CN1789921B - Attachment for position measurement device - Google Patents
Attachment for position measurement device Download PDFInfo
- Publication number
- CN1789921B CN1789921B CN2005101317217A CN200510131721A CN1789921B CN 1789921 B CN1789921 B CN 1789921B CN 2005101317217 A CN2005101317217 A CN 2005101317217A CN 200510131721 A CN200510131721 A CN 200510131721A CN 1789921 B CN1789921 B CN 1789921B
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- China
- Prior art keywords
- follower
- coating
- linkage section
- measurement device
- housing
- Prior art date
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- 238000005259 measurement Methods 0.000 title claims description 72
- 238000007789 sealing Methods 0.000 claims abstract description 43
- 230000007246 mechanism Effects 0.000 claims abstract description 30
- 238000009434 installation Methods 0.000 claims abstract description 19
- 238000000576 coating method Methods 0.000 claims description 59
- 239000011248 coating agent Substances 0.000 claims description 58
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000033001 locomotion Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 claims description 3
- 229910001573 adamantine Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 3
- 239000011247 coating layer Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 description 3
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000007786 electrostatic charging Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000007600 charging Methods 0.000 description 1
- 238000004512 die casting Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005334 plasma enhanced chemical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
- G01D5/34753—Carriages; Driving or coupling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24442—Error prevention by mechanical means by mounting means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
- G01D5/34738—Axles; Driving or coupling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/60—Means for precisely aligning or centering the disk of a rotary encoder, e.g. fitting jigs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
The invention relates to a follow-up part used for a position measuring device. The follow-up part is provided with a holding part of a scanning unit used for holding the position measuring device; an installation part used for fixing the follow-up part on an object to be measured; a connecting section, through which the holding part and the installation part of the follow-up part are mutually connected, and which adopts the composition and the arrangement that an elastic sealing mechanism attached on the connecting section along a casing body is guided, and the casing body is used as a dimensional standard for scanning an object passing through the scanning unit; a coating layer, through which the follow-up part is used for reducing the friction between the connecting section and the sealing mechanism. According to the invention, the follow-up part (5) adopts the structure that a formless carbon layer is arranged on at least the connecting section (50).
Description
Technical field
The present invention relates to a kind of follower that is used for a position-measurement device, and a kind of position-measurement device with such follower.
Background technology
Such follower comprises that the hold position, one of a scanning element that is used to hold described position-measurement device are used for follower is fixed on an installation position and the linkage section on the object to be measured, by this linkage section with follower hold the position and the installation position is joined to one another, and this linkage section is so configured and disposed: make a housing extend side by side and abut in respectively between the elastic sealing elements on the follower linkage section and be directed to, this housing is used for the dimensional standard of described position-measurement device.
Such follower particularly uses in the position-measurement device of a sealing, this position-measurement device is used to measure the relative position of the object of two relative motions, this measurement mechanism can with object to be measured in one be connected, and the housing that holds a dimensional standard has the slit that the direction of motion along the object of relative motion (direction of measurement) is extended, described follower (installation position by it can be connected with in described two objects another) passes the inside that this slit extend into housing, and this follower is installed in the enclosure interior by its hold position and one there, the structural unit (scanning element) that is used for position measurement connects.Like this, follower also passes a slit along the direction of measurement extension in the housing of position-measurement device, extend in the inside of housing by the described follower in this slit, couple together with mounting seat in the outside setting so that be arranged on the scanning element there, that be used to scan a dimensional standard that on housing, is provided with one.Make this follower be fixed on again in the object of described two relative motions one by this mounting seat.
Lathe bed and slide block that the described object of doing relative motion is a lathe, like this, their relative motion is converted to the relative motion of follower with respect to the housing of the supporting dimensional standard (particularly measuring scale) of position-measurement device, like this, follower is along the housing operation with respect to position-measurement device of the bearing of trend in slit, this acting in conjunction that moves through the dimensional standard on scanning element that is arranged on the follower and the housing that is arranged on the position measurement mechanism and measured.
