头4时,在导光光纤404端面有一部分反射,一部分进入F-P腔402后被硅膜401反射后在导光光纤404的端面处产生干涉,属于低精细度的F-P干涉,又由于光源1的线宽比较宽,所以一般只需考虑一次反射的干涉结果。硅膜401的内面镀有高反射膜,与导光光纤404的端面形成一个F-P腔402。外界震动使硅膜401产生受迫震动,进而改变F-P腔402的腔长,这样在导光光纤404端面的干涉条纹将会对光的强度进行调制。被调制的光称为信号光,又经过单模光纤3从耦合器2第三端口203输入,由耦合器2的第一端口201和第二端口202输出,从第二端口202输出的信号光被第一光电探测器5探测,转变为电信号,称为信号光电信号,该信号光电信号主要部分X1经输出单元8输出供使用,该信号光电信号另一部分X2进入主动控制单元7,在主动控制单元7中:The light starts from the light source 1, enters through the first port of the coupler 2, and outputs in two ways from the third port 203 and the fourth port 204, and one way is output from the fourth port 204 and is detected by the second photodetector 6, and converted into electrical The signal, called beam electrical signal G, enters the active control unit 7, and the other route is output through the third port 203 and enters the sensing head 4 through the single-mode optical fiber 3. The sensing head 4 is composed of a silicon membrane 401, an F-P cavity 402, and a quartz sleeve 403. It is composed of a light-guiding fiber 404, the end face of the fiber is not coated, the reflectivity is 3.5%, the inner side of the silicon film is gold-plated, the reflectivity is 100%, the cavity length is 362um, and the measurement shows that the interference contrast of the F-P cavity 402 reaches 22.88dB. When the light beam enters the sensing head 4, there is a part of reflection at the end face of the light guiding fiber 404, and a part enters the F-P cavity 402 and is reflected by the silicon film 401 and then interferes at the end face of the light guiding fiber 404, which belongs to low-precision F-P interference. And because the line width of the light source 1 is relatively wide, generally only one reflection interference result needs to be considered. The inner surface of the silicon film 401 is coated with a high reflection film, and an F-P cavity 402 is formed with the end surface of the light guiding fiber 404 . External vibrations cause the silicon membrane 401 to vibrate, thereby changing the cavity length of the F-P cavity 402, so that the interference fringes on the end face of the light guiding fiber 404 will modulate the intensity of the light. The modulated light is called signal light, which is input from the third port 203 of the coupler 2 through the single-mode fiber 3, and output from the first port 201 and the second port 202 of the coupler 2, and the signal light output from the second port 202 Detected by the first photodetector 5, it is converted into an electrical signal, which is called a signal photoelectric signal. The main part of the signal photoelectric signal X1 is output through the output unit 8 for use, and the other part of the signal photoelectric signal X2 enters the active control unit 7. In control unit 7:

(1)将信号光电信号X2和光束电信号G取平均(滤波)后由除法器相除,取得一个相对光源的X2/G控制信号,这样做的目的是去除光源功率漂动影响,获得一个与光源功率漂动无关的控制信号,也即反映传感头4激光反射输出水平的相对值;(1) The signal photoelectric signal X2 and the beam electrical signal G are averaged (filtered) and then divided by a divider to obtain a X2/G control signal relative to the light source. The purpose of this is to remove the influence of light source power drift and obtain a A control signal that has nothing to do with light source power drift, that is, a relative value that reflects the laser reflection output level of the sensing head 4;

(2)将该结果和一个只和传感头本身的性质相关的参数的大小相比较。(2) Compare the result with the magnitude of a parameter that is only related to the properties of the sensing head itself.

(3)比较的结果通过一个比例积分电路来调节控制光源1中的温控电路,从而保证光源1中的激光器的波长始终使传感头4工作在Q值点附近。(3) The comparison result adjusts and controls the temperature control circuit in the light source 1 through a proportional integral circuit, so as to ensure that the wavelength of the laser in the light source 1 always makes the sensor head 4 work near the Q value point.

另外,作为本实用新型很重要的一点,本实用新型的激光器输出端是不加隔离器的,根据理论,对分布反馈半导体激光器加入少量反馈后,大约15~18dB,激光器的输出线宽会急剧加宽,测量结果表明,引入反馈后激光器的输出线宽由几MHz变到了大约10GHz,恰好处在我们测量的范围内。In addition, as a very important point of the utility model, the output end of the laser of the utility model does not add an isolator. According to the theory, after adding a small amount of feedback to the distributed feedback semiconductor laser, the output line width of the laser will be sharply increased by about 15-18dB. Widening, the measurement results show that the output linewidth of the laser changes from a few MHz to about 10GHz after the feedback is introduced, which is just within the range we measured.

信号输出单元8可根据需要由信号前置放大,滤波,后级放大后接到示波器上或者显示系统上;或者前放后由数据采集卡连接到电脑上,以对信号进行处理,以得到探测信号的诸如频率,强度,声速,方位等物理量。The signal output unit 8 can be pre-amplified by the signal, filtered, and then connected to the oscilloscope or display system after the post-amplification; or connected to the computer by the data acquisition card after the pre-amplification, so as to process the signal and obtain detection Physical quantities of a signal such as frequency, intensity, speed of sound, azimuth, etc.

