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CN1246215C - 包括检测操纵器臂的移动的移动传感器的微机电设备 - Google Patents

包括检测操纵器臂的移动的移动传感器的微机电设备 Download PDF

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CN1246215C
CN1246215C CNB008122148A CN00812214A CN1246215C CN 1246215 C CN1246215 C CN 1246215C CN B008122148 A CNB008122148 A CN B008122148A CN 00812214 A CN00812214 A CN 00812214A CN 1246215 C CN1246215 C CN 1246215C
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CN1371338A (zh
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卡·西尔弗布鲁克
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Silverbrook Research Pty Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04508—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at correcting other parameters
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    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
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    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04541—Specific driving circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04585—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04588—Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0459—Height of the driving signal being adjusted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04591—Width of the driving signal being adjusted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04596—Non-ejecting pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
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    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B41J2/125—Sensors, e.g. deflection sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393—Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14354—Sensor in each pressure chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14427—Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435—Moving nozzle made of thermal bend detached actuator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8242—Electrical

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Abstract

一个埋嵌于墨水喷嘴中的微机电设备具有一个操纵臂，当产热电流流过时，该操纵臂用于移动一个喷墨水桨叶(27)。该设备包括一个移动传感器(37、39)，该移动传感器包括一个与操纵臂集成地形成的活动触点元件(37)，一个与支撑结构集成地形成的固定触点元件(39)以及形成于该支撑结构内并且用于检测固定触点元件(39)与活动触点元件(37)之间的接触的各电路元件。该移动传感器(37、39)被提供为方便于在不同操作条件下用于测试该设备。

Description

