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CN1275328C - Semiconductor chip and semiconductor device using said semiconductor chip - Google Patents

Semiconductor chip and semiconductor device using said semiconductor chip Download PDF

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Publication number
CN1275328C
CN1275328C CNB018109853A CN01810985A CN1275328C CN 1275328 C CN1275328 C CN 1275328C CN B018109853 A CNB018109853 A CN B018109853A CN 01810985 A CN01810985 A CN 01810985A CN 1275328 C CN1275328 C CN 1275328C
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CN
China
Prior art keywords
circuit
semiconductor chip
mentioned
noise
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB018109853A
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Chinese (zh)
Other versions
CN1436370A (en
Inventor
菊地裕二
岸本清治
中川和成
日野吉晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
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Publication of CN1436370A publication Critical patent/CN1436370A/en
Application granted granted Critical
Publication of CN1275328C publication Critical patent/CN1275328C/en
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
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    • G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
    • G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
    • G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
    • G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
    • G06K19/07749—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card
    • G06K19/0775—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna
    • G06K19/07756—Constructional details, e.g. mounting of circuits in the carrier the record carrier being capable of non-contact communication, e.g. constructional details of the antenna of a non-contact smart card arrangements for connecting the integrated circuit to the antenna the connection being non-galvanic, e.g. capacitive
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  • Computer Networks & Wireless Communication (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

本发明提供一种能防止因噪声引起的误工作及通信特性的恶化的、与再布线层形成为一体的半导体芯片和一种通信特性良好的半导体器件。在该半导体芯片中，经绝缘层(2)在电路形成面(1a)上形成再布线层(3)，以便用该再布线层(3)形成天线线圈(4)。该天线线圈(4)围绕在该电路形成面(1a)上形成的模拟电路(21)的周边而形成，以避免在该模拟电路(21)上形成。该模拟电路(21)可以通过将在半导体芯片(1A)中形成的全部模拟电路集合在一起而形成，该模拟电路(21)也可以是例如电源电路、运算放大器、比较放大器、RF接收部、RF发送部和RF合成部以及构成存储器部分的电压升压电路及放大电路那样的特别容易受到噪声影响的模拟电路的一个，或可以是在半导体芯片(1A)中形成的模拟电路的一部分中具备的线圈。

The present invention provides a semiconductor chip integrally formed with a rewiring layer and a semiconductor device excellent in communication characteristics capable of preventing malfunction due to noise and deterioration of communication characteristics. In the semiconductor chip, a rewiring layer (3) is formed on a circuit forming surface (1a) via an insulating layer (2), so that an antenna coil (4) is formed using the rewiring layer (3). The antenna coil (4) is formed around the periphery of the analog circuit (21) formed on the circuit forming surface (1a) so as not to be formed on the analog circuit (21). This analog circuit (21) can be formed by integrating all the analog circuits formed in the semiconductor chip (1A), and this analog circuit (21) can also be, for example, a power supply circuit, an operational amplifier, a comparative amplifier, an RF receiver, One of the analog circuits that are particularly susceptible to noise, such as the RF transmission unit, the RF synthesis unit, and the voltage booster circuit and amplifier circuit that constitute the memory unit, or may be included in a part of the analog circuit formed in the semiconductor chip (1A) the coil.

Description

Semiconductor chip and the semiconductor device that has used this semiconductor chip
Technical field
The present invention relates on circuit formation face semiconductor chip that forms as one through insulating barrier and wiring layer again and the semiconductor device that this semiconductor chip has been installed, particularly relate to the arrangement of above-mentioned wiring layer again.
Background technology
The semiconductor device of card shape, tag-shaped or coin shape etc. that semiconductor chip has been installed is because possess abundant amount of information and high security performance, so popularized in the field of traffic, circulation and information communication etc.Wherein, because the contactless communication formula semiconductor device of exploitation is not provided with outside terminal on matrix in recent years, utilize wireless mode carry out from the reception of the power of read write line and and read write line between the transmission of signal receive, so have following characteristics: do not resemble the situation that the outside terminal the contact semiconductor device damages in essence, the processing of preservation etc. is easy, can tolerance use for a long time, and be difficult to carry out the rewriting of data, more good aspect security performance, therefore, expection can popularized in the field from now on widely.
Up to now, as the semiconductor chip that this contactless semiconductor device is installed, although used the semiconductor chip that is not equipped with the aerial coil that contactless communication uses, with the noncontact mode carry out from the reception of the power of external device (ED) and and external device (ED) between the transmission of signal receive, but in recent years, as shown in Figure 16 and Figure 17, proposed on circuit formation face through insulating barrier 2 form again wiring layer 3, with this semiconductor chip 1 of " on-chip coil " type of forming as one of wiring layer 3 and aerial coil 4 again.
If use the semiconductor chip 1 of " on-chip coil " type; then owing to there is no need to prepare in addition aerial coil; do not need being connected and the protection processing of this connecting portion etc. of aerial coil and semiconductor chip; so the manufacturing of contactless semiconductor device is become easily, can seek its low cost.
In addition, in recent years, no matter be contactless or contact, as mounted semiconductor chip on semiconductor device, proposed as shown in Figure 18 and Figure 19 chip scale package (below, be called " CSP ") semiconductor chip 8 of type, wherein, on the circuit formation face of the semiconductor chip that has formed a plurality of input and output terminals (pad) 5 along periphery, formed again wiring layer 3 through insulating barrier 2, utilize this again wiring layer 3 formed an end and be connected on the above-mentioned input and output terminal 5, formed salient point 7 on the other end, having carried out the salient point of layout on whole of semiconductor chip sets with wiring 6.
If use the semiconductor chip 8 of this CSP type, then owing to can on whole of semiconductor chip 8, freely carry out layout to salient point 7, so compare with the situation that on the input and output terminal 5 that forms along periphery, forms salient point 7, can increase the arrangement pitches and the bump size of salient point 7, can seek multiterminal of input and output terminal 5 and make the upside-down mounting installation of semiconductor chip become easy.
On the circuit formation face of the semiconductor chip that is applied to semiconductor device, as shown in Figure 16 and Figure 18, power circuit 11, operational amplifier 12, comparison amplifier 13, RF acceptance division 14, RF sending part 15, the synthetic portion 16 of RF, logic section 18 etc. have been formed with being divided into piece, under the situation that requires higher security performance, the situation of embedded micro-processor is arranged also.Above-mentioned power circuit 11, operational amplifier 12, comparison amplifier 13, RF acceptance division 14, RF sending part 15, the synthetic portion 16 of RF nearly all constitute with analog circuit, in storage part 18, used under the situations as memory element such as EEPROM, in its part, had the analog circuit of voltage booster or amplifying circuit etc.Different therewith, logic section 17 constitutes with digital circuit basically.Have again, in the semiconductor chip of the usefulness of known semiconductor device installation in the past, in the part of above-mentioned analog circuit, possess coil portion.
With the semiconductor chip 8 of the semiconductor chip 1 of the integrally formed on-chip coil type of wiring layer again 3 and CSP type in, because the circuit of semiconductor chip 1,8 forms the insulating barrier of face through having higher dielectric constant and closely disposes with wiring layer 3 again, so as schematically illustrated among Figure 20, at circuit that forms on the circuit formation face and formation parasitic capacitance C between the wiring layer 3 again.
Yet, in the semiconductor chip 8 of the semiconductor chip 1 of existing " on-chip coil " type and CSP type, any consideration is not also done in the harmful effect that generates the situation of parasitic capacitance C in the formation portion of analog circuit, as as shown in Figure 16 and Figure 19, on the position relative, formed aerial coil 4 or salient point and set with wiring 6 with the formation portion of analog circuit.
