CN1425928A - Colored light sensitive resin composition - Google Patents

Abstract

A colored photosensitive resin composition comprising (A) a pigment, (B) a binder polymer, (C) a photopolymerizable compound, (D) a photopolymerization initiator, (E) a pigment dispersant, and (F) For the solvent, apply the colored photosensitive resin composition on the surface of the glass substrate by spin coating method, then dry at 100°C for 3 minutes to volatilize the volatile components to form a film (thickness is 1.6 μm), and the obtained film, ① Immerse in an alkaline aqueous solution 2500 times the weight of the film, stir the aqueous solution at 300 rpm for 80 seconds with a stirrer, and measure the particle size distribution of the particles contained in the aqueous solution by the light scattering method, or ② Immerse the film in 2500 weight times times the solvent, stir the solvent at 300rpm for 80 seconds with a stirrer, and when measuring the particle size distribution of the coating film components contained in the solvent by the light scattering method, the cumulative 90% particle diameter is below 0.5 μm, and the maximum particle diameter is 0.5 μm or less. A colored photosensitive resin composition of 1.0 μm or less, a method for forming a colored pattern using the colored photosensitive resin composition, and a method for manufacturing a color filter using the method for forming a colored pattern are provided.

Description

Colored photosensitive resin composition

technical field

The present invention relates to a colored photosensitive resin composition.

Background technique

The colored photosensitive resin composition (colour resist) is a colored photosensitive resin composition (resist) containing a colorant, known as containing (A) colorant, (B) binder polymer, (C ) A photopolymerizable compound and (D) a photopolymerization initiator, for example, a material for forming a colored pattern constituting a color filter. Here, the color filter 1 refers to an optical element that is mounted on a color solid-state imaging device to obtain a color image, such as being mounted on a color liquid crystal display device to express colorization of an image.

The colored pattern 2 is, for example, red pixels, green pixels, blue pixels, etc., and such colored patterns 2 are usually formed on a substrate 3 to constitute a color filter (FIG. 1). The color pixels are colored transparent layers through which the light passing through each assumes the color of the color pixels.

As a method of forming the colored pattern 2 using such a colored photosensitive resin composition, there is a layer made of the colored photosensitive resin composition formed on the substrate 3 [hereinafter referred to as a colored photosensitive resin composition layer] 4 ( FIG. 2( a )), after exposure by irradiating light 6 ( FIG. 2( b )), the method of development ( FIG. 2( c )). Upon exposure, the colored photosensitive resin composition layer 4 produces an unirradiated region 41 not irradiated with light 6 and an irradiated region 42 irradiated with light ( FIG. 2( b )). The unirradiated area 41 is eliminated in the next development ( FIG. 2( c )). On the other hand, the irradiated area 42 remains to form the colored pattern 2 in the next development. In particular, the colored pattern 2 has a cross-sectional shape in which the substrate side width (W ₀ ) is wider than the upper side width (W ₁ ) in a conical shape (Fig. 5(a)) or the substrate 3 side width (W ₀ ) is the same as A rectangular shape with an upper side width (W ₁ ) ( FIG. 5( b )) is preferable.

In such a method of forming a colored pattern, it is preferable that the amount of light irradiated on the irradiated area is small, because the colored pattern can be formed in a short irradiation time. Therefore, a high-sensitivity colored photosensitive resin composition that is sufficient to form a colored pattern even with a small amount of irradiated light is used. Such a highly sensitive colored photosensitive resin composition is preferably capable of forming a target colored pattern even when the amount of light is irradiated with too much light.

However, conventional high-sensitivity colored photosensitive resin compositions exist, and if there is a large amount of irradiated light, the cross-sectional shape of the formed colored pattern (2) tends to be that the width (W ₀ ) on the side of the substrate (3) is larger than the width (W 0 ) on the upper side. ₁ ) Narrow inverse cone shape (Fig. 5(c)), even the surface of the coating film is very hard during development, so the coating film is insoluble in the developer and will be peeled off. Furthermore, due to poor adhesion, the cross-section will be rough, making it a color filter Later, due to the roughness of the section, it looks uneven.

Contents of the invention

The object of the present invention is to provide a highly sensitive colored photosensitive resin composition that forms a straight-tapered or even rectangular colored pattern without roughness in cross-sectional shape during development, a colored pattern forming method and a color filter using the composition. film manufacturing method.

As a result of intensive research, the present inventors have found that when the coating film is immersed in an alkaline aqueous solution or solvent under specific conditions, and the particle size distribution of the particles in the alkaline aqueous solution or solvent is measured, the cumulative 90% particle diameter and the maximum particle diameter are between The coloring photosensitive resin composition in a specific range can solve the said subject, and this invention was completed.

That is, the present invention relates to the following inventions.

1 of the present invention contains (A) pigment, (B) binder polymer, (C) photopolymerizable compound, (D) photopolymerization initiator, (E) pigment dispersant, and (F) solvent coloring photosensitivity Resin composition, this colored photosensitive resin composition is that, after coating this colored photosensitive resin composition by spin coating method on the glass substrate surface, dry at 100 ℃ for 3 minutes to volatilize the volatile components, forming a film ( Thickness is 1.6 μ m), the obtained film is immersed in the alkaline aqueous solution of this film 2500 weight times (by weight percentage, contains the aqueous solution of 0.05% of sodium hydroxide, 0.2% of sodium butylnaphthalene sulfonate respectively), this aqueous solution is mixed with agitator Stirring at 300 rpm for 80 seconds, and measuring the particle size distribution of the particles contained in the aqueous solution by the light scattering method, cumulative 90% of the colored photosensitive resin composition has a particle size of 0.5 μm or less and a maximum particle size of 1.0 μm or less.

2 of the present invention Contains (A) Pigment, (B) Binder Polymer, (C) Photopolymerizable Compound, (D) Photopolymerization Initiator, (E) Pigment Dispersant, and (F) Solvent Coloring Photosensitivity Resin composition, this colored photosensitive resin composition is that, after coating this colored photosensitive resin composition by spin coating method on the glass substrate surface, dry at 100 ℃ for 3 minutes to volatilize the volatile components, forming a film ( Thickness is 1.6 μ m), the obtained film is immersed in this solvent of 2500 weight times of this film, and this solvent is stirred at 300 rpm with a stirrer for 80 seconds, when the particle size distribution of the coating film component contained in this solvent is measured by light scattering method , cumulative 90% of the colored photosensitive resin composition has a particle size of 0.5 μm or less and a maximum particle size of 1.0 μm or less.

