CN1576958A - Paste division filling device for producing plate display device - Google Patents
Paste division filling device for producing plate display device Download PDFInfo
- Publication number
- CN1576958A CN1576958A CNA200410061873XA CN200410061873A CN1576958A CN 1576958 A CN1576958 A CN 1576958A CN A200410061873X A CNA200410061873X A CN A200410061873XA CN 200410061873 A CN200410061873 A CN 200410061873A CN 1576958 A CN1576958 A CN 1576958A
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- Prior art keywords
- axis
- worktable
- electric motors
- linear electric
- paste
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 238000000576 coating method Methods 0.000 claims abstract description 20
- 239000011248 coating agent Substances 0.000 claims abstract description 17
- 230000005465 channeling Effects 0.000 claims 2
- 230000007261 regionalization Effects 0.000 abstract 1
- 238000004513 sizing Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0287—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work with no relative movement between the outlet and a moving work during the application
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Abstract
To minimize a movement of a dispense head, to enable a reduction in vibration at work and forming accurate pattern formation and to enable paste coating corresponding to a large-sizing of a planar display device without tremendously increasing the size of the paste coater. A paste coater is composed of a frame, a fixed table provided on the upper surface of the frame, a movable stage in forward and backward directions on the upper part of the fixed table, a first linear motor driving the stage in forward and backward directions, a Y-axis arranged at both sides of the fixed table having length in forward and backward directions of the frame, a column arranged across between the both sides of Y-axis movable along the Y-axis, a second linear motor driving the column in Y-axis direction, a plurality of head units coating a substrate, mounted on the stage which is movable along the column, with paste in a longitudinal direction and in an orthogonal direction to the Y-axis, and a third linear motor driving each head unit in the orthogonal direction to the Y-axis.
Description
Technical field
The present invention relates in the flat-panel monitor manufacturing process, on substrate, be coated with the paste dispenser of paste with predetermined pattern, more specifically, relate to a kind of improved be used on the glass substrate of flat-panel monitor (as LCD) paste dispenser with the drive system of predetermined pattern coating paste.
Background technology
Well-known, LCD (LCD) is a kind of of flat-panel monitor, it has received concern as display of future generation (as watch-dog or television receiver and the PDP (plasma display panel) or the FED (field-emitter display) of mobile phone or computing machine), and this is to have lower power consumption and thermal value because LCD compares with CRT to have good visuality and compare with CRT with screen size.
LCD makes by following method: form on the glass substrate a plurality of pixels, with opposed another glass substrate of this glass substrate on form color-filter layer, two glass substrates be bonded together, liquid crystal is injected two glass substrates being engaged by sealant in the formed space.
In the superincumbent LCD manufacturing process, use the paste dispenser that paste is coated on the glass substrate with predetermined pattern.The paste dispenser of prior art is coated with paste in the following manner: along a plurality of microscope carriers that are placed with glass substrate on X-axis and Y direction are moved it, simultaneously the head of this paste dispenser is fixed on X and the Y plane a bit.
To illustrate in greater detail the paste dispenser system and the operation of prior art below.
The paste dispenser of prior art comprises: microscope carrier, and it goes up motion with respect to the user in a left side/right (X-direction) or front/rear direction (Y direction); Head piece, it has a head, this head has the syringe that is used for the dispensing paste, wherein this head piece is installed: make it (for example according to glass substrate according to following mode, the LCD display board) pattern is set a left side/right side (that is the X-direction of microscope carrier) motion integrally in the process of this equipment.
Microscope carrier is driven by ball-screw and turning motor, wherein is provided with to such an extent that be perpendicular to one another front/rear to driving shaft and a left side/dextrad driving shaft.
Head piece is also driven by ball-screw and turning motor, wherein, as previously mentioned, securement head parts in the following manner: it can be moved along a left side/right when the pattern position that changes according to the size along with glass substrate etc. is set this head piece position, and when the coating paste along on/following direction and not a left side/right-hand moving upward.
That is to say, head piece only is designed in the position that changes this head piece to move along a left side/right when being complementary with the pattern position that changes along with the size of glass substrate etc., and in the paste coating process, in X-Y plane, does not move.