包括检测操纵器臂的移动的移动传感器的微机电设备
技术领域
本发明涉及微机电(MEM)设备中的集成式移动传感器。本发明可应用于一种类型的喷嘴中，制造这种类型的喷嘴时将可应用于微机电系统(MEM)和金属氧化物半导体(“CMOS”)集成电路中的技术结合起来，以及今后在该应用的上下文中描述本发明。然而，应该理解，本发明能够更广泛地应用于不同类型MEM设备内的移动传感器。
共同未决的专利申请
在下面共同未决的专利申请中公开了与本发明相关的各种方法，系统与设备，这些共同未决的专利申请是本发明的申请人或者受让人与本发明申请同时递交申请的：
PCT/AU00/00518，    PCT/AU00/00519，    PCT/AU00/00520，
PCT/AU00/00521，    PCT/AU00/00522，    PCT/AU00/00523，
PCT/AU00/00524，    PCT/AU00/00525，    PCT/AU00/00526，
PCT/AU00/00527，    PCT/AU00/00528，    PCT/AU00/00529，
PCT/AU00/00530，    PCT/AU00/00531，    PCT/AU00/00532，
PCT/AU00/00533，    PCT/AU00/00534，    PCT/AU00/00535，
PCT/AU00/00536，    PCT/AU00/00537，    PCT/AU00/00538，
PCT/AU00/00539，    PCT/AU00/00540，    PCT/AU00/00541，
PCT/AU00/00542，    PCT/AU00/00543，    PCT/AU00/00544，
PCT/AU00/00545，    PCT/AU00/00547，    PCT/AU00/00546，
PCT/AU00/00554，    PCT/AU00/00556，    PCT/AU00/00557，
PCT/AU00/00558，    PCT/AU00/00559，    PCT/AU00/00560，
PCT/AU00/00561，    PCT/AU00/00562，    PCT/AU00/00563，
PCT/AU00/00564，    PCT/AU00/00565，    PCT/AU00/00566，
PCT/AU00/00567，    PCT/AU00/00568，    PCT/AU00/00569，
PCT/AU00/00570，    PCT/AU00/00571，    PCT/AU00/00572，
PCT/AU00/00573，    PCT/AU00/00574，    PCT/AU00/00575，
PCT/AU00/00576，    PCT/AU00/00577，    PCT/AU00/00578，
PCT/AU00/00579，    PCT/AU00/00581，    PCT/AU00/00580，
PCT/AU00/00582，    PCT/AU00/00587，    PCT/AU00/00588，
PCT/AU00/00589，    PCT/AU00/00583，    PCT/AU00/00593，
PCT/AU00/00590，    PCT/AU00/00591，    PCT/AU00/00592，
PCT/AU00/00584，    PCT/AU00/00585，    PCT/AU00/00586，
PCT/AU00/00594，    PCT/AU00/00595，    PCT/AU00/00596，
PCT/AU00/00597，    PCT/AU00/00598，    PCT/AU00/00516，
PCT/AU00/00517，    PCT/AU00/00511，    PCT/AU00/00501，
PCT/AU00/00502，    PCT/AU00/00503，    PCT/AU00/00504，
PCT/AU00/00505，    PCT/AU00/00506，    PCT/AU00/00507，
PCT/AU00/00508，    PCT/AU00/00509，    PCT/AU00/00510，
PCT/AU00/00512，    PCT/AU00/00513，    PCT/AU00/00514，
PCT/AU00/00515。
这些共同未决的专利申请的公开内容在这里被用作交叉参考。
背景技术
最近，由本申请人开发出了一种高速页宽喷墨式打印机。所述打印机典型地用于51200个喷墨喷嘴的级别，以便在A4大小的纸上提供以1600dpi进行印刷的相片质量的图像。为了实现所述喷嘴密度，通过结合MEMS-CMOS技术来制造所述喷嘴，并且，在所述情况下，可以参考本申请人的国际专利申请PCT/AU00/00338，其标题为“ThermalActuator”(我们的卷号是MJ08)
制造所述打印机中所产生的困难在于没有方便的方式来保证所有的喷嘴都将一致地执行，其中，所述喷嘴延伸过所述打印头，或者实际上，所述喷嘴位于给定的芯片上，并且，当从不同晶片所获得的芯片可能需要被组装到给定的打印头上时，所述问题加剧。同样地，如果从多个芯片来制造一个完整的打印头，则很难确定用于操纵个别喷嘴和用于评估给定喷嘴的持续性能所需的能量水平。
