CN1750393A - A Novel Surface Mount Quartz Crystal Resonator and Manufacturing Method - Google Patents

Abstract

The invention relates to a novel quartz crystal resonator with a surface mounted structure and a manufacturing method thereof. The resonator is composed of a resonance plate, a base plate and a shell plate, and is characterized in that an electrode is deposited in the middle of the resonance plate to generate resonance, and meanwhile, two ends of the resonance plate can be fixed on the base plate which is attached to the resonance plate to form the resonator.

Description

A Novel Surface Mount Quartz Crystal Resonator and Manufacturing Method

technical field

The invention relates to a quartz crystal resonator and a manufacturing method thereof. Specifically, the invention relates to a novel surface-mounted quartz crystal resonator and a manufacturing method thereof.

Background technique

Due to its frequency accuracy and stability, quartz crystal resonators are an indispensable part in modern electronic industries such as communications, computers, entertainment equipment and other fields we are involved in. So far, quartz crystal resonators are usually composed of piezoelectric quartz crystal sheet basic units, such as circular or rectangular, and a package that can be sealed in some way, and AC voltage can be applied through the leads of the sealed package. Oscillations are produced on the base unit of a thin sheet of quartz crystal. On the basic unit of the piezoelectric quartz crystal sheet, a group of very thin conductive metal electrodes are deposited on its two main surfaces (upper surface and lower surface) to form a resonant plate. The overlapping part of the electrodes on both sides determines the resonance area on the resonance. When the frequency of the supplied AC voltage is the same as the resonance frequency of the quartz crystal resonator, the piezoelectric quartz crystal resonator starts to resonate. The resonant frequency of the quartz crystal resonator is determined by the piezoelectric and elastic constants, dimensions, metal electrodes and other factors of the quartz crystal.

Typically, a surface-mount quartz crystal resonator consists of a plated piezoelectric quartz crystal resonator and a ceramic package or base. This type of quartz crystal resonator is fixed at two points on one end by conductive glue. On the ceramic package, a metal shell is welded on the metal flange of the ceramic package. In addition, the ceramic shell can also be glued or welded to the ceramic package or base through low-melting glass.

The ceramic package or base is a laminated ceramic structure that comprehensively applies technologies such as metal overfire deposition, metal mixing, and ceramic-metal sealing. Such ceramic components require high-tech production, and the production cost is relatively high, and has always been Relatively lack of products.

In this case, it has obvious advantages and advantages to be able to provide a surface-mounted quartz crystal resonator with simple structure, low-cost production, effective and durable.

Contents of the invention

In view of the above-mentioned problems, the present invention proposes a novel surface-mounted quartz crystal resonator and its manufacturing method. The resonator and its manufacturing method make the structure of the present invention simple and clear, suitable for low-cost manufacturing, and have durability and effectiveness. Features.

Another object of the present invention is to provide a novel surface-mounted quartz crystal resonator and its manufacturing method, which are easy to implement, low in cost, easy to manufacture, and easy to use, and the resonator has the characteristics of low height .

Based on this, the present invention is realized like this:

The present invention firstly provides a resonator plate based on quartz crystal, which is an important component of the quartz crystal resonator. The resonant plate resonates at a specific frequency, usually required to respond to an AC voltage applied to the resonant plate. In use, the quartz crystal based resonator plate resonates at a desired frequency relative to the frequency of the response to an external AC voltage.

The outer perimeter of the quartz crystal based resonant plate may be of any suitable geometry. For example, its shape is suitable for a surface quartz crystal resonator, but in its basic structure, the resonator plate is in the form of a bridge to facilitate resonance, and its two ends can be fixed.

