CN1226655C - Phase compensation method and device for improving super diffraction limit of laser beam energy density - Google Patents
Phase compensation method and device for improving super diffraction limit of laser beam energy density Download PDFInfo
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Abstract
一种提高激光束能量密度的超衍射极限的相位补偿方法及装置,其方法是:在最低阶横模激光准直放大系统的最后采用补偿相位板对衍射极限光束进行相位补偿;原理上采用高斯光束传播;在确定相位板的结构时,首先采取反向传递算法由需要的远场压缩光束波面反推相位板的连续相位分布,再采用衍射理论由附加相位分布的高斯光束求取其远场分布,对相位板的分布进行优化;然后对优化的连续相位分布的位相板进行量子化,并同时用衍射理论进行优化处理,最终得到量子化分布的相位结构;该相位板结构满足:光束主瓣的压缩比达到0.8,主瓣的能量损失比为0.93,能量密度比为1.16。其装置依次由激光器、整形准直系统、光束放大装置和补偿相位板构成。
A phase compensation method and device for improving the energy density of laser beams beyond the diffraction limit, the method comprising: using a compensating phase plate at the end of the lowest-order transverse mode laser collimation and amplification system to perform phase compensation on the diffraction-limited beam; using Gaussian beam propagation in principle; when determining the structure of the phase plate, firstly adopting a reverse transfer algorithm to infer the continuous phase distribution of the phase plate from the required far-field compressed beam wavefront, then using diffraction theory to obtain its far-field distribution from the Gaussian beam with additional phase distribution, and optimizing the distribution of the phase plate; then quantizing the phase plate with the optimized continuous phase distribution, and optimizing it with diffraction theory at the same time, and finally obtaining the phase structure of the quantized distribution; the phase plate structure satisfies: the compression ratio of the main lobe of the beam reaches 0.8, the energy loss ratio of the main lobe is 0.93, and the energy density ratio is 1.16. The device is composed of a laser, a shaping collimation system, a beam amplification device, and a compensating phase plate in sequence.
Description
技术领域:Technical field:
本发明涉及波面相位补偿,特别是一种提高激光束能量密度的超衍射极限的相位补偿方法及装置。特别指通过设计合适的相位板对准直放大的单一横模激光进行小于光学衍射极限的光束发散度的压缩,但同时保证光束能量集中于压缩后的远场衍射主瓣中,使压缩后的能量密度增加的一种相位补偿校正技术,主要应用方向是激光通信和其它需要很小发散度的激光应用。The invention relates to wavefront phase compensation, in particular to a phase compensation method and device for improving the super-diffraction limit of laser beam energy density. In particular, it refers to compressing the beam divergence of the collimated and amplified single transverse mode laser with a beam divergence less than the optical diffraction limit by designing a suitable phase plate, but at the same time ensuring that the beam energy is concentrated in the compressed far-field diffraction main lobe, so that the compressed A phase compensation correction technology for increased energy density, the main application direction is laser communication and other laser applications that require small divergence.
背景技术:Background technique:
在远距离自由空间激光通信尤其是卫星之间的通信中,要求光通信接收端有足够的信号激光功率以保证所需的信息传输的误码率,这主要涉及激光的发射功率(接收功率与其成正比),准直发射激光的发散度(接收功率与其平方成反比),接收主镜的口径(接收功率与之平方成正比),光接收机的灵敏度等。但由于激光器的本身结构和重量的原因以及卫星能够提供能源和重量的限制,最大可获得的单模激光发射功率有一定的极限值。接收光学口径的尺寸基本决定了光学终端的大小和重量,因为卫星负载重量和尺寸的限制使得接收光学口径有一定的取值范围,一般小于300毫米。此外,光接收机的灵敏度因为带宽受限也存在极限值,即量子极限灵敏度。因此,对于远距离激光通信在上述的各种限制条件下,应当要求激光准直发射光束的发散度尽量窄,即接近光学衍射极限,一般需要达到数个至数十个微弧度,才能保证光通信接收端具有足够高的接收功率。此外,较小发散度的激光光束控制技术在激光其它军事和民用应用方面也具有实际意义。In long-distance free space laser communication, especially in communication between satellites, it is required that the receiving end of optical communication has sufficient signal laser power to ensure the bit error rate of the required information transmission, which mainly involves the transmitting power of the laser (receiving power and Proportional to), the divergence of the collimated emitted laser (receiving power is inversely proportional to its square), the aperture of the receiving primary mirror (receiving power is proportional to its square), the sensitivity of the optical receiver, etc. However, due to the structure and weight of the laser itself and the limitation of the energy and weight that the satellite can provide, the maximum available single-mode laser emission power has a certain limit value. The size of the receiving optical aperture basically determines the size and weight of the optical terminal, because the satellite load weight and size constraints make the receiving optical aperture have a certain value range, generally less than 300 mm. In addition, the sensitivity of the optical receiver also has a limit value due to the limited bandwidth, that is, the quantum limit sensitivity. Therefore, for long-distance laser communication under the various constraints mentioned above, it should be required that the divergence of the laser collimated emission beam should be as narrow as possible, that is, close to the optical diffraction limit, and it generally needs to reach several to tens of microradians to ensure The communication receiving end has a sufficiently high receiving power. In addition, the laser beam control technology with smaller divergence also has practical significance in other military and civilian applications of lasers.
