CN1797201B - How to make a miniature image - Google Patents
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- CN1797201B CN1797201B CN 200410103534 CN200410103534A CN1797201B CN 1797201 B CN1797201 B CN 1797201B CN 200410103534 CN200410103534 CN 200410103534 CN 200410103534 A CN200410103534 A CN 200410103534A CN 1797201 B CN1797201 B CN 1797201B
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- 238000000034 method Methods 0.000 claims abstract description 76
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000004744 fabric Substances 0.000 claims description 71
- 238000005260 corrosion Methods 0.000 claims description 9
- 230000007797 corrosion Effects 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 239000003086 colorant Substances 0.000 claims description 7
- 210000000988 bone and bone Anatomy 0.000 claims description 4
- 230000003749 cleanliness Effects 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 229920002120 photoresistant polymer Polymers 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 56
- 239000007788 liquid Substances 0.000 description 19
- 239000007787 solid Substances 0.000 description 19
- 239000007921 spray Substances 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 5
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
The invention relates to a method for manufacturing a miniature image, which comprises the following steps: providing a clean and pollution-free medium object; coating the microfluid of the photoresist material on the surface of the medium object to form a first microfluid layer; and exposing and developing the first microfluid layer by using a first mask plate to obtain a desired accurate micro-image. The width of the first microfluid layer before development is larger than the width of the micro-image of the first microfluid layer after development, and the height of the first microfluid layer before development is larger than the height of the micro-image of the first microfluid layer after development. The invention overcomes the problem of film thickness flatness and can obtain various precise patterns with high uniformity of film thickness.
Description
Technical field
The present invention particularly the method that (micro-fluidic deposition) makes miniature image (micro-pattern) relevant for a kind of in conjunction with photodevelopment technology (photo-lithography) and microfluid cloth relevant for a kind of method for making of miniature image.
Background technology
The pertinent literature that relevant miniature image is made, for example United States Patent (USP) the 5th, 453, disclosed a kind of manufacture method for No. 876, wherein photoresist type resin (photoresist) has been utilized specific mask plate (mask) exposure and be made into a slice microlens array (micro-lens array) based on little developing technique (photolitho graphy-basedtechnology).Though little developing technique has the advantage of high position precision, the relevant manufacturing restriction of exposure energy is being arranged aspect the height of coating photoresist type resin.
United States Patent (USP) the 5th, 644 in addition, then disclosed a kind of with pull model technology (extruding﹠amp No. 431; Molding technology), utilize particular mold (mask) to suppress a microlens array (micro-lens sheet) general optics plastic material (plastic, for example PP, PET).Though this technology has high-speed mass-produced advantage, on manufactured size and precision, still exist restriction.Above-mentioned in addition method all need utilize the pattern (mask plate or mould) of prior making to produce, and so elasticity is not had in image distribution and position, and can improve cost of manufacture.
In addition, CANON (CANON Inc.) has disclosed the miniature image manufacture method (Inkjet Method) of so-called " ink-jet method ", it utilizes ink discharge device (InkjetHe ads) with red, green, blue three colors simultaneously spray printing on 1. transparency carriers (as United States Patent (USP) the 5th, 593, No. 757 disclose), or 2. have (United States Patent (USP) the 5th on the transparency carrier of ink absorbing layer (Ink Receiver), 593, No. 757 disclose), or 3. have ink absorbing layer (Ink Receiver) and be provided with (United States Patent (USP) the 5th on the transparency carrier of the close and distant district of ink (Hydrophobic or not), 716, No. 740 disclose).In above-mentioned first kind of ink ejecting method, each ink droplet moves on substrate surface easily, and the possibility of result causes the serious problems of colour mixture (Color Mixing) between three kinds of colors of red, green, blue; In second kind of ink ejecting method, each ink droplet can be because diffusion (Diffusion) infiltrates through ink absorbing layer, and the hemisphere round edge (Circular) that the formation shade changes, cause the optical filtering bad, simultaneously, when ink droplet excessive (Over Drop Size) or diffusion excessive (OverDiffusion), the result also may cause the serious problems of colour mixture (ColorMixing) between three kinds of colors of red, green, blue; In the third ink ejecting method, may produce the problem of colour mixture between color though the close and distant district of ink handles in the time of can avoiding the excessive or diffusion of ink droplet excessive, but still exist because the serious problems of shade that diffusion the causes variation hemisphere round edge of ink droplet.