发明内容
本发明可以被广泛地定义为提供一种微机电设备，包括：
一个支撑结构，
一个操纵臂，它具有一个连至支撑结构的第一端和能够相对于支撑结构移动的第二端，该操纵臂包括由电阻材料所形成的内部臂，以及在机械上连至内部臂但却与其绝缘的外部臂，所述内部臂被连至支撑结构中的电流源，所述内部臂接收加热电流，以便实现操纵臂的移动，及一个包括于该设备内的移动传感器。
该移动传感器包括：
一个活动触点元件，与操纵臂集成地形成而邻近于操纵臂的第二端，
一个固定触点元件，与支撑结构集成地形成而其位置为当操纵臂在加热电流影响下移动预定位移时该固定触点元件能够接触活动触点元件，及
各电路元件，形成于该支撑结构内，用于检测固定触点元件与活动触点元件之间的接触。
以上定义的安排允许评估操纵臂的操作，因此能够评估整个MEM设备的操作、功能和性能。
本发明还包括一种喷嘴设备，其包括一个墨容纳腔、一个喷嘴开口、一个微机电设备、以及一个桨叶，所述桨叶被设置在所述墨容纳腔中并与所述操纵臂的所述第二端相耦合从而使所述操纵臂的运动使得所述腔中的墨滴从所述喷嘴开口喷出，其中，所述微机电设备包括：
一个支撑结构，
一个操纵臂，它具有一个连至支撑结构的第一端和能够相对于支撑结构移动的第二端，该操纵臂包括由电阻材料所形成的内部臂，以及在机械上连至内部臂但却与其绝缘的外部臂，所述内部臂被连至支撑结构中的电流源，所述内部臂接收加热电流，以便实现操纵臂的移动，及一个包括于该设备内的移动传感器。
该移动传感器包括：
一个活动触点元件，与操纵臂集成地形成而邻近于操纵臂的第二端，
一个固定触点元件，与支撑结构集成地形成而其位置为当操纵臂在加热电流影响下移动预定位移时该固定触点元件能够接触活动触点元件，及
各电路元件，形成于该支撑结构内，用于检测固定触点元件与活动触点元件之间的接触。
发明的优选特征
该MEM设备优选地具有液体喷嘴的形式，以及更优选地具有能够操作以便在操纵臂操作时喷出墨水滴的墨水喷嘴的形式。在此本发明的后一优选实施例中，操纵臂的第二端优选地连至一个集成地形成的桨叶，该桨叶用于将其中能够伸入操纵臂的腔之内的墨水喷出。
该操纵臂更优选地由两个具有类似形状的臂部分所组成，这两个臂部分以重叠形式互相连接。在本发明实施例中，第一臂部分连至一个电源并且被安排为被流过的电流加热。然而，第二臂部分用于限制作为一个整体的操纵臂的线性膨胀，因此第一臂部分的热感应伸长导致操纵臂在长度方向内弯曲。因此，随着操纵臂第一部分的加热和冷却，操纵臂有效地相对于基底而转动。
以下参照附图对墨水喷嘴的优选实施例的描述将使本发明能够被更全面地理解。
附图说明
附图中：
图1显示一个墨水喷嘴一部分的高度放大的剖面正视图，
图2显示图1中墨水喷嘴的平面图，
图3显示操纵臂和墨水喷射桨叶或者墨水喷嘴的外部部分的透视图，其中该操纵臂和桨叶独立于喷嘴其它元件而被阐述，
图4显示类似于图3的安排但相对于操纵臂内部部分的透视图，
图5显示类似于图3和4的安排但相对于包括图3和4中所示外部和内部部分的完整操纵臂的透视图，
图6显示图5的圆圈中所示移动传感器安排的详细部分，
图7显示图1中的喷嘴在充入墨水之前的剖面正视图，
图8显示当操纵臂和桨叶被操作至测试位置时，图7中喷嘴的剖面正视图，
图9显示当操作至测试位置时，墨水从喷嘴中喷出的情况，
图10显示喷嘴的阻塞情况，正常情况下当操纵臂和桨叶被操作至该位置时应该能够将墨水从喷嘴中喷出，
图11显示埋嵌于喷嘴内的电路部分的示意图，
图12显示可用于喷嘴操纵臂的正常(喷墨)操作的激励-时间图，
图13显示可用于喷嘴操纵臂的测试操作的激励-时间图，
图14显示可用于图12和13中所示激励-时间图的比较性位移-时间曲线，
图15显示可用于对喷嘴进行不同测试和标定的过程的激励-时间图，
图16显示对应于图15的激励-时间图的可用于喷嘴操纵臂的温度-时间图，及
图17显示对应于图15和16中激励/加热时间图的可用于喷嘴操纵臂的偏移-时间图。
具体实施方式
如图1和其他相关附图中大约放大3000倍的图形所表示的，单个墨水喷嘴设备1被显示为通过将MEMS和CMOS技术相结合而制造的芯片的一部分。该完整的喷嘴设备包括一个支撑结构，它具有一个硅基底20、一个金属氧化物半导体层21、一个钝化层22和一个非腐蚀介质镀层/腔形成层23。可以参照以上确认的由本发明申请人提出申请的题为“热操纵器”(我们的文卷号MJ08)的国际专利申请号PCT/AU00/00338中公开的关于喷嘴设备制造的详细内容，它对应于被通知的美国专利申请系列号。
该喷嘴设备包括一个连至一个墨水源(未示出)的墨水腔24和位于该腔上的喷嘴腔25。在腔形成层23中有一个喷嘴口26，用于允许将墨水滴喷向准备在其上喷射墨水的纸张或其他媒质(未示出)之上。一个桨叶27位于两个腔24和25之间，以及当如图1和7中所示地位于静止位置时，该桨叶27有效地划分两个腔24和25。
该桨叶27通过一个桨叶伸展件和介质镀层23的一个架桥部分30连至操纵臂28。
操纵臂28被形成(在制造设备时被淀积)为能够相对于支撑结构或基底20而通过铰链转动。也即，该操纵臂具有一个连至支撑结构的第一端和一个能够相对于支撑结构向外移动的第二端38。该操纵臂28包括外部和内部臂部分31和32。图3中所示透视图中详细地阐述与喷嘴设备其他部件脱离的外部臂部分31。图4中类似地阐述内部臂部分32。在图5的透视图以及图1、7、8、9和10中阐述完整的操纵臂28。
