CN1317576C - A coupling structure of optical fiber and optical waveguide - Google Patents
A coupling structure of optical fiber and optical waveguide Download PDFInfo
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- CN1317576C CN1317576C CNB2004100691307A CN200410069130A CN1317576C CN 1317576 C CN1317576 C CN 1317576C CN B2004100691307 A CNB2004100691307 A CN B2004100691307A CN 200410069130 A CN200410069130 A CN 200410069130A CN 1317576 C CN1317576 C CN 1317576C
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- 230000003287 optical effect Effects 0.000 title claims abstract description 86
- 239000013307 optical fiber Substances 0.000 title claims abstract description 51
- 230000008878 coupling Effects 0.000 title abstract description 17
- 238000010168 coupling process Methods 0.000 title abstract description 17
- 238000005859 coupling reaction Methods 0.000 title abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 238000005516 engineering process Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 238000012545 processing Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 2
- 239000000835 fiber Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
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- 238000001459 lithography Methods 0.000 description 1
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- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Abstract
The invention relates to a coupling structure of an optical fiber and an optical waveguide, which is used for coupling a transmission light beam of the optical fiber and the optical waveguide area, wherein the optical waveguide area and more than one auxiliary alignment groove are manufactured on a substrate, the auxiliary alignment groove is used for placing the optical fiber, the optical waveguide area is provided with a light guide path and a transmission end face, the transmission end face faces the auxiliary alignment groove, the light guide path is aligned to the position of the coupling optical fiber, the tail end of the light guide path is aligned to the transmission end face, and the transmission end face forms an oblique angle which is more than 70 degrees and less than 90 degrees or less than minus 70 degrees and more than minus 90 degrees relative to the advancing direction of.
Description
Technical field
The present invention relates to a kind of optical coupling structure of light path system, the coupled structure of particularly a kind of optical fiber and optical waveguide.
Background technology
Optical waveguide assembly have stability good, can batch process, integrability, high sensitivity and be not subjected to the advantages such as influence of Electromagnetic Interference, therefore can be applied in the various environment.Planar optical waveguide (PlanarLightwave Circuits, PLCs) technology is that a kind of semiconductor technology of utilizing is made the technology that many optical waveguide channels make its tool beam split, close light and optics switching functions such as (optical switch) in the plane, be devoted to the assembly that separates is managed to be incorporated on the complete platform, to reduce the integral module size, reduce system complexity, reduce the signal leakage, to increase assembly fiduciary level and yield etc.
Planar optical waveguide be with silicon be used as base material, then respectively on base material the deposition three layers of different refractivity material, levels is overlayer (cladding layer), the middle layer is the ducting layer with high index.And how with optical waveguide end face on the chip of light waveguide and optical fiber align coupling, optical signal being transferred to other optical module, and reduce the loss that coupling is caused, the important topic that designs for chip of light waveguide.Coupling between optical fiber and optical waveguide constantly improves along with the development of chip of light waveguide, and initial fibre-optic waveguide coupling is the coupling of single channel waveguide and simple optical fiber, and the coupling ratio of optical waveguide and optical fiber is easier to realize.Yet optical waveguide develops to the direction of high density waveguide array at present, as the passive Light splitter toy (Splitter) of optical waveguide be used for will input luminous energy according to the ratio of setting, divide the assembly of bar optical fiber at the most by an optical fiber, be also referred to as coupling mechanism, the one-to-many structure of passive Light splitter toy branches into a plurality of reception optical waveguides by an input waveguide, so can't be coupled in the mode of single channel waveguide and simple optical fiber.
At present, the main planar optical waveguide that adopts and the coupling scheme of optical fiber prepare V-type groove with etching mode on chip of light waveguide, make fiber optic core point-blank with V-type groove positioning optical waveguides, dock with the coupling of optical waveguide array guaranteeing.Yet light beam is when being entered the optical waveguide accepted and entering the fiber end face of output by optical waveguide by fiber end face, incident light is perpendicular to both end faces that blocks, to make incident light with block end face and produce parasitic reflection, and enter and receive optical waveguide and cause non-people having the same aspiration and interest resonance, optical waveguide is coupled with aiming at of fiber end face will cause optical loss, increase light propagation loss, and then influence light beam and enter luminous flux with output optical waveguide.
