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CN200989293Y - Micro water spraying propulsion pump - Google Patents

Micro water spraying propulsion pump Download PDF

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Publication number
CN200989293Y
CN200989293Y CN 200620029477 CN200620029477U CN200989293Y CN 200989293 Y CN200989293 Y CN 200989293Y CN 200620029477 CN200620029477 CN 200620029477 CN 200620029477 U CN200620029477 U CN 200620029477U CN 200989293 Y CN200989293 Y CN 200989293Y
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pump
valve
inlet
spout
cavity
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方科
李欣欣
程光明
杨志刚
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Jilin University
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Abstract

本实用新型涉及一种能够应用于水下或水面微型航行器的微型喷水推进泵,尤其适合于受电磁干扰严重的特殊领域。其目的为了克服现有推进泵很难实现微型化的不足以及传统有阀压电泵流量较小、出流速度较低的缺点而设计的。具体技术方案是:该推进泵由泵体、泵腔、压电振子组成,以压电振子(4)为驱动元件,压电振子(4)由其周边的弹性元件支撑在泵体(9)与封盖(6)之间构成的腔体内,泵体(9)上设有入口流道和出口流道,入口流道对应的阀腔轴线与出口流道轴线处于同一平面且相互垂直,入口处采用橡胶截止阀作为入口阀,出口即是喷口(8),喷口(8)处不设阀,与外界常通,由泵腔、阀腔和喷口组成的泵内腔体为不封闭腔体。

Figure 200620029477

The utility model relates to a miniature water jet propulsion pump which can be applied to underwater or surface miniature aircraft, and is especially suitable for special fields subject to serious electromagnetic interference. Its purpose is designed to overcome the shortcomings of existing propulsion pumps that are difficult to realize miniaturization and the shortcomings of traditional piezoelectric pumps with valves, such as small flow rate and low flow rate. The specific technical solution is: the propulsion pump is composed of a pump body, a pump chamber, and a piezoelectric vibrator, with the piezoelectric vibrator (4) as the driving element, and the piezoelectric vibrator (4) is supported on the pump body (9) by its surrounding elastic elements. In the cavity formed between the cover (6), the pump body (9) is provided with an inlet flow channel and an outlet flow channel. The rubber stop valve is used as the inlet valve, and the outlet is the spout (8). There is no valve at the spout (8), and it is normally connected to the outside world. The pump cavity composed of the pump cavity, the valve cavity and the spout is an unclosed cavity. .

Figure 200620029477

Description

微型喷水推进泵Mini water jet propulsion pump

技术领域technical field

本实用新型是应用于水下或水面微型航行器的推进装置,尤其适合于受电磁干扰严重的特殊驱动领域。The utility model is applied to the propulsion device of the underwater or water surface micro-vehicle, and is especially suitable for the special driving field subject to severe electromagnetic interference.

背景技术Background technique

喷水推进器是利用推进泵喷出水流的反作用力作为动力,在操纵性能方面,喷水推进具有运行噪声低、适合浅水航行、附体阻力小、传动轴系简单、保护性能好和变工况范围广等优点。它可以通过改变喷嘴的方向来改变推进方向,通过操舵装置的配合来引导水流反向喷射以实现减速和倒车。目前,国内外的喷水推进器一般都采用轴流泵或混流泵,其效率已达到85%~90%,但是体积较大,限制了水下航行器的微型化,如要想在尺寸和性能上有更大的突破,必须研制一种新型的微型喷水推进器。The water jet propulsion uses the reaction force of the water sprayed by the propulsion pump as the power. In terms of maneuverability, the water jet propulsion has the advantages of low operating noise, suitable for shallow water navigation, small attached body resistance, simple transmission shaft system, good protection performance and variable work. The advantages of a wide range of conditions. It can change the direction of propulsion by changing the direction of the nozzle, and guide the water flow to reverse spray through the cooperation of the steering device to achieve deceleration and reversing. At present, domestic and foreign waterjet propellers generally use axial-flow pumps or mixed-flow pumps, and their efficiency has reached 85% to 90%, but their large volume limits the miniaturization of underwater vehicles. There is a bigger breakthrough in performance, and a kind of novel miniature water jet propeller must be developed.

普通压电泵是利用逆压电效应原理制成的一种微小型流体输送装置。所谓逆压电效应就是当在压电体上加一电场时,晶体不仅要产生极化,还要产生应变和应力,这种由电场产生应变或应力的现象称为逆压电效应。如果在压电圆片振子上给予交变的激励电场,则压电振子就会出现径向的伸长或收缩,即发生往复振动。通过压电泵技术和喷水推进技术的融合,研制出一种新型的微型喷水推进器泵——压电反推喷流泵。Ordinary piezoelectric pump is a kind of miniature fluid conveying device made by using the principle of inverse piezoelectric effect. The so-called inverse piezoelectric effect is that when an electric field is applied to the piezoelectric body, the crystal not only produces polarization, but also produces strain and stress. This phenomenon of strain or stress generated by the electric field is called the inverse piezoelectric effect. If an alternating excitation electric field is given to the piezoelectric disc vibrator, the piezoelectric vibrator will expand or contract in the radial direction, that is, reciprocating vibration will occur. Through the integration of piezoelectric pump technology and water jet propulsion technology, a new type of micro water jet propulsion pump——piezoelectric reverse thrust jet pump was developed.

压电泵一般分为无阀和有阀两大类。现行的无阀压电泵的输出流量较小,不适合于推进泵使用。有阀压电泵是利用压电振子的径向弯曲变形来实现泵体内容腔体积的变化,从而改变内部压强,使阀片被迫开启或关闭。图4为传统有阀压电泵的结构示意图。其中9为泵体,4为压电振子,3为泵腔,15、16分别为进口阀与出口阀。其工作原理是:由泵体1、压电振子4、进口阀15及出口阀16组成封闭腔体,对压电振子4施加交变电信号,压电振子4产生往复的径向弯曲变形,这样使封闭腔体内的压强发生变化,在吸入过程,泵内压强减小,泵外压力大于泵内压力,在内外压力差的作用下,使进口阀15开启,出口阀16关闭。在吐出过程,泵内压强增大,泵内压力大于泵外压力,在内外压力差的作用下,使进口阀15关闭,出口阀16开启。在压电振子4周期性的变化下,使进、出口阀15、16产生周期性循环开启与关闭,泵体流体形成单向流动。受入口通流面积和泵阀迟滞性的影响,在每个周期内,液体并不能充满泵内容腔,影响泵的输出流量。并且由于出口阀的存在,大大提高了流体的出流阻力,流体的出流速度和流量都受到非常大的限制。而对于推进泵最重要的是要求大流量喷射和高的出流速度,这一点传统有阀压电泵就无法满足。另外,传统有阀压电泵的进出口结构布置也不适合于作为推进泵。Piezoelectric pumps are generally divided into two categories: valveless and valved. The output flow rate of the existing valveless piezoelectric pump is small, so it is not suitable for the use of the propulsion pump. The valved piezoelectric pump uses the radial bending deformation of the piezoelectric vibrator to change the volume of the inner cavity of the pump body, thereby changing the internal pressure and forcing the valve to open or close. Fig. 4 is a schematic structural diagram of a conventional valved piezoelectric pump. Among them, 9 is the pump body, 4 is the piezoelectric vibrator, 3 is the pump cavity, 15 and 16 are the inlet valve and the outlet valve respectively. Its working principle is: the pump body 1, the piezoelectric vibrator 4, the inlet valve 15 and the outlet valve 16 form a closed cavity, and an alternating electric signal is applied to the piezoelectric vibrator 4, and the piezoelectric vibrator 4 produces reciprocating radial bending deformation. In this way, the pressure in the closed cavity changes. During the suction process, the pressure in the pump decreases, and the pressure outside the pump is greater than the pressure inside the pump. Under the action of the internal and external pressure difference, the inlet valve 15 is opened and the outlet valve 16 is closed. During the discharge process, the pressure inside the pump increases, and the pressure inside the pump is greater than the pressure outside the pump. Under the action of the pressure difference between the inside and outside, the inlet valve 15 is closed and the outlet valve 16 is opened. Under the periodic change of the piezoelectric vibrator 4, the inlet and outlet valves 15, 16 are periodically opened and closed, and the fluid in the pump body forms a one-way flow. Affected by the inlet flow area and the hysteresis of the pump valve, the liquid cannot fill the inner cavity of the pump in each cycle, which affects the output flow of the pump. And due to the existence of the outlet valve, the outflow resistance of the fluid is greatly improved, and the outflow speed and flow rate of the fluid are very greatly restricted. The most important thing for a propulsion pump is to require a large flow rate injection and a high flow rate, which cannot be satisfied by a traditional piezoelectric pump with a valve. In addition, the inlet and outlet structure arrangement of traditional piezoelectric pumps with valves is not suitable as a propulsion pump.

