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CN1810711A - Lead-less lithium sodium potassium niobate piezoelectric ceramic with high curie point and its prepn - Google Patents

Lead-less lithium sodium potassium niobate piezoelectric ceramic with high curie point and its prepn Download PDF

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CN1810711A
CN1810711A CN200510020230.5A CN200510020230A CN1810711A CN 1810711 A CN1810711 A CN 1810711A CN 200510020230 A CN200510020230 A CN 200510020230A CN 1810711 A CN1810711 A CN 1810711A
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CN100402466C (en
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朱建国
陈强
肖定全
施小罗
刘志潜
何龙
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Sichuan University
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Abstract

一种高居里点铌酸钾钠锂系无铅压电陶瓷及其制备工艺,涉及一种性能优良的无铅压电陶瓷组合物的配方及制备工艺。本发明的无铅压电陶瓷组合物,包含由通式(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2表示,式中的x、y、z表示复合离子中相应元素材料在各组元中所占的原子数(即原子百分比),所有元素的原子数总和应为1,式中0.01≤x≤0.2,0.2≤y≤0.7,0.01≤z≤0.25,0≤u≤0.05,M表示至少是一种选自下列的二价金属离子:Ca、Mg、Ba和(或)Sr。本发明的制备工艺能在较低温度下,如1190℃或更低温度下烧结无铅压电陶瓷组合物,使制备的无铅压电陶瓷具有好的压电性、可实用的平面机电耦合系数kp和高的居里温度,制备工艺过程中不含铅或铅的化合物。A lead-free piezoelectric ceramic with a high Curie point potassium-sodium-lithium niobate series and a preparation process thereof, relating to a formulation and a preparation process of a lead-free piezoelectric ceramic composition with excellent performance. The lead-free piezoelectric ceramic composition of the present invention comprises the general formula (1-u)[(1-z)(Li x Na y K 1-x-y )NbO 3 +zMTiO 3 ]+uMnO 2 , the formula x, y, and z in represent the number of atoms (ie atomic percentage) of the corresponding element material in each component in the compound ion, and the sum of the number of atoms of all elements should be 1, where 0.01≤x≤0.2, 0.2≤ y≤0.7, 0.01≤z≤0.25, 0≤u≤0.05, M represents at least one divalent metal ion selected from the following: Ca, Mg, Ba and (or) Sr. The preparation process of the present invention can sinter the lead-free piezoelectric ceramic composition at a lower temperature, such as 1190°C or lower, so that the prepared lead-free piezoelectric ceramic has good piezoelectricity and practical planar electromechanical coupling Coefficient kp and high Curie temperature, no lead or lead compounds in the preparation process.

Description

一种高居里点铌酸钾钠锂系无铅压电陶瓷及其制备方法A kind of high Curie point potassium sodium lithium niobate series lead-free piezoelectric ceramics and preparation method thereof

一、技术领域1. Technical field

本发明涉及一种性能优良的无铅压电陶瓷组合物的配方及制备工艺The invention relates to a formulation and preparation process of a lead-free piezoelectric ceramic composition with excellent performance

二、背景技术2. Background technology

自20世纪60年代以来,以PT(PbTiO3)或PZT(Pb(Zr,Ti)O3)为主要成分的压电陶瓷材料已广泛应用于电子、通讯、航天、军事等领域。目前,该类材料仍然是制备各种压电陶瓷滤波器、振荡器、谐振器、鉴频器、陷波器等电子元件的主要材料。尽管这类材料因其具有优良的介电、压电性能而在电子元器件制造领域占据着主导地位。但是这类材料在制备和使用过程中还存在着诸多弊端:(1)、PT基或PZT基压电陶瓷材料的烧成温度相对较高,一般为1200℃或更高,因此耗能大,不利于降低生产成本;(2)、PT基或PZT基压电陶瓷材料烧成过程中伴随有铅的挥发,且随着烧结温度的提高,铅的挥发程度也加剧,从而影响材料的整体性能,进一步影响所制器件性能;(3)、PT基或PZT基材料中含有的铅组分(PbO或Pb3O4)约占70%,在原材料制备过程中以及器件废弃后铅得不到妥善处理,会给环境带来沉重污染。Since the 1960s, piezoelectric ceramic materials mainly composed of PT(PbTiO 3 ) or PZT(Pb(Zr,Ti)O 3 ) have been widely used in electronics, communications, aerospace, military and other fields. At present, this type of material is still the main material for the preparation of various piezoelectric ceramic filters, oscillators, resonators, frequency discriminators, traps and other electronic components. Although this type of material occupies a dominant position in the field of electronic component manufacturing because of its excellent dielectric and piezoelectric properties. However, there are still many disadvantages in the preparation and use of such materials: (1), the firing temperature of PT-based or PZT-based piezoelectric ceramic materials is relatively high, generally 1200 ° C or higher, so the energy consumption is large, It is not conducive to reducing production costs; (2), PT-based or PZT-based piezoelectric ceramic materials are accompanied by volatilization of lead during the firing process, and with the increase of sintering temperature, the volatilization of lead is also intensified, thus affecting the overall performance of the material , further affecting the performance of the device; (3), the lead component (PbO or Pb 3 O 4 ) contained in the PT-based or PZT-based material accounts for about 70%, and the lead cannot be obtained during the raw material preparation process and after the device is discarded. Proper disposal will bring heavy pollution to the environment.

