CN1256759A - Method and apparatus for reducing coherence of light, method and apparatus for illumination, and fiber bundle - Google Patents
Method and apparatus for reducing coherence of light, method and apparatus for illumination, and fiber bundle Download PDFInfo
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- CN1256759A CN1256759A CN 99800230 CN99800230A CN1256759A CN 1256759 A CN1256759 A CN 1256759A CN 99800230 CN99800230 CN 99800230 CN 99800230 A CN99800230 A CN 99800230A CN 1256759 A CN1256759 A CN 1256759A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
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Abstract
There are provided a method and apparatus for reducing the coherence of light using a simple structure, a method and apparatus for providing illumination with high intensity and free from speckles, and a fiber bundle for those purposes. Coherent light ( alpha ) is introduced to one end (3) of a fiber bundle (1) comprising a plurality of optical fibers (2a), (2b), ... that are different in length by more than the coherence length of the incident coherent light. An incoherent light beam is emitted from the other end (4) of the fiber bundle (1).
Description
Technical field
The present invention relates to reduce the method and the device thereof of coherence of light, means of illumination and device thereof, and fiber bundle.
Background technology
Always, as the light source of the illumination light of among for example projection type liquid crystal display and measuring device etc., using,, adopt bulb and light emitting diode incoherent light sources such as (LED) from cost and all reasons such as easy always.
Relative therewith, attempt always will be with the laser of solid state laser, gas laser, semiconductor laser etc. as the laser of light source as illumination light.Laser is the high light beam of coherence having the excellent direction-sense high strength that also has simultaneously, and the most difficult wherein technical problem is because the speckle that coherence's height produces.
Such as, semiconductor laser is the light source of the laser of emission photoelectric transformation efficiency height, directionality excellence, but because coherence's height causes the event of speckle, seldom as illumination light source.
In addition,, the research of the display device (to call laser writer in the following text) that uses laser is launched in various places in the seventies, except problems such as light source output deficiency and modulator approach, hinder its practicability one of problem be exactly the speckle problem.
In recent years, the exploitation of the basic fundamental of the critical component of laser writer just sharply advances, and comprises the high output lasers of the wavelength conversion that adopts solid state laser, the semiconductor laser that can produce blue (B) three primary colors vibration of red (R) green (G) and the spatial modulator of employing liquid crystal and micromachine etc.
Relative therewith, speckle (speckle figure) except laser writer, also becomes very big problem in semiconductor exposure device field in recent years, is seeking the countermeasure to this.This is owing to be that raising exploring degree has imported the cause as the excimer laser of short wavelength light source.
As control to the coherence, promptly to the countermeasure of speckle, such as, propose a kind of in the semiconductor exposure device, as shown in Figure 1, the fly lens 71 that utilizes the different element of length to constitute between the emitting side end face and mask 73 of fly lens 71, reduces method (with reference to the Shibuya true man, go up the public clear 60-230629 communique of former sincere Jap.P. spy) being so-called coherence that f place is provided with lens 72 apart from both.
Yet, in the method, because the length of the element of fly lens 71 is big, and the varying in size of the field of illumination of each element, so its inefficiencies etc. just become problem.
In addition, a kind of scheme (being willing to clear 63-22131 communique with reference to Japanese patent application laid) that reaches the employing prism 75 as shown in Figure 2 of effect same is also proposed.Yet the effect that this method reduces the coherence is abundant inadequately, and optical loss is excessive.
In addition, on principle, utilize and disperse the way of refractive index can obtain same effect, but exist, must be used in the problem of the element maximization that reduces the coherence for the method by common dispersion refractive index obtains effect of sufficient.
In addition, various control coherence's technology is also proposed.Yet, utilize any method, among display and microscope etc., the speckle that generates between illuminated object and the naked eyes all can't fully reduce.In addition, in order to remove this speckle, require to adopt the coherence control more stricter than projection aligners such as photoetching processes.
Promptly as shown in Figure 3, by the picture 83 of the object 80 of illumination light a illumination by lens 81 imaging on screen 82.Herein, be the occasion of coherent light at illumination light a, because the interference effect of the random phase that the optical surface state of the rough surface state of object 80 and lens 81 is produced, make on 83, speckle to occur on the screen 82.
In addition, shown in Figure 4 as synoptic diagram, observe the picture of the object that on screen, generates by lens with eyes, the picture of the object 85 that is generated on screen 87 by lens 86 images in nethike embrane 89 by eyeball 88 exactly.Promptly in this process, because the interference of the light of screen 87 and eyeball 88 and produce the random phase deviation on light path also can produce speckle in this imaging process.In addition, even do not have speckle overlapping on the picture of screen 87, the spatial coherence that exists on as the plane also can go up at naked eyes (nethike embrane 89) and generate the secondary speckle.
In addition, the mirror that is adopted in based on the projection aligner of photoetching technique moves technology such as method and rotation diffusion sheet method can not reduce the coherence, carry out equalization and speckle is moved,, also do not have what effect for the speckle that in naked eyes, generates even therefore adopt these technology.If among display etc., adopt this technology, the position that screen is vibrated between illuminated objects such as changing screen and the eyes concerns (with reference to Eric G.Rawson, B.Nafarrate, Robert E.Norton, Joseph W.Goodman, " Specle-free rear-projection screen using two close screens in slowrelative motion; " Jounal of Optical Society of America, Vol.66, No.11, November 1976, pp 1290-1294).Yet this is very inconvenience in practicality.
On the other hand, optical fiber is mainly developed in order to communicate by letter purposes up to now, and its primary structure material is that adopting with quartz etc. is the glass material (glass optical fiber) of principal ingredient always.In addition, for avoiding modal dispersion, exploitation is based on single-mode fiber.
In addition, known glass optical fiber is in the occasion of the light beam of the long scope of transmission visible short, and the diffusion meeting increases, and its transmissivity can reduce.So fiber optic applications is only limited to the illuminating multimode optical fiber that do not need microscope that long distance transmits etc. etc. when visible light.Particularly, using the occasion of multimode optical fiber, be evenly distributed owing to penetrate light intensity, not needing complicated optical system such as fly lens also is a very big advantage.
