CN1236863C - Rotary coating method and apparatus, and mask for said method and apparatus - Google Patents

Abstract

When effecting film formation on a disc body by spin coating using a radiation-hardenable liquid material, at the time of the spin coating for supplying the radiation-hardenable liquid material to the vicinity of the disc body installed on a spinner for rotating the disc body, rotating the disc body and spreading the liquid material on the disc body by a centrifugal force to thereby form coating film of the liquid material on the surface of the disc body, radiation having the action of hardening the radiation-hardenable liquid material is applied to the disc body before the rotation of the disc body is stopped during the spin coating, thereby reducing the fluidity of the liquid material applied as a coating onto the disc body.

Description

The method for curing of rotary coating method and equipment and fluent material and equipment

Technical field

The present invention relates to be used for by using rotary coating method to apply the method and apparatus of the material of radiation-hardenable to disk body.Method and apparatus of the present invention is applicable to makes kind disk body widely, comprises the CD of CD type dish, such as CD, CD-R and CD-RW, and DVD type dish, such as DVD-ROM, DVD-R, DVD-RW and DVD-RAM, and recent dish at the use blue laser of researching and developing, and magnetooptical disc, such as MO and MD.

The invention still further relates to employed mask when using rotary coating method on disk body, to realize film forming under the following situation, promptly at the CD of CD type dish, such as CD, CD-R, or CD-RW, DVD type dish is such as DVD-ROM, DVD-R, DVD-RW or DVD-RAM, and the dish (disc coping with a blue laser) that uses blue laser in the research and development recently, or magnetooptical disc, during the manufacturing such as MO or MD, and relate to rotary coating method and the equipment that uses this mask.

Background technology

Spin coated is to provide fluent material near the center of disk body, makes the disk body rotation and scatters fluent material by the centrifugal force that rotates, and form the technology of the uniform fluent material coating of thickness on the surface of disk body.Spin coated is widely used in the formation of protective layer of for example CD type dish and DVD type dish etc.

On the other hand, in recent years, get along with as the research and development of the dish of the use blue laser of information recording carrier of future generation.Traditional compact disk or DVD dish have transparent substrates such as Merlon, and the information that realized is from transparent substrate side duplicate (and record under the record type disk situation) by transparent substrate, and the dish of this use blue laser has realized that information is from the record of substrate opposition side with duplicate.Thereby, must go up the transparent photic zone that forms thickness 0.1mm (100 μ m) at recording layer (or reflecting layer).

The hyaline membrane that has proposed to paste thickness and be 0.1mm on dish is as this euphotic technology, but in some cases, can gassing enters between film and the dish or generate the trouble situation of ripple in film.And, film is cut into circle and the step of its stickup has been consumed a large amount of time and labors.So, if use this dish copy photic zone of blue laser to form by spin coated, then will be easily, but traditional spin coated there be following problem, and thereby be considered to be difficult to use the spin coated technology to be used for the euphotic formation of blu-ray disc.

In other words, during the spin coated of disk body, fluent material drips near the disk body center and dish is turned and since the centrifugal force fluent material with well-proportioned film thickness distribution to whole dish.Yet, when the rotation of dish stops and during the centrifugal force vanishing, owing to be distributed in the inhomogeneities that can occur film thickness due to the surface tension of the liquid on the dish, such as near the neighboring of disk body, making the coating protuberance.When the viscosity of the fluent material that is applied as coating is higher, this will become obvious especially.

This has caused very big problem in some cases, for example under the situation of the light-transmissive film of above-mentioned blu-ray disc, unless error is suppressed to the error (heterogeneity) of thickness in ± 3 μ m orders of magnitude with respect to 100 μ m in recording areas, otherwise the record-reproducing signals precision of dish is worsened, but because the heterogeneity due to the above-mentioned surface tension substantially exceeds this situation sometimes.

And, in above-mentioned dish, a hole (15 φ) that is formed for during being mounted on the disc driving equipment, centering, and because during injection molding for keeping the mold pressing device to have groove etc., do not form film (layer) at the core of dish substrate.Thereby when using the spin coated technology to realize film forming (applying of film) on these dishes, the mask that is used for covering substrate appends to its core, makes that dish can be not coated, perhaps realizes coating from its neighboring part rather than from above-mentioned groove.When the more uniform film of needs applies, installed the mask that is used to cover card, so that heart part can not realize coating therein.

Fig. 9 of accompanying drawing is illustrated in an example of using mask in the spin coating equipment of dish.Fig. 9 is a cutaway view, and expression is installed in dish on the circulator of spin coating equipment and mask placed on it.Circulator platform 202 is fixed to a circulator axle 200, and this axle is connected with a unshowned motor (motor) and is driven by its rotation.Pad 203 is fixed on the circulator platform 202, and coils 204 placed on it.The dish 204 by a unshowned utensil vacuum suction on pad 203.The mask 206 that is used for the core of covering disk places on the dish 204.At this moment, near the annular protrusion 205 that is located at the upper surface core of circulator platform 202 fits among the ring-shaped groove 206a of mask 206.During spin coated, make a space 212 in the core of circulator platform 202 become vacuum by a pipeline 210, thereby mask 206 is adsorbed and fix.

Under the situation of coating, the liquid coating material is supplied with near the core of mask from last.Then, turntable is turned with high speed, and supplies to the coating material on the mask, spreads to the whole surface of the part that does not have masked covering on the dish by the centrifugal force of rotation.Thereby the film of coating material (layer) forms with suitable homogeneous thickness in the above-mentioned entire portion of dish.

When above-mentioned spin coated process stopped, the vacuum suction of mask must be released, and must remove mask, but at this moment following problem is arranged.

Since mask be with the airtight conditions vacuum suction on turntable 202, in the time will taking off mask simply by making space 212 go vacuum to be difficult to remove mask.Thereby, during removing mask, must provide a normal pressure to space 212 by pipeline 210.Yet on the other hand, the liquid coating material is by spin coated paint mask 206 and coil on 204, thereby is also covered by coating material at mask 206 and the boundary member (character A indication part in by Fig. 9) that coils between 204.When being in this state, as mentioned above when space 212 provides normal pressure, air is escaped from this boundary member, thereby and the scattering of liquid coating material takes place in this section.Its possibility of result is the quality of reduction dish, and in some cases, dish may become inferior goods.

Summary of the invention

In view of above mentioned problem, the objective of the invention is to provide a kind of rotary coating method and equipment, make when disk body with fluent material, during particularly with the fluent material spin coated of radiation-hardenable, the heterogeneity of thickness can not take place.

