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CN1936634A - Method for realizing optical point joint seal in optical-fiber close-packed array - Google Patents

Method for realizing optical point joint seal in optical-fiber close-packed array Download PDF

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CN1936634A
CN1936634A CN 200610053778 CN200610053778A CN1936634A CN 1936634 A CN1936634 A CN 1936634A CN 200610053778 CN200610053778 CN 200610053778 CN 200610053778 A CN200610053778 A CN 200610053778A CN 1936634 A CN1936634 A CN 1936634A
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fiber
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optical fiber
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侯昌伦
杨国光
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Zhejiang University ZJU
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Abstract

本发明公开了一种实现光纤密排线阵列中光点密接的方法。它包括如下步骤:1)将标准单模光纤的一端拉制出直径为5~25微米的微光纤,它包括标准光纤、过渡区和微光纤;2)将上述多根微光纤端部间隔水平平行排列在表面镀有氟化镁薄膜的带有V形槽的硅基板或带有矩形槽的氟化镁基板上;3)在基板上的微光纤上方设有表面镀有氟化镁薄膜的玻璃片或者是氟化镁薄板,并通过紫外胶与基板固定,形成微光纤密排阵列;4)标准光纤端部通过FC接口与半导体激光器连接,密排的微光纤阵列端输出光点阵列。本发明实现了多路光纤密排在水平线上的光点密接排列;提高了激光照排系统中成像的精度;增加了焦深,降低对胶片曝光时的位置精度的要求。The invention discloses a method for realizing close connection of light spots in an optical fiber close-arranged line array. It includes the following steps: 1) drawing one end of a standard single-mode optical fiber into a micro-fiber with a diameter of 5 to 25 microns, which includes a standard optical fiber, a transition zone and a micro-fiber; 2) spacing the ends of the above-mentioned multiple micro-fibers horizontally Arranged in parallel on a silicon substrate with a V-shaped groove or a magnesium fluoride substrate with a rectangular groove coated with a magnesium fluoride film on the surface; A glass sheet or a magnesium fluoride thin plate is fixed to the substrate by ultraviolet glue to form a micro-fiber close-packed array; 4) The end of the standard optical fiber is connected to the semiconductor laser through the FC interface, and the close-packed micro-fiber array end outputs an array of light spots. The invention realizes close arrangement of light spots in which multiple optical fibers are densely arranged on the horizontal line; improves imaging precision in a laser phototypesetting system; increases focal depth, and reduces requirements on position precision during film exposure.

Description

实现光纤密排线阵列中光点密接的方法A method to realize close connection of light spots in optical fiber close-packed line array

技术领域technical field

本发明涉及提供激光照排系统中的光纤密排线阵列技术,尤其涉及一种实现光纤密排线阵列中光点密接的方法。The invention relates to providing the optical fiber close-arranged line array technology in a laser phototypesetting system, in particular to a method for realizing the close connection of light spots in the optical fiber close-arranged line array.

背景技术Background technique

在激光照排机、激光光绘机以及直接制板机这一类激光扫描设备中,实现多路光扫描的一个主要方案是采用多个半导体激光器、多路光纤密排构造一个光点线阵列作为物平面,然后经过成像系统按一定比例成像在像平面(胶片表面)上,从而实现多路扫描。In laser scanning equipment such as laser phototypesetting machines, laser photoplotters, and direct plate-making machines, a main solution to realize multi-channel optical scanning is to use multiple semiconductor lasers and multiple optical fibers to construct a line array of light spots as a The object plane is then imaged on the image plane (film surface) in a certain proportion through the imaging system, thereby realizing multi-channel scanning.