Specifically, electrodes are deposited in the middle of the quartz crystal resonator plate to generate resonance, and at the same time, its two ends can be fixed on the base plate on which it is attached to form a resonator (described later), that is to say, the two ends of the resonator plate It is a fixed part, and the resonant plate is distinguished from such a structure, the bridge structure part is formed in the middle, and the fixed part is at both ends. The shape of this fixed part can be larger than the bridge structure in the middle, and can also be smaller than the bridge structure. The so-called bridge structure is the resonant part of the resonator plate. Its specific shape can be designed according to actual needs. In a particularly useful In shape, the bridge-shaped structure may be a structure whose main body is rectangular or elliptical, or a similar uniform regular geometric shape.

Other geometric shapes that are particularly useful include approximately circular, or approximately rectangular shapes, and the like. In one particularly useful shape, the resonant plate has a rectangular perimeter.

The resonator has electrodes for applying an external AC voltage. In one particularly useful form, the resonant plate has an upper surface and a lower surface, with a first electrode on the upper surface of the quartz wafer and another electrode on the lower surface of the corresponding wafer.

The thickness of the resonator plate can be very uniform or variable. In a very useful embodiment, the thickness of the resonant plate is reduced in areas other than the resonant area defined by the two repeated electrodes (ie, the area occupied by the first and second electrode portions). This feature will be discussed in detail later.

In another particularly useful shape, the thickness of the resonant plate is substantially uniform, but significantly reduced relative to the boundary portion (generally, the boundary portion refers to the region without electrodes), which will be discussed later.

In another embodiment of the invention, the assembly of the resonator includes a quartz crystal based resonator plate and a base plate as described elsewhere so that the base plate and resonator plate are firmly joined together. Relative to the base plate, the resonant plate can resonate according to the appropriate AC voltage supplied to both ends of the resonant plate. The base plate has electrodes, and the base plate and the resonant plate are connected together at the electrodes of the base and the resonant plate to form a conduction in terms of electrical properties. Since the resonator plate is connected to the base plate at both ends instead of at one end like a ceramic resonator, this connection provides a strong mechanical connection performance, forming a very good relationship between the resonator plate and the base plate. Strong mechanical connection. This approach enhances the durability of the resonator, increasing the service life of the resonator relative to resonators produced by prior art.

Although the crystal-based resonant plates of the base plate can be joined together in various ways and techniques, it is best to use adhesives to join together, so the assembly should be at the base electrode of the base plate and The electrodes of the crystal-based resonator plate are fixed with adhesives. This type of adhesive always works well in bonding the base piece to the resonator plate. A particularly effective type of adhesive is an adhesive adhesive.

Although the base plate can be composed of any suitable material, such as metal, glass, ceramic, etc., the preferred material is crystal (ie, quartz crystal). The use of the crystal is very effective in reducing the cost, and basically completely satisfies the physical characteristics of the crystal-based resonator plate, especially the thermal expansion performance. Such properties will minimize the negative impact of stress on resonator performance.

The base plate preferably includes a pair of base electrodes such that one base electrode is electrically connected to the first electrode of the resonant plate while the other base electrode is electrically connected to the second electrode of the resonant plate. Such pedestal electrodes are very effective in supplying an external AC signal to the resonant plate.

The electrodes described herein may be composed of any suitable conductive material, but such materials preferably include metallic components. It can be plated by any suitable method, preferably by vacuum coating to the surface. The electrodes mentioned here include the electrodes of the base plate and the electrodes of the resonant plate.

Suitable crystal resonators referred to in this invention include a crystal-based resonator plate and a base plate as described elsewhere, as well as a housing plate. The housing piece is firmly fixed to the base piece so that the resonant piece is located between the housing piece and the base piece, so that the entire resonator is firmly mechanically fixed together, and a suitable crystal-based resonant piece can be completely well sealed.

in one form. The first pass of adhesive is placed on the corresponding electrodes of the base and resonant plates and effectively secures the base and resonant plates together, while the second pass of adhesive is placed on the housing and base plates , and effectively fix the shell sheet and the base sheet together firmly, the components of the first adhesive and the second adhesive can be the same or different.

Although any material can be used for the shell piece, the shell piece is preferably made of crystal (ie, quartz crystal). Thus in one particularly useful form, the crystal-based resonator plate, base plate and housing plate are all composed of crystals.