The third aspect of the present invention is that the solid content of the colored photosensitive resin composition is, by weight percentage, (A) the content of the pigment is 15% to 50%, and the content of (B) the binder polymer is 20% to 55%. Hereinafter, the content of (C) photopolymerizable compound is not less than 10% and not more than 45%, and the content of (D) photopolymerization initiator is not less than 3% and not more than 20%, relative to (A) 1 weight part of pigment (E) pigment dispersant It is 0.01-1 weight part of the colored photosensitive resin composition as described in this invention 1 or this invention 2.

The fourth aspect of the present invention is any colored photosensitive resin composition described in the first to third aspects of the present invention in which (D) the photopolymerization initiator is an acetophenone-based photopolymerization initiator.

The fifth aspect of the present invention is any colored photosensitive resin composition described in the first to fourth aspects of the present invention in which (E) the pigment dispersant is a polyethylene-based dispersant, an ester-based dispersant, or a polyurethane-based dispersant.

The sixth aspect of the present invention is a method for forming a colored pattern, which is to apply any colored photosensitive resin composition described in the first to fifth aspects of the present invention on a substrate, dry it to form a coating film, and develop the coating film after exposure. feature.

The seventh aspect of the present invention is a method of manufacturing a color filter, which is characterized in that the coloring pattern forming method described in the sixth aspect of the present invention is repeated for desired colors.

The 8th aspect of this invention is the manufacturing method of the color filter described in the 7th aspect of this invention whose desired color is red, green, and blue.

Description of drawings

FIG. 1 is a schematic diagram showing an example of a color filter.

Fig. 2 is a schematic view showing a process flow of forming a colored pattern.

Fig. 3 is a schematic view showing a process flow of forming a colored pattern.

Fig. 4 is a schematic diagram showing a process flow of forming a colored pattern.

Fig. 5 is a schematic view showing a cross-sectional shape of a colored pattern. In the figure, 1: color filter 2: coloring graphics 2R: red pixel 2': coloring graphics 2G: green pixel 2": coloring graphics 2B: blue pixel 3: substrate 4: coloring photosensitive layer 4': Colored photosensitive layer 4": Colored photosensitive layer 5: Photomask 51: Glass plate

52: Shading layer

53: Translucent part 6: Light

Detailed ways

The colored photosensitive resin composition of the present invention (hereinafter referred to as the colored photosensitive resin composition) contains (A) pigment, (B) binder polymer, (C) photopolymerizable compound, (D) photopolymerizable Initiator, (E) pigment dispersant and (F) solvent.

(A) The pigment may be an organic pigment of an organic substance or an inorganic pigment of an inorganic substance. Examples of inorganic pigments include metal oxides, metal complex salts, inorganic salts of barium sulfate (base pigments), and the like. Among such pigments, organic pigments are preferably used.

Specific examples of organic pigments include pigments classified as Pigment in coulour index (published by The Society of Dyers and Colourists). Specifically, C.I. Pigment Yellow (Pigment Yellow)-1, C.I. Pigment Yellow-3, C.I. Pigment Yellow-12, C.I. Pigment Yellow-13, C.I. Pigment Yellow-14, C.I. Pigment Yellow-15, C.I. Pigment Yellow- 16, C.I. Pigment Yellow-17, C.I. Pigment Yellow-20, C.I. Pigment Yellow-24, C.I. Pigment Yellow-3 1, C.I. Pigment Yellow-53, C.I. Pigment Yellow-83, C.I. Pigment Yellow-86, C.I. Pigment Yellow-93 , C.I. Pigment Yellow-94, C.I. Pigment Yellow-109, C.I. Pigment Yellow-110, C.I. Pigment Yellow-117, C.I. Pigment Yellow-125, C.I. Pigment Yellow-128, C.I. Pigment Yellow-137, C.I. Pigment Yellow-138, C.I. Pigment Yellow-139, C.I. Pigment Yellow-147, C.I. Pigment Yellow-148, C.I. Pigment Yellow-150, C.I. Pigment Yellow-153, C.I. Pigment Yellow-154, C.I. Pigment Yellow-166, C.I. Pigment Yellow-173 and other yellow pigments; C.I. Pigment Orange 13, C.I. Pigment Orange 31, C.I. Pigment Orange 36, C.I. Pigment Orange 38, C.I. Pigment Orange 40, C.I. Pigment Orange 42, C.I. Pigment Orange 43, C.I. Pigment Orange 51, C.I. Pigment Orange 55, C.I. Pigment Orange 59, C.I. Pigment Orange 61, C.I. Pigment Orange 64, C.I. Pigment Orange 65, C.I. Pigment Orange 71, C.I. Pigment Orange 73 and other orange pigments; C.I. Pigment Red (Pigmentred) 9, C.I. Pigment Red 97, C.I. Pigment Red 105, C.I. Pigment Red 122, C.I. Pigment Red 123, C.I. Pigment Red 144, C.I. Pigment Red 149, C.I. Pigment Red 166, C.I. Pigment Red 168, C.I. Pigment Red 176, C.I. Pigment Red 177, C.I. Pigment Red 180, C.I. Pigment Red 192, C.I. Pigment Red 215, C.I. Pigment Red 216, C.I. Pigment Red 224, C.I. Pigment Red 242, C.I. Pigment Red 254, C.I. Pigment Red 264, C.I. Pigment Red 265 and other red pigments; C.I. Pigmentblue (Pigmentblue) 15, C.I. Pigment Blue 15 :3, C.I. Pigment Blue 15:4, C.I. Pigment Blue 15:6, C.I. Pigment Blue 60 and other blue pigments; C.I. Pigment Violet (Pigmentviolet) 1, C.I. Pigment Violet 19, C.I. Pigment Violet 23, C.I. Pigment Violet 29, C.I. Pigment Violet 32, C.I. Pigment Violet 36, C.I. Pigment Violet 38 and other violet (purple) pigments; C.I. Pigment Green (Pigmentgreen) 7, C.I. Pigment Green 36 and other green pigments; C.I. Pigment Brown (Pigmentbrown) 23, C.I. Pigment Brown 25, etc. Brown pigments; etc. These organic pigments may be used alone or in combination of two or more.

Such organic pigments can be subjected to rosin treatment, surface treatment using pigment derivatives that introduce acidic or basic groups, etc., grafting (graft) treatment on the surface of pigments using polymer compounds, etc., using sulfuric acid as needed. A micronization treatment by the micronization method, or a cleaning treatment with an organic solvent or water for the purpose of removing impurities. The particle size of such organic pigments is about 10nm to 150nm.