激光器输出的光束本身存在发散度最小的模式,即最低阶横向模式,通常用高斯光束来描述。单一最低阶横模状态下的激光输出也就是达到了光学衍射极限。为了进一步缩小光束发散度,一般采用望远镜系统进行光束的光学准直放大,但理想的望远镜系统存在口径限制下的最小发散度极限,即光学衍射极限,其反比于发射口径。因此单横模激光光束或者经过放大后的光束其最小发散度由横模高斯波腰和发射口径的衍射极限所决定,理想情况下,输出光束将达到或者非常接近高斯光束的衍射极限。本发明利用补偿相位板对单横模激光光束或者经理想准直放大后的扩束光进行超过光学衍射极限的波束发散度的压缩,同时也使得能量集中于压缩后的远场主瓣,从而得到不降低能量的和小于衍射极限发散度的远场发射主瓣。这对于远距离激光通信在最大可能获得的激光功率和灵敏度的限制条件下能够有效保证光通信接收端具有足够高的接收功率。The beam output by the laser itself has a mode with the smallest divergence, that is, the lowest-order transverse mode, which is usually described by a Gaussian beam. The laser output in the single lowest transverse mode state has reached the optical diffraction limit. In order to further reduce the beam divergence, a telescope system is generally used for optical collimation and amplification of the beam, but an ideal telescope system has a minimum divergence limit under the aperture limit, that is, the optical diffraction limit, which is inversely proportional to the emission aperture. Therefore, the minimum divergence of the single transverse mode laser beam or the amplified beam is determined by the Gaussian wave waist of the transverse mode and the diffraction limit of the emission aperture. Ideally, the output beam will reach or be very close to the diffraction limit of the Gaussian beam. The present invention utilizes the compensating phase plate to compress the beam divergence exceeding the optical diffraction limit for the single transverse mode laser beam or the collimated and amplified expanded beam, and also makes the energy concentrated on the compressed far-field main lobe, thereby A far-field emission main lobe with no energy reduction and a divergence smaller than the diffraction limit is obtained. This can effectively ensure that the receiving end of optical communication has a sufficiently high receiving power for long-distance laser communication under the limitation of the maximum possible laser power and sensitivity.
超衍射极限技术通常是指在成像光学中对由成像系统的点扩展函数产生的光斑尺寸,即艾里斑,进行压缩的技术,理想条件下点扩展函数由成象透镜的通光口径决定,(见1.Principles of Optics,M.Born and E.Wolf,7th(extened),p464)。最早人们采用振幅型光瞳函数实现艾里斑的压缩(2.C.J.R.Sheppard,Optik 48,339(1977),3.R.Boivin and A.Boivin,OPT.Acta 27,587(1980),4.Z.S.Hegedus,Opt.Acta 32,815(1985)),但这种方法使传递的能量损失很大。之后又采用相位板方法(5.J.J.E.Wilkins,J.Opt.Soc.Am.40,222(1950),6.T.R.M.Sales and G.M.Morris,in Joint International Symposium on OpticalMemory and Optical Data Storage,Vol.12 of 1996 OSA Technical DigestSeries(Optical Society of America,Washington,D.C.,1996),pp.290-292,7.T.R.M.Sales and G.M.Morris,Opt.Lett.,22,582(1997)),即使用相位型光瞳滤波器改变或补偿入射光束的空间相位分布来实现光斑的压缩,其原理基本与振幅型光瞳滤波器相同,但是它有效改善了使用振幅型光瞳滤波器时存在的传递能量损耗的问题。另外也有采用振幅和相位混合结构的光瞳滤波器实现远场光斑的压缩(8.Z.S.Hegedus and V.Sarafis,J.Opt.Soc.Am.A 3,1892(1982))。光斑的有效压缩使该项技术已在光学信息存储(9.A.B.Marchant,Optical Recording:a TechnicalOverview(Addi son-Wesley,Reading,Mass.,1990)Chp.5,p.101)、共焦显微术(10.T.Wilson,Confocal Microscopy(Academic,London,1990),Chap.5,p.171)以及成像和激光印刷术等等方面获得了应用。但是,采用上述超分辨技术实现光波远场主瓣宽度压缩的同时,不可避免的是主瓣的能量不断地转移到了旁瓣中。因此,虽然缩小了衍射主瓣,但也降低了衍射主瓣的能量。这在成象光学中不会产生问题,因为其主要目的是为了提高分辨率。但用于激光发射光束的发散度压缩时,虽然主瓣宽度压缩了,但是当主瓣所包含的能量与原来束宽中的能量相比降低很多时,这种压缩毫无实际意义。此外,在成象光学的超分辨理论中,只定义了压缩前后的主瓣峰值强度比(Strehl比),而没有定义压缩前后的主瓣能量比以及能量密度比,这就说明了上述超分辨技术中是不考虑主瓣能量转换的或者说主瓣能量的多少不是问题的关键。而且补偿相位板是对透镜的聚焦或会聚光束进行相位补偿,也就是在光学系统的最后一级实施超分辨改造。如果这种光束用于激光准直发射时,因发射光束需要附加透镜进行准直及放大,这就意味着相位板不是置于光学系统的最后,因此相位板以后的光学元件将破坏经过相位补偿的光束波面,使得达到超衍射极限的光束再次产生畸变,最终得到的光束等效于无超衍射极限的相位补偿的情况。此外,在成象光学的计算中超衍射极限技术采用了平面波模型,这一模型不适合于激光光束,在激光应用时更精确的是高斯传播光学。