CN1773618A - Write-once high-density optical information recording media - Google Patents

Abstract

The present invention relates to a write-once high-density optical information recording medium, which is composed of a material with the chemical formula AxByCz and is achieved by a special coating process method. The optical reflectivity of the recording point and the non-recording area has a good contrast, and the recording point cannot be erased for a second write operation. It has the advantages of simple manufacturing and easy mass production, and has good recording characteristics under the wavelength of blue laser, which can significantly improve signal quality and reduce mark disturbance rate (Jitter). The multi-layer film structure of this recording medium includes: a first protective layer, a recording layer, a second protective layer, and a reflective layer covering the second protective layer on the optical disc substrate.

Description

Write-once high-density optical information recording media

technical field

The invention relates to a recording medium, in particular to a write-once high-density optical information recording medium.

Background technique

The development of science and technology has simultaneously increased everyone's requirements for audio-visual quality. In recent years, high-definition digital TV has gradually developed, and the demand for storage media has increased, which has also relatively stimulated the development of high-density optical information (that is, data) recording media. The optical storage information recording medium has developed from the early optical disc (CompactDisc, CD) to the current optical information recording medium of the digital versatile disc (Digital Versatile Disc, DVD). The 650MB of an optical disc is several times higher. However, although the picture quality of a DVD can reach 720X480i (SDTV), for the 1280X720i or 1920X1080i required by a high-definition digital TV (HD-TV), if the image is compressed in the MPEG2 mode, then A 135-minute movie requires a capacity of about 20GB. The current specifications of DVD-5 (4.7GB) and DVD-9 (8.5GB) cannot meet this demand. Therefore, it is inevitable to develop a new generation of Blu-ray high-density storage discs. trend, and among them, the development of write-once discs is the focus of each manufacturer's development.

The early write-once optical information recording media mainly used organic dyes (Organic Dye) as recording materials, but they are expensive, difficult to develop formulas, complex solution systems, sensitive to laser light wavelengths, and sensitive to weather (temperature, Humidity) tolerance is small, the shelf life is not long, and the environment is polluted. Therefore, many manufacturers are committed to the improvement of recording media, hoping to make a breakthrough. For example, U.S. Patent No. US4960680 discloses the technology of using irreversible phase change to form recording points, and the materials used are Sb-In-Sn, Sn-Sb-Se/Sb-Bi, etc.; U.S. Patent No. US4624914 discloses the use of The mixture of metal oxides and metals causes structural changes to form recording points. The materials used are Pd-TeOx and Ni-NiOx; US Patent No. US5401609 discloses the technology of forming recording points by gas expansion , the materials used are AgOx, FeNx, CuNx, SnNx. The above-mentioned technologies are all write-once optical information recording media using inorganic materials as the recording layer. Compared with organic dyes, they have the advantages of simple production process, low environmental pollution, high light resistance and high weather resistance. In addition to the advantages of the above-mentioned inorganic materials, the inorganic recording layer material used in the present invention is also suitable for mass production due to its easy manufacturing process.

It can be seen that the above-mentioned existing write-once optical information recording medium obviously still has inconvenience and defects in its structure and use, and needs to be further improved urgently. In order to solve the problems of write-once optical information recording media, relevant manufacturers have tried their best to find a solution, but no suitable design has been developed for a long time, and there is no suitable structure for general products to solve the above problems. This is obviously a problem that relevant industry players are eager to solve.

In view of the above-mentioned existing defects in the write-once optical information recording medium, the inventor actively researches and innovates based on years of rich practical experience and professional knowledge in the design and manufacture of this type of product, and cooperates with the application of academic theories, with a view to Creating a write-once high-density optical information recording medium with a new structure can improve the general existing write-once optical information recording medium and make it more practical. Through continuous research, design, and after repeated trial samples and improvements, the present invention with practical value is finally created.

Contents of the invention

The purpose of the present invention is to overcome the defects that the existing write-once optical information recording medium cannot meet the actual needs, and provide a new write-once high-density optical information recording medium. The technical problem to be solved It is achieved by using a material with a chemical formula of A _{x By} C _z , a special recording medium structure, and a special coating process method, and has good recording characteristics in the Blu-ray Disc specification, which can significantly improve the signal quality. , to reduce the mark disturbance rate (Jitter), which is more suitable for practical use.

Another object of the present invention is to provide a write-once high-density optical information recording medium. The technical problem to be solved is to make it use the composition material and special recording medium structure with the chemical formula of A _{x By} C _z It is achieved by a special coating process method. Before and after the recording, the recording point and the non-recording point have a good contrast in optical reflectivity, and this process is not repeatable, but it has the characteristics of simple production and easy mass production and replication. Suitable for Blu-ray Disc development.

Another object of the present invention is to provide a write-once high-density optical information recording medium. The technical problem to be solved is to disclose an inorganic write-once material, which is different from the crystallization and amorphous phase change materials. The characteristics of crystal structure change are easily affected by high temperature, and there are disadvantages such as insignificant differences in optical reflectivity, and there is no need to cumbersomely control the gas expansion writing mechanism, so it is more suitable for practical use.