试验表明,本实用新型传感器具有调谐方便、造价低廉、灵敏度高和对环境的变化具有极强的适应性的特点。Tests show that the sensor of the utility model has the characteristics of convenient tuning, low cost, high sensitivity and strong adaptability to environmental changes.

Claims (6)

1.一种自动调谐F-P光纤传感器,包括光源(1)和传感头(4),其特征在于该光源(1)包括一个带有温控电路的激光器,该激光器直接经光纤与耦合器(2)的第一端口(201)相连,该耦合器(2)的第三端口(203)经单模光纤(3)接所述的传感头(4),所述的耦合器(2)的第四端口(204)经第二光电探测器(6)接主动控制单元(7),该耦合器(2)的第二端口(202)接第一光电探测器(5)的输入端口,该第一光电探测器(5)的输出端口分别连接所述的主动控制单元(7)和信号输出单元(8),所述的主动控制单元(7)的输出端接所述的温控电路,所述的传感头(4)的构成包括F-P腔(402),该F-P腔(402)的两腔面分别接硅膜(401)和导光光纤(404),所述的硅膜(401)、F-P腔(402)和导光光纤(404)由一石英套(403)固定,所述的导光光纤(404)的另一端接所述的单模光纤(3)。1. an automatic tuning F-P fiber optic sensor, comprising a light source (1) and a sensing head (4), is characterized in that the light source (1) includes a laser with a temperature control circuit, and the laser directly passes through the optical fiber and the coupler ( 2) connected to the first port (201), the third port (203) of the coupler (2) is connected to the sensor head (4) via a single-mode optical fiber (3), and the coupler (2) The fourth port (204) of the coupler (2) is connected to the input port of the first photodetector (5) through the second photodetector (6) to the active control unit (7), and the second port (202) of the coupler (2) is connected to the input port of the first photodetector (5), The output ports of the first photodetector (5) are respectively connected to the active control unit (7) and the signal output unit (8), and the output terminal of the active control unit (7) is connected to the temperature control circuit , the composition of the sensing head (4) includes an F-P cavity (402), and the two cavity surfaces of the F-P cavity (402) are respectively connected to a silicon film (401) and a light-guiding optical fiber (404), and the silicon film ( 401), the F-P cavity (402) and the light-guiding fiber (404) are fixed by a quartz sleeve (403), and the other end of the light-guiding fiber (404) is connected to the single-mode fiber (3). 2.根据权利要求1所述的自动调谐F-P光纤传感器,其特征在于所述的F-P腔(402)的腔长≥200μm。2. The auto-tuning F-P fiber sensor according to claim 1, characterized in that the cavity length of the F-P cavity (402) is ≥ 200 μm. 3.根据权利要求1所述的自动调谐F-P光纤传感器,其特征在于所述的耦合器(2)为3dB耦合器。3. The automatic tuning F-P fiber optic sensor according to claim 1, characterized in that said coupler (2) is a 3dB coupler. 4.根据权利要求1所述的自动调谐F-P光纤传感器,其特征在于所述的光源(1)的激光器为分布反馈单模半导体激光器,该激光器的输出端具有光反馈。4. The automatic tuning F-P fiber sensor according to claim 1, characterized in that the laser of the light source (1) is a distributed feedback single-mode semiconductor laser, and the output of the laser has optical feedback. 5.根据权利要求1所述的自动调谐F-P光纤传感器,其特征在于所述的硅膜(401)的内侧面镀有反射膜,反射率的选择范围为70%~100%。5. The self-tuning F-P fiber optic sensor according to claim 1, characterized in that the inner surface of the silicon film (401) is coated with a reflective film, and the reflectivity ranges from 70% to 100%. 6.根据权利要求1所述的自动调谐F-P光纤传感器,其特征在于所有的连线都采用单模光纤进行连接,所有接头采用有角度的活动连接器。6. The automatic tuning F-P fiber optic sensor according to claim 1, characterized in that all connections are connected by single-mode optical fibers, and all joints are angled movable connectors.
CNU2007200751773U 2007-09-29 2007-09-29 Auto-tuning F-P fiber optic sensor Expired - Fee Related CN201083500Y (en)

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Cited By (4)

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CN104215368A (en) * 2014-09-15 2014-12-17 江苏昂德光电科技有限公司 F-P cavity optical fiber pressure sensing device and demodulation method thereof
CN107024236A (en) * 2017-05-27 2017-08-08 成都凯天电子股份有限公司 F P/FBG fibre optical sensor demodulating systems
CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
CN111044137A (en) * 2019-09-10 2020-04-21 天津大学 Optical fiber acoustic vibration sensor based on gold-plated vibration film and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104215368A (en) * 2014-09-15 2014-12-17 江苏昂德光电科技有限公司 F-P cavity optical fiber pressure sensing device and demodulation method thereof
CN107024236A (en) * 2017-05-27 2017-08-08 成都凯天电子股份有限公司 F P/FBG fibre optical sensor demodulating systems
CN107024236B (en) * 2017-05-27 2023-10-24 成都凯天电子股份有限公司 F-P/FBG optical fiber sensor demodulation system
CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
CN111044137A (en) * 2019-09-10 2020-04-21 天津大学 Optical fiber acoustic vibration sensor based on gold-plated vibration film and manufacturing method thereof

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