Such position-measurement device both can be designed to length-measuring appliance (having a linearly extended slit in the housing of position-measurement device), also can be designed to angle measurement unit (having the slit that a corresponding arc ground extends), and according to different disclosed physical principle work, with by the described dimensional standard of scanning element scan setting on the housing of position-measurement device that is arranged on the follower.
In order to carry out good as far as possible sealing in the slit that the dimensional standard of protecting in the housing that is arranged on the position measurement mechanism (measurement scale) must pass the linkage section by follower in the position-measurement device housing; for this reason, make the elastic sealing elements that extends along the slit abut in respectively on each side of linkage section of follower in the both sides of the linkage section of follower.
In disclosed such position-measurement device, the elastic sealing elements that extends in the follower both sides is made of with strip form a kind of nonmetallic materials that can conduct electricity in EP 0 646 765 B1.Adopt the sealing element not only can stop foul or moisture to penetrate in the inside of housing thus, and can realize the electric shield of the sort of type of faraday cup simultaneously.
JP-A 02-027209 discloses a kind of linear position measurement mechanism, and the sealing mechanism as on the linkage section of lath design or affiliated two sides that abut in this meeting stile of wherein said follower is equipped with friction free, for example with the element of the form of immersion oil metal.Thus when move in the slit that follower is provided with on the housing at position measurement instrument, the friction between the meeting stile of described follower and thereon the sealing mechanism of reclining is reduced, and has avoided the wearing and tearing of sealing mechanism as much as possible.
Summary of the invention
Task of the present invention is, the follower that is used for position-measurement device of aforementioned type done further to improve aspect the acting in conjunction of the affiliated sealing mechanism of position-measurement device.
In order to finish this task, according to the invention provides a kind of follower that is used for a position-measurement device, this follower has the position that holds of a scanning element that is used to hold described position-measurement device; One is used for follower is fixed on an installation position on the object to be measured; A linkage section, by this linkage section with this follower hold the position and the installation position is joined to one another, and this linkage section so constitutes and is provided with: be directed to by the sealing mechanism flexible, that abut on this linkage section of a direction of measurement along a housing, described housing is used for a dimensional standard that will scan by scanning element; A coating, described follower utilize this coating to be used to reduce friction between linkage section and affiliated sealing mechanism; It is characterized in that, described follower is provided with the unbodied carbon-coating of a conduction on linkage section, described carbon-coating is extended to the fixed position in the installation position of follower at least always by the linkage section of follower, follower can be fixed on the object to be measured by this fixed position.
According to this, described follower is provided with a unbodied carbon-coating at least on its linkage section.Described linkage section with follower hold the position and the installation position couples together, and this follower contacts with the affiliated sealing mechanism of a position-measurement device in this linkage section.
Unbodied carbon-coating that is to say to be called diamond-like-carbon (DLC) because its special hardness also is called similar adamantine carbon-coating, perhaps is called hard unbodied carbon-coating (hard material layer).The coating that it is used as such follower can reduce friction and wear especially bigly.The fact shows, by a kind of unbodied carbon-coating is used for the linkage section of a follower that guides is carried out coating between sealing mechanism, just can realizes rubbing and reduce more than the order of magnitude, particularly until two orders of magnitude.Also do not see simultaneously tangible wearing and tearing are arranged.
Because the friction that reduces widely and make the minimise wear of two friction pairs, particularly sealing mechanisms therewith relatively, the foul that has just correspondingly reduced particularly itself to be caused by wearing and tearing enters into the housing of position-measurement device.
With the DLC title can find in a large number this can be for referencial use about making the document of such carbon-coating.The article of Martin Grischke in Jot 1/94 wherein for example arranged.In view of the above for example by means of a kind of pecvd process (spraying plating of plasma enhanced chemical steam-
PLasma
ENhanced
CHemical
VApour
DEposition) thickness of carbon-coating with several microns is coated on the material for the treatment of coating, wherein adds possible metallic addition from DC magnetron injection source (DC-Magnetron-Sputter-Quelle).In this case, the combination of each individual element (selection of material and ratio) that changes about coating thickness is determining the characteristic of tribology, as hardness and friction.