在形成喷嘴设备期间，使用氮化钛-铝(反应地溅射的(Ti.Al)N)淀积物制造操纵臂28的内部部分32，以及如图11中所示意地阐述的，它在电气上连至CMOS结构内的电源33上。该电气连接接至终端34和35，以及将一个激励(驱动)电压加于终端上的结果是只在操纵臂28的内部部分内流过电流。该电流流动促使操纵臂的内部部分32内的电阻加热，因而使该臂部分伸长。
操纵臂28的外部部分31通过短柱36在机械上连至内部臂部分32但却与其绝缘。在外部臂部分31内并不出现电流感应加热，因此结果是通过内部臂部分32的电压感应电流的流动促使整个操纵臂28以图8、9和10中所示方式弯曲。操纵臂28的这种弯曲等效于该臂相对于基底20的围绕铰链的转动，因此其结果是桨叶27在腔24和25内的位移。
在设备内提供的一个集成式移动传感器用于确定操纵臂28因此也是桨叶27的围绕铰链转动的程度或速率。
该移动传感器包括一个活动触点元件37，该活动触点元件与操纵臂28的内部部分32集成地形成，同时当电流流过操纵臂的内部部分时，该活动触点元件被通电。该活动触点元件37位于操纵臂的第二端38的邻近处，因此，当一个电压V施加于终端34和35上时，活动触点元件将处于大约V/2的电位。该移动传感器还包括一个固定触点元件39，它与CMOS层22集成地形成而其位置为当操纵臂28按照预定程度围绕铰链向上转动时该固定触点元件能够接触活动触点元件37。该固定触点元件电气上连至一个放大器元件40和一个微处理器配置41，这两者都显示于图11中，及它们的部件都埋嵌于该设备的CMOS层22内。
当操纵臂28因此也是桨叶27处于如图1和7中所示静止位置时，在移动和固定触点元件37和39之间并无接触。在另一极端，当操纵臂和桨叶如图8和9中所示地过度移动时，在移动和固定触点元件37和39之间产生接触。当操纵臂28和桨叶27被按照正常位移进行操作而足够将墨水喷出喷嘴时，在移动和固定触点元件之间也无接触。也即，当墨水正常地从腔25中喷出时，操纵臂28和桨叶27被移动至如图7和8中所示的两个位置之间的中间位置。该(中间)位置被显示于图10中，虽然图10显示的不是墨水从腔25中喷出时的位置而是喷嘴阻塞时所造成的位置。
图12显示可用于将操纵臂28和桨叶27自静止位置移动至低于正常墨水喷射位置的时间-激励图。图12的激励的结果是由图14中下一条曲线42所标示的桨叶位移，可以看出，位移的最大量小于由位移线43所示的最佳水平。
图13显示可用于将操纵臂28和桨叶27移动至如图8和9中所示过度移动位移的扩展时间-激励图。图13的激励的结果是由图14中上一条曲线44所标示的桨叶位移，从中可以看出，最大位移水平大于由位移线43所示的最佳水平。
图15、16和17显示当施加于操纵臂28上的激励增加时激励电压、操纵臂温度和桨叶偏移与时间的关系曲线。这些曲线与不同测试相关，这些测试是使用包括移动触点37和固定触点39在内的移动传感器配置在喷嘴设备上进行的。
可在不背离所附权利要求书的实质和范围的情况下相对于以上所述本发明优选实施例的设备作出不同变动和修改。

Claims (6)

1.一种微机电设备，包括：
一个支撑结构，
一个操纵臂，它具有一个连至支撑结构的第一端和能够相对于支撑结构移动的第二端，该操纵臂包括由电阻材料所形成的内部臂，以及在机械上连至内部臂但却与其绝缘的外部臂，所述内部臂被连至支撑结构中的电流源，所述内部臂接收加热电流，以便实现操纵臂的移动，及
一个包括于该设备内的移动传感器，该移动传感器包括：
一个活动触点元件，与操纵臂成整体地形成而邻近于操纵臂的第二端，
一个固定触点元件，与支撑结构成整体地形成而其位置为当操纵臂在加热电流影响下移动预定位移时该固定触点元件能够接触活动触点元件，及
形成于该支撑结构内的电路元件，用于检测固定触点元件与活动触点元件之间的接触。
2.如权利要求1中所要求的设备，其中操纵臂被安排为当加热电流流过操纵臂时操纵臂的第二端相对于该支撑结构向外移动，而当流过操纵臂的电流终止时操纵臂向内移动。
3.如权利要求1中所要求的设备，其中该电路元件埋嵌于支撑结构的CMOS结构内。
4.一种喷嘴设备，其包括一个墨容纳腔、一个喷嘴开口、一个如权利要求3所述的微机电设备、以及一个桨叶，所述桨叶被设置在所述墨容纳腔中并与所述操纵臂的所述第二端相耦合从而使所述操纵臂的运动使得所述腔中的墨滴从所述喷嘴开口喷出。
5.如权利要求4中所要求的设备，其中该固定触点元件的位置为当操纵臂移动一个大于为将墨水喷出腔外所需位移的距离时该固定触点元件能够接触活动触点元件。
6.如权利要求4中所要求的设备，其中该活动触点元件被形成为操纵臂内部部分的一侧的侧面突起。
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Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ130999A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
MXPA02002883A (es) * 1999-09-17 2004-09-10 Silverbrook Res Pty Ltd Metodo y sistema para la instruccion de una computadora.