发明内容Contents of the invention

本实用新型的目的在于:为了克服现有推进泵很难实现微型化的不足以及传统有阀压电泵流量较小、出流速度较低的缺点,提供一种新颖的融合压电泵技术和喷水推进技术的微型喷水推进泵,即压电反推喷流泵。The purpose of the utility model is to provide a novel combination of piezoelectric pump technology and The miniature water jet propulsion pump of water jet propulsion technology, that is, the piezoelectric reverse thrust jet pump.

本实用新型的上述目的是这样实现的,结合附图说明如下:The above-mentioned purpose of the utility model is achieved in that, in conjunction with accompanying drawing, description is as follows:

一种微型喷水推进泵由泵体、泵腔、压电振子组成,以压电振子4为驱动元件,压电振子4由其周边的弹性元件支撑在泵体9与封盖6之间构成的腔体内,泵体9上设有入口流道和出口流道,入口流道对应的阀腔轴线与出口流道轴线处于同一平面且相互垂直,入口处采用橡胶截止阀作为入口阀,出口即是喷口8,喷口8处不设阀,与外界常通,由泵腔、阀腔和喷口组成的泵内腔体处于不封闭状态。A miniature water jet propulsion pump is composed of a pump body, a pump cavity, and a piezoelectric vibrator. The piezoelectric vibrator 4 is used as a driving element. The piezoelectric vibrator 4 is supported between the pump body 9 and the cover 6 by elastic elements around it. In the chamber, the pump body 9 is provided with an inlet flow channel and an outlet flow channel. The axis of the valve cavity corresponding to the inlet flow channel and the axis of the outlet flow channel are on the same plane and perpendicular to each other. A rubber stop valve is used as the inlet valve at the inlet, and the outlet is It is spout 8, and there is no valve at spout 8, and it is often connected with the outside world, and the pump inner cavity composed of pump cavity, valve cavity and spout is in an unsealed state.

所说的入口流道采用两个,一个是入口A13,另一个是入口B11,入口A13对应的阀腔A5轴线与入口B11对应的阀腔B7轴线平行且置于泵腔3的正下方,两阀腔的轴线与喷口8的轴线处于同一平面,并且都与喷口轴线相垂直。Said inlet channel adopts two, one is the inlet A13, and the other is the inlet B11, the axis of the valve chamber A5 corresponding to the inlet A13 is parallel to the axis of the valve chamber B7 corresponding to the inlet B11 and placed directly below the pump chamber 3, the two The axis of the valve chamber and the axis of the spout 8 are in the same plane, and both are perpendicular to the axis of the spout.