无铅压电陶瓷主要有钛酸钡基(BaTiO3)、钛酸铋钠基((Bi.Na)TiO3)、铌酸钾钠基((Na,K)NbO)以及铋层状钙钛矿结构铁电体(BLSF)。钛酸钡陶瓷是最早得到实用的压电陶瓷,虽然早期曾成功应用于水声机电声换能器、通信滤波器等方面;但是由于其压电性较弱、居里温度低(Tc=120℃)而限制了其使用范围,并且能耗大,烧结温度高(1200°~1400℃),不利于降低成本的要求。现在人们利用钛酸钡陶瓷主要是对其掺杂改性,使其半导体化,得到具有PTC特性的钛酸钡系半导体陶瓷,用以制作各种发热体或开关器件、传感器、彩电的自动消磁装置等,如专利CN1214328A、CN1237149A和CN1228397A分别描述了具有PTC特性的钛酸钡半导体陶瓷的制备及其相应器件。铋层结构铁电体是一类很有潜力的压电材料,具有较高的居里温度、不易老化、稳定性好等优点,适合高温高频环境下工作的器件的制备。但是这类材料也存在压电性差的不足,烧结工艺也较苛刻;另外其矫顽场场高,难以极化,限制了它的应用。BNT((Bi0.5Na0.5)TiO3)系压电陶瓷组合物的压电性能较好,近年来引起了各国材料学家的普遍关注。如:专利CN85100426、JP11-217262、JP2000-22235等描述了ABO3型的[Bi0.5(Na1-xKx)0.5]TiO3系无铅压电陶瓷组合物,文献《NBT基无铅压电陶瓷滤波器》(压电与声光Vol.25 No.5)报道了用改性后的BNT基无铅压电陶瓷制作压电陶瓷滤波器,但是和PZT基材料相比,BNT基无铅压电陶瓷的居里点Tc和相变点Tr偏低(Tr~200℃),压电性能还需要进一步的提高。Lead-free piezoelectric ceramics mainly include barium titanate base (BaTiO 3 ), bismuth sodium titanate base ((Bi.Na)TiO 3 ), potassium sodium niobate base ((Na, K)NbO) and bismuth layered perovskites. Bone-structured ferroelectrics (BLSF). Barium titanate ceramics are the earliest practical piezoelectric ceramics. Although they were successfully used in hydroacoustic electromechanical transducers and communication filters in the early days, due to their weak piezoelectricity and low Curie temperature (Tc=120 ℃) to limit its scope of use, and it consumes a lot of energy, and the sintering temperature is high (1200°-1400°C), which is not conducive to the requirement of reducing costs. Now people use barium titanate ceramics mainly to dope and modify them to make them semiconducting, and to obtain barium titanate semiconductor ceramics with PTC characteristics, which are used to make various heating elements or switching devices, sensors, and automatic degaussing of color TVs. Devices, etc., such as patents CN1214328A, CN1237149A and CN1228397A respectively describe the preparation of barium titanate semiconductor ceramics with PTC characteristics and corresponding devices. Bismuth layer-structured ferroelectrics are a class of piezoelectric materials with great potential. They have the advantages of high Curie temperature, not easy to age, and good stability. They are suitable for the preparation of devices working in high-temperature and high-frequency environments. However, this kind of material also has the disadvantages of poor piezoelectricity and harsh sintering process; in addition, its high coercive field makes it difficult to polarize, which limits its application. The piezoelectric performance of BNT ((Bi 0.5 Na 0.5 )TiO 3 ) piezoelectric ceramic composition is good, which has aroused the general attention of material scientists from various countries in recent years. Such as: patents CN85100426, JP11-217262, JP2000-22235, etc. describe the ABO 3 type [Bi 0.5 (Na 1-x K x ) 0.5 ]TiO 3 series lead-free piezoelectric ceramic composition, the literature "NBT-based lead-free piezoelectric ceramic composition Electric Ceramic Filters" (Piezoelectricity and Acousto-optic Vol.25 No.5) reported the use of modified BNT-based lead-free piezoelectric ceramics to make piezoelectric ceramic filters, but compared with PZT-based materials, BNT-based lead-free piezoelectric The Curie point T c and phase transition point T r of lead piezoelectric ceramics are relatively low (T r ~ 200 ℃), and the piezoelectric performance needs to be further improved.