At the problems referred to above, the worker grinds institute and had once disclosed a kind of so-called microfluidic methods (MicroFluidic Method), and it is exposed in U.S. Patent Publication No. 20030118921A1.The method is that (Transparent Substrate) makes several little rectangular-shaped zanjons (Micro Stripped and Deep Channels) on a transparency carrier, with the usefulness as the high-wall (High Wall Boundaries) of temporary fluid partitioning; Then, use at least one group of little fluid drips pipe unit of tool (Micro-Fluidic Jetting Device), several colour liquids (Color Fluids) of being scheduled to are injected predetermined little rectangular-shaped zanjon, with the painted manufacturing course (Color Layer) of finishing colored filter.Yet the result may exist the requirement that can't reach homogeneous film thickness for the curing molding of colour liquid.
In ink-jet technology field (inkjet technology), because having, little drop (microdroplet) promptly needs i.e. spray (drop-on-demand, D OD) and solidify the basic function that cloth (coating-like deposition), therefore little by little be applied to " electronic circuit " (e.g: chip bonding (flip-chip bonding) circuit board (circuitboard)), " transistor " (e.g: thin film transistor (TFT) (thin-film transistor)), " video display " photovoltaic aspects such as (e.g:LCD colored filter (LCD Color Filter)).When above-mentioned application, the image-forming (micro patterning) of this photovalve in micro-dimension, still have and solidify the phenomenon that cloth rete became uneven (uneven film thickness), this phenomenon is to result from microfluid person's character (fluidic nature), and often becomes the major obstacle of ink-jet applications processing procedure.
Summary of the invention
In view of this, the objective of the invention is to overcome the problem of this thickness flatness (unevenissue), and obtain the various accurate pattern of high evenness thickness (highly uniform thickness offilm).
The method for making of miniature image of the present invention comprises the following steps: to provide the media object of a cleanliness without any pollution; The microfluid cloth of one photo-induced corrosion resistant material in the media object surfaces, and this microfluid forms one first microfluid layer behind bone dry, this first microfluid layer forms smooth and the cured film that the edge is higher than central authorities of central authorities; One first mask plate is placed the top of this first microfluid layer, but do not contact this first microfluid layer; And utilize this first mask plate that the first microfluid layer is exposed and develop, remove the edge of this cured film and the accurate miniature image that obtains at the central flat site of this cured film to be desired.
The method for making of miniature image of the present invention, the width of the miniature image after the width before wherein the first microfluid layer develops develops greater than the first microfluid layer, and, the height of the miniature image after the height before the first microfluid layer develops develops greater than the first microfluid layer.
The method for making of miniature image of the present invention more comprises the following steps: to form a gap in the first microfluid layer, and this gap is the open area that is positioned on this medium surface; The microfluid cloth of photo-induced corrosion resistant material in above-mentioned gap and formed one second microfluid layer; And utilize one second mask plate that the second microfluid layer is exposed and develop, and obtain the accurate miniature image desired.
The method for making of miniature image of the present invention, the first microfluid layer can be microfluid and stacks cloth continuously and in the medium surface, and form the summary solid line of distance continuously, or microfluid stacks cloth continuously and in the medium surface, and surround into the hollow frame image of summary.