The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. According to the present invention, a write-once high-density optical information recording medium is proposed, wherein the multilayer film structure of the recording medium includes: a substrate, a first protective layer, an inorganic material recording layer, a second protective layer, Reflective layer; Wherein, the material of described inorganic material recording layer comprises the material shown in chemical formula (I): AxByCz (I); A element comprises wherein one of silicon (Si) or tin (Sn); B element comprises aluminum ( Al), silver (Ag), gold (Au), zinc (Zn), titanium (Ti), nickel (Ni), copper (Cu), cobalt (Co), tantalum (Ta), iron (Fe), tungsten ( One of W), Chromium (Cr), Vanadium (V), Gallium (Ga), Lead (Pb), Molybdenum (Mo), Indium (In) or Sb (Sb); C elements include oxygen, nitrogen and other elements . x, y and z are atomic ratios of elements A, B and C; x is at least in the range of greater than zero to 1.0; y is in the range of 0.02 to 0.8; z is greater than zero in the range of 1.0.

The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.

In the aforementioned write-once high-density optical information recording medium, the structure further includes a resin protection layer formed on the reflective layer.

In the aforementioned write-once high-density optical information recording medium, the material of the resin protection layer is photocurable resin.

In the aforementioned write-once high-density optical information recording medium, the materials of the first protective layer and the second protective layer respectively include silicon nitride (SiNx), silicon oxide (SiOx), zinc sulfide-silicon oxide ( One of ZnS-SiO2), aluminum nitride (AlNx), silicon carbide (SiC), titanium nitride (TiNx), tantalum oxide (TaOx), germanium nitride (GeNx), and yttrium oxide (YOx).

In the aforementioned write-once high-density optical information recording medium, the first protection layer and the second protection layer are a dielectric material layer or a composite dielectric material layer.

The aforementioned write-once high-density optical information recording medium, wherein the material of the reflective layer is selected from gold (Au), silver (Ag), aluminum (Al), titanium (Ti), lead (Pb), chromium ( Cr), molybdenum (Mo), tungsten (W), tantalum (Ta) and alloy materials of the above metals.

The aforementioned write-once high-density optical information recording medium, wherein the inorganic material recording layer is made of AxBy material by the apple pie target co-sputtering method, and C element is added during the manufacturing process to complete the AxByCz recording layer.

The aforementioned write-once high-density optical information recording medium, wherein the inorganic material recording layer is made of a manufacturing process including A element and B element, using a co-sputtering method, and adding C element during the manufacturing process to complete the AxByCz material composition.

In the aforementioned write-once high-density optical information recording medium, the inorganic material recording layer is formed by alloy target sputtering using AxByCz material.

In the aforementioned write-once high-density optical information recording medium, the substrate is a write-once digital multifunctional disc substrate or a write-once optical disc substrate.

The purpose of the present invention and the solution to its technical problems also adopt the following technical solutions to achieve. According to a write-once high-density optical information recording medium proposed by the present invention, the recording medium includes: a substrate, and on the substrate are: an inorganic material recording layer, and a second protective layer; the material of the inorganic material recording layer It is a material shown in chemical formula (I): AxByCz (I); A element includes one of silicon (Si) or tin (Sn); B element includes aluminum (Al), silver (Ag), gold (Au) , Zinc (Zn), Titanium (Ti), Nickel (Ni), Copper (Cu), Cobalt (Co), Tantalum (Ta), Iron (Fe), Tungsten (W), Chromium (Cr), Vanadium (V) , Gallium (Ga), Lead (Pb), Molybdenum (Mo), Indium (In) or Sb (Sb); C element is oxygen, nitrogen and other elements; x, y and z are A, B, C The atomic ratio of elements; x is at least greater than zero and within the range of 1.0; y is within the range of 0.02 to 0.8; z is greater than zero and within the range of 1.0.

The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.

The structure of the aforementioned write-once high-density optical information recording medium further includes a reflective layer formed on the second protective layer.

The structure of the aforementioned write-once high-density optical information recording medium further includes a first protective layer, which is arranged between the inorganic material recording layer and the substrate.

In the aforementioned write-once high-density optical information recording medium, the materials of the first protective layer and the second protective layer include: silicon nitride (SiNx), silicon oxide (SiOx), zinc sulfide-silicon oxide (ZnS-SiO2), aluminum nitride (AlNx), silicon carbide (SiC), tantalum oxide (TaOx), germanium nitride (GeNx), titanium nitride (TiNx), yttrium oxide (YOx) and other composite materials.

The above-mentioned write-once high-density optical information recording medium, wherein the inorganic material recording layer process includes using A element and B element, using the apple pie target sputtering method, and adding C element during the process to complete the AxByCz material Composition, the atomic ratio of A element to B element, can be adjusted by the area ratio of the target.

In the aforementioned write-once high-density optical information recording medium, the manufacturing process of the inorganic material recording layer includes A and B elements, using a co-sputtering method, and adding C element during the manufacturing process to complete the AxByCz material composition.