The content of the pigment is usually more than 5% by weight relative to the solid component (hereinafter referred to as the solid component) after volatilization of the volatile component (solvent) contained in the colored photosensitive resin composition. The coloring pattern of coloring is above 15%, preferably above 20%, preferably above 30%, usually below 60%, preferably below 45%. And when using organic pigments, the use amount of the organic pigments is usually more than 50% by weight relative to the total amount of pigments, preferably more than 55%, and all (100%) of the pigments are also organic pigments.

(B) Adhesive polymer uses as the copolymer of (meth)acrylic acid and (meth)acrylic acid benzyl ester, the content of (meth)acrylic structural unit is more than 25% below 40% with molar percentage, and acid value is in More than 90 and less than 160, and the weight average molecular weight (Mw) is preferably about 20,000 to 40,000. The acid value of the binder polymer can be obtained by dissolving 1 g of the binder polymer in a mixed solvent of 10 cm ³ of water and 40 cm ³ of acetone, and measuring the pH thereof while titrating an aqueous potassium hydroxide solution. The weight average molecular weight (Mw) is a value measured by permeation chromatography (GPC) based on polystyrene.

The binder polymer content of the colored photosensitive resin composition is usually at least 5%, preferably at least 20%, usually at most 90%, preferably at most 55% by weight relative to the solid content of the present composition.

(C) The photopolymerizable compound is a compound that polymerizes by active groups generated from a photopolymerization initiator by light irradiation, an acid, and the like, and examples thereof include compounds having polymerizable carbon-carbon unsaturated bonds.

Such a photopolymerizable compound is preferably a polyfunctional photopolymerizable compound having four or more functional groups. Examples of polyfunctional photopolymerizable compounds having four or more functional groups include pentaerythritol tetraacrylate, pentaerythritol tetramethacrylate, dipentaerythritol pentaacrylate, dipentaerythritol tetramethacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexaacrylate, and dipentaerythritol hexaacrylate. Methacrylate, etc.

The photopolymerizable compound content of the colored photosensitive resin composition is usually 1% to 60% by weight relative to the solid content, preferably 3% to 50%, most preferably 10% to 45%. the following.

(D) As a photoinitiator, the active radical generating agent which generate|occur|produces an active radical by light irradiation, the acid generator which generates an acid, etc. are mentioned. As an active group generating agent, an acetylphenol type photoinitiator, a benzoyl type photoinitiator, a triazine type photoinitiator, a benzoyl type photoinitiator, etc. are mentioned, for example. Among them, an acetylphenol-based photopolymerization initiator is preferable, and an initiator mainly composed of 2-methyl-2-morpholino-1-(4-methylphenylthio)propanyl-1-one is most preferable.

Examples of the acetylphenol-based photopolymerization initiator include 2-methyl-2-morpholino-1-(4-methylphenylthio)propyl-1-one, diethoxyacetylphenol, 2- Hydroxy-2-methyl-1-phenylpropyl-1-one, xylylene ketal, 2-hydroxy-2-methyl-1-[4-(2-hydroxyethoxy)phenyl]propane Base-1-one, 1-hydroxycyclohexyl phenone, 2-bibenzoyl-2-dimethylamino-1-(4-morpholinophenyl) butyl-1-one, 2-hydroxy- Oligomers of 2-methyl-1-[4-(1-methylvinyl)phenyl]propyl-1-one, etc.

As a benzoyl benzene series photoinitiator, benzoyl, benzoyl methyl ether, benzoyl ethyl ether, benzoyl isopropyl ether, benzoyl isobutyl ether etc. are mentioned, for example.

Examples of triazine-based photopolymerization initiators include 2,4-bis(trichloromethane)-6-(4-methoxybenzene)-1,3,5-triazine, 2,4-bis (Trichloromethane)-6-(4-methoxynaphthalene)-1,3,5-triazine, 2,4-bis(trichloromethane)-6-piperonyl-1,3,5- Triazine, 2,4-bis(chloroform)-6-(4-methoxystyrene)-1,3,5-triazine, 2,4-bis(chloroform)-6-[2 -(5-methylfuran-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethane)-6-[2-(furan-2-yl)ethenyl ]-1,3,5-triazine, 2,4-bis(trichloromethane)-6-[2-(4-diethylamino-2-toluene)vinyl]-1,3,5-tri oxazine, 2,4-bis(trichloromethane)-6-[2-(3,4-dimethoxyphenyl)ethenyl]-1,3,5-triazine, etc.

Examples of benzophenone-based photopolymerization initiators include benzophenone, methyl o-benzoylbenzoate, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenone, and Phenyl sulfide, 3,3',4,4'-tetra-tert-butylpercarbonylcarbonyl benzophenone, 2,4,6-trimethylbenzophenone, etc.

As active radical generators, for example, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 2,2'-bis(o-chlorobenzene)-4,4',5,5' -Tetraphenyl-1,2'-biimidazole, 10-butyl-2-chloroacridine, 2-ethylanthraquinone, dibenzoyl, 9,10-phenanthrenequinone, camphorquinone, phenylglyoxylic acid Methyl esters, titanium compounds, etc.

Examples of acid generators include 4-hydroxyxylylenesulfonium p-toluenesulfonate, 4-hydroxyxylylenesulfonium hexafluoroantimonate, 4-acetoxyxylylenesulfonium p- Toluenesulfonate, 4-acetoxybenzene·methyl·benzenesulfonium hexafluoroantimonate, triphenylsulfonium p-toluenesulfonate, triphenylsulfonium hexafluoroantimonate, diphenyliodonium p-toluenesulfonate Onium salts such as diphenyliodonium hexafluoroantimonate, nitrobibenzoyl tosylate, benzoyl tosylate, etc.

Furthermore, among the above-mentioned compounds as active radical generators, there are compounds that generate both active radicals and acids, and active radical generators such as triazine-based photopolymerization initiators can also be used as acid generators.

Such a photoinitiator may be used individually, respectively, and may use it in combination of 2 or more types.

The photopolymerization initiator content of the colored photosensitive resin composition is usually 1% to 25% by weight relative to the solid content, preferably 3% to 20%.

This colored photosensitive resin composition may contain a photoinitiator. A photopolymerization initiator is used in combination with a photopolymerization initiator, and is a compound contained in order to accelerate the polymerization of a photopolymerizable compound. As a photoinitiator, a thioxanthone type photoinitiator, an amine type photoinitiator, an alkoxy anthracene type photoinitiator etc. are mentioned, for example.