Relative therewith, recently, the exploitation of plastics multimode optical fiber just arouse attention (with reference to TakaakiIshigure, Eisuke Nihei, and Yasuhiro Koike, " Graded-index polymeroptical fiber for high-speed data communication ", Applied Optics, Vol.33, No.19,1 July 1994, pp 4261-4266).
Plastic optical fiber is compared with glass optical fiber, it is characterized by not only cheaply but also gently, shows max transmissive efficient at visible-range.In addition, modal dispersion is compared also very big with common glass optical fiber.
In addition, also studying hollow waveguide path (the 58th pre-original text collection of applied physics association disquisition of reference that ultraviolet range laser transmits usefulness recently, 3a-SR-18, Ping Cang Zheng Shu, bridge new abundant one, Kubo space city " Ultra-Violet Laser power transmits the improvement with the hollow waveguide path ").
In addition, the mode dispersion in the transmission of known because multimode optical fiber make the contrast of speckle descend (with reference to modern well just bright " wave characteristic of optical fiber and hot spot ", optics, the 8th the 3rd phase of volume, in June, 1979 p128-134).
Promptly as shown in Figure 5, in the multimode optical fiber 92 that constitutes by fibre core 93 and covering 94, because laser 90 and laser 91 have different transmission speeds respectively, in ejecting end 95 1 sides of multimode optical fiber 92, the light beam with mutually different mode component is corresponding at different time (t
1, t
2And t
3) light beam of incident.Therefore, if because the broadening that modal dispersion causes surpasses coherent length, the coherence who penetrates light just reduces.
Yet, independent this kind multimode optical fiber is difficult to the very big laser of transmission light intensity, in addition, even in occasion (occasion of bunchy), because the laser that each optical fiber penetrates has mutual coherence, so also be difficult to carry out coherence's control with its set bunchy, promptly be difficult to speckle is fully reduced, in addition, when it is applied to lighting use, must be chromatic dispersion big, at the high optical fiber of visible range transmissivity.
As mentioned above, owing to do not have easy cheap high-performance coherence's control technology (promptly reducing coherence's technology) in the past, so can not be with above-mentioned various laser as lighting source.In addition, this has also hindered the application of the lighting device that adopts laser (such as display and measuring device, microscope or the like) always.
Brief introduction of the present invention
The present invention system aims to provide the method that reduces coherence of light and the device thereof of simple structure in view of the above fact, and provide utilize have excellent directionality simultaneously the high-strength beam that reduces of coherence as the means of illumination and the device thereof of illumination light.
Another object of the present invention provides and is transformed to the fiber bundle of the light beam that the coherence reduces with having excellent direction-sense high-strength beam.
The present invention relates to that promptly coherent light is incided and comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, from then on optical fiber a kind of method that reduces coherence of light of trooping that the light emitting side fibre bundle of synthetic bundle partly penetrates light that the coherence reduces (below be referred to as the method that reduces coherence of light of the present invention).
According to the method that reduces coherence of light of the present invention, such as, the coherent light that penetrates from LASER Light Source such as solid state laser, semiconductor laser, gas laser, pigment laser instruments incide comprise length difference surpass this coherent light coherent length (interference distance), the length optical fiber group of different multifibers mutually, so the light beam that penetrates from above-mentioned multifiber does not have the coherence, so what partly penetrate from above-mentioned smooth emitting side fibre bundle is the light beam that the coherence reduces.This also can be by constituting the above-mentioned optical fiber group of a part of optical routing of light beam (below be referred to as fiber bundle) easy structure that realizes reducing coherence of light.
In addition, the present invention can provide a kind of and reduce the device conduct of coherence of light with the well reproduced realization device that reduces the method for coherence of light of the present invention, this device have make above-mentioned coherent light incident thereon comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, partly penetrate the light (is the device that reduces coherence of light of the present invention to call this device in the following text) that the coherence reduces from the troop fiber bundle of light emitting side of synthetic bundle of above-mentioned optical fiber.
In addition, the present invention can provide a kind of coherent light that light source is penetrated to incide to comprise coherent length that length difference surpasses this coherent light, the length optical fiber group of different multifibers mutually, from then on the troop fiber bundle of light emitting side of synthetic bundle of optical fiber partly penetrates light that the coherence reduces as the means of illumination of illumination light (below be referred to as means of illumination of the present invention).
According to means of illumination of the present invention, because the coherent light that penetrates from light sources such as solid state laser, semiconductor laser, gas laser, pigment laser instruments incide comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, the light beam that penetrates from above-mentioned multifiber does not have the coherence, so what partly penetrate from above-mentioned smooth emitting side fibre bundle is the light beam that the coherence reduces.Also promptly because the coherence of above-mentioned coherent light reduces, can utilize to have excellent direction-sense high strength coherent light and be inhibited, have excellent direction-sense high strength and the uniform illumination light of illumination intensity distribution as speckle.This also can be by constituting the above-mentioned optical fiber group of a part of optical routing of light beam (fiber bundle) easy structure that realizes reducing coherence of light.
In addition, the present invention can provide a kind of device of coherence of light that reduces as the device with well reproduced realization means of illumination of the present invention, this device have the light source that penetrates coherent light and comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, partly penetrate light that the coherence reduces as the lighting device of illumination light (below be referred to as lighting device of the present invention) from the troop fiber bundle of the synthetic light emitting side of restrainting of above-mentioned optical fiber.
In addition, the present invention can provide a kind of conduct to be applied to the above-mentioned optical fiber group in coherent approach and device thereof, means of illumination of the present invention and the device thereof of reducing of the invention described above, can conduct the fiber bundle (or fibre bundle) that the multifiber set bunchy of coherent light forms, comprise length difference surpass above-mentioned coherent light coherent length, length mutually the optical fiber group of different multifibers at least the fiber bundle of light emitting side set bunchy (below be referred to as fiber bundle of the present invention).
According to fiber bundle of the present invention, because comprise length difference surpass above-mentioned coherent light coherent length, length mutually the optical fiber group of different multifibers at least at light emitting side set bunchy, so as just can be when reducing its coherence coherent light be transformed to by this fiber bundle and has excellent direction-sense high-strength beam.