The above-mentioned write-once high-density optical information recording medium, wherein the inorganic material recording layer is composed of A element and B element, or A element, B element and C element, using alloy target sputtering method to complete AxByCz Material composition.

In the aforesaid write-once high-density optical information recording medium, the substrate is a write-once digital versatile disc substrate or a write-once optical disc substrate.

Compared with the prior art, the present invention has obvious advantages and beneficial effects. As can be seen from the above technical scheme, in order to achieve the aforementioned object of the invention, the main technical contents of the present invention are as follows, and at least have the following advantages:

In view of the fact that the current recording medium has the above-mentioned shortcomings and cannot meet the actual needs, the present invention provides a recording medium, especially a write-once high-density optical information recording medium, which is based on the chemical formula AxByCz The composition materials and special recording medium structure are achieved by using special coating process methods, and have good recording characteristics in the Blu-ray Disc specification, which can significantly improve signal quality and reduce mark disturbance rate (Jitter). Among them, A element includes one of tin (Sn) or silicon (Si); B element includes aluminum (Al), silver (Ag), gold (Au), cobalt (Co), copper (Cu), chromium (Cr) , zinc (Zn), titanium (Ti), nickel (Ni), tantalum (Ta), iron (Fe), tungsten (W), vanadium (V), gallium (Ga), lead (Pb), molybdenum (Mo) , Indium (In) or Sb (Sb): C elements include oxygen (O), nitrogen (N) and other elements; x, y and z are the atomic ratios of A, B, and C elements; x is at least greater than In the range of zero to 1.0; y is in the range of 0.02 to 0.8; z is at least greater than the range of zero to 1.0; the multilayer film structure of the recording medium includes: the first protective layer, the recording layer on the optical disc substrate , a second protective layer, a reflective layer and a resin protective layer covering the second protective layer.

According to the inorganic write-only material disclosed by the present invention, it is different from the crystallization and amorphization structure change characteristics of phase change materials, is easily affected by high temperature, has the disadvantages of insignificant difference in optical reflectivity, and does not need cumbersome control Gas expansion writing mechanism.

According to the inorganic write-once recording medium of the present invention, it is achieved by using a material with the chemical formula AxByCz, a special recording medium structure, and a special coating process method. Before and after recording, there are differences between recording points and non-recording points It has good optical reflectivity and different contrast characteristics, and this process is not repeatable; it has the characteristics of simple production and easy mass production and replication, and is very suitable for the development of Blu-ray discs.

To sum up, the write-once high-density optical information recording medium of the present invention is a recording medium composed of a material with the chemical formula AxByCz, and is achieved by using a special coating process method. The optical reflectivity of the recording point and the non-recording area is very different Good contrast, and the recording point cannot be erased to perform the second writing operation, and has the advantages of simple production and easy mass production, and has good recording characteristics at the blue laser wavelength, which can significantly improve the signal quality. Reduce the mark jitter rate (Jitter). It has the above-mentioned many advantages and practical value, and no similar structural design has been published or used in similar products. It has made great progress, and has produced easy-to-use and practical effects, and has improved multiple functions compared with the existing write-only optical information recording media, so it is more suitable for practical use, and has wide application value in the industry. Sincerely A novel, progressive and practical new design.

The above description is only an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention, it can be implemented according to the contents of the description, and in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable , the following preferred embodiments are specifically cited below, and are described in detail as follows in conjunction with the accompanying drawings.

Description of drawings

1A to 1E are partial cross-sectional views of various structures of the write-once high-density optical information recording medium of the present invention, respectively.

Fig. 2 is a schematic diagram of the structure of the apple pie target.

FIG. 3A is an image of a charge-coupled device camera in the range of the writing laser pulse width from 20 ns to 70 ns of the test disk of the embodiment 1. FIG.

FIG. 3B is a graph showing the relationship between reflectivity and time of the test disk in Example 1 in the range of the writing laser pulse width from 20 ns to 70 ns.

Fig. 4 is the dynamic observation figure (Eye pattern) of the DVD 3T-14T of the test disc of embodiment 1.

FIG. 5A is a graph showing the relationship between the mark jitter rate (Jitter) and the amount of oxygen inflated on the test disc of Example 2. FIG.

Fig. 5B is the dynamic observation figure (Eye pattern) of the blue light 2T-11T of the test disc of embodiment 2.

FIG. 5C is the mark jitter rate (Jitter) value of the test disc in Example 2. FIG.

FIG. 6A is a graph showing the relationship between the mark jitter rate (Jitter) and the amount of nitrogen filled on the test disc in Example 3. FIG.

Fig. 6B is the dynamic observation diagram (Eye pattern) of the blue light 2T-11T of embodiment 3.

FIG. 6C is the mark jitter rate (Jitter) value of the test disk of the embodiment 3 test disk.