Super-diffraction limit technology usually refers to the technology of compressing the spot size generated by the point spread function of the imaging system, that is, the Airy disk, in imaging optics. Under ideal conditions, the point spread function is determined by the aperture of the imaging lens. (See 1. Principles of Optics, M. Born and E. Wolf, 7th (extended), p464). The earliest people used the amplitude pupil function to realize the compression of the Airy disk (2.C.J.R.Sheppard, Optik 48, 339 (1977), 3.R.Boivin and A.Boivin, OPT.Acta 27, 587 (1980), 4. Z.S.Hegedus, Opt.Acta 32,815 (1985)), but this method makes the energy loss of transmission very big. Then the phase plate method was adopted (5.J.J.E.Wilkins, J.Opt.Soc.Am.40, 222(1950), 6.T.R.M.Sales and G.M.Morris, in Joint International Symposium on Optical Memory and Optical Data Storage, Vol.12 of 1996 OSA Technical DigestSeries (Optical Society of America, Washington, D.C., 1996), pp.290-292, 7.T.R.M.Sales and G.M.Morris, Opt.Lett., 22, 582(1997)), that is, using a phase pupil The filter changes or compensates the spatial phase distribution of the incident beam to achieve spot compression. The principle is basically the same as that of the amplitude pupil filter, but it effectively improves the problem of energy transfer loss when using the amplitude pupil filter. In addition, there is also a pupil filter using an amplitude and phase hybrid structure to achieve far-field spot compression (8. Z. S. Hegedus and V. Sarafis, J. Opt. Soc. Am. A 3, 1892 (1982)). The effective compression of the light spot has made this technology widely used in optical information storage (9.A.B.Marchant, Optical Recording: a Technical Overview (Addison-Wesley, Reading, Mass., 1990) Chp.5, p.101), confocal microscopy ( 10. T.Wilson, Confocal Microscopy (Academic, London, 1990), Chap.5, p.171) and imaging and laser printing, etc. have been applied. However, when the above-mentioned super-resolution technology is used to compress the width of the main lobe of light waves in the far field, it is inevitable that the energy of the main lobe is continuously transferred to the side lobes. Therefore, although the diffraction main lobe is reduced, the energy of the diffraction main lobe is also reduced. This does not pose a problem in imaging optics, where the main purpose is to increase resolution. However, when it is used to compress the divergence of the laser emission beam, although the width of the main lobe is compressed, this compression is meaningless when the energy contained in the main lobe is much lower than the energy in the original beam width. In addition, in the super-resolution theory of imaging optics, only the peak intensity ratio (Strehl ratio) of the main lobe before and after compression is defined, but the energy ratio and energy density ratio of the main lobe before and after compression are not defined, which shows that the above-mentioned super-resolution In the technology, the energy conversion of the main lobe is not considered, or the amount of energy of the main lobe is not the key to the problem. Moreover, the compensation phase plate is to perform phase compensation on the focused or converging beam of the lens, that is, to implement super-resolution transformation at the last stage of the optical system. If this kind of beam is used for laser collimation and emission, because the emission beam needs additional lens for collimation and amplification, this means that the phase plate is not placed at the end of the optical system, so the optical elements after the phase plate will destroy the phase compensation The wavefront of the beam makes the beam that reaches the super-diffraction limit be distorted again, and the finally obtained beam is equivalent to the situation without phase compensation of the super-diffraction limit. In addition, in the calculation of imaging optics, the super-diffraction limit technology uses a plane wave model, which is not suitable for laser beams, and Gaussian propagation optics is more accurate in laser applications.
