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CN1969592A - Ceramic heater and production method therefor and heating device and hair iron - Google Patents

Ceramic heater and production method therefor and heating device and hair iron Download PDF

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Publication number
CN1969592A
CN1969592A CNA2005800203058A CN200580020305A CN1969592A CN 1969592 A CN1969592 A CN 1969592A CN A2005800203058 A CNA2005800203058 A CN A2005800203058A CN 200580020305 A CN200580020305 A CN 200580020305A CN 1969592 A CN1969592 A CN 1969592A
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ceramic
heater
heating
plate
green sheet
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CN1969592B (en
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长迫龙一
滨田修
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Kyocera Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • AHUMAN NECESSITIES
    • A45HAND OR TRAVELLING ARTICLES
    • A45DHAIRDRESSING OR SHAVING EQUIPMENT; EQUIPMENT FOR COSMETICS OR COSMETIC TREATMENTS, e.g. FOR MANICURING OR PEDICURING
    • A45D1/00Curling-tongs, i.e. tongs for use when hot; Curling-irons, i.e. irons for use when hot; Accessories therefor
    • A45D1/02Curling-tongs, i.e. tongs for use when hot; Curling-irons, i.e. irons for use when hot; Accessories therefor with means for internal heating, e.g. by liquid fuel
    • A45D1/04Curling-tongs, i.e. tongs for use when hot; Curling-irons, i.e. irons for use when hot; Accessories therefor with means for internal heating, e.g. by liquid fuel by electricity
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/10Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/40Heating elements having the shape of rods or tubes
    • H05B3/42Heating elements having the shape of rods or tubes non-flexible
    • H05B3/48Heating elements having the shape of rods or tubes non-flexible heating conductor embedded in insulating material
    • AHUMAN NECESSITIES
    • A45HAND OR TRAVELLING ARTICLES
    • A45DHAIRDRESSING OR SHAVING EQUIPMENT; EQUIPMENT FOR COSMETICS OR COSMETIC TREATMENTS, e.g. FOR MANICURING OR PEDICURING
    • A45D1/00Curling-tongs, i.e. tongs for use when hot; Curling-irons, i.e. irons for use when hot; Accessories therefor
    • A45D2001/004Curling-tongs, i.e. tongs for use when hot; Curling-irons, i.e. irons for use when hot; Accessories therefor with a ceramic component, e.g. heater, styling surface
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003Heaters using a particular layout for the resistive material or resistive elements using serpentine layout

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)

Abstract

一种陶瓷加热器,其中:包含陶瓷体,该陶瓷体具有外表面和被埋设的导体图案,所述导体图案由导体构成,所述导体按照形成成为电阻发热体的折返部的方式被设置,在折返部中由邻接的导体所夹的陶瓷部的空孔占有率为0.01~50%的范围。由此提供能防止高温条件下的绝缘性降低且具有良好耐久性的陶瓷加热器。

Figure 200580020305

A ceramic heater, comprising: a ceramic body having an outer surface and a buried conductor pattern, the conductor pattern being formed of a conductor provided so as to form a turn-back portion of a resistance heating element, The pore occupancy rate of the ceramic part sandwiched by the adjacent conductors in the folded part is in the range of 0.01 to 50%. Thereby, a ceramic heater capable of preventing insulation degradation under high-temperature conditions and having excellent durability is provided.

Figure 200580020305

Description

陶瓷加热器及其制造方法以及加热装置和烫发器Ceramic heater, manufacturing method thereof, heating device, and hair iron

技术领域technical field

本发明涉及传感器加热用加热器,特别是在汽车用的空燃比检测传感器加热用、汽化器用加热器、烫发器(hair iron)、钎焊烙铁等方面使用的陶瓷加热器和采用它构成的加热装置及烫发器。The present invention relates to a heater for sensor heating, in particular to a ceramic heater used for heating an air-fuel ratio detection sensor for automobiles, a heater for a carburetor, a hair iron, a soldering iron, etc., and a heater composed of the same Appliances and hair irons.

背景技术Background technique

一直以来,以氧化铝为主成分的陶瓷中,埋设由W、Re、Mo等高熔点金属构成的发热电阻体所形成的氧化铝陶瓷加热器被广泛应用。Alumina ceramic heaters in which heating resistors made of high-melting-point metals such as W, Re, and Mo are embedded in ceramics mainly composed of alumina have been widely used.

例如,在制造圆柱状陶瓷加热器时,如图10所示,预备陶瓷成形体12和陶瓷生片13,在陶瓷生片的一个面上形成由W、Re、Mo等高熔点金属构成的发热电阻体14和引线引出部15,在背面(另一面)形成电极极板后,以发热电阻体14和引线引出部15成为内侧的方式将陶瓷成形体12进行卷绕并密接烧成。其中引线引出部15和电极极板通过陶瓷生片上所形成的穿孔16进行连接(例如,参照专利文献1)。For example, when manufacturing a cylindrical ceramic heater, as shown in FIG. 10 , a ceramic molded body 12 and a ceramic green sheet 13 are prepared, and a heating element composed of a refractory metal such as W, Re, or Mo is formed on one surface of the ceramic green sheet. Resistor 14 and lead-out portion 15 are formed with electrode pads on the back (the other side), and ceramic molded body 12 is wound and fired in close contact with heating resistor 14 and lead-out portion 15 inside. Wherein, the lead-out part 15 and the electrode pad are connected through the through hole 16 formed in the ceramic green sheet (for example, refer to Patent Document 1).

如此,以往的陶瓷加热器,是将糊(paste)状发热电阻体14与陶瓷成形体12和陶瓷生片12同时烧成所形成。然后,如此制作的陶瓷加热器的发热电阻体经过多次折返形成曲折的形状(专利文献2的图1等)。In this way, the conventional ceramic heater is formed by simultaneously firing the paste heating resistor 14 , the ceramic molded body 12 and the ceramic green sheet 12 . Then, the heat-generating resistor of the ceramic heater produced in this way is folded many times to form a zigzag shape (see FIG. 1 of Patent Document 2, etc.).

另外,专利文献3~专利文献5中公开了以下内容:一对把持部件的基部通过轴自由开闭地联结,通过轴承部中设定的弹簧的张力,平时两把持部件的前端部相互开放,同时在两把持部件前端部的开口部的内侧具备加热板的烫发器。In addition, Patent Document 3 to Patent Document 5 disclose the following content: the bases of a pair of gripping members are freely opened and closed by shafts, and the front ends of the two gripping members are usually opened to each other by the tension of the spring set in the bearing portion. At the same time, the hair iron is provided with a heating plate inside the openings at the front ends of the two holding members.

该烫发器具有以下结构:在陶瓷制的绝缘板上卷绕镍铬电热线,使两面进一步由绝缘板所覆盖的加热板在板状体上勘合,或者通过板簧按压,将加热板发出的热传递到板状体上。The hair iron has the following structure: a nickel-chromium electric heating wire is wound on a ceramic insulating plate, and the heating plate covered by the insulating plate is pressed on the plate body on both sides; The heat is transferred to the plate-like body.

专利文献1:特开2001-126852号公报Patent Document 1: JP-A-2001-126852

专利文献2:特开2001-102156号公报Patent Document 2: JP-A-2001-102156

专利文献3:特开2000-232911号公报Patent Document 3: JP-A-2000-232911

专利文献4:特开2002-291517号公报Patent Document 4: JP-A-2002-291517

专利文献5:特开2000-14438号公报Patent Document 5: JP-A-2000-14438

但是,最近陶瓷加热器逐渐被使用在更高温度环境下,因此耐久性降低就成了问题。即,当进行高温下连续通电时,相邻图案间的绝缘性劣化、耐久性降低,最终发生如一会引发火化,一会断线的问题。However, recently, ceramic heaters have been used in higher temperature environments, and thus a decrease in durability has become a problem. That is, when continuous energization is performed at a high temperature, the insulation between adjacent patterns deteriorates, the durability decreases, and problems such as sparking and disconnection occur in the end.

另外,在绝缘板上卷绕由镍铬电热线构成的发热体所制作的加热器,因反复加热通电而断线,发热体与空气中的水分反应形成反应层,发热体的电阻值就变大了,具有一定电压下不能达到一定温度的危险和耐久性减低的问题。In addition, the heater made by winding the heating element composed of nickel-chromium electric heating wire on the insulating plate will be disconnected due to repeated heating and energization, and the heating element will react with the moisture in the air to form a reaction layer, and the resistance value of the heating element will change. If it is too large, there is a danger that a certain temperature cannot be reached under a certain voltage, and there are problems of reduced durability.

另外,由镍铬电热线构成的加热板很难在加热板上均匀地设置发热体,具有板状体的加热面不能均匀加热的问题。In addition, the heating plate made of nickel-chromium heating wire is difficult to evenly install the heating element on the heating plate, and there is a problem that the heating surface of the plate-shaped body cannot be heated uniformly.

另外,加热板的加热面和板状体面因为没有以同样热度接触,加热板的热很难在板状体上同样传播,具有加热面的温度不均匀的问题。In addition, since the heating surface of the heating plate and the surface of the plate-shaped body are not in contact with each other with the same heat, it is difficult for the heat of the heating plate to spread uniformly on the plate-shaped body, and there is a problem that the temperature of the heating surface is not uniform.

发明内容Contents of the invention

本发明的第1个目的,借鉴上述事情所形成的部件,提供防止高温下绝缘性降低,耐久性良好的陶瓷加热器。A first object of the present invention is to provide a ceramic heater having good durability by preventing insulation degradation at high temperatures by taking advantage of the components formed above.

另外本发明第2个目的,提供能够均匀加热板状体加热面的加热装置及烫发器。In addition, the second object of the present invention is to provide a heating device and a hair iron capable of uniformly heating a heating surface of a plate-shaped body.

为了达成以上第1个目的,本发明所述陶瓷加热器的特征是:包含陶瓷体,该陶瓷体具有外表面和被埋设的导体图案,所述导体图案由导体构成,所述导体按照形成成为电阻发热体的折返部的方式被设置,在所述折返部中由邻接的导体所夹的陶瓷部的空孔占有率为0.01~50%。In order to achieve the first object above, the ceramic heater according to the present invention is characterized in that it includes a ceramic body having an outer surface and a buried conductor pattern, the conductor pattern is composed of a conductor, and the conductor is formed as The form of the turn-back portion of the resistance heating element is provided, and the pore occupancy rate of the ceramic portion sandwiched by the adjacent conductors in the turn-back portion is 0.01 to 50%.

这里,所谓上述邻接导体间所夹的陶瓷部,被定义为是与该导体实质上具有相同的厚度且沿着上述外表面的作为内部区域中,夹在导体间的陶瓷部分。Here, the ceramic portion sandwiched between the adjacent conductors is defined as a ceramic portion sandwiched between the conductors in an inner region along the outer surface that has substantially the same thickness as the conductor.

另外,本发明的陶瓷加热器的第1制造方法,其特征包括:In addition, the first manufacturing method of the ceramic heater of the present invention is characterized in that it includes:

在第一陶瓷生片表面由规定的图案形成导体糊的工序,a step of forming a conductor paste in a predetermined pattern on the surface of the first ceramic green sheet,

和在该第一陶瓷生片的形成导体糊的面上,叠层至少具有与该导体图案同样的厚度且比上述第一陶瓷生片更柔软的第二陶瓷生片,制作陶瓷生片层叠体的工序,and a second ceramic green sheet having at least the same thickness as the conductive pattern and being softer than the first ceramic green sheet is laminated on the surface of the first ceramic green sheet on which the conductor paste is formed to produce a ceramic green sheet laminate process,

和在陶瓷成形体上粘结该陶瓷生片层叠体的工序,and a step of bonding the ceramic green sheet laminate to the ceramic molded body,

和烧成该粘结的陶瓷生片层叠体及陶瓷成形体的工序。and firing the bonded ceramic green sheet laminate and ceramic molded body.