Examples of thioxanthone-based photopolymerization initiation adjuvants include 2-isopropylthioxanthone, 4-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-di Chlorthioxanthone, 1-chloro-4-propoxythioxanthone, etc.

Examples of amine-based photopolymerization start aids include triethanolamine, methyldiethanolamide, triisopropanolamide, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate , 4-Dimethylaminobenzoic acid isoamyl ester, 2-dimethylaminoethyl benzoate, 4-dimethylaminobenzoic acid 2-ethylhexyl ester, N, n-dimethyl-p-toluidine, 4, 4'-bis(dimethylamino)benzophenone (commonly known as ether ketone), 4,4'-bis(diethylamino)benzophenone [as (EAB-F), (Hodo Chemical Industry Co., Ltd., commercially available), 4,4'-bis(ethylmethylamino)benzophenone, etc.

Examples of alkoxyanthracene-based photopolymerization initiators include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2 -Ethyl-9,10-diethoxyanthracene and the like.

When such a photopolymerization initiator is used, the amount used is usually not more than 10 mol, preferably not less than 0.01 mol and not more than 5 mol, per mol of the photopolymerization initiator.

In the present invention, an acetylphenol-based photopolymerization initiator is used as the photopolymerization initiator, and a thioxanthone-based photopolymerization initiator is preferably used as the photopolymerization initiator.

This colored photosensitive resin composition contains (E) a pigment dispersant. With the pigment-containing dispersant, the pigment can be contained in a uniformly dispersed state, and a uniformly colored colored pattern can be obtained. Such pigment dispersants are preferably polyethyleneimine-based dispersants, ester-based dispersants, and polyurethane-based dispersants. They are used alone or in combination of two or more.

The content of the pigment dispersant is usually more than 0.01 part by weight, preferably more than 0.05 part by weight, usually less than 1 part by weight, preferably less than 0.5 part by weight, per 1 part by weight of the pigment.

This colored photosensitive resin composition is manufactured and stored in the state diluted with (F) solvent. Examples of the solvent (F) include the same solvents commonly used in colored photosensitive resin compositions, for example, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether. Ethylene glycol monoalkyl ethers such as ethers;

Diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether and diethylene glycol dibutyl ether;

Methyl acetate cellosolve, ethyl acetate cellosolve and other ethylene glycol alkyl ether acetates (esters);

Propylene glycol monomethyl ether acetate (ester), Propylene glycol monoethyl ether acetate (ester), Propylene glycol monopropyl ether acetate (ester), Propylene glycol monobutyl ether acetate (ester) and Methoxyamyl acetic acid Salts (esters) and other alkyl alcohol alkyl ether acetates (esters);

Benzene, toluene, xylene and other aromatic hydrocarbons;

Methyl ethyl ketone, acetone, methyl amyl ketone, methyl isobutyl ketone, cyclohexanone and other ketones;

Ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, glycerin and other alcohols;

Ethyl 3-ethoxypropionate, methyl 3-methoxypropionate and other esters;

Cyclic esters such as γ-butyrolactone.

These solvents can be used alone or in combination of two or more, and the amount used, that is, the content of the colored photosensitive resin composition diluted in the solvent, is usually 50% to 90% by weight, preferably 60% or more. Below 85%.

In this colored photosensitive resin composition diluted in a solvent, (A) pigment is normally dispersed in a composition.

(B) Binder polymer, (C) photopolymerizable compound, (D) photopolymerization initiator, (E) dye dispersant are melt|dissolved in (F) solvent.

This colored photosensitive resin composition is formed by coating the colored photosensitive resin composition on the surface of a glass substrate by the spin coating method, and then drying at 100°C for 3 minutes to volatilize the volatile components to form a film (thickness: 1.6 μm). The resulting film is immersed in an alkaline aqueous solution of 2500 times by weight of the film (in percent by weight, an aqueous solution containing 0.05% sodium hydroxide and 0.2% sodium butylnaphthalene sulfonate respectively), and the aqueous solution is rotated at 300 rpm with a stirrer. After stirring for 80 seconds, when the particle size distribution of the particles contained in the aqueous solution was measured by the light scattering method, cumulative 90% of the colored photosensitive resin composition had a particle size of 0.5 μm or less and a maximum particle size of 1.0 μm or less.

And, the coloring photosensitive resin composition of the present invention is that, after coating this coloring photosensitive resin composition by spin-coating method on the glass substrate surface, dry at 100 DEG C for 3 minutes to volatilize the volatile components to form a film (thickness 1.6 μm), the obtained film is immersed in the solvent which is 2500 times by weight of the film, the solvent is stirred with a stirrer at 300 rpm for 80 seconds, and the coating film component contained in the solvent is measured by the light scattering method In the particle size distribution, cumulative 90% of the colored photosensitive resin composition has a particle size of 0.5 μm or less and a maximum particle size of 1.0 μm or less.

As the glass substrate, [#7059] glass substrate manufactured by Corning Incorporated is preferably used.

In order to form a film with a thickness of 1.6 μm, it is necessary to appropriately select the amount of solvent used, the rotation speed and temperature when coating the colored photosensitive resin composition by the spin coating method, for example, to increase the thickness, reduce the amount of solvent used, Or reduce the number of rotations, or lower the temperature and other measures. In order to reduce the thickness, it is advisable to take measures such as increasing the amount of solvent used, or increasing the number of rotations, and increasing the temperature.

In order to make the cumulative 90% particle size below 0.5 μm and the maximum particle size below 1.0 μm (in the case of immersion in alkaline aqueous solution and (F) solvent immersion), polyethyleneimine-based dispersants, ester It is a dispersant or a polyurethane dispersant.

This colored photosensitive resin composition may also add fillers, polymers other than (B) binder polymers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-coagulation agents, organic acids, organic ammonia compounds, Additives such as hardeners.

As a filler, fine particles, such as glass and alumina, are mentioned, for example.

(B) Binder polymer Examples of high molecular compounds include polyvinyl alcohol, polyacrylic acid, polyethylene glycol monoalkyl ether, polychloroalkyl acrylate, and the like.

Examples of adhesion promoters include ethylenetrimethoxysilane, ethylenetriethoxysilane, vinyltris(tris)(2-methoxyethoxy)silane, n-(2-aminoethyl)-3 -Aminopropylmethyldimethoxysilane, n-(2-aminoethyl)-3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyl Trimethoxysilane, 3-glycidoxymethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-chloropropylmethyldimethylsilane Oxysilane, 3-chloropropyltrimethoxysilane, 3-methylpropoxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, etc.