US7804767B1 (en) * 1999-10-25 2010-09-28 Tellabs Operations, Inc. Protection/restoration of MPLS networks
AU2000247250B2 (en) * 2000-05-24 2004-03-25 Memjet Technology Limited Print engine/controller with color mask
EP1301346B1 (en) * 2000-06-30 2007-08-15 Silverbrook Research Pty. Limited Buckle resistant thermal bend actuators
US6669909B2 (en) * 2001-03-26 2003-12-30 Allegro Technologies Limited Liquid droplet dispensing
US6460972B1 (en) * 2001-11-06 2002-10-08 Eastman Kodak Company Thermal actuator drop-on-demand apparatus and method for high frequency
US7052117B2 (en) 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
US7419258B2 (en) * 2002-09-30 2008-09-02 Brother Kogyo Kabushiki Kaisha Electronic device having detachable controller
CN101581601B (zh) * 2003-08-20 2011-05-25 台达电子工业股份有限公司 微机械结构的检测方法、微机电组件及其微检测结构
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US20060064786A1 (en) 2004-09-17 2006-03-23 Pioneer Hi-Bred International, Inc. Isopentenyl transferase sequences and methods of use
US20060123194A1 (en) * 2004-12-02 2006-06-08 Claudio Alex Cukierkopf Variable effective depth write buffer and methods thereof
US8708441B2 (en) 2004-12-30 2014-04-29 Fujifilm Dimatix, Inc. Ink jet printing
US7403797B2 (en) * 2005-09-19 2008-07-22 Silverbrook Research Pty Ltd Obtaining a physical product via a coded surface
US7469829B2 (en) * 2005-09-19 2008-12-30 Silverbrook Research Pty Ltd Printing video information using a mobile device
US7848777B2 (en) 2005-09-19 2010-12-07 Silverbrook Research Pty Ltd Printing a puzzle using a mobile device
US7953386B2 (en) 2005-09-19 2011-05-31 Silverbrook Research Pty Ltd Bill per card print
US7738674B2 (en) * 2005-09-19 2010-06-15 Silverbrook Research Pty Ltd Retrieving location data by sensing coded data on a surface
US7920896B2 (en) * 2005-09-19 2011-04-05 Kia Silverbrook Printing an almanac using a mobile device
US7357311B2 (en) * 2005-09-19 2008-04-15 Silverbrook Research Pty Ltd Printing educational material using a mobile device
US7747280B2 (en) * 2005-09-19 2010-06-29 Silverbrook Research Pty Ltd Retrieving a product via a coded surface
US7438215B2 (en) * 2005-09-19 2008-10-21 Silverbrook Research Pty Ltd Printing location-based information using a mobile device
US7724399B2 (en) * 2005-09-19 2010-05-25 Silverbrook Research Pty Ltd Method of downloading and installing a software object
US7924450B2 (en) * 2005-09-19 2011-04-12 Silverbrook Research Pty Ltd Reprint card on a mobile device
US7738919B2 (en) * 2005-09-19 2010-06-15 Silverbrook Research Pty Ltd Link object to card
US20070064130A1 (en) * 2005-09-19 2007-03-22 Silverbrook Research Pty Ltd Link object to form field on surface
US7756526B2 (en) 2005-09-19 2010-07-13 Silverbrook Research Pty Ltd Retrieving a web page via a coded surface
US7672664B2 (en) * 2005-09-19 2010-03-02 Silverbrook Research Pty Ltd Printing a reminder list using mobile device
US7856225B2 (en) 2005-09-19 2010-12-21 Silverbrook Research Pty Ltd Retrieving a program state via a coded surface
US7855805B2 (en) 2005-09-19 2010-12-21 Silverbrook Research Pty Ltd Printing a competition entry form using a mobile device
US20070064075A1 (en) * 2005-09-19 2007-03-22 Silverbrook Research Pty Ltd Printing a membership using a mobile device
US7708203B2 (en) 2005-09-19 2010-05-04 Silverbrook Research Pty Ltd Link object to sticker
US7558597B2 (en) * 2005-09-19 2009-07-07 Silverbrook Research Pty Ltd. Retrieving a ringtone via a coded surface