另外,本发明的陶瓷加热器的第2制造方法,其特征是包括:In addition, the second manufacturing method of the ceramic heater of the present invention is characterized by comprising:

按规定的图案在陶瓷生片的表面形成导体糊的工序,The process of forming a conductor paste on the surface of a ceramic green sheet according to a prescribed pattern,

和在上述规定图案中导体糊之间填充绝缘物的工序,and the process of filling insulators between the conductor pastes in the above prescribed pattern,

和将在该导体糊间填充绝缘物的陶瓷生片,将形成上述导体糊的面作为粘结面而粘结在陶瓷成形体上的工序,and a step of bonding the ceramic green sheet filled with an insulator between the conductor paste to the ceramic molded body using the surface on which the conductor paste is formed as the bonding surface,

和烧成该粘结陶瓷生片及陶瓷成形体的工序。and firing the bonded ceramic green sheet and ceramic molded body.

另外,为了达成上述第2目的,本发明的加热装置,其特征为,具备:In addition, in order to achieve the second object above, the heating device of the present invention is characterized by comprising:

加热板,其由被埋设电阻发热体的板状陶瓷体构成,具有0.5~5.0mm范围的厚度;和a heating plate, which is composed of a plate-shaped ceramic body embedded with a resistance heating element, and has a thickness ranging from 0.5 to 5.0 mm; and

板状体,其具有第1和第2面,在所述第1面设置所述加热板,将所述第2面作为加热面,该加热面由平面部和其周边的倒角部构成。A plate-shaped body has a first surface and a second surface, the heating plate is provided on the first surface, the second surface is used as a heating surface, and the heating surface is composed of a flat surface and a chamfered portion around the surface.

本发明的所述烫发器,其特征为:采用本发明的陶瓷加热器或本发明的加热装置而构成。The hair iron of the present invention is characterized in that it is constructed by using the ceramic heater of the present invention or the heating device of the present invention.

以上发明所述的陶瓷加热器,因为在上述导体间陶瓷体的空孔占有率为0.01~50%,所以能够防止高温条件下绝缘性降低,能够提供耐久性高的陶瓷加热器。In the ceramic heater according to the above invention, since the pore occupancy rate of the ceramic body between conductors is 0.01 to 50%, it is possible to provide a ceramic heater with high durability by preventing a decrease in insulation performance under high temperature conditions.

即,陶瓷加热体的发明,发现如果上述导体间的陶瓷部的空孔占有率在一定范围内时,就能够防止高温条件下绝缘性降低,而完成了本发明。That is, in the invention of the ceramic heating body, it was found that if the pore occupancy rate of the ceramic part between the above-mentioned conductors is within a certain range, it is possible to prevent the insulation from being lowered under high temperature conditions, and completed the present invention.

另外,本发明的加热装置,因在板状陶瓷体中埋设电阻发热体,所以没有在水蒸气等中暴露电阻发热体的情况,因而耐久性卓越,同时可以反复急速加热,并且加热面内的温度差可以很小,因此均匀地加热被加热物成为可能。In addition, since the heating device of the present invention embeds the resistance heating element in the plate-shaped ceramic body, there is no situation in which the resistance heating element is exposed to water vapor or the like, so it has excellent durability, can repeat rapid heating at the same time, and can heat the inside of the surface. The temperature difference can be very small, so it is possible to heat the object evenly.

进而,本发明所述烫发器,通过具备本发明的陶瓷加热器或本发明的加热装置,能具有高的耐久性。Furthermore, the hair iron according to the present invention can have high durability by including the ceramic heater of the present invention or the heating device of the present invention.

另外,在本发明的烫发器上,通过具备本发明所述加热装置,因为在加热面不会产生局部高温部,所以能够提供不会出现例如对毛发进行部分地高温加热而造成损伤的烫发器。In addition, in the hair iron of the present invention, by including the heating device of the present invention, since no local high-temperature portion is generated on the heating surface, it is possible to provide a hair iron that does not cause damage due to partial high-temperature heating, for example. .

附图说明Description of drawings

图1是表示本发明的实施方式1的陶瓷加热器的结构的局部剖开立体图。FIG. 1 is a partially cutaway perspective view showing the structure of a ceramic heater according to Embodiment 1 of the present invention.

图2是图1的陶瓷加热器的X-X线的剖面图。Fig. 2 is a sectional view taken along line X-X of the ceramic heater of Fig. 1 .

图3是表示实施方式1的圆柱状陶瓷加热器的导体间的放大剖面图。3 is an enlarged cross-sectional view showing between conductors of the cylindrical ceramic heater according to Embodiment 1. FIG.

图4是表示实施方式1的变形例的平板状陶瓷加热器的导体间的放大剖面图。4 is an enlarged cross-sectional view showing between conductors of a flat ceramic heater according to a modified example of Embodiment 1. FIG.

图5是表示本发明实施方式2的烫发器构成部分切口的侧视图。Fig. 5 is a side view showing a cutout of a constituent part of the hair iron according to Embodiment 2 of the present invention.

图6是表示应用图5的烫发器的加热板和板状体位置关系的主视图。Fig. 6 is a front view showing the positional relationship between the heating plate and the plate-shaped body to which the hair iron shown in Fig. 5 is applied.

图7是表示图6的X-X剖面图。Fig. 7 is a sectional view taken along line X-X in Fig. 6 .

图8是表示本发明实施方式2的变形例的加热装置的剖面图。8 is a cross-sectional view showing a heating device according to a modified example of Embodiment 2 of the present invention.

图9是表示在实施方式2的加热装置中应用的加热板的俯视图。FIG. 9 is a plan view showing a heating plate used in the heating device according to Embodiment 2. FIG.

图10是以往陶瓷加热器的展开图。Fig. 10 is a developed view of a conventional ceramic heater.

图中:1-陶瓷加热器,2-陶瓷芯材,3-陶瓷片,4-发热电阻体,5-引线引出部,6-通孔,7-电极极板,8-引线部件,A-圆柱状陶瓷加热器导体间区域,B-平板状陶瓷加热器导体间区域,5-加热装置,50-把持部件,52-轴,53-螺旋弹簧,54-轴承部,55-板状体,55a-加热面,57-加热板,58-电阻发热体,59-弹簧,61-引线。In the figure: 1-ceramic heater, 2-ceramic core material, 3-ceramic sheet, 4-heating resistor, 5-lead lead out part, 6-through hole, 7-electrode plate, 8-lead parts, A- The area between the conductors of the cylindrical ceramic heater, B- the area between the conductors of the flat ceramic heater, 5- the heating device, 50- the holding part, 52- the shaft, 53- the coil spring, 54- the bearing part, 55- the plate body, 55a-heating surface, 57-heating plate, 58-resistance heating element, 59-spring, 61-lead wire.

具体实施方式Detailed ways

以下,参照附图说明本发明的实施方式。Hereinafter, embodiments of the present invention will be described with reference to the drawings.

实施方式1Embodiment 1

图1是本发明实施方式1的陶瓷加热器1的部分剖开立体图。图2是图1的X-X剖面图。Fig. 1 is a partially cutaway perspective view of a ceramic heater 1 according to Embodiment 1 of the present invention. Fig. 2 is an X-X sectional view of Fig. 1 .

本实施方式1的陶瓷加热器1的特征是在由陶瓷芯材2和陶瓷片3构成的陶瓷体中内装发热电阻体4。这里,发热电阻体4由导体图案的折返部构成,在形成该发热电阻体4的部分,邻近导体间陶瓷体的空孔(void)占有率为0.01~50%。The ceramic heater 1 according to Embodiment 1 is characterized in that a heating resistor 4 is incorporated in a ceramic body composed of a ceramic core material 2 and a ceramic sheet 3 . Here, the heating resistor 4 is constituted by the turned-back portion of the conductor pattern, and the portion where the heating resistor 4 is formed has a void occupancy rate of 0.01 to 50% in the ceramic body between adjacent conductors.

该陶瓷加热器1,是在表面形成发热电阻体4和引线引出部5;在背面形成电极极板7的陶瓷生片(烧成后为陶瓷片3),使发热电阻体4和引线引出部5成为内侧,卷绕在陶瓷成形体(烧成后为陶瓷芯材2)上,通过密接烧成来获得的。其中,引线引出部5和电极极板7通过在陶瓷片3上所形成的通孔6连接。This ceramic heater 1 is to form heating resistor body 4 and lead wire lead-out part 5 on the surface; Form the ceramic green sheet (ceramic sheet 3 after firing) of electrode plate 7 on the back, make heating resistor body 4 and lead wire lead-out part 5 becomes the inner side, is wound on a ceramic molded body (ceramic core material 2 after firing), and is obtained by close-contact firing. Wherein, the lead-out part 5 and the electrode pad 7 are connected through the through hole 6 formed on the ceramic sheet 3 .

陶瓷体由烧成陶瓷成形体的陶瓷芯材2和烧成陶瓷生片的陶瓷片3构成。该陶瓷体由氧化铝质陶瓷、氮化硅质陶瓷、氮化铝质陶瓷、碳化硅质陶瓷等各种陶瓷构成,特别优选应用氧化铝或氮化硅作为重要成份的部件,以此能够获得急速升温并且耐久性卓越的陶瓷加热器1。例如,采用氧化铝(Alumina)时,优选采用由Al2O3:88~95重量%、SiO2:2~7重量%、CaO:0.5~3重量%、MgO:0.5~3重量%、ZrO2:1~3重量%构成的氧化铝。如果Al2O3含量不足88重量%时,则由于玻璃质增多,通电时的具有迁移(migration)增大的危险。另一方面,如果Al2O3含量超过95重量%时,则由于向内装的发热电阻体4的金属层内扩散的玻璃量减少,具有陶瓷加热器1的耐久性劣化的危险。另外,采用碳化硅质陶瓷时,相对于主要成份氮化硅,作为烧结辅助剂优选3~12重量%的稀土元素氧化物和0.5~3重量的Al2O3,进而作为烧结体中含有的SiO2量,SiO2尽量混合到1.5~5重量%。这里所示的SiO2量为氮化硅原料中含有的杂质氧化生成的SiO2、其他添加物含有的杂质的SiO2和意图添加的SiO2的总和。另外,通过使母材氮化硅中的MoSi2或WSi2分散,母材的热膨胀率与发热电阻体4的热膨胀率接近,从而能够改善发热电阻体4的耐久性。The ceramic body is composed of a ceramic core material 2 fired into a ceramic molded body and a ceramic sheet 3 fired into a ceramic green sheet. The ceramic body is composed of various ceramics such as alumina ceramics, silicon nitride ceramics, aluminum nitride ceramics, and silicon carbide ceramics, and it is particularly preferable to use alumina or silicon nitride as an important component, thereby obtaining Rapid heating and excellent durability ceramic heater 1. For example, when aluminum oxide (Alumina) is used, it is preferable to use Al 2 O 3 : 88 to 95% by weight, SiO 2 : 2 to 7% by weight, CaO: 0.5 to 3% by weight, MgO: 0.5 to 3% by weight, ZrO 2 : Alumina composed of 1 to 3% by weight. If the Al 2 O 3 content is less than 88% by weight, the glassiness increases, and there is a risk of increased migration during energization. On the other hand, if the Al 2 O 3 content exceeds 95% by weight, the amount of glass diffused into the metal layer of the built-in heating resistor 4 decreases, and the durability of the ceramic heater 1 may deteriorate. In addition, when silicon carbide ceramics are used, relative to the main component of silicon nitride, 3 to 12% by weight of rare earth element oxides and 0.5 to 3% by weight of Al 2 O 3 are preferably used as sintering aids, and furthermore, as the sintered body contained in SiO 2 amount, SiO 2 mixed to 1.5 to 5% by weight as much as possible. The amount of SiO 2 shown here is the sum of SiO 2 generated by oxidation of impurities contained in the silicon nitride raw material, SiO 2 of impurities contained in other additives, and SiO 2 intended to be added. In addition, by dispersing MoSi 2 or WSi 2 in the base material silicon nitride, the thermal expansion coefficient of the base material is close to that of the heating resistor 4 , thereby improving the durability of the heating resistor 4 .

另外,发热电阻体4由蛇行导体图案构成,并且连接相对于该发热电阻体4的电阻值为1/10左右的引线引出部5。通常为了简化这些操作,在陶瓷生片上(烧成后形成陶瓷片3)同时印制形成发热电阻体4及引线引出部5的情况较多。其中,本发明的折返部,是为了达到所期电阻值而含有U字折返形状或蛇行形状的部件。In addition, the heating resistor 4 is composed of a meandering conductor pattern, and is connected to the lead wire lead-out portion 5 whose resistance value relative to the heating resistor 4 is about 1/10. Usually, in order to simplify these operations, it is often the case that the heating resistor 4 and the lead-out part 5 are simultaneously printed and formed on the ceramic green sheet (the ceramic sheet 3 is formed after firing). Among them, the folded portion of the present invention is a member having a U-shaped folded shape or a meandering shape in order to achieve a desired resistance value.