101: Substrate 103: The first protective layer

105: Inorganic material recording layer A _{x By} C _z 107: Second protective layer

109: Reflective layer 111: Resin protective layer

201: Element A 203: Element B

Detailed ways

In order to further explain the technical means and effects that the present invention adopts to achieve the intended purpose of the invention, the specific implementation methods, Structure, characteristic and effect thereof are as follows in detail.

1A to 1E are cross-sectional views respectively showing the structures of various disk embodiments of the write-once high-density optical information recording medium of the present invention. In FIGS. 1A to 1E , the same components are given the same reference numerals and their descriptions are omitted.

Please refer to shown in Fig. 1A, the write-once type high-density optical information recording medium of the present invention, its disk structure mainly is by substrate 101, first protective layer 103, inorganic material recording layer 105, second protective layer 107 and reflection layer 109.

The substrate 101 includes a transparent substrate with a signal surface, such as a write-once optical disk substrate, a write-once digital versatile disk substrate. The material thereof is, for example, glass, polycarbonate (Polycarbonate, PC), polymethylmethacrylate (Polymethylmethacrylate, PMMA) or cyclic polyhydrocarbon copolymer (Metallocene Catalyzed Cyclo Olefin Copolymer, MCOC) and the like.

The first protective layer 103 is disposed on the substrate 101, and its material includes dielectric materials, such as silicon nitride (SiNx), silicon oxide (SiOx), zinc sulfide-silicon oxide (ZnS-SiO2), aluminum nitride (AlNx) , silicon carbide (SiC), germanium nitride (GeNx), titanium nitride (TiNx), tantalum oxide (TaOx), yttrium oxide (YOx), etc. The thickness of the first protection layer 103 is, for example, between 0 nm and 100 nm. The first protective layer 103 includes a single dielectric material layer or a composite dielectric material layer composed of more than one dielectric material layer.

Inorganic material recording layer 105 is arranged on the first protective layer 103, and the material of inorganic material recording layer 105 comprises the material shown in chemical formula (1):

A _x B _y C _z (I)

Among them, A element includes one of silicon (Si) or tin (Sn); B element includes aluminum (Al), silver (Ag), gold (Au), zinc (Zn), titanium (Ti), nickel (Ni) , copper (Cu), cobalt (Co), tantalum (Ta), iron (Fe), tungsten (W), chromium (Cr), vanadium (V), gallium (Ga), lead (Pb), molybdenum (Mo) One of , Indium (In) or Sb (Sb): C elements include oxygen, nitrogen and other elements; x, y and z are the atomic ratios of A, B, and C elements; x is at least greater than zero and within the range of 1.0 ; y is in the range of 0.02 to 0.8; z is at least greater than zero and in the range of 1.0. The inorganic material recording layer 105 may use a single material of the above chemical formula (I) or a mixture of two or more materials of the chemical formula (I). The thickness of the inorganic material recording layer 105 is, for example, at least greater than zero and between 80 nm. The inorganic material recording layer 105, after being irradiated and heated by the laser light source, produces a local reaction and absorbs heat to form a recording point with a change in reflectivity.

The second protective layer 107 is disposed on the inorganic material recording layer 105, and its material includes dielectric materials, such as silicon nitride (SiNx), silicon oxide (SiOx), zinc sulfide-silicon oxide (ZnS-SiO2), aluminum nitride (AlNx), silicon carbide (SiC), germanium nitride (GeNx), titanium nitride (TiNx), tantalum oxide (TaOx), yttrium oxide (YOx), etc. The thickness of the second protection layer 107 is, for example, 5 to 100 nm. The second protection layer 107 includes a single dielectric material layer or a composite dielectric material layer composed of more than one dielectric material layer.

The reflective layer 109 is disposed on the second protective layer 107, and the material of the reflective layer 109 is, for example, gold (Au), silver (Ag), aluminum (Al), titanium (Ti), lead (Pb), chromium (Cr), molybdenum (Mo), tungsten (W), tantalum (Ta) and other metals and their alloy materials. The thickness of the reflective layer 109 is, for example, between 0 nm and 200 nm.

In the disc structure of the above-mentioned high-density optical information recording medium, as shown in FIG. 1B, a resin protection layer 111 can be formed on the reflective layer 109. A write-once high-density optical information recording medium disc structure.

The structure of the write-once high-density optical information recording medium of the present invention can also be directly composed of an inorganic material recording layer 105, a substrate 101, and a second protective layer 107 as shown in Figure 1C; or as shown in Figure 1D, It is composed of a substrate 101, an inorganic material recording layer 105, a second protective layer 107, and a reflective layer 109; or as shown in FIG. constituted.

The present invention uses inorganic materials instead of organic dyes as the recording layer of the high-density optical information recording medium. Compared with organic dyes, the inorganic materials have the advantages of high light resistance and high weather resistance, so the service life of the high-density optical information recording medium can be extended. In addition, the cost of inorganic materials is lower than that of organic dyes, and no organic solvents are used, so their production costs are low and they will not cause environmental pollution. In addition, the use of inorganic materials as the recording layer can be combined with the recording method of Land/Groove, so that the high-density optical information recording medium has a high recording density. Therefore, the above-mentioned various disc structures of the present invention can be applied to write-once optical discs (Compact Disc-Recordable, CD-R), write-once digital versatile discs (Digital Versatile Disc-Recordable, DVD-R), only Write-once Blu-ray Digital Versatile Disc and Write-once Blu-ray optical information recording media, multi-layer recording layer discs.