Summary of the invention
The object of the present invention is to provide the coupled structure of a kind of optical fiber and optical waveguide, by making optical waveguide on a substrate and in order to put the auxiliary alignment grooves of optical fiber, when optical fiber places the trough aligned optical waveguide, can improve its alignment accuracy, effectively reduce coupling loss.And the end face between optical fiber and the optical waveguide is formed more than 70 degree the incident light direct of travel, and less than 90 degree or below negative 70 degree, and greater than the oblique angles of negative 90 degree.So can avoid the end face design of vertical incidence light to cause incident light and the parasitic reflection of blocking end face, and then reduce or suppress the noise of transmission course.
The coupled structure of optical fiber of the present invention and optical waveguide, the transmitting beam in order to coupled fiber and optical waveguide district is characterized in that, and a substrate contains an optical waveguide district and more than one auxiliary alignment grooves, and auxiliary alignment grooves is in order to settle optical fiber.The optical waveguide district is provided with leaded light path and transmission end face, the transmission end face regards to auxiliary alignment grooves, the position of leaded light path alignment coupled fiber and the end in leaded light path trim in the transmission end face, the transmission end face forms more than 70 degree with respect to the direct of travel of transmitting beam, and less than 90 degree or below negative 70 degree, and greater than negative 90 oblique angles of spending.
In addition, the section of auxiliary alignment grooves and optical fiber can not be the oblique angles of 90 degree and the transmission end face that is parallel to the optical waveguide district with respect to the formation of light direct of travel yet.The transmission end face can form two kinds of situations with respect to the preferred range of the formed angle of bevel of light direct of travel according to its vergence direction, is positive angle as the oblique angle, and its scope can be more than 70 degree, and less than 90 degree; Or the oblique angle is a negative angle, and its scope can be below negative 70 degree, and greater than negative 90 degree.
Description of drawings
Fig. 1 is the synoptic diagram of first embodiment of the invention; And
Fig. 2 is the synoptic diagram of second embodiment of the invention.
Wherein, description of reference numerals:
100--silicon substrate, 110--optical input area
The 111--first auxiliary alignment grooves, 112--input end face
120--optical waveguide district, the 121--first transmission end face
The 122--second transmission end face, 123--leaded light path
130--light output area, the 131--second auxiliary alignment grooves
132--accepts end face, 200--silicon substrate
210--optical input area, the 211--first auxiliary alignment grooves
212--input end face, 220--optical waveguide district
The 221--first transmission end face, the 222--second transmission end face
223--leaded light path, 230--light output area
The 231--second auxiliary alignment grooves, 232--accept end face
Embodiment
For making purpose of the present invention, structural attitude and function thereof are had further understanding, conjunction with figs. is described in detail as follows:
The present invention is embodiment with the passive Light splitter toy of optical waveguide made, and light path and its coupled structure of passive Light splitter toy and the construction of optical fiber institute is made in substrate, can be applicable to Fiber Optical Communication System and other optical system.
Please refer to Fig. 1, it is the synoptic diagram of first embodiment of the invention.On silicon substrate 100, form optical input area 110, optical waveguide district 120 and light output area 130.Optical input area 110 has the first auxiliary alignment grooves 111 and is passed to optical waveguide district 120 to settle an input optical fibre (not shown) will import light, the section that optical input area 110 has an input end face 112, the first auxiliary alignment grooves 111 and input optical fibre all trims input end face 112; Light output area 130 has a plurality of second auxiliary alignment grooves 131 to settle a plurality of output optical fibre (not shown), to accept a plurality of output light in optical waveguide district 120, the section that light output area 130 has the auxiliary alignment grooves 131 of the end face of accepting 132, the second and an output optical fibre all trims accepts end face 132; Optical waveguide district 120 is a pair of passive Light splitter toy, and a plurality of leaded lights path 123 that optical waveguide district 120 is provided with can be divided into the input light that is received by optical input area 110 a plurality of output light and be sent to light output area 130; Optical waveguide district 120 has the one first transmission end face 121 and the second transmission end face 122, the first transmission end face 121 regards to the input end face 112 of optical input area 110, the second transmission end face 122 is accepted end face 132 in the face of light output area 130, the position of each optical fiber of coupling is aimed in a plurality of leaded lights path 123, and the two ends in leaded light path 123 trim respectively in the first transmission end face 121 and the second transmission end face, 122, the first transmission end faces 121 and second transmits end face 122 forms about 82 degree with respect to the light direct of travel oblique angles.