In one particularly useful form, the base and housing pieces may have outwardly extending recesses, a feature described in more detail below.

One aspect of realization of the present invention provides a method of producing a quartz crystal resonator, which method includes providing a complete quartz wafer; first and second electrodes are plated on the upper surface and the corresponding lower surface of the quartz wafer, A resonant piece is formed, and the resonant piece and the base plate coated with electrodes are firmly connected together so that the resonant piece can resonate relative to the base piece when an external AC voltage acts on the resonant piece; then the base piece is firmly connected to the shell The pieces are connected together so that the resonator piece is firmly positioned between the base piece and the housing piece. Surface-mounted quartz crystal resonators are thus fabricated.

In one form, both the base piece and the housing piece are composed of quartz crystals. The fixing step includes firmly adhering the resonator piece and the base piece together, and firmly adhering the base piece and the shell piece together with an adhesive.

This gluing step effectively mechanically and securely bonds the base, resonator and housing pieces together to form a fully sealed perimeter.

A conductive adhesive, preferably conductive glue, is applied between the electrodes of the resonator plate and the electrodes of the base plate to form an electrical circuit for the resonator.

Each feature or a combination of two or more features introduced so far is included in the scope of the present invention, and such features are not inconsistent with each other.

The resonator designed by the invention has a simple structure, can be produced at low cost, is effective and durable. For example, it is used in electronic equipment such as computers, mobile phones, radio control and data transmission systems. Since the case and base of this resonator can be produced by the manufacturer using the crystal resonator itself, this makes the production of quartz crystal resonators no longer dependent on external ceramic package manufacturers. For example, the surface mount quartz crystal resonator no longer requires, and no longer includes, the ceramic package or submount described above. The invention thus avoids any relationship with such ceramic packages or submounts and the problems associated therewith. Even better, the quartz crystal resonator is encapsulated by a quartz crystal base and a quartz crystal shell. When the surface-mounted quartz crystal resonator is installed on the application circuit, it can obviously improve the ability of anti-shock and anti-vibration oscillation. Also, due to the resonator's low height relative to resonators produced by previous manufacturing techniques, the fabrication process for surface mount quartz crystal resonators is easy to implement and provides a cost-effective method to produce surface mount Install the quartz crystal resonator.

In summary, the present invention has the characteristics of simple and clear structure, suitable for low-cost manufacturing, and has the characteristics of effectiveness and durability in use, and the electrodes of the resonant plate can be directly electroplated on the wafer, and are in phase with the electrodes on the base plate. Correspondingly, it is not necessary to use metal leads to make the AC voltage act on the resonant piece to make it resonate. Therefore, the height of the entire surface-mounted quartz crystal resonator can be reduced. Of course, the specific height should be determined according to design requirements such as resonance frequency.

Description of drawings

Fig. 1 is the structural representation of quartz crystal resonator plate of the present invention,

Fig. 2 is a schematic structural view of a crystal base sheet without a concave portion of the present invention,

Fig. 3 is the schematic diagram of another structure of the crystal base of the present invention,

Fig. 4 is the schematic diagram of the adhesive bond between the fixed resonator plate and the base plate in the present invention,

Fig. 5 is a structural schematic view of the resonator plate and the base plate fixed together in the present invention,

Fig. 6 is a schematic structural view of a crystal shell sheet having a recess in the present invention,

Fig. 7 is a schematic diagram of the adhesive bond of the fixed base sheet and the shell sheet of the present invention,

Figure 8 is a schematic structural view of the present invention with a partial cross-section,

Fig. 9 is a sectional view of another quartz crystal resonator of the present invention,

Fig. 10 is a cross-sectional view of another quartz crystal resonator plate of the present invention,

Fig. 11 is a cross-sectional view of another quartz crystal resonator plate of the present invention.

