CN1712554A - Double-face metallation film coating machine from high vacuum evaporation - Google Patents
Double-face metallation film coating machine from high vacuum evaporation Download PDFInfo
- Publication number
- CN1712554A CN1712554A CN 200510025763 CN200510025763A CN1712554A CN 1712554 A CN1712554 A CN 1712554A CN 200510025763 CN200510025763 CN 200510025763 CN 200510025763 A CN200510025763 A CN 200510025763A CN 1712554 A CN1712554 A CN 1712554A
- Authority
- CN
- China
- Prior art keywords
- pump
- film
- chamber
- double
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 title claims description 10
- 239000007888 film coating Substances 0.000 title claims description 8
- 238000009501 film coating Methods 0.000 title claims description 8
- 238000006263 metalation reaction Methods 0.000 title claims description 8
- 238000000576 coating method Methods 0.000 claims abstract description 22
- 239000011248 coating agent Substances 0.000 claims abstract description 21
- 238000001704 evaporation Methods 0.000 claims abstract description 20
- 239000012528 membrane Substances 0.000 claims abstract description 18
- 230000008020 evaporation Effects 0.000 claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000004091 panning Methods 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- WONYMNWUJVKVII-UHFFFAOYSA-N 3,5-diiodothyropropionic acid Chemical compound IC1=CC(CCC(=O)O)=CC(I)=C1OC1=CC=C(O)C=C1 WONYMNWUJVKVII-UHFFFAOYSA-N 0.000 abstract 1
- 230000003340 mental effect Effects 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 229910000611 Zinc aluminium Inorganic materials 0.000 description 10
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 8
- 239000004411 aluminium Substances 0.000 description 8
- 239000004033 plastic Substances 0.000 description 8
- 229920003023 plastic Polymers 0.000 description 8
- 229910052725 zinc Inorganic materials 0.000 description 8
- 239000011701 zinc Substances 0.000 description 8
- 238000007747 plating Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 230000001276 controlling effect Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 235000012773 waffles Nutrition 0.000 description 2
- 238000005269 aluminizing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A high vacuum evaporating dipro sopy metallization coating machine containing evacuated chamber made of reeling house, coating house and network board. The first pumped vacuum system is made of vapour pump, Roots pump, slide valve pump and valve lead. The second pumped vacuum system of cold trap size and evaporation source. Slide valve pump, Roots pump, two blower pump and valve lead connects serially. Two blower pump parallel connect and connect serially with previous element which is made up the second pumped vacuum system. Pass membrane structure is made of two parallel backbone. Mental membrane is covered by driving from wind-down roll to wind-up roll.
Description
One, technical field:
The present invention relates to a kind of vacuum plating unit, particularly disclose a kind of double-face metallation film coating machine from high vacuum evaporation, be applied to the plated film of electronic devices and components, wrapping material.
Two, background technology:
At present, the vacuum plating unit of domestic market, basically adopt modes such as vacuum-evaporation, sputter, ion to carry out vacuum plating, generally can only on plastics film, aluminize, almost there is not vacuum coating film equipment to carry out zinc, aluminium plated film, zinc-aluminium vacuum plating home equipment seldom, the zinc-aluminium vacuum plating unit of external import costs an arm and a leg, adopt the condensing trapping pump to be commonly called as the cold-trap formula as the second cover pumped vacuum systems, because this structural manufacturing process complexity, manufacturing cost height, result of use is poor, and the running cost that forms system is too high.The patent No.; 03116389.0, name is called: a kind of zinc-aluminium vacuum evaporating coating machine, though can on the non-conductive medium film, carry out vacuum zinc-aluminium evaporation coating, but can't on the non-conductive medium film, realize high vacuum evaporation double-sided metal plated film, be difficult to adapt to the high-tech project in the modernization construction or the upgrading of currently available products.
