CN1958206A - Electrochemical machining method in cellular dimple structure - Google Patents
Electrochemical machining method in cellular dimple structure Download PDFInfo
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- CN1958206A CN1958206A CN 200610096707 CN200610096707A CN1958206A CN 1958206 A CN1958206 A CN 1958206A CN 200610096707 CN200610096707 CN 200610096707 CN 200610096707 A CN200610096707 A CN 200610096707A CN 1958206 A CN1958206 A CN 1958206A
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000003754 machining Methods 0.000 title claims abstract description 20
- 230000001413 cellular effect Effects 0.000 title description 16
- 239000003792 electrolyte Substances 0.000 claims abstract description 11
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000011010 flushing procedure Methods 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 11
- 239000011148 porous material Substances 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 238000003672 processing method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000001259 photo etching Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 239000010437 gem Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 239000003351 stiffener Substances 0.000 description 1
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- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
本发明涉及一种蜂窝状微坑结构电解加工方法，属电解加工领域。该方法包括以下步骤：(1)制作一个带有贯穿群孔、表面附有屏蔽膜的工具阴极；(2)通过工具阴极的贯穿群孔向工件阳极加工表面均匀喷射电解液；(3)通电，对工件电解加工。本发明装置的特征在于：工具阴极具有上述结构，以及冲液方式。本发明的方法，具有生产效率高，表面质量好，制造成本低的特点。
The invention relates to an electrolytic machining method of a honeycomb micropit structure, which belongs to the field of electrolytic machining. The method comprises the following steps: (1) making a tool cathode with through holes and a shielding film on the surface; (2) uniformly spraying electrolyte to the anode processing surface of the workpiece through the through holes of the tool cathode; (3) energizing , Electrolytic machining of workpieces. The device of the present invention is characterized in that: the tool cathode has the above-mentioned structure, and the flushing method. The method of the invention has the characteristics of high production efficiency, good surface quality and low manufacturing cost.
Description
Technical field
Electrochemical machining method in cellular dimple structure of the present invention belongs to technical field of electrolysis processing.
Background technology
Electrolyzed Processing is a kind of special processing technology, and it is to utilize electrochemistry anodic solution principle to remove the processing method of material.It is fast that it has process velocity, and surface quality is good, and instrument is lossless, is not subjected to restriction such as the strength of materials, toughness, hardness and do not have outstanding advantage such as macroscopical cutting force, obtained using widely in industries such as Aero-Space, weapons, automobile, mould.
Surface texture with cellular dimple is widely used in the cylinder inner surface as the approach that improves sliding friction, and its manufacture method adopts pit machining method commonly used at present to have four kinds usually: 1. self-excited vibration processing method.Guarantee to have at the cylinder sleeve working surface under essentially smooth the situation, utilize the self-excited vibration effect in the process to produce from the teeth outwards along the equally distributed miniature pit of the hand of spiral.This processing method, operation is many, and efficient is low, and amplitude and frequency adjustment are cumbersome, and little hole size, the degree of depth and being distributed in to a certain extent is restricted; 2. vibratory impulse processing method.Little hole vibratory impulse processing unit (plant) is contained on the middle carriage of lathe, workpiece to be machined is contained on the machine tool chief axis with certain speed rotation, little hole vibratory impulse processing unit (plant) can be vertically and the horizontal direction feeding, control the degree of depth in little hole by traverse feed, on the tool heads of device, apply low-frequency vibration by the driven by motor eccentric stiffener, rely on vibratory impulse on workpiece, to form little hole with certain regularity of distribution and certain size parameter, this processing method, make surface of the work that plastic deformation take place, jagged and material protuberance needs secondary operations sometimes around little hole; 3. digital control laser honing technique.Laser honing is made up of three process: the thick top gem of a girdle-pendant, and the laser stereo lithography and the smart top gem of a girdle-pendant are used to laser to dig a pit, hole, etc., and realize the surface micro-pit Mechanical Builds, and then carry out honing, this processing method cost height; 4. the little hole of Ultrasonic machining technology.The surface micro-pit ultrasonic machining device is contained on the middle carriage of lathe, processed parts with frication pair is contained on the machine tool chief axis with certain rotating speed rotation, little hole ultrasonic machining device can be vertically and the horizontal direction feeding, control the degree of depth in little hole by traverse feed, promote the luffing bar by ultrasonic tr-ansducer and apply ultrasonic vibration, rely on vibratory impulse to form little hole at the cylinder sleeve working surface with certain regularity of distribution and certain size parameter to tool heads.This processing method, required lathe rotating speed is very high, needs the development special purpose machine tool, and is not suitable for the processing of miniature workpiece.