Be typically unbodied a-C:H type carbon-coating.According to of the present invention one preferred embodiment, used a kind of contain metal, unbodied, the carbon-coating of a-C:H:Me type particularly for follower being carried out coating.In this case, for example tungsten, molybdenum, titanium or tantalum are suitable as metal (Me) and are embedded in the unbodied carbon.Alternatively or be additional to beyond the metal, also silicon (Si) can be embedded in the unbodied carbon, so just produce a kind of carbon-coating of unbodied a-C:H:Si type, also can replenish a kind of metal ingredient in case of necessity.In this case, metal or the silicon material share in coating is until the order of magnitude that is approximately 15%.
In addition, such metallic amorphous carbon layer is characterised in that its conductive capability.Can stop the electrostatic charging of follower when contacting with the seal element of case side by this measure, this electrostatic charging can damage adjacent electronic component, and may make the measuring-signal generation distortion that will be produced by position-measurement device.Therefore can save must be by removing the aluminium anode processing layer partly to made of aluminum and that be designed to aluminium-die casting and be equipped with the machining that the follower of the aluminium anode processing layer of an insulation carries out usually.But when using a kind of amorphous carbon layer metallic, that can conduct electricity that follower is carried out coating, can directly utilize the conductive capability of that coating, so that make follower be in identical current potential with the object to be measured, for example machine parts that link to each other therewith.For this reason, (being made of metal) fixed mechanism by suitable conduction is connected on that machine parts follower just enough.Instead or replenish ground also can by one of follower the surface of coating contact with surface between the described object to be measured and realize being electrically connected of follower and affiliated object to be measured.
Of the present invention a kind of preferred embodiment in, follower not only is provided with a unbodied carbon-coating at those positions of its linkage section, and promptly this position contacts with sealing mechanism that disposed, case side when using a follower in the position-measurement device according to the rules; And this external other position also is provided with unbodied carbon-coating.Particularly preferably be, the matrix of follower (for example being made up of aluminium) integral body is provided with such coating.When using a kind of metallic amorphous carbon-coating that follower is carried out coating, utilizing aspect the conductive capability tool meaningfully, follower is at least both a position (wherein follower contacts with the sealing mechanism that is disposed when using in accordance with regulations), simultaneously (this position is used for follower is connected with an object to be measured (machine parts)) all is provided with amorphous carbon-coating of metal also at a position, wherein this coating must so form, i.e. coating in linkage section and be used for fixing and exist a kind of conduction to connect between the position on the object to be measured.
In according to position-measurement device of the present invention, be additional to follower or substitute this follower ground, just without this follower make the sealing mechanism of the case side of position-measurement device that a unbodied carbon-coating that designs according to the present invention also can be set so that friction and wear minimizes.
Description of drawings
Below to by accompanying drawing other details of the present invention and advantage being described in detail in the explanation of an embodiment.
These accompanying drawings are:
Fig. 1: the outboard profile of a position-measurement device with length-measuring appliance form of the follower that a housing and leads along a direction of measurement at this housing place with moving;
The position-measurement device of Fig. 2: Fig. 1 is at the cross-sectional view at follower position;
The cross-sectional view of the flexible program of the position-measurement device of Fig. 3: Fig. 1 and 2.
Embodiment
Fig. 1 and 2 represents the position-measurement device 1 of a length-measuring appliance form, and this device has a housing 2, and this housing is as the support of a dimensional standard.For this reason, a measurement scale supporting mass 3 that extends along a direction of measurement M is set in the inside of housing 2, on this supporting member, is provided with one and measures scale 3a.Scanning element 4 is used for for example scanning measuring scale 3a according to the photoelectric measurement principle in disclosed mode, and this scanning element is arranged on holding on the position 51 of a follower 5 on the housing 2 that is bearing in position-measurement device 1 along direction of measurement M movably.
The linkage section 50 of position 51 by a meeting stile form that hold that is arranged in housing 2 inside of follower 5 is connected with being arranged on of follower 5 installation positions 52 housing 2 outsides, mounting seat 6 forms.Make follower 5 can be fixed on the object to be measured by this mounting seat.For this reason, a longitudinal slot 20 that extends along direction of measurement M is set in the housing 2 of position-measurement device 1.The linkage section 50 of follower 5 passes this longitudinal slot, and a kind of sealing mechanism 7,8 of sealing lip shape is set respectively on its two vertical sides, and wherein each sealing lip abuts in these two side 50a of meeting stile 50 respectively, on each among the 50b.By this measure; the periphery of the inside of housing 2 and housing 2 so seals; in a single day make no matter be the inside that dirt particle or moisture all can not enter into housing 2 by this longitudinal slot 20, will cause damage to measuring scale 3a and enter inside.
Such position-measurement device structurally has been disclosed, therefore, sees also EP 06 46 765 B1, DE 199 18 654 A1 and DE 101 09 909A1 about other details.Structure to a kind of position-measurement device in type shown in Fig. 1 and 2 all has very detailed explanation respectively in these documents.
When work, on the one hand the housing 2 of position-measurement device 1, the follower 5 of position-measurement device 1 is by corresponding mounting hole 2a on the other hand, that 52a moves along direction of measurement M each other with two respectively, particularly be connected with one among the object O1 of machine parts form or the O2, for example be connected with a lathe bed with a slide block of a lathe.In this case, for example follower 5 is connected with bed piece by the mounting seat 6 that forms on the position 52 of holding at it, and housing 2 is connected with the slide block of lathe.Slide block correspondingly causes the relative motion with respect to a kind of same-type of the measurement scale 3a on the supporting mass 3 that is arranged on housing 2 of the scanning element 4 that is provided with on the position 51 in holding of follower 5 along the relative motion of direction of measurement M with respect to lathe bed.By the scannings of measuring scale 3a, can collect the size of the relative motion that slide block does with respect to lathe bed by 4 pairs of affiliated scanning elements.
When direction of measurement M did this moving with respect to the housing 2 of position-measurement device 1, the sealing lip 7,8 of case side abutted in a side 50a of the linkage section 50 of follower 5 respectively, on the 50b at follower 5.
In order when the position-measurement device for sealing obtains substantial sealing function, to make the linkage section 50 of follower 5 can not have friction along the sealing lip 7,8 of affiliated case side as far as possible and not have the slip of wearing and tearing ground, follower 5 at least it two with sealing lip 7, the side 50a of 8 contacts, be provided with one on the 50b and contain carbon-coating S metal, unbodied a-C:H:Me type, wherein, " a " is amorphous, and " Me " is metal, particularly tungsten, molybdenum, titanium or tantalum.The material share of selected metal is about 15% at this.
Described carbon-coating S for example can be coated to described two the side 50a that on the position of regulation for this reason of follower 5, particularly are coated to the linkage section 50 of follower 5 by pecvd process with several microns thickness, on the 50b, wherein the metal additive is introduced from a DC magnetron injection source.The thickness of layer S is preferably in several microns the scope, that is to say that it is a thin layer.
For the electrical characteristics (conductive capability) of utilizing metallic carbon-coating S, this coating preferably exceeds the linkage section 50 of follower 5, extends to the through hole 52a on the mounting seat 6 of installation position 52 of follower always.By these through holes make follower 5 can be with the object O2 to be measured of a configuration, for example a machine parts of a lathe is connected.Select a kind of metal fixed mechanism of for example bolt form for fixed random moving part 5, this fixed mechanism is passed in the through hole 52a that is provided with as mounting hole on the installation position 52 of follower 5, and abut at least partly in this case on the edge in these holes, and be bearing in the there.By carrying out coating, between the linkage section 50 of follower 5 and affiliated object O2 (machine parts) to be measured, produced a metal bridge at the position of through hole 52a for follower 5.By this measure make follower 5, particularly its linkage section 50 can be identical with the current potential of object O2 to be measured, and stops the part charging of follower 5 by the linkage section 50 and the acting in conjunction of the sealing lip 7,8 of affiliated case side.Also can so replenish ground or instead realize follower 5 and affiliated object O2 to be measured between electrically contact: follower 5 is with the partial portion of coating, particularly on the object O2 to be measured under abutting in the installation position 52 of coating.