Therefore, in the semiconductor chip 8 of the semiconductor chip 1 of existing " on-chip coil " type and CSP type, there is following problems: at the circuit that forms on the circuit formation face and form parasitic capacitance C again between the wiring layer 3, the electromotive force (interchanges) that takes place in wiring layer 3 again is coupled with parasitic capacitance C, produce the electrostatic induction noise, moreover, result from this electrostatic induction noise and crosstalk noise, convergent oscillation (LC resonance shift) and power supply noise etc. take place, therefore just produce and delay work and the deterioration of communication characteristic.
In addition, since the circuit of the semiconductor chip 8 of the semiconductor chip 1 of existing " on-chip coil " type and CSP type form face and again wiring layer 3 relatively dispose through insulating barrier 2, so also in each circuit that on circuit formation face, forms easily the electromagnetic induction noise takes place, also be easy to generate deterioration because of delaying work of causing of electromagnetic induction noise and communication characteristic.
The noise of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of above-mentioned electrostatic induction noise and electromagnetic induction noise is to the analog circuit of above-mentioned power circuit 11, operational amplifier 12, comparison amplifier 13, RF acceptance division 14, RF sending part 15, the synthetic portion 16 of RF etc., particularly handle the operational amplifier 12 and the comparison amplifier 13 of small voltage waveform and handle the voltage booster or amplifying circuit and the coil etc. that possess in the storage part 18 of tiny signal very big influence is arranged.In addition because its harmful effect in the high more circuit of the frequency of handled voltage waveform or signal of these noises is big more, so for example with portable telephone etc. in the corresponding semiconductor chip of high frequency that is employed, need the generation of the above-mentioned noise of inhibition especially.
Summary of the invention
The present invention carries out in order to solve such problem, and the purpose of its problem is to provide and is difficult to produce because of the semiconductor chip deterioration of delaying work of causing of noise and communication characteristic, that form as one with wiring layer again and provides communication characteristic good semiconductor device.
The present invention is in order to solve above-mentioned problem, about semiconductor chip, the 1st, forming as one and in the semiconductor chip that constitutes through insulating barrier and wiring layer again on the circuit formation face, making the structure that is arranged in all or part of and above-mentioned wiring layer again of the analog circuit that forms on the foregoing circuit formation face through above-mentioned insulating barrier in nonoverlapping mode.
Like this, if be arranged in all or part of and above-mentioned wiring layer again of the analog circuit that forms on the foregoing circuit formation face in nonoverlapping mode through above-mentioned insulating barrier, then because at analog circuit and do not form parasitic capacitance again between the wiring layer, so can prevent to act on the generation of the electrostatic capacitance noise of analog circuit.In addition, because analog circuit and the not relative configuration of wiring layer again, so can prevent to act on the generation of the electromagnetic induction noise of analog circuit.So, prevented the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of these electrostatic induction noises or electromagnetic induction noise, even for the corresponding semiconductor chip that forms as one with wiring layer again of high frequency, also can eliminate deterioration because of delaying work of causing of noise and communication characteristic.Have again, do not make the whole analog circuits that on circuit formation face, form with again wiring layer is not overlapping even be not arranged in, make the analog circuit that is subjected to The noise especially easily with again wiring layer is not overlapping if be arranged in, then also can in practicality, make because of delaying work of causing of noise and the deterioration of communication characteristic does not become problem.In addition, because digital circuit is compared with analog circuit and is difficult to be subjected to The noise, even so again wiring layer through the insulation ply on the digital circuit that forms on the circuit formation face, can in the semiconductor chip that forms as one with wiring layer again, not produce the deterioration that delays work or produce communication characteristic yet.
Among the present invention, about semiconductor chip, the 2nd, forming as one and in the semiconductor chip that constitutes through insulating barrier and wiring layer again on the circuit formation face, making through above-mentioned insulating barrier and be arranged at least 1 circuit in the synthetic portion of the power circuit, operational amplifier, comparison amplifier, RF acceptance division, RF sending part and the RF that form on the foregoing circuit formation face and the structure of above-mentioned wiring layer again in nonoverlapping mode.
As mentioned above, the synthetic portion of the power circuit that forms on circuit formation face, operational amplifier, comparison amplifier, RF acceptance division, RF sending part and RF nearly all constitutes with the analog circuit that is subjected to noise effect easily.Thereby, if arrange these each circuit blocks and wiring layer again in nonoverlapping mode through insulating barrier, then for each circuit block, the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of electrostatic induction noise or electromagnetic induction noise can be prevented, deterioration can be eliminated because of delaying work of causing of noise and communication characteristic.
Among the present invention, about semiconductor chip, the 3rd, forming as one and in the semiconductor chip that constitutes through insulating barrier and wiring layer again on the circuit formation face, made through above-mentioned insulating barrier and be arranged in the coil that forms on the foregoing circuit formation face and the structure of above-mentioned wiring layer again in nonoverlapping mode.
Like this, for the semiconductor chip that on circuit formation face, has formed coil, if arrange this coil and wiring layer again in nonoverlapping mode through insulating barrier, then because electrostatic induction noise or electromagnetic induction noise are difficult to act on coil, the generation of convergent oscillation etc. can be prevented, deterioration can be eliminated because of delaying work of causing of noise and communication characteristic.
Among the present invention, about semiconductor chip, the 4th, made and be used in the wiring layer of putting down in writing in above-mentioned the 1st to the 3rd problem solution again and form the structure that its two ends are connected to the aerial coil that the contactless communication on the input and output terminal that forms on the foregoing circuit formation face uses.
Like this, if form the aerial coil that contactless communication is used, then owing to can obtain coil on chip good aspect the noise resistance performance, so can make cheaply, good contactless semiconductor device aspect the noise resistance performance with wiring layer again.
Among the present invention, about semiconductor chip, the 5th, the salient point that has made and be used in that the wiring layer again put down in writing in above-mentioned the 1st to the 3rd problem solution forms that the one end is connected on the input and output terminal that forms on the foregoing circuit formation face, formed on its other end salient point is set the structure with wiring.
Like this, set with wiring if form salient point with wiring layer again, then owing to can obtain the semiconductor chip of CSP type good aspect the noise resistance performance, so can make multiterminal, aspect the noise resistance performance good semiconductor device.
Among the present invention, about semiconductor chip, the 6th, having made the circuit that forms on the circuit formation face of putting down in writing in above-mentioned the 1st to the 5th problem solution is the structure of utilizing the radio communication circuit of CMOS technology formation.
The present inventor learns the following fact according to experiment: with the wireless chip of CMOS technology manufacturing with compare with the transistor of silicon bipolar approach manufacturing, because the discreteness of each transistor characteristic is big, the characteristic of dynamic range etc. worsens easily because of the cause of the influence of the electric capacity of floating etc., so it is bigger to have formed the influence of the situation of wiring layer on analog circuit again.According to numerical simulation, confirmed to compare with the situation of having used the silicon bipolar approach because of the influence that the wiring again on the analog circuit produces to the radio communication characteristic, be 2～8 times.Thereby, for utilizing the CMOS technology on circuit formation face, to form the semiconductor chip of radio communication circuit, by will be again wiring layer be arranged in and on analog circuit, do not form wiring layer again, can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of wiring layer influence.
Among the present invention, about semiconductor chip, the 7th, made the circuit that forms on the circuit formation face of in above-mentioned the 1st to the 6th problem solution, putting down in writing and be and external device (ED) between send, receive or send the structure of the radio communication circuit of the signal that receives the frequency more than the 800MHz.