这里,关于陶瓷加热器1的尺寸,例如没有外径可以是宽2~20mm,长40~200mm左右。作为汽车空燃比传感器加热用的陶瓷加热器1,优选外径和宽为2~4mm,长为50~65mm。另外,在汽车用用途方面优选发热电阻体4的发热长度尽可能为3~15mm。当发热长度短于3mm时,通电时的升温可以很快,但却使陶瓷加热器1的耐久性降低了。当发热长度长于15mm时,升温速度变慢,要想加快升温速度,陶瓷加热器1消耗的电力就得变大,因此不优选采用。其中,所谓发热长度为图1所示的蛇行发热电阻体4长方向的长度,该发热长度根据该目的用途进行适当选择。Here, the size of the ceramic heater 1 may be, for example, about 2 to 20 mm in width and 40 to 200 mm in length without the outer diameter. As the ceramic heater 1 for heating an automobile air-fuel ratio sensor, the outer diameter and width are preferably 2 to 4 mm, and the length is 50 to 65 mm. In addition, in terms of automotive applications, it is preferable that the heating length of the heating resistor 4 be 3 to 15 mm as much as possible. When the heat generation length is shorter than 3mm, the temperature rise at the time of energization can be rapid, but the durability of the ceramic heater 1 is reduced. When the heating length is longer than 15 mm, the temperature rise rate becomes slow, and if the temperature rise rate is to be accelerated, the power consumed by the ceramic heater 1 must become larger, so it is not preferable to use it. Here, the heating length is the length in the longitudinal direction of the meandering heating resistor 4 shown in FIG. 1 , and the heating length is appropriately selected according to the intended use.

其中,在图2中尽管在陶瓷芯材2和陶瓷片3之间描画了边界线,实际上未烧成的陶瓷成形体和陶瓷生片粘结后,经过烧成很多的情况下没有作为该粘结面的边界。Here, although the boundary line is drawn between the ceramic core material 2 and the ceramic sheet 3 in FIG. 2 , in fact, after the unfired ceramic molded body is bonded to the ceramic green sheet, it is not regarded as the case that the ceramic green sheet is fired a lot. Boundary of the bonding surface.

在本实施方式1时,优选在陶瓷加热器1的电极极板7上形成烧成后1次电镀层。该1次电镀层,当在电极图案7的表面钎焊引线部件8时,使钎焊料流动良好,具有增加钎焊强度的效果。1次电镀层当厚度为1~5μm时因密接力增加而优选。作为一次电镀层的材质,优选Ni、Cr或以这些成份为主要成份的复合材料,进而优选以耐久性卓越的Ni为主成份的电镀。In the first embodiment, it is preferable to form a post-firing primary plating layer on the electrode pad 7 of the ceramic heater 1 . This primary plating layer has the effect of improving the solder flow when soldering the lead member 8 on the surface of the electrode pattern 7 and increasing the soldering strength. The thickness of the primary plating layer is preferably 1 to 5 μm, since the adhesion force increases. As the material of the primary plating layer, Ni, Cr, or a composite material mainly composed of these components is preferable, and plating mainly composed of Ni, which is excellent in durability, is more preferable.

另外,在高湿度的气氛中应用时,采用Au系、Cu系的钎焊料因不易发生迁移而优选。作为钎焊料,优选耐热性高的Au、Cu、Au-Cu、Au-Ni、Ag、Ag-Cu系的物质。为了提高耐久性,特别进一步优选Au-Cu钎焊、Au-Ni钎焊、Ag-Cu钎焊。在钎焊料的表面为了改善高温耐久性及保护钎焊料被腐蚀通常优选形成由Ni构成的2次电镀层。In addition, when used in a high-humidity atmosphere, it is preferable to use Au-based or Cu-based brazing materials because migration is less likely to occur. As the brazing material, Au, Cu, Au—Cu, Au—Ni, Ag, and Ag—Cu-based substances having high heat resistance are preferable. In order to improve durability, Au—Cu brazing, Au—Ni brazing, and Ag—Cu brazing are more preferable. In general, it is preferable to form a secondary plating layer made of Ni on the surface of the brazing material in order to improve high-temperature durability and protect the brazing material from corrosion.

另外,作为引线部件8的材质,因为在使用中由发热电阻体4穿过来的热量会使引线部件8的温度上升,优选使用耐热性良好的Ni系或Fe-Ni系合金等。In addition, as the material of the lead member 8, since the temperature of the lead member 8 rises due to the heat passing through the heating resistor 4 during use, Ni-based or Fe-Ni-based alloys with good heat resistance are preferably used.

而且,本发明特征具有如下几点,在内装导体图案的陶瓷加热器1中,导体图案具有构成发热电阻体4的折返部,该折返部中相邻的任意导体间的陶瓷体的空孔占有率为0.01~50%。并且,该折返部中相邻的任意导体问的陶瓷体的空孔占有率进而优选0.1~40%,更加优选1~20%。空孔占有率不足0.01%时,如果反复急速升温和急速降温,加热部的发热电阻体4加热膨胀时,由于发热电阻体4周围的陶瓷的热的逸散不充分,陶瓷体的热膨胀不能追随发热电阻体4的热膨胀,导致应力集中到发热电阻体的缘部41,具有发生断裂断线的危险。另一方面,当该空孔占有率大于50%时,在高温条件下进行连续通电时,加热部中发热电阻体4周围的陶瓷体的绝缘性劣化,具有耐久性降低的倾向。其中,在陶瓷成形体上直接粘结陶瓷生片使其密接烧成时,就变得比上述范围空孔占有率更大的数值。因此,为了达到上述范围的空孔率,采用了下述的制造方法。Moreover, the present invention is characterized in that in the ceramic heater 1 with a built-in conductor pattern, the conductor pattern has a turn-back portion constituting the heating resistor 4, and in the turn-back portion, the voids of the ceramic body between any adjacent conductors occupy The rate is 0.01 to 50%. Furthermore, the pore occupancy rate of the ceramic body between any adjacent conductors in the folded portion is more preferably 0.1 to 40%, and still more preferably 1 to 20%. When the pore occupancy rate is less than 0.01%, if the rapid heating and rapid cooling are repeated, when the heating resistor 4 of the heating part is heated and expanded, the heat dissipation of the ceramic around the heating resistor 4 is insufficient, and the thermal expansion of the ceramic body cannot follow. The thermal expansion of the heating resistor 4 causes stress to concentrate on the edge portion 41 of the heating resistor, and there is a risk of fracture and disconnection. On the other hand, when the pore occupancy rate exceeds 50%, the insulation of the ceramic body around the heating resistor 4 in the heating portion tends to deteriorate and durability tends to decrease when current is continuously applied at a high temperature. However, when the ceramic green sheet is directly bonded to the ceramic molded body and fired in close contact, the pore occupancy rate becomes a value larger than the above range. Therefore, in order to achieve the porosity in the above-mentioned range, the following production method was employed.

图2是表示与长度方向垂直断面的一例剖面图(图1所示的X-X线剖面图),表示在导体图案的折返部(发热电阻体4)的导体在陶瓷芯材2的外周圆形的配置方式。这里,所谓导体间陶瓷体的空孔占有率为0.01~50%,意思是当测定任意邻近导体图案(图3中的4a和4b)间陶瓷体的空孔占有率为0.01~50%。于是,陶瓷体空孔占有率为0.01~50%的部分,可以是在与长度方向垂直的方向切断发热电阻体4的断面的任何部分。其中,所谓导体间为,当陶瓷体为圆柱状时,如图3所示,是沿着陶瓷芯材2外周圆(换言说,陶瓷体的外表面)连接邻近导体4a上边和4b上边的线,和沿着陶瓷芯材2的外周圆连接导体4a下边和4b下边的线,在导体4a、4b表面所包覆的区域A的区域;另外,当陶瓷体为平板状时,如图4所示,是连接邻近导体4c上边和4d上边的线,和连接导体4c下边和4d下边的线,在导体4c、4d的表面包覆区域B的区域。2 is a sectional view showing an example of a section perpendicular to the longitudinal direction (X-X line sectional view shown in FIG. 1 ), showing that the conductor at the turn-back portion (heating resistor 4) of the conductor pattern is circular on the outer periphery of the ceramic core material 2. Configuration method. Here, the pore occupancy rate of the ceramic body between conductors is 0.01-50%, which means that the pore occupancy rate of the ceramic body between any adjacent conductor patterns (4a and 4b in FIG. 3 ) is 0.01-50%. Therefore, the portion of the ceramic body with a pore occupancy rate of 0.01 to 50% may be any portion of the cross-section of the heating resistor 4 cut in a direction perpendicular to the longitudinal direction. Wherein, between so-called conductors, when the ceramic body is cylindrical, as shown in Figure 3, it is along the outer circumference of the ceramic core material 2 (in other words, the outer surface of the ceramic body) connecting the lines on the top of the adjacent conductors 4a and 4b. , and the line connecting the lower edge of the conductor 4a and the lower edge of the 4b along the outer circumference of the ceramic core material 2, in the area of the area A covered by the surface of the conductor 4a, 4b; in addition, when the ceramic body is flat, as shown in Figure 4 Shown, is the line connecting the upper side of the adjacent conductor 4c and the upper side of 4d, and the line connecting the lower side of the conductor 4c and the lower side of the conductor 4d, covering the region B on the surface of the conductors 4c and 4d.

另外,在本说明书中,所谓的导体形成区域,是指当陶瓷体为圆柱状时,陶瓷芯材2的外周和沿着该外周从该外周往外导体厚度的外周之间所夹的圆环区域;当陶瓷体为平板状时,如同连接各导体上边似的连接线和如同连接各导体下边似的连接线之间所夹的内部区域。即,如同上述定义的导体间,在导体形成区域中相邻的导体间的位置部分。In addition, in this specification, the so-called conductor formation region refers to the annular region sandwiched between the outer circumference of the ceramic core material 2 and the outer circumference along the outer circumference from the outer circumference to the outer circumference of the outer conductor thickness when the ceramic body is cylindrical. ; When the ceramic body is in the form of a flat plate, the internal area sandwiched between the connecting wires that connect the upper sides of the conductors and the connecting wires that connect the lower sides of the conductors. That is, as defined above, between conductors is a portion between adjacent conductors in the conductor formation region.

进而,在本实施方式1的陶瓷加热器中,沿着邻接导体间所存在的空孔外表面的长度优选为导体间隔的1/2以下。即,在导体图案折返部,沿着外表面对邻接导体间进行连接的任意线上,优选在导体间的陶瓷体中不存在长度超过该线长度(导体间距离)的1/2的空孔。当空孔的长度超过导体间距离的1/2时,高温条件下进行连续通电时,包覆加热部的发热电阻体4的陶瓷体的绝缘性就劣化,因此耐久性就劣化。其中,所谓任意线,是如图3所示当为圆柱状的陶瓷加热器时,沿着外表面连接区域A内相邻导体4a和4b的任意的线。这时的任意线为由如图3所示的圆柱状陶瓷加热器的剖面图的外廓线(陶瓷体的外表面)构成的圆中心和具有大致同一中心的圆弧状曲线;另外,当如图4所示平板状陶瓷加热器时,连接区域B中相邻导体4c和4d的任意直线称作任意线。Furthermore, in the ceramic heater according to Embodiment 1, the length along the outer surface of the void existing between adjacent conductors is preferably 1/2 or less of the conductor interval. That is, in the conductor pattern turn-back portion, along any line connecting adjacent conductors along the outer surface, it is preferable that there is no void whose length exceeds 1/2 of the line length (distance between conductors) in the ceramic body between the conductors. . When the length of the void exceeds 1/2 of the distance between the conductors, the insulation of the ceramic body covering the heating resistor 4 of the heating part deteriorates when continuous current is applied under high temperature conditions, and thus the durability deteriorates. Wherein, the so-called random line refers to any line connecting the adjacent conductors 4a and 4b in the area A along the outer surface when it is a cylindrical ceramic heater as shown in FIG. 3 . The arbitrary line at this time is the center of the circle formed by the outline (outer surface of the ceramic body) of the sectional view of the cylindrical ceramic heater as shown in FIG. 3 and an arc-shaped curve having approximately the same center; In the case of a flat ceramic heater as shown in FIG. 4, an arbitrary straight line connecting adjacent conductors 4c and 4d in the area B is called an arbitrary line.

