CN1895974A - Substrate move-out move-in method and system - Google Patents
Substrate move-out move-in method and system Download PDFInfo
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- CN1895974A CN1895974A CN 200610105710 CN200610105710A CN1895974A CN 1895974 A CN1895974 A CN 1895974A CN 200610105710 CN200610105710 CN 200610105710 CN 200610105710 A CN200610105710 A CN 200610105710A CN 1895974 A CN1895974 A CN 1895974A
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Abstract
To provide a substrate carrying-in/carrying-out method and a substrate carrying-in/carrying out system capable of surely carrying in and carrying out a substrate to a substrate storage cassette of a multistage structure. This substrate carrying-in/carrying-out method carries in and carries out the substrate 1a by using a robot having a hand for placing the substrate to the cassette for placing and storing the substrates in a multistage shape on long size support parts with respective stages by arranging the long size support parts extending to this side from the innermost side in a multistage shape at a predetermined interval; and includes a support process of expanding a space for advancing or retreating the hand in the cassette by supporting an end part on this side of the long size support part for placing the object substrate or the end part on this side of the long size support part placed with the object substrate; and is constituted so that a carrying-out process of the object substrate from the cassette and a carrying-in process of the object substrate to the cassette are performed together with the support process.
Description
Technical field
The present invention relates to that a kind of substrate is taken out of the method for moving into and substrate is taken out of the system of moving into, relate to especially that the substrate that slim TV is taken out of and/or moved into the relative containing box of substrates such as glass substrate is taken out of the method for moving into and substrate is taken out of the system of moving into.
Background technology
In the general Fabrication procedure of display panels and Plasmia indicating panel (PDP) etc., carry out conveyance at each inter process under the state of a plurality of glass substrates in being accommodated in casing.For example in the Fabrication procedure of display panels, glass substrate is accommodated in the inherent inter process of casing and carries out conveyance, forms in operation and the distribution formation operation at TFT (thin film transistor), and glass substrate is put into the operation after casing takes out.Make good display panels and be accommodated in once more in the casing, utilize unmanned conveyance car etc. then to the testing fixture conveyance.And, to supply with to testing fixture after one by one taking out display panels in the casing, the display panels after the inspection is accommodated in the casing once more.
In above-mentioned Fabrication procedure, require to have the substrate that (following only be called to take out of move into) taken out of and/or moved into to glass substrate reliably from containing box (or to containing box) to be taken out of and move into device, carried out various researchs all the time.For example proposing has: (i) adopted from about open with the multilayer shape establish metal wool, the bearing glass substrate substrate that carries out the casing that multilayer takes in is taken out of and is moved into device (for example with reference to patent documentation 1) thereon; (ii) adopted will be from the casing both sides inwardly outstanding short support portion, side and from the casing inboard to the support part of drawing money on credit of front side extension form the multilayer shape, the bearing glass substrate substrate that carries out the casing that multilayer takes in is taken out of and is moved into device (for example with reference to patent documentation 2) thereon; (iii) adopted the fine strain of millet member that will be erected at about casing to be arranged to the multilayer shape, the substrate of the casing of the upright pin shape support of establishing supporting substrate is taken out of and is moved into device (with reference to patent documentation 3) etc. on this fine strain of millet member.
Wherein, along with the big pictureization of thin displays such as LCD TV, PDP, glass substrate also requires to maximize gradually.The size of glass substrate recently from the 6th generation (1.5m * 1.9m) to the 7th generation (1.9m * 2.2m) and the 8th generation (and 2.2m * 2.4m) development, require to develop can with this large-size glass substrate reliably relatively containing box take out of the substrate of moving into and take out of and move into device.Moreover thin display is output growth along with increase in demand, requires to develop taking in the little body structure of interlamellar spacing that quantity increases and can this relatively casing taking out of the substrate of moving into reliably and take out of and move into device of unit space volume thus.
Especially the casing in (i) (hereinafter referred to as the metal wool molding box body) quantity of taking in that increases the unit space volume though be suitable for reducing interlamellar spacing, but carrying out taking out of of substrate when moving into, need make the casing rising or make substrate utilize the air come-up, thereby need large-scale and complex apparatus, have the problem of the running carrying cost rising of equipment investment and equipment.On the other hand, adopted the substrate of above-mentioned casing (hereinafter referred to as back brace molding box body) in (ii) to take out of to move into device and the substrate that adopts metal wool molding box body to take out of to move into device and compared, its structure is also uncomplicated, and, thereby compare the advantage of taking in quantity that the spacing with each interlayer that can reduce multiple-structure increases the unit space volume with the casing (iii).
But, in the time of in glass substrate being accommodated in the back brace molding box body that large-size glass substrate uses, can deflection from the inboard to the front (front side) of the support part of drawing money on credit that front side (taking out of the peristome side of moving into glass substrate) is extended, cause glass substrate about short support portion between take in the form of deflection.That is, the glass substrate of being taken in from the casing inboard to the tiltedly deflection that has a down dip of front side direction, and deflection from about short support portion become big to the central authorities of substrate.(the back brace molding box body that the spacing of each layer of the glass substrate of 1.9m * 2.2m) is 75mm, set with the interval of 330mm on Width to the support part of drawing money on credit that the front side is extended from the inboard, the deflection of front side is also had an appointment about 30mm even for example constitute and took in for the 7th generation.This degree of flexibility is inboard little and big in the front side casing, different on its depth direction, therefore, even the robot that utilizes following patent documentation 4 to propose with the arm structure that cooperates flexed configuration, the hand and the carrying glass substrate thereon that enter into the robot in the casing also cushion with the support portion of casing and the glass substrate of having taken in, so very difficult glass substrate is taken out of reliably from casing (or to containing box) moved into.Therefore, when using back brace molding box body, there is limit in the spacing that reduces each interlayer of multiple-structure with the quantity of taking in that increases the unit space volume, it is solved countermeasure study.
Patent documentation 1: the Japanese Patent spy opens the 2005-64431 communique
Patent documentation 2: the Japanese Patent spy opens the 2000-142876 communique
Patent documentation 3: Japanese patent laid-open 11-35089 communique
Patent documentation 4: the Japanese Patent spy opens the 2003-51525 communique
Summary of the invention
In view of the above problems, the substrate that the object of the present invention is to provide the substrate reception case of the relative multiple-structure of a kind of energy to take out of and move into substrate is reliably taken out of the method for moving into and substrate is taken out of system's of moving into (substrate is taken out of and moved into auxiliary device).
In order to reach above-mentioned purpose, substrate of the present invention is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with from the inboard support part of drawing money on credit of extending to the front side, and bearing substrate carries out the casing that multilayer is taken on the support part of drawing money on credit of each layer, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise the support part of drawing money on credit of drawing money on credit the support part or having carried object substrate that will carry object substrate is supported, enlarge in the casing supporting operation (A) in the space that enters for described hand or retreat, take out of taking out of operation and carrying out with this supporting operation (A) of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
Adopt the present invention, the supporting operation (A) that utilization is supported the support part of drawing money on credit, can enlarge the space that enters or retreat for robot in the casing, therefore, thereby the spacing that can reduce each interlayer of multiple-structure increases the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate substrate up and down and the support portion of carrying upper and lower base plate (the short support portion and the support part etc. of drawing money on credit) buffering and do not cause these substrate damage, these substrates can be taken out of reliably and move into.
Substrate of the present invention is taken out of the method for moving into, and it is characterized in that, the operation of taking out of of object substrate comprises: make described hand enter and be positioned at the operation of the object substrate below that is carried on the described support part of drawing money on credit of being supported from side direction inboard, described casing front; Thereby make described hand be moved upward the operation that object substrate is raised to the described top, support part of drawing money on credit; Thereby and make the hand that carries object substrate move back the operation that object substrate is fetched into outside the described casing from the inboard to the rear flank, front.
Adopt this invention, can in the space that enlarges, reliably object substrate not taken out of contiguously with substrate and support portion (the short support portion and the support part etc. of drawing money on credit) of carrying up and down.
Substrate of the present invention is taken out of the method for moving into, it is characterized in that, in the supporting operation (A) when described object substrate is taken out of operation, after the operation that object substrate is fetched into outside the casing or after the operation that object substrate is lifted and before the operation that object substrate is fetched into outside the casing, remove supporting to the described support part of drawing money on credit.
Adopt this invention, the releasing of the supporting operation (A) when substrate is taken out of operation can be carried out in above-mentioned two kinds of times.Wherein, the former has the advantage that supporting operation (A) time of carrying out is oversimplified, and the latter has can further enlarge the advantage that hand carries out the space of substrate when taking out of.
Substrate of the present invention is taken out of the method for moving into, and it is characterized in that, the operation of moving into of object substrate comprises: the hand that carries object substrate side direction inboard in front of the described casing is entered and object substrate is positioned at draw money on credit the operation of top, support part; Thereby described hand is moved downwards object substrate is carried on operation on the described support part of drawing money on credit; And the operation that under the state below hand is positioned at object substrate described hand is moved back from the inboard to the rear flank, front.
Adopt this invention, can in the space that enlarges, reliably object substrate not moved into contiguously with the support portion (the short support portion and the support part etc. of drawing money on credit) of substrate that carries up and down and supporting substrates.
Substrate of the present invention is taken out of the method for moving into, it is characterized in that, in the supporting operation (A) when described object substrate is moved into operation, before making the hand operation that the side direction inboard enters in front of the casing or make after the hand operation that the side direction inboard enters in front of casing and operation that hand is moved back to the rear flank, front from the inboard before begin the described support part of drawing money on credit is supported.
Adopt this invention, the beginning of the supporting operation (A) when substrate is moved into operation can be carried out in above-mentioned two kinds of times.Wherein, the former can make supporting operation (A) time of carrying out oversimplify, and the latter can further enlarge hand and carry out the space of substrate when moving into.In addition, can fully strengthen the space that retreats for hand.
Substrate of the present invention is taken out of the method for moving into, it is characterized in that, take out of operation and move in the operation described, also comprise will carrying the support part or carried the supporting operation (B) that support the support part of drawing money on credit of last layer of the support part of drawing money on credit of object substrate of drawing money on credit of object substrate, take out of taking out of operation or carrying out with this supporting operation (B) of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
Adopt this invention, owing to also comprise the supporting operation (B) that the support part of drawing money on credit of last layer is supported, therefore utilizing hand to carry out substrate when taking out of and moving into, the space of the support part of drawing money on credit of drawing money on credit the support part or having carried draw money on credit support part and its last layer of object substrate that will carry object substrate is further enlarged.The result is, when taking out of object substrate, the space the when hand that carries substrate retreats in casing becomes big, and when moving into object substrate, the space the when hand that carries substrate enters in casing becomes big, can carry out these actions more reliably.
Substrate of the present invention is taken out of the method for moving into, it is characterized in that, take out of operation and move in the operation described, also comprise the support part or carried the decline operation that depress the support part of drawing money on credit of following one deck of the support part of drawing money on credit of object substrate of drawing money on credit that to carry object substrate, take out of taking out of operation or carrying out with described decline operation of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
Adopt this invention, owing to also comprise the decline operation that the support part of drawing money on credit of following one deck is depressed, therefore utilizing hand to carry out substrate when taking out of and moving into, the space of drawing money on credit the support part or having carried draw money on credit support part and the support part of drawing money on credit of its time one deck of object substrate that will carry object substrate is further enlarged.The result is, when taking out of object substrate, it is big that the space when not having the hand of the sky of bearing substrate to enter in casing becomes, when moving into object substrate, it is big that space when not having the hand of the sky of bearing substrate to retreat in casing becomes, and can carry out these actions more reliably.
In addition, substrate of the present invention is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with from the inboard support part of drawing money on credit of extending to the front side, and bearing substrate carries out the casing that multilayer is taken on the support part of drawing money on credit of each layer, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise at least one operation that is selected from the following operation: the support part of drawing money on credit of drawing money on credit the support part or having carried object substrate that will carry object substrate is supported, enlarge the supporting operation (A) in the space that supplies described hand to enter in the casing or retreat; The support part of drawing money on credit of last layer of drawing money on credit the support part or having carried the support part of drawing money on credit of object substrate that will carry object substrate is supported, enlarges in the casing supporting operation (B) in the space that enters for described hand or retreat; And the support part of drawing money on credit of following one deck of drawing money on credit the support part or having carried the support part of drawing money on credit of object substrate that will carry object substrate depresses, enlarges in the casing decline operation in the space that enters for described hand or retreat, and takes out of taking out of operation or carrying out with at least one operation that is selected from this supporting operation (A), support operation (B) and the decline operation to the operation of moving into that described casing is moved into object substrate of object substrate from described casing.
Adopt the present invention,, therefore can enlarge the space that supplies robot to enter or retreat in the casing owing to taking out of operation and moving into operation at least one operation in being selected from supporting operation (A), supporting operation (B) and decline operation and carry out.The result is, thereby the spacing that can reduce each interlayer of multiple-structure increases the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate substrate up and down and the support portion of carrying upper and lower base plate (the short support portion and the support part etc. of drawing money on credit) buffering and do not cause these substrate damage, these substrates can be taken out of reliably and move into.
Substrate of the present invention is taken out of the system of moving into, and comprising: with the predetermined distance multilayer be arranged with from the inboard that bearing substrate carries out the casing that multilayer is taken on draw money on credit support part and the support part of drawing money on credit at each layer that the front side is extended; The robot that has the hand used of the described substrate of carrying, is used for described substrate moved in the casing or described substrate is taken out of in the casing; And the end position adjusting mechanism that the described support part of drawing money on credit is supported or made its decline, it is characterized in that, described end position adjusting mechanism is in order to enlarge space that enters for described hand side direction inboard in front of the described casing or the space of moving back to the rear flank, front from described casing inboard for described hand, and its decline is supported or made at least one support part of drawing money on credit in the support part of drawing money on credit of draw money on credit support part and this long support subordinate one deck of the support part of drawing money on credit that is selected from the carrying object substrate, this support part last layer of drawing money on credit.
