CN201045735Y

CN201045735Y - Wafer bearing and fixing device

Info

Publication number: CN201045735Y
Application number: CNU2007200027048U
Authority: CN
Inventors: 官大发
Original assignee: Weiming Technology Co ltd
Current assignee: Weiming Technology Co ltd
Priority date: 2007-01-30
Filing date: 2007-01-30
Publication date: 2008-04-09
Anticipated expiration: 2017-01-30

Abstract

The utility model relates to a wafer bears fixing device for the wafer sets up fixedly, and it includes annular frame body and a pair of fixed establishment, wherein the frame body is equipped with the interior flange face that supplies the wafer to paste to connect and forms the terminal surface above the interior flange face, fixed establishment contains the fixed subassembly of fixed connection to the frame body, pin joint on the fixed subassembly detains the piece and corresponds to the position of detaining the piece and fix the magnetic component on the frame body, the magnetic component is used for carrying out magnetic adsorption to detaining the piece, and makes detaining the piece and press and fix on the wafer; therefore, when the wafer is loaded into the frame body, the fixing mechanism can quickly press and fix the wafer, and when the wafer is taken down, the rapid detaching operation can be completed.

Description

The crystal chip bearing fixture

Technical field

The utility model relates to a kind of carrying fixture, particularly a kind ofly is used to provide wafer to install fixing carrying fixture.

Background technology

Because semiconductor industry is flourish, constantly increase in the demand of each side such as mobile phone or communication to chip, therefore industry has been developed semiconductor transistor miscellaneous successively in a large number, this development trend has not only been accelerated information flow speed and efficient, and brings great convenience for people's life and work.In addition, because the making flow process of wafer (Wafer) is quite complicated, and after in manufacturing process, must coming wafer fixed with the crystal chip bearing fixture, again it is immersed in the acetone and other organic solvent, again through cleaning and drying and other steps, the set quality of wafer will badly influence the product yield and put the convenience of getting, and therefore, the design people promptly improves as research topic with this.

Known crystal chip bearing fixture, as shown in Figure 1, it mainly comprises annular framework 10a, a plurality of fastening piece 20a and a plurality of screw 30a, wherein framework 10a puts for wafer 5, screw 30a then is arranged in the end of fastening piece 20a, and equidistantly be fixed on the top circumferential surface of framework 10a, and can make rotary oscillation with respect to screw 30a by fastening piece 20a, thus press fixing to wafer 5.

Yet, known crystal chip bearing fixture is still having following problem in the practical application: because it is when imposing fixing or unloading to wafer 5, be by seriatim each fastening piece 20a being done to screw in or screw out, and press fixing or the removal separation to wafer 5, therefore, quite time-consuming and inconvenient in operating process, and derive operating personnel's problems such as human cost are arranged, thereby demand urgently being improved.

The utility model content

Main purpose of the present utility model is, provide a kind of being used for to install fixing crystal chip bearing fixture for wafer, it comprises annular framework and a pair of fixed mechanism, and wherein said framework is provided with the inward flange face that amplexiforms for wafer and is formed at the end face of inward flange face top; Described fixed mechanism comprises the fixation kit that is fixedly attached to framework, the fastening piece that is articulated in fixation kit and corresponding to the position of fastening piece and be fixed to the magnet assembly of framework, described magnet assembly is in order to carrying out magnetic absorption to fastening piece, and fastening piece pressed be fixed on the wafer.

Compared with prior art, the beneficial effects of the utility model are, by the magnetic suction-operated between fastening piece and the magnet assembly, in the time of in wafer is loaded into framework, can utilize fixed mechanism to press fixing fast to it, and when taking off wafer, also can finish unloading operation rapidly.

Description of drawings

Fig. 1 is the combination schematic diagram of known carrying fixture;

Fig. 2 is a combination schematic diagram of the present utility model;

Fig. 3 is a sectional perspective enlargement decomposition of the present utility model;

Fig. 4 is the combination schematic diagram of Fig. 3;

Fig. 5 is a local assembled sectional view of the present utility model;

Fig. 6 is that the utility model is used for the cutaway view for wafer placement; And

Fig. 7 is the combination appearance figure of the utility model and wafer.

In the accompanying drawing, the list of parts of each label representative is as follows:

Framework 10a screw 20a

Fastening piece 30a

Framework 10 inward flange faces 11

Inclined plane 12 end faces 13

Screw 14 shrinkage pools 15

Fixed mechanism 20

Fixation kit 21 open slots 211

Fastening piece 22 grooves 221

Pivot 222 button portions 223

Magnet assembly 23

Wafer 5

Embodiment

Relevant detailed description of the present utility model and technology contents, conjunction with figs. is carried out following explanation, however accompanying drawing only provides reference and explanation usefulness, is not to be used for the utility model is limited.