发明内容:Invention content:
本发明要解决的技术问题在于克服上述现有技术的困难,提供一种提高激光束能量密度的超衍射极限的相位补偿方法及装置,这种相位补偿的方法和装置可以以较小的发射光学口径达到较大口径的衍射极限发散度的效果,非常有利于空间激光通信终端的轻量化和小型化。The technical problem to be solved by the present invention is to overcome the above-mentioned difficulties in the prior art, and to provide a phase compensation method and device for improving the super-diffraction limit of laser beam energy density. The caliber achieves the effect of diffraction-limited divergence of a larger caliber, which is very conducive to the lightweight and miniaturization of space laser communication terminals.
本发明的基本方案是:Basic scheme of the present invention is:
一种提高激光束能量密度的超衍射极限的相位补偿方法,其特征在于:A phase compensation method for improving the super-diffraction limit of laser beam energy density, characterized in that:
①在最低阶横模激光准直放大系统的最后采用补偿相位板对衍射极限光束进行相位补偿;① At the end of the lowest-order transverse mode laser collimation and amplification system, a compensating phase plate is used to perform phase compensation on the diffraction-limited beam;
②原理上采用高斯光束传播;② In principle, Gaussian beam propagation is adopted;
③在确定相位板的结构时,首先采取反向传递算法,即由需要的远场压缩光束波面反推相位板的连续相位分布的迭代算法,初步得到补偿相位板的相位结构后,再采用衍射理论由附加相位分布的高斯光束求取其远场分布,对相位板的分布进行优化;然后对优化的连续相位分布的相位板进行量子化,并同时用衍射理论进行优化处理,最终得到量子化分布的相位结构;③ When determining the structure of the phase plate, the backpropagation algorithm is firstly adopted, that is, the iterative algorithm for inverting the continuous phase distribution of the phase plate from the wavefront of the required far-field compressed beam. After obtaining the phase structure of the compensated phase plate initially, the diffraction In theory, the far-field distribution of the Gaussian beam with additional phase distribution is obtained, and the distribution of the phase plate is optimized; then the phase plate with the optimized continuous phase distribution is quantized, and at the same time, it is optimized by diffraction theory, and finally the quantization is obtained. distributed phase structure;
④通过计算得到带边界的二环的相位板结构,该相位板结构满足:光束主瓣的压缩比达到0.8,主瓣的能量损失比为0.93,能量密度比为1.16。④ The phase plate structure of the two rings with boundary is obtained by calculation, the phase plate structure satisfies: the compression ratio of the main lobe of the beam reaches 0.8, the energy loss ratio of the main lobe is 0.93, and the energy density ratio is 1.16.
利用上述提高激光束能量密度的超衍射极限的相位补偿方法而建立的提高激光束能量密度的超衍射极限的相位补偿装置,其结构是它沿激光束前进方向依次包括:激光器、整形准直系统、光束放大装置和补偿相位板。The phase compensation device for improving the super-diffraction limit of the energy density of the laser beam established by using the phase compensation method for increasing the energy density of the laser beam above the super-diffraction limit has a structure that it sequentially includes: a laser, a shaping and collimation system along the forward direction of the laser beam. , a beam amplification device and a compensating phase plate.
所述的激光器是一最低阶单横模激光器。Said laser is a lowest order single transverse mode laser.
这一结构意味着采用120mm口径的发射主镜即可以达到150mm口径的实际效果,它满足激光通信终端的轻量化和小型化的要求。This structure means that the actual effect of a 150mm caliber can be achieved by using a 120mm caliber emitting primary mirror, which meets the requirements of light weight and miniaturization of laser communication terminals.