The present invention provides a kind of method for making of miniature image in addition, comprises the following steps: to provide the media object of a cleanliness without any pollution; With the microfluid of the photo-induced corrosion resistant material of multiple different colours in regular turn alternately respectively cloth in the diverse location of medium surface, and described microfluid forms a plurality of microfluid layers behind bone dry, and each microfluid layer forms central smooth and cured film that the edge is higher than central authorities; And provide a plurality of mask plates, described mask plate to correspond respectively to described microfluid layer; In regular turn with described mask plate respectively to described microfluid layer exposure imaging, remove the edge of described cured film and obtain the accurate miniature image that shades of colour is desired at the central flat site of described cured film, wherein each mask plate places the top of pairing microfluid layer, but does not contact this corresponding microfluid layer.
The method for making of miniature image of the present invention, described microfluid layer be with staggered mode in regular turn cloth on this media object.
The method for making of miniature image of the present invention, the width of the miniature image after the width before this each microfluid layer develops develops greater than it, and, the height of the miniature image after the height before this each microfluid layer develops develops greater than it.
The present invention has overcome the problem of thickness flatness, and can obtain the various accurate pattern of high evenness thickness.
Description of drawings
Fig. 1 a is the front elevation of the formed film distribution structure of little drop;
Fig. 1 b is the side view of the formed film distribution structure of little drop;
Fig. 2 a, 2b represent that single little drop of the present invention forms the method for miniature image;
Fig. 3 a～3d represents that single little drop of the present invention forms the method for miniature image;
Fig. 4 a～4d represents that utilization of the present invention mixes the method for the formation miniature image that develops;
Fig. 5 represents that the present invention forms the method for miniature image with dual drop;
Fig. 6 a, 6b represent that the present invention method with the microfluid superposition cloth that many drops form a miniature image;
Fig. 7 a, 7b represent that the present invention method with the microfluid superposition cloth that many drops form a miniature image;
Fig. 8 a～8c represents the manufacture method of the colored miniature image that the staggered cloth of the present invention.
Embodiment
For above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, a preferred embodiment cited below particularly, and cooperate appended diagram, be described in detail below.
The physical principle of being utilized:
When the liquid of little drop (droplet liquid flow) is gone into the solid surface (solid surface) of media object by spray in normal air, liquid wherein, solid, aerosphere upper thread (interfacial lines) are reached a balance angle state (inequilibrium with specific contact angle) the most at last, and this physical relation formula can be represented by Young-Laplace equation (Young-Laplace equations):
γ
LVCos (θ)=γ
SV-γ
LSAnd
ΔP＝ρgt＝γ
LS(1/r
1+1/r
2)
Wherein, θ represents the contact angle (contact angle) of liquid-solid boundary line, γ
LV, γ
SV, γ
LSRepresent the surface energy (surfaceenergy) of liquid gas, solid and gas, liquid-solid boundary respectively, Δ P is that the liquid external and internal pressure is poor, ρ express liquid density, and g represents acceleration of gravity, t value representation liquid maximum height, and r
1, r
2Express liquid is in the radius-of-curvature of solid surface two directions respectively.As given certain γ of difference
LV, γ
SV, and γ
LSDuring numerical value, the contact angle θ value of liquid-solid boundary line just can be tried to achieve.Simultaneously, suppose that again liquid is at the radius-of-curvature of solid surface two directions identical (circular arc of non-directional difference, r
1=r
2=r) and liquid volume (V), density, acceleration of gravity all known, then this t value and r value can be further by relationship V=π/6 * [t
3+ 3r
2T] determine jointly to try to achieve.Therefore, can utilize the relation of the surface energy properties of this liquid gas, solid and gas, liquid-solid boundary, come the position and the moulding result of accurate controlling liquid at the solid surface of media object.
Yet, must further consider that liquid is after reaching static balancing, the liquid of this moment must see through the phase change of cooling or steaming (waving) and send out and further be transformed into solid (phasechange or evaporation from liquid state to solid state), forms the miniature image of being desired at last.This class is converted into the phase transition process of solid (do not have mobile) by liquid, and its time may be experienced approximately between the several seconds (secend, sec) to several minutes (minute, min); In the meantime, though it has the fixed position that radius of circle changes that value is rough and remain unchanged (Δ r/r ≈ 0), but pass under the capillary flow diffusions (diffusion balance) such as (thermal-capillary flow) in normal heat, can nature form smooth but profile (concave profile) phenomenon as the mountain valley that the edge is higher of central authorities.Wherein, the area ratio of flat site and higher fringe region and height ratio will be decided on solid concentration materials such as (concentration) composition.Therefore, propose to utilize the method for exposure imaging (photo lithography) further to do deburring (modifydraft), and obtain more accurate image, to reach the homogeneous film thickness requirement.