综上所述,无铅压电陶瓷的整体性能与铅基压电陶瓷相比,还有较大的差距。因此,无铅压电陶瓷只能根据其自身的特性,在某些应用领域部分代替含铅材料。经过人们的努力,在不久的将来或许能够找到能完全替代含铅材料的无铅材料。To sum up, the overall performance of lead-free piezoelectric ceramics is far behind that of lead-based piezoelectric ceramics. Therefore, lead-free piezoelectric ceramics can only partially replace lead-containing materials in some application fields according to their own characteristics. Through people's efforts, lead-free materials that can completely replace lead-containing materials may be found in the near future.

对于制备工艺而言,目前含铅陶瓷材料烧结的温度一般高于1200℃,虽然采用了加盖密封烧结的方式,但烧结所用的坩埚一般也要预先在高温(大于800℃)下进行吸铅处理。而铅在800℃时就开始挥发,这样也会对周围环境构成严重污染以及对工作人员身体健康造成损害。陶瓷的压电性能主要是通过对压电陶瓷的极化而获得的,因此极化工艺的好坏或者说完善与否是材料性能的潜力能否充分发挥的关键之一。极化温度,极化时间以及极化电压对材料的极化有着密切的关系。对于现有的铅基压电陶瓷材料,其一般的极化工艺是:样品在120℃左右的硅油油浴中极化15~60min,极化电压视具体的组分略有不同。For the preparation process, the current sintering temperature of lead-containing ceramic materials is generally higher than 1200°C. Although the method of sealing and sintering with a cover is adopted, the crucible used for sintering generally needs to be pre-absorbed at high temperature (greater than 800°C). deal with. And lead starts to volatilize at 800°C, which will also cause serious pollution to the surrounding environment and damage to the health of the staff. The piezoelectric properties of ceramics are mainly obtained through the polarization of piezoelectric ceramics. Therefore, the quality or perfection of the polarization process is one of the keys to whether the potential of the material performance can be fully realized. The polarization temperature, polarization time and polarization voltage are closely related to the polarization of materials. For the existing lead-based piezoelectric ceramic materials, the general polarization process is: the sample is polarized in a silicone oil bath at about 120°C for 15-60 minutes, and the polarization voltage is slightly different depending on the specific components.

三、发明内容3. Contents of the invention

因此,本发明的目的就是要获得一种能在较低烧结温度下,如1200℃以下或更低的温度下烧结的无铅压电陶瓷组合物,并且具有好的压电性、可实用的平面机电耦合系数kp和高的居里点。Therefore, the object of the present invention is to obtain a lead-free piezoelectric ceramic composition that can be sintered at a lower sintering temperature, such as below 1200 ° C or lower, and has good piezoelectricity and practical Planar electromechanical coupling coefficient kp and high Curie point.

为实现本发明的目的,本发明提出了一种无铅压电陶瓷组合物,是由通式(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2表示的主要组分组成,式中的x、y、z、u表示复合离子中相应元素在材料各组元中所占的原子数(即原子百分比),所有元素的原子数总和应为1。式中:0.01≤x≤0.2,0.2≤y≤0.7,0.01≤z≤0.25,0≤u≤0.05,M表示至少是一种选自下列的二价金属离子:Ca、Mg、Ba和(或)Sr。To achieve the purpose of the present invention, the present invention proposes a lead-free piezoelectric ceramic composition, which is composed of the general formula (1-u) [(1-z) (Li x Na y K 1-xy ) NbO 3 +zMTiO 3 ]+ uMnO2 represents the main component composition, x, y, z, u in the formula represent the number of atoms (ie atomic percentage) that the corresponding elements in the compound ion occupy in each component of the material, and the number of atoms of all elements The sum should be 1. In the formula: 0.01≤x≤0.2, 0.2≤y≤0.7, 0.01≤z≤0.25, 0≤u≤0.05, M represents at least one divalent metal ion selected from the following: Ca, Mg, Ba and (or ) Sr.

本发明提出的压电陶瓷组合物,特殊地,当z=0,u=0时,可以由通式(LixNayK1-x-y)NbO3表示的主要组分组成,式中的x、y表示复合离子中相应元素在材料各组元中所占的原子数(即原子百分比),所有元素的原子数总和应为1。式中:0.01≤x≤0.2,0.2≤y≤0.7。The piezoelectric ceramic composition proposed by the present invention, especially when z=0, u=0, can be composed of the main component represented by the general formula (Li x Na y K 1-xy ) NbO 3 , where x , y represent the number of atoms of the corresponding element in the compound ion in each component of the material (ie atomic percentage), the sum of the number of atoms of all elements should be 1. Where: 0.01≤x≤0.2, 0.2≤y≤0.7.