本发明的优点:Advantages of the present invention:
1、本发明的超衍射极限技术是采用相位分布的光学平板对于准直及放大的高斯激光光束进行补偿,使其发散角得到压缩,纯相位平板具有无吸收损耗的优点,采用高斯光学切合激光光束实际,因而补偿精度高。1. The super-diffraction limit technology of the present invention is to use an optical plate with phase distribution to compensate the collimated and amplified Gaussian laser beam, so that its divergence angle is compressed. The pure phase plate has the advantage of no absorption loss, and Gaussian optics is used to fit the laser The beam is practical, so the compensation accuracy is high.
2、相位板的设计上,采用反向传递算法并结合正向衍射的优化计算,具有能够实现全局最佳化计算的优点,其特征是能够比较容易地得到所需要的结果,特别是定义了主瓣能量比和能量密度比来判断经相位补偿得到的超衍射极限远场光斑的能量损失,既可以做到主瓣压缩又实现主瓣能量集中,使得该项技术的应用真正在原理上能够成立。考虑到相位板的制作工艺,所设计的相位分布进行了量子化及其优化,使得相位板容易制造。2. In the design of the phase plate, the backward transfer algorithm combined with the optimization calculation of the forward diffraction has the advantage of being able to realize the global optimization calculation, and its characteristic is that the required results can be obtained relatively easily, especially the definition of The main lobe energy ratio and energy density ratio are used to judge the energy loss of the super-diffraction limit far-field spot obtained by phase compensation, which can not only achieve main lobe compression but also achieve main lobe energy concentration, making the application of this technology truly possible in principle. established. Considering the manufacturing process of the phase plate, the designed phase distribution is quantized and optimized, which makes the phase plate easy to manufacture.
总之,这种相位补偿的方法可以以较小的发射光学口径达到较大口径的衍射极限发散度的效果,非常有利于空间激光通信终端的轻量化和小型化。In short, this method of phase compensation can achieve the effect of a larger diffraction-limited divergence with a smaller emission optical aperture, which is very conducive to the lightweight and miniaturization of space laser communication terminals.
附图说明:Description of drawings:
图1为本发明的激光准直发射光束的超衍射极限相位补偿装置的结构框图。FIG. 1 is a structural block diagram of a super-diffraction-limited phase compensation device for collimating laser beams according to the present invention.
图2为本发明中超衍射极限补偿相位板的数值计算过程示意图Fig. 2 is a schematic diagram of the numerical calculation process of the super-diffraction limit compensation phase plate in the present invention
图3为本发明中反向算法确定的相位板的相位分布示意图。Fig. 3 is a schematic diagram of the phase distribution of the phase plate determined by the reverse algorithm in the present invention.
图4为本发明中量子化相位板的结构示意图。FIG. 4 is a schematic structural diagram of a quantized phase plate in the present invention.
图5为本发明中激光准直发射光束在压缩前后的远场光强分布比较图。Fig. 5 is a comparison diagram of the far-field light intensity distribution of the laser collimated emission beam before and after compression in the present invention.
具体实施方案:Specific implementation plan:
请先参阅图1,图1是本发明的激光准直发射光束的超衍射极限相位补偿装置的结构框图。由图可见,本发明的装置结构包括:激光器1、整形准直系统2、光束放大装置3和补偿相位板4。激光器1发出的单一最低阶横模光束,经整形准直系统2准直后成为均匀分布的高斯光斑,或者经光纤传输后输出一光点,准直后的光束经光束放大装置3放大后得到一定发射口径(即达到衍射极限光束)并且具有一定的发散度的高斯光束,这一高斯光束再经补偿相位板4的补偿,在远场得到空间分布压缩的远场光斑,该光斑的能量基本保持不变。假设经准直放大后的高斯光束的振幅为a(x,y),补偿相位板4的相位分布为φ(x,y),则光束经过补偿相位板4后的复振幅b(x,y)为:Please refer to FIG. 1 first. FIG. 1 is a structural block diagram of a super-diffraction-limited phase compensation device for collimating laser beams according to the present invention. It can be seen from the figure that the device structure of the present invention includes: a laser 1 , a shaping and
b(x,y)=α(x,y)exp(iφ(x,y)) (1)b(x,y)=α(x,y)exp(iφ(x,y)) (1)
经相位补偿后激光光束在远场的复振幅分布B(fx,fy)可表示成以下形式,The complex amplitude distribution B(f x , f y ) of the laser beam in the far field after phase compensation can be expressed as the following form,
B(fx,fy)=A(fx,fy)*Φ(fx,fy) (2)B(f x , f y )=A(f x , f y )*Φ(f x , f y ) (2)
其中x、y为相位板的坐标,fx、fy为输出面的坐标,A(fx,fy)是α(x,y)的傅立叶谱,Φ(fx,fy)为输入相位分布exp(iφ(x,y))的傅立叶变换,因此,适当控制补偿相位函数φ(x,y)就有可能使补偿后光束的发散度小于光束原来的发散度。Where x, y are the coordinates of the phase plate, f x , f y are the coordinates of the output surface, A(f x , f y ) is the Fourier spectrum of α(x, y), Φ(f x , f y ) is the input The Fourier transform of the phase distribution exp(iφ(x, y)), therefore, proper control of the compensation phase function φ(x, y) may make the divergence of the compensated beam smaller than the original divergence of the beam.