The present inventor learns the following fact according to experiment: because of the frequency that the influence of radio communication characteristic and radio communication are used that the wiring again on the analog circuit produces relevant, if frequency is that then communication characteristic worsens sharp more than the 800MHz.The reason of this point can think, under the situation that sends the low frequency that receives several approximately MHz, the electric current that flows through in the wiring again flows near the center of wiring again, and if become high frequency more than the 800MHz, then to consider to flow through the skin effect on the top layer of connecting up again.The influence to circuit that produces because of skin effect becomes rapid minimizing, so that the reason that can not communicate of the rising of the error rate that is caused by noise and communication distance.Thereby, for having formed transmission, reception or having sent the semiconductor chip that receives the radio communication circuit more than the 800MHz, by will be again wiring layer be arranged in and on analog circuit, do not form wiring layer again, can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of the influence of wiring layer.
On the other hand, the present invention is in order to solve above-mentioned problem, about semiconductor device, the 1st, in the semiconductor device of on the matrix of given size and regulation shape, semiconductor chip being installed and having been constituted, made the semiconductor chip that is installed on the circuit formation face all or part of and above-mentioned wiring layer again that form as one through insulating barrier and wiring layer again and arranged the analog circuit that on foregoing circuit formation face, forms in nonoverlapping mode through above-mentioned insulating barrier structure as above-mentioned semiconductor chip.
Like this, if install through above-mentioned insulating barrier and arranged the analog circuit that on circuit formation face, forms and the semiconductor chip of wiring layer again in nonoverlapping mode, then owing in the analog circuit of semiconductor chip, do not produce deterioration, so can obtain the good semiconductor device of communication characteristic because of delaying work of causing of electrostatic induction noise or electromagnetic induction noise or communication characteristic.
Among the present invention, about semiconductor device, the 2nd, in the semiconductor device of on the matrix of given size and regulation shape, semiconductor chip being installed and having been constituted, made be installed on the circuit formation face form as one through insulating barrier and wiring layer again and arranged the structure of the semiconductor chip of at least 1 circuit in the synthetic portion of the power circuit, operational amplifier, comparison amplifier, RF acceptance division, RF sending part and the RF that on foregoing circuit formation face, form and above-mentioned wiring layer again in nonoverlapping mode through above-mentioned insulating barrier as above-mentioned semiconductor chip.
Like this, if install through above-mentioned insulating barrier and arranged at least 1 circuit and the semiconductor chip of wiring layer again in the synthetic portion of the power circuit, operational amplifier, comparison amplifier, RF acceptance division, RF sending part and the RF that on circuit formation face, form in nonoverlapping mode, then owing in the easiest stronger dysgenic these circuit that are subjected to noise, do not produce deterioration, so can obtain the good semiconductor device of communication characteristic because of delaying work of causing of electrostatic induction noise or electromagnetic induction noise or communication characteristic.
Among the present invention, about semiconductor device, the 3rd, in the semiconductor device of on the matrix of given size and regulation shape, semiconductor chip being installed and having been constituted, made be installed on the circuit formation face form as one through insulating barrier and wiring layer again and arranged the structure of the semiconductor chip of the coil that on foregoing circuit formation face, forms and above-mentioned wiring layer again through above-mentioned insulating barrier in nonoverlapping mode as above-mentioned semiconductor chip.
Like this, if install through above-mentioned insulating barrier and arranged the coil that on circuit formation face, forms and the semiconductor chip of wiring layer again in nonoverlapping mode, then because electrostatic induction noise or electromagnetic induction noise do not act on the stronger dysgenic coil that is subjected to noise easily, so can obtain the good semiconductor device of communication characteristic.
Description of drawings
Fig. 1 is the plane graph of the semiconductor chip 1A of the 1st example example, Fig. 2 is the A-A profile of Fig. 1, Fig. 3 is the plane graph of the semiconductor chip 1B of the 2nd example example, Fig. 4 is the plane graph of the semiconductor chip 1C of the 3rd example example, Fig. 5 is the B-B profile of Fig. 4, Fig. 6 is the plane graph of the semiconductor chip 1D of the 4th example example, Fig. 7 is the plane graph of the semiconductor chip 1E of the 5th example example, Fig. 8 is the so-called plane graph of finishing through regulation technology of finishing wafer, Fig. 9 A, 9B, 9C, 9D, 9E and 9F are the process charts that the 1st example of wiring layer formation method is shown again, Figure 10 has formed the plane graph of finishing wafer of wiring layer 3 again, Figure 11 A, 11B, 11C, 11D and 11E are the process charts that the 2nd example of wiring layer formation method is shown again, Figure 12 is the profile of the semiconductor device of the 1st example example, Figure 13 is the profile of the semiconductor device of the 2nd example example, Figure 14 is the plane graph of the step-up coil that possesses in the semiconductor device of the 2nd example example, Figure 15 is the profile of major part of the semiconductor device of the 3rd example example, Figure 16 is the plane graph of the semiconductor chip of existing on-chip coil type, Figure 17 is the profile of the semiconductor chip of coil-type on the existing chip, Figure 18 is the plane graph of the semiconductor chip of existing C SP type, Figure 19 is the profile of the semiconductor chip of existing C SP type, and Figure 20 is the key diagram of the parasitic capacitance that forms between the circuit part of semiconductor chip and aerial coil.
Embodiment
(the 1st example of semiconductor chip)
The 1st example of semiconductor chip of the present invention is described according to Fig. 1 and Fig. 2.Fig. 1 is the plane graph of the semiconductor chip 1A of the 1st example example, and Fig. 2 is the A-A profile of Fig. 1.
This routine semiconductor chip 1A is the semiconductor chip of on-chip coil type, as shown in Fig. 1 and Fig. 2, forms on the face 1a at circuit through insulating barrier 2 and to form wiring layer 3 again, utilize this again wiring layer 3 form as one with aerial coil 4.And, in this routine semiconductor chip 1A, avoid forming the analog circuit 21 that forms on the middle body of face 1a at circuit, on its peripheral part, formed the aerial coil 4 of square spiral shape.
Above-mentioned analog circuit 21 can be the circuit that whole analog circuits that should form on semiconductor chip 1A concentrate in together, and also can be for example power circuit 11, operational amplifier 12, comparison amplifier 13, RF acceptance division 14, RF sending part 15, the synthetic portion 16 of RF and constitute the voltage booster of above-mentioned storage part 18 parts or 1 circuit of the analog circuit that is subjected to noise effect especially easily that amplifying circuit etc. is such.Moreover, also can be the coil that possesses in the part of the analog circuit that on semiconductor chip 1A, forms.
This routine semiconductor chip 1A goes up through insulating barrier 2 and forms wiring layer 3 again and make by form face 1a at the circuit as the semiconductor chip (saying more practically, is the wafer of finishing before being cut into each semiconductor chip) of substrate.Semiconductor chip as the substrate that becomes this routine semiconductor chip 1A, can use and belong to well-known semiconductor chip arbitrarily, but in order to seek the slimming as the contactless semiconductor device of end article, using the combination that utilizes chemical grinding or mechanical lapping or these methods is desirable especially to the bare chip that the non-formation face 1b of circuit has carried out attenuate.Its thickness is to be comparatively desirable below 300 microns, and particularly for the chip that is applied to the thin type card, it is comparatively desirable that its thickness is about 50 microns～150 microns.In addition, also can use utilize the CMOS technology the chip that has formed radio communication circuit on the circuit formation face or forming on the circuit formation face and external device (ED) between send, receive or send the chip of the radio communication circuit that receives the frequency signal more than the 800MHz.
Have again, in the example of Fig. 1, twined the multi-turn coil and formed aerial coil 4, but be not limited to this, can be decided to be the above number of turns arbitrarily of 1 circle about the number of turns of this aerial coil 4.Moreover, even about the flat shape of aerial coil 4, also be not limited to the example of Fig. 1 and Fig. 2, but for example also across corner carry out chamfering, make the few shape of deterioration of the communication characteristic that origin cause of formation shape effects causes.In addition, also can with insulating barrier 2 and again wiring layer 3 be laminated into multistage, to increase again the number of turns of wiring layer 3.
Form aerial coil 4 owing to avoid forming the analog circuit 21 that forms on the middle body of face 1a among this routine semiconductor chip 1A at circuit, analog circuit 21 and aerial coil 4 be arranged in do not overlap each other, so between analog circuit 21 and aerial coil 4, do not form parasitic capacitance, can prevent to act on the generation of the electrostatic capacitance noise of analog circuit 21.In addition, owing to relatively do not dispose analog circuit 21 and aerial coil 4, so can prevent to act on the generation of the electromagnetic induction noise of analog circuit 21.So, prevented the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of these electrostatic induction noises or electromagnetic induction noise, even for the corresponding on-chip coil of high frequency, also can eliminate deterioration because of delaying work of causing of noise and communication characteristic.
Particularly, under the situation of using the chip that utilizes the CMOS technology forming radio communication circuit on the circuit formation face as the semiconductor chip of the substrate that becomes semiconductor chip 1A, can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of the influence of wiring layer 3 (aerial coil 4).In addition, used forming on the circuit formation face and external device (ED) between send, receive or send under the situation of chip as the semiconductor chip of the substrate that becomes semiconductor chip 1A of the radio communication circuit that receives the frequency signal more than the 800MHz, can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of the influence of wiring layer 3 (aerial coil 4).
(the 2nd example of semiconductor chip)
The 2nd example of semiconductor chip of the present invention is described according to Fig. 3.Fig. 3 is the plane graph of the semiconductor chip 1B of the 2nd example example.
This routine semiconductor chip 1B also is the semiconductor chip of on-chip coil type, as shown in Figure 3, forms on the face 1a at circuit through insulating barrier 2 and to form wiring layer 3 again, utilize this again wiring layer 3 form as one with aerial coil 4.And, in this routine semiconductor chip 1B, avoid forming the analog circuit 21 that forms on the bight of face 1a at circuit, on its peripheral part, formed the aerial coil 4 of random coil shape.About other parts, since identical with the semiconductor chip 1A of above-mentioned the 1st example example, its explanation of Therefore, omited.
Form aerial coil 4 owing to also avoid forming the analog circuit 21 that forms on the bight of face 1a among this routine semiconductor chip 1B at circuit, analog circuit 21 and aerial coil 4 be arranged in do not overlap each other, so can eliminate the The noise that acts on analog circuit 21, can obtain the same effect of semiconductor chip 1A with the 1st above-mentioned example example.
(the 3rd example of semiconductor chip)
The 3rd example of semiconductor chip of the present invention is described according to Fig. 4 and Fig. 5.Fig. 4 is the plane graph of the semiconductor chip 1C of the 3rd example example, and Fig. 5 is the B-B profile of Fig. 4.
This routine semiconductor chip 1C is the semiconductor chip of CSP type, as shown in Figures 4 and 5, on circuit formation face 1a, form again wiring layer 3 through insulating barrier 2, utilize this again wiring layer 3 formed an end is connected on the input and output terminal 5, the other end has carried out layout on whole of semiconductor chip 1C salient point and set with wiring 6, on this salient point is set with 6 the other end of connecting up, formed salient point 7.And among this routine semiconductor chip 1C, salient point is set with wiring 6 and is avoided forming the analog circuit 21 that forms on the part of face 1a and being distributed in its peripheral part at circuit, partly is the border with the formation of analog circuit 21, has arranged salient point 7 in its side.About other parts, since identical with the semiconductor chip 1A of above-mentioned the 1st example example, its explanation of Therefore, omited.
Form salient point setting wiring 6 and salient point 7 owing to also avoid forming the analog circuit 21 that forms on the part of face 1a among this routine semiconductor chip 1C at circuit, with analog circuit 21 and salient point set with connect up 6 and salient point 7 be arranged in and do not overlap each other, so can eliminate the The noise that acts on analog circuit 21, can obtain the same effect of semiconductor chip 1A with the 1st above-mentioned example example.
(the 4th example of semiconductor chip)
The 4th example of semiconductor chip of the present invention is described according to Fig. 6.Fig. 6 is the plane graph of the semiconductor chip 1D of the 4th example example.
This routine semiconductor chip 1D also is the semiconductor chip of CSP type, as shown in Figure 6, on circuit formation face 1a, form again wiring layer 3 through insulating barrier 2, utilize this again wiring layer 3 formed an end is connected on the input and output terminal 5, the other end has carried out layout on whole of semiconductor chip 1D salient point and set with wiring 6, on this salient point is set with 6 the other end of connecting up, formed salient point 7.And, among this routine semiconductor chip 1D, salient point is set with wiring 6 and is avoided the analog circuit 21 that forms and be distributed in its peripheral part on the part of circuit formation face 1a, partly is the border with the formation of analog circuit 21, has arranged salient point 7 with the side above it.About other parts, since identical with the semiconductor chip 1C of above-mentioned the 3rd example example, its explanation of Therefore, omited.
Form salient point setting wiring 6 and salient point 7 owing to also avoid forming the analog circuit 21 that forms on the part of face 1a among this routine semiconductor chip 1D at circuit, with analog circuit 21 and salient point set with connect up 6 and salient point 7 be arranged in and do not overlap each other, so can obtain the same effect of semiconductor chip 1C with the 3rd above-mentioned example example.
(the 5th example of semiconductor chip)
The 4th example of semiconductor chip of the present invention is described according to Fig. 7.Fig. 7 is the plane graph of the semiconductor chip 1E of the 5th example example.
This routine semiconductor chip 1E also is the semiconductor chip of CSP type, as shown in Figure 7, on circuit formation face 1a, form again wiring layer 3 through insulating barrier 2, utilize this again wiring layer 3 formed an end is connected on the input and output terminal 5, the other end has carried out layout on whole of semiconductor chip 1E salient point and set with wiring 6, on this salient point is set with 6 the other end of connecting up, formed salient point 7.And among this routine semiconductor chip 1E, salient point is set with wiring 6 and is avoided forming the analog circuit 21 that forms on 2 positions of face 1a and being distributed in its peripheral part at circuit, the formation of analog circuit 21 partly arranged salient point 7 all around.About other parts, since identical with the semiconductor chip 1C of above-mentioned the 3rd example example, its explanation of Therefore, omited.
Form salient point setting wiring 6 and salient point 7 owing to also avoid forming the analog circuit 21 that forms on the part of face 1a among this routine semiconductor chip 1E at circuit, with analog circuit 21 and salient point set with connect up 6 and salient point 7 be arranged in and do not overlap each other, so can obtain the same effect of semiconductor chip 1C with the 3rd above-mentioned example example.
(the 1st example of the formation method of wiring layer again)
Below, according to Fig. 8 to Figure 10,1st example of above-mentioned aerial coil 4 of formation or salient point setting with the formation method of the wiring layer again 3 of wiring 6 is described.Fig. 8 is a plane graph of finishing wafer through the what is called that regulation technology is finished, and Fig. 9 is the process chart of the 1st example that the formation method of wiring layer 3 is shown again, and Figure 10 has formed the plane graph of finishing wafer of wiring layer 3 again.
As shown in Figure 8, in finishing wafer 31, on interior circumferential portion,, form face one side, formed needed sealer 33 (with reference to Fig. 9) at its circuit uniformly-spaced to have formed the circuit 32 that a plurality of semiconductor chips are used except the outermost perimembranous.
In the 1st example of the formation method of the wiring layer again shown in Fig. 9 A, 9B, 9C, 9D, 9E and the 9F; at first; as shown in Fig. 9 (A); finish on the sealer 33 that forms on the circuit formation face of wafer 31; use aluminum or aluminum alloy or copper or copper alloy, be formed uniformly metal sputtering layer or metal evaporation layer 34.Secondly, as shown in Fig. 9 (B), on metal sputtering layer or metal evaporation layer 34, be formed uniformly photoresist layer 35, on photoresist layer 35, cover the mask 36 that has formed the required figure that comprises aerial coil 4 or salient point setting usefulness wiring 6, shine the light 300 of provision wavelengths from the outside of mask 36, photoresist layer 35 is exposed.Thereafter, the development treatment of the photoresist layer 35 that has been exposed as shown in Fig. 9 (C), is removed the exposed portion of photoresist layer 35, and the part corresponding with the above-mentioned exposure figure of above-mentioned metal sputtering layer or metal evaporation layer 34 exposed.In exposing in the figure of metal sputtering layer or metal evaporation layer 34, as shown in Figure 10, comprise the electrode part 37 of ring-type, the aerial coil 4 that on part, forms or salient point except above-mentioned analog circuit 21 set with wiring 6 be connected these electrode part 37 and each aerial coil 4 or salient point and set with connecting up 6 leading part 38.Secondly, be an electrode with above-mentioned electrode part 37, the exposed portions serve of metal sputtering layer or metal evaporation layer 34 is electroplated or precise electrotyping, as shown in Fig. 9 (D), stacked electrodeposition of metals 39 on the exposed portions serve of metal sputtering layer or metal evaporation layer 34.Secondly, utilize ashing treatment etc. to remove and be attached to the lip-deep photoresist layer 35 of finishing wafer 31, as shown in Fig. 9 (E), obtain on even metal sputtering layer or metal evaporation layer 34, having formed have electrode part 37, aerial coil 4 or salient point set with connect up 6 and the electrodeposition of metals 39 of leading part 38 finish wafer 31.Secondly, the metal sputtering layer or the metal evaporation layer 34 that expose from electrodeposition of metals 39 of etching as shown in Fig. 9 (F), removed the metal sputtering layer or the metal evaporation layer 34 that expose from electrodeposition of metals 39 selectively.What thus, can obtain forming metal sputtering layer or metal evaporation layer 34 and electrodeposition of metals 39 finishes wafer 31.At last, the above-mentioned wafer 31 of finishing is carried out scribing, obtain the needed semiconductor chip 1C element 1A～1E shown in Fig. 1 to Fig. 7.
Have again, in this example, used galvanoplastic or precise electrotyping method formation method, use non-electrolytic plating method to form above-mentioned electrodeposition of metals 39 but also can replace as electrodeposition of metals 39.At this moment, owing in the formation of electrodeposition of metals 39, do not need to form electrode, so when the exposure of photoresist layer 35, do not need to form electrode part 37 and leading part 38.
Electroless plating is also referred to as electroless plating, base metal is immersed in the metal salt solution of metal, metal ion is separated out on the surface of substrate, it is characterized in that, with fairly simple equipment can obtain connecting airtight power strong, uniformly, have an electrodeposited coating of adequate thickness.Above-mentioned slaine becomes the supply source of institute's electroplated metal ion, and under the situation of electro-coppering, the solution that can use copper sulphate, copper chloride, copper nitrate etc. is as electroplate liquid.The metal ion of copper etc. is only separated out on metal sputtering layer that becomes substrate or metal evaporation layer 34, does not separate out on the sealer 33 of insulating properties.Base material is little and must have the effect of catalyst for separating out of plated metal ion to the ionization tendency of plated metal ion.Therefore, under the metal sputtering layer that is made of aluminium or metal evaporation layer 6 power on copper-plated situation, be preferably on the surface of aluminium lamination and form nickel, be immersed in the zinc nitrate solution several seconds, be replaced into the pre-treatment of zinc with the thickness below several microns.
On the other hand, galvanoplastic and precise electrotyping method are following methods: will form finishing wafer 31 and being immersed in the electroplating bath that comprises the plated metal ion by the electrode that plated metal constitutes of metal sputtering layer or metal evaporation layer 34, to finish on the wafer 31 the metal sputtering layer that forms or metal evaporation layer 34 as negative electrode, the electrode that is immersed in the electroplating bath is applied voltage as anode, the metal ion in the electroplating bath is separated out on the surface of metal sputtering layer or metal evaporation layer 34.In galvanoplastic and precise electrotyping method, under the situation of electro-coppering, also the solution with copper sulphate, copper chloride, copper nitrate etc. uses as electroplate liquid.
In the formation method of the wiring layer again 3 of this example, owing to comprise needed aerial coil 4 or salient point and set needed conductive pattern finishing on the wafer 31 to form with wiring 6, to finish wafer 31 carry out scribing obtain needed semiconductor chip 1A～1E thereafter, so compare with the situation of wiring 6 with formation aerial coil 4 or salient point setting on each semiconductor chip, the coil on the chip or the semiconductor chip of CSP type can be made expeditiously, its manufacturing cost can be reduced.In addition, owing to can form the aerial coil 4 or the salient point setting wiring 6 of uniform thickness accurately for the whole semiconductor chips that on wafer 31, form, so can reduce the discreteness of communication characteristic.Moreover, if use sputtering method or vacuum vapour deposition to form aerial coil 4 or salient point setting wiring 6 for each semiconductor chip 1A～1E, then on the peripheral part of semiconductor chip 1A～1E, adhered to unwanted conductor, the insulating properties of semiconductor chip becomes problem, but finish under the situation that has formed the needed conductive pattern that comprises aerial coil 4 or salient point setting usefulness wiring 6 on the wafer 31, even unwanted conductor is attached on the peripheral part of finishing wafer 31 when sputter etc., because this part is as unwanted part, be the part that to dispose originally, so also can not produce harmful effect to the insulating properties of each semiconductor chip 1A～1E.In addition, in the formation method of original wiring layer again 3, owing under the state that photoresist layer 35 is arranged, carry out the formation of electrodeposition of metals 39, by etching remove the part of the electrodeposition of metals 39 that does not have laminated metal sputtering layer or metal evaporation layer 34 thereafter, so shown in Fig. 9 E, stacked electrodeposition of metals 39 on the upper surface of metal sputtering layer or metal evaporation layer 34 only, on Width, do not expand, set with wiring 6 so can form accurate aerial coil 4 or salient point, can in narrow area, form many aerial coils 4 of the number of turns or salient point and set with wiring 6.
(the 2nd example of the formation method of wiring layer again)
Secondly, according to Figure 11 A, 11B, 11C, 11D, 11E, the 2nd example of the formation method of wiring layer 3 is described again.Figure 11 A, 11B, 11C, 11D, 11E are the process charts of the 2nd example that the formation method of wiring layer 3 is shown again.