The recording principle of the write-once high-density optical information recording medium of the present invention, in the recording process, can use laser light to focus on the inorganic material recording layer 105 through the substrate 101, and use pulse high power (pulse high power) mode to make The inorganic material recording layer 105 absorbs heat to form recorded marks, which can cause a high reflectivity difference between the recorded point and the non-recorded point, and this reaction is not repeatable. Therefore, the characteristics of the inorganic material recording layer 105 and the With the film design, it can be used as a write-once high-density optical information recording medium.

The above describes the structure of the write-once high-density optical information recording medium of the present invention. The following description takes the structure of FIG. 1A as an example to illustrate the manufacturing method of the write-once high-density optical information recording medium of the present invention.

This inorganic material recording layer 105 is arranged on the first protective layer 103, and the material of the inorganic material recording layer 105 comprises the material shown in chemical formula (1):

A _x B _y C _z (I)

The formation method of the inorganic material recording layer 105 includes co-sputtering. During the sputtering process, the inorganic material recording layer 105 is formed by sputtering. That is, element A [element A can be silicon (Si) or tin (Sn)] and element B can be placed in the sputtering chamber at the same time, and oxygen (O2) or nitrogen (N2) is added during the process, and element B Aluminum (Al), silver (Ag), gold (Au), zinc (Zn), titanium (Ti), nickel (Ni), copper (Cu), cobalt (Co), tantalum (Ta), iron (Fe ), tungsten (W), chromium (Cr), vanadium (V), gallium (Ga), lead (Pb), molybdenum (Mo), indium (In), 鍗 (Sb) and other targets, so called co- Sputtering method; if the alloy (target) with A element and B element is put in and oxygen (O2) or nitrogen (N2) is added in the process, it is called alloy target sputtering method; and the A element and B element are used as When a target is produced in a staggered manner, and oxygen (O2) or nitrogen (N2) is added to the process, it is called Apple pie target sputtering (Apple pie target). As shown in the second figure, the number 201 represents A element, reference number 203 represents B element. The atomic ratio of A element and B element in the inorganic material recording layer 105 can be adjusted by the area ratio of the target, or the alloy of A element, B element and C element is used as the target material, and the A element in the inorganic material recording layer 105 , The atomic ratio of B element to C element. The material of the substrate 101 is polycarbonate (Polycarbonate, PC). A first protective layer 103 is formed on the substrate 101 . The formation method of the first protective layer 103 is, for example, a co-sputtering method or a coating method. Then, an inorganic material recording layer 105 is formed on the first protective layer 103 , and then another second protective layer 107 is formed on the inorganic material recording layer 104 . The formation method of the second protection layer 107 is, for example, a sputtering method or a coating method. Afterwards, a reflective layer 109 is formed on the second protective layer 107, and the reflective layer 109 is formed by sputtering, for example.

The A _{x By} C _z structure shown in the present invention is achieved by the method shown in the coating process of the present invention, and has a good result in the Blu-ray disc specification, which can significantly improve the signal quality and reduce the mark jitter rate (Jitter). In the process method, the present invention provides the following three specific examples to illustrate the structure and process of the multilayer film:

Embodiment one , the manufacturing process of its multilayer film structure is:

1.1. Form a protective layer [zinc sulfide-silicon oxide (ZnS-SiO2)] on the DVD substrate (track pitch: 0.74 microns (um)) by sputtering (Sputter);

1.2, and then form an inorganic material recording layer [silicon aluminum oxide (SixAlyOz) alloy] on the protective layer

1.3, then form a protective layer [zinc sulfide-silicon oxide (ZnS-SiO2)] on the inorganic material recording layer, and form a reflective layer (AlTi) on the protective layer;

In the manufacturing process of the recording layer shown in the present invention, the recording characteristics can be significantly improved by adding oxygen or nitrogen.

Embodiment two , its multilayer film structure is:

2.1. Form a protective layer (zinc sulfide-silicon oxide (ZnS-SiO2)) on the optical disc substrate [gauge 0.4 microns] by sputtering;

2.2, and then form an inorganic material recording layer [silicon-aluminum oxide (SixAlyOz) alloy] on the protective layer;

2.3. Then another protective layer [zinc sulfide-silicon oxide (ZnS-SiO2) with a thickness of 5nm to 100nm) is formed on the inorganic material recording layer, and a reflective layer (Ag]] is formed on the protective layer; Changing the amount of argon (Ar) and oxygen (O2) in the recording layer process can significantly improve its recording characteristics.

Embodiment three , the structure and the manufacturing process of its multilayer film are:

3.1. Form a protective layer [zinc sulfide-silicon oxide (ZnS-SiO2)] on the optical disc substrate [track pitch 0.4 microns] by sputtering,

3.2, and then form an inorganic material recording layer [Silicon Aluminum Nitride (SixAlyNz) alloy] on the protective layer,

3.3. Then another protective layer [zinc sulfide-silicon oxide (ZnS-SiO2)] is formed on the inorganic material recording layer, and a reflective layer (Ag) is formed on the protective layer.

The recording characteristics can be significantly improved by changing the amount of argon (Ar) gas and nitrogen (N2) gas in the recording layer manufacturing process.

When the write-once high-density optical information recording medium of the present invention is produced, the protective layer, recording layer and reflective layer can be formed by sputtering, so the manufacturing process is relatively simple.

In order to prove the recording properties of the high-density optical information recording medium of the present invention, the multi-layer film structure shown in the above-mentioned preparation method of the write-once high-density optical information recording medium is especially produced in Examples 1 to 3. Test disc, and carry out static test to the test disc of embodiment 1, and carry out dynamic test to the test disc of embodiment 1 to embodiment 3, but the scope of the present invention is not limited to embodiment 1 to embodiment 3 content.

〔Production of a test disc〕

The making of the test disc shown in the present invention is described in detail again as follows:

The making of the test disk of embodiment 1: in the above-mentioned embodiment one shown, in the process of the multilayer film structure, utilize the mode of sputtering, form one deck protective layer [sulfurization] on DVD substrate (track distance 0.74 micron) Zinc-silicon oxide (ZnS-SiO2), thickness 5 to 50nm], and then form an inorganic material recording layer on the protective layer [silicon aluminum oxide (SixAlyOz), thickness is at least greater than 3nm to 80nm], and then record on the inorganic material A protective layer [zinc sulfide-silicon oxide (ZnS-SiO2) with a thickness of 5 to 50 nm] is formed on the protective layer, and a reflective layer [aluminum-titanium alloy (AlTi) with a thickness of 60 to 120 nm] is formed on the protective layer , and complete the test disk of embodiment 1.

The making of the test disc of embodiment 2: in the embodiment two shown above, in the manufacturing process of multi-layer film structure, utilize the mode of sputtering, form a protective layer [sulfurization] on the optical disc substrate (track distance 0.4 micron) Zinc-silicon oxide (ZnS-SiO2), thickness 0 to 100nm], and then form an inorganic material recording layer (silicon aluminum oxide (SixAlyOz), thickness is at least greater than 3nm to 80nm] on the protective layer, and then form an inorganic material recording layer A protective layer [zinc sulfide-silicon oxide (ZnS-SiO2), thickness 5 to 100nm] is formed on the protective layer, and a reflective layer [(Ag), thickness 0 to 200nm] is formed on the protective layer. The amount of oxygen filling is 0-2.5 sccm, the amount of argon gas filling is 10 sccm, and the test disk of embodiment 2 is completed.

Example 3 Production of a test disc: In the second embodiment shown above, in the process of the multilayer film structure, a protective layer [zinc sulfide -silicon oxide (ZnS-SiO2), thickness 0 to 100nm], and then form an inorganic material recording layer [silicon aluminum oxide (SixAlyNz)] on the protective layer, and then form a protective layer [zinc sulfide] on the inorganic material recording layer -silicon oxide (ZnS-SiO ]], and form one deck reflective layer (Ag) on the protective layer. Change the amount of nitrogen filling 0-2.5sccm in the disc manufacturing process, and the amount of argon gas filling is 10sccm, and complete the test of embodiment 3 disc.

[Experimental results of the test disc]

The test disk of Experimental Example 1 was tested using a static testing instrument (manufactured by Toptica, model Media test-1), so as to monitor the entire recording process while writing the mark. This static testing machine uses a semiconductor red laser diode (wavelength 659nm) in a single pulse mode to write a record on the test disc, and operates another semiconductor blue laser diode (wavelength 633nm) in the continuous wave mode (cw mode) to monitor the recording process, that is, to use different red laser power (mW) and laser pulse (ns) to write, to change the material, and then to change the optical properties , resulting in the difference in reflectivity between the recording point and the non-recording point, which is converted into a voltage signal and used to measure the conversion time of the two phases, and corresponding to each condition, use a charge-coupled device (CCD) camera image to observe the recording process. Wherein, the writing power of the static testing machine is 12mW, and the writing pulse width is 20ns-70ns.

3A and FIG. 3B are respectively the images and the relationship between the reflectance and time of the marks obtained by the charge-coupled device camera in the range of the writing laser pulse width of 20 ns-70 ns for the test disc of the first embodiment. From the results of Fig. 3A and Fig. 3B, when the material of the recording layer is a silicon-aluminum oxide (SixAlyOz) alloy, it can be seen from the photo taken by the charge-coupled device camera that the laser writing power is 12mW, and the laser pulse time is more than 20ns Recording points can be written, and the reflectivity of the recording points is different from that of the surrounding unrecorded areas. With the different reflectivity characteristics, it can be used as a write-once high-density optical information recording medium.