进而,本发明中导体图案,特别是构成发热电阻体的导体厚度优选5~100μm。当导体图案厚度不足5μm时,尽管能够防止邻近任意的上述导体间的空孔,但是在高温连续耐久、高温周期耐久试验时,引起加热部的发热电阻体4的电阻变化及断线,耐久性劣化。另一方面,当导体图案厚度超过100μm时,具有很难抑制相邻的任意导体间的空孔率为50%以下的倾向。Furthermore, in the present invention, the thickness of the conductive pattern, especially the conductor constituting the heating resistor is preferably 5 to 100 μm. When the thickness of the conductor pattern is less than 5 μm, although it is possible to prevent voids adjacent to any of the above-mentioned conductors, the resistance change and disconnection of the heating resistor 4 in the heating part will be caused during the high-temperature continuous durability test and high-temperature cycle durability test. deteriorating. On the other hand, when the thickness of the conductor pattern exceeds 100 μm, it tends to be difficult to suppress the porosity between any adjacent conductors to 50% or less.

接下来说明邻近任意导体间的陶瓷体空孔占有率达到0.01~50%的方法。Next, a method for achieving a pore occupancy rate of 0.01 to 50% in the ceramic body between adjacent arbitrary conductors will be described.

作为一个例子,可以采用如下方法:在第一陶瓷生片表面形成导体图案,在第一陶瓷生片的导体图案形成侧面叠层具有至少与导体图案的厚度大致相同优选具有一样厚度的比第一陶瓷生片更柔软的第二陶瓷生片。根据该方法,通过在导体图案的厚度部分的空隙埋设柔软的第二陶瓷生片,可以排除图案间的空孔。这里,第二陶瓷生片需要比第一陶瓷生片柔软,因为当第二陶瓷生片柔软时,在实施导体图案的第一陶瓷生片上粘结第二陶瓷生片时,至少在导体间的中心部,两个陶瓷生片之间能够密接。这里,该陶瓷生片的硬度通过数字指示器(ミットョ制)进行测定,优选φ1mm的针在30秒侵入深度在200μm以上。陶瓷生片的硬度,即上述侵入深度不足200μm时,因为导体间不能够紧密接触而形成空孔。其中为了减少图案间的空隙,可以使用压力机等施加压力。As an example, the following method may be adopted: a conductor pattern is formed on the surface of the first ceramic green sheet, and the conductor pattern is formed on the side of the first ceramic green sheet to form a laminate having a thickness at least substantially the same as that of the conductor pattern, preferably having the same thickness than the first ceramic green sheet. The ceramic green sheet is a softer second ceramic green sheet. According to this method, voids between patterns can be eliminated by embedding the soft second ceramic green sheet in the voids in the thickness portion of the conductor pattern. Here, the second ceramic green sheet needs to be softer than the first ceramic green sheet, because when the second ceramic green sheet is soft, when the second ceramic green sheet is bonded to the first ceramic green sheet on which the conductor pattern is implemented, at least the gap between the conductors will be damaged. In the central part, the two ceramic green sheets can be closely bonded. Here, the hardness of the ceramic green sheet is measured with a digital indicator (manufactured by Mitto), and it is preferable that a needle with a diameter of 1 mm penetrates to a depth of 200 μm or more in 30 seconds. When the hardness of the ceramic green sheet, that is, the aforementioned intrusion depth is less than 200 μm, voids are formed because conductors cannot be in close contact with each other. However, in order to reduce the gap between the patterns, pressure can be applied using a press or the like.

另外,作为其他的方法,可以采用网板印刷糊的方法。该方法如下所述完成。首先,在陶瓷生片上进行网板印刷发热电阻体4和引线引出部5。这时,在网板印刷涂布的糊为混合由高融点金属(W、Mo、Re等)作为主成分的粉末和粘接成分构成的有机树脂系的粘合剂,主要为乙基纤维素、硝酸纤维素及作为稀释剂所采用的有机溶剂,主要为T.P.O(松油醇)、D.B.P(邻苯二甲酸二丁酯)、D.O.P(邻苯二甲酸二辛酯)、B.C.A(二乙二醇丁醚醋酸酯)等形成的物质。在原始厚度为5~150μm范围内印刷这些糊。另外,以发热电阻体4的电阻值达到大约为引线引出部5的电阻值的约10倍的方式,调整线宽、印刷厚度或者糊的比电阻等而形成导体图案。然后,为了填充邻近导体间厚部分的空隙,对含有绝缘物的糊实施网板印刷。这时采用的糊为由高融点绝缘物,主要与陶瓷生片同一组成,即由Al2O3:88~95重量%、SiO2:2~7重量%、CaO:0.5~3重量%、MgO:0.5~3重量%、ZrO2:1~3重量%构成的氧化铝陶瓷中混合有由粘接成分构成的有机树脂系粘合剂,主要为乙基纤维素、硝酸纤维素及作为稀释剂所采用的有机溶剂,主要为T.P.O(松油醇)、D.B.P(邻苯二甲酸二丁酯)、D.O.P(邻苯二甲酸二辛酯)、B.C.A(二乙二醇丁醚醋酸酯)等形成的物质。进而,作为糊除了陶瓷生片组成以外也可以使用单一氧化铝成分或体积电阻系数108Ω以上的具有绝缘性的材料。这里,糊的粘度优选在50dPa.s~1000dPa.s范围内调整,进行印刷。当糊粘度为50dPa.s以下时尽管印刷性能优良,但因生料密度低,干燥收缩量变大,在导体图案上边部产生高低差,烧成后容易产生空孔。另外,粘度为1000dPa.s以上时,因整平(leveling)性降低,被膜中容易产生空孔,因而不优选。其中,网板印刷是在将发热电阻体及引线引出部反转的网板上进行的。In addition, as another method, the method of screen printing paste can be used. The method is accomplished as described below. First, the heating resistor 4 and the lead-out portion 5 are screen-printed on a ceramic green sheet. At this time, the paste applied by screen printing is an organic resin-based binder composed of a powder composed mainly of a high-melting point metal (W, Mo, Re, etc.) and an adhesive component, mainly ethyl cellulose , nitrocellulose and the organic solvents used as diluents, mainly TPO (terpineol), DBP (dibutyl phthalate), DOP (dioctyl phthalate), BCA (diethylene glycol Alcohol butyl ether acetate) and other substances formed. These pastes were printed at an original thickness ranging from 5 to 150 μm. In addition, the conductor pattern is formed by adjusting the line width, printing thickness, specific resistance of the paste, etc. so that the resistance value of the heating resistor 4 becomes approximately 10 times the resistance value of the lead lead-out portion 5 . Then, the paste containing the insulator is screen-printed in order to fill the voids adjacent to the thick portion between the conductors. At this time, the paste used is made of high melting point insulator, which is mainly composed of the same composition as the ceramic green sheet, that is, Al 2 O 3 : 88-95% by weight, SiO 2 : 2-7% by weight, CaO: 0.5-3% by weight, Alumina ceramics composed of MgO: 0.5 to 3% by weight and ZrO 2 : 1 to 3% by weight are mixed with an organic resin-based binder composed of bonding components, mainly ethyl cellulose, nitrocellulose and diluent The organic solvents used in the agent are mainly TPO (terpineol), DBP (dibutyl phthalate), DOP (dioctyl phthalate), BCA (diethylene glycol butyl ether acetate), etc. formed substance. Furthermore, a single alumina component or an insulating material having a volume resistivity of 108Ω or more may be used as the paste other than the composition of the ceramic green sheet. Here, the viscosity of the paste is preferably adjusted within a range of 50 dPa.s to 1000 dPa.s for printing. When the paste viscosity is less than 50dPa.s, although the printing performance is excellent, due to the low density of the raw material, the drying shrinkage will increase, and there will be a difference in height on the upper side of the conductor pattern, and voids will easily occur after firing. Moreover, when a viscosity is 1000 dPa.s or more, leveling (leveling) property will fall, and a void will generate|occur|produce easily in a film, and it is unpreferable. Among them, screen printing is carried out on a screen in which the heating resistor and the lead-out part are reversed.

进而作为其他方法,可以采用应用分配器(dispenser)的填充方法。如上所述,糊粘度为1000dPa.s以上的物质,设定高生料密度成为可能,为了能够最小限度地产生干燥收缩导致的收缩量,尽管可以使导体间的空隙可靠填充,但是用网板印刷的方法时不优选,而不能采用。因此,在使用如此高粘度的糊时,可以优选采用应用分配器的填充方法。Furthermore, as another method, a filling method using a dispenser may be employed. As mentioned above, it is possible to set a high raw material density for materials with a paste viscosity of 1000dPa.s or more. In order to minimize the amount of shrinkage caused by drying shrinkage, although the gaps between conductors can be reliably filled, screen printing The method is not preferred and cannot be used. Therefore, when using such a high-viscosity paste, the filling method using a dispenser can be preferably used.

如此,在使用网板印刷或应用分配器的方法,不是在导体图案上而是在导体间可以填充绝缘物这点上讲是有效的方法。In this way, the method of using screen printing or applying a dispenser is an effective method in that it is possible to fill insulators not on the conductor pattern but between the conductors.

其中,本发明实施例中,关于在圆柱状陶瓷成形体中卷绕陶瓷生片烧成的陶瓷体作了明确指示,但本发明还包括:平板状陶瓷成形体、或在陶瓷生片中粘结烧成实施导体等的印刷的陶瓷生片而成的陶瓷体。Among them, in the embodiment of the present invention, it is clearly indicated that the ceramic body is wound with a ceramic green sheet in a cylindrical ceramic molded body, but the present invention also includes: a flat ceramic molded body, or a ceramic green sheet bonded A ceramic body formed by sintering and firing ceramic green sheets printed with conductors and the like.

实施方式2Embodiment 2

接下来说明本发明所述的实施方式2的加热装置51。Next, the heating device 51 according to Embodiment 2 of the present invention will be described.

图5为表示使用本实施方式2加热装置51的烫发器100的一构成例的部分缺欠的侧视图。在该图5中,50为把持部件,52为联结自由开闭的一对把持部件的轴,53为在轴承部54内安装的平时保持两把持部件的前端部的开放方向的力的螺旋弹簧。55为在两把持部件50的前端部所设置的开口部56中分别嵌入而相互面对的板状体55。57表示密接在板状体55背面的加热板。Fig. 5 is a partially broken side view showing a configuration example of a hair iron 100 using a heating device 51 according to the second embodiment. In this Fig. 5, 50 is a holding member, 52 is a shaft connecting a pair of holding members that are freely openable and closed, and 53 is a coil spring installed in a bearing portion 54 to maintain the opening direction of the front ends of the two holding members at ordinary times. . 55 is the plate-shaped body 55 which is respectively fitted into the opening 56 provided in the front-end part of both holding members 50, and faces each other.

图6表示从图5加热装置51中取出的加热板57和板状体55的位置关系的主视图,图7为该X-X线剖面图。加热板57的热通过加热板57的一方的主面57a传到板状体一方的主面55b,这样可以均匀加热板状体55的另一方的主面所具有的加热面55a。FIG. 6 is a front view showing the positional relationship between the heating plate 57 and the plate-shaped body 55 taken out of the heating device 51 in FIG. 5 , and FIG. 7 is a cross-sectional view along line X-X. The heat of the heating plate 57 is transferred to the one main surface 55b of the plate-shaped body through the one main surface 57a of the heating plate 57, so that the heating surface 55a provided on the other main surface of the plate-shaped body 55 can be uniformly heated.

因有如此构成,使用小型陶瓷制的加热板57可以效率良好地均匀加热具有大加热面55a的板状体55。With such a configuration, the plate-shaped body 55 having the large heating surface 55a can be efficiently and uniformly heated using the small heating plate 57 made of ceramics.