In addition, in the manufacture process (fabrication processing), adjacent little liquid is the solid surface of going into the media object in difference spray constantly.In other words, the present invention proposes to utilize " time (time) " reach the spray rule (jetting methodology) that staggered cloth that " position (location) " branch comes (interlaced deposition).So, above-mentioned reach static balancing during, and even during reaching phase transformation, the moulding of adjacent image (formation of shape) can be guaranteed mutually not disturbing effect and normally finish.
The structure of little drop:
Below describe concrete technological means of the present invention in detail.At first, for the technical method that simple, convenient explanation institute of the present invention desire discloses, (Schematic configuration of droplet film) is that explanation is done on the basis with one single little drop cloth film basic structure, shown in Fig. 1 a, 1b.Fig. 1 a represents the front elevation of one single formed cloth film of little drop (dropletfilm) 10, and Fig. 1 b is the side view of cloth film 10.Cloth film 10 is the cured film (dry film) of complete evaporation drying.The structure of cloth film 10 comprises a flat region 4 that is positioned at central authorities and the marginarium 6 that is positioned at the 4 liang of lateral processes in flat region.The diameter of this cloth film 10 (diameter of droplet) is D
0, cloth film 10 width (widthof film) after solidifying is W
0, the width of the flat region 4 after cloth film 10 solidifies is W
b(widthof bank).Wherein, the diameter D of the cloth film 10 of little drop
0It is the width W that is equal to after cloth film 10 solidifies
0, and the width W of the flat region 4 of cloth film 10
bShould be less than the diameter D of cloth film 10
0In other words, can utilize following formula Eq.1 to come standard to go out single little drop cloth film basic structure.
D
0＝W
0
W
b＜W
0......Eq.1
Illustrate one single little drop cloth film forms homogeneous film thickness (uniform thin film) on substrate fundamentum (basic model of hybridmethod) further with next, shown in Fig. 2 a, 2b.In Fig. 2 a, 2b, a little drop cloth on a media object (media substrate) 2 and is formed cloth film 10, comprises flat region (uniform area) 4 and marginarium (rib area) 6 after cloth film 10 solidifies.In this physical dimension that clearly defines cloth film 10 once more, include width (the width of film) W of cloth film 10
0, cloth film 10 width (the width of bank) W of flat region 4
b, cloth film 10 the height h of flat region 4
b(height of bank), and the height h0 (height of rib) of marginarium 6.Can find out in this, little drop is in the evaporation solidification process (evaporation), pass under the capillary flow diffusions (diffusion balance) such as (thermal-capillaryflow) in normal heat, form central smooth naturally but profile (concave profile) phenomenon as the mountain valley that the edge is higher; In other words, the height h of marginarium 6
0Be height h greater than flat region 4
bSo, on media object 2, for the forming process, represent non-homogeneous thickness relative position relation for the cloth film 10 of little drop with following formula Eq.2.
h
b＜h
0，h≥0......Eq.2
At the target object of micro-dimension, the diameter D of the cloth film 10 of this little drop
0The width W of the flat region 4 of value and cloth film 10
bBe worth most boundary in tens microns to (ranging from several 10 μ m to several 100 μ m) between the hundreds of micron, the height h of marginarium 6
0Height h with flat region 4
bThen may be defined in (ranging from 1 μ m to several micro-meters) between 1 micron to several microns.Wherein, flat region 4 will be looked solid concentration materials such as (concentration) composition and determine it with the area ratio and the height ratio of marginarium 6.Hereto, form homogeneous film thickness to single little drop cloth film and on substrate and made enough complete basic structure definition.Below will elaborate as how micro-optic and fluid and make technical method, the flow process of these miniature images and implement content such as framework.
