CN1441263A - Ultra-wideband femtosecond laser reflector with high reflectivity and high damage-resistant threshold - Google Patents
Ultra-wideband femtosecond laser reflector with high reflectivity and high damage-resistant threshold Download PDFInfo
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- CN1441263A CN1441263A CN 03114620 CN03114620A CN1441263A CN 1441263 A CN1441263 A CN 1441263A CN 03114620 CN03114620 CN 03114620 CN 03114620 A CN03114620 A CN 03114620A CN 1441263 A CN1441263 A CN 1441263A
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- angle prism
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- angled side
- laser
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- 238000002310 reflectometry Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 239000005304 optical glass Substances 0.000 claims description 12
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 10
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 7
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 230000003595 spectral effect Effects 0.000 abstract description 6
- 238000002834 transmittance Methods 0.000 abstract description 5
- 238000010521 absorption reaction Methods 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
一种高反射率高抗损伤阈值超宽带飞秒激光反射器，在支架或底座上设置有斜面与一个直角侧面或与另一个直角侧面的夹角为45°的直角棱镜，在直角棱镜的一个直角侧面和另一个直角侧面上真空蒸镀有增透膜，直角棱镜的斜面为光学抛光面。由于本发明的直角棱镜采用上述材料以及结构，使得本发明的直角棱镜能通过光谱带宽为200nm以上超宽带的飞秒激光，透光率达到99.5％。本发明具有设计合理、结构简单、透光率高、激光吸收小、抗激光损伤阈值高等优点，可在飞秒激光的光学设备上推广使用。
An ultra-broadband femtosecond laser reflector with high reflectivity and high damage resistance threshold, a right-angle prism with an angle of 45° between the inclined surface and one right-angle side or the other right-angle side is arranged on the bracket or the base, and one of the right-angle prisms is The right-angle side and the other right-angle side are vacuum-evaporated with an anti-reflection film, and the slope of the right-angle prism is an optically polished surface. Because the right-angle prism of the present invention adopts the above-mentioned materials and structures, the right-angle prism of the present invention can pass femtosecond laser with a spectral bandwidth of more than 200nm and ultra-broadband, and the light transmittance reaches 99.5%. The invention has the advantages of reasonable design, simple structure, high light transmittance, small laser absorption, high anti-laser damage threshold, etc., and can be popularized and used in femtosecond laser optical equipment.
Description
Technical field
The invention belongs to laser technology field, be specifically related to high reflectance high anti-damage threshold value ultra broadband fs laser reflector.
Background technology
The high-peak power femto-second laser pulse discloses material microstructure for the mankind and the ultrafast process rule provides a kind of effective means, especially in recent years, people utilize the ultrashort ultra-intense laser of TW level to carry out and the interactional Physical Experiment of material target, study the moving law on the material atom yardstick.For the generation and application of the femto-second laser pulse of high-peak power, need suitable optical element and guide light path, as reflection, transmission and refraction mode etc., what wherein the most generally use is the reflection leaded light, generally adopt on optical glass the plating reflectance coating to realize high reflectance for femto-second laser pulse, but for femto-second laser pulse, peak power is very high, spectral bandwidth is very wide, and the reflectance coating complex process of plating broad band, rete is very thick, and coating machine is required height, and is difficult to realize the damage threshold of anti-high-peak power.
The material of optics right-angle prism adopts K9 glass or melting quartz glass usually, when laser when right-angle prism transmission arrives the inclined-plane, if incident angle is 45 °, in 200nm～2200nm wave band, can realize optical total-reflection, their total reflection bandwidth all reaches more than the 2000nm, femtosecond laser for ultra broadband, spectral bandwidth is generally more than the 200nm, for realizing 45 ° of broadband reflections, generally need evaporation ultra broadband reflectance coating on optical glass, this ultra broadband reflectance coating generally needs with capping oxidation silicon cladding on zirconia or the titanium dioxide coating, capping oxidation zirconium or titanium dioxide coating again on monox coating, alternately evaporation is 50～60 layers, transmitance generally is up to 95%, when high power laser light incides on the thick like this rete, owing to absorb and the rete defect cause, be easy to damage coatings, damage threshold is low.