In the formation method of the wiring layer again 3 of this example; as shown in Figure 11 (A); on the sealer 33 of finishing wafer 31; be formed uniformly photoresist layer 35; on the photoresist layer 35 that has been formed, cover the mask 36 that has formed the required figure that comprises aerial coil 4 or salient point setting usefulness wiring 6; shine the light 300 of provision wavelengths from the outside of mask 36, photoresist layer 35 is exposed.Thereafter, the development treatment of the photoresist layer 35 that has been exposed as shown in Figure 11 (B), is removed the exposed portion of photoresist layer 35, and the part corresponding with the above-mentioned exposure figure of sealer 33 exposed.In exposing in the figure of photoresist layer 35, as shown in Figure 10, can make the aerial coil 4 or the salient point that comprise electrode part 37, on part, form and set the shape of using wiring 6 and leading part 38 except above-mentioned analog circuit 21.Secondly, the wafer 31 of finishing after the development treatment is contained in sputter equipment or the vacuum deposition apparatus, as shown in Figure 11 (C), on the exposed portions serve of above-mentioned sealer 33, forms metal sputtering layer or metal evaporation layer 34.Secondly, as shown in Figure 11 (D), after utilizing ashing treatment etc. to remove to be attached to the lip-deep photoresist layer 35 of finishing wafer 31, with electrode part 37 is an electrode, metal sputtering layer or metal evaporation layer 34 are electroplated, as shown in Figure 11 (E), stacked electrodeposition of metals 39 on the exposed portions serve of metal sputtering layer or metal evaporation layer 34.At last, the above-mentioned wafer 31 of finishing is carried out scribing, obtain the needed semiconductor chip 1C element 1A～1E shown in Fig. 1 to Fig. 7.
Have again, in the formation method of the wiring layer again 3 of this example, used galvanoplastic or precise electrotyping method formation method, use non-electrolytic plating method to form above-mentioned electrodeposition of metals 39 but also can replace as electrodeposition of metals 39.At this moment, owing in the formation of electrodeposition of metals 39, do not need to form electrode, so when the exposure of photoresist layer 35, do not need to form electrode part 37 and leading part 38.
The formation method of the wiring layer again 3 of this example except have with the same effect of the formation method of the wiring layer again 3 of above-mentioned the 1st example, finish on the wafer 31 process number that the formation conductive pattern is used owing to can reduce, so can higher efficient make the semiconductor chip of on-chip coil or CSP type.
(the 1st example of semiconductor device)
Secondly, the 1st example of semiconductor device of the present invention is described according to Figure 12.Figure 12 is the semiconductor device 40 of the 1st example example.
The semiconductor device 40 of the 1st example example is characterised in that, as shown in Figure 12, the semiconductor chip 1A of coil-type on the said chip or 1B is enclosed in the matrix that constitutes with bond layer 41 and 2 emulsion sheets 42.Bonding agent as constituting bond layer 41 so long as have the bonding agent of needed adhesive strength, just can use to belong to well-known bonding agent arbitrarily, but because good batch process is desirable especially so use hot-melt adhesive.In addition, as emulsion sheet 42, so long as have the flaky material of needed intensity and printing, just can use to belong to well-known flaky material arbitrarily, even but for example use that the also few macromolecule sheet or the paper of generation of the burning harmful substance resemble the polyethylene terephthalate is desirable especially.Semiconductor chip 1A or 1B are fixed on the bond layer 41 of the 1st emulsion sheet 42 that has formed bond layer 41 on the single face, secondly, by being bonded on the semiconductor chip bonding plane of above-mentioned the 1st emulsion sheet 42, can form this routine semiconductor device 40 at the bond layer 41 of the 2nd emulsion sheet 42 that has formed bond layer 41 on the single face.
Owing to installed to have arranged the semiconductor chip 1A or the 1B of analog circuit 21 and aerial coil 4 without insulating barrier 2 overlapping modes in this routine semiconductor device 40, so between analog circuit 21 and aerial coil 4, do not form parasitic capacitance, so can prevent to act on the generation of the electrostatic capacitance noise of analog circuit 21.In addition, because the not relative configuration of analog circuit 21, so can prevent to act on the generation of the electromagnetic induction noise of analog circuit 21 with aerial coil 4.So, prevent the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of these electrostatic induction noises or electromagnetic induction noise, can improve the communication characteristic of the contactless semiconductor device of semiconductor chip 1A that the on-chip coil type has been installed or 1B.In addition, make needed semiconductor chip 1A or 1B owing to can only utilize 2 emulsion sheets 42 to seal, so can make at an easy rate and in subminiature mode.
(the 2nd example of semiconductor device)
Secondly, the 2nd example of semiconductor device of the present invention is described according to Figure 13 and Figure 14.Figure 13 is the profile of the semiconductor device of the 2nd example example, and Figure 14 is the plane graph of the step-up coil that possesses in the semiconductor device of the 2nd example example.
The semiconductor device 50 of the 2nd example example, as shown in Figure 13, it is characterized in that, in the matrix that constitutes by bond layer 41 and emulsion sheet 42, sealed semiconductor chip 1A or the 1B and the insulated substrate 52 of coil-type on the said chip, formed step-up coil 51 on this insulated substrate 52, this step-up coil 51 is used for strengthening and the electromagnetic coupled of the integrally formed aerial coil 4 of this semiconductor chip 1A or 1B with the aerial coil that possesses on not shown read write line.
As shown in Figure 14, step-up coil 51 is made of coil diameter little the 1st coil 51a and the 2nd big coil 51b of coil diameter, has carried out the connection of conductivity mutually.The 1st coil 51a is the coil that main and aerial coil 4 carry out electromagnetic coupled, forms its flat shape and size identical with aerial coil 4 or becomes similar figures, and wherein, above-mentioned aerial coil 4 and semiconductor chip 1A or 1B form.On the other hand, the 2nd coil 51b be main and read write line in the aerial coil that possesses carry out the coil of electromagnetic coupled, in the scope in being contained in the matrix that constitutes by bond layer 41 and emulsion sheet 42, form its flat shape and size big as much as possible.Have, in the example of Figure 14, the 1st coil 51a and the 2nd coil 51b are formed the helical form of the rectangle with a plurality of number of turns again, but the number of turns of each coil 51a, 51b or flat shape are not limited to this, can at random form.This step-up coil 51 can form with etching method that forms needed coil pattern or the print process of using electrically conductive ink to adopt printing process to form needed coil pattern on the single face of insulated substrate 52 with the conductive metal layer at the uniform thickness that forms on the single face of insulated substrate 52 being carried out etching.
Have again, about the kind of the bonding agent that constitutes bond layer 41 and constitute the kind of the flaky material of emulsion sheet 42, since identical with the semiconductor device 40 of the 1st example example, so omit explanation for fear of repetition.
This routine semiconductor device 50 except with the same effect of the semiconductor device 40 of the 1st example example, owing to possess step-up coil, can strengthen and the effect of the electromagnetic coupled of aerial coil 4 that semiconductor chip 1A or 1B are integrally formed and the aerial coil that on not shown read write line, possesses with having.
(the 3rd example of semiconductor device)
Secondly, the 3rd example of semiconductor device of the present invention is described according to Figure 15.Figure 15 is the profile of major part of the semiconductor device of the 3rd example example.