Adopt the present invention, pass through casing, robot and end position adjusting mechanism can enlarge the space that enters from side direction inboard, casing front for hand, perhaps enlarge the space of moving back to the rear flank, front from the casing inboard for hand, therefore, can reduce the spacing of each interlayer of multiple-structure, increase the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate substrate up and down and the support portion of carrying upper and lower base plate (the short support portion and the support part etc. of drawing money on credit) buffering and do not cause these substrate damage, these substrates can be taken out of reliably and move into.In addition, the present invention can realize by increase the end position adjusting mechanism on the basic structure of existing back brace molding box body, need not use robot with special arm and mechanism, and, existing other substrates need be set yet take out of the complex mechanism that uses in the method for moving into, thereby can realize low cost.
Substrate of the present invention is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with the support portion, and bearing substrate carries out multilayer and takes on the support portion of each layer, and have can be for the casing of opening of taking out of and move into described substrate, use has the robot of the hand used of the described substrate of carrying substrate is taken out of or moved into, it is characterized in that, comprise the object substrate that will take out of or the object substrate of having moved into are supported, the supporting operation (A) in the space of guaranteeing in the casing to enter or retreating for described hand, the taking out of operation or move into operation and carry out of described object substrate with described supporting operation (A).
Adopt the present invention, the supporting operation (A) that utilization is supported substrate, can guarantee the interior space that supplies robot to enter or retreat of casing, therefore, thereby the spacing that can reduce each interlayer of multiple-structure increases the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate up and down the substrate and the support portion buffering of carrying upper and lower base plate and not cause these substrate damage, these substrates can be taken out of reliably and move into.In addition, the present invention dashes in the basic structure of existing casing increases supporting operation (A), thereby need not use robot and the complicated mechanism with special arm and mechanism, can realize that the failure-free substrate moves into and take out of with low cost.
Take out of in the method for moving at substrate of the present invention, preferably the described operation of taking out of comprises: make described hand enter and be positioned at the operation of described object substrate below to the inboard from the described open side of described casing; Thereby make described hand be moved upward the operation that described object substrate is raised to top, described support portion; Thereby and the hand that carries described object substrate is retreated to described open side from described inboard described object substrate is fetched into operation outside the described casing, described supporting operation (A) is to begin before the operation that described hand is entered to described inboard from the described open side of described casing.
Adopt the present invention, because supporting operation (A) is to begin before the operation that hand is entered to the inboard from the casing open side, so when hand enters, the object substrate that is positioned at its upside is supported in supporting operation (A), can fully guarantee the space that can supply hand to enter between the substrate of this object substrate and following one deck.
Take out of in the method for moving at substrate of the present invention, preferably the described operation of moving into comprises: make the hand that carries described object substrate enter and make described object substrate be positioned at the operation of top, described support portion to the inboard from the described open side of described casing; Thereby described hand is moved downwards described object substrate is carried on operation on the described support portion; And the operation that under the state below hand is positioned at described object substrate described hand is retreated from described inboard to described open side, described supporting operation (A) is that described hand was begun before the operation that described open side retreats from described inboard.
Adopt the present invention, because supporting operation (A) makes hand begin before the operation that described open side retreats from described inboard, so object substrate is being carried on the support portion and hand when retreating, the object substrate that is positioned at its upside is supported in supporting operation (A), can fully guarantee the space that can supply hand to retreat between this object substrate and next laminar substrate.
Substrate of the present invention is taken out of the method for moving into, preferably also comprise and take out of the described support portion of the described object substrate that will take out of in the operation or carry the supporting operation (B) that the substrate that carried on the support portion of the last layer of any described support portion in the described described support portion of moving into the described object substrate that will move in the operation supports carrying described, the operation of moving into of taking out of operation or described object substrate of described object substrate is carried out with this supporting operation (B).
Adopt the present invention, when substrate is taken out of, utilize supporting operation (B) that the substrate of object substrate last layer is supported, therefore, between object substrate and last layer substrate, can guarantee the hand that object substrate lifts is retreated required enough spaces.On the other hand, when substrate is moved into, utilize the substrate that is carried on the support portion of supporting operation (B) to the last layer of the intended support portion that will carry the object substrate of moving into to support, therefore, between hand that carries object substrate and the last layer substrate that supported, can guarantee that hand retreats required enough spaces.Therefore, substrate moves into and takes out of action and can carry out more reliably.
Substrate of the present invention is taken out of the method for moving into, preferably also comprise and take out of the described support portion of the described object substrate that will take out of in the operation or carry the decline operation that the substrate that carried on the support portion of following one deck of any described support portion in the described described support portion of moving into the described object substrate that will move in the operation is depressed carrying described, the operation of moving into of taking out of operation or described object substrate of described object substrate is carried out with described decline operation.
Adopt the present invention, when substrate is taken out of, utilize the decline operation that the substrate of one deck under the object substrate is depressed, therefore, can guarantee that between object substrate and next laminar substrate hand enters required enough spaces.On the other hand, when substrate was moved into, the substrate that is carried on one deck under the object substrate on the support portion after utilizing the decline operation to move into was depressed, and therefore, can guarantee that between object substrate and next laminar substrate hand retreats required enough spaces.Therefore, substrate moves into and takes out of action and can carry out more reliably.
Substrate of the present invention is taken out of the method for moving into, and best described supporting operation (A), described supporting operation (B) and described decline operation are by carrying out supporting or make it to descend from described casing inboard to the support part of drawing money on credit that described open side is extended.
Adopt the present invention, because supporting operation (A), supporting operation (B) and decline operation directly do not support or it are depressed substrate, but it is supported or makes its decline by the support part of drawing money on credit, therefore, not directly to the substrate application of stress, and, can support or make its decline equably to substrate integral body, can improve the precision of supporting operation (A), supporting operation (B) and decline operation.Therefore, substrate moves into and takes out of action and can carry out more reliably.
Substrate of the present invention is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with the support portion, and bearing substrate carries out multilayer and takes on the support portion of each layer, and have can be for the casing of opening of taking out of and move into described substrate, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise at least one operation that is selected from the following operation: the object substrate that will take out of or the object substrate of having moved into are supported, the supporting operation (A) in the space of guaranteeing to supply described hand to enter in the casing or retreating; The supporting operation (B) that the substrate that the support portion of the described support portion last layer that carries the described object substrate that will take out of or the described object substrate of having moved into is carried supports; And the decline operation depressed of the substrate that carries of the support portion that will carry one deck under the described support portion of the described object substrate that will take out of or the described object substrate of having moved into, take out of taking out of operation or carrying out of object substrate from described casing to operation at least one operation with being selected from this supporting operation (A), supporting operation (B) and decline operation of moving into that described casing is moved into object substrate.
Adopt the present invention,, therefore can enlarge the space that supplies robot to enter or retreat in the casing owing to taking out of operation and moving into operation at least one operation in being selected from supporting operation (A), supporting operation (B) and decline operation and carry out.The result is, thereby the spacing that can reduce each interlayer of multiple-structure increases the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate up and down the substrate and the support portion buffering of carrying upper and lower base plate and not cause these substrate damage, these substrates can be taken out of reliably and move into.In addition, the present invention can realize by increase at least one operation that is selected from supporting operation (A), supporting operation (B) and the decline operation on the basic structure of existing casing, need not use robot with special arm and mechanism, and, complicated mechanism need be set yet, take out of thereby can realize that the failure-free substrate is moved into low cost.
Substrate of the present invention is taken out of the method for moving into, and best described supporting operation (A), described supporting operation (B) and described decline operation are by carrying out supporting or make it to descend from described casing inboard to the support part of drawing money on credit that described open side is extended.
Adopt the present invention, because supporting operation (A), supporting operation (B) and decline operation directly do not support or it are depressed substrate, but it is supported or makes its decline by the support part of drawing money on credit, therefore, not directly to the substrate application of stress, and, can support or make its decline equably to substrate integral body, can improve the precision of supporting operation (A), supporting operation (B) and decline operation.Therefore, substrate moves into and takes out of action and can carry out more reliably.
Substrate of the present invention is taken out of the system of moving into, and it is characterized in that, comprising: with the predetermined distance multilayer be arranged with the support portion and on the support portion of each layer bearing substrate carry out that multilayer takes in and have can be for the casing of opening of taking out of and move into described substrate; Have the hand used of the described substrate of carrying, be used for the robot that described substrate was moved into or taken out of to described relatively casing; And carry out substrate at described robot and take out of or move into when action, between the described open side of described casing and inboard, guarantee to enter or the substrate in the space that retreats is taken out of and moved into auxiliary device for described hand.
Adopt the present invention, pass through casing, robot and substrate are taken out of and are moved into the space that auxiliary device can guarantee that the confession hand enters from side direction inboard, casing front, perhaps guarantee the space that the confession hand moves back to the rear flank, front from the casing inboard, therefore, can reduce the spacing of each interlayer of multiple-structure casing, increase the substrate reception quantity of unit space volume, and, even the spacing of each interlayer of multiple-structure is less, object substrate or the hand that carries it also can be accommodated in object substrate up and down the substrate and the support portion buffering of carrying upper and lower base plate and not cause these substrate damage, these substrates can be taken out of reliably and move into.
Take out of the system of moving at substrate of the present invention, best described substrate is taken out of and is moved into auxiliary device any object substrate in the object substrate that will take out of when described substrate is taken out of or the object substrate that will move into when described substrate is moved into is supported, thereby guarantees the space that enters or retreat for described hand in the casing.
Employing the present invention moves into auxiliary device because the substrate that increase is supported object substrate on the basic structure of existing casing is taken out of, thereby can guarantee the interior space that supplies robot to enter or retreat of casing.In addition, need not use robot with special arm and mechanism, and, existing other substrates need be set yet take out of the complex mechanism that uses in the method for moving into, can reduce the spacing of each interlayer of multiple-structure with low cost, increase the substrate reception quantity of unit space volume.
Take out of in the system of moving at substrate of the present invention, preferably substrate is taken out of and is moved into auxiliary device and support or make it to descend to the last layer of any support portion in the support portion that carries the object substrate that will take out of when substrate is taken out of or the support portion that carries the object substrate that will move into when described substrate is moved into or the substrate that carried on the support portion of one deck down, thereby guarantees the space that enters or retreat for described hand in the casing.
Adopt this invention, since to the last layer of the support portion of carrying object substrate or down the substrate of one deck support or make its decline, therefore utilizing hand to carry out substrate when taking out of and moving into, the space of object substrate and the substrate neighbouring with it is further enlarged.The result is, when taking out of object substrate, the space the when hand that carries substrate retreats in casing becomes big, and when moving into object substrate, the space the when hand that carries substrate enters in casing becomes big, and the taking out of of substrate moved into action and can be carried out more reliably.
Substrate of the present invention is taken out of the system of moving into, and preferably also comprises substrate taken out of moving into the control setup that auxiliary device and robot carry out interlock control.
Adopt this invention, because have substrate taken out of and move into the control setup that auxiliary device and robot carry out interlock control, so robot can go to the object substrate position of regulation according to program, move into auxiliary device the object substrate of regulation is supported thereby can take out of, correctly guarantee the space that enters and retreat for hand by substrate.
Substrate of the present invention is taken out of the system of moving into, and it is characterized in that, substrate is taken out of and moved near the peristome that auxiliary device is arranged on casing.At this moment, substrate is taken out of and is moved into auxiliary device and preferably have one or the slide mechanism more than the diaxon that is used at least one substrate is supported or makes its decline.
Substrate of the present invention is taken out of the system of moving into, and it is characterized in that, substrate is taken out of and moved into auxiliary device and be arranged on the robot.
Adopt this invention, move on other hands that auxiliary device is arranged on robot, take out of and move into auxiliary device, can improve the cost-cutting effect thereby substrate is set with can not needing corresponding each casing by substrate is taken out of.
In addition, take out of the method for moving into and substrate is taken out of in the system of moving into, preferably use following substrate to take out of and move into auxiliary device at substrate of the present invention.
Substrate of the present invention is taken out of and is moved into auxiliary device, preferably includes: be arranged to can with respect to the stacked multilayer of predetermined distance take in substrate and have and take out of the bar member that the substrate reception zone of the casing of the opening of moving into enters and retreats for described substrate; And the lifting mechanism that supports described bar member along the orientation of described substrate movably, the described relatively casing of robot that has the hand used of the described substrate of carrying in use is moved into or when taking out of described substrate, support or make it to descend by the described bar member that enters in the described substrate reception zone to described substrate, guarantee the space that enters or retreat for described hand in the described casing.
Adopt this substrate to take out of and move into auxiliary device; the bar member that utilization is supported by lifting mechanism is guaranteed or is enlarged the space that enters or retreat for described hand in the described casing; therefore, can reduce the spacing of each interlayer of the multiple-structure of substrate reception case, increase the quantity of taking in of unit space volume.And, can use robot to take out of, move into substrate reliably by this relatively substrate reception case.
Substrate of the present invention is taken out of and is moved into auxiliary device, and the driving of best described bar member by described lifting mechanism becomes to being selected from that described relatively casing is moved into or taken out of the object substrate of object, is accommodated in the substrate of described object substrate last layer, at least one substrate that is accommodated in the substrate of one deck under the described object substrate supports or make its decline.