Examples of antioxidants include 2,2-thiobis(4-methyl-6-t-butylphenol), 2,6-di-t-butylphenol, and the like.

Examples of the ultraviolet absorber include 2-(3-tert-butyl-5-methyl-2-hydroxybenzene)-5-chlorobenzotriazole, alkoxybenzophenone, and the like.

Sodium polyacrylate etc. are mentioned as an anticoagulation agent.

Examples of organic acids include aliphatic monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, pentanoic acid, pivalic acid, hexanoic acid, diethylacetic acid, heptanoic acid, octanoic acid,

Oxalic acid, malonic acid, succinic acid, glutaric acid, adipic acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, tridecanedioic acid, methylmalonic acid, ethylmalonic acid , dimethylmalonic acid, methyl succinic acid, tetramethyl succinic acid, cyclohexanedicarboxylic acid, methylene succinic acid, methyl maleic acid, maleic acid (maleic acid), fumaric acid, methyl fumaric acid and other aliphatic dicarboxylic acids,

Aliphatic tricarboxylic acids such as propene tricarboxylic acid, propylene tricarboxylic acid (aconitic acid), and camphor tricarboxylic acid,

Aromatic monocarboxylic acids such as benzoic acid, toluic acid, p-isopropylbenzoic acid (cumic acid), dimethylbenzoic acid, 3,5-dimethylbenzoic acid,

Aromatic dicarboxylic acids such as phthalic acid, isophthalic acid, and terephthalic acid,

Aromatic polycarboxylic acids such as trimellitic acid, trimellitic acid, trimellitic acid, and pyromellitic acid.

Examples of organic ammonia compounds include n-propylamine, isopropylamine, n-butylamine, isobutylamine, sec-butylamine, t-butylamine, n-pentylamine, n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine , n-decylamine, n-dodecylamine, cyclohexylamine, 2-methylcyclohexylamine, 3-methylcyclohexylamine, 4-methylcyclohexylamine and other mono(cyclo)alkylamines kind,

Methylethylamine, diethylamine, methyl-n-propylamine, ethyl-n-propylamine, di-n-propylamine, diisopropylamine, di-n-butylamine, diisobutylamine, di-sec-butylamine, di-tert-butylamine, di-n-propylamine , di-n-hexylamine, methylcyclohexylamine, ethylhexylcyclohexylamine, dicyclohexylamine and other di(cyclo)alkylamines,

Dimethylethylamine, methyldiethylamine, triethylamine, dimethyl-n-propylamine, methyldi-n-propylamine, ethyldi-n-propylamine, tri-n-propylamine, triisopropylamine, tri-n-butylamine, Triisobutylamine, tri-sec-butylamine, tri-tert-butylamine, tri-n-pentylamine, tri-n-hexylamine, dimethylcyclohexylamine, diethylcyclohexylamine, methyldicyclohexylamine, ethyldicyclohexylamine, Tricyclohexylamine and other tri(cyclo)alkylamines,

2-aminoethanol, 3-amino-1-propanol, 1-amino-2-propanol, 4-amino-1-butanol, 5-amino-1-pentanol, 6-amino-1-hexanol, Mono(cyclic)alkanolamines such as 4-amino-1-cyclohexanol,

Two ( cyclo)alkanolamines,

Three ( cyclo)alkanolamines,

3-amino-1,2-propanediol, 2-amino-1,3-propanediol, 4-amino-1,2-butanediol, 4-amino-1,3-butanediol, 4-amino-1, 2-cyclohexanediol, 4-amino-1,3-cyclohexanediol, 3-dimethylamino-1,2-propanediol, 3-diethylamino-1,2-propanediol, 2-dimethylamino-1,2-propanediol Amino (cyclo)alkanediols such as amino-1,3-propanediol and 2-diethylamino-1,3-propanediol,

1-aminocyclopentanonemethanol, 4-aminopentanonemethanol, 1-aminocyclohexanonemethanol, 4-aminocyclohexanonemethanol, 4-dimethylaminocyclopentanonemethanol, 4-diethylaminocyclopentanone Ketone methanol, 4-dimethylaminocyclohexanone methanol, 4-diethylaminocyclohexanone methanol and other cycloalkanone methanol containing amino groups,

β-alanine, 2-aminobutyric acid, 3-aminobutyric acid, 4-aminobutyric acid, 2-aminoisobutyric acid, 3-aminoisobutyric acid, 2-aminovaleric acid, 5-aminovaleric acid, 6-aminocaproic acid, 1-aminocyclopropanecarboxylic acid, 1-aminocyclohexylcarboxylic acid, 4-aminocyclohexylcarboxylic acid and other aminocarboxylic acids,

Aniline, o-methylaniline, m-methylaniline, p-methylaniline, p-ethylaniline, p-n-propylaniline, p-isopropylaniline, p-n-butylaniline, p-tert Butylaniline, 1-naphthylaniline, 2-naphthylaniline, N, n-dimethylaniline, N, n-diethylaniline, p-methyl-N, n-dimethylaniline and other aromatic amines,

O-aminophenyl alcohol, m-aminophenyl alcohol, p-aminophenyl alcohol, p-dimethylaminophenyl alcohol, p-diethylaminophenyl alcohol and other aminophenyl alcohols,

Aminophenols such as o-aminophenol, m-aminophenol, p-aminophenol, p-dimethylaminophenol, p-diethylaminophenol,

Aminobenzoic acids such as m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, and p-diethylaminobenzoic acid.

Examples of the curing agent include compounds capable of crosslinking the binder polymer by reacting with carboxyl groups in the binder polymer (B) by heating.

Examples of epoxy compounds include bisphenol A epoxy resins, hydrogenated bisphenol A epoxy resins, bisphenol F epoxy resins, hydrogenated bisphenol F epoxy resins, novolac epoxy resins, and other aromatic Epoxy resins such as family epoxy resins, cycloaliphatic epoxy resins, double-ring epoxy resins, glyceryl ester resins, glycerylamine resins, epoxidized oils, and brominated derivatives of such epoxy resins aliphatic, cycloaliphatic or aromatic epoxy compounds other than epoxy resins and their brominated derivatives, epoxides of butadiene (co)polymers, isoprene (co)polymers Epoxides, (co)polymers of glyceryl (iso)acrylate, triglycidyl isocyanurate, and the like.

Examples of the oxetane compound include carbonate dioxetane, xylylene dioxetane, adipate dioxetane, terephthalate dioxetane Cyclobutane, cyclohexanedicarboxylic acid dioxetane, etc.

The colored photosensitive resin composition of the present invention may also contain an epoxy compound or an oxetane compound as a hardening agent, the epoxy group of the epoxy compound, the oxetane compound of the oxetane compound A compound obtained by ring-opening polymerization of an alkane skeleton. Such compounds include, for example, polyvalent carboxylic acids, polyvalent carboxylic acid anhydrides, acid generators, and the like.

Polycarboxylic acids include, for example, phthalic acid, 3,4-dimethylphthalic acid, isophthalic acid, terephthalic acid, pyromellitic acid, trimesic acid, 1,4,5 , 8-naphthalene tetracarboxylic acid, 3,3',4,4'-benzophenone tetracarboxylic acid and other aromatic polycarboxylic acids,

Succinic acid, glutaric acid, adipic acid, 1,2,3,4-butyltetracarboxylic acid, maleic acid, fumaric acid, methylene succinic acid and other aliphatic polycarboxylic acids,

Hexahydrophthalic acid, 3,4-dimethyltetrahydrophthalic acid, hexahydroisophthalic acid, hexahydroterephthalic acid, 1,2,4-cyclopentatricarboxylic acid, 1,2, Alicyclic polyhydric carboxylic acids such as 4-cyclohexanetricarboxylic acid, cyclopentanetetracarboxylic acid, and 1,2,4,5-cyclohexanetetracarboxylic acid, and the like.

Examples of polyvalent carboxylic acid anhydrides include aromatic polycarboxylic acid anhydrides such as phthalic anhydride, pyromellitic anhydride, trimellitic anhydride, and 3,3',4,4'-benzophenone tetracarboxylic dianhydride. ,

Methylene succinic anhydride, succinic anhydride, methylmaleic anhydride, dodecenyl succinic anhydride, tricarboxylic anhydride, maleic anhydride, 1,2,3,4-butyltetracarboxylic dianhydride and other aliphatic polycarboxylic acid anhydrides,

Hexahydrophthalic Anhydride, 3,4-Dimethyltetrahydrophthalic Anhydride, 1,2,4-Cyclopentanetricarboxylic Anhydride, 1,2,4-Cyclohexanetricarboxylic Anhydride, Cyclopentanetetracarboxylic Alicyclic polyhydric carboxylic acid anhydrides such as acid dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, Himic anhydride, Nadin anhydride, etc.

Ester group-containing carboxylic acid anhydrides such as ethylene glycol bis-trimellitic acid and glycerol trimellitic anhydride.

Carboxylic acid anhydrides can be used, commercially available epoxy resin hardeners. Examples of such epoxy resin hardeners include the trade name [adeka hardner-EH-700] (Asahi Denka Co., Ltd.), the trade name [rikasit HH] (New Nippon Chemical Co., Ltd.), the trade name [MH- 700] (Shin Nippon Chemical Co., Ltd.), etc.

These curing agents can be used alone or in combination of two or more.

This colored photosensitive resin composition is coated on the substrate 3 and the (F) solvent is removed to form the layer 4 made of this solid component on the substrate 3 . Coating The colored photosensitive resin composition can be applied to a substrate with a uniform thickness, a spin coating method, or the like. After coating, the (F) solvent can be removed by heating. The heating temperature is, for example, in the range of not less than 60°C and not more than 120°C. The layer 4 formed of this solid component is a layer formed by removing volatile components such as (F) solvent from this colored photosensitive resin composition.

The thickness of the layer 4 formed by this kind of solid component is generally not less than 0.8 μm and not more than 2.5 μm, but in order to ensure this thickness, the usage amount of the solvent contained in the colored photosensitive resin composition should be properly selected to spin coat The rotation speed, temperature, etc. when coating the colored photosensitive resin composition by the method. For example, in order to increase the thickness, the amount of solvent used, the number of rotations, and the temperature can be reduced; in order to reduce the thickness, the amount of solvent used, the number of rotations can be increased, and the temperature can be increased.

The i-line is preferably used as the irradiation light, and the i-line is light having a wavelength of 365 nm. The i-line parallel light can be irradiated by an exposure machine used to manufacture color filters. By irradiating through a slit with a line width of 100 μm, a linear i-line parallel light with a line width (w) of 100 μm can be irradiated.

After irradiating i-line parallel light, it can be developed by immersing in an alkaline aqueous solution. Examples of alkaline aqueous solutions include aqueous solutions containing potassium hydroxide and sodium butylnaphthalenesulfonate. Specifically, with respect to 100 parts by weight of the aqueous solution, the content of potassium hydroxide is 0.05 parts by weight, and the content of sodium butylnaphthalenesulfonate is 0.05 parts by weight. The temperature of the alkaline aqueous solution is usually about 23° C., and the immersion time is usually about 40 seconds to 120 seconds. After immersion, the developer is usually removed by washing with water.

After development, heating at a heating temperature of about 180°C to 240°C for about 20 minutes forms a colored pattern, but this pattern is linear.

In this colored photosensitive resin composition, the content of (A) the coloring agent is not less than 15% and not more than 50%, and the content of (B) the binder polymer is not less than 20% and not more than 55%, in weight percent relative to the solid component, (C) The content of the photopolymerizable compound is not less than 10% and not more than 45%, the content of (D) the photopolymerization initiator is not less than 3% and not more than 20%, relative to (A) 1 weight part of the pigment (E) The pigment dispersant is 0.01 ~1 part by weight is preferable.

The method for forming a colored pattern of the present invention is characterized in that the colored photosensitive resin composition is used to form a coating film on the substrate 2, and after exposing the layer, it is developed. The method for manufacturing a color filter of the present invention is characterized in that the method for forming a colored pattern described above is used, and the method for forming a colored pattern is suitably used in the process of the method for manufacturing a color filter.

Specifically, a layer 4 made of this solid component is formed on the substrate 2 (Fig. 2(a)), after exposure of the layer 4 made of this solid component (Fig. 2(b)), development (Fig. 2(c) )).

As the substrate 3 , substrates with smooth surfaces such as glass substrates, single crystal silicon wafers, and plastic plates are exemplified. The substrate can be transparent. Moreover, when a single-crystal silicon wafer is used as a substrate, CCDs and thin-film TFTs can also be formed on the surface of the single-crystal silicon wafer.

The present colored photosensitive resin composition diluted in (F) solvent is coated on the substrate 3 to form the layer 4 composed of the present solid component. As the coating method, a method capable of coating the colored photosensitive resin composition on a substrate with a uniform thickness, such as a spin coating method, can be used. After coating, the solvent is removed. The solvent can be removed by heating. The layer 4 formed of this solid component is a layer formed by removing volatile components such as (F) solvent from this colored photosensitive resin composition, and its thickness is generally not less than 0.8 μm and not more than 2.5 μm.