Technological means:
In order to reach miniature image that little drop cloth at the accurate zone location of media object (precise patterning), can utilize little development (lithographypatterning, LP) method and microfluid cloth (micro-fluidic deposition, MD) reach this purpose, shown in Fig. 3 a～3d.So-called microfluid cloth (micro-fluidic deposition), is that the micro-droplet generator (droplet actuator) that utilizes similar ink-jet technology (inkjet-basedtechnology) produces the position that fine droplet (micro droplet) spray is desired on the media object.In the method for making flow process of Fig. 3 a～3d, at first provide a cleaning not have dirty media object (mediasubstrate) 12; Then, in first step, microfluid 14 cloth (MD) in media object 12 fronts, shown in Fig. 3 a.Then, in second step, fine droplet cloth film can complete evaporation drying become a cured film (dry film) (the first microfluid layer 16), shown in Fig. 3 b; Generally speaking, the material of the first microfluid layer 16 is the more hydrophilic photo-induced corrosion resistant material of general tool (photo-resist, abbreviation PR), and thickness circle gets final product between several microns (μ m) in hundreds of nanometer (nm).Then, in third step, utilize 18 pairs of first microfluid layers 16 of mask plate (mask with pattern) of a tool mocromembrane image to expose and (the exposition and stripping that develops, for example: I-line 365nm/5mW mercury rayed), so just can obtain the miniature image desired on media object 12 surfaces, shown in Fig. 3 c.At last, in the 4th step, again the miniature image of being desired is developed (stripping), obtain the miniature image 20 desiring to stay, shown in Fig. 3 d.Notice that little drop passes in normal heat under the diffusion such as capillary flow in the evaporation solidification process (evaporation), can nature form the smooth but profile phenomenon as the mountain valley that the edge is higher of central authorities.In addition, the first microfluid layer 16 can be strip (stripe), square (square), circular (circular), oval various possible shapes such as (elliptic), looks closely the pattern of being desired and decides.
Method for making flow process in Fig. 4 a～4d, then further disclose another kind of mix develop (droplet lithography) and add little drop cloth film (micro-fluidicdeposition) mode, can be used as colored filter manufacturing (color filter).Wherein, first step is to be similar to Fig. 3 a, 3b to form one first microfluid layer 34 (also being called " array one patterned zone, border (boundarymatrix) " herein) on the surface of a media object 32, and in the first microfluid layer 34, form both gap 30 of set a distance, shown in Fig. 4 a.Generally speaking, the material of the first microfluid layer 34 is the material of general tool photoresist characteristic, and thickness can be that the boundary is promptly enough between the extremely several microns of hundreds of nanometer (nm) (μ m).Then, in second step, utilize the identical mask plate of a tool micro drawing formula (mask with pattern) to carry out exposure image (exposed andpatterned, for example: I-line 365nm/5mW mercury rayed), so just can obtain the miniature image 36 desired on media object 32 surfaces, shown in Fig. 4 b.Then, in third step, (for example, colored photoresist) microfluid cloth (microfluidc depositing) in gap 30, shown in Fig. 4 c with the little drop 38 of another kind again.At last, in the 4th step, carry out evaporation drying (drying) again, obtain the miniature image 40 desiring to stay, shown in Fig. 4 d.Similar with the method shown in Fig. 3 a～3d, the first microfluid layer 34 can be strip (stripe), square (square), circular (circular), oval different shapes such as (elliptic), looks closely the pattern of being desired and decides.
In this, the effect of above-mentioned " array one patterned zone, border (boundary matrix) " method is the circle footpath size that has limited miniature image 40; In other words, for the miniflow drop (micro-fluid droplet) of a certain volume of tool, it only precisely determines its circle footpath value on medium dignity, and and has determined its height value.Yet when the miniflow drop that only has certain set volume, and desire obtains bigger height value, and said method is not obviously still enough reached this purpose.