Use analog structures such as electrochemical machining method processing group hole, group's seam to mainly contain following several at present: the electrolysis of 1. taking a picture.At first at workpiece to be processed surface-coated one deck photoresist, after painting and develop, light formed hollow out group sectional hole patterns at surface of the work, with exposed workpiece part chemistry or electrochemical corrosion, form group's pore structure, remove the workpiece that photoresist just can obtain to have cellular dimple structure at last.This method operation is loaded down with trivial details, and processing all needs the repetition above-mentioned steps with each part of a collection of workpiece; 2. use the special electrode Electrolyzed Processing.The fine metal silk is wrapped on the specific frame forms the wire wound tooling group and stitch electrode, or make the group's electrode tool group pore electrod with single micro fine cylindrical, tool-electrode to the workpiece feeding, can process corresponding group's seam and group hole with certain speed.This method electrode is made loaded down with trivial details, and the preparatory period is long.3. arrange micro-electrode processing.Use several micro-electrode Electrolyzed Processing one rounds of row, after finishing, reprocess another row, all machine until the group hole.If use this several manufacture method processing cellular dimple structures, processing technology is loaded down with trivial details, manufacturing cost is too high, and therefore, it is good to be necessary to study the efficient height, the surface quality that make new advances, the solution of the processing cellular dimple that cost is low.
Summary of the invention
The objective of the invention is to solve present cellular dimple structure and process that ubiquitous efficient is not high, surface quality is not high, the defective that manufacturing cost is too high, provide a kind of high efficiency, great surface quality, the electrochemical machining method in cellular dimple structure of low manufacturing cost.
A kind of electrochemical machining method in cellular dimple structure is characterized in that may further comprise the steps:
(1), one of making has and runs through group pore structure, surperficial tool cathode with screened film; (2), during Electrolyzed Processing, tool cathode and the workpiece anode made are placed in opposite directions; (3), in the Electrolyzed Processing, run through group hole to the even jet electrolytic liquid of workpiece anode by tool cathode; (4), switch between workpiece anode and the tool cathode, to the workpiece Electrolyzed Processing.
Because this processing mode is tool cathode and anode to fit tightly (middle rise shield and the screened film of insulating effect belongs to the part of tool cathode), this and traditional Electrolyzed Processing mode are very different.In traditional Electrolyzed Processing, leave an electrolyte flow channel between tool cathode and the workpiece anode.And the present invention adopts and runs through group pore structure as electrolyte flow channel on the tool cathode, promptly as feed pathway, also as liquid outlet channel.Electrolyte sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.This moment, tool cathode ran through the interior ancient piece of jade, round, flat and with a hole in its centre in group hole and the electric field between the workpiece anode has been removed main effect to the workpiece anode material.Adopt this electrochemical machining method, only apply steps such as photoresist, photoetching, development, etching in tool surfaces, form tool cathode, or have the through hole structure by other technology formation, the surface has the tool cathode of screened film.And anode is without any need for suchlike step, just can Electrolyzed Processing after tool cathode clamps it, workpiece need not secondary operations after the process finishing.The most important thing is,, this means and to produce in batches easily so long as processing just need not be changed tool cathode with a kind of part.The once electrolytic that can realize cellular dimple structure shapes, and has improved working (machining) efficiency, has reduced processing cost.
Description of drawings
Fig. 1 is a cellular dimple structure electrochemical machining process schematic diagram.
Fig. 2 is a tool cathode manufacturing process schematic diagram.Wherein, Fig. 2 (a) is that metal substrate applies photoresist and carries out the photoetching schematic diagram; Fig. 2 (b) is the back band photoresist metal substrate schematic diagram that develops; Fig. 2 (c) is the tool cathode schematic diagram that obtains after etching is finished.
Label title among Fig. 1: 1, screened film, 2, tool cathode, 3, the workpiece anode, 4, electrolyte,
Label title among Fig. 2: 5, substrate, 6, exposure light source.
The specific embodiment
As shown in Figure 1, cellular dimple structure electrochemical machining process.Tool cathode 2 surfaces have screened film 1, and anode 3 is without any need for suchlike step, just can Electrolyzed Processing after tool cathode 2 clamps it.Electrolyte 4 sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.