US7843596B2 (en) 2005-09-19 2010-11-30 Silverbrook Research Pty Ltd Printing a ticket using a mobile device
US7558599B2 (en) * 2005-09-19 2009-07-07 Silverbrook Research Pty Ltd Printing a bill using a mobile device
US7953387B2 (en) * 2005-09-19 2011-05-31 Silverbrook Research Pty Ltd Retrieving a program via a coded surface
US7970435B2 (en) * 2005-09-19 2011-06-28 Silverbrook Research Pty Ltd Printing an advertisement using a mobile device
US7641115B2 (en) 2005-09-19 2010-01-05 Silverbrook Research Pty Ltd Type-specific sticker
US7805162B2 (en) * 2005-09-19 2010-09-28 Silverbrook Research Pty Ltd Print card with linked object
US7917171B2 (en) * 2005-09-19 2011-03-29 Silverbrook Research Pty Ltd Printing a receipt using a mobile device
US7654444B2 (en) * 2005-09-19 2010-02-02 Silverbrook Research Pty Ltd Reusable sticker
US7689249B2 (en) * 2005-09-19 2010-03-30 Silverbrook Research Pty Ltd Printing a security identification using a mobile device
US7761090B2 (en) * 2005-09-19 2010-07-20 Silverbrook Research Pty Ltd Print remotely to a mobile device
US7843595B2 (en) 2005-09-19 2010-11-30 Silverbrook Research Pty Ltd Printing a calendar using a mobile device
US7621442B2 (en) * 2005-09-19 2009-11-24 Silverbrook Research Pty Ltd Printing a subscription using a mobile device
US7992213B2 (en) * 2005-09-19 2011-08-02 Silverbrook Research Pty Ltd Gaining access via a coded surface
US7920854B2 (en) * 2005-09-19 2011-04-05 Silverbrook Research Pty Ltd Printing a map using a mobile device
US7637424B2 (en) * 2005-09-19 2009-12-29 Silverbrook Research Pty Ltd Printing audio information using a mobile device
US7380709B2 (en) * 2005-09-19 2008-06-03 Silverbrook Research Pty Ltd Printing a trading card using a mobile device
US7668540B2 (en) * 2005-09-19 2010-02-23 Silverbrook Research Pty Ltd Print on a mobile device with persistence
US7742755B2 (en) * 2005-09-19 2010-06-22 Silverbrook Research Pty Ltd Retrieving a bill via a coded surface
US7738862B2 (en) * 2005-09-19 2010-06-15 Silverbrook Research Pty Ltd Retrieve information via card on mobile device
US8072629B2 (en) * 2005-09-19 2011-12-06 Silverbrook Research Pty Ltd Print subscribed content on a mobile device
US7575172B2 (en) * 2005-09-19 2009-08-18 Silverbrook Research Pty Ltd Printing a greeting card using a mobile device
US7428986B2 (en) * 2005-09-19 2008-09-30 Silverbrook Research Pty Ltd Printing a health report using a mobile device
US7697714B2 (en) * 2005-09-19 2010-04-13 Silverbrook Research Pty Ltd Associating an object with a sticker and a surface
US7407092B2 (en) * 2005-09-19 2008-08-05 Silverbrook Research Pty Ltd Printing gaming information using a mobile device
US20070065206A1 (en) * 2005-09-19 2007-03-22 Silverbrook Research Pty Ltd Printing a coupon using a mobile device
US7880911B2 (en) * 2005-09-19 2011-02-01 Silverbrook Research Pty Ltd Printing a position using a mobile device
US7945943B2 (en) * 2005-09-19 2011-05-17 Silverbrook Research Pty Ltd Retrieving an access token via a coded surface
US20070085332A1 (en) * 2005-09-19 2007-04-19 Silverbrook Research Pty Ltd Link object to sticker and location on surface
US7506802B2 (en) * 2005-09-19 2009-03-24 Silverbrook Research Pty Ltd Method of performing an action in relation to a software object
FR2894673B1 (fr) * 2005-12-14 2014-10-31 Luc Montagnier Procede de caracterisation d'un element biochimique presentant une activite biologique,par analyses des signaux electromagnetiques de basses frequences
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