On the other hand, the miniflow drop (fluid) of numerous species is the solution of mainly being made up of solute (solidcontent) and two kinds of compositions of solvent (solvent) (liquidsolution).Generally speaking, suppose that solute (solid content) component content is s, then solvent (solvent) component content is 100%-s.Under this case condition, though being worth size, the circle footpath of little drop can not change, the final volume of little drop will be reduced to V * s (in other words, having reduced 100%-s).For example, if the miniflow drop of a certain volume V is by 10 solute (photo-induced corrosion resistant material PR, i.e.s=10%) and 90 percent solvent (PGMEA, i.e.100%-10%=90%) form solution, then the final solidified forming volume of little drop of its formation will be reduced to V * 10% (in other words, having reduced 90%).
Therefore, the mode of (micro-fluidicdeposition) with next microfluid cloth of further explaining the above-mentioned first microfluid layer 34 (border array (boundary matrix)), as shown in Figure 5 with the method for one dimension lines.In Fig. 5, a kind of microfluid superposition cloth with dual drop (dualdrops) formation one miniature image method.Has a diameter D when a pair of
0 Little drop 50 of value more roomy single miniature image of (overlap) one-tenth that overlaps each other, its place's of coinciding width is W
iSo repeating this superposition cloth mode and can obtain more roomy single miniature image significantly.Therefore, in Fig. 6 a, 6b, describe a kind of microfluid superposition cloth in detail and (stacking micro-fluidic deposition, SMD) method with many drops (multiple drops) formation one miniature image.At first, prepare a cleaning and do not have dirty media object (substrate) 42; Then, utilizing microfluid cloth method produces small many drops (multiple drops) in these media object 42 positive sprays and forms one first microfluid layer, 46, the first microfluid layer 46 and have line footpath width (widthof film) w
0Generally speaking, the material of this first microfluid layer 46 is the more hydrophilic photo-induced corrosion resistant material of general tool, but the thickness circle gets final product between several microns (μ m) in hundreds of nanometer (nm).Then, utilize the mask plate (mask withpattern) of a tool miniature image to expose and (the exposition and stripping that develops again, for example: I-line365nm/5mW mercury rayed), so just can obtain the miniature image 48 desired on media object 42 surfaces, its line footpath width is W
bCertainly, line footpath width w herein
0Value should be greater than W
bBe worth, satisfy the fundamental relation of formula Eq.1 institute standard.
Be similar to the method for making flow process shown in Fig. 7 a, the 7b, include the microfluid manufacturing miniature image mode that microfluid superposition cloth the two-dimentional framework of (abbreviation SMD) method and little development (lithography) with next exposure another kind.The step that at first is the similar Fig. 6 of being same as a, 6b forms one first microfluid layer 54 (border array film boundarymatrix film).Then, utilize the mask plate of a tool miniature image to carry out exposure image again, so just can obtain the miniature image 56 desired in the media object surfaces.At the same time, also the rough first microfluid layer 54 of this profile is modified to the carefully and neatly done miniature image of profile 56.In addition, the miniature image 56 that should remind Fig. 7 b once more can be different shapes such as strip, square, circular, ellipse, looks closely little pattern of being desired and decides.
In above-mentioned these embodiment, the superposition mode that microfluid superposition cloth (SMD) method be not restricted to folk prescription to or single number.In the most general possibility, its superposition direction can be multi-direction (multiple directions) arbitrarily, can also be many numbers (multiple droplets) arbitrarily and microfluid cloth height value superposition drips number.
More than be to have disclosed a kind of LP or LP to add that the microfluid of SMD makes the method for miniature image, it can be applied to one dimension lines border array, two-dimentional framework border array film and utilize above-mentioned image to be border (boundary matrix, abbreviation BM) makes colored filter (color filter is called for short CF).Yet colored filter (color filter) image making that is directed to the latter is used, and can further propose need not the implementation method of border (BM-less), the following detailed description in detail.