Summary of the invention
Technical problem underlying to be solved by this invention is to overcome the defective of above-mentioned evaporation broadband total reflection film coating, and a kind of reasonable in design, simple in structure, high reflectance high anti-damage threshold value ultra broadband laser reflector that transmittance is high is provided.
Solving the problems of the technologies described above the technical solution adopted in the present invention is: support or base be provided with inclined-plane and right-angled side faces or with the angle of another right-angled side faces be 45 ° right-angle prism, vacuum evaporation has anti-reflection film on right-angled side faces of right-angle prism and another right-angled side faces, and the inclined-plane of right-angle prism is the optical polish face.
The anti-reflection film of vacuum evaporation is tantalum oxide and monox on a right-angled side faces of right-angle prism of the present invention and another right-angled side faces, and vacuum replaces 6～12 layers of evaporations.
The material of right-angle prism of the present invention adopts K9 optical glass or the quartzy optical glass of melting to make.
The material of right-angle prism of the present invention adopts K9 optical glass or the quartzy optical glass of melting to make, vacuum is coated with anti-reflection film on right angle face of right-angle prism and another right angle face, the material of anti-reflection film adopts tantalum oxide and monox, and vacuum replaces 6～12 layers of evaporations.Because right-angle prism of the present invention adopts above-mentioned material and structure, makes that right-angle prism of the present invention can be the femtosecond laser of the above ultra broadband of 200nm by spectral bandwidth, transmittance reaches 99.5%.That the present invention has is reasonable in design, simple in structure, transmittance is high, laser absorption is little, the threshold for resisting laser damage advantages of higher, can promote the use of on the optical device of femtosecond laser.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the invention.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described, but the utility model is not limited to these embodiment.
Embodiment 1
In Fig. 1, the high anti-high damage threshold ultra broadband laser reflector of present embodiment is made of right-angle prism 1, support 2 connections.Upper end at support 2 links by screw thread and right-angle prism 1.The right-angle prism 1 of present embodiment is an isosceles right-angle prism, and the inclined-plane C of right-angle prism 1 and the angle of a right-angled side faces A are 45 °, and the angle of the inclined-plane C of right-angle prism 1 and another right-angled side faces B is 45 °, and the material of right-angle prism 1 adopts K9 optical glass.Be coated with anti-reflection film on a right-angled side faces A of right-angle prism 1, be coated with anti-reflection film on another right-angled side faces B of right-angle prism 1, the material of anti-reflection film adopts tantalum oxide and monox, and vacuum replaces 8 layers of evaporations, and inclined-plane C is the optical polish face.Because right-angle prism 1 adopts above-mentioned material and structure, make that right-angle prism 1 can be the femto-second laser pulse of the above ultra broadband of 200nm by spectral bandwidth, femto-second laser pulse incides on the right-angled side faces A of right-angle prism 1 along horizontal optical axis, be coated with anti-reflection film on the right-angled side faces A, arrive the hypotenuse C face of right-angle prism 1 after the transmission, after total reflection, arrive another right-angled side faces B along vertical optical axis, another right-angled side faces B face also is coated with anti-reflection film, after another right-angled side faces B transmission, export, femto-second laser pulse becomes the vertical direction transmission from horizontal direction like this, right-angle prism 1 plays the effect that changes transmission direction, and kept the transmitance more than 99.5% and the broadband spectral of laser pulse.
In the present embodiment, right-angle prism 1 adopts K9 optical glass to make, and the anti-reflection film of vacuum plating is tantalum oxide and monox on a right-angled side faces A of right-angle prism 1 and another indivedual right-angled side faces B, and vacuum replaces 6 layers of evaporations.The connecting relation of the geometric configuration of right-angle prism 1 and other parts is identical with embodiment 1.
Embodiment 3
In the present embodiment, right-angle prism 1 adopts K9 optical glass to make, and the anti-reflection film of vacuum plating is tantalum oxide and monox on right-angled side faces A of right-angle prism 1 and another right-angled side faces B, and vacuum replaces 12 layers of evaporations.The connecting relation of the geometric configuration of right-angle prism 1 and other parts is identical with embodiment 1.
Embodiment 4
In above embodiment 1～3, the material of right-angle prism 1 adopts the quartzy optical glass of melting.The connecting relation of the geometric configuration of right-angle prism 1 and other parts is identical with embodiment 1, the anti-reflection film that right-angled side faces A of right-angle prism 1 and another right-angled side faces B go up the vacuum plating is tantalum oxide and monox, and it is identical with respective embodiments that vacuum replaces the evaporation number of plies.