Brief description
Fig. 1 is the generalized schematic of a part of the lighting device of existing employing fly lens.
Fig. 2 is the generalized schematic of a part of the lighting device of existing employing prism.
Fig. 3 is used to illustrate that the coherence controls the generalized schematic of necessity.
Fig. 4 is used to illustrate that the coherence controls another generalized schematic of necessity.
Fig. 5 illustrates because the generalized schematic of the principle that the coherence that the modal dispersion in the optical fiber causes reduces.
Fig. 6 (A) is the generalized schematic based on fiber bundle of the present invention, and Fig. 6 (B) is the generalized schematic of its incident end or ejecting end.
Fig. 7 is the generalized schematic that first example of the present invention is shown.
Fig. 8 is the generalized schematic that second example of the present invention is shown.
Fig. 9 is another generalized schematic that second example of the present invention is shown.
Figure 10 is the generalized schematic that the 3rd example of the present invention is shown.
Figure 11 is another generalized schematic that the 3rd example of the present invention is shown.
Figure 12 is the generalized schematic that the 4th example of the present invention is shown.
Figure 13 is another generalized schematic that the 4th example of the present invention is shown.
Figure 14 is the generalized schematic that the 5th example of the present invention is shown.
Figure 15 is the generalized schematic that the 6th example of the present invention is shown.
Figure 16 (A) is for illustrating the generalized schematic of the 7th example of the present invention, and in addition, Figure 16 (B) is the generalized schematic that an example of the sample with 3D shape is shown, and Figure 16 (C) is for illustrating the generalized schematic of biological tissue sample one example.
Figure 17 is another generalized schematic that illustrates based on fiber bundle of the present invention.
Preferred example of the present invention
In the method that reduces coherence of light of the present invention and device, means of illumination of the present invention and device thereof and fiber bundle of the present invention (following always be referred to as the present invention), the incoming position of above-mentioned optical fiber group's (or fiber bundle) light (coherent light) is preferably identical or roughly the same between above-mentioned each optical fiber, in addition, above-mentioned optical fiber group preferably gathers as far as possible thick and fast at the light incoming position.
In addition, in the present invention, by any of above-mentioned multifiber is carried out bending and can make the length of these optical fiber become the mutual different length that length difference surpasses the coherent length of above-mentioned coherent light.Restriction that this bending method has nothing special can select to satisfy the different shape of above-mentioned length condition.
In addition, in the present invention, preferably adopt multimode optical fiber as above-mentioned optical fiber.Particularly because reason such as transmissivity height and radius-of-curvature be big, above-mentioned multimode optical fiber preferably adopts plastic optical fiber.
Light beam by multimode optical fiber transmission is because modal dispersion and the coherence reduces.Therefore, according to characteristic structure of the present invention, form and be above-mentioned optical fiber group by comprising different mutually many root multimode fibers set bunchys of length that length difference surpasses the coherent length of coherent light, by this optical fiber group of intermediary (fiber bundle) conduction coherent light, just can suppress the mutual interference of the light beam that penetrates from above-mentioned many root multimode fibers and reduce its coherence when being implemented in the transmission high-strength beam.
In addition, in the present invention, above-mentioned coherent light is the laser of visible range preferably, and in this occasion, above-mentioned the Lights section can be the above-mentioned various laser instruments that penetrate visible range laser.
In the present invention promptly, as to make above-mentioned coherent light be visible wavelength region laser, just can realize that display device and measuring device, microscope etc. are the optical devices of light source with the visible range light beam.
Or, also can utilize the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser (laser instrument that promptly also can adopt the laser that penetrates ultraviolet range is as above-mentioned light source) of ultraviolet range, can realize that whereby with the ultraviolet range light beam be light source, such as, the optical devices of measuring device, microscope, exposure device etc.
In addition, in means of illumination of the present invention and device thereof, above-mentioned illumination light can be used as the light source of display device, measuring device, microscope or exposure device.
Such as, by utilizing the illumination of above-mentioned illumination light, it is looked like to project on the screen by the spatial modulator that liquid crystal cell etc. constitutes, speckle be can suppress and high brightness, high-precision display device (display) realized.In addition, by utilizing the illumination of this illumination light by the instrumentation object and shape, reflection and/or the projection light intensity etc. of this object are carried out instrumentation can realize measuring the high measuring device of precision.In addition, can realize utilizing the microscope of the fluorescent microscope etc. of this illumination light.In addition, as light source, throw light on to being exposed object, can obtain contrast height, exposure picture (particularly ultraviolet exposure apparatus according) that the depth of focus is big by intermediary's mask etc. with this illumination light (the particularly illumination light of ultraviolet range).
Below effect of the present invention is described.
Generally, the coherent light beam by the multimode optical fiber transmission can reduce the coherence owing to modal dispersion.In addition, in the present invention, because above-mentioned multifiber has the length difference above coherent length, the light beam after each optical fiber penetrates does not have interference capability each other.
So the size of light source strengthens, spatial coherence reduces.So by the synthetic light beam that constitutes, its coherence reduces, and if the coherence reduces, then the contrast of speckle can reduce.In addition, utilize this light can realize to avoid the display of the image deterioration that causes by speckle, tester, exposure device etc. as irradiates light.And, owing to the intensity distributions of the outgoing beam that sends from multimode optical fiber is even, so can when reducing the coherence, realize high strength and illumination uniformly.
Describe the modal dispersion in this multimode optical fiber below in detail.
In the occasion of the step index optical fiber that is made of high fibre core of refractive index and the covering lower than its refractive index, its closed mode sum N is provided by following formula (1):
N≡V
2/2……(1)
In above-mentioned formula (1), V is the normalized frequency by following formula (2) expression:
V＝k
0a(n
1 2-n
2 2)
1/2……(2)
[in above-mentioned formula (2), k
0Be wave number (=ω/c: wherein ω is that angular frequency, c are the lighies velocity), the n in the vacuum
1Be refractive index, the n of fibre core
2Be that cladding index, a are fiber core radius.]