In order to realize the above object, rotary coating method of the present invention is a kind of like this rotary coating method, comprise the fluent material that radiation-hardenable is provided near the center that is installed in the disk body on the circulator that is used to turn disk body, turn disk body and this fluent material is scattered on disk body by centrifugal force, thereby form the coated film of fluent material in disc surfaces, it is characterized in that such step, promptly before the disk body rotation stops during the spin coated, apply the radiation of effect to disk body, and reduce flowability as the fluent material on the coating paint disk body with the fluent material sclerosis that makes radiation-hardenable.

According to this method, before the disk body rotation stops during the spin coated, the flowability of fluent material on the reduction dish, even thereby after this rotation of disk body stops, can not take place because the rippling etc. of coated film due to the surface tension yet, reduce flowability to a certain degree because the coated film on the dish has been hardened to, and thereby can form uniform film.

And, in CD, DVD, blu-ray disc etc., generally be formed with the hole that centring was used when it was installed to disk drive, and also be useful on the groove that during injection molding, keeps the mold pressing device etc., thereby do not form coated film at the core that coils substrate.So, in one aspect of the invention, above-mentioned rotary coating method also comprises such step, promptly before the coating with near the part the mask parts covering disk body core, and the fluent material of radiation-hardenable is offered mask parts, make when in the step of reduction material flowability when disk body applies radiation, radiation can not be applied on the mask parts.Because radiation is not applied to mask parts, the fluent material on the mask parts is non-sclerous, thereby can finish removing of mask parts easily.

In rotary coating method of the present invention, can also use the step that reduces material flowability as temporary transient cure step, this step will harden to a certain degree as the fluent material on the coating paint disk body, and then in case carry out main cure step again after stopping the rotation of disk body and disk body being moved to place separately from circulator, and apply the radiation of effect there with the fluent material sclerosis that makes radiation-hardenable to disk body, be applied to the fluent material of disk body as coating thereby harden fully.

And spin coating equipment of the present invention is a kind of like this spin coating equipment, and it comprises:

Be used for clamping and turn the circulator mechanism of disk body;

Be used for the fluent material of radiation-hardenable is offered by near the joining center of the disk body of circulator mechanisms grip spreading device mechanism; And

Be used for applying the radiation bringing device of the radiation of effect with the fluent material sclerosis that makes radiation-hardenable to disk body by the circulator mechanisms grip;

It is characterized in that, the fluent material of radiation-hardenable by join spread device mechanism offer by the disk body center of circulator mechanisms grip near after, disk body is turned by circulator mechanism, thereby fluent material scatters on disk body, and on disk body, form the fluent material coated film, after this need not to be stopped by circulator mechanism the rotation of disk body, but keep the disk body rotation, operation radiation bringing device also reduces the flowability of fluent material on the disk body.

Near the center of disk body, do not form coated film as mentioned above in order to make, spin coating equipment of the present invention can so that aligner system parts generator, so that be provided for covering near the mask parts of the part disk body core to being clamped in disk body in the circulator mechanism, and can make such design, make to join and spread device mechanism and provide the fluent material of radiation-hardenable, and radiation is not applied to the mask parts that is installed on the disk body from the radiation bringing device to being installed in mask parts on the disk body.

And, the radiation bringing device can be used as temporary transient sclerosis radiation applying portion, be used to make the fluent material coated film of the radiation-hardenable on the disk body to harden to a certain degree, therewith dividually, can beyond circulator mechanism, further provide main sclerosis radiation applying portion, so that the fluent material coated film of radiation-hardenable on the disk body is hardened fully.

Though this fluent material is called the fluent material of radiation-hardenable, here be to be understood that, radiation-hardenable be meant widely by radiation-hardenable fluent material, its radiation comprises light (comprising visible light, ultraviolet ray and infrared ray), electromagnetic wave (various wavelength), the X-ray, electron ray, and vibration wave are such as ultrasonic wave.Certainly, fluent material sclerosis institute radiation emitted to be adapted with material.

And disk body is not limited to the CD of mini disk, such as CD, and CD-R or CD-RW, DVD type dish, such as DVD-ROM, DVD-R, DVD-RW or DVD-RAM, and the recent blu-ray disc of research and development, perhaps magneto-optic disk, such as MO or MD, but the device that generally has dish type.The present invention can be widely used in the material that applies radiation-hardenable by spin coated to disk body.

The present invention provides a kind of like this method for curing and equipment that is used for the material of radiation-hardenable on the other hand at it, when the material to the radiation-hardenable that is applied to dish by spin coated applies radiation, this method and apparatus will make whole applied amounts every bit homogenising on dish.

This method is that the fluent material to the radiation-hardenable of paint disk body applies radiation, thereby make the method for fluent material sclerosis, and be method for curing more specifically with following feature, promptly when being turned, disk body makes its rectilinear motion, and make its irradiated site, thereby make the fluent material sclerosis on the disk body by the radiation source of emitted radiation.

And, this equipment is the hardening equipment that is used to make the fluent material sclerosis of the radiation-hardenable on the paint disk body, be characterised in that, a radiation applying unit, be used for to the predetermined radiation that the district applies the effect with the fluent material sclerosis that makes radiation-hardenable that applies, and a disk body travel mechanism, be used for when disk body rotates simultaneously that straight line moves disk body, and make the apply district of disk body by the radiation applying unit.

In said method and equipment, apply the district while disk body is rotated by radiation, thereby radiation can be applied to whole disk body equably.

And in this equipment, disk body travel mechanism can be by a ball-screw, the nut that can move along the linear axis of ball-screw, and one is used for the rotatable shaft that clamping is installed in the dish on the nut, and a motor that turns main shaft constitutes.

The present invention also provides and has used above-mentioned rotary coating method, spin coating equipment, the disk body that method for curing and hardening equipment are made.

And then, the invention provides and can address the above problem, and don't can cause the spin coating equipment of liquid coating material boundary member scattering between mask and dish during removing mask, and the mask that is used for this spin coating equipment.

Equipment of the present invention is the equipment that is used to realize spin coated, and wherein fluent material is provided near the disk body center, and after this disk body is turned and fluent material is scattered by centrifugal force, thereby forms the coated film of fluent material on disk body, and this equipment comprises:

Be used for clamping and turn the circulator mechanism of disk body;

Be used to cover disk body so that can not form the mask of coated film near some zones the disk body center, this mask has a through hole to pass; And

One is used for mask being provided and providing and remove mechanism from the mask that disk body removes mask to disk body;

Wherein circulator mechanism has a mechanism that is used for the vacuum suction mask, and under disk body and mask are installed in state in the circulator mechanism, and the through hole of space by mask of absorption mask that is used for the mechanism of vacuum suction mask is communicated with outside atmosphere.

In spin coating equipment of the present invention, the through hole of adsorption space by mask that is used for the mechanism of vacuum suction mask in circulator mechanism is communicated with outside atmosphere, if thereby stop adsorption space being vacuumized, then adsorption space will become in the scheduled time after this and the atmosphere equipressure.Perhaps after stopping adsorption space being vacuumized,, can make adsorption space and atmosphere equipressure by applying malleation a little while.Even when applying a little while malleation, because adsorption space is communicated with the hole of outside atmosphere by mask, circulation of air is crossed this orifice flow and is gone out, thereby the fluent material in the boundary member scattering can not take place between mask and the dish.If as mentioned above, make adsorption space and atmosphere equipressure, then mask can be easy to remove from circulator (from dish).

In one embodiment of the invention, in above-mentioned spin coating equipment, mask constitutes has a disc portion that is used to cover disk body, a cylindrical part that is used to clamp from the upwardly extending mask of core of disc portion, and this via design is to extend by disc portion and cylindrical part.

Mask of the present invention is a kind of like this mask, it is used in the equipment with fluent material spin coated disk body, disk body is installed in and is used for turning in the circulator mechanism of disk body, and this mask is used to cover disk body, feasible coating is not taking place on some zones near the disk body center, it is characterized in that, this mask together uses with the circulator mechanism that the mechanism that is used for the vacuum suction mask is housed, and this mask is formed with a through hole, be used under disk body and mask are installed in state in the circulator mechanism, the adsorption space of the mechanism of absorption mask being communicated with outside atmosphere.

This mask constitutes has a disc portion that is used to cover disk body, and a mask clamp cylinders shape part, and it extends upward from the core of disc portion, and this through hole can form like this, and it is extended by disc portion and cylindrical part.

And a spin coating equipment according to a further aspect of the invention comprises:

Be used for clamping and turn the circulator mechanism of disk body;

Mask provides and removes mechanism, and being used for provides the mask that is used for covering disk body to the disk body that is installed in the circulator mechanism, makes that near some zone the disk body core can not apply, and is used for removing mask from disk body; And

Be used for providing the joining of fluent material that is applied as coating to spread device to disk body;

And it is characterized in that, join and spread device and mask and provide and remove mechanism and combine, and provide and remove mechanism with mask and together enter precalculated position in the circulator mechanism and recall from this position.

In this spin coating equipment, join and spread device and mask and provide and remove mechanism and combine, thereby needn't be provided in addition moving and join the driving mechanism that spreads device, so can simplified apparatus.And then, can make and join the installing space that spreads device and diminish, thereby in equipment, can provide remaining space.

In a kind of form of this spin coating equipment, mask provides and remove mechanism can be designed to have the mask transfer arm, the mask clamping device that is used for the clamping mask is housed on it and joins and spread device, and driving mechanism, the mask transfer arm that is used to move around makes mask clamping device and joining spread device and can enter circulator mechanism and recall from it.This driving mechanism preferably includes a ball-screw.

It is a kind of by the disk body that uses above-mentioned rotary coating method and spin coating equipment to apply that the present invention also provides.

Description of drawings

Fig. 1 is a plane, and expression is as the general structure of the spin coating equipment of one embodiment of the invention.

Fig. 2 is the side view of a broken section, and the circulator major part partly of the spin coating equipment of dish and mask is equipped with in expression.

Fig. 3 is a side view, and expression has a distal portions of joining the mask transfer arm that spreads device, and this is joined and spreads device and be positioned on the circulator part of spin coating equipment.

Fig. 4 is a side view, and expression is by spreading device joining of spin coating equipment to the state of resin of coiling (mask) but providing UV to harden.

Fig. 5 A is a side view, the formation of the temporary transient sclerosis UV radiant section of expression spin coating equipment, and the expression housing is in the state of its raised position.

Fig. 5 B is a side view, the formation of the temporary transient sclerosis UV radiant section of expression spin coating equipment, and the expression housing is in the state that it dips.

Fig. 6 is a side view, the main UV sclerosis part main part of expression spin coating equipment.

Fig. 7 represents the structure of the main UV sclerosis essential part partly of spin coating equipment, and its side view from become 90 other directions of spending to see for Fig. 6.

Fig. 8 is the cutaway view as one embodiment of the invention mask.

Fig. 9 represents to use in spin coating equipment for a dish example of mask, and is to place the dish on the circulator and the cutaway view of mask.

The specific embodiment

The preferred embodiments of the present invention are described below with reference to accompanying drawings.

Fig. 1 is a plane that is used for the spin coating equipment of CD as one embodiment of the invention.This spin coating equipment is to be applicable to the euphotic equipment that forms as the blu-ray disc of dish of future generation.

Be specifically designed to the blu-ray disc of duplicating, be by being that 120mm and thickness are to form aluminium mirror coating on the polycarbonate substrate of 1.1mm to make at diameter, and be formed with information pits by spray method, and with light (UV as the material of radiation-hardenable, i.e. ultraviolet ray) its surface of hardening resin spin coated, thereby the photic zone of formation thickness 100 μ.The equipment of present embodiment is the equipment that is used to realize this euphotic spin coated.

Spin coating equipment 1 is equipped with the lower part: loading-unloading part 10 is used for providing from the outside dish to be applied, and the dish that has stood coating process is extracted the outside from this equipment; A cleaner part 20, remove such as any exotics such as dusts on the surface that the dish that provides from loading-unloading part 10 is provided; Transfer handle portion 30, be used for realization dish being synchronized with the movement among the equipment each several part; Circulator part 40 is used to turn dish to realize the spin coated of resin bed; Mask provides and removes part 50, is used to provide and remove mask, is used to cover the core that is placed on the dish on the circulator at this mask during the spin coated; Cleaning part 60 in edge is used to remove during applying from any too much resin material of the peripheral edge overflow of dish; Temporary transient sclerosis UV radiant section 70 is used for temporarily being hardened in the surface that is applied in the resin bed of the dish on the circulator during the coating; Main sclerosis UV radiant section 80, the resin bed on the paint dish that is used for mainly hardening; Thickness is checked part 90, is used to check the thickness of the resin bed that forms on dish; And part discharge unit 110 inferior, be used to discharge resin bed and form bum any dish.

Below the details of each part mentioned above operation will be described by the order of handling process.

The loader part 11 of loading-unloading part 10 has needle-like clamper 111, is used for keeping waiting a plurality of dishes of accepting to apply with its stacked state.Dish is kept by the pin 111a of the needle-like clamper 111 that inserts its centre bore.Remain between the adjacent dish of needle-like clamper 111 and be inserted with pad, so that adjacent dish is spaced apart from each other.The lifter 112 that is used to that Pan Dui is risen and descends is contained under the dish of accumulation.Level is regulated by this lifter 112 and is realized, makes the uppermost dish of Pan Dui can occupy predetermined supply level position.

The loading-unloading part also is equipped with supplies with handle 13.This supply handle 13 has three uniformly-spaced arms of (promptly approximately with 120 degree at interval) radial stretching, extension.Use vacuum suction etc. to be used to adsorb and the dish mechanism for picking of release dish is contained in the downside of the far-end of each arm.Supply handle 13 is designed to can be around the axle 13d motion of himself under the predetermined control of the control section (not shown) of a device.Uppermost dish is picked up by an arm 13a who supplies with handle 13 in the needle-like clamper 111 of loader 11, and is transplanted on supply and off-position 22A on the cleaner rotating disk 22 partly.At this moment, a treated dish can be transplanted on the needle-like clamper 115 of emptier part from the position 22A on the rotating disk 22 by another arm 13b.Also have, another arm 13c is used for the needle-like clamper 115 to the emptier part, transfers the pad between the adjacent dish that is inserted on the needle-like clamper 111 that is deposited in the loader part.

The details of operation of above-mentioned supply handle has explanation in applicant's Japanese patent application book No.11-289267.

The dish that is transplanted on the rotating disk 22 of cleaner part 20 enters cleaner 24, the dextrorotation by rotating disk simultaneously then be placed on the rotating disk.Cleaner 24 is equipped with air blast and is used for advertising the air of cleaning to the surface of dish, and vacuum suction apparatus is housed, and is used to aspirate the particle of dust of being advertised by the air of air blast and so on.Can make a kind of preferred design, the rotating speed of feasible control rotating disk, rotating speed can be lower when being moved in cleaner 24 thereby coil, and the cleaning that has time enough to coil.Can also make a kind of design,, the time point that dish entered cleaner 24 that is rotated in of rotating disk 22 once be stopped, and dish be rested in the cleaner 24 reach preset time, after this recover rotation so that further prolong cleaning time.

Though in the present embodiment, for the abundant cleaning that realizes coiling, the rotating disk 22 that is used for the transmission dish is controlled on speed with changing, thereby the prolongation dish rests on the time in the cleaner 24, if do not need, rotating disk can be designed as with constant speed and is turned.

When dish by cleaner 24 and when arriving delivery location 22B on the rotating disk 22 (promptly to supplying with and the position of off-position 22A Rotate 180 degree), then make to coil to be shifted into rotor-position by the handover handle 31 of transferring handle portion 30.

Transfer on handle 31 structures and be similar to above-mentioned supply handle 13, but different with the supply handle 13 with three arms be, moving handle 31 has four the arm 31a, 31b, 31c and the 31d that stretch with (promptly with 90 degree at interval) radiation uniformly-spaced.Be used to adsorb and the dish mechanism for picking of release dish is contained in the downside of the far-end of each arm by vacuum suction etc.Transferring handle 31 is designed to can move around its (not shown) under the control of equipment control section.

Transfer handle 31 by four arm 31a-31d once the realization dish among each position of equipment, move.The spare space of STA representation moving handle 31 shown in Figure 1.Make from this position and to transfer handle 45 degree that turn clockwise, arm 31a, 31b, 31c and 31d enter and pick up the dish that is positioned at cleaner part, circulator part, main sclerosis UV radiant section and thickness inspection part respectively.In these positions, each arm picks up dish by vacuum suction.After this, handover handle 31 inhours are revolved and are turn 90 degrees.Thereby, be positioned at the dish of cleaner part, the dish that is positioned at the circulator part, the dish that is positioned at the dish of main sclerosis UV radiant section and is positioned at thickness inspection part and once be moved to circulator part, main sclerosis UV radiant section, thickness inspection part and cleaner part respectively, and in each position, arm discharges each dish.Like this, move when sending handle 31 to realize among each position, coiling by moving.

The dish that is transplanted on circulator part 40 from cleaner part 20 is subjected to spin coated there.As is generally known, not only in blu-ray disc, and generally in CD, be formed with the hole (15 φ) of the usefulness that is used for during dish is installed to disc driving equipment, centering at the center of dish, and also be useful on groove that during injection molding, is used for the clamp mode depressor etc., thereby, do not form coated film (layer) at the core of dish substrate, and be former state at its this part maintenance substrate.So, under situation, the center mask as the mask parts of the center of covering disk to be installed also, to prevent forming the light-transmissive resin film in this zone by spin coated of the present invention.

Fig. 2 is the side view of part for analysing and observe, and the major part of expression circulator part 40 is together with dish mounted thereto and mask.Referring to Fig. 2, the circulator 41 and the dish 100 that places on the circulator 41 of circulator part 40 are shown, and also have mask placed on it 56.More specifically, circulator has a circulator axle 151 that is connected on the unshowned rotatable drive source (motor), and can rotate around vertical axis at a high speed, and circulator platform 152 parts fixed thereon.The top of circulator platform 152 is made for and coils 100 the essentially identical dish type of diameter.

The cutaway view of mask in Fig. 8 that is used for present embodiment illustrates.Mask 56 has the lower wall part 56c that is used for the covering disk core, and the last column part 56b that stretches upwards from the center of lower wall part 56c.Ring-shaped groove 56a forms in the bottom side of lower wall part 56c.Through hole 56d forms by last column part 56b and lower wall part 56c.

Upper surface core at circulator platform 152 is provided with annular protrusion 152a.The outside dimension of annular protrusion 152a makes its internal diameter with the centre bore of dish suitable, and the dish 100 that is installed on the circulator is located and centering by this annular protrusion 152a.And this annular protrusion 152a fits into the ring-shaped groove 56a that forms in mask 56 downsides and makes mask alignment.At the upper surface and the outside that abuts against annular protrusion 152a of circulator platform, an annular gasket 153 is fixed on circulator platform 152 and is fixed on the circulator axle 151.When dish 100 will be installed on the circulator platform 152 time, dish 100 is by pad 153 circumferential portion upper support within it.That is, the major part of dish 100 and circulator platform 152 is spaced apart from each other with gap S by pad.

Be positioned at dish 100 on the circulator platform and mask 56 by being installed in vacuum suction mechanism absorption on the circulator platform and fixing.The absorption of the absorption of dish 100 and mask 56 is separated from each other and carries out on the circulator platform.In other words, two absorption pipelines that separate are housed in circulator, make it possible to control independently of one another each absorption.The details of the mechanism of suction tray and mask will be after a while with reference to Fig. 2 explanation.Two discrete pipelines, promptly dish absorption vacuum line 160 and mask absorption vacuum line 165 are contained in the circulator axle 151.

With the at first absorption of explanation dish.Dish absorption vacuum line 160 is communicated with an annular space 162 by first boring 161 that forms in circulator axle 151.Annular space 162 is annular spaces around the circulator axle, and it is limited to three parts, i.e. circulator platform 152, circulator axle 151 and be attached between the enclose components 158 of circulator platform lower part.Annular space 162 is by upwards entering second boring 163 that the circulator platform forms from annular space 162, be communicated with the 3rd boring 164 of passing pad 153 that top at circulator platform 152 forms.By above-mentioned pipeline, dish adsorbs vacuum line 160 and is communicated with the 3rd boring that forms in pad 153, by 160 vacuum pumpings of dish absorption vacuum line, coils 100 and can be attracted on the pad 153.Though two borings only are shown among Fig. 2, i.e. in fact second boring the 163 and the 3rd boring 164 be provided with boring in 90 degree four positions at interval.Yet the number of absorption port is not limited thereto, but can suitably increase or reduce, as long as can realize effectively absorption.

The absorption of mask will be described now.The 4th boring 166 that mask absorption vacuum line 165 passes through laterally to form in circulator axle 151 is communicated with the upright opening 167a in the bolt 167.Bolt 167 is used for circulator platform 152 is fastened to circulator axle 151.Upright opening 167a is to bolt top opening in the bolt 167, thereby the space 168 of mask absorption vacuum line 165 below abutting against mask is communicated with.So if adsorption space 168 pressure that mask absorption vacuum line 165 by vacuum pumping, then abuts against below the mask reduce, and mask can be adsorbed.

Like this, can be by the vacuum line 160 and 165 separately absorption of control panel and the absorption of mask respectively independently of one another.

Dish 100 on circulator is supplied with and is removed from it mask 56 and supplies with and remove part 50 realizations by mask.Mask is supplied with and is removed part 50 and comprises the dish type mask holder 55 that can rotate around its center, be positioned on the mask holder (in the embodiment in figure 1 with a plurality of masks 56 of two circle distribution, 24 masks are shown altogether), have the mask transfer arm 51 of the mask chuck that is used to clamp mask, be used for ball-screw (screw rod) 52 that between mask holder 55 and circulator 40, moves back and forth mask transfer arm 51 etc.Be used for supplying with joining of coating material (being used to form the photohardenable resin of light-transmissive film) and spread the device integral installation at the mask transfer arm to dish.

Fig. 3 illustrates the formation of the distal portions of the mask transfer arm 51 that is positioned on the circulator 40.The distal portions of mask transfer arm 51 is equipped with the chuck 154 that is used for clamping at mask column part 56b mask 56, and is used for joining of light-hardening resin spreading device 156 to the dish supply.Owing to join and spread device 156 and together be installed on the mask transfer arm, join and spread device and advance on the dish simultaneously with the operation of supplying with mask to dish by chuck 154 with chuck 154.Thereby, needn't install in addition to be used to move forward and backward and join the drive source that spreads device.Chuck 154 spreads device 156 by a unshowned cylinder driving with joining, and can move in the direction of perpendicular as a unit, thereby their are near the dish 100 on the circulator platform.

Chuck 154 has and can be driven and two jaws of switching by cylinder, and can be last column part 56b clamping/release between jaw of mask 56.

Here, the explanation mask is supplied with and is removed the operation of part.At first, the last column part 56b of mask 56 is clamped and picks up from mask holder 55 by the chuck 154 of the distal portions of mask transfer arm 51.By the combination of mask transfer arm along the rotation of the linear movement of ball-screw 52 and mask holder, chuck 154 can pick up any mask 56 on mask holder 55.After mask was picked, ball-screw 52 was driven and makes the mask transfer arm move to circulator part 40, and was brought to position with the centrally aligned of circulator platform by the center of the mask of chuck 154 clampings.Then, chuck 154 and join and spread device 156 and be lowered as a unit, and mask 56 is placed on the dish 100, and chuck 154 is released.

After mask 56 has placed on the dish 100, make vacuum from 165 effects of mask absorption vacuum line, thus the absorption mask.At this moment, mask adsorption space 168 (Fig. 2) is communicated with atmosphere outside the equipment, and the through hole 56d by mask 56 is to atmosphere opening in other words.Yet as long as mask absorption vacuum line 165 is evacuated, it is low pressure that space 168 is just keeping than atmospheric pressure, and thereby mask be attracted on the dish.

Under this state, the light-hardening resin that is in its liquid phase is by offering the mask that is installed on the dish joining the nozzle 157 that spreads device 156 far-ends (top).Fig. 4 illustrates the d/d situation of light-hardening resin.Behind the light-hardening resin that scheduled volume is provided, have the distal portions of joining the mask transfer arm 51 that spreads device 156 and chuck 154 and rise, and ball-screw 52 is driven, thereby recall mask transfer arm 51 from circulator 40.

After mask transfer arm 51 is recalled (or before maybe when recalling), circulator platform 152 is by with high-speed driving, thereby be rotated coat operations, in other words, the light-hardening resin that offers core is distributed to the entire upper surface of dish basically equably by the centrifugal force of rotation.

Process preset time after the rotation resin coating by the circulator platform begins, and when on dish, forming the resin bed of homogeneous film thickness basically, then implement edge cleaning that any resin that overflows to the neighboring part of dish is peeled off by the edge cleaner 61 of edge cleaning part 60.Edge cleaner 61 can be attached to the outer round surface that shake approaching dish of the blade 65 of edge cleaner 61 1 ends by the edge cleaner, and peel off any light-hardening resin that overflows from the cylindrical of dish around axle 63 horizontal plane motions at equipment.

After this plate edge cleaning, implement the temporary transient sclerosis of light-hardening resin by temporary transient sclerosis UV radiant section.When rotation stopped, the resin molding by spin coated evenly forms on the surface of dish because the surface tension of liquid resin has lost the uniformity of its thickness, and the heterogeneity of ripply neighboring part particularly occurred.And the viscosity of resin is high more, and then the heterogeneity of thickness becomes big more.Among the present invention,, need not after spin coated, to make the rotation of circulator to stop, but apply UV light by temporary transient sclerosis UV radiant section in order to prevent this point, thus the temporary transient sclerosis of realization resin bed.

Details referring now to Fig. 5 A and the temporary transient sclerosis of 5B explanation UV radiant section 70.Fig. 5 A and 5B are the side views of UV radiant section that temporarily hardens, and state that the irradiation head housing that will illustrate after a while raise and the state that has reduced are shown respectively.Temporary transient sclerosis UV radiant section comprises main part 71, irradiation head part 72, and be used for being connected barrel portion 73 to what main part 71 and irradiation head part 72 linked together.Ultrahigh pressure mercury lamp (not shown) as the UV light source is installed in the main part.The ultrahigh pressure mercury lamp emission comprises ultraviolet ray (UV) but the light of the resin that the UV that can harden of district's wavelength hardens.Optically focused and projection optics system (not shown) also are housed in main part 71, and make UV light optically focused, and it is throwed towards connecting barrel portion 73 as the UV light beam from ultrahigh pressure mercury lamp.Connecting barrel portion 73 is cylinder parts of a hollow, and the UV light beam is by connecting barrel portion and entering irradiation head part 72.

Irradiation head part 72 comprises the reflecting part 171 that wherein has reflecting plate 171a, makes from incident UV light beam turning 90 degree of connection barrel portion and with its downward reflection.Reflecting part 171 is covered by square housing 172.Housing 172 is fixed on can be on the slide block 75 that moves both vertically on the track 74, and can be along with slide block 75 motions, and this track is fixed on the main part 71.Slide block 75 is driven by a cylinder and moves both vertically.Directly the vibration absorber 177 and 178 of positioning sliding block 75 is installed in the top and bottom of slide block 75 range of movement respectively.

During dribbling being gone into and takes circulator part 40 out of, during the dish in being installed in the circulator part 100 is supplied with and is removed mask, and spreading device 156 during mask provides light-hardening resin by joining, housing 172 is in the withdrawn position of its range of movement upper end, be the position (state shown in Fig. 5 A) of its rising, thereby can not hinder these operations.When having only the light-hardening resin layer that applies by spin coated on to the dish 100 that is installed in circulator part 40 to implement temporary transient sclerosis, this housing just moves to the position (state shown in Fig. 5 B) of its decline.The timing of implementing temporary transient sclerosis is the spin coated of having implemented liquid light-hardening resin as above-mentioned, and carried out immediately after having cleared up by edge cleaner enforcement edge.

Cylindrical cylindrical housing 173 and cylindrical interior dome cover 174 are installed in the lower part of housing 172 concentrically with respect to one another.The design of being done makes that when housing 172 descended, the center of the center of interior dome cover 174 and the dish 100 on the circulator platform aligned each other.When housing 172 applies the temporary transient sclerosis UV light time at its down position and to dish, the UV light beam of the reflection downwards of the reflecting plate 171a by irradiation head is by the annular space between cylindrical housing 173 and the interior dome cover, and downwards as the irradiates light appearance that annular irradiated region is arranged.The external diameter of this annular irradiated region is designed to overlap with the external diameter of dish basically, and its internal diameter is designed to overlap with the external diameter of mask basically.Like this, the irradiated region of UV light beam basically with the outer side superimposed of whole dish.

Use above-mentioned structure, the UV light of the UV radiant section that temporarily hardens irradiation can not be applied to the mask that is positioned on the dish.During spin coated, liquid light-hardening resin drips on the mask, thereby when UV light was applied to mask, the resin in the boundary member was hardened on the mask and between mask and the dish, thereby makes the removal of mask become difficult.Form such design in order to prevent this point, make UV light not be applied to the mask part.It is not determinate providing the technology of annular irradiated region by above-mentioned cylindrical housing and interior dome cover, can adopt by some method to be used to prevent that UV light is applied to other measure of mask yet.

UV by this temporary transient UV radiant section applies, be to be used to prevent to be coated in light-hardening resin layer on the dish because of its surface tension membrane thickness unevenness that becomes, thereby it can semi-harden simply resin bed and the flowability that reduces material to such degree, make inhomogeneities because of the thickness due to the surface tension can not take place.Exposure intensity and irradiation time will be decided according to resin kind and thickness as the coating on the paint dish for this purpose.

After temporary transient sclerosis UV has applied, the stop the rotation rotation of device.Then, the vacuum suction of mask 56 is released.Mask 56 of the present invention has a through hole 56d, if thereby stop mask absorption vacuum line 165 is vacuumized certain hour, the adsorption space 168 that abuts against under the mask becomes and the atmospheric pressure equipressure, and thereby can remove mask 56 and need not to apply normal pressure.In addition, can form such design, promptly after stopping mask absorption vacuum line 165 vacuumized, apply malleation in short-term by vacuum line 165.In this case, because mask 56 is formed with through hole 56d, even when malleation is applied to adsorption space 168, through hole 56d outflow is crossed in circulation of air, thereby can not cause at mask and (loosing) cloth problem of spattering of the fluent material in the border between coiling.

After the absorption of mask was released, mask 56 picked up and is transplanted on mask holder 55 by mask transfer arm 51 from coiling 100.And then the vacuum suction of the dish 100 on circulator 152 is released, and dish picks up by the arm 31b that transfers handle portion 30, and is shifted into the position 80A of main sclerosis UV radiant section 80.

Main sclerosis UV radiant section 80 has a UV applying unit 81 to be used to apply UV light, and dish travel mechanism 85 is used for linear displacement disc 100 and makes disc spins simultaneously.The UV applying unit has a UV lamp 82, and this is the device that is used for applying UV light downwards.Fig. 6 is a side view, the general picture of the main sclerosis of expression UV radiant section.

Fig. 7 represents the major part of the dish travel mechanism 85 of main sclerosis UV radiant section 80, and is that it is from differing the being seen side view of 90 degree directions with Fig. 6.Formation hereinafter with reference to Fig. 6 and the main sclerosis of 7 explanations UV radiant section.The dish mobile unit comprises that one is used for the main axle unit 182 of clamping disk and the servo motor driven ball-screw unit 180 that is used for linear mobile main axle unit.From Fig. 7 as seen, the housing 186 of main axle unit 182 is fixed on the drive nut of ball-screw unit 180 to be placed on its middle plate 187.The main shaft 183 that is supported rotationally by a unshowned bearing is installed in the housing 186.Main shaft 183 is connected to a servo motor 184 by connector (shaft coupling) 185, and is driven by servo motor 184 rotations.The top of main shaft 183 is used to the centre bore of dish 100 of packing into, and the mechanism that is used for vaccum-suction attachement pad 100 also is housed.

Use said mechanism, be installed in dish 100 on the main shaft 183 of main sclerosis UV radiant section 80 when turning, can move by the ball-screw unit is linear by servo motor 184.

Lead under the situation of sclerosis at the light-hardening resin layer that is coated on the dish, main sclerosis UV radiant section control panel 100 makes it by the irradiated region that UV applies the unit, makes disc spins simultaneously.Turned at the light period disk, even thereby the light skewness that applies of UV applying unit, also can be homogenized by the light quantity that is applied that each part of dish receives.

By the ball-screw unit the linearly moving control of dish is determined suitably that according to various conditions this comprises the necessary UV application time of hardening of resin.For example, dish can be with the irradiated region back and forth movement of constant speed in the UV applying unit, or can once stop at irradiated region, maybe can underspeed so that prolong the UV irradiation time.

The dish 100 that is subjected to main cure process returns the dish transmitting place 80A of main sclerosis UV radiant section 80, and is sent to next treatment step.Can also form such design, make and finish after the main cure process, dish 100 is shifted into the position 80B (Fig. 1) of main sclerosis UV radiant section, and dish is shifted into the equipment that separates that is used to implement to apply firmly treatment step (further applying step as the overcoat of coating to transparent resin layer) therefrom.

The dish 100 that turns back to position 80A after finishing main cure process is transplanted on thickness by the arm 31C that transfers handle portion 30 and checks part 90.The thickness inspection is the thickness of the light-transmissive resin layer of measurement dish partly, so that whether the thickness of the light-transmissive resin layer that applies on the inspection dish is in preset range.By transferring the arm 31C of handle portion, dish 100 is placed on the translational table 91 at thickness inspection 90A place, position partly.Translational table 91 is moved by this unit 93 along single shaft ball-screw unit 93, and moves to as below the laser displacement gauge 95 of film thickness measurement device tight.Translational table 91 has the function that turns dish placed on it, and rotation and its linear movement of dish are combined by ball-screw unit 93, thereby changes the measurement point of laser displacement gauge, and dish is implemented film thickness measuring at a plurality of measurement points.In a typical example, realize on the circumference 8 measurement for seven radiation positions.Thereby measurement point is a 8 * 7=56 point.

When the dish of film thickness measuring is on being in translational table, turn back to position 90A once more, and in this position, it is sent to cleaner part 20 by the arm 31d that transfers handle portion 30.Yet, if as the result that the thickness of checking part 90 at thickness is checked, find that coating not finish with suitable thickness, then checking that from thickness part 90 is to partly handover process of cleaner, discharge dish inferior by arm 31d from vacuum suction, and dish is transported to dish discharge section 110 inferior.

Check that from thickness good dish (high-quality dish) that part 90 transfers to the position of cleaner part 20 22B moves to position 22A by the rotation of rotating disk 22, and from here by supplying with the needle-like clamper 115 that handle 13 is placed into emptier 15, make pin 115a can inserting in the centre bore of dish.Same with the needle-like clamper of loader 11, the needle-like clamper 115 of emptier 15 is equipped with lifter 116, and when dish was deposited in needle-like clamper 115, lifter 116 descended, and the level (highly) that the top of the feasible dish of piling up is is always constant.

When the dish of having handled of predetermined number was deposited on the needle-like clamper 115 of emptier 15, as seen in Figure 1, needle-like clamper 115 was moved to the left, and makes the dish that piles up to take out from the equipment left end.

So, stop according to the operation cycle of the spin coating equipment of present embodiment.

The operation of implementing spin coating equipment is automatically to carry out under the control of the control section (not shown) of the equipment with CPU.

Though one embodiment of the present of invention below have been described, have the invention is not restricted to this embodiment.

Though the foregoing description relates to the spin coated of the light-transmissive film of blue laser copied disc, this is not restrictive, and the present invention can be widely used in the fluent material to the material of disk body spin coated such as radiation-hardenable.As an example, the present invention can be applicable to the coating of CD/CDRW/CDR protective layer, the coating of DVD protective layer, or the spin coated of various hard conatings processing, or the spin coating equipment that carries out this processing.

And, though in the present embodiment, as the resin that coating applied is the UV hardening resin, but the present invention is not limited to this, and can be applicable to various radiation hardening materials disk body is rotated coating, such as infrared cure material and other photo-hardening material, the electromagnetic wave hardened material, X ray hardened material, electron ray hardened material or ultrasonic wave hardened material.The present invention can also be used for various materials disk body being rotated coating.

Though in the spin coating equipment of described embodiment, temporary transient sclerosis UV radiant section and main sclerosis UV radiant section, as the separately installing of light application apparatus that is used to make light (radiation) the hardened material sclerosis on the dish, and implement to be used for semi-harden temporary transient sclerosis by temporary transient sclerosis UV radiant section, so that the flowability of the photo-hardening material layer of the dish on the reduction circulator, by the main sclerosis UV radiant section outside the circulator photo-hardening material layer is hardened fully afterwards, but the photo-hardening material layer can harden on circulator fully, and main sclerosis UV radiant section needn't separately be provided.

And the mask 56 in the present embodiment is shaped as has following disc-shaped part and top from the upwardly extending cylindrical part of its core.Though this shape is suitable for when mask is handled, cylindrical part can be clamped by chuck simple in structure, thereby handles mask, but mask of the present invention is not limited to this shape, but can also adopt the shape of no column part, and for example implement the manipulation of mask by vacuum suction.

And, though in the present embodiment, join the mechanism of spreading device and being used for clamping and mobile mask and be whole installing each other on the mask transfer arm, the drive unit that is used to drive the mask transfer arm is made of ball-screw, but this can be designed as by moving such as other devices such as cylinders.

In the method and apparatus of the present invention when disk body will be with the spin coated of radiation hardening material, be lowered as flowability the radiation hardening material that coating applied of disk body, disk body does not stop the rotation but keeps rotation simultaneously, even thereby the rotation of disk body stops, also will never taking place because the membrane thickness unevenness due to the ripple of material etc.

And, be used for making the apply district of disk body in the present invention, and turned simultaneously, thereby radiation can be applied to whole disk body equably by radiation as the method for curing and the equipment that are coated with the radiation hardening material that the course disk body applies.

And in spin coating equipment of the present invention, the adsorption space that is used for the mechanism of vacuum suction mask in the circulator mechanism, through hole by mask is communicated with outside atmosphere, if thereby after stopping adsorption space being vacuumized through preset time, adsorption space just with the atmospheric pressure equipressure.Like this, mask can be easy to from circulator (from dish) and removes.In addition, after stopping adsorption space being vacuumized,, can make adsorption space and atmospheric pressure equipressure by applying normal pressure in short-term.Even when applying malleation in short-term, because the hole of adsorption space by mask is communicated with outside atmosphere, so air stream can go out by this orifice flow, thereby the fluent material of boundary can not scatter between mask and the dish.If make adsorption space and atmospheric pressure equipressure, then mask can be easy to from circulator (from dish) and removes.

And in the spin coating equipment in another aspect of this invention, join and spread device and be combined in mask and supply with and remove in the mechanism, therefore needn't install separately in addition to be used for moving and join the driving mechanism that spreads device, thereby equipment can be simplified.And then, can make and join the installing space that spreads device and diminish, thereby remaining space can be provided in equipment.

Claims (13)

1. rotary coating method, comprise the fluent material that radiation-hardenable is provided near the center that is installed in the disk body on the circulator that is used to turn disk body, turn disk body and described fluent material is scattered on disk body by centrifugal force, thereby form the coated film of described fluent material in disc surfaces, it is characterized in that such step, promptly before the disk body rotation stops during the spin coated, apply the radiation of effect to disk body, and reduce flowability as the fluent material on the coating paint disk body with the fluent material sclerosis that makes radiation-hardenable.

2. according to the rotary coating method of claim 1, also comprise such step, promptly using a mask parts to cover near the described disk body core part before the coating, and it is characterized in that, the fluent material of described radiation-hardenable offers described mask parts, and when when disk body applies described radiation, this radiation is not applied on the described mask parts in the step that reduces described material flowability.

3. according to the rotary coating method of claim 1, also comprise such step, promptly before the step that reduces described material flowability, peel off the fluent material of the described radiation-hardenable that overflows the disk body neighboring.

4. according to the rotary coating method of claim 1, the step that it is characterized in that reducing described material flowability is temporary transient cure step, this step makes as the fluent material on the coating paint disk body and hardens to a certain degree, and this rotary coating method also comprises such step, in a single day after stopping the rotation of disk body, disk body is moved to another place from circulator, and apply the radiation of effect there to disk body with the fluent material sclerosis that makes described radiation-hardenable, and realize main sclerosis, so that the fluent material that is applied to disk body as coating is hardened fully.

5. according to the rotary coating method of claim 4, it is characterized in that when realizing the step of described main sclerosis, described disk body is moving linearly when being turned, and pass the irradiated site of radiation source of the described radiation of emission, thereby make the fluent material sclerosis on the disk body.

6. spin coating equipment, it comprises:

Be used for clamping and turn the circulator mechanism of disk body;

Be used for the fluent material of radiation-hardenable is offered by near the joining center of the described disk body of described circulator mechanisms grip spreading device mechanism; And

Be used for applying the radiation bringing device of the radiation of effect with the fluent material sclerosis that makes described radiation-hardenable to described disk body by described circulator mechanisms grip;

It is characterized in that, the fluent material of described radiation-hardenable by described join spread device mechanism offer by the described disk body center of described circulator mechanisms grip near after, disk body is turned by described circulator mechanism, thereby described fluent material scatters on disk body, and on disk body, form described fluent material coated film, after this need not to stop the rotation of disk body, but keep the disk body rotation, operate described radiation bringing device and reduce the flowability of fluent material on the disk body by circulator mechanism.

7. according to the spin coating equipment of claim 6, also comprise the mask parts generator, be used for being provided for covering near the mask parts of the part described disk body core to being clamped in described disk body in the described circulator mechanism, and it is characterized in that, described joining spreads device mechanism and provides the fluent material of described radiation-hardenable to being installed in mask parts on the described disk body, apply the district in the radiation of described radiation bringing device and be designed to, make radiation not be applied to the mask parts that is installed on the described disk body.

8. according to the spin coating equipment of claim 6, also comprise the edge cleaning plant, be used for before applying radiation, peeling off the fluent material of the radiation-hardenable that overflows from the disk body neighboring from disk body from described radiation bringing device.

9. according to the spin coating equipment of claim 6, it is characterized in that, described radiation bringing device is the radiation applying portion that temporarily hardens, be used to make the fluent material coated film of the radiation-hardenable on the disk body to harden to a certain degree, and this equipment also comprises main sclerosis radiation applying portion, is used for beyond circulator mechanism the fluent material coated film of radiation-hardenable on the described disk body being hardened fully.

10. according to the spin coating equipment of claim 9, it is characterized in that, described main sclerosis radiation applying portion has a radiation applying unit, be used for to the predetermined radiation that the zone applies the effect with the fluent material sclerosis that makes described radiation-hardenable that applies, an and disk body travel mechanism, be used for that straight line moves described disk body when turning disk body, and make the apply zone of disk body by described radiation applying unit.

11. the fluent material to the radiation-hardenable of paint disk body applies radiation so that the method for curing of this fluent material sclerosis, it is characterized in that, when being turned, described disk body makes its rectilinear motion, and make the irradiated site of its radiation source by launching described radiation, thereby make the fluent material sclerosis on the disk body.

12. be used to make the hardening equipment of the radiation-fluent material that can the harden sclerosis on the paint disk body, it is characterized in that, a radiation applying unit, be used for to the predetermined radiation that the district applies the effect with the fluent material sclerosis that makes radiation-hardenable that applies, and disk body travel mechanism, be used for that straight line moves described disk body when turning disk body, and make the irradiated region of disk body by described radiation applying unit.

13. hardening equipment according to claim 12, it is characterized in that described disk body travel mechanism has a ball-screw, the nut that can move along the linear axis of described ball-screw, a rotatable shaft that is used to keep being installed in the dish on the nut, and a motor that turns described main shaft.

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