According to above-mentioned principle, also can design the high reflectance high anti-damage threshold value ultra broadband fs laser reflector of another concrete structure.
Claims (3)
1, a kind of high reflectance high anti-damage threshold value ultra broadband fs laser reflector, it is characterized in that: support [2] or base be provided with inclined-plane [C] and a right-angled side faces [A] or with the angle of other side, a right angle [B] be 45 ° right-angle prism [1], a right-angled side faces [A] and the last vacuum evaporation of another right-angled side faces [B] at right-angle prism [1] have anti-reflection film, and the inclined-plane [C] of right-angle prism [1] is the optical polish face.
2, according to the described high reflectance high anti-damage of claim 1 threshold value ultra broadband fs laser reflector, it is characterized in that: the anti-reflection film that a right-angled side faces [A] of said right-angle prism [1] and another right-angled side faces [B] go up vacuum evaporation is tantalum oxide and monox, and vacuum replaces 6～12 layers of evaporations.
3, according to claim 1 or 2 described high reflectance high anti-damage threshold value ultra broadband fs laser reflectors, it is characterized in that: the material of said right-angle prism [1] adopts K9 optical glass or the quartzy optical glass of melting to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03114620 CN1441263A (en) | 2003-04-08 | 2003-04-08 | Ultra-wideband femtosecond laser reflector with high reflectivity and high damage-resistant threshold |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03114620 CN1441263A (en) | 2003-04-08 | 2003-04-08 | Ultra-wideband femtosecond laser reflector with high reflectivity and high damage-resistant threshold |
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| Publication Number | Publication Date |
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| CN1441263A true CN1441263A (en) | 2003-09-10 |
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| CN 03114620 Pending CN1441263A (en) | 2003-04-08 | 2003-04-08 | Ultra-wideband femtosecond laser reflector with high reflectivity and high damage-resistant threshold |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107092046A (en) * | 2017-04-26 | 2017-08-25 | 上海默奥光学薄膜器件有限公司 | A kind of high reflective mirror of wide spectrum |
| CN107450116A (en) * | 2017-10-13 | 2017-12-08 | 广东诚卓光电科技有限公司 | One kind is latent to hope reflective prism |
| CN107884918A (en) * | 2017-11-13 | 2018-04-06 | 中国科学院合肥物质科学研究院 | High energy ultraviolet laser gatherer under a kind of high-intensity magnetic field |
| CN112811937A (en) * | 2020-12-30 | 2021-05-18 | 哈尔滨工业大学 | Preparation method of high-reflection anti-laser film layer on surface of silicon nitride ceramic substrate |
| CN114235739A (en) * | 2021-12-17 | 2022-03-25 | 华太极光光电技术有限公司 | A coating identification method and system based on attenuated total reflection terahertz spectroscopy |
-
2003
- 2003-04-08 CN CN 03114620 patent/CN1441263A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107092046A (en) * | 2017-04-26 | 2017-08-25 | 上海默奥光学薄膜器件有限公司 | A kind of high reflective mirror of wide spectrum |
| CN107450116A (en) * | 2017-10-13 | 2017-12-08 | 广东诚卓光电科技有限公司 | One kind is latent to hope reflective prism |
| CN107450116B (en) * | 2017-10-13 | 2024-04-09 | 南京优瑞谱科技有限公司 | Periscope reflective triple prism |
| CN107884918A (en) * | 2017-11-13 | 2018-04-06 | 中国科学院合肥物质科学研究院 | High energy ultraviolet laser gatherer under a kind of high-intensity magnetic field |
| CN112811937A (en) * | 2020-12-30 | 2021-05-18 | 哈尔滨工业大学 | Preparation method of high-reflection anti-laser film layer on surface of silicon nitride ceramic substrate |
| CN112811937B (en) * | 2020-12-30 | 2022-07-08 | 哈尔滨工业大学 | Preparation method of high-reflection anti-laser film layer on surface of silicon nitride ceramic substrate |
| CN114235739A (en) * | 2021-12-17 | 2022-03-25 | 华太极光光电技术有限公司 | A coating identification method and system based on attenuated total reflection terahertz spectroscopy |
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