CN200940713Y - Two-way high vacuum valve device - Google Patents
Two-way high vacuum valve device Download PDFInfo
- Publication number
- CN200940713Y CN200940713Y CN 200620062404 CN200620062404U CN200940713Y CN 200940713 Y CN200940713 Y CN 200940713Y CN 200620062404 CN200620062404 CN 200620062404 CN 200620062404 U CN200620062404 U CN 200620062404U CN 200940713 Y CN200940713 Y CN 200940713Y
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- valve
- valve body
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- piston
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Abstract
The utility model discloses a double-pass high vacuum valve device, which comprises a studio, a valve, and a cylinder. A vacuum device is arranged under the valve, and the utility model is characterized in that two cylinders are provided on the valve, one side of which connects to the first studio, and the other side of which connects to the second studio, and the first valve cover connects to the piston of the first cylinder by a support rod, while the second valve cover connects to the piston of the second cylinder by a support rod, and the two valve covers are both provided in the valve. Due to the adoption of the structure above, the utility model increases the utilization ratio of the vacuum device and reduces the energy consumption in the production of the products.
Description
Technical field
The utility model relates to high vacuum valve, specifically, relates to a kind of bilateral high vacuum valve door device.
Background technique
As shown in Figure 1, it is the sectional view of the high vacuum valve door device of prior art.It is made up of a cylinder 1, valve body 5 and a working room 3, in addition, vacuum system 6 is made up of vacuum pump 61,62, heater 63, cold-trap 64, vacuum valve 65, when working room's 3 Halfway Stopping are worked, and this moment, vacuum system 6 was still in running order, can cause the waste of the energy, and influence the utilization ratio of vacuum system 6.
The model utility content
Technical problem to be solved in the utility model provides a kind of bilateral high vacuum valve door device, and the utilization ratio that it has improved vacuum system has lowered the energy consumption of production.
For achieving the above object, the utility model has adopted following technological scheme:
A kind of bilateral high vacuum valve door device, form by working room, valve body, cylinder, connect vacuum system below this valve body, it is characterized in that: two cylinders are housed above the described valve body, this valve body one side connects first working room, and the valve body opposite side connects second working room, and first valve gap connects the piston of first cylinder by pole, second valve gap connects the piston of second cylinder by pole, and two valve gaps all are arranged in the valve body.
Described pole connects piston, valve gap respectively by hinge.
The utlity model has following beneficial effect: the utility model is owing to be provided with two working rooms, therefore these two working rooms are under the effect of cylinder, can take turns to operate or work simultaneously, therefore improved the utilization ratio of vacuum system, lowered the energy consumption of product; In addition, the utility model is simple to operate, easy to use.
Description of drawings
Below in conjunction with accompanying drawing embodiment of the present utility model is described in further detail.
Fig. 1 is the sectional view of the high vacuum valve door device of prior art.
Fig. 2 is the sectional view of the utility model bilateral high vacuum valve door device.
Fig. 3 is the sectional view of valve body of the present utility model.
Embodiment
As shown in Figure 2, it is the sectional view of the utility model bilateral high vacuum valve door device.A kind of bilateral high vacuum valve door device, cylinder 1,2 is housed on valve body 5, wherein cylinder 1 is to be fixed on above the valve body 5 by screw thread 14, cylinder 2 is to be fixed on above the valve body 5 by screw thread 24, connect vacuum system 6 below valve body 5, these valve body 5 one sides are by the working room 3 that is threaded, and opposite side is by the working room 4 that is threaded, wherein all be provided with seal ring 9, to improve the tightness of valve body 5 and 3,4 joints, working room in the joint of valve body 5 and working room 3,4.Pole 12 connects piston 11, valve gap 7 respectively by hinge 13, pole 22 connects piston 21, valve gap 8 respectively by hinge 23, wherein valve gap 7,8 is arranged in the valve body 5, under the drive of piston 11, valve gap 7 can move up and down in valve body 5, in like manner, under the drive of piston 21, valve gap 8 can move up and down in valve body 5.The effect of hinge 13,23 is to make the valve gap 7,8 in the moving process can adjust automatically steadily, and it is better to make it contact the back sealability with valve body 5.Skeleton glue envelope 15 is used for the pole 12 of sealing cylinder 1, and skeleton glue envelope 25 is used for the pole 22 of sealing cylinder 2.