Detailed ways

FIG. 1 shows a rectangular piezoelectric quartz crystal resonator plate 10 . In the present invention, the long side of the resonator plate 10 is parallel to the X axis. The X axis is just the characteristic axis of the quartz crystal and the AT cut direction, and this AT cut quartz crystal is commonly used in high frequency quartz crystal resonators. The width of the resonant plate 10 is parallel to the Z axis, and the thickness is parallel to the Y axis.

In order not to specifically limit the present invention, the common size of the resonator plate 10 includes a length range: between 2.0mm-12mm, such as 7.5mm; a width range: between 1.5mm-5.5mm, such as 5mm. The thickness depends on the resonant frequency according to the following relationship

t=1.67/F EQN.1 (Formula 1)

t stands for thickness in mm, F stands for resonant frequency in MHz, and the resonant frequency is usually between 1MHz-200MHz.

In order to provide electrical signals to the resonant plate 10, conductive metal electrodes 14, 15 are vacuum-plated on the top and bottom of the quartz wafer 10 (ie, the aforementioned first electrode and second electrode) to form a resonant plate.

The dimensions of the electrodes 14, 15 are determined by the parameter indices of the equivalent circuit from which the final quartz crystal resonator is designed to meet the size constraints in the application. However, the thickness of the electrodes 14, 15 and the density of the metal applied to the electrodes 14, 15 are the main factors that determine how much the electroded frequency of the resonator plate 10 is dropped from the electrodeless frequency of the resonator plate 10. The drop rate of the resonant frequency relative to the electrodeless frequency is usually called the mass load (or frequency return) of the electrode, which is expressed by the following formula:

Δ＝(f _u -f _θ )/f _u EQN.2 (Formula 2)

f _u represents the electrodeless frequency of the resonant part, f _θ represents the electrode frequency of the resonant part.

Acoustic results show that the thickness shear wave with frequency f _θ formed between the electrodes 14, 15 cannot spread to other regions of the resonant plate 10 without electrodes, and when the sound wave is transmitted to the edges 18, 19 of the resonant plate 10 , the magnitude of the acoustic displacement decreases exponentially.

Since the energy of the acoustic wave is proportional to the square of the acoustic displacement, the acoustic energy decreases exponentially as the acoustic wave radiates from the electrode edges 16,17 to the resonant plate 10 edges 18,19. This phenomenon is called the trapping effect of energy, and the energy reaching the edge 18, 19 of the resonator plate 10 disappears from the resonator due to the emission and absorption of sound waves. The larger the Δ value, the larger the exponential decrease rate of the acoustic displacement amplitude, and the larger the trapping effect of the energy. When the energy loss due to insufficient energy trapping effect is large, the equivalent series resistance is large.

Usually, quartz crystal resonators are required to have a relatively small equivalent series resistance. Therefore, the value of Δ and the length between the electrode edges 16, 17 and the edges 18, 19 of the resonant plate 10 are specially designed to determine the size of the resonant plate 10 so that the quartz crystal resonator can meet practical requirements.

The conductive metal extends from the upper electrode 14 and the lower electrode 15 to the terminal electrode regions 20 , 21 of the quartz crystal resonator plate 10 . The purpose of the terminal electrode regions 20, 21 is that they correspond to the base electrodes 26, 27 of the upper inner surface 23 of the crystal base plate 22 as shown in FIG. The purpose of using the conductive glue is to connect the terminal electrode area 20 and the base electrode 26 together, and also connect the terminal electrode area 21 to the base electrode 27 .

The resonant plate 10 includes electrodes 14 and 15 . It is connected with the base sheet 22 at the above-mentioned electrode area through conductive glue.

As shown in Figure 2, the metal electrodes 26, 27 on the upper top surface 23 of the base plate 22 surround the edge of the base plate 22 and are respectively connected to the terminal electrode regions 29 on the lower exterior 24 of the crystal base plate 22 , 30. A conventional conductive glue is used to connect the terminal electrode regions 20, 21 on the resonator plate 10 with the base terminal electrode regions 26, 27 on the upper top surface 23, and then through the metal electrode sheet and the lower outer portion 24. The terminal electrode areas 29, 30 are connected. The metal electrodes 14 and 15 of the resonator plate 10 are finally connected to terminal electrode areas 29 , 30 on the lower outer portion 24 of the base plate 22 .

Figure 2 shows two terminal electrode areas 29, 30 on the lower outer portion 24 of the base sheet 22, which are connected together with the circuit. As shown in Fig. 3, other two terminal areas 31, 32 can be added, mainly for soldering and fixing them on the circuit board, and finally positioning the surface mount crystal resonator at the same time, and their positions on the lower exterior 24 can be relocated , in order to better meet actual needs. The conductive metal electrode pads on the regions 23, 24 of the base sheet 22 are formed by vacuum coating a very thin metal film, but they can also be coated on the surface by other methods.

As shown in FIG. 4 , conventional conductive glue 36 is used to connect the terminal electrode areas 20 , 21 on the resonator plate 10 and the terminal electrode areas 26 , 27 on the base plate 22 respectively. After using the conductive adhesive (a kind of adhesive) 36, it is cured according to the requirements of the adhesive manufacturer.

As shown in FIG. 5, after the conductive glue 36 is cured, the assembly 39 of the resonator plate 10 and the base plate 22 can be tested before continuing to process, and the terminal electrode regions 29, 30 can be connected together by appropriate testing equipment. test. As is common practice in the quartz crystal resonator industry, the frequency is best adjusted to the specified frequency prior to complete assembly and capping.

As shown in FIG. 6 , the crystal shell piece 35 and the crystal base piece 22 have substantially the same size and have outward recesses, so that the two are convenient for docking and fixing, but the crystal shell piece 35 has no functional electrodes. The crystal shell sheet 35 is transparent, and the electrodes on the resonant sheet 10 and the electrodes on the crystal base sheet 22 can be observed through the shell sheet, and the crystal shell sheet 35 can be used for printing at the same time, so as to produce a logo.

Shown in Fig. 7 and Fig. 8, the assembling and connecting method of crystal shell sheet 35 and crystal base sheet 22 is: use conventional glue adhesive 38 for the border part on the crystal base sheet 22, then both are bonded . The conventional glue bond 38 used on the periphery of the crystal base plate 22 is narrow in width so as to ensure that excess glue bond does not stick to the resonator plate 10. If too much glue is accidentally applied to the resonator plate 10, the resonance characteristics will be greatly affected depending on the amount of glue. The outer periphery of the glue bond 38 is substantially the same as the periphery of the base piece 22 and the crystal housing piece 35 .

After the glue bond 38 is applied, the shell sheet 35 is placed on top of the assembly so that the periphery of the shell sheet 35 is completely bonded to the glue bond 38 without any voids, and the glue bond 38 is cured according to the manufacturer's requirements. .

The adhesive has a certain viscosity and surface tension, and this property supports the three wafers 22, 10, 35 during the assembly process and keeps them from touching after curing. It is very important that the resonator plate 10 has The two ends are fixed by conductive glue and the base plate 22, and do not have any contact with the crystal base plate 22 and the crystal shell plate 35. Such contacts will depress the resonator, or create a high equivalent series resistance. If for any reason the design requires that the resonator plate 10 be thicker, the central portions of the crystal housing plate and base plate can be made sufficiently recessed to avoid any contact, as will be discussed later.

A feature of the present invention is that the resonant plate 10, the crystal base plate 22 and the crystal shell plate 35 all have the same coefficient of thermal expansion, which can avoid the stress caused by using different base and shell materials in the prior art.

Another feature of the present invention that can be reflected from the structure of this resonator assembly 40 is that the resonator plate 10 is located at the base plate 22, the shell plate 35 and the thickness of the adhesive bond 38 around the periphery of the connection assembly. In the concave portion, and supported by conductive glue 36 at both ends of the resonant piece.