Because the transmission end face in optical waveguide district is not perpendicular to the incident light direct of travel, is offset the oblique angle arbitrarily and can present, this oblique angle can reduce parasitic reflection and have the function that suppresses noise.
Input end face can not be the oblique angles of 90 degree with respect to the formation of light direct of travel with accepting end face yet, makes input end face and accepts end face parallel transmission end face respectively.Please refer to Fig. 2, it is the synoptic diagram of second embodiment of the invention.On silicon substrate 200, form optical input area 210, optical waveguide district 220 and light output area 230.Optical input area 210 has the first auxiliary alignment grooves 211 and is passed to optical waveguide district 220 to settle an input optical fibre (not shown) will import light, the section that optical input area 210 has an input end face 212, the first auxiliary alignment grooves 211 and input optical fibre all trims input end face 212; Light output area 230 has a plurality of second auxiliary alignment grooves 231 to settle a plurality of output optical fibres, to accept a plurality of output light in optical waveguide district 220, the section that light output area 230 has the auxiliary alignment grooves 231 of the end face of accepting 232, the second and an output optical fibre all trims accepts end face 232; Optical waveguide district 220 is the passive Light splitter toy of one-to-many, and a plurality of leaded lights path 223 that optical waveguide district 220 is provided with can be divided into the input light that is received by optical input area 210 a plurality of output light and be sent to light output area 230; Optical waveguide district 220 has the one first transmission end face 221 and the second transmission end face 222, and the two ends in leaded light path 223 trim respectively in the first transmission end face 221 and the second transmission end face 222, the first transmission end face 221 and the second transmission end face 222 form the oblique angle of about 82 degree with respect to the light direct of travel, the input end face 212 of optical input area 210 is parallel to the first transmission end face 221, the end face 232 of accepting of light output area 230 is parallel to the second transmission end face 222, and the position of each optical fiber of coupling is aimed in a plurality of leaded lights path 223.
The input end face of the coupled structure of optical fiber of the present invention and optical waveguide, accept end face with the transmission end face can utilize semi-conductive photomechanical printing technology (lithography process), add that via suitable mask design etching forms; Or utilize other face to process or the manufacturing of body form processing.The transmission end face can form two kinds of situations with respect to the preferred range of the formed angle of bevel of light direct of travel according to its vergence direction, is positive angle as the oblique angle, and its scope can be more than 70 degree, and less than 90 degree; Or the oblique angle is a negative angle, and its scope can be below negative 70 degree, and greater than negative 90 degree; And the preferred values of the embodiment of the invention is 82 degree, also can be the negative angle of equal angular, promptly negative 82 degree.
Though preferred embodiment of the present invention openly as mentioned above; right its is not in order to qualification the present invention, any those of ordinary skill, without departing from the spirit and scope of the present invention; when the variation that can do some and improvement, therefore scope of patent protection of the present invention is as the criterion with claim.
Claims (10)
1. the coupled structure of optical fiber and optical waveguide, it is characterized in that: form an optical waveguide district and more than one auxiliary alignment grooves in a substrate, should auxiliary alignment grooves be in order to settle an optical fiber, transmission ray be coupled this optical fiber and this optical waveguide district, this optical waveguide district is provided with a leaded light path and a transmission end face, this transmission end face regards to this auxiliary alignment grooves, the end in this leaded light path trims in the be coupled position of this optical fiber of this transmission end face and this leaded light path alignment, this transmission end face forms more than 70 degree with respect to the direct of travel of this transmission ray, and less than 90 degree or below negative 70 degree, and greater than negative 90 oblique angles of spending.
2. the coupled structure of optical fiber as claimed in claim 1 and optical waveguide is characterized in that, the section of this auxiliary alignment grooves and this optical fiber is parallel to this transmission end face.
3. the coupled structure of optical fiber as claimed in claim 1 and optical waveguide is characterized in that, this oblique angle is 82 degree.