The semiconductor device 60 of the 3rd example example; as shown in Figure 15, constitute by following part: the 1st wiring layer 61; the 1st insulating barrier 62; the 2nd wiring layer 63; the connecting portion 63a that connects the 1st wiring layer 61 and the 2nd wiring layer 63; the 2nd insulating barrier 64; semiconductor chip 1C; other installing component 66; the conductor 67 that connects the 2nd wiring layer 63 and semiconductor chip 1C; the conductor 68 that connects the 2nd wiring layer 63 and other installing component 66; with semiconductor chip 1C and other installing component 66 and conductor 67; 68 are sealed into the moulding resin 69 of one; the local nickel dam (metal film) 70 that forms on the outer surface of the 1st wiring layer 61; cover the protection resin bed 71 of outer surface of the 1st wiring layer 61 and the outside terminal 72 that on nickel dam 70, forms.
Form the 1st wiring layer the 61, the 2nd wiring layer 63 and connecting portion 63a by copper or copper alloy being electroplated (electroforming).As copper alloy, since good aspect corrosion resistance and connecting airtight property, so copper-nickel alloy or copper-nickel-silver alloy are specially suitable.Form in the 1st peristome 62a that connecting portion 63a leaves on the 1st insulating barrier 62, its conductivity ground connects the 1st wiring layer 61 and the 2nd wiring layer 63.
The 1st insulating barrier the 62, the 2nd insulating barrier 64 and protection resin bed 71 are formed by insulative resin.As insulative resin,, also can use photoresist for the formation that makes the 1st insulating barrier the 62, the 2nd insulating barrier 64 and protection resin bed 71 becomes easily.On the 1st insulating barrier 62, form the 1st peristome 62a that is used for forming connecting portion 63a, on the 2nd insulating barrier 64, form the 2nd peristome 64a that is used for connecting conductor 67,68 with needed arrangement with needed arrangement.
As other installing component 66, the sheet component of transistor, diode, resistance, inductor, capacitor, quartz (controlled) oscillator, filter, balanced-unbalanced transformer, antenna, functional module etc. and aerial lug etc. can be installed.Have again, in the above-mentioned functions module, comprise VCO, PLL or feed regulator isolator etc.
Conductor 68 as connecting other installing component 66 and the 2nd wiring layer 63 also can use conductive paste and anisotropically conducting adhesive etc., but because can carry out cheapness and the high connection of reliability, so scolding tin is specially suitable.
Moulding resin 69 is used for connecting portion to above-mentioned semiconductor chip 1C, other installing component 66 and these each installing component 1C, the 66 and the 2nd wiring layer 63 to carry out resin-sealed it being become one, and can use the resin-sealed various resin materials that are applicable to semiconductor chip up to now to form.
Nickel dam 70 becomes easily the formation of outside terminal 72, is formed on the portion of terminal of the 1st wiring layer 61 that plan to form outside terminal 72.
Outside terminal 72 is to use for the semiconductor device 60 with this example example is connected on the printed circuit board for example, because can easily carry out the high connection of cheapness and reliability, is desirable especially so form with scolding tin.
This routine semiconductor device 60 except with the same effect of the semiconductor device 40 of the 1st embodiment; because with wiring layer 61,63 with protect resin bed 62,64 to constitute installing component 1C, 66 wiring means; so can omit the part suitable, can obtain thin type and cheap semiconductor device with the core material of existing multilager base plate.In addition, owing to used wiring layer 61,63, so compare with the situation of having used the substrate that possesses the wiring layer that forms by lead frame or metal forming etching or conductive paste printing, can seek densification, high precision int, the microminiaturization of wiring figure and homogenize, can obtain small-sized and high semiconductor module with the adaptability of high frequency.Moreover, because the 1st wiring layer 61 is formed 2 layers with the 2nd wiring layer 63 that is connected with its conductivity ground,, can seek the miniaturization of semiconductor device so can reduce the formation area of wiring layer 61,63.
Moreover, in above-mentioned example example, wiring layer is formed 2 layers, but also can form more than 3 layers certainly.In addition, in above-mentioned example example, the semiconductor chip 1C that has used the CSP type is as semiconductor chip, but also can use semiconductor chip 1D, the 1E of other CSP type.
Aspect the of the present invention the 1st in the described invention, because to be arranged in the analog circuit that forms on the circuit formation face of semiconductor chip and wiring layer again without the overlapping mode of insulating barrier, so at analog circuit and do not form parasitic capacitance again between the wiring layer, can prevent to act on the generation of the electrostatic capacitance noise of analog circuit.In addition, because analog circuit and the not relative configuration of wiring layer again, so can prevent to act on the generation of the electromagnetic induction noise of analog circuit.So, prevented the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of these electrostatic induction noises or electromagnetic induction noise, even for the corresponding semiconductor chip that forms as one with wiring layer again of high frequency, also can eliminate deterioration because of delaying work of causing of noise and communication characteristic.
Aspect the of the present invention the 2nd in the described invention, because to be arranged at least 1 circuit and the wiring layer again in the synthetic portion of the power circuit that is subjected to The noise especially easily, operational amplifier, comparison amplifier, RF acceptance division, RF sending part and RF in the analog circuit that forms on the circuit formation face without the overlapping mode of insulating barrier, so for each circuit block, the generation of crosstalk noise, convergent oscillation and the power supply noise etc. that cause because of electrostatic induction noise or electromagnetic induction noise can be prevented, deterioration can be eliminated because of delaying work of causing of noise and communication characteristic.
Aspect the of the present invention the 3rd in the described invention, because to be arranged in coil that is subjected to The noise especially easily and the wiring layer again in the analog circuit that forms on the circuit formation face without the overlapping mode of insulating barrier, so electrostatic induction noise or electromagnetic induction noise are difficult to act on this coil, can eliminate deterioration because of delaying work of causing of noise and communication characteristic.
Aspect the of the present invention the 4th in the described invention, owing to use again wiring layer to form the aerial coil that contactless communication is used, so can obtain the semiconductor chip of on-chip coil type good aspect the noise resistance performance, can make cheaply, good contactless semiconductor device aspect the noise resistance performance.
Aspect the of the present invention the 5th in the described invention, because with wiring layer formation salient point setting wiring again, so can obtain the semiconductor chip of CSP type good aspect the noise resistance performance, thus can make multiterminal, aspect the noise resistance performance good semiconductor device.
Aspect the of the present invention the 6th in the described invention, because for utilizing the CMOS technology on circuit formation face, to form the semiconductor chip of radio communication circuit, will be again wiring layer be arranged in and on analog circuit, do not form wiring layer again, so can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of the influence of wiring layer.
Aspect the of the present invention the 7th in the described invention, because for having formed transmission, reception or having sent the semiconductor chip of the radio communication circuit of the signal that receives the frequency more than the 800MHz, will be again wiring layer be arranged in and on analog circuit, do not form wiring layer again, so can prevent to be subjected to especially easily again the deterioration of communication characteristic of this semiconductor chip of the influence of wiring layer.
Aspect the of the present invention the 8th in the described invention, owing to be arranged in the analog circuit that forms on the circuit formation face and the semiconductor chip of wiring layer again installing on the semiconductor device in the mode overlapping without insulating barrier, so in the analog circuit of semiconductor chip, be difficult to produce deterioration, can obtain the good semiconductor device of communication characteristic because of delaying work of causing of electrostatic induction noise or electromagnetic induction noise or communication characteristic.
Aspect the of the present invention the 9th in the described invention, owing on semiconductor device, install to be arranged in the power circuit that is subjected to The noise especially easily in the analog circuit that forms on the circuit formation face without the overlapping mode of insulating barrier, operational amplifier, comparison amplifier, the RF acceptance division, at least 1 circuit in the synthetic portion of RF sending part and RF and the semiconductor chip of wiring layer again, so in being subjected to stronger dysgenic these circuit of noise easily, be difficult to produce deterioration, can obtain the good semiconductor device of communication characteristic because of delaying work of causing of electrostatic induction noise or electromagnetic induction noise or communication characteristic.
