CN1674372A - Polygonal high-power semiconductor laser laminated array module - Google Patents
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Abstract
一种多边形大功率半导体激光器叠层阵列模块,其构成是:在一多边形筒体中,每一边是一结构相同的梯形条块状的梯形半导体激光器组件,每一梯形条块的顶面朝内,自内至外依次是接触电极、次热沉和热沉条块紧密贴合在一起,在所述的接触电极的顶面的中央部分是轴向横排的多条大功率半导体激光器线阵列,该多个梯形半导体激光器组件固定在一水冷装置上,所述的接触电极通过连接电极和绝缘垫片由水冷装置上引出。本发明具有泵浦光源分布均匀、泵浦效率高、对大功率半导体激光器阵列腔面有保护作用、结构简单、成本低廉、易于更换的特点。
A polygonal high-power semiconductor laser stacked array module is composed of: in a polygonal cylinder, each side is a trapezoidal semiconductor laser assembly in the shape of a trapezoidal strip with the same structure, the top surface of each trapezoidal strip faces inward, and from the inside to the outside, the contact electrode, the secondary heat sink and the heat sink strip are closely fitted together, and the central part of the top surface of the contact electrode is a plurality of high-power semiconductor laser line arrays arranged axially, and the plurality of trapezoidal semiconductor laser assemblies are fixed on a water cooling device, and the contact electrode is led out from the water cooling device through a connecting electrode and an insulating gasket. The present invention has the characteristics of uniform distribution of pump light sources, high pump efficiency, protection of the cavity surface of the high-power semiconductor laser array, simple structure, low cost, and easy replacement.
Description
技术领域technical field
本发明涉及半导体激光器,特别是一种多边形大功率半导体激光器叠层阵列模块。The invention relates to a semiconductor laser, in particular to a polygonal high-power semiconductor laser stacked array module.
背景技术Background technique
由于大功率半导体激光器有体积小、重量轻、转换效率高、价格便宜等优点,它在远程传感、光谱分析、军事、航空、空间等领域的全固态激光系统中,主要用来泵浦各种固体激光介质,同时还在激光医疗方面得到了广泛的应用。Due to the advantages of small size, light weight, high conversion efficiency, and low price, high-power semiconductor lasers are mainly used to pump various It is a solid-state laser medium, and it is also widely used in laser medical treatment.
目前固体激光介质的泵浦形式主要有圆形棒的端面泵浦、圆形棒的侧面泵浦以及板条形式的平面泵浦等。用闪光灯泵浦固体激光器时,由于泵浦光谱线特性与激活介质吸收特性不完全匹配,而且闪光灯的光谱带宽比激光晶体的吸收带宽大得多,大部分泵浦能量不能被激光晶体所利用,因此固体激光介质的转换效率低,闪光灯的电光转换效率仅为0.1-5%。用半导体激光器代替闪光灯作为固体激光介质的泵浦源,由于半导体激光器的光谱线宽比较窄,当半导体激光器的中心波长位于固体激光介质的吸收带时,固体激光介质的转换效率高,从而使激光器的各项性能大大提高,而且半导体激光器泵浦代替气体灯泵浦,组成激光器的元件均为固体器件,从而实现了全固化的形式。但是用半导体激光器作为泵浦源,在圆形棒的侧面泵浦中,圆形固体激光介质存在对平面结构的大功率半导体激光器阵列泵浦光吸收效率低,吸收不均匀等缺点,其泵浦效率也很低,且激光晶体介质的输出光束质量较差;在专利号为ZL01220203.7名称为半圆柱面形发光面的半导体激光器阵列的专利中,存在圆形固体介质棒对其泵浦光吸收不均匀的问题,在专利号为ZL02110983.4名称为线阵结构的大功率半导体激光器模块的专利中存在无冷却结构,不能在高占空比下工作的缺点,将数条线阵列同时装配到半圆形的热沉上,如果一条半导体激光器线阵列损坏,整个模块就会失效,增加了其使用成本;圆形大功率半导体激光器阵列中半导体激光器阵列的输出激光可能会相互影响(无固体激光介质棒时),使半导体激光器阵列泵浦源的腔面受到损伤,从而降低泵浦源的寿命。At present, the pumping forms of solid-state laser media mainly include end pumping of circular rods, side pumping of circular rods, and planar pumping in the form of slabs. When pumping a solid-state laser with a flash lamp, most of the pump energy cannot be used by the laser crystal because the pump spectral line characteristics do not completely match the absorption characteristics of the active medium, and the spectral bandwidth of the flash lamp is much larger than the absorption bandwidth of the laser crystal. Therefore, the conversion efficiency of the solid-state laser medium is low, and the electro-optical conversion efficiency of the flash lamp is only 0.1-5%. The semiconductor laser is used instead of the flash lamp as the pumping source of the solid-state laser medium. Since the spectral linewidth of the semiconductor laser is relatively narrow, when the center wavelength