Fig. 9 shows another embodiment of the invention. Except as described above, this additional resonator assembly, designated 140, is substantially identical in structure and function to the previous resonator assembly 40. The identification method of the components of the resonator assembly 140 is the same as the identification method of the resonator assembly 40 described above, except that "1" is added in front of the number.

As shown in FIG. 9, the main difference between the resonator assembly 140 and the resonator 40 is that both the shell piece 135 and the base piece 122 include recessed portions. Specifically, the base piece 122 includes an outwardly extending recess 50 , while the housing piece 135 includes a recess 52 . These recesses 50, 52 can be produced by conventional methods. These concave parts are designed to provide additional space. This space enables the resonant plate 110 to not touch the base plate 122 and the shell plate 135 when resonating. This form is particularly useful when reducing the size, such as reducing The height of the resonator.

Fig. 10 shows another form of the quartz crystal resonator plate in the present invention. Except for what was previously described, the quartz crystal resonator plate of this form, designated 210, is similar in structure and function to the resonator plate 10 introduced previously. The component identification method of the resonant plate 210 is the same as the numbering method of the components of the resonant plate 10 described in the past, except that “2” is added before the number.

The resonant plate 210 is mainly used to solve the phenomenon of energy trap effect. In applications that effectively require a very small overall size, the quartz crystal resonator plate 210 needs to be designed with a very large delta value in order to achieve the required energy trapping effect to achieve an acceptably low ESR. Usually the required Δ value, that is, the mass load (or frequency return), is achieved by the thickness of the electrode 14 plated on the resonator plate 10, but because the material of the metal electrode has a lower internal Mechanical Q, so using a thicker electrode will increase the equivalent resistance.

Figure 10 shows another way to increase the thickness of the electrodes. The frequency of the thickness-shear mode in this form of the present invention is inversely proportional to the thickness of the resonant plate 210, and can be described by the above formula EQN.1. If the thickness between the electrode edges 216, 217 and the resonance plate edges 218, 219 is reduced as shown in FIG. A 10% reduction in thickness increases the frequency by approximately 10%, ignoring other factors. Since the mass load Δ, as described by equation EQN.2, is proportional to the difference in frequency between the electrodeless regions 60, 62 and the electroded region 64, the mass load Δ can be achieved by reducing the thickness of the resonant plate outside the electrode region 64 , rather than by massively increasing the thickness of the electrodes, this approach enables the design of high-strength energy-trapping effects and good equivalent resistance values while maintaining a small size.

Higher frequency crystal resonators are becoming more and more important, but according to Equation EQN.1, increasing the frequency of the resonator necessitates reducing the thickness of the resonator plate. The thinner the resonator is, the easier it is to break and the more difficult it is to process through the production process. One method is to use the fundamental frequency overtone to achieve a higher frequency. This kind of overtone will use a thicker resonator, but the equivalent circuit of the overtone resonance has a higher equivalent impedance and a lower frequency than the fundamental frequency resonance mode. dynamic capacitance. For this reason fundamental frequency mode is required in many practical applications.

Fig. 11 shows another form of the quartz crystal resonator plate of the present invention. . Except as previously described, this resonant plate, designated 310, is similar in structure and function to the previously described resonant plate 10. The identification method of the components of the resonant plate 310 is the same as that of the resonant plate 10, except that “3” is added in front.

As shown in FIG. 11, the thickness of the middle portion 65 of the resonator plate 310 is reduced in order to meet the needs of the application. This result can be achieved by suitable means, such as selectively etching the central portion 65 while leaving the border portion 66 still thicker and stronger. In this way it is possible to achieve a resonant plate 310 with a very thin central portion 65 and still achieve high resonant frequencies without sacrificing the thickness and strength of the border portion 66 .

In this application, the implementation of the present invention is described in different forms, however, the present invention is not limited in these scopes, and it can be implemented in different forms in other required scopes.

Claims (19)

1, a kind of resonance piece deposits electrode on it, it is characterized in that constituting the bridge architecture part in the middle of this resonance piece, and two ends then are standing parts.