Such as, be 500 μ m, fiber core refractive index n at fiber core radius a
1, cladding index n
2Be respectively n
1=1.492, n
2When having wavelength to be the light beam incident of 500nm in=1.456 the plastic optical fiber, the closed mode sum is approximately 500,000 patterns.Promptly in multimode optical fiber, because modal dispersion is expanded pulse greatly.Can think that in this multi-mode occasion, mode refractive index expands to cladding index from fiber core refractive index always.
Therefore, be that the front end of pulse of optical fiber of L and the distance of tail end are represented by following formula (3) by length:
c[(n
1L/c)-(n
2L/c)]＝(n
1-n
2)L……(3)
As a result, the wavelength that incides the light incident side of optical fiber at synchronization is the light beam of 500nm (pulse in synchronization incident of δ function shape), such as, the front and back width of pulse broadening is 2.6cm when the optical fiber from 1m length penetrates.
Like this, as the coherent length of incident beam that incides optical fiber than this pulse width in short-term, even incident light is a continuous light, the coherence also can reduce.For example, to carrying out the laser of the solid state laser of multimode oscillation,, can realize the coherent length of several millimeters degree if utilize its higher hamonic wave.So the temporal coherence of the transmitted light beam by multimode optical fiber transmission can reduce.
In addition, also can reduce spatial coherence by a plurality of patterns of stack in the space.Because this influence, as previously mentioned, even the modal dispersion length of optical fiber (the fastest pattern of the light ejecting end of optical fiber and the slowest pattern poor) than the coherent length of light source for short, coherent length also can reduce, but in order more effectively to suppress the coherence, the modal dispersion length of optical fiber preferably is length than the coherent length of light source, and the length L of optical fiber is preferably for this reason:
L＞(a/n
1-n
2)
(wherein a, n
1And n
2Identical with the front).
If the coherent length of the transmitted light beam by the transmission of this multimode optical fiber is M, when surpassing M as the length difference of the multifiber of bunchy, because the light beam that penetrates from above-mentioned multifiber does not have coherence's (but interference capability) each other, by its mixing (synthesizing) just being reduced the coherence of light beam, be not easy to generate speckle.So, suitably select and design the length of optical fiber and the radical of optical fiber, and the coherent length of light source just can suppress speckle on demand fully.
, it should be noted that the light loss in the transmission herein, now, in the occasion of plastic optical fiber, it transmits loss, and for the light beam of wavelength 500nm～550nm, approximately 0.1dB/m is minimum.In other words, when 1m, 5m, 10m, 50m, the internal transmission rate is respectively 97.7%, 89.1%, 79.4%, 31.6%.So, for the application purpose of means of illumination of the present invention or its device (such as, display device, measuring device, microscope, exposure device etc.) be the degree of fully allowing.
In addition, the hollow optical fiber that above-mentioned ultraviolet waveguide is used, its transmissivity is also lower now, but expectation can have sufficient efficiency of transmission in the future.In addition, can think, also can obtain sufficient ejaculation light at the different application purposes by itself the output that improves various laser instruments.
Below with reference to Fig. 6 the example based on fiber bundle of the present invention is described.
Shown in Fig. 6 (A), mutual difference of length and length difference are above many root multimode fibers 2a, 2b, 2c, the 2d of the coherent length of the coherent light of incident ... incident end (incident side optical fibers bundle part) 3 and ejecting end (emitting side fibre bundle part) 4 all aligned together, and form the fiber bundle 1 that constitutes by the optical fiber group by the set bunchy.
Particularly in its incident side optical fibers bundle part 3 and emitting side fibre bundle part 4, its bunchy method, shown in Fig. 6 (B), intensive as much as possible (such as, the intensive filling of hexagonal), this viewpoint from combination (coupling) efficient of the laser of ejaculation (or incident) sees it is optimal.
In addition, multimode optical fiber 2 has the dual structure that is made of big fibre core 5 of refractive index and the less covering 6 of refractive index ratio, and one one length is all different in fiber bundle 1.This length difference according to characteristic structure of the present invention, should surpass the coherent length of the coherent light incide fiber bundle, and at least two optical fiber should have the length difference above coherent length respectively.But, preferably can make all bunchy optical fiber have length difference respectively above coherent length.
As this method that makes the different multifiber set bunchy of length, as shown in Figure 6, preferably any part that grows above-mentioned coherent length than other optical fiber in each optical fiber is turned back with becoming curve-like, and even this return portion 8 is set, the light incident section of fiber bundle 1 and light injection part have common or same position between each optical fiber.Like this, owing to use optical fiber, can effectively utilize surrounding space and easy and realize above-mentioned length difference compactly by mode such as turn back.The shape of this optical fiber is not limited to shape shown in Figure 6, such as shown in figure 17, and optical fiber 7a, 7b, 7c, 7d ... it is also passable that simple warpage becomes curve shape.Can constitute shape arbitrarily in order to amount of curvature with the joggling part of optical fiber.
So, in fiber bundle shown in Figure 61, inciding the coherent laser α in the incident side optical fibers bundle portion 3 of multifiber set bunchy, intermediary's fiber bundle 1 becomes the light beam that the coherence has reduced, and becomes noncoherent light beam ideally and penetrates.
Promptly, incide the laser α on the incident side optical fibers bundle part 3, be to incide multimode optical fiber 2a, 2b, 2c, 2d with same or almost same intensity ... on, in each multimode optical fiber, as the temporal coherence that causes owing to modal dispersion, laser (a) and (b), (c), (d) that spatial coherence reduces ... and penetrate.
So, each multimode optical fiber, because according to characteristic structure of the present invention, has length difference respectively above coherent length, former laser (a) and (b), (c), (d) that penetrates from the emitting side fibre bundle part 4 of each multimode optical fiber has the phase differential corresponding to the length difference that surpasses coherent length, but the laser that penetrates from each multimode optical fiber does not have mutual interference capability, as with these laser are synthetic just can the directionality excellence be high-intensity, the while coherence is reduced to and in fact becomes noncoherent light beam obtaining.