Adopt this substrate to take out of and move into auxiliary device; according to the size of the substrate reception spacing of substrate size, casing and hand to object substrate, be accommodated in the substrate of object substrate last layer or at least one substrate of being accommodated in the substrate of one deck under the object substrate supports or make it to descend, enter and retreat required space thereby can guarantee or enlarge hand.And, support or make the substrate of its decline suitably to select according to the substrate reception spacing of substrate size, casing and the size of hand.
Substrate of the present invention is taken out of and is moved into auxiliary device, and best described bar member and described substrate butt support or make its decline to described substrate.
Adopt this substrate to take out of and move into auxiliary device, because bar member and substrate butt, support or make it to descend to substrate, need not increase new part, the space that can enter and retreat with the hand of simple formation expansion confession robot so can use existing casing.
Substrate of the present invention is taken out of and is moved into auxiliary device, being preferably in described casing has from its inboard to described open side and extends, is used to carry drawing money on credit during the support part of described substrate, described bar member and the described support part butt of drawing money on credit support or make its decline to the described support part of drawing money on credit.
Adopt this substrate to take out of and move into auxiliary device, because have the back brace molding box body that extends, is used for the support part of drawing money on credit of bearing substrate from the inboard to open side, back pole-bracket is supported or make its decline,, can guarantee the space that enters and retreat for hand reliably so substrate can not produce damage.
Take out of at substrate of the present invention and to move in the auxiliary device, best described lifting mechanism has and the crossbeam that is carried on the described substrate almost parallel in the described casing, and described bar member has: prolong the claw that setting from described crossbeam to the outstanding upright vertical support portion of establishing of the described substrate stacked direction of described casing and from the direction of its front end edge and described stacked direction almost parallel.
Adopt this substrate to take out of and move into auxiliary device, because the crossbeam that utilizes lifting mechanism is the cramp bar member reliably, and the bar member is made of vertical support portion and claw, so carrying out taking out of of substrate when moving into, can avoid the hand and the crossbeam of robot to produce buffering, can utilize claw reliably substrate to be supported or makes its decline.
Substrate of the present invention is taken out of and is moved into auxiliary device, is preferably in and is equipped with a plurality of described bar members on the described crossbeam.
Adopt this substrate to take out of and move into auxiliary device, because on crossbeam, be equipped with a plurality of bar members, so a plurality of bar members act on a plurality of positions approximate equality ground on the substrate to enlarge the space that the confession hand enters and retreats, therefore, can not apply excessive stress, can prevent the substrate breakage, take out of and move into substrate reliably substrate.
Take out of at substrate of the present invention and to move in the auxiliary device, best described vertical support portion is rotatably upright to be located on the described crossbeam, and described claw utilizes the rotation of this vertical support portion to drive to stretch out in described substrate reception zone.
Take out of at substrate of the present invention and to move in the auxiliary device, best described claw prolongs in described substrate reception zone from the front end of described vertical support portion and setting, and, described vertical support portion or described claw are carried out linear reciprocation by described relatively substrate reception zone and drive, thereby described claw stretches out in described substrate reception zone.
Take out of at substrate of the present invention and to move in the auxiliary device, best described claw can be rotated the earth's axis around the axle parallel with described crossbeam and prop up front end in vertical support portion, thereby and described claw be driven in rotation in described substrate reception zone and stretch out.
Take out of at substrate of the present invention and to move in the auxiliary device, the front end that is preferably in described claw is provided with roller.Like this, substrate can not produce damage, can carry out substrate reliably and move into the supporting and the decline of taking out of usefulness.
Take out of at substrate of the present invention and to move in the auxiliary device, best described crossbeam is provided with a plurality of along the stacked direction of described substrate.
Take out of at substrate of the present invention and to move in the auxiliary device, preferably described a plurality of crossbeams are driven lifting respectively independently.
Substrate of the present invention is taken out of and is moved into auxiliary device, preferably include control setup, what be used for substrate that relative described casing with described robot carries out moves into and takes out of lifting and the entering and retreating to described substrate reception zone of described bar member of controlling described lifting mechanism accordingly.
Substrate of the present invention is taken out of and is moved into auxiliary device, preferably with the relatively upright type that is set as of the described opening of described casing.
Substrate of the present invention is taken out of and is moved into auxiliary device, preferably is installed on the framework of the described opening that surrounds described casing.
Substrate of the present invention is taken out of and is moved into auxiliary device, preferably is installed on the housing seat of the described casing of carrying.
In addition, in this application, so-called " supporting " be meant from downside the support portion supported, but also comprise the meaning of lifting to a certain degree that the deflection that makes the support portion disappears.
Adopt this supporting, can enlarge the neighbouring substrate that is accommodated in the casing and the space between substrate, or the deflection of substrate is disappeared to guarantee the regulation space between adjacent substrate and substrate.In addition, to reach " decline " be in order to ensure the space of required amplitude the deflection of substrate to be operated or the meaning of revisal to desired orientation to " supporting " among the application.
The invention effect:
Adopt substrate of the present invention to take out of the method for moving into, can enlarge the space that enters or retreat for robot in the casing, therefore, thereby the spacing that can reduce each interlayer of multiple-structure increases the substrate reception quantity of unit space volume, and, move into substrate even also can take out of reliably this moment.In addition, the present invention can realize by increase the supporting operation on the basic structure of existing back brace molding box body, need not use the robot with special arm and mechanism, and, existing other substrates need be set yet take out of the complex mechanism that uses in the method for moving into, thereby can realize with low cost.
Adopt substrate of the present invention to take out of the system of moving into, can enlarge the space that enters from side direction inboard, casing front for hand or enlarge the space of moving back to the rear flank, front from the casing inboard by casing, robot and end position adjusting mechanism for hand, therefore, can reduce the spacing of each interlayer of multiple-structure casing, increase the substrate reception quantity of unit space volume, and, move into substrate even also can take out of reliably this moment.In addition, the present invention can realize by increase the end position adjusting mechanism on the basic structure of existing back brace molding box body, need not use robot with special arm and mechanism, and, existing other substrates need be set yet take out of the complex mechanism that uses in the method for moving into, thereby can realize with low cost.
Description of drawings
Fig. 1 is that expression substrate of the present invention is taken out of the block diagram that the method for moving into and substrate are taken out of the example that the device of the system of moving into constitutes.
Fig. 2 is that expression constitutes the approximate vertical view of an example that substrate of the present invention is taken out of the casing of the system of moving into.
Fig. 3 is that expression constitutes the summary side elevation of an example that substrate of the present invention is taken out of the casing of the system of moving into.
Fig. 4 is that expression constitutes the general principal view of an example that substrate of the present invention is taken out of the casing of the system of moving into.
Fig. 5 is the scheme drawing of the driving form of the robot that uses among the present invention of expression.
Fig. 6 is the right elevation (A) and the front view (B) of a concrete example of the robot that uses among the present invention of expression.
Fig. 7 is the birds-eye view of a concrete example of the robot that uses among the present invention of expression.
Fig. 8 is used to illustrate that substrate of the present invention takes out of the approximate vertical view of the method for moving into.
Fig. 9 is the instruction diagram that the substrate of first form is taken out of the method for moving into.
Figure 10 is the instruction diagram that the substrate of second form is taken out of the method for moving into.
Figure 11 is the instruction diagram that the substrate of the 3rd form is taken out of the method for moving into.
Figure 12 is the instruction diagram that the substrate of the 4th form is taken out of the method for moving into.
Figure 13 is the instruction diagram that the substrate of the 5th form is taken out of the method for moving into.
Figure 14 is the instruction diagram that the substrate of the 6th form is taken out of the method for moving into.
Figure 15 is the front view (transparent view) that expression is installed in a near example of the end position adjusting mechanism of casing peristome.
Figure 16 is the enlarged drawing (transparent view) of each key element of A part among Figure 15.
Figure 17 is the lateral plan (transparent view) of Figure 16.
Figure 18 is the enlarged drawing (transparent view) of each key element of B part among Figure 15, (a) is its birds-eye view, (b) is front view, (c) is lateral plan.
Figure 19 is the block scheme that expression substrate of the present invention is taken out of the control setup of the system of moving into.
Figure 20 is the figure that expression substrate of the present invention is taken out of the variation of moving into device.
Figure 21 is the figure that expression substrate of the present invention is taken out of the variation of moving into device.
Figure 22 is the figure that expression substrate of the present invention is taken out of the variation of moving into device.
Figure 23 is that another routine birds-eye view that substrate of the present invention is taken out of the casing of moving into device is used in expression.
Figure 24 is that the birds-eye view that substrate of the present invention is taken out of the another example of the casing of moving into device is used in expression.
(nomenclature)
1 substrate (object substrate), 2 housing seats
11 casings, 12,13,17,18,19 frameworks
14 short support portions 15,15a, 15b, the 15c support part of drawing money on credit
16,16a, 16b, 16c end 21 robots
22 hands, 23 hands fork
24 hand support portions, 25,26 arms
27 pedestals, 28 fixed frames
29 lifting shafts, 30 supporting members (bar member)
31 end position adjusting mechanisms (substrate is taken out of and moved into auxiliary device)
32 claws, 33 rollers
34 crossbeams, 35 linear steering devices
36 synchronous belts, 40 pillars
41 mapping sensors, 42 lifting drive sources (servomotor torque constant)
43 unitors, 44 bearings
46 of 45 reductors
47 timing belt pulleys, 48 balladeur trains
49 sliders, 50 cable supports
51 bearings, 52 coupler
53 unitors, 54 transmission shafts
55 frameworks, 61 cylinders
62 coupler, 63 bars
65 boom ends, 66 link components
67 pawl axle 67a pawls prolong and portion's (vertical support portion)
69 bearings, 70 controllers
71 robot controllers, 72 sequencers
82 bearing frames
The specific embodiment
With reference to the accompanying drawings substrate of the present invention being taken out of the method for moving into and substrate takes out of the example of the system of moving into and describes.Describe based on the illustration in the accompanying drawing below, but technical scope of the present invention is not defined as the illustration in following explanation and the accompanying drawing.
(substrate is taken out of the summary of the system of moving into)
Fig. 1 is that expression substrate of the present invention is taken out of the block diagram that the method for moving into and substrate are taken out of the example that the device of the system of moving into constitutes.As shown in Figure 1, substrate of the present invention is taken out of the method for moving into and substrate and is taken out of the basic comprising of the system of moving into and comprise: take in the casing 11 of multilager base plate 1, substrate 1 moved in the casing 11 or robot 21 that substrate 1 is taken out of in the casing 11 and the end position adjusting mechanism 31 that the support part of drawing money on credit of casing 11 is supported or made its decline.And end position adjusting mechanism 31 is connected with the controller 70 of its action of control, and robot 21 is connected with robot controller 71.Moreover in order to control both linkedly, sequencer 72 is connected with controller 70.
Among Fig. 1, arrow X represents that the hand 22 of robot 21 enters, retreats the direction of (following all will enter and/or retreat expression like this), and arrow Y represents the direction that robot 21 moves along the stacked direction of casing 11.In the example of Fig. 1, end position adjusting mechanism 31 is door type structure, crossbeam 34 in 40,40 oscilaltions of pillar of both sides is set at least, and end position adjusting mechanism 31 is configured in the front face side (robot side) of casing 11, and is installed on the housing seat 2.Casing 11 for example can utilize the transfer of automatic conveyance car on housing seat 2.In this example, end position adjusting mechanism 31 supports or makes its decline from the open side of taking out of and move into substrate 1 (front side) of casing 11 to the end of the support part of drawing money on credit (or support portion).
In this end position adjusting mechanism 31, the pillar 40,40 of door type structure and crossbeam 34 main composition lifting mechanisms 300.In addition, the crossbeam 34 of lifting mechanism 300 be provided with can with the front side end butt of the support part of drawing money on credit and the supporting member that can in the substrate reception zone of casing 11, enter, retreat.And; lifting mechanism 300 supports supporting member can move it along the stacked direction of substrate; utilize moving supporting or make it to descend of lifting mechanism 300, thereby guarantee the space that the hand 22 of robot 21 enters, retreats in casing 11 with the end of the support part of drawing money on credit of supporting member butt.In addition, crossbeam 34 can be one, but preferably is provided with two or three, at this moment, can guarantee the space that the hand 22 of robot 21 enters, retreats more well.
In this example, end position adjusting mechanism 31 carries out substrate as auxiliary robot 21 and takes out of the substrate of moving into and take out of and move into auxiliary device and play a role.This substrate is taken out of and is moved into auxiliary device owing to be provided with the supporting member that can enter, retreat in the substrate reception zone of casing 11, so be not limited to the formation that the end of the support part of drawing money on credit is supported or made its decline, also directly substrate 1 supported or makes the formation of its decline.In a word so long as move into for taking out of of assisting base plate 1 reliably; and act on the substrate 1 enlarging the deflection that multilayer is arranged the stacked spacing of the substrate of taking in or adjusted substrate (stacked), thereby guarantee that the space that the hand 22 of robot 21 enters, retreats gets final product.
Moreover, act directly on the substrate 1 to take out of and move into auxiliary device and not only can be applicable to back brace molding box body, use when also the substrate that can take in or carry making in the casing of patent documentation 3 and processing substrate processing unit (plant) etc. produces deflection with the support part of drawing money on credit with the substrate that it is supported or makes the formation of its decline.In addition, when the deflection of stacked spacing that enlarges substrate or adjustment substrate, its decline is supported or made in the position that is preferably in the deflection maximum to support portion or substrate.Especially in this example, its decline is supported or made in the end of front (opening) side of the support part of drawing money on credit or the open side of substrate.In this example, its decline is supported or made in the end of the support part of drawing money on credit, but be not defined as the end, can be the optional position of support part of drawing money on credit.