Three, summary of the invention:
The present invention discloses a kind of double-face metallation film coating machine from high vacuum evaporation, and purpose is the zinc-aluminium vacuum plating unit of prior art is transformed.The present invention is achieved in that a kind of zinc-aluminium vacuum evaporating coating machine, comprise by coiling chamber 16, the vacuum chamber 6 that coating chamber 19 and network board 20 are formed, by diffusion pump 7, lobe pump 11,9, slide valve pump 8 and valve 10 form first pumped vacuum systems and cold-trap formula second pumped vacuum systems and and membrane transfering mechanism (5) and evaporation source (17), described second pumped vacuum systems adopts non-condensing trapping pump, be by slide valve pump 15, lobe pump 14, two topping-up pumps 12 and 13, valve 10-1 is connected in series successively, two topping-up pumps are parallel with one another, be connected in series with above-mentioned other elements then, form second pumped vacuum systems, second pumped vacuum systems is connected vacuum chamber.It is characterized in that: described membrane transfering mechanism is made up of two main shaft 5-1 and axis of guide 5-5, panning shaft 5-2, unreeling shaft 5-3 and Scroll 5-4 arranged side by side, all be installed in and pass on the film frame cabinet 4, evaporation source 17 is placed in the below in the main shaft, the transmission of film from the unreeling shaft to the Scroll can make the two-sided metallic membrane that plates of film.
The invention has the beneficial effects as follows: not only second pumped vacuum systems in the vacuum chamber of Zu Chenging has replaced the condensing trapping pump, manufacturing cost and the too high defective of running cost in the prior art have been overcome, and to have kept the patent No. be 03116389.0, name is called a kind of characteristic of equipment of zinc-aluminium vacuum evaporating coating machine, overcome the defective that on the non-conductive medium film, to carry out single face vacuum zinc-aluminium evaporation coating again, be implemented in the double-sided metal plated film that carries out evaporation under the high vacuum state on the non-conductive medium film, realize the update of coating equipment, domestic electronic devices and components have greatly been improved, the quality grade of wrapping material, particularly promoted domestic electronic devices and components manufacturing and international most advanced level and integrated with, social benefit and economic benefit are obvious.
Four, description of drawings:
Accompanying drawing 1 is the structural representation of double-face metallation film coating machine from high vacuum evaporation of the present invention;
Accompanying drawing 2 is the local A-A section membrane transfering mechanism structural representation of accompanying drawing 1.
Wherein: 1, underframe; 2, mainframe; 2-1, secondary frame; 3, reach in freezer; 4, pass film frame cabinet; 5, membrane transfering mechanism; 5-1, main shaft; 5-2, panning shaft; 5-3, unreeling shaft; 5-4, Scroll; 5-5, the axis of guide; 5-6, hoist frame; 6, vacuum chamber; 7, diffusion pump; 8, slide valve pump; 9, lobe pump; 10, valve; 10-1, valve; 11, lobe pump; 12, topping-up pump; 13, topping-up pump; 14, lobe pump; 15, slide valve pump; 16, coiling chamber; 17, evaporation source; 17-1, zinc crucible; 17-2, aluminium crucible; 18, heating controlling box; 19, coating chamber; 20, waffle slab; 21, shield bracket.
Five, embodiment:
Below double-face metallation film coating machine from high vacuum evaporation of the present invention is further described with different mode of connection:
Embodiment 1:
See accompanying drawing 1, the complete machine of carrying out computer control is located on the underframe 1, underframe 1 is provided with track, roller by mainframe 2 can be with the reach in freezer 3 that is located on the mainframe 2, with reach in freezer 3 and the biography film frame cabinet that connects 4 with pass film frame cabinet 4 and be provided with main shaft 5-1, panning shaft 5-2, unreeling shaft 5-3, Scroll 5-4, axis of guide 5-5, shield bracket 21 orbital motions, vacuum chamber 6 comprises the coiling chamber 16 that waffle slab 20 is separated by and is communicated, 19 liang of parts of coating chamber, be fixed on the underframe 1, the opening of the coiling chamber 16 of vacuum chamber 6 is towards main shaft 4 and membrane transfering mechanism 5, the opening of coating chamber 19 is towards evaporation source 17, be equipped with zinc crucible 17-1 respectively by priority on the evaporation source 17, aluminium crucible 17-2, evaporation source 17 is fixed on heating controlling box 18 sidewalls, heating controlling box 18 and evaporation source 17 can move on underframe 1 through track by the roller of secondary frame 2-1, vacuum chamber 6 external first vacuum systems, connect coating chamber 19 by pipeline diffusion pump 7, add valve then and connect lobe pump 11,11 of valve 10 and lobe pumps are also taken in the connection vacuum chamber, valve 10 communicates with the coiling chamber 16 of vacuum chamber, lobe pump 11 is connected lobe pump 9, insert slide valve pump 8 again outside the lobe pump 9, slide valve pump 8 the other ends communicate with atmosphere; Simultaneously, second vacuum system is by 12,13 parallel connections of two topping-up pumps, the coiling chamber 16 that is communicated with vacuum chamber 6 by pipeline, valve 10-1, the other end is by pipe connection lobe pump 14 and slide valve pump 15, the other end of slide valve pump 15 communicates with atmosphere, hoist frame 5-6 device is used to lift by crane the required object of plated film passing film frame cabinet 4 upper ends.
With reference to the accompanying drawings 1, complete machine is carried out computer control, and the hoist frame 5-6 whole volume plastics film of slinging on the storage film frame of the membrane transfering mechanism 5 of packing into, moves to plastics film on the Scroll that passes film frame cabinet 4 through two main shafts; Reach in freezer 3 startings enter two main shafts by pipe fitting and make cyclic motion, make main shaft be cooled to-10 ℃; Be located at the parts on mainframe right side, comprise two main shafts, reach in freezer 3, shield bracket 21,, on the track of underframe 1, advance forward by roller with reference to accompanying drawing 2, film is through the transmission of two main shafts and the axis of guide, panning shaft, and the evaporation source under the main shaft all plates metallic membrane with the positive and negative two sides of film.Make plastics film on membrane transfering mechanism 5, shield bracket 21 and the membrane transfering mechanism 5 enter the coiling chamber 16 and the coating chamber 19 of vacuum chamber 6 respectively, quit work after the push-tight sealing; Simultaneously, be located at the heating controlling box 18 on the secondary frame 2-1 and be with zinc crucible 17-1, aluminium crucible 17-2 to enter coating chamber 19 along track by roller with its fixed evaporation source 17, this moment zinc crucible 17-1 homo(io)thermism 515 ℃ ± 10,350mm ± 10/s speed wire feed; Aluminium crucible 17-2 homo(io)thermism is 1500 ℃ ± 10, stops to advance after being advanced into sealing station, makes zinc, aluminum evaporation become gas; Open valve 10,10-1, first vacuum system starts, and second vacuum system starts, and the air of extracting vacuum chamber 6 becomes vacuum, and coating chamber 19 reaches-4 * 10
-4, coiling chamber 16 reaches-6 * 10
-2, valve-off 10,10-1 pressurize, main shaft 5-1 rotates, rotate with 8m/s speed, Scroll 5-4 begins rolling, earlier after aluminizing on the plastics film, zinc-plated on the aluminium film again, middle according to dimensional requirement, press the time that product requirement is set, starting shield bracket 21, cover plastics film, aluminium, zinc can't implantations, and the zinc-aluminium film is cut off, and obtains being spaced apart on the plastics film the whole volume zinc-aluminium film of cut-out; Open valve 10,10-1 vacuum chamber 6 enters air, recover barometric point, the parts on mainframe right side, comprise that two main shaft 5-1, reach in freezer 3, shield bracket 21 advance on the track of underframe 1 backward by roller, make plastics film on membrane transfering mechanism 5, shield bracket 21 and the membrane transfering mechanism 5 withdraw from the coiling chamber 16 and the coating chamber 19 of vacuum chamber 6, reach in freezer 3 refrigerators quit work simultaneously, the heating unit of starting reach in freezer 3, heat two main shafts to normal temperature, the right by the vacuum chamber of opening 6, after adding aluminium as required, enter next working cycle.
In addition, in evaporative process, prior art stays the limit thickening to find to have deviation for product, must stop and adjust, and the present invention sets up a cover position automatic regulating device on the zinc crucible.
Embodiment 2:
See that accompanying drawing 1, the second vacuum system is a topping-up pump 12, be communicated with the coiling chamber 16 of vacuum chamber 6 by pipeline, valve 10-1, the other end is by pipe connection lobe pump 14, slide valve pump 15, the other end of slide valve pump 15 communicates with atmosphere, and all the other are identical with embodiment 1, do not remake repeated description;
Characteristics of the present invention are: owing to adopt two main shaft 5-1, membrane transfering mechanism makes the change of film trend in the coating process, from Prior art can only become double-sided coating by coating single side, realized the update of coating machine, greatly improved domestic electricity The grade of sub-equipment, packaging material and level.
Claims (2)
1. double-face metallation film coating machine from high vacuum evaporation, comprise coiling chamber (16), the vacuum chamber (6) that coating chamber (19) and network board (20) are formed, diffusion pump (7), valve (10), lobe pump (11), (9), slide valve pump (8) is formed second pumped vacuum systems and the membrane transfering mechanism (5) and the evaporation source (17) of first pumped vacuum systems and cold-trap formula, described second pumped vacuum systems adopts non-condensing trapping pump, be by slide valve pump (15), lobe pump (14), two topping-up pumps (12) and (13), valve (10-1) is connected in series successively, two topping-up pumps are parallel with one another, be connected in series with above-mentioned other elements then, form second pumped vacuum systems, second pumped vacuum systems is connected vacuum chamber, it is characterized in that: described membrane transfering mechanism is by two main shaft (5-1) and the axis of guides (5-5) arranged side by side, panning shaft (5-2), unreeling shaft (5-3) and Scroll (5-4) are formed, all be installed in and pass on the film frame cabinet (4), evaporation source (17) is placed in the below in the main shaft, the transmission of film from the unreeling shaft to the Scroll can make the two-sided metallic membrane that plates of film.
2. double-face metallation film coating machine from high vacuum evaporation according to claim 1 is characterized in that: the double-sided metal plated film of film can be a kind of or two or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510025763 CN1712554A (en) | 2005-05-11 | 2005-05-11 | Double-face metallation film coating machine from high vacuum evaporation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510025763 CN1712554A (en) | 2005-05-11 | 2005-05-11 | Double-face metallation film coating machine from high vacuum evaporation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1712554A true CN1712554A (en) | 2005-12-28 |
Family
ID=35718347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510025763 Pending CN1712554A (en) | 2005-05-11 | 2005-05-11 | Double-face metallation film coating machine from high vacuum evaporation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1712554A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618838A (en) * | 2012-03-14 | 2012-08-01 | 昆山振昆纳米科技有限公司 | Cooling shell for circulating cooling system of vacuum coating machine |
| CN108315697A (en) * | 2018-01-16 | 2018-07-24 | 电子科技大学 | A kind of preparation method of two-sided double-axle texture MgO film |
| CN109536915A (en) * | 2018-09-30 | 2019-03-29 | 四川海格锐特科技有限公司 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
| CN110512185A (en) * | 2019-09-03 | 2019-11-29 | 肇庆宏旺金属实业有限公司 | A steel coil unwinding vacuum studio |
| CN110983256A (en) * | 2019-12-16 | 2020-04-10 | 嘉兴鹏翔包装材料有限公司 | Double-sided vacuum aluminized polyester film for heat preservation and preparation method thereof |
| CN113201721A (en) * | 2021-04-06 | 2021-08-03 | 扬州万润光电科技有限公司 | Coating equipment for preparing double-sided transparent conductive oxide film |
-
2005
- 2005-05-11 CN CN 200510025763 patent/CN1712554A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102618838A (en) * | 2012-03-14 | 2012-08-01 | 昆山振昆纳米科技有限公司 | Cooling shell for circulating cooling system of vacuum coating machine |
| CN108315697A (en) * | 2018-01-16 | 2018-07-24 | 电子科技大学 | A kind of preparation method of two-sided double-axle texture MgO film |
| CN109536915A (en) * | 2018-09-30 | 2019-03-29 | 四川海格锐特科技有限公司 | Disposable round-trip two-sided evaporating coating equipment reel system structure |
| CN109536896A (en) * | 2018-09-30 | 2019-03-29 | 四川海格锐特科技有限公司 | A kind of coating machine nip rolls layout structure and the coating machine using the structure |
| CN110512185A (en) * | 2019-09-03 | 2019-11-29 | 肇庆宏旺金属实业有限公司 | A steel coil unwinding vacuum studio |
| CN110983256A (en) * | 2019-12-16 | 2020-04-10 | 嘉兴鹏翔包装材料有限公司 | Double-sided vacuum aluminized polyester film for heat preservation and preparation method thereof |
| CN113201721A (en) * | 2021-04-06 | 2021-08-03 | 扬州万润光电科技有限公司 | Coating equipment for preparing double-sided transparent conductive oxide film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1712554A (en) | Double-face metallation film coating machine from high vacuum evaporation | |
| CN109023274A (en) | Watch dail plate word follows closely vacuum coating method | |
| CN109554680A (en) | A kind of devices of coiled vacuum coating machine | |
| CN1191386C (en) | Zinc-aluminium vacuum evaporation coating machine | |
| CN1962928A (en) | Film-coating technology for metallized film materials and products thereof | |
| CN107841725A (en) | A kind of pumped vacuum systems and its operational method for being used to produce solar film plating glass | |
| CN2608517Y (en) | Zinc aluminium vacuum evaporation film-plating machine | |
| CN102560375B (en) | Thin film deposition equipment | |
| CN102234774A (en) | System and methods for high-rate co-sputtering of thin film layers on photovoltaic module substrates | |
| CN108677160B (en) | Continuous coating production line based on revolution and rotation loading tray | |
| CN201648516U (en) | Production device for flat-plate solar heat absorption film-coating plate | |
| CN220432966U (en) | Device for maintaining vacuum coating | |
| CN102206807B (en) | Method and device for producing flat panel solar heat-absorption coated board | |
| CN113774345A (en) | Magnetron sputtering-based composite board mobile phone rear cover printing and film plating method | |
| CN219951193U (en) | Vacuum coating equipment | |
| CN203553200U (en) | Large-scale producing device for solar-energy film cell assembly | |
| CN104747422B (en) | PVD equipment cold pump method for controlling reproduction and device | |
| CN201272826Y (en) | Vacuum evaporation film-plating machine for thin film used for aluminum-thickened metalized capacitor | |
| CN209039579U (en) | Prepare the magnetron sputtering film production line of back electrode of solar cell | |
| CN201648513U (en) | Device for producing a flat-plate solar-energy heat-absorption film-coating plate | |
| CN208931770U (en) | One kind pockets slot | |
| CN220224305U (en) | Quick cooling device of vacuum ion coating equipment | |
| CN212426163U (en) | Auxiliary refrigeration system of sputtering coating water vapor gathering machine | |
| CN112501580B (en) | Measuring carrier of vertical evaporation and sputtering integrated equipment | |
| CN217479338U (en) | Glass coating production line |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |