CN1243268C - Optical fiber confocal scanning microscope with self-positioning - Google Patents
Optical fiber confocal scanning microscope with self-positioning Download PDFInfo
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- CN1243268C CN1243268C CNB991136330A CN99113633A CN1243268C CN 1243268 C CN1243268 C CN 1243268C CN B991136330 A CNB991136330 A CN B991136330A CN 99113633 A CN99113633 A CN 99113633A CN 1243268 C CN1243268 C CN 1243268C
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Abstract
一种有自定位的光纤共焦扫描显微镜，包括照明光束输入部分(A)，光纤扫描部分(B)，与光纤扫描部分(B)交错置放的测量定位部分(C)，探测采样部分(D)和控制数据采集处理部分(E)。其中照明光束输入部分(A)、光纤扫描部分(B)、探测采样部分(D)和控制数据采集处理部分(E)构成光纤共焦扫描显微镜，而照明光束输入部分(A)、光纤扫描部分(B)和测量定位部分(C)构成准共焦小视场显微镜。也就是说，本发明的一台显微镜具有两种显微镜的功能，既有显微扫描层析成像的功能，又有一次成像的功能，即是对测定目标进行自定位的功能。适用于纳米深度，亚微米宽度的三维结构检测。
A self-positioning fiber optic confocal scanning microscope comprises an illumination beam input part (A), an optical fiber scanning part (B), a measurement and positioning part (C) interlaced with the optical fiber scanning part (B), a detection sampling part (D) and a control data acquisition and processing part (E). The illumination beam input part (A), the optical fiber scanning part (B), the detection sampling part (D) and the control data acquisition and processing part (E) constitute a fiber optic confocal scanning microscope, while the illumination beam input part (A), the optical fiber scanning part (B) and the measurement and positioning part (C) constitute a quasi-confocal small field microscope. In other words, one microscope of the present invention has the functions of two microscopes, namely, the function of microscopic scanning tomography and the function of primary imaging, that is, the function of self-positioning the measurement target. It is suitable for three-dimensional structure detection with nanometer depth and submicron width.
Description
Technical field:
The present invention is a kind of self-align fiber-optic confocal scanning microscope that has, and is applicable to the nanometer degree of depth, and the three-dimensional structure of sub-micron width detects.
Background technology:
Occurred utilizing single-mode fiber to replace the technology of pin hole in the nineties, from then on utilized the cofocus scanning microtechnic development of optical fibre device very fast, reason has two.One is directly inputted into laser the vibration that can avoid the laser cooling system to produce in the optical fiber; It two is for simplified structure, makes the scanning confocal system compacter.But on performance, do not have big improvement.Also providing a kind of patent applicant of the present invention in 1996 is the fiber-optic confocal scanning microscope of base components by single-mode optical-fibre coupler, be published on " Chinese laser " magazine English edition: Fiber Optic (A) lConfoc (A) l Sc (A) nning Microscope Using Single mode Fiber Coupler, ChineseJourn (A) l of L (A) ser, 1996, B5 (1): 81.This instrument is structurally still all very representative on performance.Australia Victori (A) university, people such as professor Min.G write one and are entitled as the book of " Principles of ThreeDimension (A) l Microscopes ", by World Scientific Publishing Co Pte Ltd., publish in 1996 years.Comprehensively discussed the principle of confocal microscope in this book, the state of the art and developing trend are the most comprehensive up-to-date reference books.
Fiber-optic confocal scanning microscope in the above-mentioned prior art exists following problems (1) to detect the target localization problem.Because fiber scanning microscope is an imaging, through scanning sample, by the computer topology imaging.This structure self can't be to the little target localization on a large scale.The scheme that addresses this problem generally is to finish the location by means of ordinary optical microscope.So just need utilize optical fibre device to add the ordinary optical microscope realization location observation that combines.Therefore it does not break away from the pattern of simple microscope, and instrument is bulky, and resolution can not further improve.In this instrument, utilize optical fiber to replace original aperture nothing but, do not have more new meanings from one-piece construction.(2) in end of probe, utilize optical fiber as the filtering aperture, directly the light beam that fiber coupler is penetrated is imported detector, and the detection resolution of its gray scale fineness is restricted by the resolution of detector.(3) in data acquisition, directly utilize the 3-D scanning sampling, carry out the 3-D view topology, the used time of sampling is long, and the error of bringing is big.Its spatial resolution is subjected to the restriction of sampling step length.
Summary of the invention:
The objective of the invention is: the first, keep the light and handy and stable characteristics of optical fibre device, both solved self sensing range orientation problem of above-mentioned prior art mid point flying-spot microscope, and don't lose original instrument compactness, light and handy and stable advantage, reach multi-functional practical purpose.
The second, further improve the resolution of fiber-optic confocal scanning microscope, especially longitudinal frame makes this quasi-instrument can reach nanometer resolution, realizes real super-resolution.Can be at molecular biology, light storage device, and VLSI (very large scale integrated circuit) is used in detecting widely.
Microscope of the present invention, its light path as shown in Figure 1.It comprises illuminating bundle importation (A), optical fiber scanning part B, and the measurement and positioning portion C is surveyed sampling section D and control data acquisition process part E.Wherein illuminating bundle importation (A) comprises on the direction of advancing along laser instrument 1 outgoing beam as light source, is equipped with coupling object lens 2 successively, fiber coupler 4, the output terminal O of fiber coupler 4
1On the container 3 that holds index-matching fluid is arranged.Optical fiber scanning part B comprises along fiber coupler 4 output terminal O
2On the output beam working direction, be equipped with beam collimation mirror 5 successively, sampling object lens 6 and the sample 7 that places on the focal plane f; With optical fiber scanning part B staggered put the measurement and positioning portion C arranged.The measurement and positioning portion C comprises along placing on the sample adjusting bracket 17, sampling object lens 6 are arranged on the light beam working direction that the sample 7 on the out of focus face P reflects successively, beam-splitter 9 on the working direction of beam-splitter 9 folded light beams, has magnification eyepiece 10 and film viewing screen 11 successively; Surveying sampling section D comprises along fiber coupler 4 output terminal O
3On the working direction of outgoing beam, be equipped with the detector 15 of magnification eyepiece 16 and band detector power supply 14 successively; Control data acquisition process part E comprises the sample adjusting bracket 17 that is made of piezoelectric ceramics of the band piezoelectric ceramic actuator (PZT) 8 of putting sample 7, and piezoelectric ceramic actuator 8 links with computing machine 12 by the power supply 13 of band evener.Computing machine also links with the detector of surveying among the sampling section D 15 simultaneously.
The microscope of the present invention such as above-mentioned structure has two kinds of microscopical functions, first microscan tomography function; It two is Polaroid functions.Light path as shown in Figure 1.(A) part is the illuminating bundle importation.Input to the input end i of coupling object lens 2 and fiber coupler 4 successively by light beam, enter into fiber coupler 4 as laser instrument 1 outgoing of light source.Detection light that returns and parasitic light are by a wherein output terminal O of fiber coupler 4
1Penetrate, be incident upon in the container 3 that is placed with index-matching fluid.B partly is the optical fiber scanning part.By fiber coupler 4 another output terminal O
2Output beam enters beam collimation mirror 5, by sampling object lens 6 optical fiber outgoing hot spot further is focused to small light spot again and is incident upon on the sample 7 on the focal plane f, carries out the detection to sample 7 structures.D is partly for surveying sampling section.Wherein 14 is the power supply of detector, by fiber coupler 4 output terminal O
3At first 16 amplifications input to accepting on the face of detector 15 to the detection light of output again through magnification eyepiece, and detector 15 can be converted into electrical information to optical information, inputs to the computing machine 12 of E part.E partly is a control data acquisition process part.But this sample 7 is supported by piezoelectric ceramic actuator (PZT) the 8 drive sample adjusting brackets 17 of precision sweep, and by computing machine 12 gated sweep step-lengths, computing machine 12 is also being controlled the sampling of D part simultaneously, and the line data of going forward side by side is handled.Computing machine 12 is being controlled the PZT power supply 13 with evener.C partly is the measurement and positioning part.When positioning operation, the light beam of out of focus face P reflects from sample 7, enters magnification eyepiece 10 through sampling object lens 6 and beam-splitter 9, is imaged on the film viewing screen 11.C partly comprises the sampling object lens 6 of B part.At first Polaroid in order to make sample 7 be detected part, must be positioned over sample 7 on the out of focus face P that surveys light.When sample 7 places out of focus face P to go up, then a branch of diverging light turns back to sampling object lens 6 from sample 7 surfaces, utilize beam-splitter 9 after sampling object lens 6, and the light less than 10% is reflected, enter magnification eyepiece 10 and amplify, Polaroid to film viewing screen 11.Film viewing screen 11 can be the Direct observation panel, or the face of accepting of detector.Be that out of focus face P carries out Polaroid directly near the zone sample 7 focuses.This shunt light beam forms the Polaroid microscope of accurate confocal small field of view, locatees into the microscope of spot scan so that be used for.Through the location after, sample 7 shift onto the sampling object lens 6 focal plane f place, carry out confocal some imaging.By the transmitted light of the detection light that returns on 7 one of the samples, be coupled to once more in the fiber coupler 4, by the 4th end O of fiber coupler 4 through beam-splitter 9
3Output enters in the magnification eyepiece 16, is imaged on accepting on the face of detector 15.Carry out scanning imagery.
This microscope can be divided into the two large divisions by function, and wherein a part is the fiber-optic confocal scanning microscope that is made of (A), B, D and E, the accurate confocal small field of view microscope that another part is made up of (A), B and C.Light path of the present invention is compared with the light path of fiber-optic confocal scanning microscope in the prior art, light path of the present invention is under the prerequisite of the cramped construction that keeps former fiber-optic confocal scanning microscope, only utilize beam-splitter 9 beam splitting in the measurement and positioning portion C to constitute the accurate confocal microscope of new small field of view, make it have the location microscope functions.This location microscope itself also is a confocal high-resolution microscope of standard, and it has the lateral resolution of sub-micron.It and fiber-optic confocal scanning microscope combine.Fiber-optic confocal scanning microscope in the prior art utilizes spot scan imaging form, can't be Polaroid, therefore there is not the directly function of observation location of film viewing screen 11.The small field of view microscope that the present invention contains (A), B, C is Polaroid structure, can directly observe with human eye at film viewing screen 11 places, for the fiber-optic confocal scanning microscope of spot scan imaging pre-aligned.In operation, for to sample 7 imagings, must move axially some distances, promptly move on to the position of out of focus face P, leave the Fu Langhuofei diffraction zone.Otherwise observed on film viewing screen 11 is the Fu Langhuofei diffraction pattern, rather than the picture of sample surfaces.Fiber-optic confocal scanning microscope of the present invention has had the measurement and positioning portion C, just as the people who fires shells has had telescope.He can be in the broad horizon of being seen, selected target.Conversely, if there is not telescope, will be to be difficult to determine target.The present invention has increased this critical function for fiber-optic confocal scanning microscope and has not destroyed the characteristics of its advantages of compact and light structure.This will further open up it in material science, the application in the ambits such as biomedicine and even life science.
The above-mentioned laser instrument 1 as light source is a solid state laser, or gas laser, or semiconductor laser, or other coherent source.
Above-mentioned sample adjusting bracket 17 is three-dimensional adjustable shelfs.
Advantage of the present invention is:
1. owing to staggered storing of optical fiber scanning part B the measurement and positioning portion C is arranged in microscope of the present invention, this just makes a microscope of the present invention have two kinds of microscopical functions simultaneously.The advantage that had both had fiber scanning microscope has the function of accurate confocal small field of view microscope for its location again.Therefore microscope of the present invention had both had the characteristics of advantages of compact and light structure, had self-align function again, and was easy to operate, reliable and stable, and practicality is convenient to promote.