Take out of each device of the system of moving into and describe constituting substrate of the present invention below.
(substrate reception case)
At first the example that substrate of the present invention is taken out of the substrate reception case (hereinafter referred to as casing) that uses in the system of moving into describes.Fig. 2～Fig. 4 is that expression constitutes the skeleton diagram of an example that substrate of the present invention is taken out of the casing of the system of moving into.Particularly, Fig. 2 is the approximate vertical view of structure of the random layer of expression bearing substrate, and Fig. 3 is the summary side elevation that the form of multilager base plate is taken in expression, and Fig. 4 is the general principal view that the form of multilager base plate is taken in expression.
In the structure of the random layer of bearing substrate 1, substrate 1 usefulness of representing with long and two-short dash line among Fig. 2 is supported and taken in by the support portion that the short support portion 14 and the support part 15 of drawing money on credit constitute.From robot 21, short support portion 14 is provided with a plurality of from the inboard to the front side direction with from the inwardly square form of extending in the left and right sides of casing 11 on left and right sides framework 12 with prescribed distance.The length of short support portion 14 does not have particular determination, but but preferably be arranged to stable support substrate 1 at least and not with hand fork 23 length that contact of both sides.The prescribed distance that each short support portion is 14 does not have particular determination yet, but but preferably is arranged to the spacing of stable support substrate 1 at least.For example preferably use the bar type of light weight and high-intensity aluminum alloy system or carbon material (graphite shaft etc.) etc. as lacking support portion 14, its front end preferably is provided with the rubber elastomeric material to prevent and substrate 1 generation contact damage.
From robot 21, the form of support part 15 to extend to the peristome 19a of front side from the inboard of casing 11 of drawing money on credit is provided with a plurality of at the left and right sides Width of inboard framework 13 upper edge substrates 1 with prescribed distance.The length of support part 15 of drawing money on credit preferably extends to the position that aftermentioned end position adjusting mechanism 31 can support, and preferably extends to usually and front side frame body 19 position overlapped.Do not have particular determination in a plurality of spacings of support part 15 on substrate 1 left and right sides Width of drawing money on credit that are provided with on the inboard framework 13, but preferably be arranged to prescribed distance, replace mutually when seeing bowing with the hand fork of representing with long and two-short dash line among Fig. 2 23.For example preferably use the bar type of light weight and high-intensity aluminum alloy system or carbon material (graphite shaft etc.) etc. as the support part 15 of drawing money on credit, be preferably in a side that contacts with substrate 1 at least and the rubber elastomeric material be set to prevent and substrate 1 produces contact damage.This support part 15 of drawing money on credit has the end of being supported by end position adjusting mechanism 31 16, but as shown in Figure 2, this end 16 can be the member of the little circle of diameter, also the identical member of diameter.Moreover, using directly when substrate 1 supported or make the substrate of its decline to take out of to move into device, can save end 16, the length of the support part 15 of drawing money on credit there is no need to be made into the peristome that arrives casing 11.At this moment, can suppress the cost of the support part 15 of drawing money on credit lower.
As shown in Figures 3 and 4, casing 11 is that the layer that will be made of the short support portion 14 of bearing substrate 1 and the support part 15 of drawing money on credit is laminated into multi-lamellar structure with prescribed distance.
The spacing of each layer of bearing substrate 1 on stacked direction do not have particular determination, as long as set hand fork 23 intervals that enter, retreat that can allow hand 22 for.In addition, in this example, owing to use aftermentioned end position adjusting mechanism 31, thus the spacing of each layer (substrate is stacked) can be set at narrow relatively spacing at the substrate 1 that maximizes.Therefore, casing 11 can be designed to reduce the spacing of each layer, increases the substrate reception quantity of unit space volume, thereby can easily tackle the volume increase of substrate.
(substrate is taken out of and is moved into auxiliary device)
Below with reference to Fig. 2 to Fig. 4 the summary of taking out of the end position adjusting mechanism 31 of moving into auxiliary device as substrate in this example is described.Moreover, the diagram of omission substrate 1 in Fig. 3.End position adjusting mechanism 31 is mainly by supporting member 30 with open descending mechanism 300 and constitute, and is arranged on sacrificial vessel and has near the peristome 19a of front side frame body 19 of the casing 11 that the hand 22 of hand fork 23 comes in and goes out.
Supporting member 30 is arranged on crossbeam 34 and the end support part 15 of drawing money on credit the 16 cooresponding parts, support or make it to descend with driving to the end 16 of the support part 15 of drawing money on credit, and this supporting member 30 can enter, retreat in the substrate reception zone of casing 11 by lifting mechanism 300.And, supporting member 30 in entering the substrate reception zone of casing 11 time with draw money on credit support part 15 butts, can support or make its decline to the support part 15 of drawing money on credit.This supporting member 30 is arranged on the position identical with the end 16 of the support part 15 of drawing money on credit at different levels, in order to support or to make its decline and the quantity identical with the support part 15 of drawing money on credit of each layer is set at different levels all support parts 15 of drawing money on credit.The shape and the length of supporting member 30 do not have particular determination, but as shown in Figure 3, preferably form with the length of counting about cm.In addition, on crossbeam 34, also be provided with mapping sensor 41, thereby can detect the position that is accommodated in the substrate 1 in the casing 11.
This end position adjusting mechanism 31 moves, be used for adjusting 16 positions, end of the support part 15 of drawing money on credit that constitutes specified layer or be accommodated in the end position of the substrate 1 of this layer, space that the hand 22 that sacrificial vessel is had a hand fork 23 enters from the side direction inboard, front of casing 11 and/or the space enlargement of moving back to the rear flank, front from the inboard.For example, as shown in Figures 3 and 4, when the support part 15a that draws money on credit that begins several second layer substrate 1a from the superiors in the crossbeam 34 of lifting mechanism 300 and 30 pairs of carryings of supporting member supports, substrate 1c of one deck is carried on the support part 15c that draws money on credit with deflected under it, therefore, space between substrate 1a and substrate 1c is extended to enough big, and hand fork 23 can enter reliably, retreat.In addition, in the end position adjusting mechanism 31 of this example, other not shown crossbeams and supporting member support the support part 15b that draws money on credit of the substrate 1b of the superiors, and also can fully guarantee the space between substrate 1a and substrate 1b.
At this, the layer below the support part 15c that draws money on credit of bearing substrate 1c also carrying is taken in substrate 1 (omitting diagram among Fig. 3), and becomes deflected.That is, its support part 15 of drawing money on credit of the substrate taken in 1 and carrying from the inboard of casing 11 to the tiltedly deflection that has a down dip of front side direction, and deflection from about short support portion 14 become big (with reference to Fig. 4) to substrate center.The space of each interlayer of this casing 11 is originally for the entering, retreat of hand fork 23 and insufficient, but the crossbeam 34 of the lifting mechanism 300 by end position adjusting mechanism 31 and the supporting of supporting member 30 can be guaranteed for hand fork 23 spaces that enter, retreat.
This end position adjusting mechanism 31 can be holded up setting from housing seat 2 as shown in Figure 1, also can be arranged on the front side frame body 19 of casing 11.As Fig. 2～shown in Figure 4, this end position adjusting mechanism 31 is arranged near the peristome of casing 11, descends at least one end 16 (16a, 16b, 16c) being supported or make it, has one or the above lifting mechanism 300 of diaxon.Be located near the end position adjusting mechanism 31 of casing 11 peristomes preferably also with the above a plurality of slide mechanisms of diaxon.
(substrate transferring robot)
Below substrate of the present invention being taken out of the substrate transferring robot that uses in the system of moving into describes.Can realize that substrate of the present invention takes out of the hand of the method for moving into as long as the robot that uses among the present invention has, not have particular determination, can use the robot of various forms.
Fig. 5 is the scheme drawing of the driving form of the robot that uses among the present invention of expression.Robot 21 can have a hand, but preferably has two hand 22a, 22b as shown in Figure 5.In Fig. 5, robot 21 has: the first hand 22a that the 24a of hand support portion that four hands fork 23a will be installed drives with two arm 25a, 26a and the 24b of hand support portion of four hands fork 23b will be installed equally with the second hand 22b of two arm 25b, 26b drivings (below will have the hand that hand pitches and not have only to be called " hand " under the situation of specified otherwise).To take out of the system of moving into identical with existing substrate, takes out of in the system of moving at substrate of the present invention, also preferably uses the robot 21 with two hand 22a, 22b.Robot 21 with two hand 22a, 22b is moved into so can take out of efficiently because each hand 22a, 22b move independently.Symbol 27 expression pedestals in Fig. 5.
Fig. 6 and Fig. 7 are right elevation (Fig. 6 (A)), front view (Fig. 6 (B)) and the birds-eye vieies (Fig. 7) of a concrete example of the robot with end position adjusting mechanism that uses among the present invention of expression.Formation mark prosign for identical with the substrate transferring robot of Fig. 5 omits its detailed description.This robot 21 has two hand 22a, 22b, also comprises end position adjusting mechanism 31.Two hand 22a, 22b are installed on the lifting shaft 29, thereby are installed on the pedestal 27.Pedestal 27 utilizes holding-down bolt etc. to be fixed on fixed frame 28 or the fixed guide.On the other hand, end position adjusting mechanism 31 is configured near the front end of hand fork, has the sliding component 35a that this end position adjusting mechanism 31 is stretched.In addition, end position adjusting mechanism 31 has the lift component 35 that is used for the end 16 of the support part 15 of drawing money on credit is supported or made its decline.And, be equipped with the crossbeam 34 of supporting member 30 in the front end setting of lift component 35.In the present invention, can make the end position adjusting mechanism 31 flexible mechanisms' (lift component 35) that reach lifting owing to have, so can support or make its decline to the end 16 of the support part 15 of drawing money on credit, at hand 22a, 22b substrate is taken out of when moving into, can carry out this reliably and take out of and move into.In addition, hand fork for example can be made of the composite material of carbon fiber and resin etc., can realize high rigidity and lightweight, but not have particular determination, also can use metal etc.
In the present invention, use Figure 6 and Figure 7 have the robot 21 of end position adjusting mechanism 31 time, there is no need Fig. 1～end position adjusting mechanism 31 shown in Figure 4 is arranged near the casing 11.
(substrate is taken out of the method for moving into)
Below the substrate of the present invention that utilizes aforesaid substrate to take out of the system of moving into being taken out of the method for moving into describes.Fig. 8 is used to illustrate that substrate of the present invention takes out of the approximate vertical view of the method for moving into.This figure is the birds-eye view (A) of formation of expression one deck of taking in substrate and left view (take out of move into the figure that direction is seen from substrate), and the form of its decline is supported or made in expression by three supporting members 30 of end position adjusting mechanism 31 from three support parts 15 of drawing money on credit that the inboard framework 13 of casing 11 is extended.The hand of the hand 22 of robot 21 fork 23 equally spaced is provided with four with the form across the support part 15 of respectively drawing money on credit.In each form shown below, the position that the end position adjusting mechanism is set does not have particular determination, can be arranged near the peristome of casing, can be arranged on the robot yet.In addition, the substrate that is carried on draw money on credit support part 15 and the short support portion 14 omits diagram.
Fig. 9～Figure 14 is each routine schematic illustration that expression substrate of the present invention is taken out of the method for moving into.Diagram is omitted in the deflection that produces when being carried on the casing 11 for aforesaid substrate 1.Substrate of the present invention is taken out of the method for moving into and has been to use above-mentioned relatively casing 11 substrate to be moved into and taken out of the method for the robot 21 of usefulness, it is characterized in that: comprise the supporting operation A that the front side end 16a of the support part 15a that draws money on credit that will carry object substrate 1a or the front side end 16a that carried the support part 15a that draws money on credit of object substrate 1a is supported, enlarges in the casing space that enters for hand 22 or retreat, the taking out of operation and move into operation and carry out of object substrate with supporting operation A.First form～the 6th form that substrate with this feature is taken out of the method for moving into describes successively.
Fig. 9 is the instruction diagram that the substrate of first form is taken out of the method for moving into.The moving direction (identical in following Figure 10～Figure 14) of hand 22 when arrow H represents that substrate is taken out of among the figure.Taking out of operation comprises: the supporting operation A that the end 16a of the support part 15a that draws money on credit that carries object substrate 1a is supported; Thereby make hand 22 enter the operation (S1) that is positioned at the below that is carried on the object substrate 1a on the support part 15a that draws money on credit from the side direction inboard, front of casing; Make hand 22 be moved upward (S2) thus object substrate 1a is raised to the operation (S3) of the support part 15a top of drawing money on credit; And make the hand 22 that carries object substrate 1a move back (S4) to the rear flank, front from the inboard thus object substrate 1a is fetched into operation (S5) outside the casing, these operations are carried out in proper order according to this.Take out of in the operation at this, A can enlarge the space that the hand 22 for empty in the casing enters by the supporting operation, and therefore, hand 22 can not contact with support portion (short support portion 14 and draw money on credit support part 15b, 15c) with the substrate 1b, the 1c that are carried on levels.The result is to take out of operation reliably.
This supporting operation A that takes out of in the operation is supporting member 30 operation that the end 16a of support part 15a kept or kept with lifting a little in its position of will drawing money on credit, in first form of Fig. 9, take out of supporting operation A in the operation to begin be in the operation (S1) that hand 22 is entered from side direction inboard, front before, the releasing of taking out of the supporting operation A in the operation be object substrate 1a is fetched into outside the casing operation (S5) afterwards.