Generally speaking, the microscope carrier and the head piece of the paste dispenser of prior art are all driven by the combination of ball-screw and turning motor, promptly, when on front/rear and a left side/right, driving microscope carrier, carry out the paste coating by driving turning motor, and in coating during paste, under the state that head piece is fixed on a certain position in the plane last/below drive head parts upwards.
Yet the paste dispenser with prior art of top system and operating characteristic has following shortcoming and problem, and along with the trend of making bigger glass substrate, these shortcomings and problem will be more serious.
At first, because along with the size of glass substrate increases, the size of microscope carrier and weight also will increase, so the noise or the vibrations from driver part etc. of the prior art paste dispenser that is driven by ball-screw will increase thereupon.
Simultaneously, compare with linear electric motors, the ball-screw of the paste dispenser of prior art is easy to produce wider trueness error.
That is to say, in the paste coating process of prior art, because need be by paste being coated on the whole surface of glass substrate at this head of driving on X-axis and the Y direction following of the fixing state of head, so under the situation that flat-panel monitor becomes bigger, need increase the overall dimensions of dispenser apace, the size of guaranteeing microscope carrier and microscope carrier space and glass substrate increases to ratio, increase along with size and weight, noise and vibrations have also increased, thereby reduce the precision of coating.
Summary of the invention
Therefore, the present invention aims to provide a kind of paste dispenser that is used to make flat-panel monitor that has overcome substantially owing to the limitation and the not enough one or more problems that produce of prior art.
The purpose of this invention is to provide the paste dispenser that is used to make flat-panel monitor, make, needn't increase the overall dimension of equipment basically and can form accurate patterns and realize effective coating of paste along with making the more trend of massive plate display.
Other features and advantages of the present invention will be set forth in explanation subsequently, and for those skilled in the art, a part can be understood by instructions, perhaps can experience by practice of the present invention.By the structure of specifically noting in instructions, claims and the accompanying drawing, can realize and obtain these purposes of the present invention and other advantage.
In order to realize these purposes and other advantage, according to purpose of the present invention, to implement and broadly described as institute here is concrete, a kind of paste dispenser that is used to make flat-panel monitor comprises: worktable; Be installed in the microscope carrier on the worktable, this microscope carrier can move on the front/rear direction of worktable; First linear electric motors are used for driving microscope carrier on the front/rear direction of worktable; Be positioned at the relative both sides of worktable and in the upwardly extending Y-axis of front/rear side of worktable; Striding the frame that Y-axis is installed, can move along Y-axis; Second linear electric motors are used for along the Y-axis drive chassis; Be positioned at a plurality of head units of a side of frame, it can move along the stands longitudinal direction perpendicular to Y-axis, to be coated with paste according to predetermined pattern on substrate fixing on the microscope carrier; And the 3rd linear electric motors, be used for drive head unit on perpendicular to the direction of Y-axis.
Be appreciated that above general introduction of the present invention and following detailed all are exemplary and explanat, that is intended to limit for claim the invention provides further explanation.
Description of drawings
Accompanying drawing helps to understand better the present invention, and constitutes the application's a part, and accompanying drawing has shown embodiments of the invention, and explains principle of the present invention with instructions.
In the accompanying drawings:
Fig. 1 shows the skeleton view of paste dispenser according to one preferred embodiment of the present invention;
Fig. 2 shows the planimetric map of Fig. 1; And
Fig. 3 shows the viewed front elevation of " A " direction in Fig. 1.
Embodiment
Below the preferred embodiment of the present invention shown in the accompanying drawing is elaborated.Fig. 1 shows the skeleton view of paste dispenser according to one preferred embodiment of the present invention, and Fig. 2 shows the planimetric map of Fig. 1, and Fig. 3 shows the viewed front elevation of " A " direction in Fig. 1.