Please refer to shown in 4, it is the dynamic observation figure (Eyepattern) of the DVD 3T-14T of embodiment 1 disc, using optical disc dynamic testing machine (Plustec company system, model DDU-1000), its disc recording condition is DVD 2.4 times of speed (8.4m/s), the recording modulation code condition is RLL (2, 10) code. Disc recording measurement was carried out on the test disc of Example 1, and the tested disc mark jitter rate (Jitter) was about 7.3%, meeting the specification of DVD disc dynamic writing.

Please refer to FIG. 5A , which is a graph illustrating the relationship between the mark disturbance rate (Jitter) of the test disk of Example 2 and the oxygenation amount during the sputtering process of the recording layer. Using a Blu-ray disc dynamic tester [manufactured by Shibasoku, model LM 330A], the recording modulation code condition is RLL (1, 10) code, the recording frequency (Channelclock frequency) is 66MHz, and the recording linear velocity is 8.25m/s. As can be seen from the figure, when the fixed hydrogen (Ar) is 10sccm, the oxygenation amount is changed from 0 to 2.5sccm, and the mark disturbance rate (Jitter) recorded on the disc changes with the oxygenation amount, such as in the oxygenation amount At 1 sccm, it can reach below 6%, so changing the oxygenation amount during the sputtering process of the recording layer can significantly improve its recording characteristics.

Please refer to shown in Fig. 5B, it is the test disc of embodiment 2, and then use the Blu-ray disc dynamic testing machine [Shibasoku company manufactures LM330A], its record modulation code condition is RLL (1,10) code, record frequency (Channel clock frequency) is 66MHz, and the recording speed is 8.25m/s. As a result of the test, the dynamic observation pattern (Eye pattern) of the Blu-ray disc, as shown in FIG. 5C, is the test disc of the embodiment 2, and the mark disturbance rate (Jitter) of the Blu-ray disc is 5.97%. The experimental results show that the test disk of Example 2 has good recording characteristics.

Please refer to FIG. 6A , which is a graph showing the relationship between the mark disturbance rate (Jitter) and the nitrogen filling amount of the test disk of the embodiment 3 when the argon gas (Ar) is fixed at 10 sccm. Using a Blu-ray dynamic testing machine [manufactured by Shibasoku, model LM 330A], the recording modulation code condition is RLL (1, 10) code, the recording frequency (Channel clock frequency) is 66MHz, and the recording linear velocity is 8.25m/s. It can be seen from the figure that changing the nitrogen filling amount of 0-2.5 sccm can significantly improve the reflectivity. The mark disturbance rate (Jitter) can reach below 8% when the nitrogen filling amount is 0.5 sccm.

Please refer to shown in Fig. 6B, it is the test disc of embodiment 3, using Blu-ray disc dynamic testing machine [Shibasoku company system, model LM330A], its recording modulation code condition is RLL (1,10) code, recording frequency ( Channel clock frequency) is 66MHz, and the recording line speed is 8.25m/s. As a result of the test, the dynamic observation pattern (Eye pattern) of the Blu-ray disc, as shown in Figure 6C, is the test disc of embodiment 3, and the mark disturbance rate (Jitter) of the Blu-ray disc is 7.58% or less, which shows the test disc of embodiment 3 film, which has good recording characteristics.

From the results, under the composition and structure of the _AxByCz material shown in the present invention, using the _method shown in the coating process of the present invention, the mark disturbance rate (Jitter) _of the high-density optical information recording medium is significantly improved. improvement.

The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention is disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone familiar with this field , without departing from the scope of the technical solution of the present invention, when the technical content disclosed above can be used to make some changes or be modified into equivalent embodiments with equivalent changes, but all the content that does not depart from the technical solution of the present invention, according to the technical content of the present invention In essence, any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solution of the present invention.

Claims (18)

1, a kind of Write-only one time type high-density optical information recording media is characterized in that the multilayer membrane type structure of this recording medium, and its structural order comprises: substrate, first protective seam, inorganic material recording layer, second protective seam, reflection horizon; Wherein, the material of described inorganic material recording layer comprises the material shown in the chemical formula (I):

A _xB _yC _z (I)

The A element comprises one of them of silicon (Si) or tin (Sn);

The B element comprises one of them of aluminium (Al), silver (Ag), gold (Au), zinc (Zn), titanium (Ti), nickel (Ni), copper (Cu), cobalt (Co), tantalum (Ta), iron (Fe), tungsten (W), chromium (Cr), vanadium (V), gallium (Ga), plumbous (Pb), molybdenum (Mo), indium (In) or single (Sb);

The C element comprises elements such as oxygen, nitrogen.

X, y and z are A, B, C atoms of elements ratio;

X be at least greater than zero to 1.0 scope; Y is in 0.02 to 0.8 the scope; Z be greater than zero to 1.0 scope.

2, Write-only one time type high-density optical information recording media according to claim 1 is characterized in that its structure more comprises a resin protective layer, is formed on the described reflection horizon.