Owing to can reduce the sealing lip 7 of follower 5 and case side widely, friction between 8, can reduce widely again with respect to sealing lip 7 at follower, 8 when doing motion the wearing and tearing that can imagine, particularly wear away the wearing and tearing of form, so can abandon sealing lip 7 fully in follower 5 and case side, apply lubricant between 8, so long as not still need to use a kind of like this lubricant owing to other reason.
Fig. 3 represents a kind of flexible program at the embodiment shown in Fig. 1 and 2 of a position-measurement device.According to this flexible program, sealing lip 7,8 at least they towards follower 5 and abut in surperficial position 7a on follower 5 linkage sections 50, the carbon-coating S ' of an aforementioned type is set respectively on the 8a.Thus, when 52 actings in conjunction of the installation position of sealing lip 7,8 and follower 5, can reduce friction in the corresponding way and wear and tear.Can be alternatively or also can replenish the coating that realizes sealing lip 7,8 by illustrated follower 5 coatings of Fig. 1 and 2 ground with a kind of carbon-coating S.
Claims (14)
1. the follower that is used for a position-measurement device, this follower has:
-one scanning element that is used to hold described position-measurement device hold the position,
-one is used for follower is fixed on an installation position on the object to be measured,
-one linkage section, by this linkage section with this follower hold the position and the installation position is joined to one another, and this linkage section so constitutes and is provided with: be directed to by the sealing mechanism flexible, that abut on this linkage section of a direction of measurement along a housing, described housing is used for a dimensional standard that will scan by scanning element
-one coating, described follower utilize this coating to be used to reduce friction between linkage section and affiliated sealing mechanism,
It is characterized in that,
Described follower (5) is provided with the unbodied carbon-coating of a conduction on linkage section (50), described unbodied carbon-coating is extended to the fixed position (52a) in the installation position (52) of follower (5) at least always by the linkage section (50) of follower, follower can be fixed on the object to be measured by this fixed position, so that realize being electrically connected of described follower (5) and described object to be measured when mounted.
2. according to the described follower of claim 1, it is characterized in that described unbodied carbon-coating is the carbon-coating of similar adamantine a-C:H type.
3. according to the described follower of claim 1, it is characterized in that described unbodied carbon-coating contains a kind of metal (Me) at least.
4. according to the described follower of claim 3, it is characterized in that employed metal (Me) is selected from material of tungsten, molybdenum, titanium or tantalum.
5. according to the described follower of claim 1, it is characterized in that described unbodied carbon-coating additionally contains silicon (Si).
6. according to the described follower of claim 1, it is characterized in that whole follower (5) all is provided with unbodied carbon-coating.
7. according to the described follower of claim 1, it is characterized in that the linkage section (50) of follower (5) is directed between two sealing mechanisms that extend side by side (7,8), described sealing mechanism abut in respectively linkage section (50) a side (50a, 50b) on.
8. according to the described follower of claim 1, it is characterized in that follower (5) is made of aluminum.
9. be used to measure the position-measurement device of relative position of the object of two relative motions, it has:
-one can with the housing that is connected (2) in the described object to be measured, this housing has a slit (20) of extending along direction of measurement (M),
-one is arranged on dimensional standard (3a) in the housing (2), that extend along direction of measurement (M),
-one extend into follower (5) in the housing (2) by slit (20), and this follower has one in the inside of housing (2) and holds the position, is used to hold the scanning element (4) of a described dimensional standard of scanning (3a); And this follower has an installation position (52) in the outside of housing (2), be used for another of follower (5) and object to be measured coupled together,
A linkage section (50) of-follower (5), by this linkage section with follower hold position (51) and installation position (52) couple together,
-(20) are provided with along the slit sealing mechanism (7,8), sealing mechanism abuts on the linkage section (50) of the follower (5) that supports movably along direction of measurement (M) hermetically,
It is characterized in that, be provided with one according to each follower (5) in the aforementioned claim.
10. according to the described position-measurement device of claim 9, it is characterized in that, sealing mechanism (7,8) is carried out coating with a kind of unbodied carbon-coating.