Referring to figs. 1 through Fig. 3, the paste dispenser that is used to make flat-panel monitor comprises: framework 1; Worktable 4 on the framework 1; Be installed in the microscope carrier 5 on the worktable 4, it can move on the front/rear direction of framework 1, is used for bearing substrate with the coating paste; First linear electric motors, the front/rear direction (being Y direction) that is used at framework goes up driving microscope carrier 5; The Y-axis that is positioned on the relative both sides of worktable and extends along the front/rear direction of framework 1; Striding the frame 3 that Y-axis is installed, can move along Y-axis; Second linear electric motors are used for drive chassis 3 on Y direction; Be positioned at a plurality of head units of a side of frame 3, its can along perpendicular to vertical (being X-axis) motion of the frame 3 of Y-axis on substrate fixing on the microscope carrier 5, to be coated with paste according to predetermined pattern; And the 3rd linear electric motors, be used for drive head unit on perpendicular to the direction of Y-axis 2.
Described first linear electric motors comprise: magnet 4a is arranged on the worktable 4 along the front/rear direction of framework 1; Be positioned at the movable body that aligns with magnet 4a on the microscope carrier 5.Described second linear electric motors comprise: a plurality of magnet 2a, and the front/rear direction along framework 1 is arranged on the Y-axis 2 respectively; Be positioned at a plurality of movable bodies that align with magnet 2a in the bottom of the opposite end of frame 3.
Described the 3rd linear electric motors comprise: magnet 3a is arranged on a side of frame 3 along a left side/right of framework 1; And be positioned at the movable body that each holder,head (head mount) 6 aligns with magnet 3a.To describe holder,head 6 in the back.
Simultaneously, also comprise LM guide rail 2b, 3b and the 4b adjacent with 4a, be used for accurately guiding the rectilinear motion of microscope carrier 5, frame 3 and holder,head 6 with magnet 2a, the 3a of worktable 4, Y-axis 2 and frame 3.
Described head unit comprises: a plurality of holder,heads 6, be used for respectively directly receiving driving force from the movable body of the 3rd linear electric motors, with frame 3 vertically on motion; Be installed in the head (not shown) on each holder,head 6; And be positioned at the syringe (not shown) that is used to load paste on the head.
Describe the operation of paste dispenser of the present invention below in detail.
Before beginning that paste dispenser of the present invention is described, be " X-direction motion " with microscope carrier 5 with respect to a left side/right movement definition of staff, and be " Y direction motion " the front/rear direction movement definition of microscope carrier 5.That is, the X-direction motion is the rectilinear motion of framework 1 on a left side/right, and the Y direction motion is the rectilinear motion of framework 1 on front/rear direction.
Under the state that the glass substrate (not shown) is placed on the microscope carrier 5, microscope carrier 5 or head move along with the operation of first linear electric motors and the 3rd linear electric motors, to carry out the paste coating.In this example, the driving direction of the driving direction of microscope carrier 5 and head piece is orthogonal.
When the coating paste, frame 3 is not moved, and microscope carrier 5 and head piece motion.That is, during paste, microscope carrier 5 utilizes first linear electric motors and carry out rectilinear motion on the front/rear direction of framework 1 in coating, and a plurality of head units that are positioned at a side of frame 3 can carry out rectilinear motion on a left side/right (being directions X) of framework 1.
In this example, owing to can control separately head unit, so paste dispenser of the present invention can be handled the different pattern on different types of glass substrate and the glass substrate effectively.That is, by controlling the rectilinear motion of these head units individually respectively, can be according to the kind of glass substrate and the multi-form position that changes these head units that is formed on the pattern on the glass substrate.
Simultaneously, by making two linear electric motors that are separated from each other with door frame (gantry) form that Y-axis 2 is moved simultaneously.
Generally speaking, make in the prior art in the process of LCD panel, the motion that need carry out a front/rear and left side/right of microscope carrier 5 is coated with paste, and, if only microscope carrier 5 is carried out this operation, then the size of equipment will increase to the increase fast of direct ratio ground with the size of glass substrate.
In contrast, in invention, changed in the process of coating paste and only microscope carrier 5 has been carried out situation front/rear and a left side/right motion, made microscope carrier 5 and head be driven with being perpendicular to one another simultaneously, thereby can reduce the size of equipment.