Move into operation to carry out, to the opposite sense driving hand 22 of arrow H with the above-mentioned opposite order of operation of taking out of.At first, moving into operation comprises: the supporting operation A that the end 16a of the support part 15a that draws money on credit that will carry object substrate 1a is supported; The hand 22 that carries object substrate 1a is entered from the side direction inboard, front of casing and object substrate 1a is positioned at draw money on credit the operation (S5 and S4) of support part 15a top; Thereby hand 22 is moved downwards object substrate 1a is carried on operation (S3) on the support part 15a that draws money on credit; And the operation (S1) that under the state (S2) below hand 22 is positioned at object substrate 1a hand 22 is moved back from the inboard to the rear flank, front, these operations are carried out in proper order according to this.Move in the operation at this, by supporting operation A, the support part 15a that draws money on credit of carrying object substrate 1a can deflection, so object substrate 1a can be carried on reliably on this support part 15a that draws money on credit.In addition, can prevent after object substrate 1a being carried on draw money on credit support part 15a and the short support portion 14, the space enlargement that the hand 22 for empty in the casing retreats or dwindle, therefore, hand 22 can not contact with draw money on credit up and down support part 15b, 15c.The result is to move into operation reliably.
With carry out above-mentioned identical when taking out of operation, move into supporting operation A in the operation and be supporting member 30 operation that the end 16a of support part 15a kept or kept with lifting a little in its position of will drawing money on credit, in first form of Fig. 9, move into supporting operation A in the operation begin be the operation (S4) that enters from side direction inboard, front at the hand 22 that carries object substrate 1a before, the releasing of moving into the supporting operation A in the operation be the hand 22 with sky be fetched into outside the casing operation (S1) afterwards.
Figure 10 is the instruction diagram that the substrate of second form is taken out of the method for moving into.In the method for this second form take out of operation in the method for the time of removing supporting operation A and above-mentioned first form take out of operation slightly different, identical with the method for first form, so the part of repetition omission explanation.That is, the operation of taking out of in the method for second form comprises: the supporting operation A that the end 16a of the support part 15a that draws money on credit that carries object substrate 1a is supported; Make hand 22 enter and be positioned at the operation (S1) of the below that is carried on the object substrate 1a on the support part 15a that draws money on credit from the side direction inboard, front of casing; Make hand 22 be moved upward (S2) thus object substrate 1a is raised to the operation (S3 and S4) of the support part 15a top of drawing money on credit; Lift the operation that operation is removed supporting operation A side by side or after lifting operation with this; Thereby and the hand 22 that carries object substrate 1a is moved back to the rear flank, front from the inboard object substrate 1a is fetched into operation (S5) outside the casing, these operations are carried out in proper order according to this.Take out of in the operation at this, because the front deflection downwards of the support part 15a that draws money on credit behind the releasing supporting operation A, so the hand 22 of carrying object substrate 1a can retreat reliably.
Move into operation and also be in the method for time of beginning except that supporting operation A and above-mentioned first form move into operation slightly different, identical with the method for first form, so the part of repetition omission explanation.That is, the operation of moving in the method for second form comprises: the operation (S5 and S4) that the hand 22 that carries object substrate 1a is entered from the side direction inboard, front of casing; The supporting operation A that the end 16a of the support part 15a that draws money on credit that will carry object substrate 1a is supported; Thereby with this supporting operation A side by side or after supporting operation A, make the mobile operation (S3) that object substrate 1a is carried on the support part 15a that draws money on credit of hand 22 downwards; And the operation (S1) that under the state (S2) below hand 22 is positioned at object substrate 1a hand 22 is moved back from the inboard to the rear flank, front, these operations are carried out in proper order according to this.Move in the operation at this, take out of the method for moving into the substrate of above-mentioned first form and compare, the entering of hand 22 that carries object substrate 1a can be carried out more reliably.
Figure 11 is the instruction diagram that the substrate of the 3rd form is taken out of the method for moving into.The method of the 3rd form taking out of operation and move on the basis of operation in the method for above-mentioned first form and second form, be characterised in that: also comprise will carrying the support part 15a or carried the supporting process B that the front side end 16b of the support part 15b that draws money on credit of last layer of the support part 15a that draws money on credit of object substrate 1a supports of drawing money on credit of object substrate 1a, take out of operation and the operation of moving into that object substrate 1a moves in the casing is carried out with this supporting process B what object substrate 1a took out of in the casing.
The method of the 3rd form has the beginning and the releasing of above-mentioned supporting process B and supports the feature that operation A carries out simultaneously, and other aspects are identical with the method for first form and second form.Adopt the method for the 3rd form, because also comprise the supporting process B that the front side end 16b to the support part 15b that draws money on credit of last layer supports, so when utilizing hand 22 to carry out taking out of and moving into of substrate, the space of the support part 15b that draws money on credit of drawing money on credit support part 15a or having carried draw money on credit support part 15a and its last layer of object substrate 1a that will carry object substrate 1a is further enlarged.The result is, when taking out of object substrate 1a, it is big that the space when retreating in casing for the hand 22 that carries substrate becomes, when moving into object substrate 1a, it is big that space when entering in casing for the hand 22 that carries substrate becomes, and can carry out these actions more reliably.In addition, in Figure 11, flow process (1) is to carry out with the time of first homomorphosis.Flow process (2) is to carry out with the time of second homomorphosis.
Figure 12 is the instruction diagram that the substrate of the 4th form is taken out of the method for moving into.The method of the 4th form taking out of operation and move on the basis of operation in the method for the 3rd form shown in Figure 11, be characterised in that: also comprise the support part 15a or carried the decline operation that the front side end 16c of the support part 15c that draws money on credit of following one deck of the support part 15a that draws money on credit of object substrate 1a depresses of drawing money on credit that will carry object substrate 1a, take out of operation and the operation of moving into that object substrate 1a moves in the casing is carried out with this decline operation what object substrate 1a took out of in the casing.
The method of the 4th form has the beginning of above-mentioned decline operation and removes and support operation A and support the feature that process B is carried out simultaneously, and other aspects are identical with the method for above-mentioned the 3rd form.Adopt the method for the 4th form, because also comprise the decline operation that the following front side end 16c of the support part 15c that draws money on credit of one deck depresses, so when utilizing hand 22 to carry out taking out of and moving into of substrate, draw money on credit support part 15a and its of drawing money on credit support part 15a or having carried object substrate 1a that will carry object substrate 1a are further enlarged in the space of the support part 15c that draws money on credit of one deck down.The result is, when taking out of object substrate 1a, it is big that the space when retreating in casing for the hand 22 that carries substrate becomes, when moving into object substrate 1a, it is big that space when entering in casing for the hand 22 that carries substrate becomes, and can carry out these actions more reliably.
Figure 13 is the instruction diagram that the substrate of the 5th form is taken out of the method for moving into.The method of the 5th form is taken out of operation and is moved in the operation the method for the 4th form shown in Figure 12, to will carry object substrate 1a draw money on credit support part 15a or carried supporting operation A that the support part 15a that draws money on credit of object substrate 1a supports begin and the releasing time identical with the method for above-mentioned second form.
That is, the operation of taking out of in the method for the 5th form comprises: the supporting operation A that the end 16a of the support part 15a that draws money on credit that carries object substrate 1a is supported; The supporting process B that side by side the end 16b of the support part 15b that draws money on credit of this support part 15a last layer of drawing money on credit is supported with this supporting operation A; With this supporting operation A, the B decline operation that the end 16c of the support part 15c that draws money on credit of one deck depresses under the 15a of support part of side by side this being drawn money on credit; Make hand 22 enter and be positioned at the operation (S1～S2) of the below that is carried on the object substrate 1a on the support part 15a that draws money on credit from the side direction inboard, front of casing; Thereby make hand 22 be moved upward the operation (S3 and S4) that object substrate 1a is raised to the support part 15a top of drawing money on credit; Lift the operation that operation is removed supporting operation A side by side or after lifting operation with this; Thereby and the hand 22 that carries object substrate 1a is moved back to the rear flank, front from the inboard object substrate 1a is fetched into operation (S5) outside the casing, these operations are carried out in proper order according to this.And, remove supporting process B and decline operation at last.
In addition, the operation of moving in the method for the 5th form comprises: the supporting process B that the end 16b of the support part 15b that draws money on credit of the support part 15a last layer of drawing money on credit that will carry object substrate 1a is supported; With this supporting process B decline operation that the end 16c of the support part 15c that draws money on credit of one deck depresses under the 15a of support part of side by side this being drawn money on credit; Make the hand 22 that carries object substrate 1a enter into the operation (S5 and S4) of the top position of the support part 15a that draws money on credit that carries object substrate 1a from the side direction inboard, front of casing; The supporting operation A that the end 16a of the support part 15a that draws money on credit of carrying object substrate 1a is supported; Thereby with this supporting operation A side by side or after supporting operation A, make the mobile operation (S3) that object substrate 1a is carried on the support part 15a that draws money on credit of hand 22 downwards; And the operation (S1) that under the state (S2) below hand 22 is positioned at object substrate 1a hand 22 is moved back from the inboard to the rear flank, front, these operations are carried out in proper order according to this.And, remove supporting operation A, B and decline operation at last.
The method of the 5th form is when carrying out the taking out of operation or move into operation of substrate, and in the time of hand 22 can being entered and the space in when retreating enlarges significantly, thereby can carry out these actions more reliably.
Figure 14 is the instruction diagram that the substrate of the 6th form is taken out of the method for moving into.The method of the 6th form is different with the method for above-mentioned first～the 5th form, be characterised in that: comprise carrying the support part 15a or carried the decline operation that the end 16c of the support part 15c that draws money on credit of following one deck of the support part 15a that draws money on credit of object substrate 1a depresses of drawing money on credit that draws money on credit support part 15a or carried the supporting process B that the end 16b of the support part 15b that draws money on credit of last layer of the support part 15a that draws money on credit of object substrate 1a supports and will carry object substrate 1a of object substrate 1a, the end 16a to the support part 15a that draws money on credit does not support or makes its decline.In the 6th form, also can not implement to support process B and decline operation both sides simultaneously, and implement wherein either party's operation.
The invention of the 6th form is unlike the method for above-mentioned first～the 5th form, the support part 15a that draws money on credit that draws money on credit support part 15a or carried object substrate 1a that will carry object substrate 1a is supported, and the support part 15b that draws money on credit of this support part 15a last layer of drawing money on credit is supported, and the support part 15c that draws money on credit of one deck is descended.By this supporting process B and/or decline operation, can make the support part 15b that draws money on credit of draw money on credit support part 15a and last layer reach the space of the support part 15c that draws money on credit of one deck further to enlarge.The result is, when carrying out the taking out of and move into of object substrate 1a, enters or the space that retreats becomes big for hand 22, thereby can carry out these actions reliably.In addition, in the 5th form, supporting process B and decline operation are carried out before being preferably in S1, remove after S4 or S5.
As mentioned above, adopt substrate of the present invention to take out of the method for moving into,, also can carry out taking out of and moving into of substrate reliably even when the spacing that is designed to each layer in use reduces casing with the substrate reception quantity that increases the unit space volume.
Like this, the present invention can realize by increase the end position adjusting mechanism on the basic structure of existing back brace molding box body, therefore, need not use robot with special arm and mechanism, and, existing other substrates need be set take out of the complex mechanism that uses in the method for moving into, thereby can realize low cost.
(end position adjusting mechanism)
Take out of an example of moving into auxiliary device as substrate below and describe the end position adjusting mechanism that the front side end of the support part of drawing money on credit is supported or makes its decline in detail.As mentioned above, end position adjusting mechanism 31 is to be used to enlarge the space that enters from the side direction inboard, front of casing 11 for hand 22 and the device in the space of moving back to the rear flank, front from the inboard of casing 11 for hand 22, as described in the method for above-mentioned first form～the 6th form, be the device that its decline was supported or made at least one end among the end 16c of the support part 15c that draws money on credit of one deck under the end 16b of the support part 15b that draws money on credit of end 16a, this support part 15a last layer of drawing money on credit to the support part 15a that draws money on credit of carrying object substrate 1a and this support part 15a that draws money on credit.
This end position adjusting mechanism 31 also can be located at as the form on the housing seat 2 that is located at Fig. 1 near the front side opening portion of casing 11, also can be arranged on the robot as the form of Figure 6 and Figure 7.When near the peristome 19a that end position adjusting mechanism 31 is located at casing 11, because of one or the above a plurality of lifting mechanisms of diaxon being set so better.In addition, when being located at the end position adjusting mechanism on the robot, by the end position adjusting mechanism being located at the front end of other hands of robot, thereby do not need corresponding each casing that the end position adjusting mechanism is set, so the raising of cost-cutting effect.
Figure 15 is the front view that expression is installed in a near example of the end position adjusting mechanism 31 of casing peristome, and Figure 16～Figure 18 is the enlarged drawing of each key element of end position adjusting mechanism.Figure 16 is the enlarged drawing of A part among Figure 15, and Figure 17 is the lateral plan of Figure 16.Figure 18 is the enlarged drawing of B part among Figure 15, and Figure 18 (a) is its birds-eye view, and Figure 18 (b) is a front view, and Figure 18 (c) is a lateral plan.In addition, these Figure 15～Figure 18 are transparents view, the expression inner structure.
End position adjusting mechanism 31 is installed on the front side frame body 19 of casing, is installed in it and moves near the peristome 19a that takes out of substrate, moves linkedly so that its decline is supported or made in the end 16 of the support part 15 of drawing money on credit with the action of robot.End position adjusting mechanism 31 also can relatively stand with the framework 19 of casing 11 and be located at (with reference to Fig. 1) on the housing seat 2.In addition, the end 16 of the also alternative support part 15 of drawing money on credit is as substrate being supported or makes the end position adjusting mechanism of its decline play a role from peristome 19a side.In addition, symbol 41 is mapping sensors, is used to detect substrate position.
End position adjusting mechanism 31 forms door type structure, has: be installed in the left and right sidesing pillar 40,40 on the front side frame body 19 of casing; And be erected at the crossbeam 34 that can move and have a plurality of bar members 30 as supporting member between the two along the stacked direction of substrate.In this example, crossbeam 34 constitutes can strut bar members 30 and make the part of its lifting mechanism 300 that moves along the stacked direction of substrate, and downside crossbeam 34a and upside crossbeam 34b link into an integrated entity at above-below direction by transom 34c spaced apartly.Pillar 40 and crossbeam 34 form hollow shape, are built-in with the driver train of slide mechanism 400 described later and bar member 30 in inside.Because adopt the formation of built-in these mechanisms, thereby can suppress to produce dust because of the driving of end position adjusting mechanism 31, the desired cleaning ambient of Fabrication procedure of display panels and Plasmia indicating panel (PDP) can not polluted.
Conduct makes the slide mechanism 400 of crossbeam 34 liftings that pair of right and left linear guide apparatus (linear motion guidance device) is set on left and right sidesing pillar 40,40, the slider 49 that this linear guide apparatus has guide rail 35 and is made of three balladeur trains 48 that slide on this guide rail 35.In addition, be provided with the belt pulley 47a of transmission, rotate freely the earth's axis at the other end and propped up driven pulley 47b from the propulsive effort of lifting drive source 42 at an end of pillar 40,40.And, between belt pulley 47a and driven pulley 47b, synchronous belt 36 being installed, the two ends of this synchronous belt 36 are connected on the slider 49, thereby form the endless belt shape.Therefore, can to follow the substrate stacked direction that is rotated in of the belt pulley 47a that drive source drives be that upper and lower moves up to slider 49.And slider 49 is supporting crossbeam 34 ground and is carrying out lifting.Crossbeam 34 expressions that topmost dots among Figure 15 rise to the crossbeam 34 of topmost.
In left and right sidesing pillar 40,40, have space to a certain degree, go into to have movably cable support 50 at the spatial interpolation of side's lateral brace 40.Cable support 50 is used to tie circle and takes in the various cables etc. that the air supply pipe that drives aftermentioned bar member 30 and the signal wire (SW) of mapping sensor 41 etc. are used to control crossbeam 34, the one end is connected on the slider 49, and the other end is fixed on the inwall of the pillar 40 relative with guide rail 35.The lifting moving that cable support 50 is followed slider 49 moves in pillar 40, is arranged to not hinder its lifting moving.
Below with reference to Figure 16 the lifting drive source 42 of slide mechanism 400 is described.The lifting drive source 42 of this example is a servomotor torque constant 42.The driven in rotation of this servomotor torque constant 42 passes to reductor 45 by unitor 43 and bearing (supporting component) 44.Pass to the belt pulley 47a of left and right sidesing pillar 40,40 from the rotary driving force of servomotor torque constant 42 by being connected axle 46 on the reductor 45.And the rotation that slider 49 is followed belt pulley 47a is driven by lifting.The belt pulley 47a that is positioned at the pillar 40 on right side among Figure 15 is arranged to direct connection and is rotated driving at axle 46 1 ends.On the other hand, the belt pulley 47a that is positioned at the pillar 40 in left side among Figure 15 is rotated driving by being connected bearing (supporting component) 51, coupler 52, unitor 53 and the transmission shaft 54 of axle on 46 other ends.In addition, from dustproof aspect, reductor 45, bearing (supporting component) 51, coupler 52, coupler 53 and transmission shaft 54 etc. are preferably identical with pillar 40 and crossbeam 34 to be housed in the framework 55 of hollow shape.
In this example, lifting drive source 42 is arranged on the outside of pillar 40, but also can be arranged in the space in the pillar 40.In addition, both can utilize respectively lifting drive source independently to drive slide mechanism 400 in the left and right sidesing pillar 40, also can be by the linear motor direct drive.Like this, the lifting drive source is not defined as servomotor torque constant, can use the various distortion of DC electrical motor or linear motor etc. yet.Similarly, lift drive mechanism is not defined as this example yet.
Figure 17 is the side enlarged drawing of end position adjusting mechanism 31.End position adjusting mechanism 31 utilizes mounting tools 81 for example to be fixed on the front side frame body 19 of casing.In addition, the fixing means and the fixed position of end position adjusting mechanism 31 do not have particular determination, can be installed in the side of housing seat 2 yet.
Shown in the enlarged drawing of Figure 16, the downside crossbeam 34a of crossbeam 34 and upside crossbeam 34b link into an integrated entity at above-below direction by transom 34c spaced apartly.On downside crossbeam 34a and upside crossbeam 34b, relatively be provided with the bar member 30 (with reference to Figure 15) as supporting member of equal number respectively up and down with predetermined distance.Bar member 30 be end position adjusting mechanism 31 produce action when supporting or making it to descend to draw money on credit support part 15 or substrate, with draw money on credit the support part 15 or substrate butt supports it or the member of the state that keeps descending.
The two ends of this crossbeam 34 are connected on the device 49 that horizontally slips by bearing frame 82.Like this, crossbeam 34 can move on the substrate stacked direction by the lifting of slider 49.Y-axis bolster 82 is used for when the lifting moving volume production of the device 49 that horizontally slips is given birth to error this error being carried out revisal, absorbs the stress that produces between crossbeam 34 and the slider 49, thus make the device 49 that horizontally slips driving, be that the lifting action of crossbeam 34 becomes smooth.
Below with reference to Figure 16 and Figure 18 bar member 30 and driver train thereof as supporting member are described.Figure 18 (a) and (b), the bar member 30 (supporting member) when the relative casing 11 of (c) expression does not stretch out.In addition, though bar member 30 is separately positioned on downside crossbeam 34a and the upside crossbeam 34b, its formation and driving are identical, below the bar member 30 of crossbeam 34 are described further.
Draw money on credit support part 15 or object substrate when supporting or making it to descend 30 pairs of bar members, pawl prolongs the 67a of portion and as vertical support portion crossbeam 34 and claw 32 are separated fully, can carry out the supporting or the decline of substrate under the state that hand 22 that enters or retreat and crossbeam 34 not have to cushion.Therefore, it is so to determine that pawl prolongs the length that the 67a of portion: the stacked spacing of the interval by selecting downside crossbeam 34a and upside crossbeam 34b, the substrate 1 in the casing 11 and as the substrate of the adjustment object of end position adjusting mechanism 31, can guarantee the space of allowing that hand 22 enters, retreats.At this, the selection of hand position is meant that selection is to the object substrate of moving into object supports, still the substrate to the object substrate last layer supports or makes the substrate of one deck under the object substrate to descend, still is with the combination of these supportings and decline as taking out of.In addition, downside crossbeam 34a and upside crossbeam 34b are arranged to: the hand 22 that robot 21 can be allowed in interval between the two by and can support or make its decline to the substrate of the layer adjacent with being configured in bar member 30 on each crossbeam.
The center fixed of the part of axle on bearing 69,69 of pawl axle 67 have can with the link component 66 of pawl axle 67 one rotation.The end of the opposition side that is fixed on the side on the pawl axle 67 of link component 66 movably is connected with the boom end 65,65 of bar 63.Bar 63 can by cylinder 61 near or move back and forth away from the direction of pillar 40.And the arrow W direction of crank motion in Figure 18 that boom end 65,65 is followed bar 63 moves back and forth, and link component 66 is subjected to its arrow R direction that presses against among Figure 18 and roughly back and forth rotates on 90 ° of ground.Thus, pawl axle 67 also rotates, and the bar member 30 that is located at its front end rotates 90 °, can enter, retreat with the position of drawing money on credit support part 15 or being accommodated in object substrate 1 butt in the casing of casing relatively.Bar 63 is when being configured in cylinder 61 sides, and one distolaterally is connected with cylinder 61 by coupler 62, and another is distolateral to be connected with link component 66 as boom end 65, and when being configured in 30 of each bar members, two ends have boom end 65, and both end sides is connected on the link component 66.
In this example, the drive source of bar member 30 is cylinders 61, but is not limited thereto, and also can use screw actuator or linear motor etc.In addition, as drive transmission mechanism, except that the mechanism that utilizes link component 66 and bar 63, also can use rack-and pinion gear mechanism or cam mechanism according to drive source.The drive source and the driver train of bar member 30 are not limited to this example.
So the end position adjusting mechanism 31 that constitutes moves as described below.For example after utilizing slide mechanism 400 to make crossbeam 34 be elevated near the object substrate 1 assigned position, drive cylinder 61, bar member 30 is rotated.That is, stretch out to the substrate reception zone.
Then, make slide mechanism 400 fine motions, bar member 30 is abutted to draw money on credit on support part 15 or the object substrate 1, drive slide mechanism again, for the space of guaranteeing to expect object substrate 1 being supported or make its decline.By this action repeatedly, thereby can implement the form that substrate of the present invention is taken out of the method for moving into.
(control of system)
Take out of the substrate of the method for moving into and take out of the control of the system of moving into and describe carrying out substrate of the present invention below.Substrate is taken out of the system of moving into and is carried out the interlock driving to take out of end position adjusting mechanism 31 and the robot 21 of moving into auxiliary device as substrate, is connected with controller 70, robot controller 71 and sequencer 72 (with reference to Fig. 1) as its control setup.Figure 19 is the block scheme that expression substrate of the present invention is taken out of the control setup of the system of moving into.
The controller 70 of end position adjusting mechanism 31 is connected with CPU (central process unit) 701, ROM702, RAM703, EEPROM704, Department of Communication Force 705, outside input and output I/F706 and drive control part 707 by bus.
CPU701 is the control maincenter of controller 70, is used to control the calculation process of end position adjusting mechanism 31.
ROM702 plays a role as the program storage part of the operation program of storage end position adjusting mechanism 31.RAM703 and EEPROM704 are connected with CPU701 is two-way.RAM703 carries out writing and reading of variable at random.The deletion that EEPROM704 can electrically store many times, write, even also can not preserve storage from outside supply capability.For example will survey and draw detection data storage that 41 pairs of substrate positions of sensor detect in EEPROM704.
Department of Communication Force 705 has a plurality of I/F (interface), is connected with robot controller 71 and sequencer 72 etc. respectively, inputs or outputs the various data and the program of control end position adjusting mechanism 31 (substrate is taken out of the system of moving into) usefulness.Outside input and output I/F706 is connected with mapping sensor 41 grades on being located at end position adjusting mechanism 31.
Drive control part 707 receives by CPU701 and carries out the control command that makes after the calculation process, and the driving of the drive source (axle drive shaft) of lifting mechanism 300 and bar member 30 is controlled.This drive control part 707 has driving governor with the cooresponding equal number of each axle drive shaft according to the axle drive shaft quantity of end position adjusting mechanism 31.
The controller 70 of the formation of robot controller 71 and end position adjusting mechanism 31 is basic identical.Promptly, have: carry out the ROM of CPU, the storage action program of calculation process, as RAM and EEPROM, Department of Communication Force, the outside input and output I/F of work area and the drive control part etc. of controlling the driving of each axle drive shaft, robot controller 71 is used for the axle drive shaft of control robot 21.
Below the action of so taking out of the system of moving into by the substrate that constitutes control setup is described.
Its action is carried out according to following order.At this, the substrate of the action of carrying out direct supporting substrates is taken out of the system of moving into describe, even but take out of when moving into, carry out substrate supporting and descend two kinds when moving and also can be undertaken when the support part of drawing money on credit supported or make its decline utilizing the substrate down maneuver to enlarge substrate by same action with the space.
(1) sequencer 72 is searched the mapping instruction that has or not substrate 1 to controller 70 outputs of end position adjusting mechanism 31.
(2) controller 70 accesses the mapping action execution program from ROM72, surveys and draws action executive commands from drive control part 707 to 31 outputs of end position adjusting mechanism according to this program.Based on this order, end position adjusting mechanism 31 for example is driven into most upperstratum position with the orlop position of lifting mechanism 300 along the stacked direction of substrate 1 from casing 11, utilize mapping sensor 41 to scan, detect the carrying position (whether each layer has taken in substrate 1) of the substrate 1 in the casing 11.
(3) controller 70 receives from the detection signal that has or not substrate 1 of surveying and drawing sensor 41 via outside input and output I/F706.And,, obtain the substrate reception information of taking in quantity and the position of taking in layer about the substrate in the casing 11 1 by the calculation process of CPU701.As required with this substrate reception information storage in EEPROM704.
(4) controller 70 is notified to sequencer 72 with substrate reception information with the report of surveying and drawing release.
(5) sequencer 72 goes to the regulation of taking out of or move into object that becomes substrate to take in the instruction of layer based on substrate reception information to controller 70 outputs.
(6) controller 70 is exported the executive command of substrate supportings action from drive control part 707 to end position adjusting mechanism 31 according to this program and substrate reception information from the executive routine that ROM702 accesses the substrate supporting action.And, as mentioned above, drive lifting mechanism 300 and 30 pairs of substrates 1 of bar member and support, make it be in bearing state.
(7) controller 70 is obtained the end that becomes the end position of substrate supporting state adjusting mechanism 31 and is adjusted release information for example according to the danger signal from end position adjusting mechanism 31.
(8) controller 70 receives the end and adjusts release information, adjusts release information to robot controller 71 notice ends.Meanwhile or before, comprise to robot controller 71 notices and will take out of the regulation of moving into object substrate 1 about robot 21 and take in the location information of layer in interior substrate reception information.
(9) robot controller 71 receives the end and adjusts release information, takes in the executive command of moving into or take out of action that layer carries out object substrate 1 to the relative regulation of robot 21 output indications.In addition, this order is based on the order of the operation program in the program storage part that is stored in robot controller 71 in advance.
(10) when robot 21 finish regulation move into or take out of action the time, notify its release information to robot controller 71.
(11) robot controller 71 is to the release information of controller 70 notice robots 21.And, the Department of Communication Force 705 of this release information by controller 70 is notified to sequencer 72, object substrate 1 regulation is relatively taken in taking out of of layer and is moved into release.
(12) controller 70 and above-mentioned (11) of release information that received robot 21 are side by side or before or after it, carry out the order of the action of removing the substrate supportings action to 31 outputs of end position adjusting mechanism, thereby the supporting of substrate 1 obtain removing.In addition, this releasing action is carried out according to the executive routine that accesses from ROM702 in the same manner with (6).
(13) last, proceeding substrate at needs takes out of when moving into, the sequencer 72 that receives the release information of robot is taken in layer for next that becomes next action object relatively and is carried out taking out of or moving into of other substrates 1, goes to next to take in the instruction of layer to controller 70 outputs.And, carry out above-mentioned (6) later action repeatedly and take out of until predetermined substrate and move into end.
Like this, substrate of the present invention is taken out of the control that the system of moving into is subjected to having the control setup of the robot controller 71 of controller 70, robot 21 of end position adjusting mechanism 31 and sequencer 72, therefore, taking out of end position adjusting mechanism 31 and the robot 21 of moving into auxiliary device as substrate is driven linkedly.That is, take out of in the system of moving at substrate of the present invention, end position adjusting mechanism 31 went to before drive machines people 21 takes out of the regulation of moving into object substrate 1 and takes in layer, and substrate is supported or make its decline.On the other hand, robot 21 bases are taken in moving into and taking out of of layer execution substrate 1 from the regulation of the relative casing 11 with information of order of control setup.At this moment, regulation is taken in the location information of layer by robot 21 identification, and utilize end position adjusting mechanism 31 to enlarge or guarantee can for the hand 22 of robot 21 relatively regulation take in the space that layer enters, retreats, can carry out taking out of and moving into of substrate reliably.
In addition, in the action of robot 21, do not need detection is scanned in the position that the regulation of moving into object substrate 1 is taken in layer or taken out of object substrate 1, therefore, robot 21 can be stipulated to take in floor height speed relatively and correctly take out of and move into substrate 1.
Moreover, end position adjusting mechanism 31 utilize mapping sensor 41 to carry out the execution of the supporting of substrate position scanning and substrate or decline or remove action and the actions such as lifting action of the crossbeam 34 that carries out for this execution or releasing during, robot 21 can go to other that relative casing 11 is taken out of that the object substrate 1 moved into handles to install or relatively other casing 11 carry out taking out of of object substrate 1 and move into.Therefore, take out of in the system of moving into, conveyance intermittently can not wasted as the operation wait time, can improve the efficient of substrate Fabrication procedure at substrate of the present invention.
(variation)
As the 3rd form～the 6th form, when the end 16 of the plural support part 15 of drawing money on credit being supported or making it descend respectively independently, need drive two or three crossbeams independently.Below this variation is described.
For example, can adopt the transom 34c that makes crossbeam can be at the substrate stacked direction, be telescopic drive on the above-below direction, the structure of bottom upper support downside crossbeam 34a and upside crossbeam 34b thereon.At this moment, by successively or individual drive slide mechanism 400 and carry out the transom 34c of telescopic drive, can be respectively draw money on credit support part or the substrate of expectation be supported or makes its decline.In addition, also can fix or other crossbeams can be set up or down at the downside of downside crossbeam 34a.Also can replace the telescopic drive of connecting portion 34c, the lifting slide mechanism is set at connecting portion 34c.Which kind of situation all preferably drives the bar member 30 that sets respectively according to the driving of each crossbeam.
As another example a plurality of slide mechanisms 400 can be set also, be connected with crossbeam 34 respectively, make a plurality of crossbeam 34 liftings.At this moment, preferably utilize a plurality of slide mechanisms and cylinder 61 to carry out the action that rotates of bar member 30 respectively independently.
The variation of Figure 20 to Figure 22 indication rod member 30.Figure 20 makes bar member 301 to take in the zone with respect to the end of the peristome 19a side of the substrate that is accommodated in casing in 11 or its, the birds-eye view that the distortion of stretching out with right angle rectilinearity ground is fallen.In Figure 20, (a) be the birds-eye view that gets the hang of that indication rod member 30 stretches out, (b) be the birds-eye view of the state that retreats from the substrate reception zone of indication rod member 30, (c) be front view.In this variation, in crossbeam 34, be built-in with and linear actuating devices (not shown) such as cooresponding a plurality of screw actuators of bar the number of components or cylinder, these linear actuating devices make bar member 301 carry out linear reciprocation along arrow L1 direction among the figure and drive.This bar member 301 is the directly upright vertical support portion (pawl prolong portion) that is provided with on linear actuating device, prolongs (with reference to Figure 20 (c)) from the guiding notch part 34d that is located on the crossbeam 34 to the substrate stacked direction.Other formations are identical with above-mentioned example, to identical formation mark prosign, omit its explanation.Adopt this variation, bar member 301 relative substrate rectilinearity ground enter, backward movement, and therefore, even when directly substrate being supported or making it to descend, substrate also can damage hardly.
Identical with above-mentioned variation, Figure 21 represents to make bar member 302 and takes in the zone with respect to the end of the peristome 19a side of the substrate that is accommodated in casing in 11 or its, another variation of stretching out with right angle rectilinearity ground.In this variation, replace crossbeam 34, use the cross bar 340 that does not have built-in driver train.On cross bar 340, be fixed with bar member 302 with predetermined distance.Cross bar 340 is by supporting two ends, the left and right sides along the horizontal slip device 83 that arrow L2 direction among the figure back and forth drives.Horizontal slip device 83 for example by with pillar 40 in relative pillars 40 such as slider 49 bonded assembly cylinder apparatus along substrate take out of move into direction carry out approaching, separate driving, and support to by slide mechanism 400 can be along the lifting of substrate transferring direction.Therefore, bar member 302 can be accommodated in the substrate 1 in the casing 11 relatively and take in the zone and enter, retreats by horizontal slip device 83.In addition, the shape of bar member 302 is identical with above-mentioned example, its explanation of Therefore, omited.Adopt this variation,, be suppressed at Min. so near the dust the substrate can be produced owing to do not have driver train as the cross bar 340 of crossbeam.And, can provide high precision and cheap crossbeam with simple formation.
Figure 22 represents another variation.In Figure 22, (a) be the front view of the crossbeam of this variation, (b) be the local enlarged side view of crossbeam, (c) be the local enlarged front view of crossbeam.The bar member 303 of this variation is made of claw 320 and vertical support portion 670.Vertical support portion 670 is along vertical upright being located on the crossbeam 34 of the direction parallel with the substrate stacked direction of casing 11.Leading section in vertical support portion 670 has propped up claw 320 by the axle 321 rotatable earth's axis.Transmit the propulsive effort that rotates usefulness from the drive transmission mechanism (not shown) that is built in the crossbeam 34 by 322 pairs of axles of belt 321.The propulsive effort that claw 320 receives from belt 322, arrow R2 direction is rotated in figure, thus the zone of taking in of substrate 1 enters, retreats relatively.Like this, the control stalk 303 of this variation can support or make its decline to the substrate or the support part of drawing money on credit by the lifting action of the claw 320 that enters, retreat taking in the zone of substrate 1 and the crossbeam 34 that it is set.
In above-mentioned example, mainly have as substrate reception case 11 and to prolong near the support part 15 of drawing money on credit that to peristome or it, is used to keep substrate from the inboard, but the present invention also can be applied on other substrate reception casees well.Below this substrate reception case is described.In the following description, the formation mark prosign to identical with above-mentioned example omits its explanation.
Figure 23 is that another routine birds-eye view that substrate of the present invention is taken out of the casing of moving into device is used in expression.At this, casing 110 has the support part 150 of drawing money on credit of bearing substrate at each layer of taking in substrate 1.The peristome 19a that to casing 110 is not prolonged in this support part 150 of drawing money on credit, and takes out of about 1/5 the length of moving into direction but prolong to substrate from inboard framework 13.Even in this casing 110, also can be provided as substrate and take out of the end position adjusting mechanism 31 of moving into auxiliary device in peristome 19a side.At this moment, near the part the peristome 19a of 30 pairs of substrates 1 of bar member supports or makes its decline.The state that Figure 23 indication rod member 30 enters in the substrate reception zone.
Figure 24 is that the birds-eye view that substrate of the present invention is taken out of the another example of the casing of moving into device is used in expression.Casing 111 does not have the support part of drawing money on credit of bearing substrate at each layer of taking in substrate 1, and inboard framework 13 is provided with the projection 151 of supporting substrate 1.And, utilize this projection 151 and short support portion 14 to constitute the layer that substrate 1 is carried, takes in.This casing is used to take in more small-sized substrate, in display panels, the Fabrication procedure of Plasmia indicating panel second half sections such as (PDP), is cut apart cut-out, has carried out to a certain degree using in the operation of processing at large substrate in the time of more.Even in this casing 111, also can be provided as substrate and take out of the end position adjusting mechanism 31 of moving into auxiliary device in peristome 19a side.At this moment, near the part the peristome 19a of 30 pairs of substrates 1 of bar member supports or makes its decline.The state that Figure 24 indication rod member 30 enters in the substrate reception zone.
As mentioned above, adopt substrate of the present invention to take out of the method for moving into and substrate is taken out of the system of moving into, take out of the end position adjusting mechanism 31 of moving into auxiliary device by casing 11, robot 21 with as substrate, can enlarge the space that enters from side direction inboard, casing 11 front for hand 22 or enlarge the space of moving back to the rear flank, front from casing 11 inboards for hand 22, therefore, can reduce the spacing of each interlayer of multiple-structure, increase the substrate reception quantity of unit space volume, and also can take out of reliably and move into substrate this moment.In addition, the present invention can realize by increase the end position adjusting mechanism on the basic structure of existing back brace molding box body, need not use robot with special arm and mechanism, and, existing other substrates need be set yet take out of the complex mechanism that uses in the method for moving into, thereby can realize low cost.
Claims (40)
1, a kind of substrate is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with from the inboard support part of drawing money on credit of extending to the front side, and bearing substrate carries out the casing that multilayer is taken on the support part of drawing money on credit of each layer, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise the support part of drawing money on credit of drawing money on credit the support part or having carried object substrate that will carry object substrate is supported, enlarge in the casing supporting operation (A) in the space that enters for described hand or retreat, take out of taking out of operation and carrying out with this supporting operation (A) of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
2, substrate as claimed in claim 1 is taken out of the method for moving into, it is characterized in that the operation of taking out of of object substrate comprises: make described hand enter and be positioned at the operation of the object substrate below that is carried on the described support part of drawing money on credit of being supported from side direction inboard, described casing front; Thereby make described hand be moved upward the operation that object substrate is raised to the described top, support part of drawing money on credit; Thereby and make the hand that carries object substrate move back the operation that object substrate is fetched into outside the described casing from the inboard to the rear flank, front.
3, substrate as claimed in claim 2 is taken out of the method for moving into, it is characterized in that, in described supporting operation (A), after the operation that object substrate is fetched into outside the casing or after the operation that object substrate is lifted and before the operation that object substrate is fetched into outside the casing, remove supporting to the described support part of drawing money on credit.
4, substrate as claimed in claim 1 is taken out of the method for moving into, and it is characterized in that, the operation of moving into of object substrate comprises: the hand that carries object substrate side direction inboard in front of the described casing is entered and object substrate is positioned at draw money on credit the operation of top, support part; Thereby described hand is moved downwards object substrate is carried on operation on the described support part of drawing money on credit; And the operation that under the state below hand is positioned at object substrate described hand is moved back from the inboard to the rear flank, front.
5, substrate as claimed in claim 4 is taken out of the method for moving into, it is characterized in that, in described supporting operation (A), before making the hand operation that the side direction inboard enters in front of the casing or make after the hand operation that the side direction inboard enters in front of casing and operation that hand is moved back to the rear flank, front from the inboard before begin the described support part of drawing money on credit is supported.
6, take out of the method for moving into as each described substrate in the claim 1 to 5, it is characterized in that, take out of operation and move in the operation described, also comprise will carrying the support part or carried the supporting operation (B) that support the support part of drawing money on credit of last layer of the support part of drawing money on credit of object substrate of drawing money on credit of object substrate, take out of taking out of operation or carrying out with this supporting operation (B) of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
7, take out of the method for moving into as each described substrate in the claim 1 to 6, it is characterized in that, take out of operation and move in the operation described, also comprise the support part or carried the decline operation that depress the support part of drawing money on credit of following one deck of the support part of drawing money on credit of object substrate of drawing money on credit that to carry object substrate, take out of taking out of operation or carrying out with described decline operation of object substrate to the operation of moving into that described casing is moved into object substrate from described casing.
8, a kind of substrate is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with from the inboard support part of drawing money on credit of extending to the front side, and bearing substrate carries out the casing that multilayer is taken on the support part of drawing money on credit of each layer, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise at least one operation that is selected from the following operation: the support part of drawing money on credit of drawing money on credit the support part or having carried object substrate that will carry object substrate is supported, enlarge the supporting operation (A) in the space that supplies described hand to enter in the casing or retreat; The support part of drawing money on credit of last layer of drawing money on credit the support part or having carried the support part of drawing money on credit of object substrate that will carry object substrate is supported, enlarges in the casing supporting operation (B) in the space that enters for described hand or retreat; And the support part of drawing money on credit of following one deck of drawing money on credit the support part or having carried the support part of drawing money on credit of object substrate that will carry object substrate depresses, enlarges in the casing decline operation in the space that enters for described hand or retreat, and takes out of taking out of operation or carrying out with at least one operation that is selected from this supporting operation (A), support operation (B) and the decline operation to the operation of moving into that described casing is moved into object substrate of object substrate from described casing.
9, a kind of substrate is taken out of the system of moving into, and comprising: with the predetermined distance multilayer be arranged with from the inboard that bearing substrate carries out the casing that multilayer is taken on draw money on credit support part and the support part of drawing money on credit at each layer that the front side is extended; The robot that has the hand used of the described substrate of carrying, is used for described substrate moved in the casing or described substrate is taken out of in the casing; And the end position adjusting mechanism that the described support part of drawing money on credit is supported or made its decline, it is characterized in that, described end position adjusting mechanism is in order to enlarge space that enters for described hand side direction inboard in front of the described casing or the space of moving back to the rear flank, front from described casing inboard for described hand, and its decline is supported or made at least one support part of drawing money on credit in the support part of drawing money on credit of draw money on credit support part and this long support subordinate one deck of the support part of drawing money on credit that is selected from the carrying object substrate, this support part last layer of drawing money on credit.
10, a kind of substrate is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with the support portion, and bearing substrate carries out multilayer and takes on the support portion of each layer, and have can be for the casing of opening of taking out of and move into described substrate, use has the robot of the hand used of the described substrate of carrying substrate is taken out of or moved into, it is characterized in that, comprise the object substrate that will take out of or the object substrate of having moved into are supported, the supporting operation (A) in the space of guaranteeing in the casing to enter or retreating for described hand, the taking out of operation or move into operation and carry out of described object substrate with described supporting operation (A).
11, substrate as claimed in claim 10 is taken out of the method for moving into, and it is characterized in that, the described operation of taking out of comprises: make described hand enter and be positioned at the operation of described object substrate below to the inboard from the described open side of described casing; Thereby make described hand be moved upward the operation that described object substrate is raised to top, described support portion; Thereby and the hand that carries described object substrate is retreated to described open side from described inboard described object substrate is fetched into operation outside the described casing, described supporting operation (A) is to begin before the operation that described hand is entered to described inboard from the described open side of described casing.
12, substrate as claimed in claim 10 is taken out of the method for moving into, it is characterized in that the described operation of moving into comprises: make the hand that carries described object substrate enter and make described object substrate be positioned at the operation of top, described support portion to the inboard from the described open side of described casing; Thereby described hand is moved downwards described object substrate is carried on operation on the described support portion; And the operation that under the state below hand is positioned at described object substrate described hand is retreated from described inboard to described open side, described supporting operation (A) is that described hand was begun before the operation that described open side retreats from described inboard.
13, take out of the method for moving into as each described substrate in the claim 10 to 12, it is characterized in that, also comprise and take out of the described support portion of the described object substrate that will take out of in the operation or carry the supporting operation (B) that the substrate that carried on the support portion of the last layer of any described support portion in the described described support portion of moving into the described object substrate that will move in the operation supports carrying described, the operation of moving into of taking out of operation or described object substrate of described object substrate is carried out with this supporting operation (B).
14, take out of the method for moving into as each described substrate in the claim 10 to 13, it is characterized in that, also comprise and take out of the described support portion of the described object substrate that will take out of in the operation or carry the decline operation that the substrate that carried on the support portion of following one deck of any described support portion in the described described support portion of moving into the described object substrate that will move in the operation is depressed carrying described, the operation of moving into of taking out of operation or described object substrate of described object substrate is carried out with described decline operation.
15, take out of the method for moving into as each described substrate in the claim 10 to 14, it is characterized in that described supporting operation (A), described supporting operation (B) and described decline operation are by carrying out supporting or make it to descend from described casing inboard to the support portion that described open side is extended.
16, a kind of substrate is taken out of the method for moving into, with respect to the predetermined distance multilayer be arranged with the support portion, and bearing substrate carries out multilayer and takes on the support portion of each layer, and have can be for the casing of opening of taking out of and move into described substrate, use has the robot of the hand used of the described substrate of carrying and substrate is moved into or substrate is taken out of, it is characterized in that, comprise at least one operation that is selected from the following operation: the object substrate that will take out of or the object substrate of having moved into are supported, the supporting operation (A) in the space of guaranteeing to supply described hand to enter in the casing or retreating; The supporting operation (B) that the substrate that the support portion of the described support portion last layer that carries the described object substrate that will take out of or the described object substrate of having moved into is carried supports; And the decline operation depressed of the substrate that carries of the support portion that will carry one deck under the described support portion of the described object substrate that will take out of or the described object substrate of having moved into, take out of taking out of operation or carrying out of object substrate from described casing to operation at least one operation with being selected from this supporting operation (A), supporting operation (B) and decline operation of moving into that described casing is moved into object substrate.
17, substrate as claimed in claim 16 is taken out of the method for moving into, it is characterized in that described supporting operation (A), described supporting operation (B) and described decline operation are by carrying out supporting or make it to descend from described casing inboard to the support portion that described open side is extended.
18, a kind of substrate is taken out of the system of moving into, and it is characterized in that, comprising: with the predetermined distance multilayer be arranged with the support portion and on the support portion of each layer bearing substrate carry out that multilayer takes in and have can be for the casing of opening of taking out of and move into described substrate; Have the hand used of the described substrate of carrying, be used for the robot that described substrate was moved into or taken out of to described relatively casing; And carry out substrate at described robot and take out of or move into when action, between the described open side of described casing and inboard, guarantee to enter or the substrate in the space that retreats is taken out of and moved into auxiliary device for described hand.
19, substrate as claimed in claim 18 is taken out of the system of moving into, it is characterized in that, described substrate is taken out of and is moved into auxiliary device any described object substrate in the object substrate that will take out of when described substrate is taken out of or the object substrate that will move into when described substrate is moved into is supported, thereby guarantees the space that enters or retreat for described hand in the casing.
20, take out of the system of moving into as claim 18 or 19 described substrates, it is characterized in that, described substrate take out of move into auxiliary device to the last layer of any described support portion in the described support portion that carries the object substrate that when described substrate is taken out of, will take out of or the described support portion that carries the object substrate that when described substrate is moved into, will move into or down the substrate that carries of the support portion of one deck support or make it to descend, thereby guarantee the space that enters or retreat for described hand in the casing.
21, take out of the system of moving into as claim 18 or 19 described substrates, it is characterized in that, also comprise described substrate taken out of and move into the control setup that auxiliary device and described robot carry out interlock control.
22, take out of the system of moving into as each described substrate in the claim 18 to 21, it is characterized in that, described substrate is taken out of and is moved near the described peristome that auxiliary device is arranged on described casing.
23, substrate as claimed in claim 22 is taken out of the system of moving into, and it is characterized in that, described substrate is taken out of and moved into auxiliary device and have one or the slide mechanism more than the diaxon that is used for described at least one substrate is supported or makes its decline.
24, take out of the system of moving into as each described substrate in the claim 18 to 21, it is characterized in that, described substrate is taken out of and is moved into auxiliary device and be arranged on the described robot.
25, a kind of substrate is taken out of and is moved into auxiliary device, it is characterized in that, comprising: be arranged to can with respect to the stacked multilayer of predetermined distance take in substrate and have and take out of the bar member that the substrate reception zone of the casing of the opening of moving into enters and retreats for described substrate; And support the lifting mechanism of described bar member movably along the orientation of described substrate,
The described relatively casing of robot that has the hand used of the described substrate of carrying in use is moved into or when taking out of described substrate, support or make it to descend by the described bar member that enters in the described substrate reception zone to described substrate, guarantee the space that enters or retreat for described hand in the described casing.
26, substrate as claimed in claim 25 is taken out of and is moved into auxiliary device, it is characterized in that the driving of described bar member by described lifting mechanism becomes to being selected from that described relatively casing is moved into or taken out of the object substrate of object, is accommodated in the substrate of described object substrate last layer, at least one substrate that is accommodated in the substrate of one deck under the described object substrate supports or make its decline.
27, take out of as claim 25 or 26 described substrates and move into auxiliary device, it is characterized in that described bar member and described substrate butt support or make its decline to described substrate.
28, take out of as claim 25 or 26 described substrates and move into auxiliary device, it is characterized in that, have from its inboard to described open side at described casing and to extend, to be used to carry drawing money on credit during the support part of described substrate, described bar member and the described support part butt of drawing money on credit support or make its decline to the described support part of drawing money on credit.
29, take out of as each described substrate in the claim 25 to 28 and move into auxiliary device, it is characterized in that, described lifting mechanism has and the crossbeam that is carried on the described substrate almost parallel in the described casing,
Described bar member has: prolong the claw that setting from described crossbeam to the outstanding upright vertical support portion of establishing of the described substrate stacked direction of described casing and from the direction of its front end edge and described stacked direction almost parallel.
30, substrate as claimed in claim 29 is taken out of and is moved into auxiliary device, it is characterized in that, is equipped with a plurality of described bar members on described crossbeam.
31, take out of as claim 29 or 30 described substrates and move into auxiliary device, it is characterized in that described vertical support portion is rotatably upright to be located on the described crossbeam, described claw utilizes the rotation of this vertical support portion to drive to stretch out in described substrate reception zone.
32, take out of as claim 29 or 30 described substrates and move into auxiliary device, it is characterized in that, described claw prolongs in described substrate reception zone from the front end of described vertical support portion and setting, and, described vertical support portion or described claw are carried out linear reciprocation by described relatively substrate reception zone and drive, thereby described claw stretches out in described substrate reception zone.
33, take out of as claim 29 or 30 described substrates and move into auxiliary device, it is characterized in that, described claw can be rotated the earth's axis around parallel with described crossbeam axle and prop up front end in vertical support portion, thereby and described claw be driven in rotation in described substrate reception zone and stretch out.
34, take out of as each described substrate in the claim 29 to 33 and move into auxiliary device, it is characterized in that, be provided with roller at the front end of described claw.
35, take out of as each described substrate in the claim 29 to 34 and move into auxiliary device, it is characterized in that described crossbeam is provided with a plurality of along the stacked direction of described substrate.
36, substrate as claimed in claim 35 is taken out of and is moved into auxiliary device, it is characterized in that, described a plurality of crossbeams are driven lifting respectively independently.
37, take out of as each described substrate in the claim 25 to 36 and move into auxiliary device, it is characterized in that, comprise control setup, what be used for substrate that relative described casing with described robot carries out moves into and takes out of lifting and the entering and retreating to described substrate reception zone of described bar member of controlling described lifting mechanism accordingly.
38, take out of as each described substrate in the claim 25 to 37 and move into auxiliary device, it is characterized in that, with the relatively upright type that is set as of the described opening of described casing.
39, take out of as each described substrate in the claim 25 to 38 and move into auxiliary device, it is characterized in that, be installed on the framework of the described opening that surrounds described casing.
40, take out of as each described substrate in the claim 25 to 38 and move into auxiliary device, it is characterized in that, be installed on the housing seat of the described casing of carrying.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005206671 | 2005-07-15 | ||
| JP2005206671 | 2005-07-15 | ||
| JP2006044225 | 2006-02-21 | ||
| JP2006044226 | 2006-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1895974A true CN1895974A (en) | 2007-01-17 |
Family
ID=37608662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610105710 Pending CN1895974A (en) | 2005-07-15 | 2006-07-13 | Substrate move-out move-in method and system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1895974A (en) |
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| CN102380872A (en) * | 2010-07-16 | 2012-03-21 | 日本电产三协株式会社 | Industrial robot |
| CN102464210A (en) * | 2010-11-11 | 2012-05-23 | 株式会社Siti | Substrate carrying device |
| CN102616567A (en) * | 2012-03-23 | 2012-08-01 | 深圳市华星光电技术有限公司 | Device for taking out glass substrates |
| WO2013152502A1 (en) * | 2012-04-11 | 2013-10-17 | 深圳市华星光电技术有限公司 | Fetching and placing device of glass substrate |
| CN104552301A (en) * | 2013-10-22 | 2015-04-29 | 日本电产三协株式会社 | Industrial robot |
| CN106573277A (en) * | 2014-07-24 | 2017-04-19 | 普发真空公司 | Method and station for treatment of a transport container made of plastic material for the atmospheric storage and conveyance of substrates |
| CN107275270A (en) * | 2016-03-31 | 2017-10-20 | 芝浦机械电子株式会社 | Base board delivery device, substrate board treatment and substrate processing method using same |
| CN107883773A (en) * | 2017-11-06 | 2018-04-06 | 武汉华星光电半导体显示技术有限公司 | Substrate bearing device and roasting plant |
| CN108615332A (en) * | 2016-12-13 | 2018-10-02 | 海太半导体（无锡）有限公司 | Patch device substrate position sensor sensing and alarm system |
| CN109911617A (en) * | 2017-12-12 | 2019-06-21 | 湘潭宏大真空技术股份有限公司 | Substrate loader structure for glass loading machine |
| CN111747116A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel conveying device and panel conveying system |
| CN111747117A (en) * | 2019-03-29 | 2020-10-09 | 日本电产三协株式会社 | Panel carrying system |
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2006
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Application publication date: 20070117 |