Fig. 8 a, 8b, 8c represent that a kind of staggered cloth colored non-boundary array spectral filter (BM-less CF) manufacture method of (inte rlaced deposition).At first, suppose to satisfy little drop cloth of above-mentioned formula Eq.1 and Eq.2 miniature image relation and method, promptly it has the width W of cured film
0(width offilm, see Fig. 1 a), the flat region width W of cured film
bThe flat region height h of (width of bank sees Fig. 1 b), cured film
b(height of bank sees Fig. 2 b), and the height h of marginarium
0(height of rib sees Fig. 2 dimensional requirement a).Can three times (time factor) finishing the staggered cloth of different colours in three zones (positional factor).In the spray first time constantly, to double W
bSpacing, little drop 64 (for example blue B) spray of first kind of color is finished the cloth of the first microfluid layer 66 and on media object (substrate) 62; Then, utilize a tool mocromembrane image mask plate 68 (mask with pattern) to expose and (the exposition and stripping that develops, for example: I-line 365nm/5mW mercury rayed), so just can obtain the miniature image 70 of first color of being desired on media object 62 surfaces.This one, double W
bSpacing be to reserve as the spray zone of following two kind different colours to use.
Continue at then in the spray for the second time constantly, again to double W
bSpacing, little drop 74 (for example red R) spray of second kind of color in media object 62, is finished the cloth of the second microfluid layer 76 and; Then, utilize a tool mocromembrane image mask plate 78 to expose and develop, so just can obtain the miniature image 80 of second color being desired on media object 62 surfaces.At last, continue in the spray for the third time constantly, again to double W
bSpacing, little drop 84 of the third color (for example green) spray is finished the cloth of the 3rd microfluid layer 86 and in media object 62; Then, utilize a tool mocromembrane image mask plate 88 to expose and develop, so just can obtain the miniature image 90 of the 3rd color being desired on media object 62 surfaces.So, just, finishing the finished product of three-colour filter makes.Between, above-mentioned spray pattern cloth each time can allow the enough evaporation dryings of one section (drying) time to guarantee ability to cure.Particularly, be to notice that the curing that avoid not enough causes border joint colour mixture demoulding finishing for the third time in the pattern.
Certainly, the foregoing description with three staggered cloth and is exceeded.For example, be similar to above-mentioned ground, it is to extend further to 2 times, 4 times, 5 times, 6 times of more generalizing or K time (K is an integer).Notice that it is to guarantee that more the problem of not having the phase mutual interference produces that many more " time (times) " reaches between " position (location) " that staggered cloth; Yet it relatively will need many more number of times to finish whole spray patterns.
The above only is preferred embodiment of the present invention; so it is not in order to limit scope of the present invention; any personnel that are familiar with this technology; without departing from the spirit and scope of the present invention; can do further improvement and variation on this basis, so the scope that claims were defined that protection scope of the present invention is worked as with the application is as the criterion.
Being simply described as follows of symbol in the accompanying drawing:
4～flat region
6～marginal zone
10～cloth film
12～media object
14～microfluid
16～the first microfluid layers
18～mask plate
20～miniature image
30～gap
32～media object
34～the first microfluid layers
36～miniature image
38～little drop
40～miniature image
42～media object
46～the first microfluid layers
48～miniature image
50～little drop
54～the first microfluid layers
56～miniature image
62～media object
64～little drop
66～the first microfluid layers
68～mask plate
70～miniature image
74～little drop
76～the second microfluid layers
78～mask plate
80～miniature image
84～drop
86～the 3rd microfluid layers
88～mask plate
90～miniature image
D
0The diameter of～cloth film
W
bThe width of～flat region
W
0Width after～cloth film solidifies
h
bThe height of～flat region
h
0The height of～marginarium
Claims (11)
1. the method for making of a miniature image is characterized in that the method for making of described miniature image comprises the following steps:
The media object of one cleanliness without any pollution is provided;
The microfluid cloth of one photo-induced corrosion resistant material in this media object surfaces, and this microfluid forms one first microfluid layer behind bone dry, this first microfluid layer forms smooth and the cured film that the edge is higher than central authorities of central authorities;
One first mask plate is placed the top of this first microfluid layer, but do not contact this first microfluid layer; And
Utilize this first mask plate that this first microfluid layer is exposed and develop, remove the edge of this cured film and the miniature image that obtains at the central flat site of this cured film to be desired.