即,本实施方式2的加热装置51由在板状陶瓷体中埋设电阻发热体58的加热板57和具备加热被加热物的加热面55a的板状体55构成,板状体55的一方主面55b和上述加热板57的一方主面57a接触。于是,本发明的特征是:上述加热面55a由平面部和其周边具备的C面或曲面的倒角部构成,加热板57的厚度H为0.5~5mm。加热板57在板状陶瓷体内部埋设了电阻发热体58,电阻发热体58阻断了空气,电阻发热体58可以防止空气中含有水分等的腐蚀。另外,在板状陶瓷体内部埋设的电阻发热体58因为其本身具有电阻,当一定的电力下印刷时焦耳发热到规定温度,加热板57作为发热体可以升温至所要求的规定温度。That is, the heating device 51 according to Embodiment 2 is composed of a heating plate 57 in which a resistance heating element 58 is embedded in a plate-shaped ceramic body, and a plate-shaped body 55 having a heating surface 55a for heating an object to be heated. The surface 55b is in contact with one main surface 57a of the heating plate 57 described above. Therefore, the present invention is characterized in that the heating surface 55a is composed of a flat surface and a C surface or a chamfered surface of a curved surface provided around the flat surface, and the thickness H of the heating plate 57 is 0.5 to 5 mm. The heating plate 57 embeds a resistance heating element 58 inside the plate-shaped ceramic body, the resistance heating element 58 blocks the air, and the resistance heating element 58 can prevent corrosion caused by moisture in the air. In addition, the resistance heating element 58 embedded in the plate-shaped ceramic body has its own resistance. When printing under a certain power, Joule heats up to a specified temperature, and the heating plate 57 can be used as a heating element to heat up to the required specified temperature.

于是,因为上述加热面55a由平面部和其周边具备的C面或曲面的倒角部构成,被加热物在加热面55a上滑动时即使被插入也很少有对被加热物造成损伤的危险。如此,被加热物时毛发时,为了不对毛发造成损伤,上述倒角部为C面时其大小优选Wc为0.1~5mm,进而优选0.3~4mm。更优选1~3mm。另外,上述倒角部为曲面时,所谓曲面就是在端面垂直的断面中由圆弧型或2次曲线所形成的区域,其宽Wr为0.2~5mm时因对被加热物造成的损伤小所以优选。进而优选0.3~4mm,更优选1~3mm。Therefore, since the above-mentioned heating surface 55a is composed of a flat surface and a C surface or a chamfered portion of a curved surface provided on its periphery, even if the object to be heated is inserted when sliding on the heating surface 55a, there is little risk of damage to the object to be heated. . Thus, when the object to be heated is hair, in order not to damage the hair, when the above-mentioned chamfered portion is the C surface, the size Wc is preferably 0.1 to 5 mm, more preferably 0.3 to 4 mm. More preferably, it is 1 to 3 mm. In addition, when the above-mentioned chamfer is a curved surface, the so-called curved surface is a region formed by a circular arc or a quadratic curve in a section perpendicular to the end surface. When the width Wr is 0.2 to 5 mm, the damage to the heated object is small. preferred. More preferably, it is 0.3 to 4 mm, and more preferably 1 to 3 mm.

另外,加热板57的厚度H为0.5~5.0mm时,加热板57的热可以高效地传给板状体55。加热板57的厚度不足0.5mm时,板状体55一方主面的平面度就会大到0.02~0.2mm,因此在安装加热板57时施加应力,则有加热板57破损的危险。In addition, when the thickness H of the heating plate 57 is 0.5 to 5.0 mm, the heat of the heating plate 57 can be efficiently transmitted to the plate-shaped body 55 . If the thickness of the heating plate 57 is less than 0.5 mm, the flatness of one main surface of the plate-shaped body 55 will be as large as 0.02 to 0.2 mm. Therefore, when the heating plate 57 is mounted with stress, the heating plate 57 may be damaged.

另外,当加热板57的厚度超过5mm时,即使在板状体55中安装加热板57,加热板57的一方主面57a也不变形,加热板57的一方的主面57a和板状体55的一方的主面55b就不能宽面积接触,因此就不能均匀加热板状体55的加热面55a。In addition, when the thickness of the heating plate 57 exceeds 5mm, even if the heating plate 57 is installed in the plate-shaped body 55, the one main surface 57a of the heating plate 57 is not deformed, and the one main surface 57a of the heating plate 57 and the plate-shaped body 55 Therefore, the heating surface 55a of the plate-shaped body 55 cannot be uniformly heated.

因此,当加热板55厚度为0.5~5mm时,加热板57一方的主面57a和板状体55一方主面55b可以分别变形吻合,所以可以广泛均匀的温度下加热加热面55a。更优选加热板55厚度为1~3mm。Therefore, when the thickness of the heating plate 55 is 0.5-5mm, the main surface 57a of the heating plate 57 and the main surface 55b of the plate-shaped body 55 can be respectively deformed and matched, so the heating surface 55a can be heated at a widely uniform temperature. More preferably, the heating plate 55 has a thickness of 1 to 3 mm.

另外,在板状体55一方的主面55b和加热板57一方主面57a之间优选具备导热部件63。当具有导热部件63时上述表面粗糙度为Ra的加热板57一方主面57a和板状体55一方主面55b之间热传导就变得更容易,加热板57的热可以高效传给板状体55而优选。Moreover, it is preferable to provide the heat conduction member 63 between the one main surface 55b of the plate-shaped body 55, and the one main surface 57a of the heating plate 57. When the heat conduction member 63 is provided, the heat conduction between the one main surface 57a of the heating plate 57 whose surface roughness is Ra and the one main surface 55b of the plate-shaped body 55 becomes easier, and the heat of the heating plate 57 can be efficiently transferred to the plate-shaped body. 55 is preferred.

导热部件63优选为硅系树脂或混合热传导率大的金属微粒粉末的树脂。作为上述金属微粒粉末优选热传动率大的金、银、铜、镍,进而优选银。另外,作为树脂可以采用硅系树脂或氟料树脂。进而,导热部件可以在板状体55一方主面55a和加热板57一方主面57a之间没有间隙的同时,即使因为上述板状体55和加热板57间的热膨胀差而发生伸缩滑动,通过导热部件63使主面55a和主面57a之间的热传导没有变化,可以防止加热面55a的温度差变得过大而优选。The thermally conductive member 63 is preferably made of silicon-based resin or a resin mixed with fine metal particles having high thermal conductivity. Gold, silver, copper, and nickel, which have a high heat transfer rate, are preferable as the metal fine particle powder, and silver is more preferable. In addition, as the resin, silicon-based resin or fluorine-based resin can be used. Furthermore, the heat conduction member can be stretched and slid due to the difference in thermal expansion between the above-mentioned plate-shaped body 55 and the heating plate 57 while there is no gap between the one main surface 55a of the plate-shaped body 55 and the one main surface 57a of the heating plate 57. It is preferable that the heat conduction member 63 keeps the heat conduction between the main surface 55a and the main surface 57a from changing, and can prevent the temperature difference of the heating surface 55a from becoming too large.

另外,本发明的加热装置51优选加热板57一方主面57a的表面粗糙度Ra为1~30。当加热板57一方主面57a的粗糙度Ra不够1.0时,通过与板状体55的接触面很难一致地传导热,因此就会有被加热面55a面内温度差变大的危险。更加优选加热板57一方主面的表面粗糙度Ra为3~10。In addition, in the heating device 51 of the present invention, it is preferable that the surface roughness Ra of the one main surface 57a of the heating plate 57 is 1-30. If the roughness Ra of one main surface 57a of the heating plate 57 is less than 1.0, it is difficult to uniformly conduct heat through the contact surface with the plate-shaped body 55, so there is a danger of increasing the in-plane temperature difference of the heated surface 55a. More preferably, the surface roughness Ra of one main surface of the heating plate 57 is 3-10.

图5、6的加热装置51由板状体55的爪部55c按压加热板57使板状体55和加热板57接触(图7),取代用爪部55c直接按压加热板57,如图8所示用爪部上所固定的弹簧59按压加热板57,可以使板状体55一方的主面55b和加热板57一方的主面57通过弹性按压接触。通过设定多个弹簧59的按压部,可以广泛范围内使加热板57和板状体55接触因而优选。于是,弹簧59优选由具备多个支点的弹簧板构成的部件。The heating device 51 of Fig. 5, 6 presses the heating plate 57 by the claw portion 55c of the plate-shaped body 55 and makes the plate-shaped body 55 contact with the heating plate 57 ( FIG. 7 ), instead of directly pressing the heating plate 57 with the claw portion 55c, as shown in FIG. 8 The heating plate 57 is pressed by the spring 59 fixed to the claw portion, so that the main surface 55b of the plate-like body 55 and the main surface 57 of the heating plate 57 can be elastically pressed into contact. By setting a plurality of pressing portions of the springs 59, it is possible to bring the heating plate 57 and the plate-shaped body 55 into contact in a wide range, and thus it is preferable. Therefore, the spring 59 is preferably a member composed of a spring plate having a plurality of fulcrums.

另外,本发明的板状陶瓷体优选以氧化铝、莫来石或氮化硅的任何一种作为主成分的陶瓷。上述陶瓷优选热传导率比较大的、耐腐蚀性好的、高温条件下绝缘电阻大的陶瓷。In addition, the plate-shaped ceramic body of the present invention is preferably a ceramic mainly composed of any one of alumina, mullite, and silicon nitride. The above-mentioned ceramics are preferably ceramics with relatively high thermal conductivity, good corrosion resistance, and high insulation resistance under high temperature conditions.

另外,板状陶瓷体为氧化铝时,该氧化铝含有量优选80~98质量%。因为这样的部件可以达到上述板状陶瓷体热传导率为16.7~25.21W/(m.K)、300℃高温条件下绝缘电阻在1013Ω.cm以上、弯曲强度在300MPa以上。当氧化铝含有量不到90质量%时,增大了Mn、Ca、Si等烧结辅助剂或杂质,因此就会有高温条件下绝缘电阻降低的危险。In addition, when the plate-shaped ceramic body is alumina, the alumina content is preferably 80 to 98% by mass. Because such a component can achieve the thermal conductivity of the plate-shaped ceramic body of 16.7-25.21W/(mK), the insulation resistance above 10 13 Ω.cm under the high temperature condition of 300°C, and the bending strength above 300MPa. When the alumina content is less than 90% by mass, sintering aids or impurities such as Mn, Ca, and Si are increased, and therefore there is a risk of lowering insulation resistance under high temperature conditions.

另外,当氧化铝含量超过99.5质量%时,烧结辅助剂少,在1700℃以下的比较低温的情况时使其致密烧结就变得困难,因此低价大量生产也就困难了。In addition, when the alumina content exceeds 99.5% by mass, there is less sintering aid, and dense sintering becomes difficult at a relatively low temperature of 1700°C or lower, making low-cost mass production difficult.

另外,本发明的板状体5优选为导电性的金属。金属热传导率达到200W/(m.K)以上,因此能够把加热板7的热均匀地传给加热面55a。作为上述金属优选铝、铁或这些的合金。优选由金属构成板状体5的膨胀系数为8~25×10-6/℃以下,特别优选板状陶瓷体57的热膨胀系数的范围接近8~17×10-6/℃。因板状体55和加热板57有热膨胀差,主面57a和主面55b的间隔就变得不均匀,热传导就变得不能均匀进行,因此就有温度分布均匀性受到损害的危险。进而,尽管被加热物与加热面55a接触从加热面55a向被加热物传导热,但是这时因为被加热物与加热面55a接触同时发生滑动,在加热面55a就有发生静电的危险,当加热面55a上具有导电性时,就具有使这些静电释放的效果而优选。In addition, the plate-shaped body 5 of the present invention is preferably a conductive metal. The thermal conductivity of the metal reaches more than 200W/(mK), so the heat of the heating plate 7 can be evenly transmitted to the heating surface 55a. Aluminum, iron, or an alloy thereof is preferable as the above-mentioned metal. The thermal expansion coefficient of the plate-shaped body 5 made of metal is preferably 8 to 25×10 -6 /°C or less, and the thermal expansion coefficient of the plate-shaped ceramic body 57 is particularly preferably in the range of 8 to 17×10 -6 /°C. Due to the difference in thermal expansion between the plate body 55 and the heating plate 57, the distance between the main surface 57a and the main surface 55b becomes uneven, and the heat conduction becomes uneven, so there is a risk that the uniformity of temperature distribution may be impaired. Furthermore, although the object to be heated is in contact with the heating surface 55a and conducts heat from the heating surface 55a to the object to be heated, at this time, because the object to be heated is in contact with the heating surface 55a and slides simultaneously, there is a danger of static electricity on the heating surface 55a. When the heating surface 55a has conductivity, it is preferable because it has the effect of discharging these static electricity.