11., it is characterized in that described unbodied carbon-coating is a kind of carbon-coating of similar adamantine a-C:H type according to the described position-measurement device of claim 10.
12., it is characterized in that the described unbodied carbon-coating that upward applies at sealing mechanism (7,8) is a kind of metallic coating according to the described position-measurement device of claim 10.
13., it is characterized in that described metal is selected from material of tungsten according to the described position-measurement device of claim 12, molybdenum, titanium or tantalum.
14., it is characterized in that described unbodied carbon-coating additionally contains silicon (Si) according to the described position-measurement device of claim 10.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004060093.7 | 2004-12-13 | ||
| DE102004060093.7A DE102004060093B4 (en) | 2004-12-13 | 2004-12-13 | Carrier for a position measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1789921A CN1789921A (en) | 2006-06-21 |
| CN1789921B true CN1789921B (en) | 2010-12-22 |
Family
ID=36500266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005101317217A Expired - Fee Related CN1789921B (en) | 2004-12-13 | 2005-12-13 | Attachment for position measurement device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4771788B2 (en) |
| CN (1) | CN1789921B (en) |
| DE (1) | DE102004060093B4 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007058643A1 (en) * | 2007-12-04 | 2009-06-10 | Dr. Johannes Heidenhain Gmbh | Scanning unit |
| ES2856695T3 (en) * | 2015-12-03 | 2021-09-28 | Renishaw Plc | Encoder |
| EP3290871B1 (en) * | 2016-09-01 | 2019-01-09 | KappaSense Ltd | Linear encoder |
| US10077841B2 (en) | 2016-09-13 | 2018-09-18 | KappaSense Ltd. | Linear encoder with improved sealing |
| WO2018211255A1 (en) | 2017-05-17 | 2018-11-22 | Renishaw Plc | Encoder apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1354478A (en) * | 2000-09-19 | 2002-06-19 | Tdk株式会社 | Recording head support arm assembly, optical disc with same and method for making recording head support arm assembly |
| US20020124665A1 (en) * | 2001-02-20 | 2002-09-12 | Sebastian Tondorf | Securing arrangement for transporting and mounting a measuring system, and such a measuring system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4139985A1 (en) * | 1991-12-04 | 1993-06-09 | Brose Fahrzeugteile Gmbh & Co Kg, 8630 Coburg, De | Device for raising and lowering automobile window panes - consists of rope or strip pulley system composed at least partly of at least 50 per cent amorphous metal alloy |
| DE4333651A1 (en) * | 1993-10-02 | 1995-04-06 | Heidenhain Gmbh Dr Johannes | Position measuring device |
| JP2001289330A (en) * | 2000-04-10 | 2001-10-19 | Komatsu Ltd | Slide contact structure of sealing part of construction and civil engineering machine |
| JP2003083346A (en) * | 2001-09-13 | 2003-03-19 | Nsk Ltd | Seal device |
-
2004
- 2004-12-13 DE DE102004060093.7A patent/DE102004060093B4/en not_active Expired - Fee Related
-
2005
- 2005-11-02 JP JP2005319146A patent/JP4771788B2/en not_active Expired - Fee Related
- 2005-12-13 CN CN2005101317217A patent/CN1789921B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1354478A (en) * | 2000-09-19 | 2002-06-19 | Tdk株式会社 | Recording head support arm assembly, optical disc with same and method for making recording head support arm assembly |
| US20020124665A1 (en) * | 2001-02-20 | 2002-09-12 | Sebastian Tondorf | Securing arrangement for transporting and mounting a measuring system, and such a measuring system |
Non-Patent Citations (2)
| Title |
|---|
| 李敬财等.类金刚石薄膜的应用.新材料产业 3.2004,(3),39-42. |
| 李敬财等.类金刚石薄膜的应用.新材料产业 3.2004,(3),39-42. * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006170975A (en) | 2006-06-29 |
| DE102004060093A1 (en) | 2006-06-14 |
| CN1789921A (en) | 2006-06-21 |
| JP4771788B2 (en) | 2011-09-14 |
| DE102004060093B4 (en) | 2014-02-13 |
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