Shown in Figure 2 is tool cathode manufacture process schematic diagram, on substrate 5, apply screened film 1, through having formed the figure shown in Fig. 2 (b) after photoetching, the development, the substrate exposed part is carried out etching, can adopt physical etchings, also can adopt chemical etching or electrochemical etching, substrate be carved worn, form figure shown in Fig. 2 (c).At this moment screened film 1 is referred to as tool cathode 23 with substrate 5 integrative-structures.Here it is to be noted: this only is a kind of technology that obtains tool cathode 2, also can adopt other technology (as drilling) to obtain to have to run through group pore structure, and the surface has the tool cathode 2 of screened film.
Below in conjunction with Fig. 1, Fig. 2, explanation method of the present invention, implementation process is passed through following step successively:
1. with reference to figure 2 (a), screened film 1 is coated in substrate 5, and photoetching, make to occur group's pore structure on the screened film;
2. with reference to figure 2 (b), after the development, there is the part substrate exposed externally;
3. with reference to figure 2 (c), the exposed part of substrate 5 is carried out etching, the substrate of carving after wearing 5 is called tool cathode 2 with screened film 1 integrative-structure, as the tool cathode of cellular dimple structure Electrolyzed Processing;
4. just can Electrolyzed Processing after tool cathode 2 and workpiece 3 clamp with reference to figure 1.Electrolyte 4 sprays to the tool cathode surface under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, also is the flow pass of solution, and electrolyte enters flow pass by the runner of cathode fixture again.After the processed cellular dimple structure of anode blank, Electrolyzed Processing finishes.
5. with reference to figure 1, take out workpiece 3, another workpiece blank is installed again, carry out Electrolyzed Processing again after clamping with tool cathode 2.Like this, can realize that the batch of cellular dimple structure workpiece is efficient, great surface quality, the low-cost manufacturing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200610096707 CN1958206A (en) | 2006-10-10 | 2006-10-10 | Electrochemical machining method in cellular dimple structure |
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| CN 200610096707 CN1958206A (en) | 2006-10-10 | 2006-10-10 | Electrochemical machining method in cellular dimple structure |
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Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101791726A (en) * | 2010-04-22 | 2010-08-04 | 西安交通大学 | Processing method of cylindrical component with mask micro-structure on outer curved surface |
| CN101804488A (en) * | 2010-04-22 | 2010-08-18 | 西安交通大学 | Method for processing inner curved surface maskless microstructure of sleeve part |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Method and system for electrolytic machining of array micropits |
| CN101733491B (en) * | 2009-12-22 | 2011-06-22 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for electrolytically machining complex case type surface |
| CN103084682A (en) * | 2013-01-16 | 2013-05-08 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
| CN103706899A (en) * | 2013-12-12 | 2014-04-09 | 西安理工大学 | Wire electrode array structure preparation method for micro-electrochemical machining |
| CN103737130A (en) * | 2013-12-03 | 2014-04-23 | 同济大学 | Electrochemical deburring and surface processing method through gel-state electric brush |
| CN104014879A (en) * | 2014-05-27 | 2014-09-03 | 南京航空航天大学 | Slave type array micro pit electrolytic machining method |
| CN104551282A (en) * | 2014-12-11 | 2015-04-29 | 南京航空航天大学 | System and method for improving locality of electrolytic processing of array micro-pit by flexible template |
| CN104772538A (en) * | 2015-04-29 | 2015-07-15 | 常州工学院 | Copper-aluminum composite micro-electrolysis electrode and preparation method for same |
| CN105290617A (en) * | 2015-11-13 | 2016-02-03 | 中国科学院力学研究所 | Machining processing method for enabling metal glass to generate stretching plasticity |
| CN105364237A (en) * | 2015-11-20 | 2016-03-02 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling honeycomb size of thin-walled honeycomb part |
| CN106064261A (en) * | 2016-06-12 | 2016-11-02 | 南京航空航天大学 | The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask |
| CN106392214A (en) * | 2016-10-21 | 2017-02-15 | 河南理工大学 | Periodic flow closure control device for pulse jet flows |
| CN107116274A (en) * | 2017-05-19 | 2017-09-01 | 广东工业大学 | A kind of method of cavitation jet auxiliary mask Electrolyzed Processing array pit |