3, Write-only one time type high-density optical information recording media according to claim 2, the material that it is characterized in that wherein said resin protective layer is a light-hardening resin.

4, Write-only one time type high-density optical information recording media according to claim 1 and 2, the material that it is characterized in that wherein said first protective seam and this second protective seam comprise one of them of silicon nitride (SiNx), monox (SiOx), zinc sulphide-monox (ZnS-SiO2), aluminium nitride (AlNx), silit (SiC), titanium nitride (TiNx), tantalum oxide (TaOx), germanium nitride (GeNx), yttria (YOx) respectively.

5, Write-only one time type high-density optical information recording media according to claim 1 and 2 is characterized in that wherein said first protective seam and this second protective seam are a dielectric materials layer or a composite dielectric material layer.

6, Write-only one time type high-density optical information recording media according to claim 1 and 2, the material that it is characterized in that wherein said reflection horizon are the materials that is selected from the alloy of gold (Au), silver (Ag), aluminium (Al), titanium (Ti), plumbous (Pb), chromium (Cr), molybdenum (Mo), tungsten (W), tantalum (Ta) and above-mentioned metal.

7, Write-only one time type high-density optical information recording media according to claim 1 and 2 is characterized in that wherein said inorganic material recording layer is to be total to sputtering method with the apple pie target, uses the AxBy material to constitute, and add the C element in the processing procedure process, finishes A _xB _yC _zRecording layer.

8, Write-only one time type high-density optical information recording media according to claim 1 and 2, it is characterized in that wherein said inorganic material recording layer is to comprise with A element and B element with processing procedure, use sputtering method altogether, and in the processing procedure process, add the C element, finish A _xB _yC _zMaterial is formed.

9, Write-only one time type high-density optical information recording media according to claim 1 and 2 is characterized in that wherein said inorganic material recording layer is with the alloys target sputtering method, uses A _xB _yC _zMaterial constitutes to be finished.

10, Write-only one time type high-density optical information recording media according to claim 1 and 2 is characterized in that wherein said substrate is to be Write-only one time type numerical digit multifunctional light stamper substrate, Write-only one time type CD-RW discsCD-RW substrate.

11, a kind of Write-only one time type high-density optical information recording media is characterized in that this recording medium comprises: a substrate, and being followed successively by on the substrate: the inorganic material recording layer, with second protective seam; The material of this inorganic material recording layer is to be the material shown in the chemical formula (I):

A _xB _yC _z (I)

The A element comprises one of them of silicon (Si) or tin (Sn);

The B element comprises one of them of aluminium (Al), silver (Ag), gold (Au), zinc (Zn), titanium (Ti), nickel (Ni), copper (Cu), cobalt (Co), tantalum (Ta), iron (Fe), tungsten (W), chromium (Cr), vanadium (V), gallium (Ga), plumbous (Pb), molybdenum (Mo), indium (In) or single (Sb):

The C element is elements such as oxygen, nitrogen;

X, y and z are A, B, C atoms of elements ratio; X be at least greater than zero to 1.0 scope; Y is in 0.02 to 0.8 the scope; Z be greater than zero to 1.0 scope.

12, Write-only one time type high-density optical information recording media according to claim 11 is characterized in that its structure more comprises a reflection horizon, is formed on this second protective seam.

13, Write-only one time type high-density optical information recording media according to claim 11 is characterized in that its structure more comprises one first protective seam, is arranged between this inorganic material recording layer and this substrate.

14, according to claim 11,12 or 13 described Write-only one time type high-density optical information recording medias; it is characterized in that the material of wherein said first protective seam and this second protective seam, it comprises: silicon nitride (SiNx), monox (SiOx), zinc sulphide-monox (ZnS-SiO2), aluminium nitride (AlNx), silit (SiC), tantalum oxide (TaOx) germanium nitride (GeNx), titanium nitride (TiNx), yttria composite materials such as (YOx) are formed.

15, according to claim 11,12 or 13 described Write-only one time type high-density optical information recording medias, it is characterized in that wherein said inorganic material recording layer processing procedure comprises with A element and B element, use apple pie target sputtering method, and in the processing procedure process, add the C element, finish A _xB _yC _zMaterial is formed, and A element and B atoms of elements ratio can be adjusted by the area ratio of target.

16, according to claim 11,12 or 13 described Write-only one time type high-density optical information recording medias, it is characterized in that wherein said inorganic material recording layer processing procedure comprises with A element and B element, use sputtering method altogether, and in the processing procedure process, add the C element, finish A _xB _yC _zMaterial is formed.

17, according to claim 11 or 12 described Write-only one time type high-density optical information recording medias, it is characterized in that wherein said inorganic material recording layer is with A element and B element, or with A element, B element and C element, use the alloys target sputtering method, finish A _xB _yC _zMaterial is formed.

18,, it is characterized in that wherein said substrate is Write-only one time type numerical digit multifunctional light stamper substrate or is Write-only one time type CD-RW discsCD-RW substrate according to claim 11 or 12 described Write-only one time type high-density optical information recording medias.

Images