So, coherent laser, fiber bundle by intermediary's tube constipation structure as above-mentioned transmits, and in fact is transformed to non-coherent bundle, particularly can be used as the illumination light of using and utilize among aforementioned display device, measuring device, microscope, exposure device etc.In addition because can reduce the coherence by optical fiber (fiber bundle), so the coherence to reduce effect very abundant, and intensity distributions is even, optical loss seldom in addition.
Below the desirable example of the present invention is illustrated.
First example
At first, with reference to figure 7, first example of the present invention is illustrated.
This example is the display device of utilizing based on fiber bundle of the present invention shown in Figure 6 (laser display apparatus).
In this display device, at first, the laser that penetrates by laser oscillator 10 incides lens 11, utilizes the laser of lens 11 optically focused to incide the incident side optical fibers bundle portion of fiber bundle same as described above 12 afterwards.
So by the laser that fiber bundle 12 and optical fiber 13 penetrate, scioptics 14 throw light on to the spatial modulator 15 that for example is made of the transmission-type liquid crystal display element.In addition, optical fiber 13 can be with fiber bundle 12 set bunchys, also can be other the optical fiber with fiber bundle 12 couplings.
So, utilizing the high-intensity illumination light of sending from lens 14, the picture that spatial modulator 15 is produced projects on the screen 17 with high brightness, high precision and good contrast through projecting lens 16.
Like this, because the illumination light of lighting space modulator is the laser that has passed through based on fiber bundle 12 of the present invention, so utilize aforesaid effect, the coherence can reduce, and can reduce on the screen or the speckle above any one on the observer's who observes the nethike embrane.
, can use solid state laser, semiconductor laser, gas laser, pigment laser instrument or the like herein, also can use its higher hamonic wave (such as Nd: the second harmonic of YAG laser and quintuple harmonics) in addition as laser oscillator 10.In addition, for obtaining primaries, can be with laser and with light sources such as LED beyond the laser or bulbs.In addition, also not necessarily one of light source can be a plurality of.In view of the above, can use the high and maneuverable semiconductor laser of the low but efficient of output.In this occasion, when should a plurality of laser synthetic, can use based on fiber bundle of the present invention.
Second example
Shown in this example is in order to reach the purpose of the trichromatic illumination light that acquisition adopts in display device etc., employing can vibrate the semiconductor laser that generates red wavelength range laser, can vibrate generates the semiconductor laser of green wavelength scope laser and the structure of the light source portion of the illumination light bundle of the semiconductor laser that generates blue wavelength region laser of can vibrating.
Promptly, as shown in Figure 8, import based on fiber bundle 23a of the present invention, 23b and 23c from laser scioptics 22a, 22b and 22c shown in each semiconductor laser of semiconductor laser 21c of the semiconductor laser 21b of the semiconductor laser 21a of red (R) vibration, green (G) vibration and blueness (B) vibration, laser of all kinds can be coupled by fiber bundle.
Like this, for obtaining three primary colors, utilize the semiconductor laser of red, green and blue vibration, the outgoing beam that will send from each semiconductor laser just can be as the illumination light that has high directivity and hard intensity when reducing the coherence by carrying out guided wave based on fiber bundle of the present invention.
In addition, Fig. 9 is the lighting device of purpose for the illumination light with the acquisition greater strength.
As shown in Figure 9, the red laser scioptics 22 that red laser diode 25a, 25b and 25c send import fiber bundle 26a, 26b and 26c respectively, and these fiber bundles can be become the red laser of greater strength again by fibre bundle 27a transmission by coupling.Do not hold superfluous words, profit can be transmitted green laser and blue laser in the same way.
So, the optical fiber 27b of the optical fiber 27a by will transmitting red laser, transmission green laser and the optical fiber 27c of transmission blue laser further gather bunchy just can be in optical fiber 28 the bigger trichromatic laser of intensity transmission.Certainly, the number that sends semiconductor laser of all kinds is not limited to 3, can use a plurality of arbitrarily.In addition, also be not limited to the position of fiber bundle 26a, 26b and 26c, also can be positioned at the position of optical fiber 27a, 27b and 27c or optical fiber 28 based on fiber bundle of the present invention portion.
The 3rd example
Shown in this example is the light source portion structure of utilizing the illumination light bundle of the different laser of polarization state.
Figure 10 generates the semiconductor laser 32a of P polarized light, the semiconductor laser 32b that vibration generates the S polarized light for utilizing by vibration, lens 33a, 33b, the laser couplers unit 31 that mirror 34 and light beam beam splitting arrangement 35 constitutes, and lens 36 are with the generalized schematic of laser structure of synthetic light source portion in fiber bundle 37 of the laser of P polarized light and S polarized light.Like this, by using the light beam beam splitting arrangement just can import the high laser of the good intensity of efficient.
In addition, Figure 11 is same with Figure 10 basically, it is the lighting device that utilizes the different laser of polarization state, the red laser scioptics 36a that will penetrate from the laser couplers unit 31a of red (R) laser of vibration generation is synthetic among fiber bundle 37a, similarly, will generate green laser that the laser couplers unit 31b of green (G) laser penetrates and will generate blue laser that the laser couplers unit 31c of blue (B) laser penetrates that scioptics 36b and lens 36c incide the example that forms each fiber bundle fiber bundle 37b and the fiber bundle 37c respectively from vibration from vibration.
But, shown in second example of Fig. 8～shown in Figure 11 and the 3rd example is the example that imports a fiber bundle from the ejaculation light that the semiconductor laser with different oscillation wavelength scopes sends, in addition, for providing primaries also can consider to adopt other several methods.
At first, the firstth, modulation of source.Promptly vibration generates laser of all kinds periodically, can obtain coloured image by utilize spatial modulator to carry out space look decomposition (modulation) in each cycle.
The secondth, utilize the spatial modulation of color filter.If spatial modulator promptly of all kinds has the color filter that the particular color that only allows each pixel passes through, just can utilize spatial modulator to obtain coloured image.In addition, trichromatic synthetic, shown in following the 4th example, also can partly carry out in spatial modulator.