Next, the layer 4 formed of this solid component is exposed (FIG. 2(b)). Light 6 is irradiated, for example, through a photomask 5 . As the light 6, ultraviolet rays called i-rays (wavelength 365 nm) are generally used. The light is irradiated through a photomask, and the photomask 5 is formed by setting a light-shielding layer 52 on the surface of the glass plate 5 to shield the light. The part of the glass plate that is not provided with a light-shielding plate is the light-transmitting part 53 through which the light passes. The layer 4 formed by the solid component is a pattern that is exposed according to the pattern of the light-transmitting part, forming an unexposed part where the light does not irradiate. The irradiated field 41 and the irradiated field 42 irradiated by light. The amount of light irradiated in the irradiation area 42 depends on (A) the type and content of the colorant used, (B) the weight-average molecular weight and content of the binder polymer, the composition of the monomer unit, and (C) the photopolymerization property. The type and content of the compound, the type and content of the (D) photopolymerization initiator, and the like are appropriately selected.

After exposure, it was developed (Fig. 2(c)). The layer 4 formed of the exposed solid component is brought into contact with a developer for development. Specifically, the substrate 3 with the layer 4 formed of the solid component formed on the surface thereof is immersed in the developer. As a developing solution, an alkaline aqueous solution is usually used. Examples of the alkaline aqueous solution include aqueous solutions of alkaline compounds such as sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide, and tetramethylammonia hydroxide. The non-irradiated area 41 in the layer 4 formed of the present solid component, which is not irradiated with light, is eliminated by the development. On the other hand, the light-irradiated area 42 remains, and the colored figure 2 is formed.

After development, the colored pattern 2 is usually obtained by washing with water and drying. After drying, it can also be heated. By heating the colored pattern, the hardness tends to be increased and the mechanical strength tends to be improved. When the present colored photosensitive resin composition contains a curing agent, the mechanical strength can be further improved. The heating temperature is usually at least 180°C, preferably at least 200°C, and usually at most 250°C.

The colored pattern 2 formed in this way has a cross-sectional shape of a conical shape or even a rectangular shape.

Form the substrate 3 of coloring pattern 2 in this way, form the layer 4 ' (Fig. 3 (a)) that contains the coloring agent of different colors, this solid component of coloring different colors to form, after exposing this layer 4 ' (Fig. 3(b)), by developing (FIG. 3(c)), and then forming a colored pattern 2'. By using the colored photosensitive resin composition colored in different colors to repeat the above-mentioned operations, the colored patterns 2" (Fig. figure 1).

Example

Hereinafter, although an Example demonstrates this invention in more detail, this invention is not limited to these Examples.

Measuring method of particle size: adopt light scattering method. The apparatuses used were MICROTRAC Particle Size Measuring Apparatus UPA150 and Model 9230UPA manufactured by LEED & NORTHRUP COMPANY.

Example 1 [Manufacture of blue colored photosensitive resin composition]

(B) The copolymer of methacrylic acid and phenyl methacrylic acid [the ratio of methacrylic acid unit and phenyl methacrylic acid unit is 30:70 by weight ratio (molar ratio), acid value is 113, weight average molecular weight is 25000] 0.828 weight share,

(C) 0.828 parts by weight of pentaerythritol hexaacrylate,

(D) photopolymerization initiator [2-methyl-2-morpholino-1-(4-methylphenylthio) propane-1-one] 0.199 parts by weight,

(D) photopolymerization initiator [2,4-diethylthiothioxanthone] 0.099 parts by weight and

(F) 6.522 parts by weight of propylene glycol monomethyl ether acetate were mixed to obtain a mixture 1 .

(A) Pigment [C.I. Pigment Blue 15:6] 1.030 parts by weight,

(A) Pigment [C.I. Pigment Violet 23] 0.016 parts by weight,

(E) 0.298 parts by weight of polyethyleneimine dispersant and

(F) 5.178 parts by weight of propylene glycol monomethyl ether acetate were mixed to form a mixture 2 to obtain a colored photosensitive resin composition (blue). [Solubility of Coating Film]

On the surface of a glass substrate [manufactured by Corning Corporation, (#7059)]3, the colored photosensitive resin composition obtained above was coated by the spin coating method, and dried at 100°C for 3 minutes to volatilize its volatile components to form a colored photosensitive resin composition. Resin composition layer [1.6 μm in thickness] 4 . Immerse the coating film in alkaline aqueous solution [by weight percentage, each containing 0.05% sodium hydroxide and 0.2% aqueous solution of butylnaphthalene sodium sulfonate], stir the developer at 300rpm for 80 seconds with a stirrer, and observe the glass substrate Then it can be seen that the coating film is dissolved, and the light transmittance of the glass substrate is 100%. Furthermore, as a result of examining the particle size distribution of the particles present in the developer after dissolution, the cumulative 90% particle size: 0.085 μm, the average particle size: 0.05 μm, and the maximum particle size: 0.15 μm.

Moreover, the obtained coating film was also immersed in propylene glycol monomethyl ether acetate, and after stirring the propylene glycol monomethyl ether acetate with a stirrer at 300 rpm for 80 seconds, the glass substrate was observed to dissolve the coating film, and the glass substrate was transparent. The light rate is 100%. Furthermore, as a result of examining the particle size distribution of particles present in propylene glycol monomethyl ether acetate after dissolution, cumulative 90% particle size: 0.085 μm, average particle size: 0.05 μm, maximum particle size: 0.15 μm. [Formation of blue pixels]

On the surface of a glass substrate [manufactured by Corning Corporation, (#7059)]3, the colored photosensitive resin composition obtained above was coated by the spin coating method, and dried at 100°C for 3 minutes to volatilize its volatile components to form a colored photosensitive resin composition. Resin composition layer [1.6 μm in thickness] 4 .

After cooling, this colored photosensitive resin composition layer 4 was irradiated with i-line [wavelength 365 nm] through a photomask for exposure. The light source of the i-line uses an ultra-high pressure mercury lamp, and it is irradiated after becoming parallel light. The amount of irradiated light was 150 mJ/cm ² . As the photomask, photomasks forming linear color pixels having a line width of 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm, 9 μm, 10 μm, 20 μm, 30 μm, 40 μm, 50 μm, and 100 μm were used.