4. the coupled structure of optical fiber as claimed in claim 1 and optical waveguide is characterized in that, this oblique angle is negative 82 degree.
5. the coupled structure of optical fiber as claimed in claim 1 and optical waveguide is characterized in that, this transmits end face, forms via implementing photomechanical printing, face processing and a body processing technology wherein.
6. the coupled structure of optical fiber and optical waveguide is formed at a silicon substrate, and it includes:
One optical input area has one first auxiliary alignment grooves to settle an input optical fibre to transmit an input light, and this optical input area also has an input end face, and the section of this first auxiliary alignment grooves and this input optical fibre all trims in this input end face;
One smooth output area has a plurality of second auxiliary alignment grooves to settle a plurality of output optical fibres, and to accept a plurality of output light, the light output area has the end face of accepting, and the section of this second auxiliary alignment grooves and this output optical fibre all trims this and accepts end face; And
The optical waveguide district, a plurality of leaded lights path is set is sent to the light output district will be divided into a plurality of these output light from this input light that this optical input area was received, this optical waveguide district has one first transmission end face and one second transmission end face, and the two ends in this leaded light path trim respectively in this first transmission end face and this second transmission end face, this leaded light path alignment position of this optical fiber that is coupled respectively, this first transmission end face and this second transmission end face form more than 70 degree with respect to the light direct of travel, and less than 90 degree or below negative 70 degree, and greater than negative 90 oblique angles of spending.
7. the coupled structure of optical fiber as claimed in claim 6 and optical waveguide is characterized in that, this input end face and this are accepted end face and be parallel to this transmission end face.
8. the coupled structure of optical fiber as claimed in claim 6 and optical waveguide is characterized in that, this oblique angle is 82 degree.
9. the coupled structure of optical fiber as claimed in claim 6 and optical waveguide is characterized in that, this oblique angle is negative 82 degree.
10. the coupled structure of optical fiber as claimed in claim 6 and optical waveguide is characterized in that, this input end face, this accepts end face and this transmission end face, via implement to xerox, face processing and a body processing technology wherein forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100691307A CN1317576C (en) | 2004-07-06 | 2004-07-06 | A coupling structure of optical fiber and optical waveguide |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100691307A CN1317576C (en) | 2004-07-06 | 2004-07-06 | A coupling structure of optical fiber and optical waveguide |
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| Publication Number | Publication Date |
|---|---|
| CN1719292A CN1719292A (en) | 2006-01-11 |
| CN1317576C true CN1317576C (en) | 2007-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2004100691307A Expired - Fee Related CN1317576C (en) | 2004-07-06 | 2004-07-06 | A coupling structure of optical fiber and optical waveguide |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104166184A (en) * | 2014-07-26 | 2014-11-26 | 华为技术有限公司 | Optical coupling apparatus and optical module |
| WO2023087305A1 (en) * | 2021-11-22 | 2023-05-25 | 华为技术有限公司 | Chip, fiber array unit, and communication system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88100197A (en) * | 1987-01-15 | 1988-07-27 | 菲利浦光灯制造公司 | Combinability including a planar optical path and an optical fiber coupled to the optical path |
| CN1102886A (en) * | 1993-05-26 | 1995-05-24 | 住友电气工业株式会社 | Optical waveguide module and manufacturing method thereof |
| US5625730A (en) * | 1994-07-21 | 1997-04-29 | Sumitomo Electric Industries, Ltd. | Optical waveguide module having waveguide substrate made of predetermined material and ferrule made of material different from that of waveguide substrate |
-
2004
- 2004-07-06 CN CNB2004100691307A patent/CN1317576C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN88100197A (en) * | 1987-01-15 | 1988-07-27 | 菲利浦光灯制造公司 | Combinability including a planar optical path and an optical fiber coupled to the optical path |
| CN1102886A (en) * | 1993-05-26 | 1995-05-24 | 住友电气工业株式会社 | Optical waveguide module and manufacturing method thereof |
| US5625730A (en) * | 1994-07-21 | 1997-04-29 | Sumitomo Electric Industries, Ltd. | Optical waveguide module having waveguide substrate made of predetermined material and ferrule made of material different from that of waveguide substrate |
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| Publication number | Publication date |
|---|---|
| CN1719292A (en) | 2006-01-11 |
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