CN1704847A - Light shield and method for making inclined reflection bumpers by using the same - Google Patents
Light shield and method for making inclined reflection bumpers by using the same Download PDFInfo
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- CN1704847A CN1704847A CN 200410027437 CN200410027437A CN1704847A CN 1704847 A CN1704847 A CN 1704847A CN 200410027437 CN200410027437 CN 200410027437 CN 200410027437 A CN200410027437 A CN 200410027437A CN 1704847 A CN1704847 A CN 1704847A
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Abstract
This invention discloses a blend used in producing tilted reflection projectors including multiple patterns bridged by penetration parts and shading parts, among which, said penetration part or the shading part is block zone, one side of the block zone has many projectors on the blend plane direction. The processing method is also disclosed.
Description
[technical field]
The present invention relates to a kind of light shield (Photo Mask) and use this light shield manufacture to tilt to reflect the method for projection (Bump), particularly relate to a kind of method that is used to make reflective (Reflective) or semi-penetration, semi-reflective (Transflective) liquid crystal indicator (Liquid Crystal DisplayDevices, LCD Devices) employed light shield and uses this light shield manufacture reflective LCD device introversion oblique reflection projection.
[background technology]
That liquid crystal indicator has is frivolous, power consumption low and advantage such as digitizing, more and more is subjected to widespread use at present on market.Liquid crystal indicator utilizes mode can be divided into penetration, reflective and semi-penetration, semi-reflective by its light source.For reflective or semi-penetrating semi-reflecting type liquid crystal displaying device, its brightness and visual angle all must be taken into account.Reflection projection reflective or that semi-penetrating semi-reflecting type liquid crystal displaying device is inner plays the reflection extraneous light, and for these liquid crystal indicators provide the effect of light source, its structure is bigger to the influence of the brightness of these liquid crystal indicators and viewing angle characteristic.
With reference to Fig. 1, be a kind of light reflectance and the graph of a relation that takes measurement of an angle of prior art reflection projection.This reflection projection horizontal positioned and having an even surface.Suppose that incident light is mapped on this reflection projection surface with 20 ° of incident angles, can be with-20 ° of angle outgoing.Therefore, can measure maximum reflectivity R1 for-20 ° the time, and the distribution curve of reflectivity is very narrow, mostly concentrates near-20 ° in angle.
Yet the reflection projection in the desirable reflective LCD device should present maximum reflectivity when 0 spends.Therefore for the reflectivity curve among Fig. 1 is moved to the left, make to be about 0 maximum of reflectivity when spending, industry proposes another kind of reflection projection technology, and it is that the reflection projection is tilted about 10 °, make the light of 20 ° of incidents originally can about 0 ° of outgoing, its light reflectance be seen Fig. 2 with the relation that takes measurement of an angle.
Yet reflectivity distribution curve shown in Figure 2 is still very narrow, can't reach the visual angle requirement of wide viewing angle.For solving the visual angle problem, industry proposes another reflection projection technology, and it is on the basis that will reflect the projection inclination, is arc with smooth surface design, and incident ray is disperseed to obtain wide-visual angle effect.Please refer to Fig. 3, through aforementioned improved, the light reflectance of reflection projection has remarkable improvement with the curve that takes measurement of an angle, and maximum reflectivity R2 remains and is positioned on 0 ° of angle, and near 0 ° certain angle scope internal reflection rate also near R2.The prior art reflection projection is simultaneously with reflecting brightness and wide-visual angle effect.
The method for making of the inclination reflection projection of above-mentioned curved surfaces is as follows: prepare a substrate; In this substrate, form a photosensitive material layer; Utilize a light shield with single patterns of openings to carry out multiexposure, multiple exposure (Multi-Step Exposure); Development (Develop) is from high to low staircase structure the photosensitive material layer of sensitization; At last, heating is flowed (Reflow) photosensitive material of staircase structure again, and forms the arcuation projection.In addition, possess reflectivity, form a reflection horizon thereon, constitute the reflection projection in conjunction with this arcuation projection for making projection.
