CN1731236A - Chip-shaped two-dimensional piezoelectric light reflective structure - Google Patents

Abstract

The invention relates to a precision mechanism light driving technology, which comprises a composite outrigger which is formed by a set of piezoelectric ceramic sheet with two electrodes and a base chip, a hinge, a reflecting lens and frame, and a supporting frame. The lens frame is connected with the base chip by the hinge; the base chip is fixed by the supporting frame. When the positive end of the power is paralleled with the two sets of the electrode area, the negative end of the power connects with the base chip, so that the composite outrigger generates a bend deformation; when the positive end and the negative end of the power are separately connected with the two sets of the electrode area, the composite outrigger generates a torsion deformation. The composite outrigger can also be formed by four cruciform symmetrical distributing outriggers with the reflecting lens in the center of the cruciform symmetric or by two vertical outriggers with the reflecting lens on the vertical point; the lens frame is connected with the supporting frame.

Description

Chip-shaped two-dimensional piezoelectric light reflective structure

technical field

The invention belongs to the field of optical drive technology in precision machinery, and in particular relates to several typical structures of novel two-dimensional piezoelectric optical scanning.

technical background

In the background art, scanning optical systems play an important role in optical instruments. Commonly used optical scanning structures include: mechanical drive scanning structure, electromagnetic drive scanning structure, electrostatic drive scanning structure, piezoelectric drive scanning structure, acousto-optic deflection scanning structure, electro-optical deflection scanning structure, and polygonal prism rotary scanning structure.

Among them, the research work on electromagnetic and electrostatic oscillation scanning structures was carried out relatively early, the theory and technology have matured, and they have been widely used in the field of optical scanning applications. Due to electromagnetic and electrostatic drives, there are obvious structural vibrations and defects such as electromagnetic radiation, while the piezoelectric-driven optical scanning structure has a simple structure, fast response, small start-up braking vibration, no electromagnetic radiation, no gaps, and no friction loss. And other characteristics, so that more and more scholars pay more and more attention to the development of piezoelectric drive scanning structure. At present, the existing piezoelectric optical scanning structures are mainly piezoelectric composite structures that can realize one-dimensional swing or piezoelectric composite structures that can realize two-dimensional swing but have a very complex structure.

Contents of the invention

In order to realize the two-dimensional swing of the light reflector, and at the same time have a simple and reliable structure, the present invention proposes several design structures for two-dimensional piezoelectric optical scanning. Several structures adopt piezoelectric composite cantilevers with very simple structures. The beam structure, the chip piezoelectric ceramic used is easy to be compatible with the semiconductor processing technology, and the miniaturization of the structure or device will be further realized in the future.

A chip-like two-dimensional piezoelectric light reflection structure, characterized in that the structure includes:

(1) Composite cantilever beam, which is formed by a substrate and a group of piezoelectric ceramic sheets on the same side of the substrate are fixedly connected. There are two electrode regions on the piezoelectric ceramic sheet, which are formed after being polarized along the thickness direction. The polarization directions in the two corresponding polarization regions formed are the same;

(2) a hinge, one side of the hinge is movably connected to one side of the substrate;

(3) reflective lens, the lens is fixed in a frame connected to the other side of the hinge;

(4) a supporting frame, which is fixedly connected to the other side of the substrate;

When the positive electrode of the excitation signal is connected in parallel with the two groups of electrode regions, and the negative electrode is connected to the substrate, the composite cantilever beam will produce bending deformation relative to the substrate plane;

When the positive pole and the negative pole of the excitation signal are respectively connected to the two groups of electrode areas, the composite cantilever beam produces torsional deformation with the long axis of the composite cantilever beam as the centerline.

A chip-like two-dimensional piezoelectric light reflection structure, characterized in that the structure includes:

(1) Composite cantilever beam, which is formed by fixed connection of a substrate and a group of piezoelectric ceramic sheets on the same side of the substrate. There are two electrode regions on the piezoelectric ceramic sheet, which are formed after being polarized along the thickness direction The polarization directions in the two corresponding polarization regions are the same;

(2) a hinge, one side of the hinge is movably connected to one side of the substrate;

(3) reflective lens, the lens is fixed in a frame, one side of the frame is connected to the other side of the hinge;

(4) a support frame, one side of the frame is fixedly connected to the other side of the substrate, and the other side of the frame is movably connected to the other side of the frame through another hinge;

When the positive pole of the excitation signal is connected in parallel with the two groups of electrode regions, and the negative pole is connected with the substrate, the composite cantilever beam will produce bending deformation relative to the plane of the substrate;

When the positive pole and the negative pole of the excitation signal are respectively connected to the two groups of electrode areas, the composite cantilever beam will generate torsional deformation with the long axis of the composite cantilever beam as the center line.