2, resonance piece as claimed in claim 1 is characterized in that this resonance piece is a rectangle, or square, or oval, or circular.

3, resonance piece as claimed in claim 1, the thickness that it is characterized in that this resonance piece is variable.

4, resonance piece as claimed in claim 3 is characterized in that the upper and lower surface of resonance piece is respectively arranged with first, second electrode part, can reduce the thickness of resonance piece in the zone that does not have first, second electrode part.

5, resonance piece as claimed in claim 3 is characterized in that the upper and lower surface of resonance piece is respectively arranged with first, second electrode part, has the thickness of first, second electrode part to reduce to some extent than the area thickness that does not have first, second electrode part.

6, a kind of resonator group piece installing is characterized in that this resonator group piece installing comprises:

Resonance piece based on quartz crystal, but this resonance piece resonance is in desired frequency;

A base pieces is fixed in resonance piece, so that resonance piece can be with respect to base pieces resonance.

7, resonator group piece installing as claimed in claim 6 is characterized in that resonance piece links together at two ends and base pieces, and base pieces has the electrode part, and the electrode pair of its electrode and resonance piece should and connect together.

8, resonator group piece installing as claimed in claim 6 is characterized in that this assembly includes base pieces and resonance piece are firmly fixed together binding.

9, resonator group piece installing as claimed in claim 6 is characterized in that base pieces is to be made of quartz crystal materials.

10, resonator group piece installing as claimed in claim 7, it is characterized in that the resonance piece upper surface has first electrode, lower surface has second electrode, the base pieces correspondence includes the pair of base electrode, this position and resonance piece first electrode, second electrode pair to base electrode is answered, and is connected with first electrode, second electrode respectively.

11 resonator group piece installings as claimed in claim 7 is characterized in that first electrode of resonance piece and the two ends that second electrode extends to this resonance piece, form first, second end points electrode district; First, second end points electrode district respectively with base pieces on two corresponding linking together of base electrode on inner surface; Two base electrode on inner surface extend to the outer surface of this base pieces on the base pieces by side faces at both ends.

12, resonator group piece installing as claimed in claim 11 is characterized in that first electrode of resonance piece and the electrode on second electrode and the base pieces contain metal ingredient.

13, a kind of novel surface sticked quartz crystal resonator, this resonator comprises:

Resonance piece based on quartz crystal, but this resonance piece resonance is in desired frequency;

A base pieces is fixed in resonance piece, and resonance piece can be with respect to base pieces resonance;

A casing sheets that is fixed together with base pieces, resonance piece is between base pieces and casing sheets.

14, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that this resonator includes between base pieces and casing sheets and with the two binding that is fixed together effectively.

15, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that casing sheets is made of quartz crystal materials.

16, novel surface sticked quartz crystal resonator as claimed in claim 13 is characterized in that in this resonator that base pieces and casing sheets all include an outward extending recess.

17, a kind of manufacture method of novel surface sticked quartz crystal resonator is characterized in that this method comprises:

A complete quartz crystal slice is provided;

Upper surface and lower surface at quartz crystal slice plates first electrode and second electrode respectively, forms resonance piece;

Resonance piece is securely fixed on the base pieces that electrode arranged, so that resonance piece can be with respect to this base pieces resonance;

Base pieces is firmly fixed on the casing sheets, so that resonance piece is between base pieces and casing sheets.

18, the manufacture method of novel surface sticked quartz crystal resonator as claimed in claim 17 is characterized in that in the method base pieces and casing sheets all adopt quartz crystal materials; And fixing step comprises with binding resonance piece being firmly fixed with base pieces is in the same place, with binding base pieces is firmly fixed with casing sheets and to be in the same place, make resonance piece between base pieces and casing sheets, base pieces, resonance piece and casing sheets form a periphery of sealing fully.

19, the manufacture method of novel surface sticked quartz crystal resonator as claimed in claim 18 is characterized in that above-mentioned binding can be a conducting resinl, also can be other glue.

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