| CN107956516A (en) * | 2017-11-23 | 2018-04-24 | 中国航发沈阳黎明航空发动机有限责任公司 | A kind of honeycomb and its processing method for gas turbine sealing |
| CN109332831A (en) * | 2018-11-20 | 2019-02-15 | 广东工业大学 | A surface microtexture processing device |
| CN111715955A (en) * | 2020-07-01 | 2020-09-29 | 南京航空航天大学 | Large aspect ratio thick-walled array microfluidic tube electrode and method for making the same, and electroforming core mold for making tube electrode and method for making the same |
| CN114289803A (en) * | 2022-01-25 | 2022-04-08 | 扬州大学 | Ultrasonic translational jet electrolytic machining device and method for surface micropit array structure |
| CN116000394A (en) * | 2022-12-13 | 2023-04-25 | 南京航空航天大学 | A honeycomb segment electrolytic grinding fixture and its use method |
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2006
- 2006-10-10 CN CN 200610096707 patent/CN1958206A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101733491B (en) * | 2009-12-22 | 2011-06-22 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for electrolytically machining complex case type surface |
| CN101804488A (en) * | 2010-04-22 | 2010-08-18 | 西安交通大学 | Method for processing inner curved surface maskless microstructure of sleeve part |
| CN101791726A (en) * | 2010-04-22 | 2010-08-04 | 西安交通大学 | Processing method of cylindrical component with mask micro-structure on outer curved surface |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Method and system for electrolytic machining of array micropits |
| CN103084682B (en) * | 2013-01-16 | 2015-04-22 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
| CN103084682A (en) * | 2013-01-16 | 2013-05-08 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
| CN103737130A (en) * | 2013-12-03 | 2014-04-23 | 同济大学 | Electrochemical deburring and surface processing method through gel-state electric brush |
| CN103706899B (en) * | 2013-12-12 | 2016-01-20 | 西安理工大学 | For the line electrode array structure preparation method of electrochemical micromachining |
| CN103706899A (en) * | 2013-12-12 | 2014-04-09 | 西安理工大学 | Wire electrode array structure preparation method for micro-electrochemical machining |
| CN104014879A (en) * | 2014-05-27 | 2014-09-03 | 南京航空航天大学 | Slave type array micro pit electrolytic machining method |
| CN104014879B (en) * | 2014-05-27 | 2017-01-11 | 南京航空航天大学 | Slave type array micro pit electrolytic machining method |
| CN104551282A (en) * | 2014-12-11 | 2015-04-29 | 南京航空航天大学 | System and method for improving locality of electrolytic processing of array micro-pit by flexible template |
| CN104551282B (en) * | 2014-12-11 | 2017-09-19 | 南京航空航天大学 | System and method for improving localization of array micropits electrolytic machining by using flexible template |
| CN104772538A (en) * | 2015-04-29 | 2015-07-15 | 常州工学院 | Copper-aluminum composite micro-electrolysis electrode and preparation method for same |
| CN105290617A (en) * | 2015-11-13 | 2016-02-03 | 中国科学院力学研究所 | Machining processing method for enabling metal glass to generate stretching plasticity |
| CN105290617B (en) * | 2015-11-13 | 2017-05-31 | 中国科学院力学研究所 | A kind of processing and treating method for making glassy metal produce stretching plastic |
| CN105364237A (en) * | 2015-11-20 | 2016-03-02 | 沈阳黎明航空发动机(集团)有限责任公司 | Method for controlling honeycomb size of thin-walled honeycomb part |
| CN106064261A (en) * | 2016-06-12 | 2016-11-02 | 南京航空航天大学 | The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS mask |
| CN106392214A (en) * | 2016-10-21 | 2017-02-15 | 河南理工大学 | Periodic flow closure control device for pulse jet flows |
| CN107116274A (en) * | 2017-05-19 | 2017-09-01 | 广东工业大学 | A kind of method of cavitation jet auxiliary mask Electrolyzed Processing array pit |
| CN107956516A (en) * | 2017-11-23 | 2018-04-24 | 中国航发沈阳黎明航空发动机有限责任公司 | A kind of honeycomb and its processing method for gas turbine sealing |
| CN109332831A (en) * | 2018-11-20 | 2019-02-15 | 广东工业大学 | A surface microtexture processing device |
| CN109332831B (en) * | 2018-11-20 | 2019-11-19 | 广东工业大学 | A surface microtexture processing device |
| CN111715955A (en) * | 2020-07-01 | 2020-09-29 | 南京航空航天大学 | Large aspect ratio thick-walled array microfluidic tube electrode and method for making the same, and electroforming core mold for making tube electrode and method for making the same |
| CN114289803A (en) * | 2022-01-25 | 2022-04-08 | 扬州大学 | Ultrasonic translational jet electrolytic machining device and method for surface micropit array structure |
| CN114289803B (en) * | 2022-01-25 | 2023-09-19 | 扬州大学 | Ultrasonic translation jet electrolytic machining device and method for surface micro-pit array structure |
| CN116000394A (en) * | 2022-12-13 | 2023-04-25 | 南京航空航天大学 | A honeycomb segment electrolytic grinding fixture and its use method |
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