Then the exposed glass substrate [with a colored photosensitive resin composition layer formed on the surface] was immersed in the developing solution [by weight percentage, each containing 0.05% sodium hydroxide and 0.2% aqueous solution of sodium butylnaphthalenesulfonate] for 80 seconds After developing and washing with pure water, it was heated at 220° C. for 20 minutes to form a red pixel 2 ( FIG. 2( c )). The cross-sectional shape of the formed blue pixel was a conical shape without roughness, which was good.

Example 2 [Manufacture of Blue Colored Photosensitive Resin Composition]

In Example 1, except that the polyethyleneimine-based dispersant was changed to a polyurethane-based dispersant, it was mixed in the same manner as in Example 1 to obtain a colored photosensitive resin composition (blue). [Solubility of Coating Film]

Except that the colored photosensitive resin composition obtained above was used instead of the colored photosensitive resin composition obtained in Example 1, the same procedure as in Example 1 was carried out to investigate the particle size distribution of the particles present in the developing solution after dissolution of the obtained coating film. 90% particle size: 0.085 μm, average particle size: 0.05 μm, maximum particle size: 0.15 μm.

As a result of investigating the particle size distribution of the particles present in the propylene glycol monomethyl ether acetate solution, the cumulative 90% particle size: 0.085 μm, the average particle size: 0.05 μm, and the maximum particle size: 0.15 μm. [Formation of blue pixels]

Using the colored photosensitive resin composition obtained above to replace the colored photosensitive resin composition obtained in Example 1, the same operation as in Example 1 was performed, and the cross-sectional shape of the obtained blue pixel was a conical shape without roughness, which was good. Comparative Example [Manufacture of Blue Colored Photosensitive Resin Composition]

(B) Copolymer of methacrylic acid and phenylmethacrylic acid [the ratio of methacrylic acid unit and phenylmethacrylic acid unit is 30:70 in terms of the molar ratio (molar ratio) of substances, the acid value is 113, and the weight average molecular weight is 25000] 0.828 parts by weight,

(C) 0.828 parts by weight of pentaerythritol hexaacrylate,

(D) photopolymerization initiator [2-methyl-2-morpholine-1-(4-methylphenylthio) propane-1-one] 0.199 parts by weight,

(D) photopolymerization initiator [2,4-diethylthiothioxanthone] 0.099 parts by weight and

(F) 6.522 parts by weight of propylene glycol monomethyl ether acetate were mixed to obtain a mixture 1 .

(A) Pigment [C.I. Pigment Blue 15:6] 1.030 parts by weight,

(A) Pigment [C.I. Pigment Violet 23] 0.016 parts by weight,

(E) 0.298 parts by weight of polyethyleneimine dispersant and

(F) 5.178 parts by weight of propylene glycol monomethyl ether acetate were mixed to form a mixture 2 to obtain a colored photosensitive resin composition (blue). [Solubility of Coating Film]

Except that the colored photosensitive resin composition obtained above is used to replace the colored photosensitive resin composition obtained in Example 1, the same operation as in Example 1 is performed, and the obtained coating film is added to the developer and stirred with propylene glycol methyl ether acetate, and the coating film Peel off in chunks. At a level that can be recognized by naked eyes, there is almost no coloration in the developer solution and propylene glycol methyl ether acetate. [Formation of blue pixels]

Using the colored photosensitive resin composition obtained above to replace the colored photosensitive resin composition obtained in Example 1, the same operation as in Example 1, the cross-sectional shape of the obtained blue pixel is an inverse cone shape, and the roughness of the side wall is serious.

The colored photosensitive resin composition of the present invention has high sensitivity, and can form a colored pattern having a forward-tapered or rectangular cross-sectional shape and no roughness during development.

Claims (8)

1. photosensitive composition, contain (A) pigment, (B) binder polymer, (C) optical polymerism compound, (D) Photoepolymerizationinitiater initiater, (E) pigment dispersing agent and (F) solvent, this photosensitive composition, after being coated with this photosensitive composition with method of spin coating on the glass baseplate surface, made the volatile component volatilization down in dry 3 minutes at 100 ℃, form film (thickness is 1.6 μ m), with the gained film immersion in the alkaline aqueous solution of 2500 times of weight of this film (with percentage by weight, respectively contain NaOH 0.05%, the aqueous solution of sodium butylnaphthalenesulfonate 0.2%), with stirring machine this aqueous solution was stirred for 80 seconds with 300 rev/mins, when measuring the size-grade distribution of the particle that is contained in this aqueous solution by light scattering method, accumulate 90% particle diameter below 0.5 μ m, maximum particle diameter is below 1.0 μ m.

2. photosensitive composition, contain (A) pigment, (B) binder polymer, (C) optical polymerism compound, (D) Photoepolymerizationinitiater initiater, (E) pigment dispersing agent and (F) solvent, this photosensitive composition is, after being coated with this photosensitive composition with method of spin coating on the glass baseplate surface, made the volatile component volatilization down in dry 3 minutes at 100 ℃, form film (thickness is 1.6 μ m), with gained film immersion this solvent in 2500 times of weight of this film, with stirring machine this solvent was stirred for 80 seconds with 300rpm, by light scattering method measure be contained in this solvent be coated with the size-grade distribution of film component the time, accumulate 90% particle diameter below 0.5 μ m, maximum particle diameter is below 1.0 μ m.

3. photosensitive composition according to claim 1 and 2, solid constituent for photosensitive composition, with percentage by weight, (A) content of pigment is more than 15% below 50%, (B) content of binder polymer is more than 20% below 55%, (C) content of optical polymerism compound is more than 10% below 45%, (D) content of Photoepolymerizationinitiater initiater is more than 3% below 20%, and (A) pigment 1 weight portion (E) pigment dispersing agent is 0.01～1 weight portion relatively.

4. according to the photosensitive composition described in any of claim 1-3, wherein (D) Photoepolymerizationinitiater initiater is that acetophenone is a Photoepolymerizationinitiater initiater.

5. according to the photosensitive composition described in any of claim 1-4, wherein (E) pigment dispersing agent is that spreading agent, ester are spreading agent or polyurethane series spreading agent for poly-ethylene imine.

6. the formation method of a painted figure is characterized in that the photosensitive composition described in any with claim 1-5 coats on the substrate, forms by drying and films, and exposes and develops after this is filmed.

7. the manufacture method of a color filter is characterized in that required color is carried out repeatedly the formation method of the described painted figure of claim 6.

8. the manufacture method of color filter according to claim 7 is characterized in that required color is red, green and blue.

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