本发明提出的压电陶瓷组合物,当u=0时,可以由通式(1-z)(LixNayK1-x-y)NbO3+zMTiO3表示的主要组分组成,式中的x、y、z表示复合离子中相应元素在材料各组元中所占的原子数(即原子百分比),所有元素的原子数总和应为1。式中:0.01≤x≤0.2,0.2≤y≤0.7,0.01≤z≤0.25,M表示至少是一种选自下列的二价金属离子:Ca、Mg、Ba和(或)Sr。The piezoelectric ceramic composition proposed by the present invention, when u=0, can be composed of main components represented by the general formula (1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 , where x, y, z represent the number of atoms of the corresponding elements in the compound ion in each component of the material (that is, the atomic percentage), and the sum of the number of atoms of all elements should be 1. In the formula: 0.01≤x≤0.2, 0.2≤y≤0.7, 0.01≤z≤0.25, M represents at least one divalent metal ion selected from the following: Ca, Mg, Ba and (or) Sr.

本发明提出的无铅压电陶瓷组合物,当z=0时,可以由通式(1-u)(LixNayK1-x-y)NbO3+uMnO2表示的主要组分组成,式中的x、y表示复合离子中相应元素在材料各组元中所占的原子数(即原子百分比),所有元素的原子数总和应为1。式中:0≤u≤0.05。The lead-free piezoelectric ceramic composition proposed by the present invention, when z=0, can be composed of main components represented by the general formula (1-u)(Li x Na y K 1-xy )NbO 3 +uMnO 2 , the formula The x and y in represent the number of atoms (that is, the atomic percentage) that the corresponding elements in the compound ion occupy in each component of the material, and the sum of the number of atoms of all elements should be 1. In the formula: 0≤u≤0.05.

本发明的另一个目的就是要克服已有技术烧结温度高造成铅污染的缺陷,提出了一种制备无铅压电陶瓷组合物的方法,可以在低于1200℃温度下烧结。为了提高无铅压电陶瓷的性能,针对本发明的无铅压电陶瓷的特点,本发明的制备方法还提出了一种阶梯式极化工艺,即分几次逐步增加极化电压到目标位的极化工艺,具体步骤如下:极化时先在电压2.5KV/mm时保压10~20分钟,再在电压4.0KV/mm下保压10~20分钟,然后在电压5.0~6.0KV/mm下保压30分钟。采用本发明方法提出的极化工艺极化得到的(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2无铅压电陶瓷,具有优良的压电性能。Another object of the present invention is to overcome the defect of lead pollution caused by high sintering temperature in the prior art, and propose a method for preparing lead-free piezoelectric ceramic composition, which can be sintered at a temperature lower than 1200°C. In order to improve the performance of lead-free piezoelectric ceramics, according to the characteristics of the lead-free piezoelectric ceramics of the present invention, the preparation method of the present invention also proposes a stepped polarization process, that is, gradually increase the polarization voltage to the target position several times The specific steps of the polarization process are as follows: first hold the voltage at 2.5KV/mm for 10-20 minutes, then hold the voltage at 4.0KV/mm for 10-20 minutes, and then hold the voltage at 5.0-6.0KV/mm mm under pressure for 30 minutes. The (1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 lead-free piezoelectric ceramic obtained by polarizing the polarization process proposed by the method of the present invention has Excellent piezoelectric properties.

四、附图说明4. Description of drawings

图一是(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2无铅压电陶瓷介电常数在不同频率下随温度变化关系图。由图可以看出,本发明的无铅压电陶瓷具有高居里温度的优良性能(Tc>400℃)。Figure 1 is the relationship between the dielectric constant of (1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 lead-free piezoelectric ceramics as a function of temperature at different frequencies . It can be seen from the figure that the lead-free piezoelectric ceramic of the present invention has excellent properties of high Curie temperature (T c >400°C).