2. optical fiber scanning part B of the present invention can topological ultrahigh resolution image, and it is confocal Polaroid to utilize C partly to carry out standard again.The accurate confocal microscope of small field of view is the measurement range location of fiber-optic confocal scanning microscope on the one hand, and the microstructure that also can utilize it directly to carry out submicron order on the other hand detects.The advantage of this structure owing to these two kinds of structures that the microscope major part is common light path, so light path has strong interference immunity, is applicable to various environment as 1..2. Polaroid zone is centered around near the sensing point of fiber-optic confocal scanning microscope, and the visual field is little, accurate positioning.3. Polaroid microscope utilizes coherent light illumination, clear picture, and be convenient to location, image edge.
3. the advantage that adds magnification eyepiece 16 before detector 15 is to have increased the detectable signal fineness.If the laser that utilizes 600～800nm is for surveying light, optical fiber ejaculation hot spot only has the diameter about 5 μ m.And the resolution of The common detector 15 is equal to or greater than this magnitude.Hot spot is amplified more than 10 times be imaged on the accepting on the face of detector 15, can make the resolution of detector 15 increase by 10～20 times relatively.Increased the detection fineness.Improved the resolution of whole instrument.
Description of drawings:
Fig. 1 is the light path synoptic diagram that self-align fiber-optic confocal scanning microscope is arranged of the present invention.
Fig. 2 is embodiment 1, and utilizing microscope of the present invention is curve maps of blazed grating testing result to sample 7.
Fig. 3 is embodiment 2, and utilizing microscope of the present invention is plated film CD pre-groove testing result and prior art testing result two-dimensional curve figure relatively to sample 7.Solid line-expression utilizes the microscopical testing result of the present invention, dotted line among the figure--and-expression utilizes the testing result of the optical microscope for scanning near field of prior art.Dot-and-dash line--the result that expression utilizes the prior art atomic force microscope to detect.
Embodiment:
Embodiment 1:
Structure as shown in Figure 1, laser instrument 1 is a helium-neon laser, detector 15 is ccd detector (being spaced apart 10 μ m as nothing), the parameter of sampling object lens 6 is 40 *, N (A) is 0.65, the parameter 4 of beam collimation mirror 5 *, N (A) is 0.1, and fiber coupler 4 is the single-mode fibers that mate with helium neon laser beam.Its piezoelectric ceramic actuator 8PZT movement resolution is 5nm.Sample 7 is a blazed grating.Its groove shape and groove angle are detected.Its fineness is 1200 lines per millimeters, and its blazing angle is 22.3 degree.Utilize testing result of the present invention: its fineness is: 1200 ± 50 lines/mm have comprised the making of grating and the error that damage causes in these detection data.Its blazing angle is 22.5 ± 0.5 degree.The present invention has also detected the height of groove, and the result is 350 ± 55nm.Test result shows that this piece is the grating that is eliminated, and its surface damage is serious.The cross section of measurement result as shown in Figure 2.
Embodiment 2:
Still utilize the parameter of said structure and each optical element, sample 7 is that the CD that has plated rete detects its pre-groove.Its sample 7 is made data and is: groove width is 0.4 μ m, and separation is 1.64 ± 0.05 μ m, and the groove height is 92 ± 3nm.This testing result (solid line among Fig. 3) is better than the atomic force microscope (dot-and-dash line among Fig. 3) that utilizes prior art and the testing result of near-field scanning optical microscope (dotted line among Fig. 3).Illustrate by Fig. 3.
Claims (3)
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| Application Number | Priority Date | Filing Date | Title |
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| CNB991136330A CN1243268C (en) | 1999-04-14 | 1999-04-14 | Optical fiber confocal scanning microscope with self-positioning |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB991136330A CN1243268C (en) | 1999-04-14 | 1999-04-14 | Optical fiber confocal scanning microscope with self-positioning |
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| CN1270323A CN1270323A (en) | 2000-10-18 |
| CN1243268C true CN1243268C (en) | 2006-02-22 |
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| CN100335927C (en) * | 2005-09-15 | 2007-09-05 | 上海交通大学 | Imaging optical fiber bundle and scanning optical system coupled optical system |
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