Owing to utilize the light shield of single patterns of openings to carry out the method for multiple exposures with multiple complexity, man-hour is long, so TaiWan, China CMO company proposes a kind of improve one's methods (being exposed in No. the 01137577.9th, disclosed China's Mainland application for a patent for invention on May 7 in 2003) that can significantly reduce making reflection projection difficulty and time.This method improvement part be its adopt one by slit 15 with different in width w1, w2, the rectangular light shield that separates 10 of the shading of w3......wn (with reference to Fig. 4), to the photosensitive material layer 20 in the substrate 30 expose (with reference to Fig. 5), because slit 15 light transmission capacity I make the photosensitive material layer 20 regional exposure deficiencies under it, thereby form and have the continuous ladder 21 of differing heights and bottom, 22,23,24 structures (with reference to Fig. 6), the arc-shaped protrusions 21 that heating at last flow to form this staircase structure to be uneven and to link to each other again ', 22 ', 23 ', 24 ' structure (with reference to Fig. 7) promptly reflects projection.This is uneven and the arc-shaped protrusions 21 that links to each other ', 22 ', 23 ', 24 ' structural arrangement has a tilt angle theta.
Yet its reflected light uniformity coefficient in a wide angular field of view of reflection projection that adopts this light shield 10 to make is not good.Reason is to adopt the lack of uniformity of slit 15 exposures, promptly adopts the position and the exposure intensity smoothness of curve deficiency of slit 15 exposures, produces a plurality of complications.Therefore, adopt the ladder 21,22,23 or the 24 body structure surface structures that form in the prior art manufacturing process also to have a plurality of complications.These ladder 21,22,23,24 structures through heating flow again each arc-shaped protrusions 21 that the back forms ', 22 ', 23 ', the corresponding deficiency of its cambered surface smoothness of 24 ' structure, the uniformity coefficient deficiency that causes light to reflect.
In addition, the reflection projection that adopts this method to make need form a plurality of arc-shaped protrusions 21 ', 22 ', 23 ', 24 ' structure, utilize this a plurality of arc-shaped protrusions 21 ', 22 ', 23 ', 24 ' structure forms the reflection projection with a tilt angle theta, realize the purpose of main incident ray with about 0 ° of outgoing.Correspondingly, must adopt different in width shading rectangular separate of a plurality of slits 15 in this method, reach under-exposed effect light shield 10, with obtain this a plurality of arc-shaped protrusions 21 ', 22 ', 23 ', 24 ' structure, therefore its method is comparatively complicated, and prepared reflection projection structure is also complicated.
The prior art is utilized the design that forms orthoscopic slit 15 on the light shield 10, and prepared reflection projection only can obtain the reflecting properties at certain visual angle in corresponding slit 15 orientations, and the reflection projection that is difficult to make the even reflection ray in multi-direction wide visual angle.
Though in this patented claim, the applicant also proposes the rectangular edge designs of shading is become broached-tooth design, yet, this broached-tooth design need cooperate with 15 of slits opens the rectangular light shield of shading 10, can make this a plurality of arc-shaped protrusions 21 ', 22 ', 23 ', the reflection projection that constitutes of 24 ' structure with certain angle of inclination; And the applicant is not to the function of this broached-tooth design and adopt the effect of the reflection projection that this structure makes to make an explanation.
[summary of the invention]
In order to overcome the not high defective of reflective LCD device introversion oblique reflection projection optical effect of its made of prior art light shield, the invention provides a kind of light shield of making the higher reflective LCD device introversion oblique reflection projection of optical effect.
In order to overcome the not high defective of reflective LCD device introversion oblique reflection projection optical effect of its made of prior art light shield, the invention provides the light shield that another kind can be made the higher reflective LCD device introversion oblique reflection projection of optical effect.
In order to overcome the not high defective of reflective LCD device introversion oblique reflection projection optical effect of its made of prior art light shield, the invention provides the light shield that another can make the higher reflective LCD device introversion oblique reflection projection of optical effect.
In order to overcome the not high defective of reflective LCD device introversion oblique reflection projection optical effect of its made of prior art light shield, the invention provides the light shield that another can make the higher reflective LCD device introversion oblique reflection projection of optical effect.
In order to overcome the not high defective of reflective LCD device introversion oblique reflection projection optical effect of art methods made, the present invention also provides a kind of method of making the higher reflective LCD device introversion oblique reflection projection of optical effect.
One of technical scheme that technical solution problem of the present invention is adopted is: a kind of light shield that is used to make the reflection projection is provided, it comprises a plurality of by light transmission part and shading light part and connect the pattern that forms, this light transmission part or shading light part are boxed area, and this boxed area one side has a plurality of projections on the light shield in-plane.
Two of the technical scheme that technical solution problem of the present invention is adopted is: a kind of light shield that is used to make the reflection projection is provided, it comprises a plurality of patterns, each pattern is by light transmission part and shading light part and connect and form, this light transmission part or shading light part are boxed area, this boxed area is an integrated formed structure, the light shielding ability of one side than this shading light part other parts light shielding ability a little less than.
Three of the technical scheme that technical solution problem of the present invention is adopted is: a kind of light shield that is used to make the reflection projection is provided, it comprises a plurality of patterns, each pattern is by light transmission part and shading light part and connect and form, this light transmission part or shading light part are boxed area, this boxed area is an integrated formed structure, and the one side has a plurality of printing opacity patterns.
Four of the technical scheme that technical solution problem of the present invention is adopted is: a kind of light shield that is used to make the reflection projection is provided, it comprises a plurality of patterns, each pattern comprises that one has the first area of first light shielding ability, one second area and with second light shielding ability has the 3rd zone of the 3rd light shielding ability, the 3rd zone is between this first area and second area, and one-body molded with this first area and second area, the light shielding ability in this three zone is along this three area arrangement direction linear change.
Five of the technical scheme that technical solution problem of the present invention is adopted is: a kind of method of making the reflection projection is provided, and it comprises provides a substrate; In this substrate, form a photosensitive material layer; Adopt aforesaid light shield that this photosensitive material layer is exposed; Develop, form the projection blank corresponding with the pattern of this light shield; Level and smooth this projection blank has the arc reflection projection at an angle of inclination with formation.
Compare with prior art, the present invention has the following advantages: have a plurality of projections because the present invention is used to make its pattern of light shield that tilts to reflect projection on the light shield in-plane, these a plurality of projections can make the photosensitive material layer regional exposure deficiency under it, the position of these a plurality of projections and exposure intensity smoothness of curve are higher simultaneously, its cambered surface smoothness of the reflection projection that makes is better, thereby make the reflective or semi-penetrating semi-reflecting type liquid crystal displaying device brightness height that adopts this reflection projection, the wide and visual angle good uniformity in visual angle.And, the shape of mask pattern and the distribution of a plurality of projections can design according to actual conditions, to reach light is evenly reflected towards all directions, adopt the wide effect of visual angle of liquid crystal display of this reflection projection, overcome the difficult defective of reflection projection that prior art is made at the even reflection ray in multi-direction wide visual angle.In addition, a plurality of shape for lugs of this of this mask pattern, size and spacing etc. can arbitrarily change, according to actual conditions the strongest reflection ray is adjusted to 0 degree or a certain special angle, to obtain best reflecting effect.
[description of drawings]
Fig. 1 be the prior art reflection projection that is used for liquid crystal indicator light reflectance with take measurement of an angle graph of a relation.
Fig. 2 be another prior art reflection projection of being used for liquid crystal indicator light reflectance with take measurement of an angle graph of a relation.
Fig. 3 be the another prior art reflection projection that is used for liquid crystal indicator light reflectance with take measurement of an angle graph of a relation.
Fig. 4 is the light shield floor map that a prior art is used to make the reflection projection.
Fig. 5 adopts the exposure synoptic diagram of Fig. 4 light shield to photosensitive material layer.
Fig. 6 be Fig. 5 expose and also develop the back prepared reflection projection blank side schematic view.
Fig. 7 is the reflection projection blank that makes among Fig. 6 through the formed reflection projection of flow step schematic perspective view again.
Fig. 8 is the pattern synoptic diagram that first embodiment of the invention is used to make the light shield that tilts to reflect projection.
Fig. 9 is that the present invention makes the exposure synoptic diagram of the employing light shield shown in Figure 8 of the method that tilts to reflect projection to photosensitive material layer.
Figure 10 be Fig. 9 expose and also develop the back prepared reflection projection blank side schematic view.
Figure 11 is the reflection projection blank that makes among Figure 10 through the formed reflection projection of flow step schematic perspective view again.
Figure 12 is the pattern synoptic diagram that second embodiment of the invention is used to make the light shield that tilts to reflect projection.
Figure 13 is the pattern synoptic diagram that third embodiment of the invention is used to make the light shield that tilts to reflect projection.
Figure 14 adopts the light shield of Figure 13 prepared reflection projection schematic perspective view that exposes.
Figure 15 is the pattern synoptic diagram that four embodiment of the invention is used to make the light shield that tilts to reflect projection.
Figure 16 is the pattern synoptic diagram that fifth embodiment of the invention is used to make the light shield that tilts to reflect projection.
Figure 17 is the pattern synoptic diagram that sixth embodiment of the invention is used to make the light shield that tilts to reflect projection.
[embodiment]
See also Fig. 8, it is the floor map that the present invention is used to make the light shield that tilts to reflect projection, show among this figure that light shield 100 has three independences and mask pattern 110,120 and 130 not of uniform size, each pattern is formed by light transmission part and shading light part merging.Be that example describes with mask pattern 110 now, this mask pattern 110 roughly is a rectangle, is merged with shading light part 111 by light transmission part 113 to form.This shading light part 111 is the boxed area of a rectangle basically, and itself and light transmission part 113 side that joins has a plurality of rectangular protrusions 112 on the light shield in-plane, and other three side is then smooth.
The width of these a plurality of rectangular protrusions 112 is 1~3 μ m, and length is 0~5 μ m, and in the present embodiment, its width s is 1 μ m, and length h and interval d equate, all are 2 μ m.
Now introduce the method that the present invention makes the reflection projection, this method comprises provides a transparent substrates 700; In this substrate 700, form a positive type light sensitive material layer 200; Adopt 100 pairs of these photosensitive material layers 200 of aforesaid light shield to carry out ultraviolet exposure, consult Fig. 9, light shield 100 is placed in the substrate 700 at a certain distance, and ultraviolet ray is injected from light shield 100 tops, is incident upon on the photosensitive material layer 200 corresponding with transmission region 113 by transmission region 113; Develop, owing to be dissolved in developer solution after being positioned at the photosensitive material sensitization of transmission region 113 belows, thereby this part photosensitive material is Removed All.Simultaneously, it is less to be subjected to the ultraviolet ray irradiation corresponding to the photosensitive material of 112 of mask pattern 110 rectangular protrusions, cause under-exposed phenomenon, make corresponding photosensitive material layer 200 part sensitization and partly be removed (see figure 10), thereby finally in this substrate 60 form the projection blank 210,220 and 230 corresponding with the pattern 110,120 and 130 of this light shield 100; At last, these projection blanks 210,220 of fusion and 230 and make it level and smooth have the arc reflection projection at an angle of inclination with formation.
Since photosensitive material layer 200 be mainly by resin (Resin) with have photosensitive material that sense revolves optical activity (Photoactivity) and be dissolved in the solvent and make, therefore the photosensitive material layer 200 after developing is through heating schedule, for example baking, further the solvent with residual in the photosensitive material layer 200 is minimum because of evaporation drops to, and strengthens the adhesion of 200 pairs of substrates 700 of photosensitive material layer.When heating-up temperature rose to transition temperature (Transition Temperature), corresponding present embodiment, this heating-up temperature were between 200~230 ℃, and be 1 hour heat time heating time, makes photosensitive material be fused into molten condition, flowed and smoothing in its surface again.
With reference to Figure 11, projection blank 210,220 and 230 through above-mentioned type of heating and surface flow until smoothing, become arc like reflection projection 210 ', 220 ' and 230 '.Because a side in projection blank 210,220 and 230 corresponding separately mask pattern 110 rectangular protrusions, 112 zones is partly removed, therefore corresponding reflection projection 210 after the smoothing ', 220 ' and 230 ' this part and neighbouring part thickness thereof less, its surface roughly is that to have a mild arc at an angle of inclination domatic, reflect projection 210 ', 220 ' and 230 ' separately opposite side cambered surface tilt.Again because each reflection projection 210 ', 220 ' and the side exposure intensity gradient in 230 ' corresponding mask pattern 110 rectangular protrusions, 112 zones is comparatively level and smooth, therefore this part smoothness through flowing again is than prior art reflection projection smoothness height, uniformity coefficient in certain angular field of view interior focusing line reflection is corresponding higher, thus make adopt this asymmetric reflection projection 210 ', 220 ' and the liquid crystal indicator of 230 ' structure keep good at the display performance of scope with great visual angle.
The present invention also provides following change embodiment:
With reference to Figure 12, but the present invention is used to make the shading light part hexagon of light shield 200 second its mask pattern of embodiment that tilt to reflect projection, a plurality of projections are positioned on the one side, and a plurality of projections of each mask pattern have broad visual angle and the higher reflection projection of light uniformity coefficient all towards same direction to utilize this light shield 200 to make a certain direction.And the hexagonal configuration of mask pattern can change according to actual conditions, and a plurality of projections can be distributed on a plurality of sides according to actual conditions, to reach light are evenly reflected towards all directions, adopts the wide effect of visual angle of liquid crystal display of this reflection projection.Overcome the difficult defective of reflection projection that prior art is made at the even reflection ray in multi-direction wide visual angle.
With reference to Figure 13, the present invention is used to make light shield 300 the 3rd embodiment and aforementioned light shield 100 structural similarities of reflection projection, difference is that a plurality of projections 312 differ at interval, and it is little at a plurality of projection 312 arrays middle part at interval, and is big in a plurality of projections 312 array both sides.With reference to Figure 14, its rectangle shading light part of reflection projection that adopts this light shield 300 to make has two corners of a plurality of projections 312 because exposure is more, the photosensitive material of removing is more, and therefore these corner smoothnesses are better after smoothly, and resulting optical property is better.
With reference to Figure 15, the present invention is used to make light shield 400 the 4th embodiment and aforementioned light shield 200 structural similarities of reflection projection, institute's difference is that the length of a plurality of projections 412 differs, and its length is little at a plurality of projection 412 arrays middle part, and is big in a plurality of projections 312 array both sides.Adopt this light shield 400 prepared reflection projection structures and aforementioned light shield 300 structural similarities.
With reference to Figure 16, the present invention is used to make light shield 500 the 5th embodiment and aforementioned light shield 100 structural similarities of reflection projection, and institute's difference is that rectangle shading light part three sides all have a plurality of projections 512.Adopt three sides of these light shield 500 prepared reflection projection structures all to have comparatively mild curved surfaces, enlarged at the direction visual angle of these three side correspondences.
A plurality of shape for lugs of the mask pattern of above-mentioned three embodiments, size are that spacing etc. can arbitrarily change, according to actual conditions the strongest reflection ray is adjusted to 0 degree, to obtain best reflecting effect.
But the present invention is used to make the polygons such as its mask pattern shape triangle of light shield of reflection projection, does not have projection at least one side of its corresponding shading light part, and is promptly smooth.Yet spirit of the present invention also contains the variation that the whole sides of shading light part of light shield all have projection, and the shading light part of also containing light shield is oval or circular situation, and at this moment, a plurality of projections exist only in ellipse or circular shading light part part periphery.
The present invention is used to make the tilt a plurality of sides of shading light part of its polygon light shield pattern of light shield of reflection projection can all have a plurality of projections, wherein the projection of at least one side at interval or length can be at interval or length less than the projection of other side.
The present invention be used to make tilt the reflection projection its polygon light shield pattern of light shield shading light part its length of a plurality of projections and can equate that at interval and its width is big in this middle side edge, little in these side both sides.
The present invention is used to make tilt a plurality of projections of shading light part of its polygon light shield pattern of light shield of reflection projection can change to a plurality of printing opacity patterns according to spirit of the present invention, the shading light part that is light shield is a global formation structure, and at least one side of shading light part has printing opacity patterns (with reference to Figure 17) such as a plurality of diaphanous spots, printing opacity piece.This printing opacity pattern is circular, and diameter is 1~5 μ m, and size is consistent.In another embodiment, the quantity of circular printing opacity pattern is few in the middle side edge of the shading light part of this mask pattern, and many in these side both sides.Present embodiment can realize the effect of aforementioned embodiment of the present invention equally.
The present invention is used to make tilt its polygon light shield pattern of light shield of reflection projection and can changes to according to spirit of the present invention and have three area arrangement and form, zone in the middle of wherein being positioned at is the exposure intensity transitional region, be translucent area, and two zones of both sides, office are lightproof area and transparent region.The transparency of this translucent area reduces to the lightproof area direction gradually from transmission region; In another embodiment, this zone line is the lightproof area with a plurality of diaphanous spots; In another embodiment, this three zone is an integral body, and its transparency reduces gradually from a side direction offside.
The present invention is used to make the tilt shading light part of its polygon light shield pattern of light shield of reflection projection and can changes to irregularly shaped according to spirit of the present invention and actual needs, the also variable more irregular alignment of a plurality of projections on it, these a plurality of shape for lugs are also irregular, to reach light is evenly reflected towards all directions, adopt the wide effect of visual angle of liquid crystal display of this reflection projection.Overcome the difficult defective of reflection projection that prior art is made at the even reflection ray in multi-direction wide visual angle.
The present invention makes in the method for reflection projection, this photosensitive material layer can be a minus, accordingly, the shading light part of its light mask image of light shield of employing is the shading light part and the light transmission part exchange of the corresponding aforementioned light shield of eurymeric with light transmission part and photosensitive material layer.
Claims (32)
1. one kind is used to make the light shield that projection is reflected in inclination, it comprises a plurality of by light transmission part and shading light part and connect the pattern that forms, this light transmission part or shading light part are boxed area, it is characterized in that: this boxed area one side has a plurality of projections on the light shield in-plane.
2. the light shield that is used to make the reflection projection as claimed in claim 1, it is characterized in that: this boxed area is a polygon.
3. the light shield that is used to make the reflection projection as claimed in claim 2, it is characterized in that: this polygon is a rectangle.
4. the light shield that is used to make the reflection projection as claimed in claim 3, it is characterized in that: at least one side of this polygon is smooth.
5. the light shield that is used to make the reflection projection as claimed in claim 3 is characterized in that: the projection interval of at least one side of this polygon or length are less than the projection interval or the length of other side.
6. the light shield that is used to make the reflection projection as claimed in claim 1 is characterized in that: this boxed area is oval or circular.
7. the light shield that is used to make the reflection projection as claimed in claim 1, it is characterized in that: this projection is a rectangle.
8. the light shield that is used to make the reflection projection as claimed in claim 7 is characterized in that: these a plurality of spout widths, equal in length and equal respectively at interval.
9. the light shield that is used to make the reflection projection as claimed in claim 7 is characterized in that: these a plurality of spout widths and length equate that respectively it is little in this middle side edge at interval, and big in these side both sides.
10. the light shield that is used to make the reflection projection as claimed in claim 7 is characterized in that: these a plurality of projection lengths and equal respectively at interval, its width is big in this middle side edge, and little in these side both sides.
11. the light shield that is used to make the reflection projection as claimed in claim 7 is characterized in that: these a plurality of spout widths and equal respectively at interval, its length is little in this middle side edge, and big in these side both sides.
12. the light shield that is used to make the reflection projection as claimed in claim 7 is characterized in that: this a plurality of projections interval or width are 1~3 μ m, and length is 0~5 μ m.
13. the light shield that is used to make the reflection projection as claimed in claim 2, it is characterized in that: this polygon is a triangle.
14. the light shield that is used to make the reflection projection as claimed in claim 2, it is characterized in that: this polygon is a hexagon.
15. the light shield that is used to make the reflection projection as claimed in claim 1, it is characterized in that: the shading light part of this boxed area is irregularly shaped.
16. the light shield that is used to make the reflection projection as claimed in claim 1, it is characterized in that: these a plurality of projections are irregular alignments.
17. light shield that is used to make the reflection projection, it comprises a plurality of patterns, each pattern is by light transmission part and shading light part and connect and form, this light transmission part or shading light part are boxed area, this boxed area is an integrated formed structure, it is characterized in that: the light shielding ability of this shading light part one side than this shading light part other parts light shielding ability a little less than.
18. the light shield that is used to make the reflection projection as claimed in claim 17, it is characterized in that: this more weak side of light shielding ability has a plurality of diaphanous spots.
19. the light shield that is used to make the reflection projection as claimed in claim 17, it is characterized in that: this more weak side of light shielding ability is made by trnaslucent materials.
20. the light shield that is used to make the reflection projection as claimed in claim 19, it is characterized in that: the transparency of trnaslucent materials reduces to the shading light part direction gradually from the light transmission part.
21. light shield that is used to make the reflection projection, it comprises a plurality of patterns, each pattern is by light transmission part and shading light part and connect and form, this light transmission part or shading light part are boxed area, this boxed area is an integrated formed structure, it is characterized in that: this boxed area one side has a plurality of printing opacity patterns.
22. the light shield that is used to make the reflection projection as claimed in claim 21 is characterized in that: this printing opacity pattern is circular.
23. the light shield that is used to make the reflection projection as claimed in claim 21, it is characterized in that: these a plurality of printing opacity pattern magnitude unanimities, its quantity is few in this middle side edge, and many in these side both sides.
24. the light shield that is used to make the reflection projection as claimed in claim 21, it is characterized in that: the diameter of this circle printing opacity pattern is 1~5 μ m.
25. light shield that is used to make the reflection projection, it comprises a plurality of patterns, it is characterized in that: each pattern comprises that one has the first area of first light shielding ability, one second area and with second light shielding ability has the 3rd zone of the 3rd light shielding ability, the 3rd zone is between this first area and second area, and one-body molded with this first area and second area, the light shielding ability in this three zone is along this three area arrangement direction linear change.
26. the light shield that is used to make the reflection projection as claimed in claim 25, it is characterized in that: this first area light shielding ability maximum, the 3rd zone is a transparent region.
27. the light shield that is used to make the reflection projection as claimed in claim 26, it is characterized in that: this second area is a translucent area.
28. the light shield that is used to make the reflection projection as claimed in claim 26, it is characterized in that: this second area has a plurality of printing opacity patterns.
29. a method of making the reflection projection comprises: a substrate is provided; In this substrate, form a photosensitive material layer; Adopt aforesaid light shield that this photosensitive material layer is exposed; Develop, form the projection blank corresponding with the pattern of this light shield; Level and smooth this projection blank has the arc reflection projection at an angle of inclination with formation.
The method of reflection projection 30. making as claimed in claim 29 is tilted is characterized in that: the jut thickness of the corresponding mask pattern of this projection blank is little than other parts.
The method of reflection projection 31. making as claimed in claim 30 is tilted is characterized in that: in level and smooth projection blank step, be to utilize baking method to make projection blank fusing and mobile again with level and smooth projection blank.
The method of reflection projection 32. making as claimed in claim 30 is tilted, it is characterized in that: formed reflection projection with an angle of inclination has one to tilt, level and smooth curved surfaces, and this curved surfaces is corresponding to the jut and the neighbouring part thereof of mask pattern.
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CN 200410027437 CN1704847B (en) | 2004-05-28 | 2004-05-28 | Light shield and method for making inclined reflection bumpers by using the same |
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CN 200410027437 CN1704847B (en) | 2004-05-28 | 2004-05-28 | Light shield and method for making inclined reflection bumpers by using the same |
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Cited By (4)
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CN101424882B (en) * | 2007-10-29 | 2011-01-05 | 乐金显示有限公司 | Exposing device, pattern, channel, pore forming method, liquid crystal display and method for fabricating the same |
CN103869606A (en) * | 2014-04-04 | 2014-06-18 | 深圳市华星光电技术有限公司 | Exposure photomask and method for manufacturing color filter |
US9366955B2 (en) | 2014-04-04 | 2016-06-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Exposure mask and fabrication method for color filter |
CN115755459A (en) * | 2022-11-09 | 2023-03-07 | Tcl华星光电技术有限公司 | Display panel, manufacturing method of display panel and photomask |
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US6291146B1 (en) * | 1999-04-09 | 2001-09-18 | Industrial Technology Research Institute | Method for reforming a reflection-type light diffuser |
KR100407413B1 (en) * | 1999-07-19 | 2003-11-28 | 마쯔시다덴기산교 가부시키가이샤 | Reflector, method of fabricating the same, reflective display device comprising reflector, and method of fabricating the same |
CN1229674C (en) * | 2000-09-29 | 2005-11-30 | Jsr株式会社 | Declining lug structure on surface of reflector and its mfg method |
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2004
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Cited By (6)
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CN101424882B (en) * | 2007-10-29 | 2011-01-05 | 乐金显示有限公司 | Exposing device, pattern, channel, pore forming method, liquid crystal display and method for fabricating the same |
CN103869606A (en) * | 2014-04-04 | 2014-06-18 | 深圳市华星光电技术有限公司 | Exposure photomask and method for manufacturing color filter |
WO2015149378A1 (en) * | 2014-04-04 | 2015-10-08 | 深圳市华星光电技术有限公司 | Exposure mask and manufacturing method of color filter |
CN103869606B (en) * | 2014-04-04 | 2016-06-08 | 深圳市华星光电技术有限公司 | The making method of exposure light shield and colored filter |
US9366955B2 (en) | 2014-04-04 | 2016-06-14 | Shenzhen China Star Optoelectronics Technology Co., Ltd | Exposure mask and fabrication method for color filter |
CN115755459A (en) * | 2022-11-09 | 2023-03-07 | Tcl华星光电技术有限公司 | Display panel, manufacturing method of display panel and photomask |
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