另外,板状体55和加热板57接触的接触面的面积为加热面55a面积的20~80%。当不足20%时有不能均匀加热板状体55的加热面55a的危险。另外,当板状体55和加热板57接触的接触面的面积超过加热面55a面积80%时,加热板57变大加热装置51的价格变高,就有在工业上很难利用的危险。进而优选接触面的面积为加热面55a面积的30~60%。In addition, the area of the contact surface of the plate-shaped body 55 and the heating plate 57 is 20 to 80% of the area of the heating surface 55a. When it is less than 20%, there is a possibility that the heating surface 55a of the plate-shaped body 55 cannot be uniformly heated. In addition, when the area of the contact surface between the plate-shaped body 55 and the heating plate 57 exceeds 80% of the area of the heating surface 55a, the heating plate 57 becomes larger and the price of the heating device 51 increases, which may be difficult to use industrially. More preferably, the area of the contact surface is 30 to 60% of the area of the heating surface 55a.

另外,板状体55厚度B优选为0.2~10mm。该厚度小于0.2mm时,在用弹簧板固定加热板57时强度小,板状体55变形产间隙,发生仅一边接触等不合格情况,因此具有加热面55a面内的温度差变大的危险。另外,当板状体55厚度超过10mm时热容量变大即使加热加热板57也有板状体55的加热面55a的温度不能快速升温的危险。厚度B更优选1~3mm。In addition, the thickness B of the plate-shaped body 55 is preferably 0.2 to 10 mm. When the thickness is less than 0.2 mm, when the heating plate 57 is fixed by a spring plate, the strength is small, and the plate-shaped body 55 is deformed to produce a gap, and only one side of the contact occurs. Therefore, there is a danger that the temperature difference in the heating surface 55a becomes large. . In addition, when the thickness of the plate-shaped body 55 exceeds 10 mm, the heat capacity becomes large. Even if the heating plate 57 is heated, the temperature of the heating surface 55 a of the plate-shaped body 55 may not be able to rapidly rise in temperature. The thickness B is more preferably 1 to 3 mm.

另外,所谓的加热板57的厚度可以用主面55b和主面55a之间距离中3点的平均值来表示。In addition, the so-called thickness of the heating plate 57 can be represented by an average value of three points in the distance between the main surface 55b and the main surface 55a.

如此板状体55优选由热传导率200W/(m.K)以上的金属构成的部件,为了与加热板57面接触其周边具备爪部55c,优选增加周边部的厚度,增加热容量,减小加热面温度差的部件。In this way, the plate-shaped body 55 is preferably a member made of metal with a thermal conductivity of 200W/(m.K), and its periphery is equipped with a claw portion 55c in order to contact the heating plate 57. It is preferable to increase the thickness of the peripheral portion, increase the heat capacity, and reduce the heating surface temperature. poor parts.

接下来说明本发明加热装置51的制作方法和其他构成。Next, the manufacturing method and other configurations of the heating device 51 of the present invention will be described.

加热板57由氧化铝烧结体或莫来石烧结体、氮化硅系烧结体等耐热性陶瓷构成,例如,当由氧化铝烧结体构成时,氧化铝(Al2O3)、二氧化硅(SiO2)、氧化钙(CaO)、氧化镁(MgO)等中适当添加混合有机溶剂和溶剂,成为料浆(slurry)状,同时用以往周知的修缮编织法(doctor braid)或压延机法(calender roll)形成片状得到陶瓷生片。然后对上述陶瓷生片进行适当的打孔加工。The heating plate 57 is made of heat-resistant ceramics such as alumina sintered body, mullite sintered body, and silicon nitride-based sintered body. For example, when made of alumina sintered body, alumina (Al 2 O 3 ), Silicon (SiO 2 ), calcium oxide (CaO), magnesium oxide (MgO), etc. are appropriately added and mixed with organic solvents and solvents to form a slurry, and at the same time, use a conventionally known doctor braid or calender The method (calender roll) forms a sheet to obtain a ceramic green sheet. Then, an appropriate punching process is performed on the above-mentioned ceramic green sheet.

电阻发热体58由钨、钼等金属材料构成,该钨等金属粉末中适当地添加混合有机溶剂和溶剂所得的电阻发热体糊,在预先形成板状陶瓷体的陶瓷生片上通过以往周知的网板印刷法按规定图案进行印刷涂布,在板状陶瓷体内部可以埋设电阻发热体8。于是,埋设有电阻发热体58的生料加热板经过高温(约1600℃)进行烧成可以制作出加热板57。此时为了得到上述表面粗糙度,优选调整烧成温度或时间尽量使加热板57表面结晶尺寸为0.5~5μm。The resistance heating element 58 is made of metal materials such as tungsten and molybdenum. The resistance heating element paste obtained by appropriately adding and mixing an organic solvent and a solvent to the metal powder such as tungsten is passed through a conventionally known mesh on a ceramic green sheet formed with a plate-shaped ceramic body in advance. The plate printing method performs printing and coating in a predetermined pattern, and the resistance heating element 8 can be embedded in the plate-shaped ceramic body. Then, the heating plate 57 can be produced by firing the raw material heating plate embedded with the resistance heating element 58 at a high temperature (about 1600° C.). At this time, in order to obtain the above-mentioned surface roughness, it is preferable to adjust the firing temperature and time so that the crystal size on the surface of the heating plate 57 becomes 0.5 to 5 μm as much as possible.

电阻发热体58两端在加热板57的端部被导出,该端部导出的两端通过板状体57上设置的开口A露出出来,利用焊锡等钎焊料钎焊接合引线61。使电阻发热体58两端露出的开口A具有形成电阻发热体58和引线61钎焊接合区域的作用,在预先成为板状陶瓷体的陶瓷生片上通过打孔加工法进行打孔在加热板57端部形成。上述开口A进一步在该侧壁对应引线61的孔径大小形成凹部62,当在开口A上钎焊接合电阻发热体58和引线61时,如果开口A侧壁所形成的凹部62内能够插入引线61,在露出电阻发热体58上面中央部上就可以正确接合位置,如此就可以在电阻发热体58上通过钎焊料极其牢固地钎焊接合引线61。Both ends of the resistance heating element 58 are led out from the end of the heating plate 57, and the two ends of the end are exposed through the opening A provided in the plate-shaped body 57, and the bonding wire 61 is brazed with a brazing material such as solder. The opening A that exposes the two ends of the resistance heating element 58 has the function of forming the brazing joint area between the resistance heating element 58 and the lead wire 61. The ceramic green sheet that has previously become a plate-shaped ceramic body is punched on the heating plate 57 by a punching method. end formed. The above-mentioned opening A further forms a recess 62 on the side wall corresponding to the aperture size of the lead wire 61. When the resistance heating element 58 and the lead wire 61 are soldered on the opening A, if the lead wire 61 can be inserted in the recess 62 formed on the side wall of the opening A , Exposing the upper central portion of the resistance heating element 58 just can correctly join the position, so just can be on the resistance heating element 58 by soldering the bonding wire 61 very firmly by brazing material.

另外,在上述开口A上电阻发热体58上钎焊接合的引线61由镍等金属构成,该引线61使电阻发热体58与外部电回路连接,同时通过外部电回路也起到供给电阻发热体58产生规定温度焦耳热所必要的一定电力的作用。In addition, the lead wire 61 brazed on the resistance heating element 58 on the above-mentioned opening A is made of metal such as nickel. 58 The effect of a certain amount of electricity necessary to produce Joule heat at a specified temperature.

引线61利用在露出电阻发热体58的上面中央部中在开口A侧壁设置的凹部62,进行准确焊接,同时在该焊接部通过供给溶融的焊锡等钎焊料61牢固地钎焊在电阻发热体58上。The lead wire 61 utilizes the concave portion 62 provided on the side wall of the opening A in the upper central portion of the exposed resistance heating element 58 to carry out accurate welding, and at the same time, the welding portion is firmly brazed to the resistance heating element by supplying a brazing material 61 such as molten solder. Body 58 on.

因此,本发明的加热装置51利用引线61供给电阻发热体58一定电力,使电阻发热体58发出达到一定温度的焦耳热,发挥作为发热体的机能。Therefore, the heating device 51 of the present invention uses the lead wire 61 to supply a certain power to the resistance heating element 58, so that the resistance heating element 58 emits Joule heat at a certain temperature and functions as a heating element.

另外,上述发明不仅限定于上述实施例,在没有脱离本发明的要旨的范围内,可以进行多种变更,例如在上述实施方式2上露出的电阻发热体58,利用焊锡等钎焊料接合引线61,在开口A内通过填充树脂或玻璃等增强该接合,也可以通过在开口A内充填耐热性材料的同时用绝缘板覆盖开口来增强接合。此时,电阻发热体58和引线61之间的接合变得更牢固,可优选。另外,尽管上述实施例中利用焊锡等钎焊料在电阻发热体58上接合引线61,但使引线61焊接在电阻发热体58上同时也可以通过在开口A内充填树脂或玻璃等为此接合该焊接。In addition, the above-mentioned invention is not limited to the above-mentioned embodiment, and various changes can be made without departing from the gist of the present invention. 61. Fill the opening A with resin or glass to strengthen the joint, or fill the opening A with a heat-resistant material while covering the opening with an insulating plate to strengthen the joint. In this case, the bonding between the resistance heating element 58 and the lead wire 61 becomes stronger, which is preferable. In addition, although the lead wire 61 is bonded to the resistance heating element 58 by using brazing material such as solder in the above-mentioned embodiment, the lead wire 61 can also be bonded by filling the opening A with resin or glass or the like while soldering the lead wire 61 on the resistance heating element 58. The soldering.

使上述加热装置51经由硅润滑油与金属制的板状体55接触,此时在板状体55、和也作为陶瓷加热板57的导热部件63的缓冲材的厚度优选5~100μm。为了连接烫发器用的陶瓷加热板57和板状体57,当使陶瓷加热板57和金属加热板57直接接触时,瓷器陶瓷加热板57和金属板状体55之间发生翘曲或因加热时热膨胀导致变形,不能均匀地接触接合面而形成一边接触,发生点式热传导,具有加热面55a的温度差变大的危险。具有导热部件63的缓冲材的厚度最好为必要的最小限度,相反过厚就会发生陶瓷加热器和金属板热传导恶化问题的危险,导热部件63的厚度优选1~100μm。The heating device 51 is brought into contact with the metal plate body 55 through silicon lubricating oil. At this time, the thickness of the buffer material between the plate body 55 and the heat conduction member 63 also serving as the ceramic heating plate 57 is preferably 5 to 100 μm. In order to connect the ceramic heating plate 57 and the plate-shaped body 57 used for the hair iron, when the ceramic heating plate 57 and the metal heating plate 57 are directly contacted, warping occurs between the porcelain ceramic heating plate 57 and the metal plate-shaped body 55 or due to heating. The thermal expansion causes deformation, and the joint surfaces cannot be uniformly contacted to form one-sided contact, and point heat conduction occurs, which may increase the temperature difference of the heating surface 55a. The thickness of the buffer material with the heat conduction member 63 is preferably the minimum necessary. On the contrary, if it is too thick, the heat conduction problem of the ceramic heater and the metal plate may deteriorate. The thickness of the heat conduction member 63 is preferably 1 to 100 μm.

在以上实施方式2的烫发器中,加热板57具备构成实施方式1中说明的发热电阻体4折返部的导体图案,该折返部中邻接的任意导体间的陶瓷体的空孔占有率优选为0.01~50%(例如,采用由如实施方式1图4所示的板状陶瓷加热器构成的加热板)。这样的话,因为加热板57的耐久性能够提高,可以提供更高耐久性的烫发器。并且,该折返部的邻接的任意导体间的陶瓷体的空孔占有率进一步优选0.1~40%,更优选1~20%。In the hair iron according to Embodiment 2 above, the heating plate 57 is provided with a conductor pattern constituting the folded portion of the heating resistor 4 described in Embodiment 1, and the pore occupancy ratio of the ceramic body between any adjacent conductors in the folded portion is preferably: 0.01 to 50% (for example, a heating plate composed of a plate-shaped ceramic heater as shown in FIG. 4 of Embodiment 1 is used). In this case, since the durability of the heating plate 57 can be improved, a more durable hair iron can be provided. Furthermore, the pore occupancy rate of the ceramic body between any adjacent conductors in the folded portion is more preferably 0.1 to 40%, and more preferably 1 to 20%.

实施例1Example 1

准备以Al2O3为主成分尽量调整SiO2、CaO、MgO、ZrO2合计在10重量%以内的陶瓷生片,采用由W(钨)粉末粘合剂和溶剂构成的糊,在该表面上印刷发热电阻体4和引线引出部5。Prepare a ceramic green sheet with Al 2 O 3 as the main component and adjust the total of SiO 2 , CaO, MgO, and ZrO 2 within 10% by weight as much as possible, and use a paste composed of W (tungsten) powder binder and solvent to coat the surface The heating resistor 4 and the lead-out part 5 are printed on the top.

另外,在背面印刷电极极板7。发热电阻体4的形状是以5mm的发热长度进行4次往复的图案。In addition, electrode pads 7 are printed on the back surface. The shape of the heating resistor 4 is a pattern that reciprocates four times with a heating length of 5 mm.

接着,为了在导体间填充绝缘物,将含有绝缘物的糊进行网板印刷。此时,为了使导体间陶瓷体空孔的占有率变化,预备了没有实施网板印刷的物质和对糊粘度进行变化而进行网板印刷的物质。Next, in order to fill the space between the conductors with the insulator, the paste containing the insulator is screen-printed. At this time, in order to change the occupancy rate of the pores in the ceramic body between conductors, a material without screen printing and a material in which the paste viscosity was changed and screen printed were prepared.

接着,在由W构成的引线引出部5的末端,形成通孔6,并向这里通过注入糊,使电极极板7和引线引出部5之间得到导通。通孔6的位置以当实施钎焊接合时进入钎焊接合部的内侧的方式形成。Next, at the end of the lead-out portion 5 made of W, a through-hole 6 is formed, and paste is injected thereinto to establish conduction between the electrode pad 7 and the lead-out portion 5 . The position of the through hole 6 is formed so as to enter the inner side of the solder joint when performing the solder joint.

接着,在陶瓷成形体的周围密接准备的陶瓷生片,通过1600℃烧成形成陶瓷加热器1。Next, the prepared ceramic green sheet was adhered to the periphery of the ceramic molded body, and fired at 1600° C. to form the ceramic heater 1 .

对于这样得到的陶瓷加热器1,在1200℃下连续通电100小时后测定电阻变化,评价耐久性。以各组(lot)n=10进行评价。The ceramic heater 1 thus obtained was subjected to continuous energization at 1200° C. for 100 hours to measure the resistance change and evaluate the durability. Evaluation was performed with each group (lot) n=10.

另外,关于各组n=3的试样,SEM观察烧成后的发热电阻体4,测定空孔率。该结果如表1所示。In addition, regarding samples with n=3 in each group, the heating resistor 4 after firing was observed by SEM, and the porosity was measured. The results are shown in Table 1.

(表1)   试样No   空孔率   空孔长度   加热器形状   图案厚度   评价结果   评定  *1   0.005   1/10   圆柱   10   16   ×   2   0.01   1/10   圆柱   20   13   ○   3   0.1   1/10   圆柱   20   10   ○   4   1   1/10   圆柱   20   8   ◎   5   10   1/10   圆柱   20   6   ◎   6   20   1/10   圆柱   20   7   ◎   7   40   1/10   圆柱   20   11   ○   8   50   1/10   圆柱   20   14   ○  *9   60   1/10   圆柱   20   17   ×   10   10   3/10   圆柱   20   11   ○   11   10   1/2   圆柱   20   13   ○   12   10   1/10   板状   20   8   ◎   13   10   1/10   圆柱   3   14   ○   14   10   1/10   圆柱   5   10   ○   15   10   1/10   圆柱   70   11   ○   16   50   1/10   圆柱   110   14   ○ (Table 1) Sample No. porosity Hole length heater shape pattern thickness Evaluation results assessment * 1 0.005 1/10 cylinder 10 16 x 2 0.01 1/10 cylinder 20 13 3 0.1 1/10 cylinder 20 10 4 1 1/10 cylinder 20 8 5 10 1/10 cylinder 20 6 6 20 1/10 cylinder 20 7 7 40 1/10 cylinder 20 11 8 50 1/10 cylinder 20 14 * 9 60 1/10 cylinder 20 17 x 10 10 3/10 cylinder 20 11 11 10 1/2 cylinder 20 13 12 10 1/10 Plate 20 8 13 10 1/10 cylinder 3 14 14 10 1/10 cylinder 5 10 15 10 1/10 cylinder 70 11 16 50 1/10 cylinder 110 14

各试样材质均为氧化铝,标印有*记号的试样是本发明范围之外的试样。The material of each sample is alumina, and the samples marked with * are samples outside the scope of the present invention.

根据表1判断,在导体间陶瓷体空孔占有率超过50%的试样No9中,和在空孔占有率0.005%的试样No1中,电阻值变化15%以上,发生断线。与之相对应的,空孔占有率在50%以下的试样没有发生断线,表示具有良好的耐久性。As judged from Table 1, in sample No. 9 having a void occupancy of more than 50% in the ceramic body between conductors and in sample No. 1 having a void occupancy of 0.005%, the resistance value changed by 15% or more, and disconnection occurred. On the other hand, the samples with a void occupancy rate of 50% or less did not have disconnection, indicating good durability.

此外,只要空孔占有率处于本发明范围,其他要素比如空孔长度、墨厚度变化,对耐久性能没有意义。In addition, as long as the pore occupancy ratio is within the range of the present invention, other factors such as pore length and ink thickness variation have no significance on durability performance.

实施例2Example 2

首先,为了获得如图9所示的陶瓷加热板,在以Al2O3为主成分尽量调整SiO2、Cao、MgO、ZrO2合计在10重量%以内的陶瓷生片上,印刷由W构成的电阻发热体。使电阻发热体两端露出的开口A具有形成钎焊接合电阻发热体和引线的区域的作用,其通过预先在形成加热板的陶瓷生片上应用打孔加工法打孔,而在加热板端部形成。上述开口A进一步在该侧壁对应引线61的孔径大小形成凹部,用于在开口A进行钎焊接合电阻发热体的引出部和引线。然后,在电阻发热体表面形成由陶瓷片和大致相同成分构成的包覆层,充分干燥后进而使上述陶瓷片和大致相同组成的陶瓷分散,涂布密接液,这样层叠密接准备的陶瓷片,在1500~1600℃下烧成。First, in order to obtain a ceramic heating plate as shown in FIG. 9 , on a ceramic green sheet whose main component is Al 2 O 3 , the total of SiO 2 , Cao, MgO, and ZrO 2 is adjusted as much as possible within 10% by weight. Resistance heating element. The opening A that exposes both ends of the resistance heating element has the function of forming a region where the resistance heating element and the lead wire are brazed, and it is punched by applying a punching method to the ceramic green sheet forming the heating plate in advance, and the end of the heating plate is drilled. form. The above-mentioned opening A further forms a concave portion corresponding to the diameter of the lead wire 61 on the side wall, which is used to solder the lead-out portion of the resistance heating element and the lead wire at the opening A. Then, on the surface of the resistance heating element, a coating layer composed of a ceramic sheet and approximately the same composition is formed, and after being sufficiently dried, the above-mentioned ceramic sheet and a ceramic of approximately the same composition are dispersed, and an adhesive liquid is applied to laminate the prepared ceramic sheet, Firing at 1500-1600°C.

进而,在上述电阻发热体的引出部表面形成由Ni构成的厚度为3μm的镀层后,采用由Ag构成的钎焊料62,在还原气氛中,1030℃下接合以Ni为主成分的引线61得到加热板。Furthermore, after forming a plating layer made of Ni with a thickness of 3 μm on the surface of the lead-out part of the above-mentioned resistance heating element, a lead wire 61 mainly composed of Ni was bonded at 1030° C. in a reducing atmosphere using brazing material 62 made of Ag. Get a hot plate.

组合利用上述方法获得的加热板和板状体,制作出对加热板的厚度、表面粗糙度(Ra)、有无弹簧按压、有无导热部件或材质进行变更的烫发器。Combining the heating plate obtained by the above method and the plate-shaped body, a hair iron with changes in the thickness, surface roughness (Ra), presence or absence of spring pressing, presence or absence of a heat-conducting member, or material of the heating plate was manufactured.

接着,制作的烫发器加热面表面的温度分布通过日本电子制(TG-6200)温度分布测定装置测定温度分布,算出加热面表面的最高温度和最低温度,将最高温度和最低温度的差作为温度不稳定度进行测定。Next, the temperature distribution on the surface of the heating surface of the manufactured hair iron was measured with a temperature distribution measuring device (TG-6200) made by JEOL Ltd., the maximum temperature and the minimum temperature on the surface of the heating surface were calculated, and the difference between the maximum temperature and the minimum temperature was taken as the temperature Instability was measured.

该结果如表2所示。The results are shown in Table 2.

表2 试料No 加热板厚度(mm) 导热部件   加热板表面粗糙度(Ra) 按压弹簧   加热面温度不稳定度(℃)   *1   0.3   无   1   无   破损   *2   0.3   无   10   无   破损   3   0.5   无   2   无   19   4   0.5   无   2   无   19   5   0.5   硅系树脂   0.5   无   16   6   0.5   硅系树脂   1   无   15   7   0.5   硅系树脂   3   有   13   8   1   硅系树脂   6   有   12   9   1   硅系树脂   10   有   13   10   1   硅系树脂   20   无   14   11   1   硅系树脂   30   无   14   12   3   硅系树脂   40   无   16   13   5   金属微粒   3   无   11   14   5   无   3   无   19   15   5   无   3   无   19   *16   7   无   1   无   22   *17   7   无   10   无   24 Table 2 Sample No. Heating plate thickness (mm) Thermal components Surface roughness of heating plate (Ra) pressing spring Heating surface temperature instability (℃) *1 0.3 none 1 none damaged *2 0.3 none 10 none damaged 3 0.5 none 2 none 19 4 0.5 none 2 none 19 5 0.5 Silicone resin 0.5 none 16 6 0.5 Silicone resin 1 none 15 7 0.5 Silicone resin 3 have 13 8 1 Silicone resin 6 have 12 9 1 Silicone resin 10 have 13 10 1 Silicone resin 20 none 14 11 1 Silicone resin 30 none 14 12 3 Silicone resin 40 none 16 13 5 metal particles 3 none 11 14 5 none 3 none 19 15 5 none 3 none 19 *16 7 none 1 none twenty two *17 7 none 10 none twenty four

以板状体厚度1.5mm、板状体·加热板接触面积和加热面面积比率70%进行评价。The evaluation was performed with a plate-shaped body having a thickness of 1.5 mm and a ratio of the plate-shaped body/heating plate contact area to the heating surface area of 70%.

另外,印有*标记的为本发明范围之外的试料。In addition, those marked with * are samples outside the scope of the present invention.

根据表2分析,如试料No.3~15加热板的厚度为0.5~5mm的试料加热面温度不稳定度为19℃以下,显示优良的特性。According to the analysis in Table 2, for example, the temperature instability of the heating surface of samples No. 3 to 15 with heating plates whose thickness is 0.5 to 5 mm is below 19°C, showing excellent characteristics.

与此相对的,试料No.1、2加热板的厚度薄到0.3mm时,在板状体上装置加热板时,加热板出现破损。另外,如试料No.16、17加热板厚度为7mm的试料,加热面温度不稳定度大到22℃以上,而不优选。On the other hand, when the thickness of the heating plate of sample No. 1 and 2 was as thin as 0.3 mm, the heating plate was damaged when the heating plate was mounted on the plate-shaped body. In addition, for samples No. 16 and 17, where the heating plate thickness is 7mm, the temperature instability of the heating surface is as large as 22°C or more, which is not preferable.

另外,板状体和加热板之间具备导热部件的试料No.5~13,加热面温度不稳定度在16℃以下,甚至更小的温度不稳定度的试料而优选。In addition, samples Nos. 5 to 13 with heat conduction members between the plate-shaped body and the heating plate are preferable, and the temperature instability of the heating surface is below 16°C, or even smaller.

另外,加热板主面表面的粗糙度为1~30μm的试料No.6~11,加热面温度不稳定度在小到15℃以下,而进一步优选。In addition, sample Nos. 6 to 11 in which the surface roughness of the main surface of the heating plate is 1 to 30 μm are more preferable because the temperature instability of the heating surface is as small as 15° C. or less.

另外,用弹簧按压板状体一方主面和加热板一方主面的试料No.7~9,加热面温度不稳定度成为13℃以下,判明温度不稳定度被改善。In addition, in Sample Nos. 7 to 9 in which one main surface of the plate-shaped body and one main surface of the heating plate were pressed by a spring, the temperature instability of the heating surface was 13° C. or lower, and it was found that the temperature instability was improved.

实施例3Example 3

接着,将作为加热板的主成分Al2O3的含有量调整在70%~99.8%之间,作成陶瓷片,把这些陶瓷片按照实施例2所述方法制作加热板。对于这些Al2O3组成量不同的材料,测定200℃下高温绝缘强度和弯曲强度。制作20张试验片以JIS规格的4点弯曲强度试验为标准测定弯曲强度,该平均值如下所示。Next, adjust the content of Al 2 O 3 as the main component of the heating plate between 70% and 99.8% to make ceramic sheets, and use these ceramic sheets to make a heating plate according to the method described in Example 2. The high-temperature dielectric strength and flexural strength at 200°C were measured for these materials having different Al 2 O 3 compositions. 20 test pieces were produced, and the flexural strength was measured based on the 4-point flexural strength test of JIS standard, and the average value is shown below.

(表3)   试料No   氧化铝含有率(%)   高温绝缘电阻   强度   21   70   1010Ω.cm以上   250Mpa   22   75   1011Ω.cm以上   275MPa   23   80   1013Ω.cm以上   300MPa   24   90   1013Ω.cm以上   310MPa   25   99.5   1013Ω.cm以上   320MPa   26   99.8   1013Ω.cm以上   328MPa (table 3) Sample No. Alumina content (%) High temperature insulation resistance strength twenty one 70 10 10 Ω.cm or more 250Mpa twenty two 75 10 11 Ω.cm or more 275MPa twenty three 80 10 13 Ω.cm or more 300MPa twenty four 90 10 13 Ω.cm or more 310MPa 25 99.5 10 13 Ω.cm or more 320MPa 26 99.8 10 13 Ω.cm or more 328MPa

根据表3分析,氧化铝含有量为80~99.5%的试料No.23~25高温绝缘电阻达到1×1013Ω.cm以上,即使作为烫发器使用,也不会从加热器电源漏电,因此优选。另外,弯曲强度大到300MPa以上,即使反复急速加热电阻发热体,很少有因热应力而破损的危险,因而优选。According to the analysis in Table 3, the high-temperature insulation resistance of samples No. 23 to 25 with an alumina content of 80 to 99.5% can reach 1×10 13 Ω.cm or more, and even if used as a hair iron, there will be no leakage from the heater power supply. Therefore preferred. In addition, if the bending strength is as high as 300 MPa or more, even if the resistance heating element is heated repeatedly and rapidly, there is little risk of damage due to thermal stress, which is preferable.

但是,如试料No.21、22,当氧化铝含有量小到70、75质量%时,高温条件下绝缘电阻小到1011Ω.cm以下,利用加热板就有发生漏电的危险。另外,试料No.26氧化铝含有量高达99.8质量%,需要在1700℃以上烧成温度下烧结,低价大量生产就很困难了。However, for samples No. 21 and 22, when the alumina content is as small as 70 or 75% by mass, the insulation resistance is as small as 10 11 Ω.cm or less under high temperature conditions, and there is a danger of electric leakage when using a heating plate. In addition, the alumina content of sample No. 26 is as high as 99.8% by mass, and it needs to be sintered at a firing temperature above 1700°C, making it difficult to mass-produce at low cost.

更进一步优选,如试料No.24、25氧化铝含有量为90~99.5%时,弯曲强度大而优选。Even more preferably, when the alumina content of sample No. 24 and 25 is 90 to 99.5%, the flexural strength is large, which is preferable.

其中,氧化铝含有量通过ICO定量分析制作的板状陶瓷体求得的。Among them, the alumina content was determined by ICO quantitative analysis of the produced plate-shaped ceramic body.

实施例4Example 4

然后,板状体的外形按照4mm×80mm×20mm(厚×长×宽)固定,逐渐变更加热板的长度,和实施例2同样制作变更接触面积及加热面积比率的烫发器。Then, the profile of the plate-shaped body is fixed according to 4mm * 80mm * 20mm (thickness * length * width), and the length of the heating plate is gradually changed, and the hair iron that changes the contact area and the heating area ratio is made in the same manner as in Example 2.

接着,在加热板和板状体之间具备硅系树脂作为导热部件,在弹簧按压下,对电阻发热体施加额定电压,测定从室温到加热面最高温度为200℃的饱和温度为止的时间作为加热面饱和时间。Next, a silicon-based resin is provided as a heat-conducting member between the heating plate and the plate-shaped body, and a rated voltage is applied to the resistance heating element under spring pressure, and the time from room temperature to the saturation temperature at which the maximum temperature of the heating surface is 200° C. is measured as Heating surface saturation time.

其结果如表4所示。The results are shown in Table 4.

(表4) 试料No  (板状体·加热板接触面积/加热面积)比率% 板状体厚度(mm)   加热面饱和时间(sec)   31  5   2   68   32  10   2   63   33  20   3   60   34  30   3   57   35  50   0.1   56   36  50   0.2   50   37  50   1   46   38  50   4   46   39  50   10   47   40  50   12   52   41  60   3   53   42  80   4   60   43  100   4   65 (Table 4) Sample No. (plate-shaped object/heating plate contact area/heating area) ratio% Plate Thickness (mm) Heating surface saturation time (sec) 31 5 2 68 32 10 2 63 33 20 3 60 34 30 3 57 35 50 0.1 56 36 50 0.2 50 37 50 1 46 38 50 4 46 39 50 10 47 40 50 12 52 41 60 3 53 42 80 4 60 43 100 4 65

根据表4可知,面积比例为20~80%的试料No.33~42加热面饱和时间小到60秒以下,显示出优良的特性。It can be seen from Table 4 that the sample Nos. 33 to 42 with an area ratio of 20 to 80% showed excellent characteristics with a heating surface saturation time as short as 60 seconds or less.

另外,面积比率为30~60%的试料No.34~41加热面饱和时间小到57秒以下,显示更加优良的特性。In addition, the sample Nos. 34 to 41 with an area ratio of 30 to 60% had a heating surface saturation time as small as 57 seconds or less, showing more excellent characteristics.

另一方面,加热板7和板状体5的接触面积和加热面接触面积比率不到20%的试料No.31、32饱和时间大到63秒以上,而不优选。On the other hand, sample Nos. 31 and 32 in which the ratio of the contact area between the heating plate 7 and the plate-shaped body 5 to the heating surface contact area was less than 20% had a saturation time of 63 seconds or more, which was not preferable.

另外,如试料No.43接触面积超过80%时,加热板变得过大,加热板的成本就变高,产业利用价值就降低。In addition, when the contact area of sample No. 43 exceeds 80%, the heating plate becomes too large, the cost of the heating plate becomes high, and the industrial utility value decreases.

更进一步优选板状体厚度为0.2~10mm的试料No.36~39,这是因为它们加热饱和时间小到50秒以下。Sample Nos. 36 to 39 having a plate-like body thickness of 0.2 to 10 mm are still more preferable because their heating saturation time is as small as 50 seconds or less.

Claims (20)

1. ceramic heater is characterized in that:
Comprise ceramic body, the conductive pattern that this ceramic body has outer surface and buried underground,
Described conductive pattern is made of conductor, and described conductor is set up according to the mode that formation becomes the return portion of resistance heater, and the emptying aperture occupation rate by the folded ceramic part of the conductor of adjacency in described return portion is 0.01~50%.
2. ceramic heater as claimed in claim 1, wherein:
The length along described outer surface of the emptying aperture that exists between described contiguous conductor is, below 1/2 length of this conductor separation.
3. ceramic heater as claimed in claim 1 or 2, wherein:
The thickness setting of described conductor is at 5~100 mu m ranges.
4. the manufacture method of a ceramic heater, it comprises:
Form the operation of conductor paste by the pattern of regulation on the first ceramic green sheet surface;
With on the face of the formation conductor paste of this first ceramic green sheet, have at least and same thickness of this conductive pattern and second ceramic green sheet more soft, the operation of making the ceramic green sheet duplexer than described first ceramic green sheet by lamination;
Operation with this ceramic green sheet duplexer of bonding on ceramic formation body;
With the ceramic green sheet duplexer that burns till this bonding and the operation of ceramic formation body.
5. the manufacture method of a ceramic heater, it comprises:
Pattern in accordance with regulations forms the operation of conductor paste on the surface of ceramic green sheet;
And fill the operation of insulant between the conductor paste in described predetermined pattern;
And will between this conductor paste, fill the ceramic green sheet of insulant, the face that has formed described conductor paste is bonded in operation on the ceramic formation body as adhesive surface;
With the operation of burning till this bonding ceramic green sheet and ceramic formation body.
6. the manufacture method of ceramic heater as claimed in claim 5 is characterized in that:
The operation of filling described insulant is stuck with paste by screen printing and is carried out.
7. the manufacture method of ceramic heater as claimed in claim 5 is characterized in that:
Filling the operation of described insulant utilizes distributor to carry out.
8. heater is characterized in that possessing:
Heating plate, it is made of the tabular ceramic body of being buried underground resistance heater, has the thickness of 0.5~5.0mm scope; With
Plate body, it has the 1st and the 2nd, at described the 1st described heating plate is set, with described the 2nd as heating surface, this heating surface is made of planar portions and its peripheral chamfered section.
9. heater as claimed in claim 8, wherein:
Between the 1st of described plate body and described heating plate, possesses conducting-heat elements.
10. heater as claimed in claim 9, wherein:
Described conducting-heat elements is to contain the resin that silicon is resin or metal particle.
11. as each described heater in the claim 8~10, wherein:
The surface roughness Ra with described the 1st relative face of described heating plate is 1~30 mu m range.
12. as each described heater in the claim 8~11, wherein:
Has the mechanism of pushing described plate body and described heater.
13. as each described heater in the claim 8~12, wherein:
Described tabular ceramic body with in the middle of aluminium oxide, mullite or the silicon nitride any one as principal component.
14. heater as claimed in claim 13, wherein:
As principal component, the aluminium oxide amount is 80~99.5 quality % to described tabular ceramic body with aluminium oxide.
15. as each described heater in the claim 8~14, wherein:
Described plate body is made of metal.
16. as each described heater in the claim 8~15, wherein:
The area of described plate body and the contacted contact portion of described heating plate be described heating surface area 20~80%.
17. as each described heater in the claim 8~16, wherein:
The thickness of described plate body is 0.2~10.0mm.
18. as each described heater in claim 1~3 and the claim 8~17, wherein:
With hair as heating object.
19. a hair iron, it possesses in the claim 1~3 each described heater in each described ceramic heater or the claim 8~17.
20. a hair iron, it possesses a pair of parts of controlling that switching freely links, and possesses in the claim 1~3 each described heater in each described ceramic heater or the claim 8~17 respectively at described front end of controlling parts.
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CN103546998A (en) * 2013-10-24 2014-01-29 东莞市国研电热材料有限公司 A high-power ceramic heating element
CN103546998B (en) * 2013-10-24 2016-01-20 东莞市国研电热材料有限公司 A kind of high-power ceramic heater
CN107949811A (en) * 2015-09-11 2018-04-20 佳能株式会社 Image heating equipment and the heater used in image heating equipment
US11314188B2 (en) 2015-09-11 2022-04-26 Canon Kabushiki Kaisha Image heating device and heater for use in image heating device
CN107949811B (en) * 2015-09-11 2022-10-21 佳能株式会社 Image heating apparatus and heater used in image heating apparatus
CN108263080A (en) * 2016-12-30 2018-07-10 上海烟草集团有限责任公司 The processing unit (plant) and processing method of calandria

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CN1969592B (en) 2010-12-29
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WO2006001373A1 (en) 2006-01-05
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GB0701445D0 (en) 2007-03-07
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