The 4th example
This example is, utilizes the reflection-type spatial modulator of reflection type liquid crystal display element for example etc., after the partly synthetic three primary colors of this spatial modulator, imports the structure example of unshowned display device based on fiber bundle of the present invention.
As shown in figure 12, adopt said method, when making illumination light shine the unit 42 that constitutes by reflection-type spatial modulator 40 and light beam beam splitting arrangement 41 based on fiber bundle of the present invention, can utilize a spatial modulator (unit) that three primary colors are modulated by abridged among the figure.Herein, available light beam beam splitting arrangement displacement light beam beam splitting arrangement 41 disposes wavelength plate in spatial modulator in body or on this light path, also can improve modulation efficiency.
In addition, Figure 13 for unit application shown in Figure 12 in of all kinds, utilize dichroic mirror 43 to synthesize light beam after promptly illumination light being imported between red space modulator 42a, green sky modulator 42b and blue spatial modulator 42c and passes through spatial modulation by abridged fiber bundle among the figure.
In this example, narration be the reflection-type spatial modulator, but transmission-type spatial modulator (for example transmission-type liquid crystal display element) also is the same structure.
More than mainly narrated the means of illumination and the lighting device of display device (display) usefulness from first example to the, four examples, but the present invention is not limited to these examples, and all other application can be arranged.
Below being that example describes as measuring device and microscopical light source from the illumination light sent based on fiber bundle of the present invention.
In addition, not shown, as utilize hollow multimode fiber bundle as based on multimode fiber bundle of the present invention, can be applicable to the laser of UV wavelength range.Utilize this optical fiber, such as, can realize the ultraviolet exposure apparatus according of the manufacture process of semiconductor etc.In addition, if in microscope with the nethike embrane of sample (observed object) and human body (or CCD (charge-coupled image sensor) or the like) above-mentioned spatial modulator and the screen of displacement, in measuring device,, in exposure device, just can realize respectively at an easy rate with mask and the displacement of exposure object with by instrumentation object and image-input device displacement.
The 5th example
This example is to be applied to the example of measuring device based on fiber bundle of the present invention.
Promptly as shown in figure 14, the illumination light a that sends from fiber bundle 45 projects by instrumentation surface 47, detect by light-receiving device 49 by being passed through viewing optical system 48 by instrumentation surface 47 beam reflected b, such as, can carry out instrumentation to its surface nature (surfaceness).
If the instrumentation target object has feature in the dichroism of its transmissivity and reflectivity, then use the light that is fit to its characteristic wavelength very effective herein.Such as, have the object of particular color in order to utilize the identifications of in FA (factory automation), using such as selection equipment, shine with laser, owing to discern with different being easy to of reflected by objects rate of other colors with specific wavelength.In addition, the most effective from the illumination light of the reflectivity green wavelength scope of substrate in the scolding tin detecting device, so can realize by the semiconductor laser that uses the green wavelength scope, in addition, according to technology of the present invention, it checks that precision can improve.
Promptly check in the operation,, can improve precision based on fiber bundle of the present invention so use because speckle is the main cause of noise at these.In addition, in viewing optical system 48, as add and the wave filter of specific wavelength can not be subjected to the influence of outside scattered beam, can further improve precision.
In addition,, be not only the reflected light of illumination light herein, also can observe the transmitted light and the fluorescence of illumination light.In this occasion, the speckle that reduces illumination light can reduce noise.
The 6th example
This example is to be applied to the example of optical instruments such as exposure device and microscope based on fiber bundle of the present invention.
Promptly as shown in figure 15, the outgoing beam that sends from fiber bundle 51 carries out Kohler illumination or critical illumination by 52 pairs of illuminated objects of convergent lens, uses object lens 54 to make the illuminated object 53 that is thrown light on be imaged as picture 55.Observe image surface herein and just become microscope.In addition, as the picture with illuminated object 53 on resist layer and film, expose (or record) be exactly exposure device.In addition, shown in arrow among the figure, object lens 54 can suitably move.
Herein, same with above-mentioned the 5th example, if illuminated object has feature in the dichroism of its transmissivity and reflectivity, then use the light that is fit to its characteristic wavelength very effective.For example, as being exposed the resist layer of material and film susceptibility height, then just very effective with this wavelength exposure to certain wavelengths.This just make can use have specific oscillation wavelength scope the very narrow laser of wavelength width, utilize in addition based on technology of the present invention to make this laser hang down the phase mummification, can remove the exposure-processed of speckle and realization contrast excellence.
Lifting an example describes.When the enterprising line item of digital sound channel of film, adopt the light of green wavelength scope very effective, as adopting, can realize this point very simply based on technology of the present invention.Also have the another one example, the waveguide path of hollow is replaced into the exposure device of Ultra-Violet Laser that optical fiber can realize using the higher hamonic wave etc. of excimer laser, solid state laser.This not only can suppress speckle, and because Illumination Distribution is also very even, so install cheap and easy and have excellent properties.
In addition, constituting microscopical occasion,, constitute beam split or fluorescent microscope so can utilize the characteristic of the reflectivity of sample or transmissivity because can realize the no speckle microscope of single wavelength.This not only can supply medical or live body usefulness, at aspects such as process inspection such as semiconductors wide application is arranged also.
In addition, not only can use the reflected light of illumination in this example, also can utilize transmitted light and fluorescence.Also can reduce the speckle of illumination light and suppress noise in this occasion.
The 7th example
Shown in this example is other measuring devices that utilize based on fiber bundle of the present invention.
As the example beyond the measuring device shown in the 6th example, the focus of gazing in recent years is the purposes of interferometer aspect such as low coherence interferometer.(illumination light a) illustrates its structure example to Figure 16.
Promptly the light beam that sends from fiber bundle 60 becomes directional light by collimation lens 61, and its corrugated is cut apart by light beam beam splitting arrangement 62.One side's light beam (transmitted light) directive with reference to mirror 63 (with the distance of light beam beam splitting arrangement be L), the detected side of the opposing party's light beam (reflected light) directive.
Herein, in the occasion of coherent length below a of the ejaculation light of multimode fiber bundle, the mirror of detected side is that the distance with the light beam beam splitting arrangement is the mirror 64b of L-a or when being the mirror 64c of L+a with the distance of light beam beam splitting arrangement, does not almost have interference fringe to produce.Relative therewith, only interference fringe (spectrum figure) generation is arranged during for L with the distance of light beam beam splitting arrangement as mirror 64a at mirror.
Herein, can be with the sample with 3D shape 66 shown in Figure 16 (B) or the 67 displacement mirror 64a of the live body sample shown in Figure 16 (C), 64b and 64c, as these reflected by objects light are observed as interference light, can be observed each sample and be cut into 3D shape under the disk state.In addition, also can be used as the length meter use by the contrast of this interference fringe being carried out instrumentation.
In addition, the design coherent lengths such as length as according to the multimode fiber bundle can also have the application of variety of applications.This also with because coherence's speckle of reducing to obtain suppresses and noise when observing and measuring significantly reduce relevant, but anticipate accuracy and performance can be improved.
More than, according to this example, can carry out easy cheap and high performance coherence's control to various laser, particularly can use the object illumination light source that the present invention is inhibited as speckle, in addition, when adopting multimode optical fiber, can make illumination intensity reach the effect of easy and low-cost saving space (promptly not being subjected to the restriction in space) uniformly simultaneously by spatial pattern stack as above-mentioned optical fiber.In addition, can constitute display device, measuring device, microscope, exposure device or the like, particularly can utilize the high semiconductor laser of light-to-current inversion efficient to constitute.In view of the above, high performance, miniaturization and cost degradation that can implement device.
According to the method that reduces coherence of light of the present invention, because from the coherent light of light emitted such as solid state laser, semiconductor laser, gas laser, pigment laser instrument incide comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, so the light beam that penetrates from above-mentioned multifiber does not have the coherence each other, thus from above-mentioned smooth emitting side fibre bundle partly penetrate be the coherence reduce be actually noncoherent light beam.This also can pass through the above-mentioned beam bundles of a part of optical routing of light beam is constituted, thereby realizes reducing the easy structure of coherence of light.
In addition, utilize the device that reduces coherence of light of the present invention to realize the method that reduces coherence of light of the present invention with good repeatability.
According to means of illumination of the present invention, because the coherent light that penetrates from light sources such as solid state laser, semiconductor laser, gas laser, pigment laser instruments incide comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually, so the light beam that penetrates from above-mentioned multifiber does not have the coherence, thus from above-mentioned smooth emitting side fibre bundle partly penetrate be the coherence reduce be actually noncoherent light beam.This also can pass through the above-mentioned beam bundles of a part of optical routing of light beam is constituted, thereby realizes reducing the easy structure of coherence of light.Also promptly because the coherence of above-mentioned coherent light reduces, so can be used as the excellent direction-sense high-intensity illumination light that has that speckle is inhibited.
In addition, lighting device of the present invention can be implemented means of illumination of the present invention with good repeatability.
According to fiber bundle of the present invention, because comprise length difference surpass above-mentioned coherent light coherent length, length mutually the optical fiber group of different multifibers at least at light emitting side set bunchy, so as just can be when reducing its coherence coherent light be transformed to by this fiber bundle and has excellent direction-sense high strength coherent light.
Claims (37)
1. a method that reduces coherence of light is characterized in that, coherent light incide comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually,
From then on the troop light emitting side fibre bundle of synthetic bundle of optical fiber partly penetrates the light that the coherence reduces.
2. the method that reduces coherence of light described in claim 1, the incoming position that it is characterized in that making above-mentioned optical fiber group are identical or much at one between each optical fiber.
3. the method that reduces coherence of light described in claim 2 is characterized in that above-mentioned optical fiber group is at light incoming position set bunchy.
4. the method that reduces coherence of light described in claim 1 is characterized in that by any of above-mentioned multifiber is carried out bending and makes the length of these optical fiber different mutually.
5. the method that reduces coherence of light described in claim 1 is characterized in that adopting multimode optical fiber as above-mentioned optical fiber.
6. the method that reduces coherence of light described in claim 1 is characterized in that above-mentioned coherent light is the laser of visible wavelength region.
7. the method that reduces coherence of light described in claim 1 is characterized in that utilizing the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser of ultraviolet range.
8. a device that reduces coherence of light is characterized in that, this device has makes coherent light optical fiber group incident thereon, that comprise the length difference multifiber mutual different above the length of the coherent length of this coherent light,
The light that the coherence reduces partly penetrates from the troop fiber bundle of light emitting side of synthetic bundle of above-mentioned optical fiber.
9. the device that reduces coherence of light described in claim 8, the incoming position that it is characterized in that making above-mentioned optical fiber group are identical or much at one between each optical fiber.
10. the device that reduces coherence of light described in claim 9 is characterized in that above-mentioned optical fiber group is at light incoming position set bunchy.
11. the device that reduces coherence of light described in claim 8 is characterized in that by to carry out the length that bending makes these optical fiber different mutually with any of above-mentioned multifiber.
12. the device that reduces coherence of light described in claim 8 is characterized in that adopting multimode optical fiber as above-mentioned optical fiber.
13. the device that reduces coherence of light described in claim 8 is characterized in that above-mentioned coherent light is the laser of visible wavelength region.
14. the device that reduces coherence of light described in claim 8 is characterized in that utilizing the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser of ultraviolet range.
15. a means of illumination is characterized in that, the coherent light that light source is penetrated incide comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually,
From then on the troop fiber bundle of light emitting side of synthetic bundle of optical fiber partly penetrates light that the coherence reduces as illumination light.
16. the means of illumination described in claim 15, the incoming position that it is characterized in that making above-mentioned optical fiber group are identical or much at one between each optical fiber.
17. the means of illumination described in claim 16 is characterized in that above-mentioned optical fiber group is at light incoming position set bunchy.
18. the means of illumination described in claim 15 is characterized in that by to carry out the length that bending makes these optical fiber different mutually with any of above-mentioned multifiber.