DK2089229T3 (da) * 2006-12-04 2012-12-17 Zamtec Ltd Inkjetdyseenhed med termisk bøjningsaktuator med en aktiv bærer, der definerer en væsentlig del af dysekammerets tag
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US7950622B2 (en) * 2007-07-25 2011-05-31 Honeywell International, Inc. System, apparatus and method for controlling valves
AR069392A1 (es) 2007-11-20 2010-01-20 Pioneer Hi Bred Int Genes de senalizacion de etileno en maiz y su modulacion para aumentar la tolerancia al estres en plantas
CA2743707A1 (en) 2008-12-04 2010-06-10 Pioneer Hi-Bred International, Inc. Methods and compositions for enhanced yield by targeted expression of knotted1
US8427698B2 (en) * 2009-08-19 2013-04-23 Eastman Kodak Company Enhanced imaging with adjusted image swath widths
US10445846B2 (en) 2011-04-14 2019-10-15 Elwha Llc Cost-effective resource apportionment technologies suitable for facilitating therapies
US9626650B2 (en) 2011-04-14 2017-04-18 Elwha Llc Cost-effective resource apportionment technologies suitable for facilitating therapies
US8867595B1 (en) 2012-06-25 2014-10-21 Rambus Inc. Reference voltage generation and calibration for single-ended signaling
US9341663B2 (en) * 2013-11-26 2016-05-17 Freescale Semiconductor, Inc. MEMS device positioning apparatus, test system, and test method
JP6470034B2 (ja) * 2014-12-24 2019-02-13 太陽化学株式会社 蛋白乾燥加工食品
US10179453B2 (en) * 2016-01-08 2019-01-15 Canon Kabushiki Kaisha Liquid ejection head and liquid ejection apparatus
US10955299B2 (en) * 2017-04-24 2021-03-23 Hewlett-Packard Development Company, L.P. Fluid ejection dies including strain gauge sensors
JP7439664B2 (ja) * 2020-07-08 2024-02-28 ブラザー工業株式会社 液体吐出装置、液体吐出システム、パターン記録方法及びプログラム

Family Cites Families (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US887186A (en) * 1907-10-01 1908-05-12 De Witt Bruce Cigar-holder.
DE887186C (de) 1950-03-31 1953-08-20 Saint Gobain Verfahren zum Warmbearbeiten, insbesondere zum Strangpressen oder Ziehen von Metallen
US3946398A (en) * 1970-06-29 1976-03-23 Silonics, Inc. Method and apparatus for recording with writing fluids and drop projection means therefor
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
JP2817657B2 (ja) * 1994-08-23 1998-10-30 富士ゼロックス株式会社 インク供給装置および記録装置
JPS6476662A (en) 1987-09-14 1989-03-22 Dainippon Printing Co Ltd Electron shower adjustment for ion beam correcting device
US5457368A (en) * 1993-03-09 1995-10-10 University Of Utah Research Foundation Mechanical/electrical displacement transducer
US5355712A (en) * 1991-09-13 1994-10-18 Lucas Novasensor Method and apparatus for thermally actuated self testing of silicon structures
WO2004081684A1 (ja) * 1991-11-29 2004-09-23 Ryuji Takada 圧電素子の駆動方法及び装置並びに微動機構の制御装置
JPH0691865A (ja) 1992-09-17 1994-04-05 Seikosha Co Ltd インクジェットヘッド
JP3574161B2 (ja) * 1992-11-19 2004-10-06 セイコーエプソン株式会社 カソードルミネッセンス式照明装置の駆動方法及び駆動回路
US5455608A (en) * 1993-04-30 1995-10-03 Hewlett-Packard Company Pen start up algorithm for black and color thermal ink-jet pens
US5666141A (en) * 1993-07-13 1997-09-09 Sharp Kabushiki Kaisha Ink jet head and a method of manufacturing thereof
US5456508A (en) * 1994-06-09 1995-10-10 Kozar; John J. Contact lens suction cup
CA2149933A1 (en) 1994-06-29 1995-12-30 Robert M. Boysel Micro-mechanical accelerometers with improved detection circuitry
JPH0890769A (ja) * 1994-09-27 1996-04-09 Sharp Corp ひだ付きダイアフラム型インクジェットヘッド
CH688960A5 (de) * 1994-11-24 1998-06-30 Pelikan Produktions Ag Tropfenerzeuger fuer Mikrotropfen, insbesondere fuer einen Ink-Jet-Printer.