of the semiconductor laser is in the absorption band of the solid-state laser medium, the conversion efficiency of the solid-state laser medium is high, so that the laser The performance of the laser is greatly improved, and the pumping of the semiconductor laser replaces the pumping of the gas lamp, and the components that make up the laser are all solid devices, thus realizing a fully solidified form. However, using a semiconductor laser as a pump source, in the side pumping of a circular rod, the circular solid laser medium has the disadvantages of low absorption efficiency and uneven absorption of the pump light of the high-power semiconductor laser array with a planar structure. The efficiency is also very low, and the output beam quality of the laser crystal medium is poor; in the patent No. ZL01220203.7 named semiconductor laser array with a semi-cylindrical light-emitting surface, there is a circular solid dielectric rod for its pumping light. The problem of uneven absorption, there is no cooling structure in the patent No. ZL02110983.4 of the high-power semiconductor laser module named linear array structure, and it cannot work under high duty cycle. Several linear arrays are assembled at the same time On the semicircular heat sink, if a semiconductor laser line array is damaged, the entire module will fail, increasing its use cost; the output lasers of the semiconductor laser arrays in the circular high-power semiconductor laser array may affect each other (no solid When the laser dielectric rod is used), the cavity surface of the pump source of the semiconductor laser array is damaged, thereby reducing the life of the pump source.
发明内容Contents of the invention
本发明的目的在于克服上述现有泵浦技术中的缺点,提供一种多边形大功率半导体激光器叠层阵列模块,它可以对固体激光介质进行高效泵浦,具有泵浦光源分布均匀、泵浦效率高、对大功率半导体激光器阵列腔面的激光照射具有保护作用等优点,同时又具有结构简单、成本低廉、易于更换构成模块的组件等特点。The purpose of the present invention is to overcome the shortcomings in the above-mentioned existing pumping technology, and provide a polygonal high-power semiconductor laser stacked array module, which can efficiently pump solid-state laser media, and has uniform distribution of pumping light sources and high pumping efficiency. It has the advantages of being high and protecting the laser irradiation on the cavity surface of the high-power semiconductor laser array, and at the same time it has the characteristics of simple structure, low cost, and easy replacement of components that make up the module.
本发明的技术方案是这样实现的:Technical scheme of the present invention is realized like this:
一种多边形大功率半导体激光器叠层阵列模块,特征在于其构成是:A polygonal high-power semiconductor laser laminated array module is characterized in that its composition is:
在一多边形筒体中,每一边是一结构相同的梯形条块状的梯形半导体激光器组件,每一梯形条块的顶面朝内,自内至外依次是接触电极、次热沉和热沉条块紧密贴合在一起,在所述的接触电极的顶面的中央部分是轴向横排的多条大功率半导体激光器线阵列,该多个梯形半导体激光器组件固定在一水冷装置上,所述的接触电极通过连接电极和绝缘垫片由水冷装置上引出。In a polygonal cylinder, each side is a trapezoidal semiconductor laser component with the same structure, the top of each trapezoidal block faces inward, and from the inside to the outside, there are contact electrodes, sub-heat sinks and heat sinks in sequence The bars are closely attached together, and the central part of the top surface of the contact electrode is a plurality of high-power semiconductor laser line arrays arranged horizontally in the axial direction, and the plurality of trapezoidal semiconductor laser components are fixed on a water cooling device, so The above-mentioned contact electrodes are led out from the water cooling device through the connection electrodes and insulating pads.
所述的梯形半导体激光器组件是可以单独更换的。The trapezoidal semiconductor laser assembly can be replaced separately.
本发明与现有技术相比具有以下明显优点:Compared with the prior art, the present invention has the following obvious advantages:
1、本发明把大功率半导体激光器组件的平面泵源设计成了多边形的结构,该结构可以使固体激光介质棒得到对称的均匀泵浦,提高泵浦效率。1. In the present invention, the planar pump source of the high-power semiconductor laser assembly is designed into a polygonal structure, which can make the solid-state laser dielectric rod obtain symmetrical and uniform pumping, and improve the pumping efficiency.
2、本发明中分离的多个梯形半导体激光器组件可以任意替换,避免了由一个梯形半导体激光器组件的失效导致整个模块失效而难修复的缺点。2. The multiple trapezoidal semiconductor laser components separated in the present invention can be replaced arbitrarily, which avoids the disadvantage that the failure of one trapezoidal semiconductor laser component causes the failure of the entire module and is difficult to repair.
3、本发明中大功率半导体激光器线阵列输出的激光相互不直射,避免了由于激光直射而使其寿命缩短的缺点。3. In the present invention, the lasers output by the high-power semiconductor laser line array are not directly irradiated with each other, which avoids the shortcoming of shortening the service life due to direct laser irradiation.
4、本发明模块由多个平面结构的梯形半导体激光器组件构成,因此具有经济方便的优点。4. The module of the present invention is composed of a plurality of trapezoidal semiconductor laser components with planar structure, so it has the advantages of economy and convenience.
附图说明Description of drawings
图1为本发明多边形大功率半导体激光器叠层阵列模块实施例——五边形大功率半导体激光器叠层阵列模块的结构示意图。FIG. 1 is a schematic structural diagram of a polygonal high-power semiconductor laser stacked array module embodiment of the present invention—a pentagonal high-power semiconductor laser stacked array module.
图2为本发明梯形半导体激光器组件示意图。Fig. 2 is a schematic diagram of a trapezoidal semiconductor laser assembly of the present invention.
具体实施方式Detailed ways
下面结合附图和实施例对本发明的大功率半导体激光器叠层阵列模块做进一步说明。The high-power semiconductor laser stacked array module of the present invention will be further described below in conjunction with the drawings and embodiments.
实施例1Example 1
先请参阅图1和图2,由图可见,本发明多边形大功率半导体激光器叠层阵列模块,其构成是:First please refer to Fig. 1 and Fig. 2, it can be seen from the figures that the polygonal high-power semiconductor laser stacked array module of the present invention is composed of:
在一五边形筒体中,每一边是一结构相同的梯形条块状的梯形半导体激光器组件,每一梯形条块的顶面朝内,自内至外依次是接触电极2、次热沉3和热沉4条块紧密贴合在一起,在所述的接触电极2的项面的中央部分是轴向横排的多条大功率半导体激光器线阵列1,该多个梯形半导体激光器组件固定在一水冷装置5上,所述的接触电极2通过连接电极6和绝缘垫片7由水冷装置5上引出。In a pentagonal cylinder, each side is a trapezoidal semiconductor laser assembly with the same structure, the top surface of each trapezoidal block faces inward, and the contact electrode 2 and the secondary heat sink are sequentially arranged from the inside to the outside. 3 and the heat sink 4 blocks are closely attached together, and in the central part of the upper surface of the contact electrode 2 is a plurality of high-power semiconductor
所述的梯形半导体激光器组件是可以单独更换的。The trapezoidal semiconductor laser assembly can be replaced separately.
使用时,通过外部构件将固体激光介质棒8置放在多边形大功率半导体激光器叠层阵列模块的中央。When in use, the solid laser
本发明的工作原理如下:The working principle of the present invention is as follows:
通过两个连接电极6与外界大功率半导体激光器电源(图中未示)相接,给多边形大功率半导体激光器阵列叠层模块中串联的多条大功率半导体激光器线阵列1施加电压,使大功率半导体激光器线阵列1发射的激光对固体激光介质棒8进行泵浦。通过水冷装置5中恒温的循环水将多边形大功率半导体激光器阵列叠层模块产生的热量带走,从而起到制冷散热的作用,使此模块可以在高占空比条件下工作。Connect the external high-power semiconductor laser power supply (not shown) through two
本发明中半导体激光器组件——由接触电极2、次热沉3、热沉4构成——的尺寸可以根据固体激光介质棒8的直径来设计,该叠层模块可以用来泵浦最小直径为4mm以上的固体激光介质棒8。In the present invention, the semiconductor laser assembly—consisting of the contact electrode 2, the sub-heat sink 3, and the heat sink 4—can be designed according to the diameter of the solid laser
多边形大功率半导体激光器叠层阵列模块,包括由大功率半导体激光器线阵列1、接触电极2、次热沉3和热沉4构成的梯形半导体激光器组件,如图2所示,水冷装置5、连接电极6、绝缘垫片7以及固体激光介质8。第一步将数条特性(阈值电流、激射波长、斜率效率、输出功率)相同或相似的大功率半导体激光器线阵列1腔面朝上,用熔点较高的焊料将其烧结在绝缘的次热沉3上(材料可以是AlN、Si、金刚石或BeO),再用低温焊料将烧结牢固的绝缘次热沉烧结到金属一般为钨铜、无氧铜等具有高热导率的材料构成的梯形热沉4上构成梯形半导体激光器组件,此步烧结也可先用熔点较高的焊料将绝缘次热沉3与金属梯形热沉4烧结到一起,然后再用低温焊料将若干个特性相同的大功率半导体激光器线阵列1、接触电极2、次热沉3和热沉4烧结组成梯形半导体激光器组件。第二步将经过老化筛选的多个特性相同或相似的梯形半导体激光器组件,按一定的方向依次安装到水冷装置上。第三步用两个连接电极6和三个绝缘垫片7将半导体激光器叠层阵列模块的正负极引出。最后将需要被泵浦的固体激光介质棒8安装在大功率半导体激光器叠层阵列模块的中心处。根据固体激光介质的长度可以沿棒长方向,安装多个大功率半导体激光器叠层阵列模块。A polygonal high-power semiconductor laser stacked array module, including a trapezoidal semiconductor laser assembly composed of a high-power semiconductor
实施例2:Example 2:
由三十条大功率半导体激光器线阵列1(输出峰值功率≥100W)组成十个梯形半导体激光器组件(每个组件由三条大功率半导体激光器线阵列1组成),用固定装置将十个梯形的半导体激光器组件依次串联在一起并固定在水冷装置5上,电流从其中一个连接电极6输入,流经每个大功率半导体激光器线阵列1,再从另一个连接电极6输出,在沿固体激光介质棒方向构成两个共用一个水冷装置的大功率半导体激光器叠层阵列模块,对半径为6mm的固体激光介质棒进行了泵浦。两个大功率半导体激光器叠层阵列模块的总输出峰值功率≥3000W。Ten trapezoidal semiconductor laser components (each component is composed of three high-power semiconductor laser line arrays 1) are composed of thirty high-power semiconductor laser line arrays 1 (output peak power ≥ 100W), and the ten trapezoidal semiconductor laser The laser components are connected in series in series and fixed on the
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