19. the means of illumination described in claim 15 is characterized in that adopting multimode optical fiber as above-mentioned optical fiber.
20. the means of illumination described in claim 15 is characterized in that above-mentioned coherent light is the laser of visible wavelength region.
21. the means of illumination described in claim 15 is characterized in that utilizing the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser of ultraviolet range.
22. the means of illumination described in claim 15 is characterized in that the light source of above-mentioned illumination light as display device, measuring device, microscope or exposure device.
23. a lighting device is characterized in that, this device has the Lights section that penetrates coherent light, and
Comprise length difference surpass this coherent light coherent length, the length optical fiber group of different multifibers mutually,
Partly penetrate light that the coherence reduces as illumination light from the troop fiber bundle of light emitting side of synthetic bundle of above-mentioned optical fiber.
24. the lighting device described in claim 23, the incoming position that it is characterized in that making above-mentioned optical fiber group are identical or much at one between each optical fiber.
25. the lighting device described in claim 24 is characterized in that above-mentioned optical fiber group is at light incoming position set bunchy.
26. the lighting device described in claim 23 is characterized in that by to carry out the length that bending makes these optical fiber different mutually with any of above-mentioned multifiber.
27. the lighting device described in claim 23 is characterized in that adopting multimode optical fiber as above-mentioned optical fiber.
28. the lighting device described in claim 23 is characterized in that above-mentioned coherent light is the laser of visible wavelength region.
29. the lighting device described in claim 23 is characterized in that utilizing the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser of ultraviolet range.
30. the lighting device described in claim 23 is characterized in that the light source of above-mentioned illumination light as display device, measuring device, microscope or exposure device.
31. fiber bundle, it is fiber bundle with the multifiber set bunchy of guiding coherent light, it is characterized in that, comprise length difference surpass above-mentioned coherent light coherent length, length mutually the optical fiber group of different multifibers at least at light emitting side set bunchy.
32. the fiber bundle described in claim 31, the incoming position that it is characterized in that making above-mentioned optical fiber group are identical or much at one between each optical fiber.
33. the fiber bundle described in claim 32 is characterized in that above-mentioned optical fiber group is at light incoming position set bunchy.
34. the fiber bundle described in claim 31 is characterized in that by to carry out the length that bending makes these optical fiber different mutually with any of above-mentioned multifiber.
35. the fiber bundle described in claim 31 is characterized in that adopting multimode optical fiber as above-mentioned optical fiber.
36. the fiber bundle described in claim 31 is characterized in that above-mentioned coherent light is the laser of visible wavelength region.
37. the fiber bundle described in claim 31 is characterized in that utilizing the hollow multimode optical fiber as above-mentioned optical fiber, and above-mentioned coherent light is the laser of ultraviolet range.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10025646A JPH11223795A (en) | 1998-02-06 | 1998-02-06 | Method for reducing coherence of light and device therefor, method for illumination and device therefor and bundle fiber |
| JP25646/1998 | 1998-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1256759A true CN1256759A (en) | 2000-06-14 |
Family
ID=12171604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 99800230 Pending CN1256759A (en) | 1998-02-06 | 1999-02-05 | Method and apparatus for reducing coherence of light, method and apparatus for illumination, and fiber bundle |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPH11223795A (en) |
| KR (1) | KR20010006052A (en) |
| CN (1) | CN1256759A (en) |
| WO (1) | WO1999040474A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106610529A (en) * | 2017-02-14 | 2017-05-03 | 山西大学 | Fiber type beam distributed phase retarder and speckle removing method thereof |
| CN107884950A (en) * | 2016-09-30 | 2018-04-06 | 美国科视数字系统公司 | A kind of device for reducing laser beam coherence |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4214656B2 (en) * | 2000-03-29 | 2009-01-28 | セイコーエプソン株式会社 | Projection display |
| WO2004031753A1 (en) * | 2002-09-30 | 2004-04-15 | Applied Materials Israel, Ltd. | Inspection system with oblique viewing angle |
| JP4591658B2 (en) * | 2004-03-03 | 2010-12-01 | 株式会社ニコン | Imaging device inspection illumination device, imaging device inspection device, imaging device inspection method, and imaging device manufacturing method |
| JP4260851B2 (en) | 2007-03-29 | 2009-04-30 | 三菱電機株式会社 | Illumination light source device and image display device |
| JP5081682B2 (en) * | 2008-03-26 | 2012-11-28 | 富士フイルム株式会社 | Laser light source device |
| EP2237079B1 (en) * | 2009-04-03 | 2013-05-29 | Innovavent GmbH | Device for homogenising coherent radiation |
| JP6722474B2 (en) * | 2016-03-09 | 2020-07-15 | フォトンリサーチ株式会社 | Multi-wavelength laser light source module and multi-wavelength laser light source module with multiplexer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6148805A (en) * | 1984-08-16 | 1986-03-10 | Agency Of Ind Science & Technol | X-ray waveguide method and optical fiber used for said method |
| JPH06167640A (en) * | 1991-10-03 | 1994-06-14 | Senri Oyo Keisoku Kenkyusho:Kk | Laser light illumination device |
-
1998
- 1998-02-06 JP JP10025646A patent/JPH11223795A/en active Pending
-
1999
- 1999-02-05 CN CN 99800230 patent/CN1256759A/en active Pending
- 1999-02-05 KR KR1019997009130A patent/KR20010006052A/en not_active Application Discontinuation
- 1999-02-05 WO PCT/JP1999/000515 patent/WO1999040474A1/en not_active Application Discontinuation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107884950A (en) * | 2016-09-30 | 2018-04-06 | 美国科视数字系统公司 | A kind of device for reducing laser beam coherence |
| CN107884950B (en) * | 2016-09-30 | 2021-12-21 | 美国科视数字系统公司 | Device for reducing coherence of laser beam |
| CN106610529A (en) * | 2017-02-14 | 2017-05-03 | 山西大学 | Fiber type beam distributed phase retarder and speckle removing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010006052A (en) | 2001-01-15 |
| JPH11223795A (en) | 1999-08-17 |
| WO1999040474A1 (en) | 1999-08-12 |
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