所说的入口A13对应的阀腔A5与入口B11对应的阀腔B7呈现阶梯状布置,其中一个高度较大的阀腔B7直接与喷口8相通,且出口流道内表面与其相连的阀腔底座平面相切。The valve chamber A5 corresponding to the inlet A13 and the valve chamber B7 corresponding to the inlet B11 are arranged in a stepped shape, and one of the larger valve chambers B7 directly communicates with the nozzle 8, and the inner surface of the outlet channel is connected to the base plane of the valve chamber Tangent.

所说的橡胶截止阀为整体开启阀,其阀芯固定,周边全开启,纵切面为伞状。Said rubber shut-off valve is an integral open valve, its spool is fixed, its periphery is fully opened, and its longitudinal section is umbrella-shaped.

本实用新型的有益效果是,结构紧凑压电元件既是原动机又是工作机、单位体积输出喷流量大、能量密度高、无电磁干扰、可控性好、能实现较大推进力等特点,能与水下航行器良好集成。而且可以通过多个泵的组合实现水下航行器多自由度的简易控制,可应用于受电磁干扰严重的特殊领域。The beneficial effect of the utility model is that the compact piezoelectric element is both a prime mover and a working machine, and has the characteristics of large output jet flow per unit volume, high energy density, no electromagnetic interference, good controllability, and greater propulsion. Can be well integrated with underwater vehicles. Moreover, the simple control of multiple degrees of freedom of the underwater vehicle can be realized through the combination of multiple pumps, and it can be applied to special fields subject to serious electromagnetic interference.

附图说明Description of drawings

图1是本实用新型的结构主剖视图;Fig. 1 is a structural main sectional view of the present utility model;

图2是图2的A-A截面图;Fig. 2 is the A-A sectional view of Fig. 2;

图3是图2的B向图;Fig. 3 is the B direction diagram of Fig. 2;

图4是传统有阀压电泵的结构主剖视图。Fig. 4 is a main cross-sectional view of the structure of a conventional valved piezoelectric pump.

图中:1.密封圈,2.上支撑密封圈,3.泵腔,4.压电振子,5.阀腔A,6.封盖,7.阀腔B,8.喷口,9.泵体,10.橡胶截止阀B,11.入口B,12.橡胶截止阀A,13.入口A,14.下支撑密封圈,15.为进口阀,16 出口阀。In the figure: 1. Seal ring, 2. Upper support seal ring, 3. Pump chamber, 4. Piezoelectric vibrator, 5. Valve chamber A, 6. Cover, 7. Valve chamber B, 8. Nozzle, 9. Pump Body, 10. rubber stop valve B, 11. inlet B, 12. rubber stop valve A, 13. inlet A, 14. lower support seal ring, 15. is the inlet valve, 16 outlet valve.

具体实施方式Detailed ways

下面结合附图所示实施例对本实用新型的具体内容及其工作原理进一步说明。Below in conjunction with the embodiment shown in the accompanying drawings, the specific content and working principle of the present utility model will be further described.