Fig. 2 is a combination schematic diagram of the present utility model, and Fig. 3 is a sectional perspective enlargement decomposition of the present utility model, and Fig. 4 is the combination schematic diagram of Fig. 3, and Fig. 5 is a local assembled sectional view of the present utility model.The utility model provides a kind of crystal chip bearing fixture, and it mainly comprises annular framework 10 and a pair of fixed mechanism 20, wherein:

Annular framework 10 can be made by aluminium or other material, and framework 10 is rounded.Extend internally in the bottom surface of framework 10 and to be formed with annular inward flange face 11, on the lateral of inward flange face 11, be extended with

inclined plane

12,12 end is extended with the end face 13 parallel with inward flange face 11 on the inclined plane, and on end face 13, equidistantly offer three screws 14, be respectively equipped with shrinkage pool 15 in the left and right sides of each screw 14.

Fixed mechanism 20 can be a pair or more of configuration, is three groups in the present embodiment, and it comprises fixation kit 21, fastening piece 22 and magnet assembly 23, and fixation kit 21 can be screw, and in like manner it also can be various kenels such as circular shaft, rivet.The below of described screw is provided with open slot 211, and its spiral shell is connected in the screw 14 that is connected to framework 10.Fastening piece 22 can be magnetic or is made by metal sheet, offers groove 221 and is formed with pivot 222 at an end of plate, and the other end then roughly is formed with down the button portion 223 of " U " shape.Pivot 222 can embed in the open slot 211 of fixation kit 21, and can swing up and down with respect to fixation kit 21.Magnet assembly 23 can be permanent magnet or is made by other material with magnetic adsorptive power, and the magnet assembly 23 of present embodiment is cylinder, and corresponds respectively to the position of each fastening piece 22 and be installed with in the shrinkage pool 15 that is fixed on framework 10.

During combination, earlier each magnet assembly 23 is forced into respectively in the shrinkage pool 15 of framework 10, the open slot 211 with fixation kit 21 is sheathed on the pivot 222 of fastening piece 22 then, the screw 14 of fixation kit 21 corresponding to framework 10 is spirally connected again; So, just, one-tenth capable of being combined crystal chip bearing fixture of the present utility model.

Fig. 6 is that the utility model is used for the cutaway view for wafer placement, and Fig. 7 is the combination appearance figure of the utility model and wafer.The utility model is fixing in order to provide wafer 5 to install.During use, each fastening piece 22 is started with respect to fixation kit 21, again wafer 5 is inserted on the inward flange face 11 of framework 10, just each fastening piece 22 can be pulled down, by the magnetic suction-operated between fastening piece 22 and the magnet assembly 23, can press fixing fast to wafer 5; Otherwise, when taking off wafer 5,, just can push each fastening piece 22 open and upwards start by wafer 5 as long as directly promotion wafer 5 is to a side shifting, unload operation rapidly to finish.

In sum, crystal chip bearing fixture of the present utility model has practicality, novelty and creativeness, and structure of the present utility model also never sees like product and public use, meets the requirement of utility application fully, files an application according to Patent Law.

Claims

1. A wafer carrying and fixing device, which is used for setting and fixing the wafer (5), is characterized in that it comprises:

An annular frame (10), which is provided with an inner flange surface (11) for bonding the wafer (5) and an end surface (13) formed above the inner flange surface (11); and

A pair of fixing mechanisms (20), the fixing mechanism (20) includes a fixing component (21) fixedly connected to the frame body (10), a fastening piece (22) pivotally connected to the fixing component (21) , and a magnetic component (23) corresponding to the position of the fastening piece (22) and fixed on the frame (10), the fastening piece (22) passes through the magnetic force of the magnetic component (23) The pressure is fixed on the wafer (5) by suction.

2. The wafer carrying and fixing device according to claim 1, wherein an inclined surface (12) extends upwardly from the inner flange surface (11) of the frame body (10), and at the end of the inclined surface (12) The end surface (13) is extended, and the end surface (13) and the inner flange surface (11) are parallel to each other.

3. The wafer carrying and fixing device according to claim 1, wherein a plurality of screw holes (14) are equidistantly provided on the end surface (13), and the fixing assembly (21) is a screw, and there are An open slot (211), the fastening piece (22) is formed with a pivot (222), the open slot (211) is sleeved on the pivot (222), the fixing component (21) and the Screw holes (14) are screwed together.

4. The wafer carrying and fixing device according to claim 3, wherein concave holes (15) are respectively arranged on both sides of each said screw hole (14), and said magnetic assembly (23) is forced into said concave hole (15) ) and fixed connection.

5. The wafer carrying and fixing device according to claim 1, wherein the fastening piece (22) is a magnetic body.

6. The wafer carrying and fixing device according to claim 1, wherein the fastening piece (22) is a metal plate.

7. The wafer carrying and fixing device as claimed in claim 1, wherein said buckle (22) is formed with an inverted "U"-shaped buckle (223) at an end away from said fixing assembly (21), said The buckle (223) presses and fixes the wafer (5).

8. The wafer carrying and fixing device according to claim 1, wherein the magnetic component (23) is a permanent magnet.