As shown in Figure 3, it is the sectional view of valve body.Valve body 5 one sides connect a working room 3, and its opposite side connects working room 4, as shown in Figure 2.
When the utility model uses, when cylinder 1 work, piston 11 will drive valve gap 7 and move, thereby can make valve gap 7 contact and seal with valve body 5, because valve gap 7 belows are provided with seal ring 9, so valve gap 7 and valve body 5 good sealing effects, working room 3, valve body 5, cylinder 1 have just formed a sealed environment at this moment, working room 4 will be in the state of vacuumizing, and vacuum system 6 is cooperating with it, and wherein vacuum system 6 is made up of vacuum pump 61,62, heater 63, cold-trap 64, vacuum valve 65; In like manner, when cylinder 2 work, piston 21 will drive valve gap 8 and move, thereby can make valve gap 8 contact and seal with valve body 5, because valve gap 8 belows are provided with seal ring 9, so valve gap 8 and valve body 5 good sealing effects, working room 4, valve body 5, cylinder 2 have just formed a sealed environment at this moment, working room 3 will be in the state of vacuumizing, vacuum system 6 is cooperating with it, in like manner, can realize that also working room 3,4 is in the state of vacuumizing simultaneously, at this moment, as long as make working room 3,4 all be in open mode.Because the utility model has adopted said structure, therefore at any time can to guarantee to have the working room in running order for the technical program, therefore guaranteed the working efficiency of vacuum system 6, improved the utilization ratio of vacuum system 6, lower the energy consumption of product, realized the purpose of this utility model.
Claims (2)
1, a kind of bilateral high vacuum valve door device, form by working room, valve body (5), cylinder, connect vacuum system (6) below this valve body (5), it is characterized in that: cylinder (1,2) is housed above the described valve body (5), these valve body (5) one sides connect working room (3), its opposite side connects working room (4), a valve gap (7) connects the piston (11) of cylinder (1) by pole (12), a valve gap (8) is by the piston (21) of pole (22) connection cylinder (2), and described valve gap (7,8) is arranged in the valve body (5).
2, high vacuum valve door device according to claim 1 is characterized in that: described pole (12) connects piston (11), valve gap (7) respectively by hinge (13), and described pole (22) connects piston (21), valve gap (8) respectively by hinge (23).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620062404 CN200940713Y (en) | 2006-08-01 | 2006-08-01 | Two-way high vacuum valve device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620062404 CN200940713Y (en) | 2006-08-01 | 2006-08-01 | Two-way high vacuum valve device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN200940713Y true CN200940713Y (en) | 2007-08-29 |
Family
ID=38746890
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200620062404 Expired - Fee Related CN200940713Y (en) | 2006-08-01 | 2006-08-01 | Two-way high vacuum valve device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN200940713Y (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010060337A1 (en) * | 2008-11-25 | 2010-06-03 | Wen Jinxuan | Multifunctional vacuumizing device |
CN103014657A (en) * | 2011-09-22 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | PECVD vacuum chamber built-in sealing device |
CN101725721B (en) * | 2008-10-15 | 2013-07-10 | Vat控股公司 | Vacuum valve |
-
2006
- 2006-08-01 CN CN 200620062404 patent/CN200940713Y/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101725721B (en) * | 2008-10-15 | 2013-07-10 | Vat控股公司 | Vacuum valve |
WO2010060337A1 (en) * | 2008-11-25 | 2010-06-03 | Wen Jinxuan | Multifunctional vacuumizing device |
CN103014657A (en) * | 2011-09-22 | 2013-04-03 | 吉富新能源科技(上海)有限公司 | PECVD vacuum chamber built-in sealing device |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |