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CN1694812A - Electrostatic attraction fluid ejection device - Google Patents

Electrostatic attraction fluid ejection device Download PDF

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CN1694812A
CN1694812A CN 03824809 CN03824809A CN1694812A CN 1694812 A CN1694812 A CN 1694812A CN 03824809 CN03824809 CN 03824809 CN 03824809 A CN03824809 A CN 03824809A CN 1694812 A CN1694812 A CN 1694812A
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fluid
diameter
nozzle
discharge hole
electrostatic attraction
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CN100398320C (en
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樋口馨
西泰男
村田和广
横山浩�
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Murata Kazumasa
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National Institute of Advanced Industrial Science and Technology AIST
Konica Minolta Inc
Sharp Corp
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Abstract

An electrostatic suction type fluid jetting device, comprising a nozzle (4) formed in a shape corresponding to a meniscus equal to a tailor cone-shaped tip part formed in a conventional electrostatic suction process of ink (2) as a fluid, wherein the diameter of the ink discharge hole (4b) of the nozzle (4) is set to a diameter generally equal to the diameter of the tip part of the meniscus (14) immediately before the jetting of the ink and equal to or lower than the diameter of the droplet of the ink (2) immediately after the jetting, whereby both an increase in resolution and safety can be assured and a highly versatile recording device can be commercialized.

Description

静电吸引式流体喷射装置Electrostatic attraction fluid ejection device

技术领域technical field

本发明涉及通过使墨水等流体带电进行静电吸引从而朝对象物体上排出流体的静电吸引式流体喷射装置。The present invention relates to an electrostatic attraction type fluid ejection device that discharges the fluid toward a target object by charging a fluid such as ink and electrostatically attracting it.

背景技术Background technique

一般来说,将墨水等流体朝对象物体(记录媒体)上排出的流体喷射方式中有各种方式。这里对作为流体使用墨水的墨水喷射方式进行说明。In general, there are various types of fluid ejection methods for discharging fluid such as ink onto a target object (recording medium). Here, an ink ejection method using ink as a fluid will be described.

作为按需(日文:オンデマンド)式的墨水喷射方式,已开发有利用压电现象的压电方式、利用墨水膜沸腾现象的热方式、利用静电现象的静电吸引方式等,尤其是近年来,迫切需要高分辨率的墨水喷射方式。为了实现高分辨率的墨水喷射记录,排出的墨水液滴的微小化是不可缺的。As the on-demand (Japanese: Ondemand) inkjet method, the piezoelectric method using the piezoelectric phenomenon, the thermal method using the ink film boiling phenomenon, and the electrostatic attraction method using the electrostatic phenomenon have been developed. Especially in recent years, High-resolution inkjet methods are urgently needed. In order to realize high-resolution inkjet recording, miniaturization of discharged ink droplets is indispensable.

在此,从喷嘴排出的墨水液滴弹射到记录媒体上为止的运动情况可由运动方程式(1)表示。Here, the motion of ink droplets discharged from the nozzles until they are ejected onto the recording medium can be expressed by the motion equation (1).

ρink·(4/3·π·d3)·dv/dt=-Cd·(1/2·ρair·v2)·(π·d2/4)  …(1)ρink·(4/3·π·d 3 )·dv/dt=-Cd·(1/2·ρair·v 2 )·(π·d 2/4 ) …(1)

上述ρink是墨水的体积密度,V是液滴体积,v是液滴速度,Cd是阻力系数,ρair是空气密度,d是墨水液滴半径,Cd由公式(2)表示。Above-mentioned ρink is the volume density of ink, V is droplet volume, v is droplet velocity, Cd is drag coefficient, ρair is air density, d is ink droplet radius, Cd is represented by formula (2).

Cd=24/Re·(1+3/16·Re0.62)                                     …(2)Cd=24/Re·(1+3/16·Re 0.62 ) …(2)

上述Re是雷诺数,η为空气的粘度,则Re可由公式(3)表示。Above-mentioned Re is Reynolds number, and η is the viscosity of air, and then Re can be represented by formula (3).

Re=2·d·ρink·v/η                                           …(3)Re = 2 · D · kink · V/η ... (3)

液滴半径对上述公式(1)的左边的墨水液滴的动能的影响比液滴半径对空气粘性阻力的影响大。因此,同一速度的场合,液滴越小液滴速度的减速越快,要么无法到达离开规定距离的记录媒体,即使到达,弹射落点的精度也差。The influence of the droplet radius on the kinetic energy of the ink droplet on the left side of the above formula (1) is greater than the influence of the droplet radius on the air viscous resistance. Therefore, in the case of the same speed, the smaller the droplet, the faster the droplet velocity decelerates, or it cannot reach the recording medium at a predetermined distance, and even if it does, the accuracy of the ejection landing point is poor.

为了防止这样的情况,需要增加液滴的排出初速度,即增大单位体积的排出能量。In order to prevent such a situation, it is necessary to increase the discharge initial velocity of liquid droplets, that is, to increase the discharge energy per unit volume.

但是,传统的压电方式及热方式的墨水喷射头,在排出液滴微小化、即增加排出液滴的单位体积的排出能量的情况下存在以下问题,尤其是难以将排出液滴量做成1Pl以下,即难以将液滴的直径(以下称为液滴直径)做成φ10μm以下。However, conventional piezoelectric and thermal inkjet heads have the following problems when the discharged liquid droplets are miniaturized, that is, the discharge energy per unit volume of the discharged liquid droplets is increased. In particular, it is difficult to make the amount of discharged liquid droplets 1P1 or less, that is, it is difficult to make the diameter of the droplet (hereinafter referred to as the droplet diameter) φ10 μm or less.

存在的问题有:The existing problems are:

问题(A):压电方式的墨水喷射头的排出能量与所驱动的压电元件的位移量及发生压力有关。该压电元件的位移量与墨水排出量、即与墨水液滴尺寸密切相关,为了减小液滴尺寸需要使位移量减小,难以提高排出液滴的单位体积的排出能量。Problem (A): The discharge energy of the piezoelectric inkjet head is related to the displacement and pressure of the driven piezoelectric element. The displacement amount of the piezoelectric element is closely related to the ink discharge amount, that is, the ink droplet size. To reduce the droplet size, the displacement amount needs to be reduced, and it is difficult to increase the discharge energy per unit volume of the discharged liquid droplet.

问题(B):热方式的墨水喷射头,因为是利用墨水的膜沸腾现象,故形成气泡时的压力在物理上受到限制,排出能量大致由加热元件的面积决定。该加热元件的面积与所产生的气泡的体积、即与墨水排出量大致成正比。因此,若墨水液滴尺寸减小,则所产生的气泡的体积减小,排出能量减小,故难以提高墨水排出液滴的单位体积的排出能量。Problem (B): The thermal inkjet head uses the film boiling phenomenon of ink, so the pressure when forming bubbles is physically limited, and the discharge energy is roughly determined by the area of the heating element. The area of the heating element is approximately proportional to the volume of the generated air bubbles, that is, the amount of ink discharged. Therefore, if the size of the ink droplet is reduced, the volume of the generated air bubbles decreases and the discharge energy decreases, so it is difficult to increase the discharge energy per unit volume of the ink discharge droplet.

问题(C):因为压电方式及热方式的驱动(加热)元件的驱动量都与排出量密切相关,尤其是排出微小尺寸的液滴时,抑制其偏差是极其困难的。Problem (C): Since the driving amount of the driving (heating) element of the piezoelectric method and the thermal method is closely related to the discharge amount, it is extremely difficult to suppress the deviation especially when discharging micro-sized liquid droplets.

为此,作为解决上述各种问题的方式,正在开发以静电吸引方式排出微小液滴的方法。Therefore, as means to solve the various problems described above, a method of discharging fine liquid droplets by electrostatic attraction is being developed.

静电吸引方式中,从喷嘴排出的墨水液滴的运动方程式由以下的公式(4)表示。In the electrostatic attraction method, the equation of motion of the ink droplets discharged from the nozzles is represented by the following equation (4).

ρink·(4/3·π·d3)·dv/dt=q·E-Cd·(1/2·ρair·v2)·(π·d2/4) …(4)ρink·(4/3·π·d 3 )·dv/dt=q·E-Cd·(1/2·ρair·v 2 )·(π·d 2/4 ) …(4)

其中,q是液滴的电荷量,E是周围的电场强度。where q is the charge amount of the droplet and E is the surrounding electric field strength.

从上述公式(4)可见,在静电吸引方式中,排出的液滴除排出能量以外,还在飞翔中受到静电力,故可减轻单位体积的排出能量,可应用于微小液滴的排出。It can be seen from the above formula (4) that in the electrostatic attraction method, in addition to the discharge energy, the discharged liquid droplets are also subjected to electrostatic force during flight, so the discharge energy per unit volume can be reduced, and it can be applied to the discharge of tiny liquid droplets.

作为这类静电吸引方式的墨水喷射装置(以下称为静电吸引式墨水喷射装置),例如在专利文献1(日本国公开专利公报:特开平8-238774号公报(公开日:1996年9月17日))中,揭示了一种在喷嘴内部设有外加电压用的电极的墨水喷射装置。另外,在专利文献2(日本国公开专利公报:特开2000-127410号公报(公开日:2000年5月9日))中,揭示了将喷嘴作成切槽、设置从喷嘴突出的针电极、排出包含微小颗粒在内的墨水的墨水喷射装置。As an ink ejection device of this type of electrostatic attraction method (hereinafter referred to as an electrostatic attraction type ink ejection device), for example, in Patent Document 1 (Japanese Laid-Open Patent Publication: Japanese Unexamined Patent Publication No. Hei 8-238774 (publication date: September 17, 1996) Japan)) discloses an ink jetting device in which electrodes for applying voltage are provided inside the nozzles. In addition, in Patent Document 2 (Japanese Laid-Open Patent Publication: JP-A No. 2000-127410 (publication date: May 9, 2000)), it is disclosed that the nozzle is made into a groove, and a needle electrode protruding from the nozzle is provided. An inkjet device that ejects ink including fine particles.

以下参照图17对上述专利文献1中揭示的墨水喷射装置进行说明。图17是墨水喷射装置的截面模式图。The ink ejecting device disclosed in the above-mentioned Patent Document 1 will be described below with reference to FIG. 17 . Fig. 17 is a schematic sectional view of an ink ejecting device.

图17中,101是墨水喷射室,102是墨水,103是墨水室,104是喷嘴孔,105是墨水罐,106是墨水供给路径,107是旋转滚筒,108是被记录媒体,110是控制元件部,111是流程控制部。In Fig. 17, 101 is an ink ejection chamber, 102 is ink, 103 is an ink chamber, 104 is a nozzle hole, 105 is an ink tank, 106 is an ink supply path, 107 is a rotating drum, 108 is a recording medium, and 110 is a control element. Part, 111 is a process control part.

而且,114是配设在墨水喷射室101的墨水室103侧的静电场外加用电极部,115是设于旋转滚筒107上的金属鼓即相对电极部,116是向相对电极部115外加数千伏的负电压的偏置电源部。117是向静电场外加用电极部114供给数百伏的高电压的高压电源部,118是接地部。In addition, 114 is an electrode part for applying an electrostatic field arranged on the side of the ink chamber 103 of the ink ejection chamber 101, 115 is a metal drum provided on the rotary drum 107, that is, a counter electrode part, and 116 is a counter electrode part 116 for applying an electrostatic field to the counter electrode part 115. volts of negative voltage for the bias power section. 117 is a high-voltage power supply unit that supplies a high voltage of several hundred volts to the electrode unit 114 for applying an electrostatic field, and 118 is a grounding unit.

这里,在静电场外加用电极部114与相对电极部115之间,向相对电极部115外加数千伏的负电压的偏置电源部116与数百伏的高压电源部117的高压电压重叠,形成重叠电场,通过该重叠电场,对墨水102从喷嘴孔104的排出进行控制。Here, between the electrode section 114 for applying an electrostatic field and the counter electrode section 115, the bias power supply section 116 for applying a negative voltage of several thousand volts to the counter electrode section 115 and the high voltage voltage of the high voltage power supply section 117 of several hundreds of volts are superimposed, An overlapping electric field is formed, and discharge of the ink 102 from the nozzle hole 104 is controlled by the overlapping electric field.

另外,119是通过向相对电极部115外加数千伏的偏置电压而在喷嘴孔104形成的凸状的弯液面(日文:メニスカス)。In addition, 119 is a convex meniscus formed in the nozzle hole 104 by applying a bias voltage of several thousand volts to the counter electrode portion 115 .

以下对具有以上结构的静电吸引方式的墨水喷射装置的动作进行说明。The operation of the electrostatic attraction type inkjet device having the above configuration will be described below.

首先,墨水102利用毛细管现象通过墨水供给通道106移送至排出墨水102的喷嘴孔104。此时,与喷嘴孔104相对地设有安装了被记录媒体108的相对电极部115。First, the ink 102 is transferred to the nozzle hole 104 from which the ink 102 is discharged through the ink supply channel 106 by capillary action. At this time, the counter electrode portion 115 on which the recording medium 108 is mounted is provided facing the nozzle hole 104 .

到达喷嘴孔104的墨水102通过外加在相对电极部115上的数千伏的偏置电压而形成凸状的墨水弯液面119。通过从数百伏的高压电源部117将信号电压施加于设于墨水室103内的静电场外加用电极部114,与施加于相对电极部115的来自偏置电源部116的电压重叠,墨水102通过重叠电场排向被记录媒体108,形成印字图像。The ink 102 reaching the nozzle hole 104 forms a convex ink meniscus 119 by applying a bias voltage of several thousand volts to the counter electrode portion 115 . By applying a signal voltage from the high-voltage power supply unit 117 of several hundred volts to the electrode unit 114 for applying an electrostatic field provided in the ink chamber 103, and superimposed on the voltage from the bias power supply unit 116 applied to the counter electrode unit 115, the ink 102 A printed image is formed by superimposing the electric field to the recording medium 108 .

以下参照图18(a)~图18(c)对上述专利文献1中揭示的墨水喷射装置中的液滴飞翔之前的弯液面的变动情况进行说明。18( a ) to FIG. 18( c ) will describe how the meniscus varies before the droplet flies in the ink jet device disclosed in Patent Document 1 above.

在外加驱动电压之前,如图18(a)所示,通过施加于墨水的偏置电压引起的静电力与墨水的表面张力的平衡,成为在墨水表面形成鼓起的弯液面119a的状态。Before the driving voltage is applied, as shown in FIG. 18( a ), the electrostatic force caused by the bias voltage applied to the ink is balanced with the surface tension of the ink to form a bulging meniscus 119 a on the ink surface.

当在上述状态下施加驱动电压时,如图18(b)所示,弯液面119b,在液表面产生的电荷开始靠近液面的鼓起的中心,由此形成液面的鼓起中心增高的弯液面119b。When the drive voltage is applied in the above state, as shown in Figure 18(b), the meniscus 119b, the charge generated on the liquid surface begins to approach the center of the bulge of the liquid surface, thus forming the center of the bulge of the liquid surface to increase The meniscus 119b.

此后,继续外加驱动电压,如图18(c)所示,通过产生于液表面的电荷进一步集中于中心,形成称为泰勒锥形体的半月形的弯液面119c,在集中于该泰勒锥形体顶部的电荷量引起的静电力大于墨水的表面张力的阶段,进行液滴的分离而排出。Thereafter, continue to apply the drive voltage, as shown in Figure 18(c), the charge generated on the liquid surface is further concentrated in the center to form a half-moon meniscus 119c called a Taylor cone, which is concentrated in the Taylor cone In the stage where the electrostatic force due to the amount of charge on the top is greater than the surface tension of the ink, the droplets are separated and discharged.

以下参照图19对揭示于上述专利文献2的墨水喷射装置进行说明。图19是墨水喷射装置的概要构成图。The ink ejecting device disclosed in the above-mentioned Patent Document 2 will be described below with reference to FIG. 19 . Fig. 19 is a schematic configuration diagram of an ink ejecting device.

如图19所示,在本墨水喷射装置的框体内部收容有:作为墨水喷射头由低电解质材料(丙烯树脂、陶瓷等)形成的条形(日文:ライン)记录头211;与该记录头211的墨水排出口相对地配置的金属或高电解质制的相对电极210;用于预先存放在非导电性墨水介质中分散有带电颜料颗粒的墨水的墨水罐212;将墨水在墨水罐212与记录头211之间循环的墨水循环系统(泵214a、214b;管子215a、215b);将用于吸引形成记录图像的1个像素的墨水液滴的脉冲电压分别施加于各排出电极211a的脉冲电压发生装置213;根据图像数据对脉冲电压发生装置213进行控制的驱动电路(未图示);使记录媒体A通过设于记录头211与相对电极210之间的间隙的记录媒体搬运机构(未图示);控制装置整体的控制器(未图示)等。As shown in Figure 19, inside the frame body of this ink jetting device is housed: as an ink jetting head, a bar-shaped (Japanese: ライン) recording head 211 formed of a low-electrolyte material (acrylic resin, ceramics, etc.); The opposite electrode 210 made of metal or high electrolyte that the ink discharge port of 211 is arranged relatively; The ink tank 212 that is used to store the ink that is dispersed with charged pigment particle in the non-conductive ink medium in advance; Ink circulation system (pumps 214a, 214b; tubes 215a, 215b) that circulates between the heads 211; a pulse voltage that is applied to each of the discharge electrodes 211a to attract the ink droplets that form one pixel of the recorded image Device 213; Drive circuit (not shown) that pulse voltage generating device 213 is controlled according to image data; Make recording medium A pass through the recording medium conveying mechanism (not shown) that is located at the gap between recording head 211 and opposite electrode 210 ); the overall controller (not shown) of the control device, etc.

上述墨水循环系统包括:连接记录头211与墨水罐212之间的2根管子215a、215b、由控制器控制驱动的2台泵214a、214b。The above ink circulation system includes: two pipes 215a, 215b connecting the recording head 211 and the ink tank 212, and two pumps 214a, 214b driven by the controller.

上述墨水循环系统分成将墨水供给记录头211用的墨水供给系统、从记录头211回收墨水用的墨水回收系统。The ink circulation system described above is divided into an ink supply system for supplying ink to the recording head 211 and an ink recovery system for recovering ink from the recording head 211 .

墨水供给系统中,墨水由泵214a从墨水罐212内吸上,并将墨水通过管子215a向记录头211的墨水供给部压送。另一方面,在墨水回收系统中,由泵215b从记录头211的墨水回收部吸引墨水,将墨水通过管子215b强制性地向墨水罐212加以回收。In the ink supply system, the ink is sucked up from the ink tank 212 by the pump 214a, and the ink is pressure-fed to the ink supply part of the recording head 211 through the tube 215a. On the other hand, in the ink recovery system, ink is sucked from the ink recovery part of the recording head 211 by the pump 215b, and the ink is forcibly recovered to the ink tank 212 through the tube 215b.

如图20所示,在上述记录头211上设有:将从墨水供给系统的管子215a送来的墨水向条宽扩散的墨水供给部220a;将来自墨水供给部220a的墨水导向山形的墨水流道221;连接墨水流道221和墨水回收系统的管子215b的墨水回收部220b;将墨水流道221的顶上部朝相对电极210侧开放的适当的宽度(约0.2mm)的切槽状墨水排出口222;以规定的间距(约0.2mm)排列在排出口222内的多个排出电极211a;分别配置在各排出电极211a的两侧及上表面的低电解质制(例如陶瓷制)的隔壁223。As shown in FIG. 20 , the above-mentioned recording head 211 is provided with: an ink supply part 220a that spreads the ink sent from the pipe 215a of the ink supply system to the width of the stripe; The channel 221; the ink recovery part 220b connecting the ink flow channel 221 and the pipe 215b of the ink recovery system; the groove-shaped ink row with an appropriate width (about 0.2mm) opening the top of the ink flow channel 221 toward the opposite electrode 210 side Outlet 222; a plurality of discharge electrodes 211a arranged in the discharge port 222 at a predetermined pitch (about 0.2mm); low-electrolyte (for example, ceramic) partition walls 223 arranged on both sides and the upper surface of each discharge electrode 211a .

上述各排出电极211a分别由铜、镍等金属形成,在其表面形成湿润性好的颜料粘附防止用低电解质膜(例如聚酰亚胺膜)。另外,各排出电极211a的前端形成为三角锥形状,分别以适当的长度(70μm~80μm)从墨水排出口222向相对电极210侧突出。Each of the discharge electrodes 211a is made of metal such as copper and nickel, and a low-electrolyte film (such as a polyimide film) for preventing pigment adhesion with good wettability is formed on the surface. In addition, the tip of each discharge electrode 211 a is formed in a triangular pyramid shape, and protrudes from the ink discharge port 222 toward the counter electrode 210 with an appropriate length (70 μm to 80 μm).

当上述未图示的驱动电路根据控制器的控制将控制信号在与图像数据中含有的灰度数据对应的时间内施加于脉冲电压发生装置213时,则脉冲电压发生装置213将基于该控制信号的种类的脉冲顶部的脉冲Vp载加在偏置电压Vb上的高电压信号与偏置电压Vb重叠后输出。When the driving circuit not shown above applies the control signal to the pulse voltage generating device 213 within the time corresponding to the grayscale data contained in the image data according to the control of the controller, the pulse voltage generating device 213 will The pulse Vp at the top of the pulse of different types is output as a high-voltage signal superimposed on the bias voltage Vb and the bias voltage Vb.

当图像数据传送而来,控制器驱动墨水循环系统的2台泵214a、214b。由此,随着墨水从墨水供给部220被压送,墨水回收部220b成为负压,在墨水流道221内流动的墨水利用毛细管现象在各隔壁223的间隙内上升,使湿润部分扩大至各排出电极211a的前端。此时,负压作用于各排出电极211a的前端附近的墨水液面,故在各排出电极211a的前端分别形成墨水弯液面。When the image data is transmitted, the controller drives the two pumps 214a, 214b of the ink circulation system. Thus, as the ink is pressure-fed from the ink supply part 220, the ink recovery part 220b becomes negative pressure, and the ink flowing in the ink flow path 221 rises in the gaps between the partition walls 223 by capillary action, and the wetted part is expanded to each part. The tip of the electrode 211a is discharged. At this time, negative pressure acts on the ink liquid surface near the tip of each discharge electrode 211a, so that an ink meniscus is formed at the tip of each discharge electrode 211a.

记录媒体搬运机构由控制器控制,从而将记录媒体A朝规定的方向输送,并通过控制驱动电路,对与排出电极211a之间施加上述高电压信号。The recording medium conveying mechanism is controlled by the controller to convey the recording medium A in a predetermined direction, and the above-mentioned high voltage signal is applied to and from the discharge electrode 211a by controlling the drive circuit.

以下参照图21~图24对上述专利文献2中揭示的墨水喷射装置中的液滴飞翔之前的弯液面的变动进行说明。The fluctuation of the meniscus before the flight of the liquid droplet in the ink jet device disclosed in Patent Document 2 will be described below with reference to FIGS. 21 to 24 .

如图21所示,当来自脉冲电压发生装置213的脉冲电压施加于记录头211内的排出电极211a时,则产生从排出电极211a侧朝向相对电极210侧的电场。这里,因为使用了前端尖锐的排出电极211a,故其前端附近产生最强的电场。As shown in FIG. 21, when the pulse voltage from the pulse voltage generator 213 is applied to the discharge electrode 211a in the recording head 211, an electric field is generated from the discharge electrode 211a side toward the counter electrode 210 side. Here, since the discharge electrode 211a with a sharp tip is used, the strongest electric field is generated near the tip.

如图22所示,当产生了这样的电场时,墨水溶剂中的各带电颜料颗粒201a分别受到来自该电场的力fE(图23)而朝墨水液面移动。由此,墨水液面附近的颜料浓度得到浓缩。As shown in FIG. 22, when such an electric field is generated, each charged pigment particle 201a in the ink solvent receives a force fE (FIG. 23) from the electric field and moves toward the ink liquid surface. As a result, the pigment concentration near the ink liquid surface is concentrated.

如图23所示,当颜料浓度如此浓缩后,墨水液面附近的多个带电颜料颗粒201a靠近电极的相反侧并开始凝聚。当墨水液面附近的颜料凝聚体201开始成长为球状时,各个带电颜料颗粒201a开始分别受到来自该颜料凝聚体201的静电反作用力fcon。即,对各个带电颜料颗粒201a分别有来自颜料凝聚体201的静电反作用力fcon与脉冲电压引起的电场E的力fE的合力ftotal的作用。As shown in FIG. 23, when the pigment concentration is thus concentrated, a plurality of charged pigment particles 201a near the ink liquid surface approach the opposite side of the electrode and start to aggregate. When the pigment aggregate 201 near the ink liquid surface starts to grow into a spherical shape, each charged pigment particle 201a starts to receive the electrostatic reaction force fcon from the pigment aggregate 201 respectively. That is, the resultant force ftotal of the electrostatic reaction force fcon from the pigment aggregate 201 and the force fE of the electric field E caused by the pulse voltage acts on each charged pigment particle 201a.

因此,在带电颜料颗粒间的静电反作用力不超过相互的凝聚力的范围内,当电场对存在朝向颜料凝聚体201的合力ftotal所作用的带电颜料颗粒201a(处于连接排出电极211a的前端与颜料凝聚体201的中心的直线上的带电颜料颗粒201a)施加的力fE,为来自颜料凝聚体201的静电反作用力fcon以上(fE≥fcon)时,则带电颜料颗粒201a成长为颜料凝聚体201。Therefore, in the range where the electrostatic reaction force between the charged pigment particles does not exceed the mutual cohesion force, when the electric field has a resultant force ftotal towards the pigment aggregate 201, the charged pigment particle 201a (at the front end connected to the discharge electrode 211a and the pigment aggregate) When the force fE exerted by the charged pigment particles 201a) on the straight line at the center of the body 201 is greater than the electrostatic reaction force fcon from the pigment aggregate 201 (fE≧fcon), the charged pigment particle 201a grows into the pigment aggregate 201.

由n个带电颜料颗粒201a形成的颜料凝聚体201在受到来自脉冲电压引起的电场E的静电反作用力FE的同时,还受到来自墨水溶剂的限制力Fesc。当静电反作用力FE与限制力Fesc平衡时,则颜料凝聚体201以从墨水液面稍微突出的状态得到稳定。The pigment aggregate 201 formed by n charged pigment particles 201a receives the electrostatic reaction force FE from the electric field E caused by the pulse voltage, and also receives the confining force Fesc from the ink solvent. When the electrostatic reaction force FE and the restraining force Fesc are balanced, the pigment aggregate 201 is stabilized in a state in which it protrudes slightly from the ink liquid surface.

当颜料凝聚体201进一步成长、静电反作用力FE为限制力Fesc以上时,则如图24(a)~图24(c)所示,颜料凝聚体201从墨水液面200a脱出。When the pigment aggregates 201 grow further and the electrostatic reaction force FE is greater than the limiting force Fesc, the pigment aggregates 201 come out from the ink liquid surface 200 a as shown in FIGS. 24( a ) to 24 ( c ).

但是,以往的静电吸引方式的原理中,使电荷集中于弯液面的中心而产生弯液面的隆起。该隆起的泰勒锥的前端部的曲率半径由电荷的集中量决定,当集中的电荷量和电场强度引起的静电力大于此时的弯液面表面张力时,液滴开始分离。However, according to the principle of the conventional electrostatic attraction method, charges are concentrated at the center of the meniscus to generate swelling of the meniscus. The radius of curvature of the front end of the raised Taylor cone is determined by the concentration of charges. When the electrostatic force caused by the concentration of charges and electric field strength is greater than the surface tension of the meniscus at this time, the droplets begin to separate.

由于弯液面的最大电荷量由墨水的物性值和弯液面的曲率半径决定,故最小的液滴尺寸由墨水的物性值(尤其是表面张力)和形成于弯液面部的电场强度决定。Since the maximum charge of the meniscus is determined by the physical properties of the ink and the radius of curvature of the meniscus, the minimum droplet size is determined by the physical properties of the ink (especially the surface tension) and the strength of the electric field formed on the meniscus .

一般来说,含有溶剂的液体表面张力存在比单纯的溶剂的表面张力小的趋势,实际上墨水中也含有各种溶剂,故难以提高表面张力。因此,以往采用将墨水的表面张力认为一定、通过提高电场强度来减小液滴尺寸的方法。In general, the surface tension of a liquid containing a solvent tends to be lower than that of a solvent alone. Actually, ink also contains various solvents, so it is difficult to increase the surface tension. Therefore, conventionally, a method of reducing the droplet size by considering the surface tension of the ink to be constant and increasing the electric field intensity has been employed.

因此,上述专利文献1,2中所揭示的墨水喷射装置中,作为两者的排出原理,都是通过在比排出液滴的投影面积大得多的面积的弯液面区域形成强的电场强度的区域,使电荷集中于该弯液面的中心,利用该集中的电荷和形成的电场强度构成的静电力进行排出,因而需要施加接近2000伏的非常高的电压。因此,驱动控制困难,同时还存在操作墨水喷射装置时的安全性方面的问题。Therefore, in the inkjet devices disclosed in the above-mentioned Patent Documents 1 and 2, as the discharge principle of both, a strong electric field intensity is formed in the meniscus region having an area much larger than the projected area of the discharged liquid droplet. In the area of the meniscus, charges are concentrated in the center of the meniscus, and the electrostatic force formed by the concentrated charges and the formed electric field strength is used to discharge, so it is necessary to apply a very high voltage close to 2000 volts. Therefore, drive control is difficult, and there is also a problem in terms of safety when operating the ink ejection device.

尤其是在大的区域形成强的电场强度时,需要设定在放电破坏强度(例如平行平板之间空气的放电破坏强度为3×106V/m)以下,故可形成的微小液滴尺寸在原理上也存在界限。Especially when a strong electric field strength is formed in a large area, it needs to be set below the discharge destruction strength (for example, the discharge destruction strength of air between parallel plates is 3×10 6 V/m), so the tiny droplet size that can be formed There are also limits in principle.

另外,因为电荷朝弯液面部的中心移动,故电荷的移动时间影响排出响应性,在提高印字速度方面存在问题。In addition, since the charge moves toward the center of the meniscus, the time of charge movement affects the discharge responsiveness, and there is a problem in improving the printing speed.

作为消除这些问题的方法,上述专利文献1及2中也采用了通过事先施加比排出电压低的偏置电压以减小驱动电压的方法,或如专利文献2那样采用通过使电极从喷嘴部突出以促进电荷集中的结构。另外,也有像专利文献1那样,对墨水外加正电压、预先使弯液面鼓起的方法等。As a method of solving these problems, the method of reducing the driving voltage by applying a bias voltage lower than the discharge voltage in advance in the above-mentioned Patent Documents 1 and 2, or the method of protruding the electrode from the nozzle part as in Patent Document 2 structure to facilitate charge concentration. In addition, as in Patent Document 1, there is also a method of applying a positive voltage to the ink and swelling the meniscus in advance.

但是,专利文献1及2中揭示的任何方法都无法从根本上加以解决。尤其是外加偏置电压时,驱动电压无法始终只外加正负中的一方,被记录媒体为绝缘材料时,因带电的排出液滴的粘附引起的表面电位不断累积,故弹射落点精度下降,需要采取在印字中对被记录媒体表面除电等的对策。However, none of the methods disclosed in Patent Documents 1 and 2 can fundamentally solve this problem. Especially when a bias voltage is applied, the drive voltage cannot always be applied to only one of the positive and negative sides. When the recording medium is an insulating material, the surface potential caused by the adhesion of the charged discharged droplets will continue to accumulate, so the accuracy of the ejection point will decrease. , it is necessary to take countermeasures such as eliminating static electricity on the surface of the recording medium during printing.

另外,因为在大的范围的弯液面区域形成强的电场强度的电场,故需要高精度地进行相对电极的配置,同时被记录媒体的介电常数及厚度影响相对电极的配置,故使用上自由度小。尤其是被记录媒体厚时,相对电极不得不随之配置在离开喷嘴部的电极的位置。因此,不得不施加更大的电压,存在许多实际使用困难的被记录媒体的情况。In addition, because an electric field with strong electric field intensity is formed in a large range of meniscus region, it is necessary to arrange the opposite electrode with high precision, and at the same time, the dielectric constant and thickness of the recording medium affect the arrangement of the opposite electrode, so it is necessary to use The degree of freedom is small. Especially when the recording medium is thick, the counter electrode has to be arranged at a position away from the electrode of the nozzle portion accordingly. Therefore, a larger voltage has to be applied, and there are many cases of recording media that are difficult to use in practice.

因此,以往的静电吸引式墨水喷射装置(静电吸引式流体喷射装置)中,存在无法使既可同时满足高分辨率和安全性两方面、且通用性好的装置实现实用化的问题。Therefore, in the conventional electrostatic attraction type ink ejection device (electrostatic attraction type fluid ejection device), there is a problem that it is not possible to realize both high resolution and safety and high versatility into practical use.

发明内容Contents of the invention

有鉴于此,本发明的目的在于,提供一种可使既可满足高分辨率和安全性两方面、且通用性好的记录装置实用化的静电吸引式流体喷射装置。In view of the above, it is an object of the present invention to provide an electrostatic attraction type fluid ejection device that can realize both high resolution and safety, and can be used as a versatile recording device.

如图16所示,本案发明者等在传统的方法中,通过使用流体排出孔侧收缩形状的喷嘴23,使成为与静电吸引过程中形成的喷嘴部21的泰勒锥形状的流体的弯液面22的液滴排出之前的前端部曲率24大致相同尺寸的喷嘴直径,发现以前需要大范围形成的电场在小范围形成即可,且可减少流体的弯液面22上的电荷的移动量。As shown in FIG. 16 , in the conventional method, the inventors of the present application have used a nozzle 23 of a constricted shape on the side of the fluid discharge hole to make the meniscus of the fluid in the Taylor cone shape formed in the electrostatic attraction process. The tip curvature 24 before the droplet discharge of 22 is approximately the same size as the nozzle diameter, and it was found that the electric field that needs to be formed in a large area can be formed in a small area, and the amount of charge movement on the meniscus 22 of the fluid can be reduced.

利用上述原理,本案发明者等进一步将喷嘴前端部的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,发现能使电荷的集中区域与弯液面区域大致相同。Utilizing the above principles, the inventors of the present application further set the diameter of the fluid discharge hole at the tip of the nozzle to be equal to or less than the droplet diameter of the fluid immediately after discharge, and found that the charge concentration area can be made approximately the same as the meniscus area.

因此,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下。Therefore, in order to solve the above-mentioned problems, the electrostatic attraction type fluid ejection device of the present invention discharges the fluid charged by the application of voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of insulating material under electrostatic attraction, and is characterized in that The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the diameter of the fluid droplet immediately after discharge.

采用上述结构,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。With the above structure, in the present invention, the diameter of the nozzle is set to be the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the conventional nozzle. It is roughly the same, so the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

而且,通过将喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,可使电荷的集中区域与流体的弯液面区域成为大致同等的尺寸。Furthermore, by setting the diameter of the fluid discharge hole of the nozzle to be equal to or less than the droplet diameter of the fluid immediately after discharge, the charge concentration region and the meniscus region of the fluid can be made approximately the same size.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体以所需的液滴直径的液滴的状态进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,故可提高使用流体喷射装置时的安全性。Accordingly, it is possible to significantly reduce the voltage required for transferring electric charges, that is, the voltage required for imparting the amount of charge required to electrostatically attract the fluid to the fluid in the state of a droplet having a desired droplet diameter. This eliminates the need for a conventional high voltage of 2000 volts, thereby improving the safety when using the fluid ejection device.

另外,如上所述,通过使电场狭窄,可在狭窄区域形成强的电场,其结果,可使能形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, by narrowing the electric field, a strong electric field can be formed in the narrow region, and as a result, the droplet that can be formed can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing a wiring material for forming a circuit board is used as the fluid, an ultra-high-definition circuit can be formed with extremely narrow wiring.

另外,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,将该喷嘴的流体排出孔的直径设定在φ8μm以下。In addition, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problems, discharges the fluid charged by the application of voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of insulating material under electrostatic attraction, and is characterized in that , The diameter of the fluid discharge hole of the nozzle is set at φ8μm or less.

采用上述结构,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。With the above structure, in the present invention, the diameter of the nozzle is set to be the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the conventional nozzle. It is roughly the same, so the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,由于不需要以往那样的2000伏这样的高电压,故可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. As a result, since a conventional high voltage of 2000 volts is unnecessary, the safety when using the fluid ejection device can be improved.

而且,将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, the diameter of the fluid discharge hole of the nozzle is set below φ8 μm, so that the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect the electric field. intensity distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,能使电场形成得小,在小的区域形成强电场,其结果,可使能形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, the electric field can be made small, and a strong electric field can be formed in a small area, and as a result, the droplet that can be formed can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

另外,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定在φ8μm以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下。In addition, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problems, discharges the fluid charged by the application of voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of insulating material under electrostatic attraction, and is characterized in that , having an applied voltage control unit that controls the voltage applied to the fluid in the nozzle, the diameter of the fluid discharge hole of the nozzle is set to φ8 μm or less, and the applied voltage control unit controls the voltage applied to the fluid Control is performed so that the charge amount induced in the fluid droplet immediately after being discharged from the fluid discharge hole becomes 90% or less of the charge amount corresponding to the Rayleigh limit of the droplet.

采用上述结构,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。With the above structure, in the present invention, the diameter of the nozzle is set to be the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the conventional nozzle. It is roughly the same, so the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,故可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2,000 volts, thereby improving safety when using the fluid ejection device.

而且,由于将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, since the diameter of the fluid discharge hole of the nozzle is set below φ8 μm, the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect Electric field strength distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,能使电场形成得小,在小的区域形成强电场,其结果,可使能形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, the electric field can be made small, and a strong electric field can be formed in a small area, and as a result, the droplet that can be formed can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下,因而可防止排出的液滴的干燥使液滴表面积减小而引起的放电,同时可防止液滴带电引起的蒸汽压力的减小。Furthermore, the applied voltage control unit controls the voltage applied to the fluid so that the amount of charge induced in a droplet of the fluid immediately after being discharged from the fluid discharge hole becomes equivalent to the Rayleigh value of the droplet. 90% of the limit charge amount, thus preventing the discharge caused by the reduction of the surface area of the droplets due to the drying of the discharged droplets, and at the same time preventing the decrease of the vapor pressure caused by the electrification of the droplets.

由此,可降低排出的液滴的干燥时间(至液滴的溶剂全部蒸发为止的时间)的减小,可消除弹射到的液滴的圆点直径的尺寸的偏差。This reduces the drying time of the discharged liquid droplets (the time until the solvent of the liquid droplets evaporates completely), and eliminates the variation in the size of the dot diameter of the ejected liquid droplets.

另外,由于排出的液滴的干燥时间变长,故可减小液滴弹射到之前液滴的直径即液滴量的变化。由此,由于飞翔中的液滴受到的空气阻力和周围湿度等环境条件对各液滴是均匀的,故可提高液滴的弹射落点精度,即可抑制落点时的液滴的偏差。In addition, since the drying time of the discharged liquid droplets becomes longer, it is possible to reduce the change in the diameter of the liquid droplets before they are ejected, that is, the amount of liquid droplets. As a result, since the environmental conditions such as air resistance and ambient humidity experienced by the flying droplets are uniform for each droplet, the accuracy of the landing point of the droplet can be improved, and the deviation of the droplet at the time of landing can be suppressed.

而且,因为排出的液滴的干燥时间延长,故即使排出液滴的直径是φ5μm程度的微小的液滴,液滴也可在不干燥的情况下到达。Furthermore, since the drying time of the discharged liquid droplets is prolonged, even if the diameter of the discharged liquid droplets is as small as φ5 μm, the liquid droplets can reach without being dried.

因此,通过使用上述结构的静电吸引式流体喷射装置,可稳定地排出微小的液滴,同时可高精度地到达。Therefore, by using the electrostatic attraction type fluid ejection device having the above-mentioned structure, it is possible to stably eject fine liquid droplets and reach them with high precision.

为了使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下,可考虑以下方法。In order to reduce the amount of charge induced in a fluid droplet immediately after being discharged from the fluid discharge hole to 90% or less of the charge amount corresponding to the Rayleigh limit of the droplet, the following method can be considered.

即,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于所述弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限的电荷量以下。That is, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problems, the fluid charged by the application of voltage is discharged from the fluid discharge hole of the nozzle made of insulating material in the state of liquid droplets under electrostatic attraction, and is characterized in that , having an applied voltage control unit for controlling the voltage applied to the fluid in the nozzle, and setting the diameter of the fluid discharge hole of the nozzle to be equal to or less than the droplet diameter of the fluid immediately after discharge, the applied voltage The control unit controls the voltage applied to the fluid so that the amount of charge induced in the fluid droplet immediately after being discharged from the fluid discharge hole becomes equivalent to that of the fluid caused by the maximum electric field strength of the meniscus. The amount of charge at the Rayleigh limit at the droplet diameter immediately after discharge is less than or equal to that of Rayleigh limit.

另外,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度向被记录媒体排出,其特征在于,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定在φ8μm以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。In addition, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problems, the fluid charged by the application of a voltage is electrostatically attracted from the fluid discharge hole of the nozzle made of an insulating material in the state of a liquid droplet in accordance with the applied voltage. The corresponding speed is discharged to the recording medium, and it is characterized in that it has an applied voltage control part that controls the voltage applied to the fluid in the nozzle, and the diameter of the fluid discharge hole of the nozzle is set at φ8μm or less, and the The applied voltage control unit controls the voltage applied to the fluid so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less.

采用上述结构,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的与泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。With the above structure, in the present invention, the diameter of the nozzle is set to be different from that of the front end portion of the Taylor cone-shaped charge concentration formed in order to discharge fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the past. The diameters are approximately the same, so the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluids.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2000 volts, and improves the safety when using the fluid ejection device.

而且,将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, the diameter of the fluid discharge hole of the nozzle is set below φ8 μm, so that the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect the electric field. intensity distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,能使电场形成得小,在小的区域形成强电场,其结果,可使能形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, the electric field can be made small, and a strong electric field can be formed in a small area, and as a result, the droplet that can be formed can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,通过所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下,可减轻流体飞翔中的干燥的影响,其结果,可提高被记录媒体上的液滴的落点精度,且可抑制液滴落点圆点直径的偏差,同时可防止在弯液面部的电场强度的影响引起的排出液滴的雾化的发生,可稳定地排出。Moreover, the voltage applied to the fluid is controlled by the applied voltage control unit so that the average discharge speed during the period from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. Due to the influence of drying during the flight of the fluid, as a result, the accuracy of the droplet landing on the recording medium can be improved, and the deviation of the diameter of the droplet landing point can be suppressed, and the electric field intensity at the meniscus can be prevented. Occurrence of atomization of the discharged liquid droplets caused by the impact can be stably discharged.

这里,若流体到达被记录媒体期间的平均排出速度小于10m/s,则落点精度差,排出稳定性也差,故液滴的落点圆点直径产生偏差。另外,若流体到达被记录媒体期间的平均排出速度大于40m/s,则需要高电压,故弯液面部的电场强度变得非常强,排出的液滴频繁发生雾化,无法稳定地排出液滴。Here, if the average discharge speed of the fluid reaches the recording medium is less than 10m/s, the landing accuracy is poor, and the discharge stability is also poor, so the diameter of the droplet's landing spot varies. In addition, if the average discharge velocity during the period when the fluid reaches the recording medium is greater than 40m/s, a high voltage is required, so the electric field strength at the meniscus surface becomes very strong, and the discharged droplets are frequently atomized, making it impossible to discharge the liquid stably. drop.

因此,如上述结构的静电吸引式流体喷射装置那样,通过使从流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下,可使液滴稳定地飞翔,其结果,可提高液滴的弹射落点精度,且可抑制液滴落点圆点直径的偏差。Therefore, like the electrostatic attraction type fluid ejection device of the above-mentioned structure, by making the average discharge velocity during the period from the fluid discharge to the recording medium to be 10 m/s or more and 40 m/s or less, the liquid droplets can be stably flew, and as a result , can improve the accuracy of droplet landing point ejection, and can suppress the deviation of the diameter of the droplet landing point.

另外,上述结构的静电吸引式流体喷射装置也可由以下结构实现。In addition, the electrostatic attraction type fluid ejection device configured as described above can also be realized by the following configuration.

即,本发明的静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度向被记录媒体排出,其特征在于,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。That is, in the electrostatic attraction type fluid ejection device of the present invention, the fluid charged by the application of a voltage is electrostatically attracted from the fluid discharge hole of the nozzle made of an insulating material to the object at a speed corresponding to the applied voltage in the state of droplets. The recording medium discharge is characterized in that it has an applied voltage control unit that controls the voltage applied to the fluid in the nozzle, and the diameter of the fluid discharge hole of the nozzle is set to be equal to the droplet diameter of the fluid immediately after discharge. On the other hand, the applied voltage control unit controls the voltage applied to the fluid so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less.

另外,本发明的静电吸引式流体喷射装置,为了解决上述问题,将含有微粒子并通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,该喷嘴的流体排出孔的直径设定在φ8μm以下,所述流体中含有的微粒子的粒径在φ30nm以下。In addition, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problem, discharges the fluid containing fine particles and charged by applying a voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of insulating material under electrostatic attraction, It is characterized in that the diameter of the fluid discharge hole of the nozzle is set below φ8μm, and the particle diameter of the microparticles contained in the fluid is below φ30nm.

采用上述结构,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。With the above structure, in the present invention, the diameter of the nozzle is set to be the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the conventional nozzle. It is roughly the same, so the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2000 volts, and improves the safety when using the fluid ejection device.

而且,将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, the diameter of the fluid discharge hole of the nozzle is set below φ8 μm, so that the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect the electric field. intensity distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,由于能使电场形成得小,故能在小的区域形成强电场,其结果,可使形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, since the electric field can be made small, a strong electric field can be formed in a small area, and as a result, the formed liquid droplets can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is approximately the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,上述流体中含有的微粒子的粒径在φ30nm以下,因而可减轻微粒子本身带电的影响,即使液滴中含有微粒子也能稳定地进行排出。Furthermore, since the particle size of the fine particles contained in the above-mentioned fluid is φ30nm or less, the influence of the charging of the fine particles themselves can be reduced, and stable discharge can be performed even if the liquid droplets contain fine particles.

另外,因为可减轻微粒子本身带电的影响,故不会发生像以往利用微粒子的带电进行排出流体时那样、粒径小时微粒子的移动变慢的情况。因此,含有微粒子的流体,即使是墨水,也不会使记录速度下降。In addition, since the influence of the charging of the fine particles themselves can be reduced, the movement of the fine particles with small particle diameters does not slow down as in the conventional case of discharging fluid by using the charging of the fine particles. Therefore, a fluid containing fine particles, even ink, does not lower the recording speed.

另外,上述结构的静电吸引式流体喷射装置也可由以下结构实现。In addition, the electrostatic attraction type fluid ejection device configured as described above can also be realized by the following configuration.

即,本发明的静电吸引式流体喷射装置,将含有微粒子且通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,该流体中含有的微粒子的粒径在φ30nm以下。That is, the electrostatic attraction type fluid ejection device of the present invention discharges a fluid containing fine particles and charged by applying a voltage in the state of liquid droplets from the fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, and is characterized in that The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, and the particle diameter of the fine particles contained in the fluid is φ30nm or less.

本发明的其他目的、特征及优点可通过以下的记载得到充分的理解。另外,本发明的效益通过参照附图的以下说明能得到理解。Other objects, features, and advantages of the present invention can be fully understood from the following description. In addition, the advantages of the present invention can be understood by the following description with reference to the accompanying drawings.

附图的简单说明A brief description of the drawings

图1是表示本发明的一实施形态的墨水喷射装置的概要构成剖视图。Fig. 1 is a cross-sectional view showing a schematic configuration of an ink ejecting device according to an embodiment of the present invention.

图2(a)~图2(c)是说明图1所示的墨水喷射装置的墨水弯液面的变动的图。2( a ) to 2( c ) are diagrams illustrating fluctuations in the ink meniscus of the ink ejection device shown in FIG. 1 .

图3(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 3( a ) is a graph showing the relationship between the distance to the nozzle center and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图3(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 3( b ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图4(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 4( a ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图4(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 4( b ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图5(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 5( a ) is a graph showing the relationship between the distance to the nozzle center and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图5(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 5( b ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图6(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 6( a ) is a graph showing the relationship between the distance to the nozzle center and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图6(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 6( b ) is a graph showing the relationship between the distance to the nozzle center and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图7(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 7( a ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图7(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 7( b ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图8(a)是表示喷嘴与相对电极的距离为2000μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 8( a ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 2000 μm.

图8(b)是表示喷嘴与相对电极的距离为100μm时,至喷嘴中心的距离与至相对电极的距离的关系的曲线。FIG. 8( b ) is a graph showing the relationship between the distance to the center of the nozzle and the distance to the counter electrode when the distance between the nozzle and the counter electrode is 100 μm.

图9是表示喷嘴直径与最大电场强度的关系的曲线图。Fig. 9 is a graph showing the relationship between nozzle diameter and maximum electric field intensity.

图10是表示喷嘴直径与各种电压的关系的曲线图。Fig. 10 is a graph showing the relationship between nozzle diameter and various voltages.

图11是表示喷嘴直径与强电场区域的关系的曲线图。Fig. 11 is a graph showing the relationship between the nozzle diameter and the strong electric field region.

图12是表示外加电压与带电电荷量的关系的曲线图。Fig. 12 is a graph showing the relationship between the applied voltage and the charged charge amount.

图13是表示初期排出液滴直径与干燥时间的关系的曲线图。Fig. 13 is a graph showing the relationship between the initial discharge droplet diameter and drying time.

图14是表示周围湿度与干燥时间的关系的曲线图。Fig. 14 is a graph showing the relationship between ambient humidity and drying time.

图15是表示本发明的其他实施形态的墨水喷射装置的概要构成剖视图。Fig. 15 is a cross-sectional view showing a schematic configuration of an ink ejecting device according to another embodiment of the present invention.

图16是说明本发明的原理的图。Fig. 16 is a diagram illustrating the principle of the present invention.

图17是表示以往的静电吸引式流体喷射装置的概要构成剖视图。Fig. 17 is a cross-sectional view showing a schematic configuration of a conventional electrostatic attraction type fluid ejection device.

图18(a)~图18(c)是说明图17所示的墨水喷射装置的墨水弯液面的变动的图。18( a ) to 18 ( c ) are diagrams illustrating fluctuations in the ink meniscus of the ink ejection device shown in FIG. 17 .

图19是表示以往的其他静电吸引式流体喷射装置的概要构成图。Fig. 19 is a schematic configuration diagram showing another conventional electrostatic attraction type fluid ejection device.

图20是表示图19所示的墨水喷射装置的喷嘴部分的概要截面立体图。20 is a schematic cross-sectional perspective view showing a nozzle portion of the ink ejecting device shown in FIG. 19 .

图21是说明图19所示的墨水喷射装置的墨水排出原理的图。FIG. 21 is a diagram explaining the principle of ink discharge by the ink ejection device shown in FIG. 19 .

图22是表示图19所示的墨水喷射装置的喷嘴部分外加电压时微粒子的状态的说明图。FIG. 22 is an explanatory view showing the state of fine particles when a voltage is applied to the nozzle portion of the ink ejecting device shown in FIG. 19 .

图23是说明图19所示的墨水喷射装置的喷嘴部分的微粒子体形成原理的图。FIG. 23 is a diagram illustrating the principle of formation of fine particles in the nozzle portion of the ink ejection device shown in FIG. 19 .

图24(a)~图24(c)是说明图19所示的墨水喷射装置的墨水弯液面的变动的图。24( a ) to 24 ( c ) are diagrams illustrating fluctuations of the ink meniscus in the ink ejection device shown in FIG. 19 .

具体实施方式Detailed ways

[实施形态][implementation form]

对实施本发明用的最佳形态(以下称为实施形态)的说明如下。本实施形态中,对作为流体使用了墨水的静电吸引式流体喷射装置进行说明。The best mode for carrying out the present invention (hereinafter referred to as embodiment) will be described below. In this embodiment, an electrostatic attraction type fluid ejection device using ink as a fluid will be described.

图1是表示本发明的一实施形态的墨水喷射装置的结构图。Fig. 1 is a block diagram showing an ink ejecting device according to an embodiment of the present invention.

如图1所示,上述墨水喷射装置具有排出作为储藏在墨水室1内的流体的墨水2用的喷嘴4。该喷嘴4通过垫圈5与墨水室1连接。由此,墨水室1内的墨水2被封闭而不会从喷嘴4与墨水室1的连接部分向外部泄漏。As shown in FIG. 1 , the above-mentioned ink jetting device has nozzles 4 for discharging ink 2 which is a fluid stored in an ink chamber 1 . The nozzle 4 is connected to the ink chamber 1 through a gasket 5 . Thereby, the ink 2 in the ink chamber 1 is sealed so that it does not leak to the outside from the connecting portion between the nozzle 4 and the ink chamber 1 .

另外,上述喷嘴4成为朝着与墨水室1的连结部的相反侧、即朝着成为墨水的排出侧的前端部4a内径减小的收缩形状。上述喷嘴4的前端部4a的墨水排出孔4b的内径(直径)由与排出后不久的墨水2的粒径的关系来设定。In addition, the nozzle 4 has a constricted shape in which the inner diameter decreases toward the side opposite to the connection portion with the ink chamber 1 , that is, toward the tip portion 4 a on the ink discharge side. The inner diameter (diameter) of the ink discharge hole 4b at the tip portion 4a of the nozzle 4 is set in relation to the particle diameter of the ink 2 immediately after discharge.

为了区别从喷嘴4排出的墨水2和储藏在墨水室1内的墨水2,以下对从喷嘴4排出的墨水2称为液滴3进行说明。对该墨水排出孔4b的直径与排出后不久的液滴3的液滴直径的关系的详细情况后述。In order to distinguish the ink 2 discharged from the nozzle 4 from the ink 2 stored in the ink chamber 1 , the ink 2 discharged from the nozzle 4 will be referred to as a droplet 3 in the following description. The details of the relationship between the diameter of the ink discharge hole 4 b and the droplet diameter of the liquid droplet 3 immediately after discharge will be described later.

而且,在上述喷嘴4的内部设有对墨水2外加静电场用的静电场外加用电极9。该静电场外加用电极9与流程控制部10连接,来自未图示的驱动电路的外加电压所产生的电场强度通过该流程控制部10进行控制。通过对该电场强度进行控制,从喷嘴4排出的液滴3的液滴直径得到调节。即,流程控制部10具有作为对通过静电场外加用电极9向墨水2外加的电压进行控制的施加电压控制装置的功能。Furthermore, an electrostatic field applying electrode 9 for applying an electrostatic field to the ink 2 is provided inside the nozzle 4 . The electrode 9 for applying an electrostatic field is connected to a process control unit 10 , and the intensity of an electric field generated by an applied voltage from a drive circuit (not shown) is controlled by the process control unit 10 . By controlling the intensity of the electric field, the droplet diameter of the liquid droplet 3 discharged from the nozzle 4 is adjusted. That is, the flow control unit 10 functions as an applied voltage control device that controls the voltage applied to the ink 2 via the electrode 9 for applying an electrostatic field.

在上述喷嘴4的墨水排出孔4b的相对面侧的离开规定距离的位置上配设有相对电极7。该相对电极7,用于使在喷嘴4与相对电极7之间被搬运的被记录媒体8的表面带电成为:与从喷嘴4的墨水排出孔4b排出的液滴3的带电电位的相反极性的电位。由此,使从喷嘴4的墨水排出孔4b排出的液滴3稳定地到达被记录媒体8的表面。The counter electrode 7 is disposed at a position separated by a predetermined distance from the ink discharge hole 4 b of the nozzle 4 . The counter electrode 7 is used to charge the surface of the recording medium 8 conveyed between the nozzle 4 and the counter electrode 7 to a polarity opposite to that of the charged potential of the liquid droplets 3 discharged from the ink discharge holes 4 b of the nozzle 4 . potential. As a result, the liquid droplets 3 discharged from the ink discharge holes 4 b of the nozzles 4 reach the surface of the recording medium 8 stably.

这样,由于液滴3需要带电,故最好喷嘴4的至少前端部4a的墨水排出面由绝缘构件形成,且需要形成微细的喷嘴直径(墨水排出孔4b的内径),故本实施形态中,作为喷嘴4使用玻璃的毛细管。In this way, since the droplets 3 need to be charged, it is preferable that at least the ink discharge surface of the front end 4a of the nozzle 4 is formed by an insulating member, and it is necessary to form a fine nozzle diameter (the inner diameter of the ink discharge hole 4b), so in this embodiment, A glass capillary is used as the nozzle 4 .

因此,将上述喷嘴4形成为:与在作为流体的墨水2的静电吸引过程中、为了排出比喷嘴的墨水排出孔的直径小的直径的液滴而形成的泰勒锥形状的墨水的弯液面相当的形状,同时将该喷嘴4的墨水排出孔4b的直径设定为与上述弯液面的墨水即将排出的前端部的直径大致相同,且设定在与排出后不久的液滴3的直径同等以下。Therefore, the above-mentioned nozzle 4 is formed as a meniscus of ink with a Taylor cone shape formed in order to discharge liquid droplets having a diameter smaller than the diameter of the ink discharge hole of the nozzle during the electrostatic attraction of the ink 2 as the fluid. Equivalent shape, while setting the diameter of the ink discharge hole 4b of the nozzle 4 to be approximately the same as the diameter of the front end of the ink of the above-mentioned meniscus that is about to be discharged, and set to the diameter of the droplet 3 immediately after discharge. equal or below.

在上述结构的墨水喷射装置中,利用流程控制部10通过静电场外加用电极9对施加于墨水2的电压进行控制,以使排出的墨水2的液滴量为1pl以下。In the ink jetting device having the above configuration, the voltage applied to the ink 2 is controlled by the flow control unit 10 through the electrode 9 for applying an electrostatic field so that the droplet volume of the discharged ink 2 is 1 pl or less.

另外,上述墨水室1除了与上述喷嘴4以外、还与用于将墨水2从未图示的墨水罐进行供给用的墨水供给通道6连接。这里,在墨水室1内及喷嘴4内,由于墨水2以充满的状态保持,故对墨水2作用有负压。In addition, the ink chamber 1 is connected to an ink supply channel 6 for supplying the ink 2 from an ink tank (not shown) in addition to the nozzle 4 . Here, in the ink chamber 1 and the nozzle 4, since the ink 2 is kept filled, a negative pressure acts on the ink 2 .

以下,对墨水2从喷嘴4作为液滴3排出时、在墨水排出孔4b附近形成的弯液面部(弯液面区域)14的变动进行说明。图2(a)~图2(c)是表示上述墨水排出孔4b附近的弯液面部14的变动的模型图。Next, changes in the meniscus surface (meniscus region) 14 formed near the ink discharge hole 4b when the ink 2 is discharged from the nozzle 4 as the droplet 3 will be described. 2( a ) to 2( c ) are model diagrams showing movement of the meniscus portion 14 in the vicinity of the ink discharge hole 4 b.

首先,在墨水2的排出之前的状态下,如图2(a)所示,对墨水作用有负压,故作为弯液面部14,弯液面14a形成为朝喷嘴4的前端部4a内部凹的形状。First, in the state before the ink 2 is discharged, as shown in FIG. concave shape.

接着,为了墨水2的排出,利用流程控制部10通过静电场外加用电极9对施加于墨水2的电压进行控制,当对该墨水2施加了规定的电压时,则喷嘴4内的墨水2的表面感应出电荷,墨水2如图2(b)所示,作为弯液面部14,形成被拉向该喷嘴4的前端部4a的墨水排出孔4b的表面、即相对电极侧(未图示)的弯液面14b。此时,因为喷嘴4的直径微小,故弯液面14b从当初开始一边形成泰勒锥的形状一边朝外侧拉伸。Next, in order to discharge the ink 2, the voltage applied to the ink 2 is controlled by the process control unit 10 through the electrode 9 for applying an electrostatic field, and when a predetermined voltage is applied to the ink 2, the ink 2 in the nozzle 4 Charge is induced on the surface, and the ink 2, as shown in FIG. ) of the meniscus 14b. At this time, since the diameter of the nozzle 4 is small, the meniscus 14b stretches outward while forming a Taylor cone shape from the beginning.

接着,被朝外侧拉伸的弯液面14b如图2(c)所示,作为弯液面部14,成为进一步向相对电极侧(未图示)排出的形状的弯液面14c,感应出的弯液面14c表面的电荷与在喷嘴4形成的电场(电场强度)的力大于墨水2的表面张力,从而形成排出液滴。Next, the meniscus 14b stretched outward, as shown in FIG. The force of the charge on the surface of the meniscus 14c and the electric field (electric field strength) formed in the nozzle 4 is greater than the surface tension of the ink 2, thereby forming discharged liquid droplets.

这里,本实施形态中使用的喷嘴4的墨水排出孔4b的内径(以下称为喷嘴直径)作成φ5μm。这样,喷嘴4的喷嘴直径为微小时,不像以往那样弯液面前端部的曲率半径因表面电荷的集中而逐渐减小地变化,而是可看作大致一定。Here, the inner diameter of the ink discharge hole 4b of the nozzle 4 used in this embodiment (hereinafter referred to as the nozzle diameter) is made φ5 μm. In this way, when the nozzle diameter of the nozzle 4 is small, the radius of curvature of the tip of the meniscus does not gradually decrease due to the concentration of surface charges as in the past, but can be regarded as substantially constant.

因此,若墨水物性值一定,则液滴分离时的表面张力在外加电压所产生的排出状态下大致一定,而且可集中的表面电荷的量也是超过墨水的表面张力的值,即由于在瑞利分裂值以下,故最大量可唯一地加以定义。Therefore, if the physical property value of the ink is constant, the surface tension when the droplet is separated is approximately constant in the discharge state generated by the applied voltage, and the amount of surface charge that can be concentrated is also a value exceeding the surface tension of the ink, that is, due to the Rayleigh Below the split value, the maximum amount can be uniquely defined.

另外,因为喷嘴直径微小,故电场强度仅在弯液面部极其边上为极强的值,而由于这样仅在极小的区域中的强电场的放电破坏强度呈极大的值,故不会成为问题。In addition, because the diameter of the nozzle is small, the electric field intensity is extremely strong only at the extreme edge of the meniscus, and because the discharge destruction intensity of the strong electric field in such a small area is extremely large, it is not necessary to will be a problem.

作为本实施形态的上述墨水喷射装置中使用的墨水,可使用含有纯水的染料类墨水及含有微粒子的墨水。这里,作为含有微粒子的墨水,喷嘴部以往就极小,故含有的微粒子的粒径也需要小,一般来说如是喷嘴的1/20至1/100程度就不易发生堵塞。As the ink used in the inkjet device according to this embodiment, dye-based inks containing pure water and inks containing fine particles can be used. Here, as the ink containing fine particles, the nozzle part has been extremely small in the past, so the particle size of the contained fine particles also needs to be small. Generally speaking, clogging is less likely to occur if it is about 1/20 to 1/100 of the nozzle.

因此,当将本实施形态中使用的喷嘴4的喷嘴直径如上所述做成φ5μm,则与该喷嘴直径对应的墨水的微粒子直径为50nm以下。此时,如专利文献2所示的排出含有微粒子的墨水的原理那样,通过微粒子带电引起的移动使弯液面部的电荷集中、由集中的微粒子相互的静电反作用力而进行排出的方法中,因比以往使用的最小微粒子直径φ100nm还要小,故墨水中的带电微粒子的移动速度下降,排出的响应速度及记录速度变慢。Therefore, when the nozzle diameter of the nozzle 4 used in this embodiment is 5 μm as described above, the particle diameter of ink particles corresponding to the nozzle diameter is 50 nm or less. At this time, as in the principle of discharging ink containing fine particles shown in Patent Document 2, in the method of concentrating the charges on the meniscus surface by the movement caused by charging of the fine particles, and discharging by the electrostatic reaction force between the concentrated fine particles, Since it is smaller than the minimum particle diameter φ100nm used in the past, the movement speed of the charged particles in the ink is reduced, and the response speed of discharge and the recording speed are slowed down.

相比之下,本发明中不是利用带电的微粒子相互的静电反作用力,而是与不含微粒子的墨水的情况相同,利用弯液面表面的电荷进行排出。该场合,为了消除墨水中的微粒子的电荷的影响对弯液面表面的电荷产生影响而导致的排出不稳定,最好形成为墨水中的微粒子的电荷量与弯液面表面的电荷相比呈小得多的值的形状。In contrast, in the present invention, instead of using the electrostatic reaction force between charged fine particles, discharge is performed using the charges on the surface of the meniscus as in the case of ink not containing fine particles. In this case, in order to eliminate the discharge instability caused by the influence of the charge of the fine particles in the ink on the charge on the surface of the meniscus, it is preferable to form the amount of charge of the fine particles in the ink to be equal to the charge on the surface of the meniscus. The shape for much smaller values.

这样,若墨水中的微粒子的单位质量的电荷量在10μC/g以下,则该微粒子相互间的静电反作用力及响应速度减小,并通过减小墨水微粒子的质量、即减小墨水微粒子的直径,可减小墨水中的微粒子的总电荷量。In this way, if the charge per unit mass of the particles in the ink is below 10 μC/g, the electrostatic reaction force and response speed between the particles will be reduced, and by reducing the mass of the ink particles, that is, reducing the diameter of the ink particles , can reduce the total charge of the particles in the ink.

以下的表1表示将墨水中的平均微粒子直径做成φ3nm至φ50nm时的排出稳定性。Table 1 below shows the discharge stability when the average particle diameter in the ink is φ3 nm to φ50 nm.

表1   微粒子直径                       喷嘴直径   φ0.4μm   φ1μm   φ4μm   φ8μm   φ50nm   ×   △   △   △   φ30nm   ○   ○   ○   ○   φ10nm   ○   ○   ○   ○   φ3nm   ○   ○   ○   ○ Table 1 particle diameter Nozzle diameter φ0.4μm φ1μm φ4μm φ8μm φ50nm x φ30nm φ10nm φ3nm

表1中的符号表示各喷嘴的排出稳定性,×:存在因堵塞等而不排出的情况,△:在连续排出中有排出不稳定,○:稳定排出The symbols in Table 1 indicate the discharge stability of each nozzle, ×: There is a case where the discharge is not performed due to clogging, etc., △: There is discharge instability during continuous discharge, ○: Stable discharge

从表1可见,作为微粒子直径最好在φ30nm以下。尤其是当微粒子直径在φ10nm以下时,墨水中1个微粒子的带电量作为墨水排出中的电荷的影响大致可忽略,同时电荷引起的移动速度也极慢,不会发生微粒子朝弯液面中心的集中。另外,当喷嘴直径在φ3μm以下时,因弯液面部的电场集中使最大电场强度极端地增大,每个微粒子的静电力也增大,故最好使用含有φ10nm以下的微粒子的墨水。不过,当微粒子直径在φ1nm以下时,发生微粒子的凝聚及浓度的不均匀的情况增加,故微粒子直径最好在φ1nm至φ10nm的范围。As can be seen from Table 1, the diameter of fine particles is preferably φ30nm or less. Especially when the particle diameter is less than φ10nm, the influence of the charged amount of one particle in the ink as the charge in the ink discharge is roughly negligible, and the movement speed caused by the charge is also extremely slow, and the particle will not move toward the center of the meniscus. concentrated. In addition, when the nozzle diameter is less than φ3μm, the maximum electric field intensity is extremely increased due to the concentration of the electric field on the meniscus, and the electrostatic force of each particle is also increased. Therefore, it is best to use ink containing particles of φ10nm or less. However, when the diameter of the fine particles is less than φ1nm, the aggregation of the fine particles and the unevenness of the concentration increase, so the fine particle diameter is preferably in the range of φ1nm to φ10nm.

本实施形态中,使用含有平均粒径在φ3nm至φ7nm之间的银的微粒子的浆料,对该微粒子实施了防止凝聚的涂层。In this embodiment, a slurry containing fine particles of silver having an average particle diameter of φ3 nm to φ7 nm is used, and a coating for preventing aggregation is applied to the fine particles.

以下参照图3(a)、(b)~图8(a)、(b)对喷嘴4的喷嘴直径与电场强度的关系进行说明。图3(a)、(b)~图8(a)、(b)分别表示了喷嘴直径为φ0.2、0.4、1、8、20μm以及作为参考以往所使用的喷嘴直径φ50μm时的电场强度分布。Next, the relationship between the nozzle diameter of the nozzle 4 and the electric field intensity will be described with reference to FIGS. Figure 3(a), (b) to Figure 8(a), (b) show the electric field strength when the nozzle diameter is φ0.2, 0.4, 1, 8, 20μm and the nozzle diameter φ50μm used as a reference distributed.

这里,各图中,喷嘴中心位置是指喷嘴4的墨水排出孔4b的墨水排出面的中心位置。另外,各个图的(a)是将喷嘴与相对电极的距离设定为2000μm时的电场强度分布,图(b)是表示将喷嘴与相对电极的距离设定为100μm时的电场强度分布。而外加电压在各条件下都设定为一定的200伏。图中的分布线表示电场强度为1×106V/m至1×107V/m的范围。Here, in each figure, the nozzle center position refers to the center position of the ink discharge surface of the ink discharge hole 4 b of the nozzle 4 . In addition, (a) of each figure shows the electric field intensity distribution when the distance between the nozzle and the counter electrode is set to 2000 μm, and figure (b) shows the electric field intensity distribution when the distance between the nozzle and the counter electrode is set to 100 μm. The applied voltage was set to a constant 200 volts under each condition. The distribution line in the figure indicates the electric field intensity ranges from 1×10 6 V/m to 1×10 7 V/m.

以下的表2表示各条件下的最大电场强度。Table 2 below shows the maximum electric field strength under each condition.

表2   喷嘴直径(μm)                  间隙(μm)   变动率(%)   100   2000   0.2   2.001×109   2.00005×109   0.05   0.4   1.001×109   1.00005×109   0.09   1   0.401002×109   0.40005×109   0.24   8   0.0510196×109   0.05005×109   1.94   20   0.0210476×109   0.0200501×109   4.98   50   0.00911111×109   0.00805×109   13.18 Table 2 Nozzle diameter (μm) Gap (μm) Rate of change (%) 100 2000 0.2 2.001×10 9 2.00005×10 9 0.05 0.4 1.001×10 9 1.00005×10 9 0.09 1 0.401002×10 9 0.40005×10 9 0.24 8 0.0510196×10 9 0.05005×10 9 1.94 20 0.0210476×10 9 0.0200501×10 9 4.98 50 0.00911111×10 9 0.00805×10 9 13.18

从图3(a)、(b)~图8(a)、(b)可见,当喷嘴直径在φ20μm(图7(a)、(b))以上时,电场强度分布扩散成大的面积。另外,从表2可见,喷嘴与相对电极的距离对电场强度有影响。From Figure 3(a), (b) to Figure 8(a), (b), it can be seen that when the nozzle diameter is above φ20μm (Figure 7(a), (b)), the electric field intensity distribution spreads into a large area. In addition, it can be seen from Table 2 that the distance between the nozzle and the opposite electrode has an influence on the electric field intensity.

从以上可见,当喷嘴直径为φ8μm(图6(a)、(b))以下时,电场强度集中,同时相对电极的距离的变动几乎不影响电场强度分布。因此,若喷嘴直径在φ8μm以下,则可不受相对电极的位置精度及被记录媒体的材料特性的偏差和厚度的偏差的影响,稳定地进行排出。这里,要排出1Pl的液滴量的墨水2,需要将喷嘴直径做成φ10μm,故如上所述,若喷嘴直径在φ8μm以下,则可将液滴量做成1Pl以下。It can be seen from the above that when the diameter of the nozzle is φ8μm or less (Figure 6(a), (b)), the electric field intensity is concentrated, and the variation of the distance from the opposite electrode hardly affects the electric field intensity distribution. Therefore, if the nozzle diameter is φ8 μm or less, stable discharge can be performed without being affected by the positional accuracy of the counter electrode, the material property variation and the thickness variation of the recording medium. Here, to discharge the ink 2 with a droplet volume of 1 pl, the nozzle diameter needs to be φ10 μm, so as described above, if the nozzle diameter is φ8 μm or less, the droplet volume can be made 1 pl or less.

接着,图9表示上述喷嘴4的喷嘴直径与弯液面部14的最大电场强度、强电场区域的关系。Next, FIG. 9 shows the relationship between the nozzle diameter of the nozzle 4 and the maximum electric field intensity of the meniscus 14 and the strong electric field region.

从图9所示的曲线可见,当喷嘴直径在φ4μm以下时,电场集中极端增大,可提高最大电场强度。由此,由于可加大墨水的初期排出速度,故增加墨水(液滴)的飞翔稳定性,同时因为弯液面部的电荷的移动速度增大,因而可提高排出响应性。It can be seen from the curve shown in Figure 9 that when the nozzle diameter is below φ4μm, the electric field concentration is extremely increased and the maximum electric field intensity can be increased. As a result, since the initial discharge speed of the ink can be increased, the flight stability of the ink (liquid droplet) can be increased, and the discharge responsiveness can be improved because the movement speed of the charge on the meniscus is increased.

接着,对排出的墨水2的液滴3的可带电的最大电荷量进行说明。液滴3可带电的电荷量由考虑了液滴3的瑞利分裂(瑞利极限)的以下的公式(5)表示。Next, the maximum chargeable charge amount of the discharged liquid droplets 3 of the ink 2 will be described. The chargeable amount of the droplet 3 is expressed by the following formula (5) in consideration of the Rayleigh splitting (Rayleigh limit) of the droplet 3 .

q=8×π×(ε0×γ×r3)1/2                      …(5)q=8×π×(ε0×γ×r 3 ) 1/2 …(5)

其中,q是给予瑞利极限的电荷量,ε0是真空介电常数,γ是墨水的表面张力,r是墨水液滴的半径。where q is the amount of charge that gives the Rayleigh limit, ε0 is the vacuum permittivity, γ is the surface tension of the ink, and r is the radius of the ink droplet.

由上述公式(5)求得的电荷量q越接近瑞利极限值,即使是在相同的电场强度下静电力也越强,可提高排出的稳定性,但过分接近瑞利极限值,则相反在喷嘴4的墨水排出孔4b发生墨水2的雾散,排出稳定性欠佳。The closer the charge quantity q obtained by the above formula (5) is to the Rayleigh limit value, the stronger the electrostatic force will be even under the same electric field strength, which can improve the stability of discharge, but if it is too close to the Rayleigh limit value, the opposite will happen. The mist of the ink 2 occurred in the ink discharge hole 4b of the nozzle 4, and the discharge stability was not good.

这里,图10表示喷嘴的喷嘴直径与在弯液面部排出的该喷嘴直径的约2倍的直径的初期排出液滴开始飞翔的排出开始电压、初期排出液滴的瑞利极限下的电压值及排出开始电压与瑞利极限电压值之比的关系的曲线。Here, FIG. 10 shows the nozzle diameter of the nozzle, the discharge start voltage at which the initial discharge droplet starts to fly, and the voltage value at the Rayleigh limit of the initial discharge droplet with a diameter about twice the diameter of the nozzle discharged at the meniscus. And the curve of the relationship between the discharge start voltage and the ratio of the Rayleigh limit voltage value.

从图10所示的曲线可见,喷嘴直径在φ0.2μm至φ4μm的范围内,排出开始电压与瑞利极限电压值之比超过0.6,液滴的带电效率成为良好的结果,在该范围内可进行稳定的排出。From the curve shown in Figure 10, it can be seen that the nozzle diameter is in the range of φ0.2μm to φ4μm, the ratio of the discharge start voltage to the Rayleigh limit voltage value exceeds 0.6, and the charging efficiency of the droplets becomes a good result. Perform stable discharge.

例如,在图11所示的喷嘴直径与弯液面部的强电场(1×106V/m以上)的区域的关系的曲线中,表示当喷嘴直径在φ0.2μm以下时、电场集中的区域极端变窄的情况。由此,显示排出的液滴无法接受足够的加速用的能量,飞翔稳定性变差。因此,需要将喷嘴直径设定得比φ0.2μm大。For example, in the graph of the relationship between the nozzle diameter and the region of a strong electric field (1×10 6 V/m or more) at the meniscus shown in FIG. A case of extreme narrowing of the area. This indicates that the discharged liquid droplets cannot receive sufficient energy for acceleration, and the flying stability deteriorates. Therefore, it is necessary to set the nozzle diameter larger than φ0.2 μm.

接着,图12是表示将从以实际驱动上述结构的墨水喷射装置时的外加电压、即液滴的排出开始电压以上的电压使最佳的电压值发生变动时的最大电场强度感应出的弯液面部的初期排出液滴作为一定时的该液滴的电荷量与来自液滴的表面张力的瑞利极限值的关系的曲线。Next, FIG. 12 shows the meniscus induced by the maximum electric field intensity when the optimum voltage value is changed from the applied voltage when actually driving the ink ejection device with the above-mentioned structure, that is, the voltage above the droplet discharge start voltage. The initial liquid droplet discharged from the face is a graph showing the relationship between the charge amount of the droplet and the Rayleigh limit value derived from the surface tension of the droplet at a certain time.

从图12所示的曲线可见,A点是上述液滴的电荷量与来自液滴的表面张力的瑞利极限值的交点,对墨水的外加电压若是大于A点的高电压,则在初期排出液滴上形成大致接近瑞利极限的最大电荷量,若是低于A点的低电压,则表示形成了瑞利极限以下且对于排出所需的电荷量。It can be seen from the curve shown in Figure 12 that point A is the intersection point of the charge amount of the above-mentioned liquid droplet and the Rayleigh limit value from the surface tension of the liquid droplet. A maximum amount of charge approximately close to the Rayleigh limit is formed on the droplet. If the voltage is lower than point A, it means that the amount of charge required for discharge is formed below the Rayleigh limit.

这里,当仅着眼于排出液滴的运动方程式时,因为是在作为强电场且最大电荷量的排出能量的最佳条件下进行飞翔,因而作为外加电压最好是比A点高的电压。Here, focusing only on the equation of motion of the discharged droplet, the flight is carried out under the optimal conditions of discharge energy with a strong electric field and a maximum amount of charge, so the applied voltage is preferably a voltage higher than that at point A.

但是,图13是表示将环境湿度作成50%时的墨水(这里是纯水)的初期排出液滴直径与干燥时间(液滴的溶剂全部蒸发的时间)的关系的曲线。从该曲线可见,初期排出液滴直径小时,蒸发引起的墨水的液滴直径的变化非常快,在飞翔中的短暂时间内就干燥了。However, FIG. 13 is a graph showing the relationship between the initial discharge droplet diameter of ink (here, pure water) and the drying time (time for all the solvent in the droplet to evaporate) when the ambient humidity is 50%. As can be seen from this graph, when the initial droplet diameter is small, the change in the droplet diameter of the ink due to evaporation is very rapid, and the ink dries within a short time while flying.

因此,当初期排出时以最大电荷量形成液滴时,通过干燥引起的液滴直径的减小、即形成电荷的液滴的表面积减小,在墨水飞翔中发生瑞利分裂,过度放出电荷时电荷带着一部分液滴放出,产生蒸发以上的飞翔液滴的减少。Therefore, when droplets are formed with the maximum amount of charge at the initial discharge, the droplet diameter decreases due to drying, that is, the surface area of the droplet forming the charge decreases, Rayleigh splitting occurs during the flight of the ink, and when the charge is excessively discharged The charge is released with a part of the droplets, resulting in a decrease in the number of flying droplets above the evaporation.

因此,到达时的液滴直径的偏差及落点精度变差,同时在喷嘴和被记录媒体中分裂的雾气浮游,污染被记录媒体。因此,考虑到形成稳定的排出圆点时,需要使初期排出液滴中感应出的电荷量比与瑞利极限相当的电荷量小一定程度。该场合,若将该电荷量做成相当于瑞利极限值的电荷量的95%左右,就无法提高落点圆点直径的偏差的精度,其结果最好是做成90%以下。Therefore, the variation in droplet diameter and landing accuracy at the time of arrival deteriorates, and the mist split in the nozzle and the recording medium floats and contaminates the recording medium. Therefore, in consideration of forming a stable discharge dot, it is necessary to make the charge amount induced in the initially discharged liquid droplet smaller than the charge amount corresponding to the Rayleigh limit to some extent. In this case, if the charge amount is about 95% of the charge amount corresponding to the Rayleigh limit value, the accuracy of the variation in the dot diameter of the landing point cannot be improved, and as a result, it is preferable to make it 90% or less.

作为具体的数值,算出将喷嘴孔径看作为针电极的前端形状时的弯液面的最大电场强度引起的初期排出液滴直径的瑞利极限,通过做成该算出值以下的范围,就可抑制到达时的液滴的偏差。这可以认为是排出液滴分离之前的表面积比排出后不久的液滴小,且因电荷的移动时间的时间滞后、实际上初期排出液滴中感应的电荷量比由上述计算求得的电荷量小的缘故。As a specific numerical value, the Rayleigh limit of the initial discharge droplet diameter caused by the maximum electric field strength of the meniscus when the nozzle aperture is regarded as the tip shape of the needle electrode is calculated, and by making it a range below the calculated value, it is possible to suppress The deviation of the droplet upon arrival. This is considered to be because the surface area of the discharged droplet before separation is smaller than that of the liquid droplet immediately after discharge, and due to the time lag in the transfer time of the charge, the amount of charge induced in the initially discharged droplet is actually larger than the amount of charge obtained by the above calculation. Small sake.

若是这样的条件,可防止飞翔时的瑞利分裂,同时可减轻在弯液面部的排出液滴的分离时电荷量多引起的雾化等的稳定排出。Under such conditions, Rayleigh splitting during flight can be prevented, and at the same time, stable discharge such as atomization due to a large amount of charge at the time of separation of discharged droplets at the meniscus surface can be reduced.

带电的液滴蒸汽压减小,因而不易蒸发。这从以下的公式(6)可见。Charged droplets have reduced vapor pressure and are less likely to evaporate. This can be seen from the following formula (6).

RTρ/M×log(P/P0)=2γ/d-q2/(8πd4)               …(6)RTρ/M×log(P/P0)=2γ/dq 2 /(8πd 4 ) …(6)

其中,R是气体常数,M是气体分子量,T是气体温度,ρ是气体密度,P是微小液滴的蒸汽压力,P0是平面的蒸汽压力,γ是墨水的表面张力,d是墨水液滴的半径。Among them, R is the gas constant, M is the molecular weight of the gas, T is the gas temperature, ρ is the gas density, P is the vapor pressure of the tiny droplet, P0 is the vapor pressure of the plane, γ is the surface tension of the ink, and d is the ink droplet of the radius.

如上述公式(6)所示,带电的液滴,蒸汽压力因该液滴的带电量而减小,带电量过小时,由于对蒸发的缓和影响小,故与瑞利极限相当的电场强度及电压值的60%以上为最佳结果。其结果,与上述相同,算出将喷嘴孔径看作为针电极的前端形状时的弯液面的最大电场强度引起的初期排出液滴直径的瑞利极限,与表示该算出值的0.8倍以上的范围的情况相同。As shown in the above formula (6), for a charged droplet, the vapor pressure decreases due to the charge amount of the droplet. Above 60% of the voltage value is the best result. As a result, in the same manner as above, the Rayleigh limit of the diameter of the initial discharge droplet due to the maximum electric field strength of the meniscus when the nozzle aperture is regarded as the shape of the tip of the needle electrode was calculated, and the range representing 0.8 times or more of the calculated value was calculated. The situation is the same.

尤其是,如图13所示,当初期排出液滴直径为φ5μm以下时,干燥时间极端缩短,容易受到蒸发的影响,可见将初期排出液滴的电荷量抑制得小、从抑制蒸发的观点来看是有效的。求解图13所示的干燥时间与初期排出液滴直径的关系时的周围湿度作成50%。In particular, as shown in Figure 13, when the diameter of the initial discharge droplet is φ5 μm or less, the drying time is extremely shortened, and it is easily affected by evaporation. It can be seen that the charge amount of the initial discharge droplet is suppressed to be small, and from the viewpoint of suppressing evaporation Look is effective. The ambient humidity when calculating the relationship between the drying time and the initial discharge droplet diameter shown in FIG. 13 was made 50%.

另外,当考虑排出液滴的干燥时,需要缩短液体至被记录媒体的排出时间。In addition, when considering the drying of discharged liquid droplets, it is necessary to shorten the discharge time of the liquid to the recording medium.

这里,将排出液滴从弯液面部分离,从喷嘴至到达被记录媒体期间的平均飞翔速度作成5m/s、10m/s、20m/s、30m/s、40m/s、50m/s,将排出的稳定性与落点圆点的位置精度进行比较的结果示于表3。Here, the average flying speed of the discharged liquid droplet from the meniscus is made 5m/s, 10m/s, 20m/s, 30m/s, 40m/s, 50m/s from the nozzle to the recording medium, Table 3 shows the results of comparing the ejection stability with the positional accuracy of the landing point.

表3   初期排出液滴直径       φ0.4μm         φ1μm         φ3μm   平均排出速度    排出稳定性   落点精度    排出稳定性    落点精度     排出稳定性   落点精度   5m/s       ×(未到达)    △    △     ○   △   10m/s    ○   ○    ○    ○     ○   ○   20m/s    ○   ◎    ○    ◎     ○   ◎   30m/s    ○   ◎    ○    ◎     ○   ◎   40m/s    ○   ◎    ○    ◎     ○   ◎   50m/s       ×(发生雾)       ×(发生雾)        ×(发生雾) table 3 Initial discharge droplet diameter φ0.4μm φ1μm φ3μm Average discharge speed discharge stability Drop point accuracy discharge stability Drop point accuracy discharge stability Drop point accuracy 5m/s ×(not arrived) 10m/s 20m/s 30m/s 40m/s 50m/s × (fog occurs) × (fog occurs) × (fog occurs)

表3中的排出稳定性的符号中是表示,×:几乎没有排出,△:连续排出中有不排出的情况,○:没有不排出的情况,落点精度的符号中是表示,×:落点偏移>落点圆点直径,△:落点偏移>落点圆点直径×0.5,○:落点偏移<落点圆点直径×0.5,◎:落点偏移<落点圆点直径×0.2。The discharge stability in Table 3 is indicated by a symbol, ×: Almost no discharge, △: There is a case of non-discharge during continuous discharge, ○: There is no case of non-discharge, and the symbol of the accuracy of the landing point is indicated by a symbol, ×: Fall Point offset > drop point diameter, △: drop point offset > drop point diameter × 0.5, ○: drop point offset < drop point diameter × 0.5, ◎: drop point offset < drop point circle Spot diameter × 0.2.

从上述表3可见,平均飞翔速度为5m/s时落点精度差,排出稳定性也差。尤其是,喷嘴直径在φ1μm以下时,当排出速度小,则作用于液滴的空气阻力的因素增大,且蒸发使圆点直径进一步减小,存在无法到达的情况。相反,平均飞翔速度为50m/s时,由于需要提高外加电压,故在弯液面部的电场强度变得极强,频繁地发生排出液滴的雾化,难以进行稳定的排出。As can be seen from the above Table 3, when the average flying speed is 5m/s, the landing point accuracy is poor, and the discharge stability is also poor. In particular, when the nozzle diameter is φ1 μm or less, when the discharge speed is small, the air resistance factor acting on the droplet increases, and the dot diameter is further reduced by evaporation, which may not reach the droplet. On the contrary, when the average flying speed is 50 m/s, since the applied voltage needs to be increased, the electric field strength on the meniscus surface becomes extremely strong, frequent atomization of discharged liquid droplets occurs, and stable discharge becomes difficult.

从以上可见,将排出液滴从弯液面部分离,从喷嘴至到达被记录媒体期间的平均飞翔速度最好在10m/s至40m/s之间。As can be seen from the above, it is preferable that the average flying speed of the discharged liquid droplet during the separation from the meniscus to reach the recording medium from the nozzle is between 10 m/s and 40 m/s.

但是,图13表示周围湿度作成50%时的、初期排出液滴直径与干燥时间的关系,而图14是表示初期排出液滴直径为φ0.5μm情况下使喷嘴与被记录媒体的距离为0.2mm时的周围湿度与干燥时间的关系。However, Figure 13 shows the relationship between the initial discharge droplet diameter and drying time when the ambient humidity is 50%, and Figure 14 shows that the distance between the nozzle and the recording medium is 0.2 μm when the initial discharge droplet diameter is φ0.5 μm. Ambient humidity in mm versus drying time.

从图14所示的曲线可见,周围湿度在60%以下时该干燥速度的数值不发生很大的变动。但是,当周围湿度超过70%时,可极端地抑制墨水的蒸发,使周围湿度为70%以上时,上述条件等的影响降低,尤其是将周围湿度设定为95%以上时,发现可大致忽略干燥的影响,可扩大本发明的墨水喷射装置的设计条件的自由度且可扩大适用范围。It can be seen from the curve shown in Fig. 14 that when the ambient humidity is below 60%, the value of the drying speed does not change greatly. However, when the ambient humidity exceeds 70%, the evaporation of the ink can be extremely suppressed. When the ambient humidity is 70% or more, the influence of the above conditions and the like is reduced. Especially when the ambient humidity is set to 95% or more, it is found that the By ignoring the influence of drying, the degree of freedom in the design conditions of the ink ejection device of the present invention can be increased and the applicable range can be expanded.

这里,以下的表4表示将喷嘴直径作成φ1及φ3μm,使初期排出液滴直径变动时的排出稳定性及排出圆点直径偏差(落点偏差)。从喷嘴产生的初期排出直径既可通过改变外加电压值加以控制,又可通过调节电压脉冲的脉冲宽度来控制,这里,为了排除同一喷嘴直径下电场强度的影响,通过改变上述脉冲宽度来调节初期排出直径。Here, the following Table 4 shows the discharge stability and discharge dot diameter deviation (falling point deviation) when the nozzle diameter is set to φ1 and φ3 μm and the initial discharge droplet diameter is varied. The initial discharge diameter generated from the nozzle can be controlled by changing the applied voltage value, and can also be controlled by adjusting the pulse width of the voltage pulse. Here, in order to eliminate the influence of the electric field intensity under the same nozzle diameter, the initial discharge diameter is adjusted by changing the above pulse width. discharge diameter.

表4中的排出稳定性的符号中是表示,×:几乎没有排出,△:在10分钟的连续排出中有不排出的情况,○:表示10分钟连续排出中没有不排出的情况,◎:表示30分钟连续排出中没有不排出的情况,偏差的符号中是表示,△:落点圆点的偏差>落点圆点直径×0.2,○:落点圆点的偏差≤落点圆点直径×0.2,◎:落点圆点的偏差≤落点圆点直径×0.1。The symbols of the discharge stability in Table 4 are indicated, ×: almost no discharge, △: there was no discharge during 10 minutes of continuous discharge, ○: no non-discharge during 10 minutes of continuous discharge, ◎: Indicates that there is no non-discharge in 30 minutes of continuous discharge, and the symbol of the deviation is indicated, △: the deviation of the landing point > the diameter of the landing point × 0.2, ○: the deviation of the landing point ≤ the diameter of the landing point ×0.2, ◎: The deviation of the landing point ≦the diameter of the landing point×0.1.

表4   初期排出液滴直径(μm)                           喷嘴直径(μm)         φ1         φ3         φ5   偏差   排出稳定性   偏差   排出稳定性   偏差   排出稳定性   φ1   △   ○   ×   ×   φ1.5   ◎   ◎   ×   ×   φ2   ◎   ◎   ×   ×   φ3   ◎   ○   △   △   ×   φ5   ○   △   ◎   ◎   △   △   φ7   ×   ◎   ○   ◎   ○   φ10   ×   △   ○   ◎   ◎   φ15   ×   △   △   ○   ○   φ20   ×   ×   ○   △ Table 4 Initial discharge droplet diameter (μm) Nozzle diameter (μm) φ1 φ3 φ5 deviation discharge stability deviation discharge stability deviation discharge stability φ1 x x φ1.5 x x φ2 x x φ3 x φ5 φ7 x φ10 x φ15 x φ20 x x

从表4可见,相对于喷嘴直径1.5倍~3倍左右时排出的稳定性好,尤其是1.5倍~2倍时落点圆点直径的偏差受到极端的抑制。这可以认为,是因为将从弯液面部拉伸出的墨水形状看作液柱时、在该液柱的表面积比与该液柱的体积对应的球的表面积大的条件下的液滴分离最为稳定的缘故。It can be seen from Table 4 that when the nozzle diameter is about 1.5 to 3 times the discharge stability is good, especially when the diameter is 1.5 to 2 times, the deviation of the dot diameter of the landing point is extremely suppressed. This is considered to be due to separation of droplets under the condition that the surface area of the liquid column is larger than the surface area of the ball corresponding to the volume of the liquid column when the shape of the ink stretched from the meniscus is regarded as a liquid column. The most stable reason.

采用上述结构,将墨水排出后不久的液滴量为1Pl以下的微小的墨水液滴排出的静电吸引式墨水喷射装置中,通过将喷嘴4的墨水排出孔4b的直径做成墨水排出后不久的液滴直径的同等以下,由于可将用于排出的电场集中于喷嘴4的弯液面部14,故可大幅度地减小排出墨水所需的外加电压,可实现减小一个个地分离、排出的液滴的直径的偏差、且稳定的排出。With the above-mentioned structure, in the electrostatic attraction type ink ejection device in which the droplet amount of the ink is discharged shortly after the discharge is 1 μl or less, the diameter of the ink discharge hole 4b of the nozzle 4 is made to be short after the discharge of the ink. When the droplet diameter is equal or less, since the electric field for discharge can be concentrated on the meniscus 14 of the nozzle 4, the external voltage required to discharge the ink can be greatly reduced, and the separation and separation of each droplet can be reduced. The diameter of the discharged liquid droplets varies and is discharged stably.

另外,不再需要外加以往所需的偏置电压,可正负交替地外加驱动电压,可减轻被记录媒体的表面电位的增加对落点精度的影响。In addition, it is no longer necessary to apply the bias voltage required in the past, and the positive and negative driving voltage can be applied alternately, which can reduce the influence of the increase of the surface potential of the recording medium on the landing accuracy.

另外,通过将喷嘴孔的直径作成φ8μm以下的范围,可将电场集中于喷嘴的弯液面部,同时可不受相对电极的位置精度及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的排出。In addition, by making the diameter of the nozzle hole within the range of φ8μm or less, the electric field can be concentrated on the meniscus surface of the nozzle, and at the same time, it is not affected by the position accuracy of the counter electrode, the material properties of the recording medium, and the thickness variation. Perform stable discharge.

尤其是,通过使喷嘴4的墨水排出孔4b的直径在φ0.2μm以上、φ4μm以下的范围内,电场集中极端增强。这样,由于提高最大电场强度就成为提高墨水的初期排出速度,故飞翔稳定性得到提高,同时由于弯液面部的电荷的移动速度增大,故排出响应性得到提高,同时可抑制瑞利分裂的影响引起的落点圆点直径的偏差。In particular, by setting the diameter of the ink discharge hole 4b of the nozzle 4 within the range of φ0.2 μm to φ4 μm, the electric field concentration is extremely enhanced. In this way, increasing the maximum electric field intensity increases the initial discharge speed of the ink, so the flying stability is improved, and at the same time, the discharge responsiveness is improved due to the increase of the moving speed of the charge on the meniscus surface, and Rayleigh splitting can be suppressed at the same time. The deviation of the drop point diameter caused by the influence of

而且,通过将来自喷嘴4的墨水排出后不久的液滴直径做成喷嘴4的墨水排出孔4b的直径的1.5倍以上、3倍以下的范围内,可提高排出的稳定性,尤其是将墨水排出后不久的液滴直径做成该喷嘴直径的1.5倍~2倍的范围内,就可使排出圆点直径的偏差受到极端的抑制。Moreover, the stability of discharge can be improved by making the diameter of the droplet immediately after the ink from the nozzle 4 is discharged to be within the range of 1.5 times or more and 3 times or less the diameter of the ink discharge hole 4b of the nozzle 4, especially when the ink is discharged. By setting the droplet diameter immediately after discharge within the range of 1.5 to 2 times the nozzle diameter, variation in the discharge dot diameter can be extremely suppressed.

本实施形态中,如上所述,是对墨水室1内的墨水施加负压的例子进行了说明,但也可对墨水施加正压。为了对墨水室1内的墨水施加正压,例如,如图15所示,可以考虑在墨水供给通道6的未图示的墨水罐侧设置泵12,利用该泵12对墨水室1内的墨水施加正压。该场合,只要利用流程控制部13对上述泵12进行驱动控制,以使与墨水从墨水室1排出的时间对应地进行驱动即可。这样,若对墨水室1内的墨水施加正压,则可节省由静电力形成弯液面部的凸形状的麻烦,可降低外加电压及提高响应速度。In this embodiment, as described above, an example in which a negative pressure is applied to the ink in the ink chamber 1 has been described, but a positive pressure may also be applied to the ink. In order to apply a positive pressure to the ink in the ink chamber 1, for example, as shown in FIG. Apply positive pressure. In this case, the flow control unit 13 may control the drive of the pump 12 so as to be driven in accordance with the timing when the ink is discharged from the ink chamber 1 . In this way, when positive pressure is applied to the ink in the ink chamber 1, the trouble of forming the convex shape of the meniscus by electrostatic force can be saved, the applied voltage can be reduced, and the response speed can be improved.

本实施形态中,为了简化说明对具有单一喷嘴的墨水喷射装置进行了说明,但并不局限于此,只要进行考虑了相邻喷嘴的电场强度的影响的设计,也可适用于包括具有多个喷嘴的多头部的墨水喷射装置。In this embodiment, for the sake of simplification, an ink jet device with a single nozzle has been described, but it is not limited thereto. As long as the design takes into account the influence of the electric field strength of adjacent nozzles, it can also be applied to ink jet devices with multiple nozzles. Ink ejection device with multiple heads of nozzles.

而且,本实施形态中,如图1及图15所示,对始终设置相对电极7的墨水喷射装置进行了说明,但从表2可知,相对电极7与喷嘴4的墨水排出孔4b之间的距离(间隙)几乎不对被记录媒体与喷嘴之间的电场强度产生影响,只要该被记录媒体与喷嘴之间的距离近,被记录媒体的表面电位稳定,则不需要相对电极。In addition, in this embodiment, as shown in FIG. 1 and FIG. 15 , the ink ejection device in which the counter electrode 7 is always provided has been described. However, as can be seen from Table 2, the distance between the counter electrode 7 and the ink discharge hole 4b of the nozzle 4 is The distance (gap) hardly affects the electric field strength between the recording medium and the nozzle. As long as the distance between the recording medium and the nozzle is short and the surface potential of the recording medium is stable, the opposing electrode is not required.

如上所述,本发明的静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下。As described above, the electrostatic attraction type fluid ejection device of the present invention discharges the fluid charged by the application of a voltage in the state of droplets under electrostatic attraction from the fluid discharge hole of the nozzle made of an insulating material, and the fluid discharge hole of the nozzle The diameter is set to be equal to or less than the droplet diameter of the fluid immediately after discharge.

由此,本发明将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。Therefore, the present invention sets the diameter of the nozzle to be approximately the same as the diameter of the front end portion of the Taylor cone-shaped charge concentration formed in order to discharge fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the prior art. In the conventional process of electrostatic attraction of fluids, an electric field that needs to be formed in a large area can be formed in a small area.

而且,通过将喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,可使电荷的集中区域与流体的弯液面区域成为大致同等的尺寸。Furthermore, by setting the diameter of the fluid discharge hole of the nozzle to be equal to or less than the droplet diameter of the fluid immediately after discharge, the charge concentration region and the meniscus region of the fluid can be made approximately the same size.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体以所需的液滴直径的液滴的状态进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,可提高使用流体喷射装置时的安全性。Accordingly, it is possible to significantly reduce the voltage required for transferring electric charges, that is, the voltage required for imparting the amount of charge required to electrostatically attract the fluid to the fluid in the state of a droplet having a desired droplet diameter. This eliminates the need for a conventional high voltage of 2000 volts, and improves the safety when using the fluid ejection device.

另外,如上所述,通过使电场狭窄,可在狭窄区域形成强的电场,其结果,可使形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, by narrowing the electric field, a strong electric field can be formed in the narrow region, and as a result, formed droplets can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is approximately the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性的两方面、且通用性好的装置。Therefore, according to the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

另外,本发明的静电吸引式流体喷射装置构成为,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,将该喷嘴的流体排出孔的直径设定在φ8μm以下。In addition, the electrostatic attraction type fluid ejection device of the present invention is configured to discharge the fluid charged by the application of a voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of an insulating material under electrostatic attraction, and discharge the fluid from the nozzle. The diameter of the hole is set at φ8 μm or less.

由此,本发明将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。Therefore, the present invention sets the diameter of the nozzle to be approximately the same as the diameter of the front end portion of the Taylor cone-shaped charge concentration formed in order to discharge fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the prior art. In the conventional process of electrostatic attraction of fluids, an electric field that needs to be formed in a large area can be formed in a small area.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,由于不需要以往那样的2000伏这样的高电压,故可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. As a result, since a conventional high voltage of 2000 volts is unnecessary, the safety when using the fluid ejection device can be improved.

而且,通过将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, by setting the diameter of the fluid discharge hole of the nozzle at φ8μm or less, the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect Electric field strength distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体的排出。As a result, the fluid can be discharged stably without being affected by the positional accuracy of the counter electrode and the variation in material properties and thickness of the recording medium.

另外,如上所述,能使电场形成得小,在小的区域形成强电场,其结果,可使能形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, the electric field can be made small, and a strong electric field can be formed in a small area, and as a result, the droplet that can be formed can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is approximately the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

通过对施加于上述流体的电压进行控制,可调节排出流体的液滴量(液滴的体积和直径)。因此,也可具有对施加于流体的电压进行控制的施加电压控制装置,以使从上述流体排出孔排出后不久的流体的液滴量为1Pl以下。By controlling the voltage applied to the fluid, the droplet volume (volume and diameter of the droplet) of the discharged fluid can be adjusted. Therefore, an applied voltage control device for controlling the voltage applied to the fluid may be provided so that the droplet volume of the fluid immediately after being discharged from the fluid discharge hole is 1 Pl or less.

另外,也可将上述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。In addition, the diameter of the fluid discharge hole of the nozzle may be set to φ0.2 μm or more and φ4 μm or less.

该场合,通过将喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下,电场集中极端增强而能提高最大电场强度。其结果,能稳定地排出直径小的微小的液滴。In this case, by setting the diameter of the fluid discharge hole of the nozzle to φ0.2 μm or more and φ4 μm or less, the electric field concentration is extremely enhanced and the maximum electric field intensity can be increased. As a result, fine liquid droplets having a small diameter can be stably discharged.

既可利用上述施加电压控制装置对施加于流体的电压进行控制,以将来自上述流体排出孔排出后不久的液滴直径做成该流体排出孔的直径的1.5倍以上、3倍以下,也可进一步对施加于流体的电压进行控制,以将从上述流体排出孔排出后不久的液滴直径做成该流体排出孔的直径的1.5倍以上、2倍以下。The voltage applied to the fluid may be controlled by the above-mentioned applied voltage control device so that the diameter of the droplet immediately after being discharged from the above-mentioned fluid discharge hole is 1.5 times or more and 3 times or less the diameter of the fluid discharge hole. Further, the voltage applied to the fluid is controlled so that the diameter of the droplet immediately after being discharged from the fluid discharge hole is 1.5 times or more and 2 times or less the diameter of the fluid discharge hole.

该场合,通过将从流体排出孔排出后不久的液滴直径(初期排出液滴直径)做成流体排出孔的直径的1.5倍至3倍时,可提高流体排出的稳定性。尤其是将从流体排出孔排出后不久的液滴直径做成流体排出孔的直径的1.5倍~2倍,就可使流体排出后到达被记录媒体上时落点圆点直径的偏差受到极端的抑制。In this case, the stability of fluid discharge can be improved by setting the droplet diameter immediately after discharge from the fluid discharge hole (initial discharge droplet diameter) to 1.5 to 3 times the diameter of the fluid discharge hole. Especially if the diameter of the liquid droplet discharged from the fluid discharge hole is made 1.5 times to 2 times the diameter of the fluid discharge hole, the deviation of the droplet diameter when the fluid is discharged and arrives on the recording medium is extremely reduced. inhibition.

另外,本发明的静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,具有对施加于所述喷嘴内的流体电压进行控制的外加电压控制部,构成为:将该喷嘴的流体排出孔的直径设定在φ8μm以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下。In addition, the electrostatic attraction type fluid ejection device of the present invention discharges the fluid charged by the application of voltage in the state of liquid droplets from the fluid discharge hole of the nozzle made of insulating material under electrostatic attraction, and has The applied voltage control unit that controls the fluid voltage is configured to: set the diameter of the fluid discharge hole of the nozzle to φ8 μm or less, and the applied voltage control unit controls the voltage applied to the fluid so that from the The amount of charge induced in a droplet of the fluid immediately after being discharged from the fluid discharge hole is 90% or less of the amount of charge corresponding to the Rayleigh limit of the droplet.

由此,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。Therefore, in the present invention, the diameter of the nozzle is set to be approximately the same as the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the prior art. Similarly, the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2000 volts, and improves the safety when using the fluid ejection device.

而且,通过将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, by setting the diameter of the fluid discharge hole of the nozzle at φ8μm or less, the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect Electric field strength distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,由于能使电场形成得小,故能在小的区域形成强电场,其结果,可使形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, since the electric field can be made small, a strong electric field can be formed in a small area, and as a result, the formed liquid droplets can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,由于所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下,因而可防止排出的液滴的干燥使液滴表面积减小而引起的放电,同时可防止液滴带电引起的蒸汽压力的减小。Furthermore, since the applied voltage control unit controls the voltage applied to the fluid so that the amount of charge induced in the liquid droplet of the fluid immediately after being discharged from the fluid discharge hole becomes equivalent to that of the liquid droplet. 90% of the limit charge amount, thus preventing the discharge caused by the reduction of the surface area of the droplets due to the drying of the discharged droplets, and at the same time preventing the reduction of the vapor pressure caused by the electrification of the droplets.

由此,可降低排出的液滴的干燥时间(至液滴的溶剂全部蒸发为止的时间)的减小,可消除到达落点的液滴的圆点直径的尺寸的偏差。This reduces the drying time of the discharged liquid droplets (the time until the solvent of the liquid droplets evaporates completely), and eliminates the variation in the size of the dot diameter of the liquid droplets that reach the landing point.

另外,由于排出的液滴的干燥时间变长,故可减小液滴弹射到之前液滴的直径、即液滴量的变化。由此,由于飞翔中的液滴受到的空气阻力和周围湿度等环境条件对各液滴是均匀的,故可提高液滴的落点精度,即可抑制落点时的液滴的偏差。In addition, since the drying time of the discharged liquid droplets becomes longer, it is possible to reduce the change in the diameter of the liquid droplets before they are ejected, that is, the amount of liquid droplets. As a result, since the environmental conditions such as air resistance and ambient humidity experienced by the flying droplets are uniform for each droplet, the accuracy of the landing of the droplets can be improved, and the variation of the droplets at the time of landing can be suppressed.

而且,因为排出的液滴的干燥时间延长,故即使排出液滴的直径是φ5μm程度的微小的液滴,液滴也可在不干燥的情况下到达落点。Furthermore, since the drying time of the discharged liquid droplets is prolonged, even if the diameter of the discharged liquid droplets is as small as φ5 μm, the liquid droplets can reach the landing point without being dried.

因此,通过使用上述结构的静电吸引式流体喷射装置,可稳定地排出微小的液滴,同时可高精度地到达落点。Therefore, by using the electrostatic attraction type fluid ejection device configured as described above, it is possible to stably discharge fine liquid droplets and reach the landing point with high precision.

为了使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下,可考虑以下方法。In order to reduce the amount of charge induced in a fluid droplet immediately after being discharged from the fluid discharge hole to 90% or less of the charge amount corresponding to the Rayleigh limit of the droplet, the following method can be considered.

即,本发明的静电吸引式流体喷射装置,为了解决上述问题,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应的电荷量成为相当于所述弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限的电荷量以下。That is, the electrostatic attraction type fluid ejection device of the present invention, in order to solve the above-mentioned problems, the fluid charged by the application of voltage is discharged from the fluid discharge hole of the nozzle made of insulating material in the state of liquid droplets under electrostatic attraction, and has the ability to apply The applied voltage control unit that controls the voltage of the fluid in the nozzle sets the diameter of the fluid discharge hole of the nozzle to be equal to or less than the droplet diameter of the fluid immediately after discharge, and the applied voltage control unit applies The voltage on the fluid is controlled so that the amount of charge induced in the liquid droplet of the fluid immediately after being discharged from the fluid discharge hole becomes equivalent to that caused by the maximum electric field strength of the meniscus immediately after the fluid is discharged. The charge amount is below the Rayleigh limit at the droplet diameter.

所述外加电压控制部也可对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的60%以上。The applied voltage control unit may control the voltage applied to the fluid so that the amount of charge induced in the fluid droplet immediately after being discharged from the fluid discharge hole becomes equivalent to the Rayleigh value of the droplet. More than 60% of the limit charge.

一般来说,带电的液滴,蒸汽压力因该液滴的表面的带电的电荷量(带电量)而减小,带电量过小时,对蒸发的缓和没有影响。具体地说,在比与液滴的瑞利极限相当的电荷量的60%少的电荷量的场合,对液滴蒸发的缓和没有影响。In general, the vapor pressure of a charged droplet is reduced by the amount of charge (charge amount) charged on the surface of the droplet, and if the charge amount is too small, there is no effect on relaxation of evaporation. Specifically, when the charge amount is less than 60% of the charge amount corresponding to the Rayleigh limit of the droplet, there is no influence on the mitigation of droplet evaporation.

因此,最好将从流体排出孔排出后不久的流体的液滴中感应出的电荷量设定在相当于液滴的瑞利极限的电荷量的60%以上、90%以下。Therefore, it is preferable to set the charge amount induced in the fluid droplet immediately after being discharged from the fluid discharge hole to 60% or more and 90% or less of the charge amount corresponding to the Rayleigh limit of the droplet.

为了使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的60%以上,可考虑以下方法。In order to make the charge amount induced in the fluid droplet immediately after being discharged from the fluid discharge hole be 60% or more of the charge amount corresponding to the Rayleigh limit of the droplet, the following method can be considered.

即,上述施加电压控制装置对施加于上述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应的电荷量成为相当于所述流体的弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限的电荷量的0.8倍以上。That is, the applied voltage control device controls the voltage applied to the fluid so that the amount of charge induced in the fluid droplet immediately after being discharged from the fluid discharge hole becomes the maximum value corresponding to the meniscus of the fluid. The electric field strength induces a charge amount greater than 0.8 times the Rayleigh limit under the droplet diameter shortly after the fluid is expelled.

将上述喷嘴的流体排出孔的直径设定在φ5μm以下为佳,最好是将上述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。The diameter of the fluid discharge hole of the nozzle is preferably set at φ5 μm or less, and more preferably the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less.

该场合,通过将喷嘴的流体排出孔的直径设定在φ5μm以下,电场强度集中,电场集中极端增强,最大电场强度增大,其结果,可提高液滴的带电效率。而且,为了改善液滴的带电效率,最好将喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。该场合,电场集中极端增强,最大电场强度增大,其结果,能稳定地排出直径小的微小的液滴。In this case, by setting the diameter of the fluid discharge hole of the nozzle to φ5 μm or less, the electric field intensity is concentrated, the electric field concentration is extremely enhanced, and the maximum electric field intensity is increased. As a result, the charging efficiency of droplets can be improved. Furthermore, in order to improve the charging efficiency of the droplets, it is preferable to set the diameter of the fluid discharge hole of the nozzle to φ0.2 μm or more and φ4 μm or less. In this case, the concentration of the electric field is extremely enhanced, and the maximum electric field intensity is increased. As a result, fine liquid droplets having a small diameter can be stably discharged.

另外,本发明的静电吸引式流体喷射装置,构成为:将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度向被记录媒体排出,具有对施加于所述喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定在φ8μm以下,所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体的排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。In addition, the electrostatic attraction type fluid ejection device of the present invention is configured such that the fluid charged by the application of a voltage is electrostatically attracted in a liquid droplet state from the fluid discharge hole of the nozzle made of an insulating material in accordance with the applied voltage. The speed is discharged to the recording medium, and there is an applied voltage control part that controls the voltage applied to the fluid in the nozzle. The diameter of the fluid discharge hole of the nozzle is set at φ8μm or less. The voltage of the fluid is controlled so that the average discharge velocity from the discharge of the fluid to the recording medium is 10 m/s or more and 40 m/s or less.

由此,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。Therefore, in the present invention, the diameter of the nozzle is set to be approximately the same as the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the prior art. Similarly, the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,故可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2000 volts, thereby improving the safety when using the fluid ejection device.

而且,通过将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, by setting the diameter of the fluid discharge hole of the nozzle at φ8μm or less, the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect Electric field strength distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,由于能使电场形成得小,故能在小的区域形成强电场,其结果,可使形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, since the electric field can be made small, a strong electric field can be formed in a small area, and as a result, the formed liquid droplets can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is approximately the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,通过所述外加电压控制部对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下,可减轻流体飞翔中的干燥的影响,其结果,可提高被记录媒体上的液滴的落点精度,且可抑制液滴落点圆点直径的偏差,同时可防止在弯液面部的电场强度的影响引起的排出液滴的雾化的发生,可稳定地排出。Moreover, the voltage applied to the fluid is controlled by the applied voltage control unit so that the average discharge speed during the period from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. Due to the influence of drying during the flight of the fluid, as a result, the accuracy of the droplet landing on the recording medium can be improved, and the deviation of the diameter of the droplet landing point can be suppressed, and the electric field intensity at the meniscus can be prevented. Occurrence of atomization of the discharged liquid droplets caused by the impact can be stably discharged.

这里,若流体到达被记录媒体期间的平均排出速度小于10m/s,则落点精度差,排出稳定性也差,故液滴的落点圆点直径产生偏差。另外,若流体到达被记录媒体期间的平均排出速度大于40m/s,则需要高电压,故弯液面部的电场强度变得非常强,排出的液滴频繁地发生雾化,无法稳定地排出液滴。Here, if the average discharge speed of the fluid reaches the recording medium is less than 10m/s, the landing accuracy is poor, and the discharge stability is also poor, so the diameter of the droplet's landing spot varies. In addition, if the average discharge velocity during the period when the fluid reaches the recording medium is greater than 40m/s, a high voltage is required, so the electric field strength at the meniscus becomes very strong, and the discharged droplets are frequently atomized and cannot be discharged stably. droplet.

因此,如上述结构的静电吸引式流体喷射装置那样,通过使从流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下,可使液滴稳定地飞翔,其结果,可提高液滴的落点精度,且可抑制液滴落点圆点直径的偏差。Therefore, like the electrostatic attraction type fluid ejection device of the above-mentioned structure, by making the average discharge velocity during the period from the fluid discharge to the recording medium to be 10 m/s or more and 40 m/s or less, the liquid droplets can be stably flew, and as a result , can improve the drop point accuracy, and can suppress the deviation of the droplet point diameter deviation.

将上述喷嘴的流体排出孔的直径设定在φ5μm以下为佳,最好是将上述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。The diameter of the fluid discharge hole of the nozzle is preferably set at φ5 μm or less, and more preferably the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less.

该场合,通过将喷嘴的流体排出孔的直径设定在φ5μm以下,电场强度集中,电场集中极端增强,最大电场强度增大,其结果,可提高液滴的带电效率。而且,为了改善液滴的带电效率,最好将喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。该场合,电场集中极端增强,最大电场强度增大,其结果,能稳定地排出直径小的微小的液滴。In this case, by setting the diameter of the fluid discharge hole of the nozzle to φ5 μm or less, the electric field intensity is concentrated, the electric field concentration is extremely enhanced, and the maximum electric field intensity is increased. As a result, the charging efficiency of droplets can be improved. Furthermore, in order to improve the charging efficiency of the droplets, it is preferable to set the diameter of the fluid discharge hole of the nozzle to φ0.2 μm or more and φ4 μm or less. In this case, the concentration of the electric field is extremely enhanced, and the maximum electric field intensity is increased. As a result, fine liquid droplets having a small diameter can be stably discharged.

另外,上述结构的静电吸引式流体喷射装置也可由以下结构实现。In addition, the electrostatic attraction type fluid ejection device configured as described above can also be realized by the following configuration.

即,本发明的静电吸引式流体喷射装置,构成为:将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度向被记录媒体排出,具有对施加于该喷嘴内的流体的电压进行控制的外加电压控制部,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,所述外加电压控制部也可对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。That is, the electrostatic attraction type fluid ejection device of the present invention is configured such that a fluid charged by application of a voltage is electrostatically attracted in a liquid droplet state from a fluid discharge hole of a nozzle made of an insulating material in accordance with an applied voltage. The speed is discharged to the recording medium, and there is an applied voltage control unit that controls the voltage applied to the fluid in the nozzle, and the diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge. The applied voltage control unit may control the voltage applied to the fluid so that the average discharge speed from the discharge of the fluid to the recording medium is 10 m/s or more and 40 m/s or less.

另外,本发明的静电吸引式流体喷射装置,构成为:将含有微粒子并通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,该喷嘴的流体排出孔的直径设定在φ8μm以下,所述流体中含有的微粒子的粒径在φ30nm以下。In addition, the electrostatic attraction type fluid ejection device of the present invention is configured to discharge a fluid containing fine particles and charged by applying a voltage in the state of droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material. The diameter of the fluid discharge hole is set below φ8μm, and the particle size of the microparticles contained in the fluid is below φ30nm.

由此,由于在本发明中将喷嘴直径设定为:与以往的为了排出比喷嘴的流体排出孔的直径小的液滴直径的流体而形成的泰勒锥形状的电荷集中的前端部的直径大致相同,故在以往的流体的静电吸引过程中需要大范围形成的电场能在小范围形成。Therefore, in the present invention, the diameter of the nozzle is set to be approximately the same as the diameter of the front end portion of the Taylor cone shape formed in order to discharge a fluid having a droplet diameter smaller than the diameter of the fluid discharge hole of the nozzle in the prior art. Similarly, the electric field that needs to be formed in a large area can be formed in a small area in the conventional electrostatic attraction process of fluid.

由此,可大幅度地降低为了将电荷移动所需的电压、即为了将对流体进行静电吸引所需的带电量赋予该流体所需的电压。由此,不需要以往那样的2000伏这样的高电压,可提高使用流体喷射装置时的安全性。Thereby, the voltage required for moving electric charges, that is, the voltage required for imparting a charge amount required for electrostatic attraction to the fluid can be significantly reduced. This eliminates the need for a conventional high voltage of 2000 volts, and improves the safety when using the fluid ejection device.

而且,将喷嘴的流体排出孔的直径设定在φ8μm以下,因而可使电场强度分布集中于该流体排出孔的排出面附近,同时从相对电极至喷嘴的流体突出孔的距离变动不会影响电场强度分布。Moreover, the diameter of the fluid discharge hole of the nozzle is set below φ8 μm, so that the electric field intensity distribution can be concentrated near the discharge surface of the fluid discharge hole, and the distance variation from the opposite electrode to the fluid protrusion hole of the nozzle will not affect the electric field. intensity distribution.

由此,可不受相对电极的位置精度以及被记录媒体的材料特性的偏差和厚度偏差的影响,能进行稳定的流体排出。As a result, stable fluid discharge can be performed without being affected by the positional accuracy of the counter electrode, or the material property variation and thickness variation of the recording medium.

另外,如上所述,由于能使电场形成得小,故能在小的区域形成强电场,其结果,可使形成的液滴微小化。由此,将液滴作为墨水时,可使印字图像做成高分辨率。In addition, as described above, since the electric field can be made small, a strong electric field can be formed in a small area, and as a result, the formed liquid droplets can be miniaturized. As a result, when liquid droplets are used as ink, it is possible to make a high-resolution printed image.

而且,如上所述,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因而电荷在弯液面区域内的移动时间不会对排出响应性产生影响,可提高液滴的排出速度(液滴是墨水时的印字速度)。Furthermore, as described above, since the concentration area of the charge is substantially the same size as the meniscus area of the fluid, the movement time of the charge in the meniscus area does not affect the discharge responsiveness, and the droplet discharge can be improved. Speed (printing speed when the droplet is ink).

另外,由于电荷的集中区域与流体的弯液面区域成为大致同等的尺寸,因此不需要在大的范围的弯液面区域形成强的电场。由此,不需要像以往那样,为了在大范围的弯液面区域形成强大电场而高精度地配置相对电极,并且,被记录媒体的介电常数及厚度不影响相对电极的配置。In addition, since the charge concentration region is substantially the same size as the meniscus region of the fluid, it is not necessary to form a strong electric field in a wide meniscus region. Therefore, it is not necessary to arrange the counter electrode with high precision in order to form a strong electric field in a wide meniscus region as in the past, and the dielectric constant and thickness of the recording medium do not affect the arrangement of the counter electrode.

因此,在静电吸引式流体喷射装置中,相对电极配置的自由度增大。即,静电吸引式流体喷射装置的设计自由度增大。其结果,可不受介电常数及厚度的影响,对以往难以使用的被记录媒体能进行印字,可实现通用性好的流体喷射装置。Therefore, in the electrostatic attraction type fluid ejection device, the degree of freedom in the arrangement of the opposing electrodes increases. That is, the degree of freedom in design of the electrostatic attraction type fluid ejection device increases. As a result, it is possible to print on a recording medium that has been difficult to use without being affected by the dielectric constant and thickness, and a fluid ejection device with good versatility can be realized.

因此,采用具有上述结构的静电吸引式流体喷射装置,可实现既可满足高分辨率和安全性两方面、且通用性好的装置。Therefore, by using the electrostatic attraction type fluid ejection device having the above structure, it is possible to realize a device that satisfies both high resolution and safety and has good versatility.

这里,作为上述流体,可使用单纯的水、油等以外,还可使用含有作为微粒子的染料或颜料的有色液体即墨水、含有形成电路板的配线材料(银或铜等导电性微粒子)的溶液等。Here, as the above-mentioned fluid, in addition to simple water, oil, etc., colored liquid ink containing dye or pigment as fine particles, or ink containing a wiring material (conductive fine particles such as silver or copper) that forms a circuit board can also be used. solution etc.

例如,作为流体使用墨水时,可进行高精细的印字,作为流体使用含有形成电路板的配线材料的溶液时,能以线宽非常窄的配线形成超高精细电路,不管是哪种情况,都能使流体稳定地排出。For example, when ink is used as the fluid, high-definition printing is possible, and when a solution containing wiring materials for circuit boards is used as the fluid, ultra-high-definition circuits can be formed with extremely narrow wiring. , can make the fluid discharge stably.

而且,由于上述流体中含有的微粒子的粒径在φ30nm以下,因而可减轻微粒子本身带电的影响,即使液滴中含有微粒子也能稳定地进行排出。Furthermore, since the particle size of the fine particles contained in the above-mentioned fluid is φ30nm or less, the influence of the charging of the fine particles themselves can be reduced, and stable discharge can be performed even if the liquid droplets contain fine particles.

另外,因为可减轻微粒子本身带电的影响,故不会发生像以往利用微粒子的带电进行排出流体时那样、粒径小时微粒子的移动变慢的情况。因此,含有微粒子的流体,即使例如是墨水,也不会使记录速度下降。In addition, since the influence of the charging of the fine particles themselves can be reduced, the movement of the fine particles with small particle diameters does not slow down as in the conventional case of discharging fluid by using the charging of the fine particles. Therefore, even if the fluid containing fine particles is, for example, ink, the recording speed will not decrease.

另外,上述流体中含有的微粒子的粒径最好在φ1nm以上、φ10nm以下。In addition, the particle size of the fine particles contained in the fluid is preferably not less than φ1 nm and not more than φ10 nm.

而且,上述喷嘴的流体排出孔的直径也可设定在φ0.2μm以上、φ4μm以下。In addition, the diameter of the fluid discharge hole of the nozzle may be set to φ0.2 μm or more and φ4 μm or less.

该场合,通过将喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下,电场集中极端增强,最大电场强度增大。其结果,能稳定地排出直径小的微小的液滴。In this case, by setting the diameter of the fluid discharge hole of the nozzle to φ0.2 μm or more and φ4 μm or less, the electric field concentration is extremely enhanced and the maximum electric field intensity is increased. As a result, fine liquid droplets having a small diameter can be stably discharged.

另外,上述结构的静电吸引式流体喷射装置也可由以下结构实现。In addition, the electrostatic attraction type fluid ejection device configured as described above can also be realized by the following configuration.

即,本发明的静电吸引式流体喷射装置,构成为:将含有微粒子且通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,将该喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,该流体中含有的微粒子的粒径也可在φ30nm以下。That is, the electrostatic attraction type fluid ejection device of the present invention is configured to discharge a fluid containing fine particles and charged by applying a voltage in the state of liquid droplets from the fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, and the The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, and the particle size of the fine particles contained in the fluid may be φ30nm or less.

用于实施本发明的最佳形态的项中构成的具体的实施形态或实施例只不过是为了说明本发明的技术内容的,不应该限定于这样的具体例子进行狭义地解释,可在本发明的精神和以下记载的权利要求的范围内进行各种变更加以实施。The specific implementation forms or examples constituted in the item of the best form for implementing the present invention are only to illustrate the technical content of the present invention, and should not be limited to such specific examples for narrow interpretation, and can be used in the present invention Various modifications can be made within the spirit of the invention and the scope of the claims described below.

[产业上利用的可能性][possibility of industrial use]

本发明的静电吸引式流体喷射装置,可适用于作为流体排出墨水进行印刷的墨水喷射头,而且,如作为流体使用导电性流体,则也可适用于存在需要形成微细的配线的电路板的制造装置,而且,除了配线用途以外,还可应用于所有的印刷用途、图像形成、蛋白质或DNA等生物材料的图案形成、联合化学(日文:コンビナトリアルケミストリ一)等,另外,也可利用于滤色镜、有机EL(Electro luminescence:场致发光)、FED(碳管(日文:カ一ボンナノチユ一ブ)的图案形成)、陶瓷的图案形成。The electrostatic attraction type fluid ejection device of the present invention can be applied to an ink ejection head that discharges ink as a fluid for printing, and if a conductive fluid is used as the fluid, it can also be applied to a circuit board where fine wiring needs to be formed. In addition to wiring applications, it can also be applied to all printing applications, image formation, pattern formation of biological materials such as proteins or DNA, joint chemistry (Japanese: コンビナナトリアルケミストリ 1), etc., and can also be used in Patterning of color filters, organic EL (Electro luminescence: electroluminescence), FED (carbon tube (Japanese: カ一ボンナノチユーブ) patterning), ceramic patterning.

Claims (37)

1.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,1. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets from a fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, characterized in that, 所述喷嘴的流体排出孔的直径设定在φ8μm以下。The diameter of the fluid discharge hole of the nozzle is set at φ8 μm or less. 2.如权利要求1所述的静电吸引式流体喷射装置,其特征在于,2. The electrostatic attraction fluid ejection device of claim 1, wherein: 为了调节从流体排出孔排出的液滴量,具有对施加于流体的电压进行控制的施加电压控制装置,In order to adjust the amount of liquid droplets discharged from the fluid discharge hole, there is an applied voltage control device that controls the voltage applied to the fluid, 所述施加电压控制装置对施加于流体的电压进行控制,使从所述流体排出孔排出后不久的流体液滴量为1Pl以下。The applied voltage control device controls the voltage applied to the fluid so that the amount of fluid droplets immediately after being discharged from the fluid discharge hole is 1 Pl or less. 3.如权利要求1所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。3. The electrostatic attraction type fluid ejection device according to claim 1, wherein the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less. 4.如权利要求2所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于流体的电压进行控制,使从所述流体排出孔排出后不久的液滴直径成为该流体排出孔的直径的1.5倍以上、3倍以下。4. The electrostatic attraction type fluid ejection device according to claim 2, wherein the applied voltage control means controls the voltage applied to the fluid so that the diameter of the liquid droplet immediately after being discharged from the fluid discharge hole becomes The diameter of the fluid discharge hole is not less than 1.5 times and not more than 3 times. 5.如权利要求2所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于流体的电压进行控制,使从所述流体排出孔排出后不久的液滴直径成为该流体排出孔的直径的1.5倍以上、2倍以下。5. The electrostatic attraction type fluid ejection device according to claim 2, wherein the applied voltage control means controls the voltage applied to the fluid so that the diameter of the liquid droplet immediately after being discharged from the fluid discharge hole becomes The diameter of the fluid discharge hole is not less than 1.5 times and not more than 2 times. 6.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,6. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets from a fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, characterized in that, 所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下。The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge. 7.如权利要求6所述的静电吸引式流体喷射装置,其特征在于,7. The electrostatic attraction fluid ejection device of claim 6, wherein: 为了调节从流体排出孔排出的液滴量,具有对施加于流体的电压进行控制的施加电压控制装置,In order to adjust the amount of liquid droplets discharged from the fluid discharge hole, there is an applied voltage control device that controls the voltage applied to the fluid, 所述施加电压控制装置对施加于流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴量为1Pl以下。The applied voltage control device controls the voltage applied to the fluid so that the droplet amount of the fluid immediately after being discharged from the fluid discharge hole is 1 Pl or less. 8.如权利要求6所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。8. The electrostatic attraction type fluid ejection device according to claim 6, wherein the diameter of the fluid discharge hole of the nozzle is set to φ0.2 μm or more and φ4 μm or less. 9.如权利要求7所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于流体的电压进行控制,使从所述流体排出孔排出后不久的液滴直径成为该流体排出孔的直径的1.5倍以上、3倍以下。9. The electrostatic attraction type fluid ejection device according to claim 7, wherein the applied voltage control means controls the voltage applied to the fluid so that the diameter of the liquid droplet immediately after being discharged from the fluid discharge hole becomes The diameter of the fluid discharge hole is not less than 1.5 times and not more than 3 times. 10.如权利要求7所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于流体的电压进行控制,使从所述流体排出孔排出后不久的液滴直径成为该流体排出孔的直径的1.5倍以上、2倍以下。10. The electrostatic attraction type fluid ejection device according to claim 7, wherein the applied voltage control means controls the voltage applied to the fluid so that the diameter of the liquid droplet immediately after being discharged from the fluid discharge hole becomes The diameter of the fluid discharge hole is not less than 1.5 times and not more than 2 times. 11.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,11. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets from a fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, characterized in that, 具有对施加于所述喷嘴内的流体的电压进行控制的施加电压控制装置,having an applied voltage control means for controlling the voltage applied to the fluid in the nozzle, 将所述喷嘴的流体排出孔的直径设定在φ8μm以下,The diameter of the fluid discharge hole of the nozzle is set at φ8μm or less, 所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限电荷量的90%以下。The applied voltage control means controls the voltage applied to the fluid so that the amount of charge induced in a droplet of the fluid immediately after being discharged from the fluid discharge hole becomes equivalent to the Rayleigh limit charge of the droplet. less than 90% of the amount. 12.如权利要求11所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限电荷量的60%以上。12. The electrostatic attraction type fluid ejection device according to claim 11, wherein the applied voltage control means controls the voltage applied to the fluid so that the fluid immediately after being discharged from the fluid discharge hole The amount of electric charge induced in the droplet becomes 60% or more of the Rayleigh limit charge amount of the droplet. 13.如权利要求11所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ5μm以下。13. The electrostatic attraction type fluid ejection device according to claim 11, wherein the diameter of the fluid discharge hole of the nozzle is set to φ5 μm or less. 14.如权利要求11所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。14. The electrostatic attraction type fluid ejection device according to claim 11, wherein the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less. 15.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,15. An electrostatic attraction type fluid ejection device, which discharges a fluid charged by applying a voltage in the state of liquid droplets from a fluid discharge hole of a nozzle made of an insulating material under electrostatic attraction, characterized in that, 具有对施加于所述喷嘴内的流体的电压进行控制的施加电压控制装置,having an applied voltage control means for controlling the voltage applied to the fluid in the nozzle, 将所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, 所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于所述弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限的电荷量以下。The applied voltage control means controls the voltage applied to the fluid so that the amount of charge induced in the fluid droplet immediately after being discharged from the fluid discharge hole becomes a maximum electric field corresponding to the meniscus. The intensity of the charge induced by the fluid discharge shortly after the droplet diameter falls below the Rayleigh limit. 16.如权利要求15所述的静电吸引式流体喷射装置,其特征在于,所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于所述弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限电荷量的0.8倍以上。16. The electrostatic attraction type fluid ejection device according to claim 15, wherein the applied voltage control means controls the voltage applied to the fluid so that the fluid immediately after being discharged from the fluid discharge hole The amount of charge induced in the liquid droplet is 0.8 times or more the Rayleigh limit charge amount corresponding to the droplet diameter immediately after the fluid is discharged due to the maximum electric field strength of the meniscus. 17.如权利要求15所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ5μm以下。17. The electrostatic attraction type fluid ejection device according to claim 15, wherein the diameter of the fluid discharge hole of the nozzle is set to φ5 μm or less. 18.如权利要求15所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。18. The electrostatic attraction type fluid ejection device according to claim 15, wherein the diameter of the fluid discharge hole of the nozzle is set to φ0.2 μm or more and φ4 μm or less. 19.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度而向被记录媒体排出,其特征在于,19. An electrostatic attraction type fluid ejection device, in which a fluid charged by applying a voltage is electrostatically attracted to a liquid droplet from a fluid discharge hole of a nozzle made of an insulating material at a speed corresponding to the applied voltage. The recording medium is discharged, characterized in that, 具有对施加于所述喷嘴内的流体的电压进行控制的施加电压控制装置,having an applied voltage control means for controlling the voltage applied to the fluid in the nozzle, 将所述喷嘴的流体排出孔的直径设定在φ8μm以下,The diameter of the fluid discharge hole of the nozzle is set at φ8μm or less, 所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。The applied voltage control device controls the voltage applied to the fluid so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. 20.如权利要求19所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ5μm以下。20. The electrostatic attraction type fluid ejection device according to claim 19, wherein the diameter of the fluid discharge hole of the nozzle is set to φ5 μm or less. 21.如权利要求19所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。21. The electrostatic attraction type fluid ejection device according to claim 19, wherein the diameter of the fluid discharge hole of the nozzle is set to φ0.2 μm or more and φ4 μm or less. 22.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度而向被记录媒体排出,其特征在于,22. An electrostatic attraction type fluid ejection device, in which a fluid charged by applying a voltage is electrostatically attracted to a liquid droplet from a fluid discharge hole of a nozzle made of an insulating material at a speed corresponding to the applied voltage. The recording medium is discharged, characterized in that, 具有对施加于所述喷嘴内的流体的电压进行控制的施加电压控制装置,having an applied voltage control means for controlling the voltage applied to the fluid in the nozzle, 将所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, 所述施加电压控制装置对施加于所述流体的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。The applied voltage control device controls the voltage applied to the fluid so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. 23.如权利要求22所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ5μm以下。23. The electrostatic attraction type fluid ejection device according to claim 22, wherein the diameter of the fluid discharge hole of the nozzle is set to φ5 μm or less. 24.如权利要求22所述的静电吸引式流体喷射装置,其特征在于,将所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。24. The electrostatic attraction type fluid ejection device according to claim 22, wherein the diameter of the fluid discharge hole of the nozzle is set to φ0.2 μm or more and φ4 μm or less. 25.一种静电吸引式流体喷射装置,将含有微粒子并通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,25. An electrostatic attraction type fluid ejection device, which discharges a fluid containing fine particles and charged by applying a voltage in the state of droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 所述喷嘴的流体排出孔的直径设定在φ8μm以下,The diameter of the fluid discharge hole of the nozzle is set below φ8μm, 所述流体中含有的微粒子的粒径在φ30nm以下。The particle size of the fine particles contained in the fluid is φ30nm or less. 26.如权利要求25所述的静电吸引式流体喷射装置,其特征在于,所述流体中含有的微粒子的粒径在φ1nm以上、φ10nm以下。26. The electrostatic attraction type fluid ejection device according to claim 25, wherein the particle size of the fine particles contained in the fluid is not less than φ1 nm and not more than φ10 nm. 27.如权利要求25所述的静电吸引式流体喷射装置,其特征在于,所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。27. The electrostatic attraction type fluid ejection device according to claim 25, wherein the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less. 28.一种静电吸引式流体喷射装置,将含有微粒子且通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,28. An electrostatic attraction type fluid ejection device that discharges a fluid containing fine particles and charged by applying a voltage in the state of droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 将所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, 所述流体中含有的微粒子的粒径在φ30nm以下。The particle size of the fine particles contained in the fluid is φ30nm or less. 29.如权利要求28所述的静电吸引式流体喷射装置,其特征在于,所述流体中含有的微粒子的粒径在φ1nm以上、φ10nm以下。29. The electrostatic attraction type fluid ejection device according to claim 28, wherein the particle size of the fine particles contained in the fluid is not less than φ1 nm and not more than φ10 nm. 30.如权利要求28所述的静电吸引式流体喷射装置,其特征在于,所述喷嘴的流体排出孔的直径设定在φ0.2μm以上、φ4μm以下。30. The electrostatic attraction fluid ejection device according to claim 28, wherein the diameter of the fluid discharge hole of the nozzle is set at φ0.2 μm or more and φ4 μm or less. 31.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,31. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,具有:The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, having: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,使从所述流体排出孔排出后不久的流体的液滴量为1Pl以下。The flow control unit controls the voltage applied to the electrodes so that the droplet volume of the fluid immediately after being discharged from the fluid discharge hole is 1 Pl or less. 32.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,32. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 所述喷嘴的流体排出孔的直径设定为φ8μm以下,具有:The diameter of the fluid discharge hole of the nozzle is set to be below φ8μm, with: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,使从所述流体排出孔排出后不久的流体的液滴量为1Pl以下。The flow control unit controls the voltage applied to the electrodes so that the droplet volume of the fluid immediately after being discharged from the fluid discharge hole is 1 Pl or less. 33.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,33. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 所述喷嘴的流体排出孔的直径设定为φ8μm以下,具有:The diameter of the fluid discharge hole of the nozzle is set to be below φ8μm, with: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于该液滴的瑞利极限的电荷量的90%以下。The flow control unit controls the voltage applied to the electrodes so that the amount of charge induced in a droplet of the fluid immediately after being discharged from the fluid discharge hole becomes a charge corresponding to the Rayleigh limit of the droplet. less than 90% of the amount. 34.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔排出,其特征在于,34. An electrostatic attraction type fluid ejection device that discharges a fluid charged by applying a voltage in the state of liquid droplets under electrostatic attraction from a fluid discharge hole of a nozzle made of an insulating material, characterized in that, 所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,具有:The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, having: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,以使从所述流体排出孔排出后不久的流体的液滴中感应出的电荷量成为相当于所述弯液面的最大电场强度引起的流体排出后不久的液滴直径下的瑞利极限的电荷量以下。The flow control unit controls the voltage applied to the electrodes so that the amount of charges induced in the fluid droplets immediately after being discharged from the fluid discharge hole becomes a maximum electric field intensity corresponding to the meniscus. The amount of charge induced by the fluid discharge shortly after the droplet diameter is below the Rayleigh limit. 35.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度而向被记录媒体排出,其特征在于,35. An electrostatic attraction type fluid ejection device, in which a fluid charged by applying a voltage is electrostatically attracted to a liquid droplet from a fluid discharge hole of a nozzle made of an insulating material at a speed corresponding to the applied voltage. The recording medium is discharged, characterized in that, 将所述喷嘴的流体排出孔的直径设定在φ8μm以下,具有:The diameter of the fluid discharge hole of the nozzle is set below φ8 μm, with: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。The flow control unit controls the voltage applied to the electrodes so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. 36.一种静电吸引式流体喷射装置,将通过施加电压而带电的流体在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的流体排出孔以与外加的电压对应的速度向被记录媒体排出,其特征在于,36. An electrostatic attraction type fluid ejection device, in which a fluid charged by applying a voltage is recorded in the state of liquid droplets from a fluid discharge hole of a nozzle made of an insulating material at a speed corresponding to the applied voltage under electrostatic attraction media discharge, characterized by, 所述喷嘴的流体排出孔的直径设定为与排出后不久的流体的液滴直径同等以下,具有:The diameter of the fluid discharge hole of the nozzle is set to be equal to or less than the droplet diameter of the fluid immediately after discharge, having: 对流体外加电压的电极;以及electrodes for applying a voltage to the fluid; and 为了对从流体排出孔排出的液滴量进行调节而对施加于所述电极的电压进行控制的流程控制部,a process control section for controlling the voltage applied to the electrodes in order to adjust the amount of liquid droplets discharged from the fluid discharge holes, 所述流程控制部对施加于所述电极的电压进行控制,以使从所述流体排出至到达被记录媒体期间的平均排出速度为10m/s以上、40m/s以下。The flow control unit controls the voltage applied to the electrodes so that an average discharge speed from when the fluid is discharged to when it reaches the recording medium is 10 m/s or more and 40 m/s or less. 37.一种静电吸引式墨水喷射装置,将通过施加电压而带电的墨水在静电吸引下以液滴的状态从由绝缘材料构成的喷嘴的墨水排出孔排出,其特征在于,37. An electrostatic attraction type ink ejection device that discharges ink charged by applying a voltage in the state of liquid droplets from an ink discharge hole of a nozzle made of an insulating material under electrostatic attraction, characterized in that, 所述喷嘴的墨水排出孔的直径设定为与排出后不久的墨水的液滴直径同等以下。The diameter of the ink discharge hole of the nozzle is set to be equal to or less than the diameter of the ink droplet immediately after discharge.
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CN108907375A (en) * 2018-07-31 2018-11-30 哈尔滨工业大学(深圳) A kind of the liquid metal electrode EDM System and method of electric field control shape
CN108907375B (en) * 2018-07-31 2020-03-20 哈尔滨工业大学(深圳) Electric field shape-controlled liquid-phase metal electrode electric spark machining system and method
CN114256085A (en) * 2020-09-24 2022-03-29 上海华力集成电路制造有限公司 Cleaning liquid guiding device of wet cleaning equipment
CN114256085B (en) * 2020-09-24 2024-08-02 上海华力集成电路制造有限公司 Cleaning liquid guiding device of wet cleaning equipment
CN113210894A (en) * 2021-05-21 2021-08-06 上海大学 Electric field assisted water-conducting laser cutting device

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