五、具体实施方法5. Specific implementation methods

在制备本发明的无铅压电陶瓷的具体过程中,按照配方(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2将原料按重量百分比称重后,以球磨或振磨的方式进行混料,时间为2~5小时;预烧条件是在700~900℃下烧结2~4小时;细磨也采用球磨或振磨方式,约为5~10小时;然后加10%~15%的PVA胶作为粘结剂造粒。PVA胶的用量为粉体重量的8%~15%。加入PVA胶后,在陶瓷研钵中研磨0.5~1小时,再在100℃~150℃的烘箱中烘烤8~30分钟,取出再研磨后,过60目分样筛,即可得颗粒大小均匀,流动性好的料粉。In the specific process of preparing the lead-free piezoelectric ceramics of the present invention, according to the formula (1-u)[(1-z)(Li x Na y K 1-xy ) NbO 3 +zMTiO 3 ]+uMnO After weighing the percentage by weight, mix the materials by ball milling or vibrating milling for 2 to 5 hours; pre-sintering conditions are sintering at 700-900°C for 2-4 hours; fine grinding is also done by ball milling or vibrating milling. About 5 to 10 hours; then add 10% to 15% PVA glue as a binder to granulate. The consumption of PVA glue is 8%~15% of powder body weight. After adding PVA glue, grind it in a ceramic mortar for 0.5-1 hour, then bake it in an oven at 100°C-150°C for 8-30 minutes, take it out and grind it again, and pass through a 60-mesh sieve to get the particle size Uniform, good fluidity powder.

本发明制备的粉料在15~20吨压力下干压成型并保压9~30s即可得所需形状的陶瓷生坯。此陶瓷生坯经充分排胶后,在1050℃~1190℃下烧结2小时即可得到质量好的陶瓷片。烧结陶瓷可以有两种方式:第一种(A)是直接将陶瓷生坯置于刚玉坩锅再加盖烧结;另一种(B)方式不同之处是将陶瓷生坯完全埋在相同成分的经预烧后的粉体中烧结。两种烧结方式的烧结炉,其炉腔内的氛围均为大气氛围。The powder prepared by the invention is dry-pressed under a pressure of 15-20 tons and kept under pressure for 9-30 seconds to obtain a ceramic green body of a desired shape. After fully debinding the ceramic green body, it is sintered at 1050°C to 1190°C for 2 hours to obtain a high-quality ceramic sheet. There are two ways to sinter ceramics: the first (A) is to directly place the ceramic green body in a corundum crucible and cover it for sintering; the other (B) is different in that the ceramic green body is completely buried in the same composition Sintered in the pre-fired powder. For the sintering furnaces of the two sintering methods, the atmosphere in the furnace cavity is atmospheric atmosphere.

烧结成型的(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2无铅压电陶瓷经研磨抛光、清洗后,采用丝网印刷术被银电极。被电极后的样品在120℃~150℃的极化油中预热30分钟后,缓慢施加直流电压对其极化。具体极化步骤如下:2.5Kv/mm保压10~20分钟→4.0KV/mm保压10~20分钟→5.0~6.0KV/mm保压30分钟。极化后的压电陶瓷经清洗后,即可得到具有高压电系数、高居里点的压电陶瓷成品。The sintered (1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 lead-free piezoelectric ceramics were ground, polished and cleaned, and screen printing by silver electrodes. The electroded sample was preheated in polarized oil at 120°C to 150°C for 30 minutes, and then slowly applied a DC voltage to polarize it. The specific polarization steps are as follows: 2.5Kv/mm holding pressure for 10-20 minutes → 4.0KV/mm holding pressure for 10-20 minutes → 5.0-6.0KV/mm holding pressure for 30 minutes. After the polarized piezoelectric ceramics are cleaned, the finished piezoelectric ceramics with high piezoelectric coefficient and high Curie point can be obtained.

(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2无铅压电陶瓷经300℃退火1小时处理后,退火后的样品的压电性能不低于退火前样品的压电性能的80%。(1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 After the lead-free piezoelectric ceramics were annealed at 300℃ for 1 hour, the pressure of the annealed sample The electrical properties are not lower than 80% of the piezoelectric properties of the sample before annealing.

本发明提供的(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2无铅压电陶瓷可以在低于1200℃的温度下烧结得到,其压电性能优良,d33可高达200pC/N以上,平面机械耦合系数Kp可达0.36,居里点可达450℃以上,是一种具有实用性能的无铅压电陶瓷。The (1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 lead-free piezoelectric ceramics provided by the present invention can be obtained by sintering at a temperature lower than 1200°C , Its piezoelectric performance is excellent, d 33 can be as high as 200pC/N, the plane mechanical coupling coefficient Kp can reach 0.36, and the Curie point can reach above 450 ° C. It is a lead-free piezoelectric ceramic with practical performance.