Aspect the of the present invention the 10th in the described invention, owing on semiconductor device, install to be arranged in the coil that is subjected to The noise especially easily and the semiconductor chip of wiring layer again in the analog circuit that forms on the circuit formation face without the overlapping mode of insulating barrier, so electrostatic induction noise or electromagnetic induction noise do not act on the stronger dysgenic coil that is subjected to noise easily, can obtain the good semiconductor device of communication characteristic.

Claims (10)

1.一种半导体芯片，该半导体芯片在具有数字电路和模拟电路的电路形成区域上经绝缘层与再布线层重叠地形成为一体，其特征在于：1. A semiconductor chip, which is integrally formed by overlapping an insulating layer and a rewiring layer on a circuit forming region having a digital circuit and an analog circuit, characterized in that: 经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的模拟电路的全部或一部分和在上述再布线层中形成的布线。All or a part of the analog circuit formed on the circuit forming region, which is easily affected by noise, and the wiring formed in the rewiring layer are arranged so as not to overlap each other via the insulating layer. 2.一种半导体芯片，该半导体芯片在具有数字电路和模拟电路的电路形成区域上经绝缘层与再布线层重叠地形成为一体，其特征在于：2. A semiconductor chip, which is integrally formed by overlapping an insulating layer and a rewiring layer on a circuit forming region having a digital circuit and an analog circuit, characterized in that: 经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的电源电路、运算放大器、比较放大器、RF接收部、RF发送部和RF合成部中的至少1个电路和上述再布线层中形成的布线。At least one of the power supply circuit, operational amplifier, comparative amplifier, RF receiving section, RF transmitting section, and RF combining section formed on the above-mentioned circuit forming region, which is easily affected by noise, is arranged without overlapping via the above-mentioned insulating layer. and the wiring formed in the above-mentioned rewiring layer. 3.一种半导体芯片，该半导体芯片在具有数字电路和模拟电路的电路形成区域上经绝缘层与再布线层重叠地形成为一体，其特征在于：3. A semiconductor chip, which is integrally formed by overlapping an insulating layer and a rewiring layer on a circuit forming region having a digital circuit and an analog circuit, characterized in that: 经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的线圈和上述再布线层中形成的布线。The coil easily affected by noise formed on the above-mentioned circuit formation region and the wiring formed in the above-mentioned rewiring layer are arranged through the above-mentioned insulating layer in such a manner that they do not overlap. 4.如权利要求1至权利要求3的任一项所述的半导体芯片，其特征在于：4. The semiconductor chip according to any one of claims 1 to 3, characterized in that: 用在上述再布线层上形成的布线形成了两端连接到上述电路形成区域上形成的输入输出端子上的非接触通信用的天线线圈。An antenna coil for non-contact communication whose both ends are connected to the input/output terminals formed on the above-mentioned circuit formation region is formed by the wiring formed on the above-mentioned rewiring layer. 5.如权利要求1至权利要求3的任一项所述的半导体芯片，其特征在于：5. The semiconductor chip according to any one of claims 1 to 3, characterized in that: 用在上述再布线层上形成的布线形成了一端连接到上述电路形成区域上形成的输入输出端子上、另一端上形成了凸点的凸点设定用布线。The wirings formed on the rewiring layer are used to form bump setting wirings whose ends are connected to the input/output terminals formed on the above-mentioned circuit formation region and whose other ends are formed with bumps. 6.如权利要求1至权利要求5的任一项所述的半导体芯片，其特征在于：6. The semiconductor chip according to any one of claims 1 to 5, characterized in that: 在上述电路形成区域上形成的电路是利用CMOS技术形成的无线通信电路。The circuit formed on the above-mentioned circuit formation region is a wireless communication circuit formed using CMOS technology. 7.如权利要求1至权利要求6的任一项所述的半导体芯片，其特征在于：7. The semiconductor chip according to any one of claims 1 to 6, characterized in that: 在上述电路形成区域上形成的电路是在与外部装置之间发送、接收或发送接收800MHz以上频率的信号的无线通信电路。The circuit formed in the above-mentioned circuit formation area is a wireless communication circuit that transmits, receives, or transmits and receives signals with a frequency of 800 MHz or higher to and from an external device. 8.一种半导体器件，该半导体器件在规定尺寸和规定形状的基体上安装了半导体芯片而构成，其特征在于：8. A semiconductor device, which is formed by mounting a semiconductor chip on a substrate of a predetermined size and shape, characterized in that: 安装了在具有数字电路和模拟电路的电路形成区域上经绝缘层与再布线层重叠地形成为一体的、且经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的模拟电路的全部或一部分和上述再布线层中形成的布线的半导体芯片作为上述半导体芯片。Mounted on the circuit formation area having the digital circuit and the analog circuit, which are integrally formed by overlapping the rewiring layer via the insulating layer, and which are easily susceptible to noise formed on the above circuit formation area are arranged in a non-overlapping manner via the insulating layer. A semiconductor chip in which all or a part of the affected analog circuit and the wiring formed in the above-mentioned rewiring layer is referred to as the above-mentioned semiconductor chip. 9.一种半导体器件，该半导体器件在规定尺寸和规定形状的基体上安装了半导体芯片而构成，其特征在于：9. A semiconductor device, which is formed by mounting a semiconductor chip on a substrate of a predetermined size and shape, characterized in that: 安装了在电路形成区域上经绝缘层与再布线层重叠地形成为一体的、且经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的电源电路、运算放大器、比较放大器、RF接收部、RF发送部和RF合成部中的至少1个电路和上述再布线层中形成的布线的半导体芯片作为上述半导体芯片。A power supply circuit and an operational amplifier that are easily affected by noise formed on the circuit formation area are mounted on the circuit formation area, which are integrally formed overlapping the rewiring layer via the insulating layer, and are arranged so as not to overlap via the above insulation layer. A semiconductor chip comprising at least one circuit of a comparison amplifier, an RF receiving unit, an RF transmitting unit, and an RF combining unit, and wiring formed in the rewiring layer is the semiconductor chip. 10.一种半导体器件，该半导体器件在规定尺寸和规定形状的基体上安装了半导体芯片而构成，其特征在于：10. A semiconductor device, which is formed by mounting a semiconductor chip on a substrate of a predetermined size and shape, characterized in that: 安装了在具有数字电路和模拟电路的电路形成区域上经绝缘层与再布线层重叠地形成为一体的、且经上述绝缘层以不重叠的方式排列了在上述电路形成区域上形成的容易受到噪声影响的线圈和上述再布线层中形成的布线的半导体芯片作为上述半导体芯片。Mounted on the circuit formation area having the digital circuit and the analog circuit, which are integrally formed by overlapping the rewiring layer via the insulating layer, and which are easily susceptible to noise formed on the above circuit formation area are arranged in a non-overlapping manner A semiconductor chip affected by the coil and the wiring formed in the above-mentioned rewiring layer serves as the above-mentioned semiconductor chip.
CNB018109853A 2000-06-21 2001-06-20 Semiconductor chip and semiconductor device using said semiconductor chip Expired - Fee Related CN1275328C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP186409/00 2000-06-21
JP186409/2000 2000-06-21
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CN1436370A (en) 2003-08-13
KR100741039B1 (en) 2007-07-20
DE10196382T1 (en) 2003-12-04
KR20030041870A (en) 2003-05-27
WO2001099193A1 (en) 2001-12-27
AU7457401A (en) 2002-01-02
US6838773B2 (en) 2005-01-04

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