A chip-like two-dimensional piezoelectric light reflection structure, characterized in that the structure includes:

(1) The combination of composite cantilever beams is composed of four composite cantilever beams distributed symmetrically across each other. Each composite cantilever beam is composed of a substrate and a piezoelectric ceramic sheet fixed to the substrate. The piezoelectric ceramic The slices are located on the same side of each substrate, and are polarized along the thickness direction with the same polarization direction;

(2) reflective lens, fixed in a picture frame, this picture frame is respectively movably connected with one side of four substrates by four hinges, and is located at the center of the symmetrical distribution of the cross;

(3) a supporting frame, which is fixedly connected to the other side of the four substrates;

When the positive pole of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet on any one of the composite cantilever beams in the composite cantilever beam combination, and the negative electrode is connected to the electrode surface of the piezoelectric ceramic sheet on a composite cantilever beam on the opposite side, One of the two piezoelectric ceramic sheets will always be kept contracted while the other is extended, causing the two facing composite cantilever beams to produce upward and downward phase-reversed bending deformations, thereby causing the connected reflectors to oscillate. , the two kinds of swings of the reflective mirror formed by the combination of the cross-symmetrically distributed composite cantilever beams are orthogonal in space.

A chip-like two-dimensional piezoelectric light reflection structure, characterized in that the structure includes:

(1) The combination of composite cantilever beams is composed of two mutually perpendicular composite cantilever beams. Each composite cantilever beam is composed of a substrate and a piezoelectric ceramic sheet fixed to the substrate. Each piezoelectric ceramic sheet is located at The same side of each substrate is polarized along the thickness direction, and the polarization direction is the same;

(2) reflective mirror, which is fixed in a picture frame and is located at the vertical intersection of the two composite cantilever beams;

(3) a supporting frame, which is fixedly connected to one side of the two mutually perpendicular composite cantilever beams;

(4) There are four hinges, one side of the first hinge and the second hinge are flexibly connected with the other side of the two mutually perpendicular composite cantilever beams respectively, while the other side of the first hinge and the second hinge are are respectively movably connected with the picture frame; one side of the third hinge and the fourth hinge are respectively movably connected with the support frame, and the other sides of the third hinge and the fourth hinge are respectively movably connected with the picture frame;

The two mutually perpendicular composite cantilever beams realize the two-dimensional optical scanning of the reflective mirror through their respective bending deformation, that is, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet on any one of the composite cantilever beams, and When the negative electrode is connected to the substrate, the composite cantilever beam will be bent and deformed, thereby causing the mirror to swing; for the other composite cantilever beam, the result is the same when the method is used, but the front and rear two swing spaces are orthogonal to achieve Two-dimensional swing of the reflective mirror.

The piezoelectric ceramic sheet is a single-layer sheet, or any one of multi-layer laminated sheet structures.

Any one of metal material or silicon material is used for the substrate and supporting frame.

The reflective lens adopts any one of sputtered aluminum film or gold film surface.

The hinge is in the form of a slender strip, and is rigidly and movably connected with the substrate, or the mirror frame, or the support frame.

Compared with the traditional light scanning structure based on other principles, the two-dimensional piezoelectric light reflection structure has very significant advantages.

Due to electromagnetic and electrostatic drives, there are obvious structural vibrations and defects such as electromagnetic radiation, while the piezoelectric-driven optical scanning structure has a simple structure, fast response, small start-up braking vibration, no electromagnetic radiation, no gaps, and no friction loss. Features. Compared with the existing piezoelectric scanning structure, it has a simple structure, a chip shape, and is easy to be compatible with semiconductor processing technology, which provides the possibility of large-scale and mass production in the future.

The advancement of optical scanning technology has promoted the rapid development of its applications and corresponding products, such as: code readers, scanners, projectors, displays, laser printing, non-contact measurement, wireless optical communications, etc. Especially when this structure is used in wireless optical communication, it greatly improves the speed of spatial optical scanning search and positioning in wireless optical network communication, increases the reliability and stability of information transmission, and ensures the compact structure design of node converters , low manufacturing cost, injecting new vigor and vitality into the wireless optical network communication market at home and abroad, the application of piezoelectric drive control technology and piezoelectric scanning microstructure in wireless optical network communication node converters will most likely form A brand-new, even completely different design concept from previous traditional products. At the same time, it can greatly save the investment in infrastructure for network communication, and avoid laying too many facilities such as optical cables underground in cities. Set up this wireless optical network communication technology.

Description of drawings

FIG. 1 is a schematic structural view of Embodiment 1 of a single-cantilever two-dimensional piezoelectric light reflection structure of the present invention. a) is a schematic diagram of the structure using a piece of piezoelectric ceramics, and the surface is divided into two electrode regions; b) is a schematic diagram of the structure of using two pieces of piezoelectric ceramics.

Fig. 2 is a working principle diagram of the single cantilever two-dimensional piezoelectric light reflection structure of the present invention. a) finite element analysis results of structural bending deformation; b) finite element analysis results of structural torsional deformation.

FIG. 3 is a physical photo of Embodiment 1 of the single cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 4 is the laser Doppler test result of Embodiment 1 of the single-cantilever two-dimensional piezoelectric optical reflection structure of the present invention. a) Structural bending deformation results; b) Structural torsional deformation results.

FIG. 5 is a schematic structural diagram of Embodiment 2 of a single cantilever two-dimensional piezoelectric light reflection structure. a) is a schematic diagram of the structure using a piece of piezoelectric ceramics, and the surface is divided into two electrode regions, and b) is a schematic diagram of the structure of using two pieces of piezoelectric ceramics.

FIG. 6 is a schematic structural view of Embodiment 3 of the four-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 7 is a working principle diagram of the four-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 8 is a schematic structural view of Embodiment 4 of the four-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 9 is a schematic structural view of Embodiment 5 of the four-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 10 is a schematic structural view of Embodiment 6 of the double-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 11 is a schematic structural view of Embodiment 7 of the double-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

FIG. 12 is a schematic structural view of Embodiment 8 of the double-cantilever two-dimensional piezoelectric light reflection structure of the present invention.

Detailed ways

The present invention mainly designs a single-cantilever type, a double-cantilever type and a four-cantilever type new chip two-dimensional piezoelectric light reflection structure.

Among them, the single-cantilever two-dimensional piezoelectric optical reflection structure is composed of a piezoelectric composite cantilever beam composed of a group of piezoelectric ceramic sheets and a substrate, a living hinge, a reflector, and a supporting frame. It is characterized in that: the reflecting mirror is connected with a composite cantilever beam or a supporting frame through a living hinge, and the composite cantilever beam is fixed by the surrounding supporting frame. The surface electrode of the piezoelectric ceramic sheet is divided into two electrode areas, each electrode area is polarized along the thickness direction and has the same polarization direction, the piezoelectric ceramic sheet is pasted on the substrate, and the direction of the dividing line of the electrode area is the same as that of the cantilever The length direction is parallel. When the same phase alternating current is applied to the two electrode areas, the cantilever generates bending vibration, and the mirror vibrates accordingly. When the two electrode areas are supplied with anti-phase alternating current, one ceramic area stretches, the other shrinks, and the lens twists along the midline of the cantilever length direction. In this way, the deflection angle of the lens has two degrees of freedom. When working, relying on the bending and twisting deformation of the piezoelectric composite cantilever beam, it drives the swing of the reflector at the end in the two-dimensional direction, thereby realizing the adjustment of light in the two-dimensional space. .

The double-cantilever two-dimensional piezoelectric optical reflection structure is composed of two piezoelectric composite cantilever beams composed of two sets of piezoelectric ceramic sheets and substrates, a living hinge, a reflective lens, and a supporting frame. Its characteristics are: the two composite cantilever beams are vertically distributed, the reflector is arranged at the intersection point of the two composite cantilever beams through a hinge, and is connected with the supporting frame through a living hinge, and the two composite cantilever beams rely on the surrounding supporting frame fixed.

The four-cantilever two-dimensional piezoelectric light reflection structure is composed of four sets of piezoelectric ceramic sheets and substrates respectively forming four composite cantilever beams, living hinges, reflective mirrors, and a supporting frame. It is characterized in that four composite cantilever beams are symmetrically distributed in a cross, reflectors are arranged at the center point of the cross through a movable hinge, and the four composite cantilever beams are fixed by surrounding supporting frames. Double and four-cantilever two-dimensional piezoelectric light reflection structures rely on the bending deformation of the piezoelectric composite cantilever beam to drive the two-dimensional swing of the reflector at the end to realize the adjustment of light in the two-dimensional space.

The sheet-type two-dimensional piezoelectric light reflection structure proposed by the present invention is described in detail as follows with reference to the embodiments and accompanying drawings.

Embodiment one:

The present invention designs a first embodiment of a two-dimensional piezoelectric light reflection structure in the form of a chip, as shown in FIGS. 1-4 .

The sliced two-dimensional piezoelectric optical reflection structure is composed of a composite cantilever beam 1 composed of a set of piezoelectric ceramic slices 11 and a substrate 12 , a living hinge 13 , a reflective mirror 14 , and a support frame 15 . It is characterized in that: the reflective mirror 14 is connected with the composite cantilever beam 1 through the movable hinge 13, and the composite cantilever beam 1 is fixed by the surrounding support frame 15, and 141 is a mirror frame.

The piezoelectric ceramic sheet 11 is a single-layer sheet or a multi-layer laminated sheet structure, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheet 11 . The piezoelectric ceramic sheet 11 and the substrate 12 are bonded with epoxy glue, and the piezoelectric ceramic sheet 11 is fixed on the same side of the substrate 12 .

The piezoelectric ceramic sheet 11 is divided into two groups of electrode regions 110 and 111 on the surface of the same piezoelectric ceramic sheet 11, and the polarization directions of the two groups of polarization regions are the same; or the piezoelectric ceramic sheet 11 is two The piezoelectric ceramic pieces 112 and 113 are arranged side by side at certain intervals along the length direction of the composite cantilever beam, and the polarization directions of the two piezoelectric ceramic pieces 112 and 113 are the same.

The substrate 12 and the supporting frame 15 are made of metal material or silicon material.

The surface of the reflector 14 is sputtered aluminum or gold to form a reflector 140 .

The living hinge 13 is a slender strip structure, rigidly connected with the composite cantilever beam 1 and the mirror frame 141 .

The supporting frame 15 is fixed with the outside through the through hole 150 .

The composite cantilever beam 1 realizes the two-dimensional optical scanning of the reflective mirror 14 through bending deformation and torsional deformation. The feature is: when the positive electrode of the excitation signal is connected to the two groups of electrode areas 110, 111, or respectively connected to the surfaces of the two piezoelectric ceramic sheets 112 and 113, and the negative electrode of the excitation signal is connected to the substrate 12, this connection method will The composite cantilever beam 1 is bent and deformed. When the positive pole and the negative pole of the excitation signal are respectively connected to the two groups of electrode regions 110, 111, or respectively connected to the surfaces of the two piezoelectric ceramic sheets 112 and 113, this connection mode will cause the composite cantilever beam 1 to be torsionally deformed.

Embodiment two:

The present invention has designed a second embodiment of a sliced two-dimensional piezoelectric light reflection structure, as shown in FIG. 5 .

The two-dimensional piezoelectric optical reflection structure in the form of a chip is composed of a composite cantilever beam 5 composed of a group of piezoelectric ceramic sheets 51 and a substrate 52 , a living hinge 53 , a mirror 54 , 541 is a mirror frame, and a support frame 55 . It is characterized in that: the reflecting mirror 54 is connected with the composite cantilever beam 55 and the supporting frame 55 through the movable hinge 53, and the composite cantilever beam 5 is fixed by the surrounding supporting frame 55.

The piezoelectric ceramic sheet 51 is a single-layer sheet or a multi-layer laminated sheet structure, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheet 51 . The piezoelectric ceramic sheet 51 and the substrate 52 are bonded with epoxy glue, and the piezoelectric ceramic sheet 51 is fixed on the same side of the substrate 52 .

The piezoelectric ceramic sheet 51 is divided into two groups of electrode regions 510 and 511 on the surface of the same piezoelectric ceramic sheet 51, and the polarization directions of the two groups of polarization regions are the same; or the piezoelectric ceramic sheet 51 is two piezoelectric ceramic sheets. The electric ceramic sheets 512 and 513 are arranged side by side at certain intervals along the length direction of the composite cantilever beam, and the polarization directions of the two piezoelectric ceramics 512 and 513 are the same.

The substrate 52 and the supporting frame 55 are made of metal material or silicon material.

The surface of the reflector 54 is sputtered aluminum or gold to form a reflector 540 .

The living hinge 53 is a slender strip structure, and is rigidly connected with the composite cantilever beam 1 , the mirror frame 141 and the support frame 55 .

The support frame 55 is fixed with the outside through the through hole 550 .

The composite cantilever beam 5 realizes the two-dimensional optical scanning of the reflective mirror 54 through bending deformation and torsional deformation. The feature is: when the positive electrode of the excitation signal is connected to the two groups of electrode areas 510, 511, or respectively connected to the surfaces of the two piezoelectric ceramic sheets 512 and 513, and the negative electrode of the excitation signal is connected to the substrate 52, this connection method will The composite cantilever beam 5 is bent and deformed. When the positive pole and negative pole of the excitation signal are respectively connected to the two groups of electrode regions 510, 511, or respectively connected to the surfaces of the two piezoelectric ceramic sheets 512 and 513, this connection method will cause the composite cantilever beam 5 to be torsionally deformed.

Embodiment three:

The present invention has designed a third embodiment of a two-dimensional piezoelectric light reflection structure in the form of a chip, as shown in FIG. 6 .

Chip-type two-dimensional piezoelectric light reflection structure, composed of four groups of piezoelectric ceramic sheets 610, 620, 630, 640 and substrates 611, 621, 631, 641 respectively constitute four composite cantilever beams 61, 62, 63, 64 , a living hinge 65, a mirror 66, and a supporting frame 67 are formed. It is characterized in that: four composite cantilever beams 61, 62, 63 and 64 are symmetrically distributed in a cross, reflective mirror 66 is arranged at the center point of the cross through a living hinge 65, and the four composite cantilever beams 61, 62, 63 and 64 rely on the surrounding The support frame 67 is fixed.

The piezoelectric ceramic sheets 610, 620, 630, 640 are single-layer sheets, or multi-layer laminated sheets, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 610, 620, 630, 640 are respectively bonded to the substrates 611, 621, 631, 641 with epoxy glue, and the piezoelectric ceramic sheets 610, 620, 630, 640 are all fixed on the substrates 611, Same side of 621, 631, 641.

The substrates 611, 621, 631, 641 and the support frame 67 are made of metal or silicon.

The surface of the reflector 66 is sputtered aluminum or gold to form a reflector 660 .

The living hinge 65 is a slender strip structure, rigidly connected with the composite cantilever beams 61 , 62 , 63 , 64 and the mirror frame 661 .

The support frame 67 is fixed with the outside through the through hole 670 .

The composite cantilever beams 61 , 62 , 63 , and 64 realize two-dimensional optical scanning of the reflective mirror 66 through respective bending deformation. The feature is: when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 610 on the composite cantilever beam 61, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 630 on the opposite composite cantilever beam 63, this connection method It will always keep one of the two piezoelectric ceramic sheets 610 and 630 contracting and the other stretching, causing the two facing composite cantilever beams 61 and 63 to produce up and down bending deformations in opposite phases, thereby causing the connected reflective mirror 66 to produce swing. Similarly, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 620 on the composite cantilever beam 62, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 640 on the opposite composite cantilever beam 64, this connection mode It will always keep one of the two piezoelectric ceramic sheets 620 and 640 contracting and the other stretching, causing the two face-to-face composite cantilever beams 62 and 64 to produce two kinds of bending deformations in opposite phases up and down, and then make the connected reflective mirror 66 produce For swinging, the front and rear swinging spaces are orthogonal, that is, the reflecting mirror 66 realizes two-dimensional swinging.

Embodiment four:

The present invention has designed a fourth embodiment of a two-dimensional piezoelectric light reflection structure in the form of a chip, as shown in FIG. 8 .

The structure of the fourth embodiment is basically the same as that of the third embodiment, the only difference lies in the specific structure of the supporting frame, as shown in FIG. 8 .

Chip-type two-dimensional piezoelectric light reflection structure, composed of four groups of piezoelectric ceramic sheets 810, 820, 830, 840 and substrates 811, 821, 831, 841 respectively constitute four composite cantilever beams 81, 82, 83, 84 , a living hinge 85, a mirror 86, and a supporting frame 87 are formed. It is characterized in that: four composite cantilever beams 81, 82, 83 and 84 are symmetrically distributed in a cross, reflective mirror 86 is arranged at the center point of the cross through a living hinge 85, and the four composite cantilever beams 81, 82, 83 and 84 rely on the surrounding The supporting frame 87 is fixed.

The piezoelectric ceramic sheets 810, 820, 830, and 840 are single-layer sheets or multi-layer laminated sheets, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 810, 820, 830, 840 are respectively bonded to the substrates 811, 821, 831, 841 with epoxy glue, and the piezoelectric ceramic sheets 810, 820, 830, 840 are fixed on the substrates 811, 840, 821, 831, 841 on the same side.

The substrates 811, 821, 831, 841 and the support frame 87 are made of metal or silicon.

The surface of the reflector 86 is sputtered aluminum or gold to form a reflector 860 .

The living hinge 85 is a slender strip structure, rigidly connected with the composite cantilever beams 81 , 82 , 83 , 84 and the mirror frame 861 .

The supporting frame 87 is fixed with the outside through the through hole 870 .

The composite cantilever beams 81 , 82 , 83 , and 84 realize the two-dimensional optical scanning of the reflective mirror 86 through respective bending deformation. The feature is: when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 810 on the composite cantilever beam 81, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 830 on the opposite composite cantilever beam 83, this connection mode It will always keep one of the two piezoelectric ceramic sheets 810 and 830 contracting and the other stretching, causing the two facing composite cantilever beams 81 and 83 to produce up and down bending deformations in opposite phases, thereby causing the connected reflective mirror 86 to produce swing. Similarly, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 820 on the composite cantilever beam 82, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 840 on the opposite composite cantilever beam 84, this connection mode It will always keep one of the two piezoelectric ceramic sheets 820 and 840 contracting and the other stretching, causing the two face-to-face composite cantilever beams 82 and 84 to produce two kinds of bending deformations in opposite phases up and down, and then make the connected reflector 86 produce For swinging, the front and rear swinging spaces are orthogonal, that is, the reflecting mirror 86 realizes two-dimensional swinging.

For swinging, the front and rear swinging spaces are orthogonal, that is, the reflecting mirror 66 realizes two-dimensional swinging.

Embodiment five:

The present invention has designed a fifth embodiment of a sheet-like two-dimensional piezoelectric light reflection structure, as shown in FIG. 9 .

The structure of the fifth embodiment is basically the same as that of the third embodiment, the only difference lies in the specific structure of the supporting frame, as shown in FIG. 9 .

The two-dimensional piezoelectric optical reflective structure of the sheet type consists of four sets of piezoelectric ceramic sheets 910, 920, 930, 940 and substrates 911, 921, 931, 941 to form four composite cantilever beams 91, 92, 93, 94 respectively , a living hinge 95, a mirror 96, and a support frame 97 form. It is characterized in that: four composite cantilever beams 91, 92, 93 and 94 are symmetrically distributed in a cross, reflective mirror 96 is arranged at the central point of the cross through a living hinge 95, and four composite cantilever beams 91, 92, 93 and 94 rely on the surrounding The support frame 97 is fixed.

The piezoelectric ceramic sheets 910 , 920 , 930 , 940 are single-layer sheets or multi-layer stacked sheet structures, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 910, 920, 930, 940 are respectively bonded to the substrates 911, 921, 931, 941 with epoxy glue, and the piezoelectric ceramic sheets 910, 920, 930, 940 are fixed on the substrates 911, 940, Same side of 921, 931, 941.

The substrates 911, 921, 931, 941 and the support frame 97 are made of metal material or silicon material.

The surface of the reflector 96 is sputtered aluminum or gold to form a reflector 960 .

The living hinge 95 is in a slender strip structure, rigidly connected with the composite cantilever beams 91 , 92 , 93 , 94 and the mirror frame 961 .

The support frame 97 is fixed with the outside through the through hole 970 .

The composite cantilever beams 91 , 92 , 93 , and 94 realize two-dimensional optical scanning of the reflective mirror 96 through respective bending deformations. The feature is: when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 910 on the composite cantilever beam 91, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 930 on the opposite composite cantilever beam 93, this connection method It will always keep one of the two piezoelectric ceramic sheets 910 and 930 contracting and the other stretching, causing the two facing composite cantilever beams 91 and 93 to produce up and down bending deformations in opposite phases, thereby causing the connected reflective mirror 96 to produce swing. Similarly, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 920 on the composite cantilever beam 92, and the negative electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 940 on the opposite composite cantilever beam 94, this connection mode It will always keep one of the two piezoelectric ceramic sheets 920 and 940 contracting and the other stretching, causing the two facing composite cantilever beams 92 and 94 to produce up and down bending deformations in opposite phases, thereby causing the connected reflective mirror 96 to produce For swinging, the front and rear swinging spaces are orthogonal, that is, the reflecting mirror 96 realizes two-dimensional swinging.

Embodiment six:

The present invention has designed a sixth embodiment of a sheet-like two-dimensional piezoelectric light reflection structure, as shown in FIG. 10 .

The two-dimensional piezoelectric optical reflection structure in the form of a chip consists of two sets of piezoelectric ceramic sheets 1010, 1020 and substrates 1011, 1021 respectively forming two composite cantilever beams 101, 102, a living hinge 103, a reflector 104, and a supporting frame 105 composition. It is characterized in that: the two composite cantilever beams 101 and 102 are vertically distributed, the reflector 104 is arranged at the intersection point of the two composite cantilever beams 101 and 102 through a hinge 103, and is connected with the support frame 105 through the living hinge 103, The two composite cantilever beams 101 and 102 are fixed by the support frame 105 around them.

The piezoelectric ceramic sheets 1010 and 1020 are single-layer sheets, or multi-layer laminated sheet structures, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 1010 and 1020 are respectively bonded to the substrates 1011 and 1021 with epoxy glue, and the piezoelectric ceramic sheets 1010 and 1020 are fixed on the same side of the substrates 1011 and 1021 .

The substrates 1011 and 1021 and the supporting frame 105 are made of metal material or silicon material.

The surface of the reflector 104 is sputtered aluminum or gold to form a reflector 1040 .

The living hinge 103 is a slender strip structure, and is rigidly connected with the composite cantilever beams 101 and 102 and the mirror frame 1041 .

The support frame 105 is fixed to the outside through the through hole 1050 .

The composite cantilever beams 101 and 102 realize the two-dimensional optical scanning of the reflective mirror 104 through respective bending deformation. The feature is: when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1010 on the composite cantilever beam 101, and the negative electrode of the excitation signal is connected to the substrate 1011, the composite cantilever beam 101 will be bent and deformed, and then the connected reflective mirror 104 will swing . Similarly, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1020 on the composite cantilever beam 102, and the negative electrode of the excitation signal is connected to the substrate 1021, the composite cantilever beam 102 will be bent and deformed, thereby causing the connected mirror 104 to swing . The front and rear swinging spaces are orthogonal, that is, the reflecting mirror 104 realizes two-dimensional swinging.

Embodiment seven:

The present invention has designed a seventh embodiment of a sheet-like two-dimensional piezoelectric light reflection structure, as shown in FIG. 11 .

The structure of the seventh embodiment is basically the same as that of the sixth embodiment, the only difference lies in the specific structure of the supporting frame, as shown in FIG. 11 .

The two-dimensional piezoelectric optical reflective structure in the form of a chip consists of two sets of piezoelectric ceramic sheets 1110, 1120 and substrates 1111, 1121 respectively forming two composite cantilever beams 111, 112, a living hinge 113, a reflector 114, and a supporting frame 115 composition. It is characterized in that: the two composite cantilever beams 111 and 112 are vertically distributed, the reflector 114 is arranged at the intersection point of the two composite cantilever beams 111 and 112 through the hinge 113, and is connected with the supporting frame 115 through the living hinge 113, The two composite cantilever beams 111 and 112 are fixed by the support frame 115 around them.

The piezoelectric ceramic sheets 1110 and 1120 are single-layer sheets or multi-layer laminated sheet structures, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 1110 and 1120 are respectively bonded to the substrates 1111 and 1121 with epoxy glue, and the piezoelectric ceramic sheets 1110 and 1120 are fixed on the same side of the substrates 1111 and 1121 .

The substrates 1111 and 1121 and the supporting frame 115 are made of metal material or silicon material.

The surface of the reflector 114 is sputtered aluminum or gold to form a reflector 1140 .

The living hinge 113 is a slender strip structure, rigidly connected with the composite cantilever beams 111 and 112 and the mirror frame 1141 .

The support frame 115 is fixed to the outside through the through hole 1150 .

The composite cantilever beams 111 and 112 realize the two-dimensional optical scanning of the reflective mirror 114 through respective bending deformation. The feature is: when the positive pole of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1110 on the composite cantilever beam 111, and the negative pole of the excitation signal is connected to the substrate 1111, the composite cantilever beam 111 will be bent and deformed, and then the connected mirror 114 will swing . Similarly, when the positive pole of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1120 on the composite cantilever beam 112, and the negative pole of the excitation signal is connected to the substrate 1121, the composite cantilever beam 112 will be bent and deformed, thereby causing the connected mirror 114 to swing . The front and rear swinging spaces are orthogonal, that is, the reflecting mirror 114 realizes two-dimensional swinging.

Embodiment eight:

The present invention has designed an eighth embodiment of a two-dimensional piezoelectric light reflection structure in the form of a chip, as shown in FIG. 12 .

The structure of the eighth embodiment is basically the same as that of the sixth embodiment, the only difference lies in the specific structure of the supporting frame, see FIG. 12 .

The two-dimensional piezoelectric optical reflective structure in the form of a chip consists of two sets of piezoelectric ceramic sheets 1210, 1220 and substrates 1211, 1221 respectively forming two composite cantilever beams 121, 122, a living hinge 123, a reflector 124, and a supporting frame 125 composition. It is characterized in that: the two composite cantilever beams 121 and 122 are vertically distributed, the reflector 124 is arranged at the intersection point of the two composite cantilever beams 121 and 122 through the hinge 123, and is connected with the supporting frame 115 through the living hinge 123, The two composite cantilever beams 121 and 122 are fixed by the support frame 125 around them.

The piezoelectric ceramic sheets 1210 and 1220 are single-layer sheets or multi-layer stacked sheet structures, and the polarization direction is along the thickness direction of the piezoelectric ceramic sheets. The piezoelectric ceramic sheets 1210 and 1220 are respectively bonded to the substrates 1211 and 1221 with epoxy glue, and the piezoelectric ceramic sheets 1210 and 1220 are fixed on the same side of the substrates 1211 and 1221 .

The substrates 1211 and 1221 and the supporting frame 125 are made of metal material or silicon material.

The surface of the reflector 124 is sputtered aluminum or gold to form a reflector 1240 .

The living hinge 123 is a slender strip structure, rigidly connected with the composite cantilever beams 121 and 122 and the mirror frame 1241 .

The supporting frame 125 is fixed with the outside through the through hole 1250 .

The composite cantilever beams 121 and 122 realize the two-dimensional optical scanning of the reflective mirror 124 through respective bending deformation. The feature is: when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1210 on the composite cantilever beam 121, and the negative electrode of the excitation signal is connected to the substrate 1211, the composite cantilever beam 121 will be bent and deformed, and then the connected mirror 124 will swing . Similarly, when the positive electrode of the excitation signal is connected to the electrode surface of the piezoelectric ceramic sheet 1220 on the composite cantilever beam 122, and the negative electrode of the excitation signal is connected to the substrate 1221, the composite cantilever beam 122 will be bent and deformed, and then the connected mirror 124 will swing . The front and rear swinging spaces are orthogonal, that is, the reflecting mirror 124 realizes two-dimensional swinging.

Claims (12)

1. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:

(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of formed two correspondences after the thickness direction polarization;

(2) hinge, a side of this hinge and a side of described substrate flexibly connect;

(3) reflecting optics, this eyeglass are fixed in the picture frame, and this picture frame links to each other with the opposite side of described hinge;

(4) support frame, this framework is fixedlyed connected with the opposite side of described substrate;

Anodal in parallel with the two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;

Link to each other the torsional deflection that it is center line that this composite cantilever produces with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.

2. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:

(1) composite cantilever, be fixedly connected to form by a substrate and one group of piezoelectric ceramic piece being positioned at this substrate homonymy, two electrode districts are arranged on this piezoelectric ceramic piece, and they are identical by the polarised direction in the polarized area of two correspondences that form along thickness direction polarization back;

(2) hinge, a side of this hinge and a side of described substrate flexibly connect;

(3) reflecting optics, this eyeglass are fixed in the picture frame, and a side of this picture frame links to each other with the opposite side of described hinge;

(4) support frame, this framework one side is fixedlyed connected with the opposite side of described substrate, and the opposite side of this framework then flexibly connects by the opposite side of another one hinge and described picture frame;

Anodal in parallel with described two arrays of electrodes district when pumping signal, and negative pole is when linking to each other with described substrate, and this composite cantilever generation is with respect to the flexural deformation of described substrate plane;

Link to each other then this composite cantilever generation torsional deflection that is center line with described composite cantilever major axis respectively with described two arrays of electrodes district with negative pole when pumping signal is anodal.

3. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:

(1) composite cantilever combination, constitute by four composite cantilevers that are the cross symmetrical distribution mutually, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, this piezoelectric ceramic piece all is positioned at each substrate homonymy, and all identical along thickness direction polarization and polarised direction;

(2) reflecting optics is fixed in the picture frame, and this picture frame flexibly connects with a side of four substrates respectively mutually by four hinges, is positioned at the center part that described cross is symmetrically distributed;

(3) support frame, this framework is fixedlyed connected with the opposite side of described four substrates;

The electrode surface of the piezoelectric ceramic piece on any one composite cantilever in pumping signal positive pole and the combination of described composite cantilever links to each other, and the electrode surface of the piezoelectric ceramic piece on the composite cantilever of negative pole and opposite side is when linking to each other, shrink and another elongation remaining in these two piezoelectric ceramic pieces one, cause aspectant two composite cantilevers to produce, following two kinds of flexural deformations that phase place is reverse, and then making the reflecting optics that is connected produce swing, two kinds of swings that the composite cantilever that described cross is symmetrically distributed makes up formed reflecting optics are quadratures in the space.

4. the two-dimensional piezoelectric light reflection structure of chip type is characterized in that, this structure comprises:

(1) composite cantilever combination, be made of two mutually perpendicular composite cantilevers, each composite cantilever constitutes by a substrate and with the piezoelectric ceramic piece of this substrate Joint, and each piezoelectric ceramic piece all is positioned at each substrate homonymy, all polarized along thickness direction, and polarised direction is identical;

(2) reflecting optics, this eyeglass are fixed in the picture frame, are positioned at the place that intersects vertically of described two composite cantilevers;

(3) support frame, this framework are fixedlyed connected with a side of described two orthogonal composite cantilevers respectively;

(4) hinge has four, and a side of the 1st hinge, the 2nd hinge then flexibly connects with described picture frame respectively with opposite side flexible connection the 1st hinge of described two orthogonal composite cantilevers, the opposite side of the 2nd hinge respectively; One side of the 3rd hinge, the 4th hinge flexibly connects with described support frame respectively, and the opposite side of the 3rd hinge, the 4th hinge then flexibly connects with described picture frame respectively mutually;

Described two orthogonal composite cantilevers are realized the two dimensional optical scanning of described reflecting optics by flexural deformation separately, promptly the electrode surface of the piezoelectric ceramic piece on pumping signal positive pole and any one composite cantilever wherein links to each other, then this composite cantilever generation flexural deformation when negative pole links to each other with substrate, and then make described anti-eyeglass produce swing; For the another one composite cantilever, it comes to the same thing when adopting described method, but front and back two kinds of swings orthogonal space has been realized the two dimension swing of described reflecting optics.

5. according to the described chip type two-dimensional piezoelectric light reflection structure of any one claim in the claim 1～4, it is characterized in that: described piezoelectric ceramic piece is a single-layer sheet, or any in the multi-layer stacks formula structure.

6. according to the described chip type two-dimensional piezoelectric light reflection structure of any one claim in the claim 1～4, it is characterized in that: described substrate and support frame adopt any in metal material or the silicon materials.

7. according to the described chip type two-dimensional piezoelectric light reflection structure of any claim in the claim 1～4, it is characterized in that: described reflecting optics adopts any in sputtered aluminum film or the golden film surface.

8. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1～4, it is characterized in that: described hinge is the elongate strip structure, with described substrate or picture frame or the flexible connection of support frame rigidity.

9. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1,2 two kinds, it is characterized in that: described piezoelectric ceramic piece is to become the two arrays of electrodes district in same piezoelectric ceramic piece surface segmentation.

10. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 1,2 two kinds, it is characterized in that: described piezoelectric ceramic piece is two piezoelectric ceramic pieces has certain intervals ground parallel arranged along described composite cantilever length direction upper and lower.

11. according to the two-dimensional piezoelectric light reflection structure of the described chip type of any one claim in the claim 2,4 two kinds, it is characterized in that: described hinge is made of one with substrate, picture frame, support frame.

12. the two-dimensional piezoelectric light reflection structure of chip type according to claim 1 is characterized in that: described hinge is made of one with substrate, picture frame.

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