实施例一:Embodiment one:

配方:由通式(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2表示的无铅压电陶瓷,当x=0.03,y=0.15,z=0,u=0时为(Li0.03Na0.15K0.82)NbO3 Formula: lead-free piezoelectric ceramics represented by the general formula (1-u)[(1-z)(Li x Na y K 1-xy )NbO 3 +zMTiO 3 ]+uMnO 2 , when x=0.03, y= 0.15, z=0, u=0: (Li 0.03 Na 0.15 K 0.82 )NbO 3

制备工艺如前所述,得到的无铅压电陶瓷的性能参数如下(为了清楚起见,列表说明):   烧结温度   烧结工艺   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1080℃   A   99   106   0.32   0.26   444   429   10.74   4.83   1080℃   B   114   125   0.37   0.35   421   406   11.47   3.58 The preparation process is as described above, and the performance parameters of the lead-free piezoelectric ceramics obtained are as follows (for clarity, the list shows): Sintering temperature Sintering process d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1080°C A 99 106 0.32 0.26 444 429 10.74 4.83 1080°C B 114 125 0.37 0.35 421 406 11.47 3.58

实施例二:Embodiment two:

配方:当x=0.03,y=0.25,z=0,u=0时为(Li0.03Na0.25K0.72)NbO3 Formula: (Li 0.03 Na 0.25 K 0.72 )NbO 3 when x=0.03, y=0.25, z=0, u= 0

制备工艺如前所述,得到的无铅压电陶瓷的性能参数如下:The preparation process is as described above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows:

  烧结温度 Sintering temperature   烧结工艺 Sintering process   d33/10-12pC/Nd 33 /10 -12 pC/N   Kp K p   ε ε   tanδ/% tanδ/%   退火前 Before annealing   退火后 After annealing   退火前 Before annealing   退火后 After annealing   退火前 Before annealing   退火后 After annealing   退火前 Before annealing   退火后 After annealing   1080℃ 1080°C   A A   109 109   127 127   0.32 0.32   0.32 0.32   478 478   508 508   10.81 10.81   5.47 5.47   1080℃ 1080°C   B B   111 111   135 135   0.33 0.33   0.31 0.31   471 471   539 539   9.34 9.34   4.46 4.46

实施例三:Embodiment three:

配方:当x=0.02,y=0.15,z=0,u=0时为(Li0.02Na0.15K0.83)NbO3 Formula: (Li 0.02 Na 0.15 K 0.83 )NbO 3 when x=0.02, y=0.15, z=0, u= 0

制备工艺如前所述,得到的无铅压电陶瓷的性能参数如下:   烧结温度   烧结工艺   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1070℃   A   187   181   0.36   0.28   692   627   7.81   2.68   1070℃   B   222   175   0.39   0.23   678   534   8.05   2.72   1075℃   A   161   167   0.37   0.30   776   805   4.22   4.96   1075℃   B   168   175   0.35   0.32   819   838   4.00   4.52   1080℃   A   168   175   0.33   0.32   761   780   4.88   4.2   1080℃   B   174   172   0.34   0.29   776   780   5.42   4.16   1090℃   B   143   155   0.34   0.36   517   505   4.19   3.78 The preparation process is as described above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature Sintering process d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1070°C A 187 181 0.36 0.28 692 627 7.81 2.68 1070°C B 222 175 0.39 0.23 678 534 8.05 2.72 1075°C A 161 167 0.37 0.30 776 805 4.22 4.96 1075°C B 168 175 0.35 0.32 819 838 4.00 4.52 1080°C A 168 175 0.33 0.32 761 780 4.88 4.2 1080°C B 174 172 0.34 0.29 776 780 5.42 4.16 1090°C B 143 155 0.34 0.36 517 505 4.19 3.78

实施例四:Embodiment four:

配方:当x=0.02,y=0.25,z=0,u=0时为(Li0.02Na0.25K0.73)NbO3 Formula: (Li 0.02 Na 0.25 K 0.73 )NbO 3 when x=0.02, y=0.25, z=0, u= 0

制备工艺如前所述,采用埋粉烧结方法,得到的无铅压电陶瓷的性能参数如下:   烧结温度   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1075℃   185   194   0.36   0.32   585   567   5.46   4.57   1080℃   165   166   0.32   0.28   674   697   5.30   4.19   1120℃   125   152   0.30   0.30   497   544   6.43   5.28 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1075°C 185 194 0.36 0.32 585 567 5.46 4.57 1080°C 165 166 0.32 0.28 674 697 5.30 4.19 1120°C 125 152 0.30 0.30 497 544 6.43 5.28

实施例五:Embodiment five:

配方:当x=0.01,y=0.15,z=0,u=0时为(Li0.01Na0.15K0.84)NbO3 Formula: (Li 0.01 Na 0.15 K 0.84 )NbO 3 when x=0.01, y=0.15, z=0, u= 0

制备工艺如前所述,采用埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1080℃   119   115   0.32   0.25   312   282   9.29   3.87 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1080°C 119 115 0.32 0.25 312 282 9.29 3.87

实施例六:Embodiment six:

配方:当x=0.01,y=0.25,z=0,u=0时为(Li0.01Na0.25K0.74)NbO3 Formula: (Li 0.01 Na 0.25 K 0.74 )NbO 3 when x=0.01, y=0.25, z=0, u= 0

制备工艺如前所述,采用埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1080℃   112   112   0.31   0.31   288   262   7.72   5.61 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1080°C 112 112 0.31 0.31 288 262 7.72 5.61

实施例七:Embodiment seven:

配方:当x=0.01,y=0.35,z=0,u=0时为(Li0.01Na0.35K0.64)NbO3 Formula: (Li 0.01 Na 0.35 K 0.64 )NbO 3 when x=0.01, y=0.35, z=0, u= 0

制备工艺如前所述,采用埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1080℃   110   117   0.35   0.23   334   285   10.46   4.29 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1080°C 110 117 0.35 0.23 334 285 10.46 4.29

实施例八:Embodiment eight:

配方:当x=0.04,y=0.25,z=0.01,u=0时为0.99(Li0.04Na0.25K0.71)NbO3+0.01Ca TiO3 Formula: when x=0.04, y=0.25, z=0.01, u=0, it is 0.99(Li 0.04 Na 0.25 K 0.71 )NbO 3 +0.01Ca TiO 3

制备工艺如前所述,得到的无铅压电陶瓷的性能参数为:   烧结温度   烧结工艺   d33/10-12pC/N   Kp   ε   tanδ/%   退火前   退火后   退火前   退火后   退火前   退火后   退火前   退火后   1090℃   A   123   114   0.32   0.25   382   344   9.05   4.51   1090℃   B   124   115   0.33   0.30   535   446   18.52   5.48 The preparation process is as described above, and the performance parameters of the obtained lead-free piezoelectric ceramics are: Sintering temperature Sintering process d 33 /10 -12 pC/N K p ε tanδ/% Before annealing After annealing Before annealing After annealing Before annealing After annealing Before annealing After annealing 1090°C A 123 114 0.32 0.25 382 344 9.05 4.51 1090°C B 124 115 0.33 0.30 535 446 18.52 5.48

实施例九:Embodiment nine:

配方:当x=0.03,y=0.25,z=0.05,u=0时为0.95(Li0.03Na0.25K0.72)NbO3+0.05 SrTiO3 Formula: when x=0.03, y=0.25, z=0.05, u=0, it is 0.95(Li 0.03 Na 0.25 K 0.72 )NbO 3 +0.05 SrTiO 3

制备工艺如前所述,采用不埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   ε   tanδ/%   1125℃   113   812   41.17 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N ε tanδ/% 1125°C 113 812 41.17

实施例十:Embodiment ten:

配方:当x=0.02,y=0.25,z=0.1 u=0时为0.9(Li0.02Na0.25K0.73)NbO3+0.1 MgTiO3 Formula: when x=0.02, y=0.25, z=0.1 u=0, it is 0.9(Li 0.02 Na 0.25 K 0.73 )NbO 3 +0.1 MgTiO 3

制备工艺如前所述,采用不埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   ε   tanδ/%   1120℃   50   390   16.64 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N ε tanδ/% 1120°C 50 390 16.64

实施例十一:Embodiment eleven:

配方:当x=0.01,y=0.25,z=0.15,u=0时为0.85(Li0.01Na0.25K0.74)NbO3+0.15BaTiO3 Formula: when x=0.01, y=0.25, z=0.15, u=0, it is 0.85(Li 0.01 Na 0.25 K 0.74 )NbO 3 +0.15BaTiO 3

制备工艺如前所述,采用不埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   ε   tanδ/%   1140℃   30   400   7.77 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N ε tanδ/% 1140°C 30 400 7.77

实施例十二:Embodiment 12:

配方:当x=0.03,y=0.25,z=0,u=0.01时为0.99(Li0.03Na0.25K0.72)NbO3+0.01MnO2 Formula: when x=0.03, y=0.25, z=0, u=0.01, it is 0.99(Li 0.03 Na 0.25 K 0.72 )NbO 3 +0.01MnO 2

制备工艺如前所述,采用不埋粉烧结方法,得到的无铅压电陶瓷的性能参数为:   烧结温度   d33/10-12pC/N   ε   tanδ/%   1125℃   110   670   12.37 The preparation process is as mentioned above, and the performance parameters of the obtained lead-free piezoelectric ceramics are as follows: Sintering temperature d 33 /10 -12 pC/N ε tanδ/% 1125°C 110 670 12.37

Claims (10)

1.一种无铅压电陶瓷组合物,其特征是由通式(1-u)[(1-z)(LixNayK1-x-y)NbO3+zMTiO3]+uMnO2表示的主要组分组成,式中0.01≤x≤0.2,0.2≤y≤0.7,0.01≤z≤0.25,0≤u≤0.05,M表示至少是一种选自下列的二价金属离子:Ca、Mg、Ba和(或)Sr。1. A lead-free piezoelectric ceramic composition is characterized in that it is represented by general formula (1-u) [(1-z) (Li x Na y K 1-xy ) NbO 3 +zMTiO 3 ]+uMnO 2 Main component composition, where 0.01≤x≤0.2, 0.2≤y≤0.7, 0.01≤z≤0.25, 0≤u≤0.05, M represents at least one divalent metal ion selected from the following: Ca, Mg, Ba and (or) Sr. 2.如权利要求1的无铅压电陶瓷组合物,其特征是当u=0时,由通式(1-z)(LixNayK1-x-y)NbO3+zMTiO3表示的主要组分组成,式中0.01≤x≤0.2,0.2≤y≤0.7,0.01≤z≤0.25,M表示至少是一种选自下列的二价金属离子:Ca、Mg、Ba和(或)Sr。2. The lead-free piezoelectric ceramic composition as claimed in claim 1, characterized in that when u=0, by the general formula (1-z) (Li x Na y K 1-xy ) NbO 3 +zMTiO 3 represented mainly Component composition, where 0.01≤x≤0.2, 0.2≤y≤0.7, 0.01≤z≤0.25, M represents at least one divalent metal ion selected from the following: Ca, Mg, Ba and (or) Sr. 3.如权利要求1的无铅压电陶瓷组合物,其特征是当z=0,u=0时,由通式(LixNayK1-x-y)NbO3表示的主要成分组成,式中0.01≤x≤0.2,0.2≤y≤0.7。3. the lead-free piezoelectric ceramic composition as claimed in claim 1, it is characterized in that when z=0, u=0, by general formula (Li x Na y K 1-xy ) NbO 3 represent main components to form, formula In 0.01≤x≤0.2, 0.2≤y≤0.7. 4.如权利要求1的无铅压电陶瓷组合物,其特征是当z=0时,由通式(1-u)(LixNayK1-x-y)NbO3+uMnO2,0≤u≤0.05。4. The lead-free piezoelectric ceramic composition according to claim 1, characterized in that when z=0, by the general formula (1-u)(Li x Na y K 1-xy )NbO 3 +uMnO 2 , 0≤ u≤0.05. 5.一种制备如权利要求1至4所述的无铅压电陶瓷组合物的方法,其特征是制备无铅压电陶瓷的极化工艺为阶梯式,极化时先在电压2.5KV/mm时保压10~20分钟,再在电压4.0KV/mm下保压10~20分钟,然后在电压5.0~6.0KV/mm下保压30分钟;无铅压电陶瓷在1070-1190℃的温度下烧结。5. A method for preparing the lead-free piezoelectric ceramic composition as claimed in claims 1 to 4, characterized in that the polarization process for preparing the lead-free piezoelectric ceramic is a step type, and the polarization is first performed at a voltage of 2.5KV/ mm, keep the pressure for 10-20 minutes, then keep the pressure for 10-20 minutes at a voltage of 4.0KV/mm, and then keep the pressure for 30 minutes at a voltage of 5.0-6.0KV/mm; sintering temperature. 6.如权利要求1的无铅压电陶瓷组合物,其特征是由配方0.99(Li0.04Na0.25K0.71)NbO3+0.01CaTiO3组成。6. The lead-free piezoelectric ceramic composition according to claim 1, characterized by the composition of 0.99 (Li 0.04 Na 0.25 K 0.71 ) NbO 3 +0.01CaTiO 3 . 7.如权利要求1的无铅压电陶瓷组合物,其特征是由配方0.95(Li0.03Na0.25K0.72)NbO3+0.05SrTiO3组成。7. The lead-free piezoelectric ceramic composition according to claim 1, characterized by the composition of 0.95(Li 0.03 Na 0.25 K 0.72 )NbO 3 +0.05SrTiO 3 . 8.如权利要求1的无铅压电陶瓷组合物,其特征是由配方0.9(Li0.02Na0.25K0.73)NbO3+0.1MgTiO3组成。8. The lead-free piezoelectric ceramic composition according to claim 1, characterized by the composition of formula 0.9 (Li 0.02 Na 0.25 K 0.73 ) NbO 3 +0.1MgTiO 3 . 9.如权利要求1的无铅压电陶瓷组合物,其特征是由配方0.85(Li0.01Na0.25K0.74)NbO3+0.15BaTiO3组成。9. The lead-free piezoelectric ceramic composition according to claim 1, characterized by the composition of 0.85 (Li 0.01 Na 0.25 K 0.74 ) NbO 3 +0.15 BaTiO 3 . 10.如权利要求3的无铅压电陶瓷组合物,其特征是由配方0.99(Li0.03Na0.25K0.72)NbO3+0.01MnO2组成。10. The lead-free piezoelectric ceramic composition according to claim 3, characterized by the composition of formula 0.99(Li 0.03 Na 0.25 K 0.72 )NbO 3 +0.01MnO 2 .
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