Simultaneously, compare the vibrations that paste dispenser of the present invention can reduce to take place in the driving arrangement with the paste coating process that under the state of fixed bearing stage 5, is coated with paste by the head that moves along front/rear and a left side/right.
In addition, by motion microscope carrier 5 on an axle only, motion head piece on another axle simultaneously can make equipment size increase along with the size of glass substrate and the trend that increases minimizes.
In paste dispenser of the present invention, adopt linear electric motors and the noise and the vibrations of suppression equipment effectively of LM guide rail, thereby can obtain comfortable working environment, and adopt linear electric motors that rapid acceleration is become easily, thereby improved coating quality.
It will be apparent to those skilled in the art that under the situation that does not break away from the spirit or scope of the present invention, can carry out multiple improvement and variation the present invention.Therefore, if these improvement and variation drop in the scope of claims and equivalent thereof, then these improvement and variation are contained in the present invention.
For example, paste dispenser with a frame 3 illustrates though the foregoing description is based on, but, the same with the embodiment of front, when provide a plurality of head units when controlling separately for each frame, if consider the size and the throughput rate of glass substrate, two or more frame 3 can be set also.
As mentioned above, paste dispenser of the present invention has following advantage.
Utilize linear electric motors to form rectangular coordinate system, carrying out the rectilinear motion of microscope carrier, frame and head, thereby solve the noise that friction caused and the vibration problems of driver part, to realize comfortable operation.
Adopt linear electric motors can carry out acceleration fast, thereby can carry out rapid and precise control, therefore improved the quality of paste coating the speed and the position of coating.
Only at motion microscope carrier on the axle and another axially on the motion head piece can make because the size of glass substrate increases the equipment size increase that causes minimizes.
Claims (9)
1. paste dispenser that is used to make flat-panel monitor comprises:
Worktable;
Microscope carrier is installed on the worktable, can move on the front/rear direction of described worktable;
First linear electric motors are used for driving described microscope carrier on the front/rear direction of described worktable;
The Y-axis that is positioned on the relative both sides of worktable and extends along the front/rear direction of worktable;
Frame is being striden described Y-axis and is being installed, and can move along described Y-axis;
Second linear electric motors are used for driving described frame along described Y-axis;
A plurality of head units are positioned at a side of described frame, can be along the lengthwise movement perpendicular to the frame of described Y-axis, to be coated with paste according to predetermined pattern on described substrate fixing on the described microscope carrier; And
The 3rd linear electric motors are used for driving described head unit on perpendicular to the direction of described Y-axis.
2. paste dispenser according to claim 1, wherein said first linear electric motors comprise:
Magnet, along the front/rear direction of described worktable be arranged on the described worktable and
Movable body is positioned on the described microscope carrier, with described magnets align.
3. paste dispenser according to claim 1, wherein said second linear electric motors comprise:
A plurality of magnets, respectively along the front/rear direction of described worktable be arranged on the described Y-axis and
A plurality of movable bodies are positioned at the bottom of the opposite end of described frame, with described magnets align.
4. paste dispenser according to claim 1, wherein said the 3rd linear electric motors comprise:
Magnet, along a left side/right of described worktable be arranged on described frame a side and
Movable body is arranged in each holder,head, with described magnets align.
5. paste dispenser according to claim 1, wherein said head unit comprises:
A plurality of holder,heads are used for respectively directly receiving driving force from the movable body of described the 3rd linear electric motors, with described frame vertically on motion,
Head, be installed on each holder,head and
Syringe is positioned on the described head, is used to load described paste.
6. paste dispenser according to claim 5, wherein said a plurality of holder,heads are driven separately under the independent control of described a plurality of movable bodies of described the 3rd linear electric motors.
7. according to the described paste dispenser of any one claim in the claim 1 to 6, wherein said worktable, described a plurality of Y-axis and described frame comprise a plurality of LM guide rails that are used for its rectilinear motion channeling conduct respectively.
8. paste dispenser according to claim 1 is comprising a plurality of frames.
9. paste dispenser that is used to make flat-panel monitor comprises:
Framework;
Worktable is positioned on the described framework;
Microscope carrier is installed on the described worktable, can move on the front/rear direction of described framework;
First linear electric motors are used for driving described microscope carrier on the front/rear direction of described framework;
The Y-axis that is positioned on the relative both sides of described worktable and extends along the front/rear direction of described framework;
At least two frames, it is being striden described Y-axis and is installing, and can move along described Y-axis;
Second linear electric motors are used for driving described frame on Y direction;
A plurality of head units are positioned at a side of each described frame, can be along lengthwise movements perpendicular to the frame of described Y-axis, with according to predetermined pattern described paste of coating on described substrate fixing on the described microscope carrier; And
The 3rd linear electric motors are used for driving described a plurality of head units on perpendicular to the direction of described Y-axis,
Wherein
Described first linear electric motors comprise: magnet, and its front/rear direction along described worktable is arranged on the described worktable; And movable body, it is positioned on the described microscope carrier, with described magnets align,
Described second linear electric motors comprise: a plurality of magnets, and it is arranged on the described Y-axis along the front/rear direction of described worktable respectively; And movable body, it is positioned at the bottom of the opposite end of described frame, with described a plurality of magnets align,
Described the 3rd linear electric motors comprise: magnet, and its left side/right along described worktable is arranged on a side of described frame; And movable body, it is positioned at each holder,head, with described magnets align,
Described head unit comprises: a plurality of holder,heads, be respectively applied for from the movable body of described the 3rd linear electric motors and directly receive driving force, with described frame vertically on motion; Head is installed on each holder,head; And syringe, be positioned on the described head, be used to load described paste, and
Described worktable, described Y-axis and described frame comprise a plurality of LM guide rails that are used for its rectilinear motion channeling conduct respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR42878/2003 | 2003-06-28 | ||
| KR1020030042878A KR100552092B1 (en) | 2003-06-28 | 2003-06-28 | Paste coating device for manufacturing flat panel display |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1576958A true CN1576958A (en) | 2005-02-09 |
| CN100339742C CN100339742C (en) | 2007-09-26 |
Family
ID=34192064
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410061873XA Expired - Fee Related CN100339742C (en) | 2003-06-28 | 2004-06-25 | Paste division filling device for producing plate display device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005013994A (en) |
| KR (1) | KR100552092B1 (en) |
| CN (1) | CN100339742C (en) |
| TW (1) | TWI289872B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100422827C (en) * | 2005-09-09 | 2008-10-01 | 塔工程有限公司 | liquid distribution system |
| CN100454115C (en) * | 2005-12-30 | 2009-01-21 | 塔工程有限公司 | Method for regulating aligning of support framework in sealant distributor |
| CN101703983A (en) * | 2005-07-08 | 2010-05-12 | 塔工程有限公司 | Paste dispenser and its control method |
| CN101804399A (en) * | 2009-02-17 | 2010-08-18 | 塔工程有限公司 | The method that moves of saddle and coating head unit in used saddle of coating machine and the control coating machine |
| CN101992171A (en) * | 2009-08-19 | 2011-03-30 | 塔工程有限公司 | Method for dropping liquid crystal droplets in panel region on substrage using liquid crystal dispenser |
| CN101853800B (en) * | 2009-03-31 | 2012-06-06 | 塔工程有限公司 | Working stage with antistatic treatment |
| CN102540578A (en) * | 2010-12-30 | 2012-07-04 | 塔工程有限公司 | Sealant coater |
| CN101687289B (en) * | 2007-05-23 | 2013-11-06 | 武藏工业株式会社 | Gantry work apparatus |
| TWI498167B (en) * | 2013-07-03 | 2015-09-01 | Wistron Corp | Guiding device for guiding a dispenser to draw solvent from at least one well on a microplate |
| CN109277228A (en) * | 2017-07-21 | 2019-01-29 | 株式会社科威-艾乐 | Substrate board treatment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100696932B1 (en) * | 2005-04-15 | 2007-03-20 | 주식회사 탑 엔지니어링 | Paste Applicator and Control Method |
| JP2007144267A (en) * | 2005-11-24 | 2007-06-14 | Toray Eng Co Ltd | Method for controlling coating device and coating device using the same |
| JP4086879B2 (en) | 2006-04-19 | 2008-05-14 | シャープ株式会社 | Droplet applicator |
| JP4086878B2 (en) * | 2006-04-19 | 2008-05-14 | シャープ株式会社 | Droplet applicator |
| KR100750747B1 (en) * | 2006-07-28 | 2007-08-22 | 주식회사 탑 엔지니어링 | Multiple Head Driving Device of Resin Coating Equipment for Semiconductor Device Manufacturing |
| JP5525182B2 (en) * | 2009-05-14 | 2014-06-18 | 株式会社日立製作所 | Paste coating apparatus and coating method |
| CN102527563A (en) * | 2012-01-10 | 2012-07-04 | 江苏长虹汽车装备集团有限公司 | Travel driving device for spraying robot |
| CN102513256A (en) * | 2012-01-10 | 2012-06-27 | 江苏长虹汽车装备集团有限公司 | Spraying robot driving device |
| CN113385371B (en) * | 2021-06-11 | 2022-08-02 | 广州市黄埔乐天实业有限公司 | Fuel cell sealing ring glue injection machine, glue injection equipment and glue injection molding process |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11174228A (en) * | 1997-12-12 | 1999-07-02 | Sharp Corp | Polarizing board sticking device |
| JP2001237214A (en) * | 2000-02-25 | 2001-08-31 | Dainippon Screen Mfg Co Ltd | Method and device for treating substrate |
| CN1232839C (en) * | 2001-09-28 | 2005-12-21 | 兄弟工业株式会社 | Liquid drop pattern forming device |
| JP2003159787A (en) * | 2001-11-28 | 2003-06-03 | Seiko Epson Corp | Discharge method and apparatus, electro-optical apparatus, method for manufacturing the same and apparatus for manufacturing the same, color filter, method for manufacturing the same and apparatus for manufacturing the same, device having base material, method for manufacturing the same, and apparatus for manufacturing the same |
-
2003
- 2003-06-28 KR KR1020030042878A patent/KR100552092B1/en not_active Expired - Lifetime
-
2004
- 2004-06-18 TW TW093117677A patent/TWI289872B/en not_active IP Right Cessation
- 2004-06-25 JP JP2004187779A patent/JP2005013994A/en active Pending
- 2004-06-25 CN CNB200410061873XA patent/CN100339742C/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101703983A (en) * | 2005-07-08 | 2010-05-12 | 塔工程有限公司 | Paste dispenser and its control method |
| CN100422827C (en) * | 2005-09-09 | 2008-10-01 | 塔工程有限公司 | liquid distribution system |
| CN100454115C (en) * | 2005-12-30 | 2009-01-21 | 塔工程有限公司 | Method for regulating aligning of support framework in sealant distributor |
| CN101687289B (en) * | 2007-05-23 | 2013-11-06 | 武藏工业株式会社 | Gantry work apparatus |
| CN101804399A (en) * | 2009-02-17 | 2010-08-18 | 塔工程有限公司 | The method that moves of saddle and coating head unit in used saddle of coating machine and the control coating machine |
| CN101853800B (en) * | 2009-03-31 | 2012-06-06 | 塔工程有限公司 | Working stage with antistatic treatment |
| CN101992171A (en) * | 2009-08-19 | 2011-03-30 | 塔工程有限公司 | Method for dropping liquid crystal droplets in panel region on substrage using liquid crystal dispenser |
| CN102540578A (en) * | 2010-12-30 | 2012-07-04 | 塔工程有限公司 | Sealant coater |
| TWI498167B (en) * | 2013-07-03 | 2015-09-01 | Wistron Corp | Guiding device for guiding a dispenser to draw solvent from at least one well on a microplate |
| CN109277228A (en) * | 2017-07-21 | 2019-01-29 | 株式会社科威-艾乐 | Substrate board treatment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100339742C (en) | 2007-09-26 |
| JP2005013994A (en) | 2005-01-20 |
| TWI289872B (en) | 2007-11-11 |
| KR100552092B1 (en) | 2006-02-13 |
| KR20050001279A (en) | 2005-01-06 |
| TW200501223A (en) | 2005-01-01 |
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