微型喷水推进泵——压电反推喷流泵是利用逆压电效应原理制成。该推进泵的泵内腔体呈不封闭状态,通过喷口8与外界直接连通。其工作原理是:对压电振子4施加交变电信号,压电振子4产生往复的径向弯曲变形。虽然推进泵腔体为不封闭状态,但由于推进泵是置于水中工作,当水充满整个腔体时,腔体就相当于构成了一个封闭状态,腔内任何压力的变化都可以引起阀片的开启或关闭。因此,对压电振子4施加交变电信号,压电振子4产生往复的径向弯曲变形,这样使封闭腔体内的压强发生变化。在吸入过程,泵内压强减小,泵外压力大于泵内压力,在内外压力差的作用下,使入口阀开启,流体同时从喷口和入口两个方向流入泵内。在吐出过程,泵内压强增大,泵内压力大于泵外压力,在内外压力差的作用下,使入口阀关闭,流体只从单一出口即喷口处排出泵体。在压电振子周期性的作用下,流体形成单向喷射运动。Miniature water jet propulsion pump-piezoelectric reverse thrust jet flow pump is made by using the principle of inverse piezoelectric effect. The pump inner cavity of the propulsion pump is in an unsealed state, and is directly communicated with the outside world through the nozzle 8 . Its working principle is: when an alternating electric signal is applied to the piezoelectric vibrator 4, the piezoelectric vibrator 4 produces reciprocating radial bending deformation. Although the cavity of the propulsion pump is not closed, since the propulsion pump works in water, when the water fills the entire cavity, the cavity is equivalent to a closed state, and any pressure change in the cavity can cause the valve plate to on or off. Therefore, when an alternating electric signal is applied to the piezoelectric vibrator 4, the piezoelectric vibrator 4 undergoes reciprocating radial bending deformation, thus changing the pressure in the closed cavity. During the suction process, the pressure inside the pump decreases, and the pressure outside the pump is greater than the pressure inside the pump. Under the action of the pressure difference between the inside and outside, the inlet valve is opened, and the fluid flows into the pump from the nozzle and the inlet at the same time. During the discharge process, the pressure inside the pump increases, and the pressure inside the pump is greater than the pressure outside the pump. Under the action of the pressure difference between the inside and outside, the inlet valve is closed, and the fluid is only discharged from the pump body through a single outlet, that is, the nozzle. Under the periodic action of the piezoelectric vibrator, the fluid forms a one-way jetting motion.

推进泵由封盖6、泵体9、压电振子4、密封圈1和橡胶截止阀A、B五部分组成。压电振子4的周边上下两面通过弹性支撑元件即上支撑密封圈2和下支撑密封圈14,这样可以有效提高泵体容积的变化量。由于要在水下使用,为了提高系统的密封性能,在压电振子4的外围再增加一个密封圈1。这些密封圈都被安置于泵体9和封盖6的沟槽内。泵体9由泵腔3、阀腔A5和阀腔B7、出口流道喷口8、入口A13和入口B11四部分构成,其中阀腔和入口都为两个,两阀腔平行,置于泵腔3正下方,而且两阀腔A5、B7的轴线与喷口8的轴线处于同一平面,并且都与喷口轴线相垂直;阀腔正对入口,为同一轴线布置。离喷口8较远的阀腔A5容积小,刚好能放置一个橡胶截止阀A12,阀腔A5高度等于安装后的阀体即阀片的厚度高度;与喷口相连的阀腔容积大,其高度可参照以下公式确定:The propulsion pump consists of five parts: cover 6, pump body 9, piezoelectric vibrator 4, sealing ring 1 and rubber stop valves A and B. The upper and lower sides of the periphery of the piezoelectric vibrator 4 pass through the elastic support elements, namely the upper support seal ring 2 and the lower support seal ring 14, which can effectively increase the volume change of the pump body. Since it will be used underwater, in order to improve the sealing performance of the system, a sealing ring 1 is added around the periphery of the piezoelectric vibrator 4 . These sealing rings are all arranged in the grooves of the pump body 9 and the cover 6 . The pump body 9 is composed of four parts: the pump chamber 3, the valve chamber A5 and the valve chamber B7, the outlet flow channel nozzle 8, the inlet A13 and the inlet B11. There are two valve chambers and inlets, and the two valve chambers are parallel and placed in the pump chamber. 3 directly below, and the axes of the two valve chambers A5, B7 are in the same plane as the axis of the spout 8, and both are perpendicular to the axis of the spout; the valve chambers are facing the entrance and are arranged on the same axis. The volume of the valve cavity A5 far from the spout 8 is small, just enough to place a rubber stop valve A12, the height of the valve cavity A5 is equal to the thickness of the valve body after installation, that is, the thickness of the valve plate; the volume of the valve cavity connected with the spout is large, and its height can be adjusted. Refer to the following formula to determine:

hgj+hv-hp+2≥H≥hgj+hv-hp+1h gj +h v -h p +2≥H≥h gj +h v -h p +1

式中H、hg、Φj、hv和hp分别为阀腔B7高度、沟槽深度、喷口8直径、阀体9高度和泵腔3高度。In the formula, H, h g , Φ j , h v and h p are the height of the valve cavity B7, the depth of the groove, the diameter of the spout 8, the height of the valve body 9 and the height of the pump cavity 3, respectively.

入口与阀腔之间分别有一个橡胶截止阀即入口阀:橡胶截止阀A12和橡胶截止阀B10,出口即喷口8处无阀,且出口流道内表面和与其相连阀腔B7的底座表面相切,这样布局可以有效提高出口的出流速度和喷流量。而双入口结构使泵体容积最小化,能进一步提高其自吸能力和喷流量。There is a rubber stop valve between the inlet and the valve cavity, that is, the inlet valve: rubber stop valve A12 and rubber stop valve B10. There is no valve at the outlet, that is, the nozzle 8, and the inner surface of the outlet flow channel is tangent to the base surface of the connected valve cavity B7. , so that the layout can effectively improve the outlet flow velocity and jet flow. The double inlet structure minimizes the volume of the pump body, which can further improve its self-priming capacity and spray flow.

在图2中,压电振子4通过上支撑密封圈2和下支撑密封圈14支撑,并置于泵腔3的正上方。封盖6有环形沟槽,用于镶嵌上支撑密封圈2和密封圈1。In FIG. 2 , the piezoelectric vibrator 4 is supported by the upper support seal ring 2 and the lower support seal ring 14 , and is placed directly above the pump chamber 3 . The cover 6 has an annular groove for inlaying the upper support sealing ring 2 and the sealing ring 1 .

泵体9分别由泵腔3、阀腔A5、阀腔B7、入口A13、入口B11和喷口8构成。The pump body 9 is composed of a pump chamber 3 , a valve chamber A5 , a valve chamber B7 , an inlet A13 , an inlet B11 and a spout 8 .

入口A13、入口B11分别正对阀腔A5、阀腔B7,且它们的轴心线分别与喷口8的轴心线相垂直,并处于同一个平面内。阀腔A5和阀腔B7为阶梯状布置,阀腔B7与喷口8相连。橡胶截止阀A12和橡胶截止阀B10为入口阀,分别固定在入口A13和入口B11的正上方,阀片周边刚好与阀腔底座接触。出口即喷口8处无阀片,可以有效降低喷口阻力,提高喷射性能。同样,泵体内设有沟槽,用于镶嵌下支撑密封圈14和密封圈1。The inlet A13 and the inlet B11 face the valve cavity A5 and the valve cavity B7 respectively, and their axis lines are respectively perpendicular to the axis line of the spout 8 and are in the same plane. The valve cavity A5 and the valve cavity B7 are arranged in steps, and the valve cavity B7 is connected with the nozzle 8 . The rubber stop valve A12 and the rubber stop valve B10 are inlet valves, which are respectively fixed directly above the inlet A13 and the inlet B11, and the periphery of the valve plate is just in contact with the base of the valve chamber. There are no valve plates at 8 outlets, that is, the nozzles, which can effectively reduce the resistance of the nozzles and improve the injection performance. Similarly, grooves are provided in the pump body for inlaying the lower support sealing ring 14 and the sealing ring 1 .

Claims (4)

1, a kind of miniature water jet propulsion pump is by the pump housing, pump chamber, piezoelectric vibrator is formed, it is characterized in that with piezoelectric vibrator (4) be driving element, piezoelectric vibrator (4) is supported in the cavity that constitutes between the pump housing (9) and the capping (6) by its peripheral elastic element, the pump housing (9) is provided with entrance channel and outlet flow, the valve pocket axis of entrance channel correspondence is in same plane and vertical mutually with the outlet flow axis, the ingress adopts the rubber stop valve as inlet valve, outlet promptly is spout (8), spout (8) locates not establish valve, with extraneous normal open, by pump chamber, the pump inner chamber body that valve pocket and spout are formed is sealed cavity not.
2, miniature water jet propulsion pump according to claim 1, it is characterized in that said entrance channel adopts two, one is inlet A (13), another is inlet B (11), valve pocket B (7) parallel axes that valve pocket A (5) axis that inlet A (13) is corresponding is corresponding with the B (11) that enters the mouth and place pump chamber (3) under, the axis of the axis of two valve pockets and spout (8) is in same plane, and all perpendicular with the spout axis.
3, miniature water jet propulsion pump according to claim 1 and 2, it is characterized in that the corresponding valve pocket A (5) of said inlet A (13) the valve pocket B (7) corresponding with inlet B (11) presents stepped arrangement, one of them highly bigger valve pocket B (7) directly communicates with spout (8), and the coupled valve pocket base plane of outlet flow internal surface is tangent.
4, miniature water jet propulsion pump according to claim 1 is characterized in that said rubber stop valve is whole open valve, and its spool is fixed, peripheral full open, and longitudinal section is a umbrella.
CN 200620029477 2006-10-19 2006-10-19 Micro water spraying propulsion pump Expired - Fee Related CN200989293Y (en)

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CN102374158A (en) * 2011-06-21 2012-03-14 浙江师范大学 Self-sensing piezoelectric diaphragm pump
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CN104906800A (en) * 2015-06-30 2015-09-16 陕西师范大学 Piezoelectric water-jet propulsion system and toy boat equipped therewith
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CN101986787A (en) * 2008-03-14 2011-03-16 技术合伙公司 Pump
CN102459900A (en) * 2009-06-03 2012-05-16 技术合伙公司 Fluid disc pump
CN102734140A (en) * 2011-04-12 2012-10-17 林淑媛 Piezoelectric pump and matched pipe thereof
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CN102374158A (en) * 2011-06-21 2012-03-14 浙江师范大学 Self-sensing piezoelectric diaphragm pump
CN103032297A (en) * 2012-12-06 2013-04-10 浙江师范大学 Piezoelectric pump based on disk type sensor valve
CN103032297B (en) * 2012-12-06 2015-05-13 浙江师范大学 Piezoelectric pump based on disk type sensor valve
CN104533762A (en) * 2014-12-17 2015-04-22 西安交通大学 Piezoelectric membrane pump and manufacturing method thereof
CN104906800B (en) * 2015-06-30 2017-05-17 陕西师范大学 Piezoelectric water-jet propulsion system and toy boat equipped therewith
CN104906800A (en) * 2015-06-30 2015-09-16 陕西师范大学 Piezoelectric water-jet propulsion system and toy boat equipped therewith
CN106523332A (en) * 2016-11-16 2017-03-22 林永群 Vibration source wafer of micro pump and micro pump
CN107356471A (en) * 2017-08-15 2017-11-17 塔里木大学 A kind of and the supporting simple low temperature intelligent temperature control device of direct shear apparatus and method
CN110280434A (en) * 2019-06-19 2019-09-27 浙江师范大学 A kind of miniature drone piezoelectricity flusher
CN110302931A (en) * 2019-06-19 2019-10-08 浙江师范大学 A low-power consumption micro sprinkler and a chip cooling device using the sprinkler
CN110280434B (en) * 2019-06-19 2024-08-02 浙江师范大学 Piezoelectric spraying device for miniature unmanned aerial vehicle
CN113772053A (en) * 2021-09-01 2021-12-10 哈尔滨工业大学 Multi-degree-of-freedom underwater piezoelectric robot with cross structure
CN114228966A (en) * 2021-12-15 2022-03-25 杭州电子科技大学 A Piezoelectric Pulse Pusher with High Quality Flow and Underwater Robot
CN114228966B (en) * 2021-12-15 2022-10-28 杭州电子科技大学 Piezoelectric pulse impeller with high mass flow and underwater robot
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