JPH08142323A (ja) * 1994-11-24 1996-06-04 Sharp Corp インクジェットヘッドおよびその製造方法
JPH08244221A (ja) * 1995-03-15 1996-09-24 Minolta Co Ltd 電気機械変換装置及びそれを用いたインクジェット記録装置
US5619177A (en) * 1995-01-27 1997-04-08 Mjb Company Shape memory alloy microactuator having an electrostatic force and heating means
US5838351A (en) * 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
DE69739966D1 (de) * 1996-06-26 2010-09-30 Canon Kk Aufzeichnungskopf und Aufzeichnungsapparat unter Verwendung derselben
JPH1076662A (ja) 1996-07-09 1998-03-24 Canon Inc 液体吐出ヘッド並びに該液体吐出ヘッドを用いたヘッドカートリッジ及び液体吐出装置並びに該液体吐出ヘッドの検査方法
JP3706715B2 (ja) * 1996-07-09 2005-10-19 キヤノン株式会社 液体吐出ヘッド，液体吐出方法，ヘッドカートリッジ，液体吐出装置，プリントシステムならびに回復処理方法
US5812159A (en) * 1996-07-22 1998-09-22 Eastman Kodak Company Ink printing apparatus with improved heater
JPH1084221A (ja) * 1996-09-10 1998-03-31 Hitachi Chem Co Ltd 偏波共用平面アンテナ
US5971355A (en) * 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US5796152A (en) * 1997-01-24 1998-08-18 Roxburgh Ltd. Cantilevered microstructure
US5903380A (en) * 1997-05-01 1999-05-11 Rockwell International Corp. Micro-electromechanical (MEM) optical resonator and method
EP0887186B1 (en) * 1997-06-27 2001-11-07 STMicroelectronics S.r.l. Integrated inkjet print head and manufacturing process thereof
US7337532B2 (en) * 1997-07-15 2008-03-04 Silverbrook Research Pty Ltd Method of manufacturing micro-electromechanical device having motion-transmitting structure
ATE409119T1 (de) 1997-07-15 2008-10-15 Silverbrook Res Pty Ltd Düsenkammer mit Paddelschaufel und externem thermischen Betätigungselement
EP1508448B1 (en) 1997-07-15 2007-01-17 Silverbrook Research Pty. Limited Inkjet nozzle with tapered magnetic plunger
US6087638A (en) * 1997-07-15 2000-07-11 Silverbrook Research Pty Ltd Corrugated MEMS heater structure
AUPO794697A0 (en) * 1997-07-15 1997-08-07 Silverbrook Research Pty Ltd A device (MEMS10)
JP3768648B2 (ja) 1997-07-31 2006-04-19 キヤノン株式会社 液体吐出方法、液体吐出ヘッド、並びに該液体吐出ヘッドを用いたヘッドカートリッジ及び液体吐出装置
US20010019463A1 (en) * 1997-11-14 2001-09-06 Castlewood Systems, Inc. Head loading and unloading method and device
US6126140A (en) * 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
US6104334A (en) 1997-12-31 2000-08-15 Eremote, Inc. Portable internet-enabled controller and information browser for consumer devices
US6087743A (en) * 1998-09-10 2000-07-11 Wisconsin Alumni Research Foundation Position control system for use with micromechanical actuators
KR20000044155A (ko) * 1998-12-30 2000-07-15 이형도 형상 기억 합금 잉크 젯 헤드를 위한 구동 입력 신호 최적화 방법과 오버히팅 방지 장치 및 그방법
US6860107B2 (en) * 1999-02-15 2005-03-01 Silverbrook Research Pty Ltd Integrated circuit device having electrothermal actuators
US6510752B1 (en) * 1999-02-22 2003-01-28 Seagate Technology Llc Method and apparatus for testing microactuators on a suspension assembly
AUPQ130999A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V11)
US6382779B1 (en) * 1999-06-30 2002-05-07 Silverbrook Research Pty Ltd Testing a micro electro- mechanical device
US6275326B1 (en) * 1999-09-21 2001-08-14 Lucent Technologies Inc. Control arrangement for microelectromechanical devices and systems
US6474795B1 (en) * 1999-12-21 2002-11-05 Eastman Kodak Company Continuous ink jet printer with micro-valve deflection mechanism and method of controlling same
US6629448B1 (en) * 2000-02-25 2003-10-07 Seagate Technology Llc In-situ testing of a MEMS accelerometer in a disc storage system
CN100335278C (zh) * 2000-06-30 2007-09-05 西尔弗布鲁克研究有限公司 热弯作动器抗扭曲装置
US6364302B2 (en) * 2000-07-14 2002-04-02 Ultimate Standard Tooling International Llc Modular system and fixture for positioning and clamping a workpiece
US7093932B2 (en) * 2002-02-08 2006-08-22 Matsushita Electric Industrial Co., Ltd. Ink-jet recording device and control method thereof
US6890050B2 (en) * 2002-08-20 2005-05-10 Palo Alto Research Center Incorporated Method for the printing of homogeneous electronic material with a multi-ejector print head

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