2. the method for making of miniature image according to claim 1, it is characterized in that: the width of the miniature image after the width before this first microfluid layer develops develops greater than this first microfluid layer, and, the height of the miniature image after the height before this first microfluid layer develops develops greater than this first microfluid layer.
3. the method for making of miniature image according to claim 1 is characterized in that more comprising the following steps:
Form a gap in this first microfluid layer, this gap is the open area that is positioned on this medium surface;
The microfluid cloth of photo-induced corrosion resistant material formation one second microfluid layer in this gap; And
Utilize one second mask plate that this second microfluid layer is exposed and develop, and obtain the miniature image desired.
4. the method for making of miniature image according to claim 3, it is characterized in that: the width of the miniature image after the width before this first microfluid layer develops develops greater than this first microfluid layer, and, the height of the miniature image after the height before this first microfluid layer develops develops greater than this first microfluid layer.
5. the method for making of miniature image according to claim 1 is characterized in that: this first microfluid layer is that microfluid stacks cloth continuously and in this medium surface, and forms the lines of distance continuously.
6. the method for making of miniature image according to claim 5, it is characterized in that: the width of the miniature image after the width before this first microfluid layer develops develops greater than this first microfluid layer, and, the height of the miniature image after the height before this first microfluid layer develops develops greater than this first microfluid layer.
7. the method for making of miniature image according to claim 1 is characterized in that: this first microfluid layer is that microfluid stacks cloth continuously and in this medium surface, and surrounds into the hollow frame image.
8. the method for making of miniature image according to claim 7, it is characterized in that: the width before this first microfluid layer develops is greater than the width of the miniature image of this first microfluid layer after developing, and, the height of the miniature image after the height before this first microfluid layer develops develops greater than this first microfluid layer.
9. the method for making of a miniature image is characterized in that the method for making of described miniature image comprises the following steps:
The media object of one cleanliness without any pollution is provided;
With the microfluid of the photo-induced corrosion resistant material of multiple different colours in regular turn respectively cloth in the diverse location of this medium surface, and described microfluid forms a plurality of microfluid layers behind bone dry, and each microfluid layer forms central smooth and cured film that the edge is higher than central authorities; And
A plurality of mask plates are provided, and described mask plate corresponds respectively to described microfluid layer;
In regular turn with described mask plate respectively to described microfluid layer exposure imaging, remove the edge of described cured film and obtain the miniature image that shades of colour is desired at the central flat site of described cured film, wherein each mask plate places the top of pairing microfluid layer, but does not contact this corresponding microfluid layer.
10. the method for making of miniature image according to claim 9 is characterized in that: described microfluid layer be with staggered mode in regular turn cloth on this media object.
11. the method for making of miniature image according to claim 9, it is characterized in that: the width of the miniature image after the width before this each microfluid layer develops develops greater than it, and, the height of the miniature image after the height before this each microfluid layer develops develops greater than it.
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|---|---|---|---|
| CN 200410103534 CN1797201B (en) | 2004-12-29 | 2004-12-29 | How to make a miniature image |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410103534 CN1797201B (en) | 2004-12-29 | 2004-12-29 | How to make a miniature image |
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| CN1797201A CN1797201A (en) | 2006-07-05 |
| CN1797201B true CN1797201B (en) | 2010-09-08 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118921A1 (en) * | 2001-12-25 | 2003-06-26 | Chin-Tai Chen | Micro-fluidic manufacturing method for forming a color filter |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118921A1 (en) * | 2001-12-25 | 2003-06-26 | Chin-Tai Chen | Micro-fluidic manufacturing method for forming a color filter |
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| CN1797201A (en) | 2006-07-05 |
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