然而由于普通光纤构造的原因,光纤中光只在中心很小的区域内分布,例如一个典型的多模光纤尺寸是外径125微米,芯径(导光部分)为62.5微米,如果是单模光纤芯径只有8~10微米。即使光纤无间隙排列,密排阵列发出的光点之间也是分离的(参见图6)。以光纤阵列出光端面作为物平面,经过成像系统,在像平面上得到的光点也是分离的,这是不能满足扫描要求的。如果采用离焦的方法扩大像面光点直径,虽然可以弥和光点之间的间隙,但会牺牲光点的边缘质量。However, due to the structure of ordinary optical fibers, the light in the optical fiber is only distributed in a small area in the center. For example, the size of a typical multimode optical fiber is 125 microns in outer diameter and 62.5 microns in core diameter (light guide part). If it is single-mode The fiber core diameter is only 8-10 microns. Even if the fibers are arranged without gaps, the light spots emitted by the close-packed array are separated (see Figure 6). Taking the light-emitting end face of the optical fiber array as the object plane, the light spots obtained on the image plane are also separated after passing through the imaging system, which cannot meet the scanning requirements. If the defocusing method is used to expand the spot diameter of the image plane, although the gap between the spots can be bridged, the edge quality of the spot will be sacrificed.

为了解决这个问题,有的采用将光纤密排倾斜一定角度,通过电路上的延时来控制打点,使光点密排。这种方法是成功的,但是控制电路复杂,不能解决聚焦光点焦深短的问题。In order to solve this problem, some optical fibers are densely arranged at a certain angle, and the dots are controlled through the delay on the circuit, so that the light spots are densely arranged. This method is successful, but the control circuit is complicated and cannot solve the problem of short depth of focus of the focused light spot.

发明内容Contents of the invention

本发明的目的是为了解决现有技术中存在的问题而提出一种实现光纤密排线阵列中光点密接的方法。The purpose of the present invention is to propose a method for realizing close connection of light spots in a densely packed optical fiber line array in order to solve the problems existing in the prior art.

它包括如下步骤:It includes the following steps:

1)将标准单模光纤的一端拉制出直径为5~25微米的微光纤,它包括标准光纤、过渡区和微光纤;1) Drawing one end of a standard single-mode fiber into a micro-fiber with a diameter of 5-25 microns, which includes a standard fiber, a transition zone and a micro-fiber;

2)将上述多根微光纤端部间隔水平平行排列在表面镀有氟化镁薄膜的带有V形槽的硅片或带有矩形槽的氟化镁基板上,排列间隔为微光纤直径加上相邻微光纤间距d,其中, d ≥ λ π · n 1 sin 2 θ - ( n 2 / n 1 ) 2 式中:λ为光在光纤中波长,n1为光纤折射率,n2为空气折射率,θ为光在光纤中的入射角;2) Arrange the ends of the above-mentioned multiple micro-fibers in parallel at intervals on a silicon chip with a V-shaped groove or a magnesium fluoride substrate with a rectangular groove coated with a magnesium fluoride film on the surface, and the arrangement interval is the diameter of the micro-fiber plus The upper adjacent micro-fiber spacing d, where, d &Greater Equal; λ π &Center Dot; no 1 sin 2 θ - ( no 2 / no 1 ) 2 In the formula: λ is the wavelength of light in the fiber, n 1 is the refractive index of the fiber, n 2 is the refractive index of air, and θ is the incident angle of light in the fiber;

3)在基板上的微光纤上方设有表面镀有氟化镁薄膜的玻璃片或者是氟化镁薄板,并通过紫外胶与基板固定,形成微光纤密排阵列;3) A glass sheet coated with a magnesium fluoride film or a magnesium fluoride thin plate is arranged above the micro-optical fiber on the substrate, and fixed to the substrate by ultraviolet glue to form a close-packed array of micro-fibers;

4)标准光纤端部通过FC接口与半导体激光器连接,密排的微光纤阵列端输出光点阵列。4) The end of the standard optical fiber is connected to the semiconductor laser through the FC interface, and the end of the densely packed micro-fiber array outputs an array of light spots.

本发明的有益效果:Beneficial effects of the present invention:

1)实现了多路光纤密排在水平线上的光点密接排列;1) Realize the close arrangement of light spots in which multiple optical fibers are densely arranged on the horizontal line;

2)提高了激光照排系统中成像的精度;2) Improving the imaging accuracy in the laser phototypesetting system;

3)增加了焦深,降低对胶片曝光时的位置精度的要求。3) The depth of focus is increased, which reduces the requirement for positional accuracy during film exposure.

附图说明Description of drawings

图1是本发明的微光纤密排示意图;Fig. 1 is a schematic diagram of a close-packed micro-optical fiber of the present invention;

图2是去除涂覆层的125微米直径的标准单模光纤示意图;Figure 2 is a schematic diagram of a standard single-mode optical fiber with a diameter of 125 microns with the coating removed;

图3是利用去除涂覆层的单模光纤,通过高温拉制工艺加工出来的直径范围在5~25微米的微光纤示意图;Figure 3 is a schematic diagram of a micro-optical fiber with a diameter ranging from 5 to 25 microns processed by a high-temperature drawing process using a single-mode optical fiber with the coating removed;

图4是本发明的微光纤密排在带有V形槽的硅基板上示意图;Fig. 4 is a schematic diagram of micro-optical fibers of the present invention densely arranged on a silicon substrate with a V-shaped groove;

图5是本发明的微光纤密排在带有矩形槽的氟化镁基板上示意图;Fig. 5 is a schematic diagram of micro-optical fibers of the present invention densely arranged on a magnesium fluoride substrate with rectangular grooves;

图6是采用标准光纤密排时聚焦光点的分布示意图;Figure 6 is a schematic diagram of the distribution of focused light spots when standard optical fibers are densely packed;

图7是采用微光纤密排时聚焦光点的分布示意图;Fig. 7 is a schematic diagram of the distribution of focused light spots when micro-optical fibers are densely packed;

图8是采用微光纤密排时经过透镜聚焦后像面焦深示意图;Figure 8 is a schematic diagram of the depth of focus of the image plane after focusing through the lens when the micro-fibers are densely packed;

图9是采用标准单模光纤时镜头透镜聚焦后像面焦深示意图;Figure 9 is a schematic diagram of the focal depth of the image plane after the lens lens is focused when a standard single-mode optical fiber is used;

图10是本发明的微光纤密排阵列模块图。Fig. 10 is a block diagram of the micro-fiber close-packed array of the present invention.

具体实施方式Detailed ways

为了解决现有激光照排机上采用标准光纤密排阵列中光点不能密接,而且由于相邻光纤间距大,需要大倍率聚焦透镜而引起焦深过短对曝光点位置要求过高的问题,提出了采用微光纤密排的方法。微光纤是标准单模光纤去除涂覆层后,在激光加热下拉制出来的直径在5~25微米左右的细光纤(如图3所示)。微光纤的一端通过一个过渡区与标准单模光纤相连,标准光纤端通过通用的光纤接口与半导体激光器连接。在标准光纤中,光只在直径很小的光纤芯径中传输,芯径外围部分为折射率比芯径低的包层;而在微光纤中,光在整个微光纤直径范围内传输,微光纤周围空气层即为包层。如果微光纤直接与光纤或比光纤折射率高的材料接触,光能量会很容易耦合到与它接触的材料中去。这项发明的关键问题之一是解决微光纤密排时的包层问题。In order to solve the problem that the light spots in the standard optical fiber close-packed array on the existing laser phototypesetting machine cannot be closely connected, and because the distance between adjacent optical fibers is large, a large magnification focusing lens is required, which causes the problem that the depth of focus is too short and the position of the exposure point is too high. The method of micro-fiber close-packing is adopted. The micro-fiber is a thin optical fiber with a diameter of about 5-25 microns produced under laser heating after removing the coating from the standard single-mode optical fiber (as shown in Figure 3). One end of the microfiber is connected to a standard single-mode fiber through a transition zone, and the standard fiber end is connected to a semiconductor laser through a common fiber interface. In a standard optical fiber, light is transmitted only in the core diameter of the fiber with a small diameter, and the outer part of the core diameter is a cladding with a lower refractive index than the core diameter; while in a microfiber, light is transmitted within the entire diameter of the microfiber, and the microfiber The air layer around the fiber is the cladding. If the microfiber is directly in contact with the fiber or a material with a higher refractive index than the fiber, light energy can easily be coupled into the material in contact with it. One of the key problems of this invention is to solve the cladding problem when the micro-fibers are densely packed.

为了防止排列的相邻微光纤之间产生光能量耦合,相邻微光纤之间排列时需要保持一定的间隙d(如图1所示)。间隙的大小为:In order to prevent optical energy coupling between arranged adjacent micro-fibers, a certain gap d (as shown in FIG. 1 ) needs to be maintained between adjacent micro-fibers. The size of the gap is:

dd ≥&Greater Equal; λλ ππ ·· nno 11 sinsin 22 θθ -- (( nno 22 // nno 11 )) 22

式中:λ为光在光纤中波长,n1为光纤折射率,n2为空气折射率,θ为光在光纤中的入射角。In the formula: λ is the wavelength of light in the fiber, n 1 is the refractive index of the fiber, n 2 is the refractive index of air, and θ is the incident angle of the light in the fiber.

为了让微光纤等间距排列,微光纤排列在刻蚀有V形槽的硅基片或矩形槽的氟化镁基片上,假设微光纤的直径为D,相邻微光纤的间隔为d,相邻V形槽或矩形槽的间距为D+d。如果采用刻蚀有V形槽的硅片,则硅片上需要镀上一层低折射率介质薄膜(如氟化镁薄膜)。硅片上的V形槽通过光刻、湿法刻蚀工艺得到;矩形槽通过光刻、等离子束刻蚀加工出来。排列好的微光纤阵列上端压上一块氟化镁薄片或者是表面镀有氟化镁薄膜的玻璃片,氟化镁薄片或玻璃片通过紫外胶与下面的基板固定(如图4、图5所示)。由于微光纤直径非常细,为了防止微光纤断裂,要将基板与标准光纤靠近过渡区部分通过紫外胶与底座固定(如图10所示),形成一体。In order to arrange the micro-fibers at equal intervals, the micro-fibers are arranged on a silicon substrate with a V-shaped groove or a magnesium fluoride substrate with a rectangular groove. Assume that the diameter of the micro-fiber is D, and the distance between adjacent micro-fibers is d. The distance between adjacent V-shaped grooves or rectangular grooves is D+d. If a silicon wafer etched with a V-shaped groove is used, the silicon wafer needs to be plated with a low-refractive index dielectric film (such as a magnesium fluoride film). The V-shaped groove on the silicon wafer is obtained by photolithography and wet etching; the rectangular groove is processed by photolithography and plasma beam etching. The upper end of the arranged micro-optical fiber array is pressed with a magnesium fluoride sheet or a glass sheet coated with a magnesium fluoride film on the surface, and the magnesium fluoride sheet or glass sheet is fixed to the substrate below by ultraviolet glue (as shown in Figure 4 and Figure 5 Show). Since the diameter of the micro-fiber is very thin, in order to prevent the breakage of the micro-fiber, the substrate and the part of the standard optical fiber close to the transition zone should be fixed with the base through ultraviolet glue (as shown in Figure 10) to form an integral body.

如果采用常规方法用标准光纤紧密排列,相邻光纤中心距离为125微米,如果胶片的分辨率要求为2540dpi,则密排光纤光点阵列成像到胶片上需要的成像透镜的倍率为12.5倍。透镜倍率越大,焦深就越短;如果使用12.5倍的成像透镜对胶片的位置要求很高,实用困难(如图9所示)。如果采用直径为20微米的微光纤密排,相邻微光纤间隔微4微米,相邻微光纤中心距离为24微米,如果胶片的分辨率要求为2540dpi,则从密排微光纤阵列端面到胶片的成像透镜的倍率为2.4倍,透镜的倍率大大缩小,焦深大大增加(如图8所示),对聚焦透镜到胶片的位置精度的要求大大降低。If the conventional method is used to closely arrange standard optical fibers, the distance between the centers of adjacent optical fibers is 125 microns, and if the resolution of the film is required to be 2540dpi, the magnification of the imaging lens required for imaging the densely packed optical fiber spot array on the film is 12.5 times. The larger the magnification of the lens, the shorter the depth of focus; if a 12.5x imaging lens is used, the position of the film is very high, and it is difficult to be practical (as shown in Figure 9). If micro-fibers with a diameter of 20 microns are densely arranged, the distance between adjacent micro-fibers is 4 microns, and the center distance between adjacent micro-fibers is 24 microns. The magnification of the imaging lens is 2.4 times, the magnification of the lens is greatly reduced, the depth of focus is greatly increased (as shown in Figure 8), and the requirements for the position accuracy of the focusing lens to the film are greatly reduced.

实施例1Example 1

1)将单模光纤剥去涂附层;1) Stripping the coating from the single-mode optical fiber;

2)将大功率的激光通过聚焦镜会聚到光纤上,激光产生的热使光纤融化,通过拉伸光纤得直径为20微米的微光纤;2) Converge the high-power laser onto the optical fiber through the focusing mirror, the heat generated by the laser melts the optical fiber, and the micro-fiber with a diameter of 20 microns is obtained by stretching the optical fiber;

3)在硅片上平行的刻蚀出间距为24微米的V形槽,在硅片上刻蚀有V形槽的面镀上一层厚度在0.3~1微米的氟化镁薄膜;将微光纤端平行水平排列在硅片上的V形槽内,然后在微光纤阵列上面盖上表面镀有0.3~1微米薄膜的玻璃片,玻璃片与硅片间通过紫外胶固定,如图4所示。3) On the silicon wafer, etch out V-shaped grooves with a spacing of 24 microns in parallel, and plate a magnesium fluoride film with a thickness of 0.3 to 1 micron on the surface of the silicon wafer etched with V-shaped grooves; The optical fiber ends are arranged parallel and horizontally in the V-shaped groove on the silicon wafer, and then the micro-fiber array is covered with a glass sheet coated with a 0.3-1 micron film on the surface, and the glass sheet and the silicon chip are fixed by ultraviolet glue, as shown in Figure 4 Show.

4)将硅片与标准光纤靠近过渡区部分用紫外胶与底座固定,标准光纤端部接上与半导体激光器连接的FC接口(如图10所示)。4) Fix the silicon chip and the standard optical fiber near the transition area to the base with ultraviolet glue, and connect the end of the standard optical fiber to the FC interface connected to the semiconductor laser (as shown in Figure 10).

5)步骤2)中调节激光会聚点与被加热光纤之间的距离获得直径不同的微光纤。5) In step 2), the distance between the laser convergence point and the heated fiber is adjusted to obtain micro-fibers with different diameters.

实施例2Example 2

1)将单模光纤剥去涂附层;1) Stripping the coating from the single-mode optical fiber;

2)将大功率的激光通过聚焦镜会聚到光纤上,激光产生的热使光纤融化,通过拉伸光纤得直径为10微米的微光纤;2) Converge the high-power laser onto the optical fiber through the focusing mirror, the heat generated by the laser melts the optical fiber, and stretches the optical fiber to obtain a micro-fiber with a diameter of 10 microns;

3)在氟化镁基板上通过光刻、等离子束蚀刻出相邻间隔为13微米,宽度为8微米,深度为5微米的平行槽,将微光纤水平平行排列在基板上的平行槽内,在微光纤阵列上面盖上氟化镁薄板,氟化镁薄板与基板间通过紫外胶固定,如图5所示。3) On the magnesium fluoride substrate, parallel grooves with an adjacent interval of 13 microns, a width of 8 microns, and a depth of 5 microns are etched by photolithography and plasma beams, and the micro-optical fibers are horizontally arranged in parallel in the parallel grooves on the substrate. A magnesium fluoride thin plate is covered on the micro-fiber array, and the magnesium fluoride thin plate and the substrate are fixed by ultraviolet glue, as shown in FIG. 5 .

4)将氟化镁基片与标准光纤靠近过渡区部分用紫外胶与底座固定,标准光纤端部接上与半导体激光器连接的FC接口(如图10所示)。4) Fix the magnesium fluoride substrate and the standard optical fiber near the transition area to the base with ultraviolet glue, and connect the end of the standard optical fiber to the FC interface connected to the semiconductor laser (as shown in Figure 10).

5)步骤2)中调节激光会聚点与被加热光纤之间的距离获得直径不同的微光纤。5) In step 2), the distance between the laser convergence point and the heated fiber is adjusted to obtain micro-fibers with different diameters.

Claims (2)

1、一种实现光纤密排线阵列中光点密接的方法,其特征在于它包括如下步骤:1. A method for realizing close connection of light spots in an optical fiber close-packed line array, characterized in that it comprises the steps: 1)将标准单模光纤的一端拉制出直径为5~25微米的微光纤,它包括标准光纤、过渡区和微光纤;1) Drawing one end of a standard single-mode fiber into a micro-fiber with a diameter of 5-25 microns, which includes a standard fiber, a transition zone and a micro-fiber; 2)将上述多根微光纤端部间隔水平平行排列在表面镀有氟化镁薄膜的带有V形槽的硅基板或带有矩形槽的氟化镁基板上,排列间隔为微光纤直径加上相邻微光纤间距d,其中, d ≥ λ π · n 1 si n 2 θ - ( n 2 / n 1 ) 2 式中:λ为光在光纤中波长,n1为光纤折射率,n2为空气折射率,θ为光在光纤中的入射角;2) Arrange the ends of the above-mentioned multiple micro-fibers in parallel at intervals on a silicon substrate with a V-shaped groove or a magnesium fluoride substrate with a rectangular groove coated with a magnesium fluoride film on the surface, and the arrangement interval is the diameter of the micro-fiber plus The upper adjacent micro-fiber spacing d, where, d &Greater Equal; λ π · no 1 the si no 2 θ - ( no 2 / no 1 ) 2 In the formula: λ is the wavelength of light in the fiber, n 1 is the refractive index of the fiber, n 2 is the refractive index of air, and θ is the incident angle of light in the fiber; 3)在基板上的微光纤上方设有表面镀有氟化镁薄膜的玻璃片或者是氟化镁薄板,并通过紫外胶与基板固定,形成微光纤密排阵列;3) A glass sheet coated with a magnesium fluoride film or a magnesium fluoride thin plate is arranged above the micro-optical fiber on the substrate, and fixed to the substrate by ultraviolet glue to form a close-packed array of micro-fibers; 4)标准光纤端部通过FC接口与半导体激光器连接,密排的微光纤阵列端输出光点阵列。4) The end of the standard optical fiber is connected to the semiconductor laser through the FC interface, and the end of the densely packed micro-fiber array outputs an array of light spots. 2.根据权利要求1所述的一种实现光纤密排线阵列中光点密接的方法,其特征在于所述微光纤的拉制方法为:2. A method for realizing close connection of light spots in an optical fiber close-packed line array according to claim 1, characterized in that the drawing method of the micro-optical fiber is: 1)将单模光纤剥去涂附层;1) Stripping the coating from the single-mode optical fiber; 2)将大功率的激光通过聚焦镜会聚到光纤上,激光产生的热使光纤融化,通过拉伸光纤得到细直径的微光纤;2) Converge the high-power laser onto the optical fiber through the focusing mirror, the heat generated by the laser melts the optical fiber, and obtains a fine-diameter micro-fiber by stretching the optical fiber; 3)调节激光会聚点与被加热光纤之间的距离获得直径不同的微光纤。3) Adjusting the distance between the laser convergence point and the heated fiber to obtain micro-fibers with different diameters.
CN 200610053778 2006-10-10 2006-10-10 Method for realizing optical point joint seal in optical-fiber close-packed array Pending CN1936634A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590934A (en) * 2012-03-30 2012-07-18 上海汇珏网络通信设备有限公司 Double-layer optical fiber array and manufacturing method thereof
CN102853953A (en) * 2012-09-17 2013-01-02 南京大学 Micro-tension sensing device based on micro-optical fiber Bragg grating and preparation method thereof
CN109632137A (en) * 2019-02-19 2019-04-16 杭州线感光电技术有限公司 A kind of two-dimensional spatial distribution formula optical fiber temperature-measurement method
CN112987322A (en) * 2021-03-23 2021-06-18 中国建筑材料科学研究总院有限公司 Laser beam expander, preparation method thereof and optical path system comprising laser beam expander

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590934A (en) * 2012-03-30 2012-07-18 上海汇珏网络通信设备有限公司 Double-layer optical fiber array and manufacturing method thereof
CN102853953A (en) * 2012-09-17 2013-01-02 南京大学 Micro-tension sensing device based on micro-optical fiber Bragg grating and preparation method thereof
CN109632137A (en) * 2019-02-19 2019-04-16 杭州线感光电技术有限公司 A kind of two-dimensional spatial distribution formula optical fiber temperature-measurement method
CN112987322A (en) * 2021-03-23 2021-06-18 中国建筑材料科学研究总院有限公司 Laser beam expander, preparation method thereof and optical path system comprising laser beam expander

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