本发明在评价光斑的压缩效果时仍采用成像光学中的两个参数,第一零点比:G=xs/x0和Strehl比:S=Ism/I0m,其中xs和x0分别表示有超分辨相位板和没有超分辩相位板下的远场衍射主瓣的第一零点值,Ism和Is0分别表示有超分辨相位板和无超分辨相位板时远场衍射主瓣中央点的光强值。此外为了衡量压缩后远场衍射主瓣能量的损失程度,定义远场衍射主瓣的积分能量比:RI=Is/I0,以及能量密度比
据文献(7,T.R.M.Sales and G.M.Merris Opt.Lett.,22,582(1997))知在小信号近似下,远场光斑的压缩比与斯塔尔比的极大值具有如下的关系:According to the literature (7, T.R.M.Sales and G.M.Merris Opt.Lett., 22, 582 (1997)), under the small signal approximation, the compression ratio of the far-field spot has the following relationship with the maximum value of the Starr ratio:
上式中
A表示振幅透过率的最大值,
当远场光斑压缩比(即第一零点比G)G<0.46时,随着光斑压缩比的降低,斯塔尔比也快速降低,即对于比较大的压缩时,Strehl比和第一零点比存在关系S<G,这表明峰值光强下降的速率大于远场光斑的缩小,即能量损失较大,此时能量密度比TI<1,这一理论结果对于激光通信而言是非常不利的。然而,当G>0.46时,上述理论值已超出小信号近似的条件而失去其参考价值,这说明在较小的压缩比的情况下,S≥G完全有可能成立,即峰值光强下降的速率可小于远场光斑的缩小,能量密度比TI可大于1。为此本发明中的补偿相位板4是在较小的压缩比下(即G>0.46)、Strehl比降低不明显、并且整个远场光斑的积分能量Is也降低不大和能量密度比TI>1四个条件下得到的。When the far-field spot compression ratio (that is, the first zero ratio G) G<0.46, as the spot compression ratio decreases, the Starr ratio also decreases rapidly, that is, for relatively large compression, the Strehl ratio and the first zero There is a relationship S<G for the point ratio, which indicates that the rate of decrease of the peak light intensity is greater than the reduction of the far-field spot, that is, the energy loss is large. At this time, the energy density ratio T I <1, this theoretical result is very important for laser communication. Adverse. However, when G>0.46, the above theoretical value has exceeded the small-signal approximation condition and loses its reference value, which shows that in the case of a small compression ratio, S≥G is entirely possible, that is, the decrease of the peak light intensity The speed can be smaller than the reduction of the far-field spot, and the energy density ratio T I can be greater than 1. For this reason, the
在相位板的设计上,本发明采用如图2所示的技术路线对补偿相位板的结构进行全局优化计算。它包括反向传递算法、最佳化相位板、相位板量子化、误差修正和相位板的输出等几部分组成。首先采用反向传递算法给出符合条件的相位板的结构,然后利用衍射理论计算准直放大后的高斯光束通过相位板后的远场分布,调整反向算法中的参数,并不断将它们远场分布的结果进行比较,得到与条件相符的最佳化相位板结构。通常反向传递算法给出的相位板的相位是在[-π,π]之间连续分布的,精确制作这样的相位板,在技术上会有相当的难度甚至无法做出,因此必须将连续分布的相位板的结构进行相位板量子化,即将连续的相位分布量化为台阶型的相位分布。使用量子化之后的相位板进行相位补偿获得的远场光斑可能会与使用连续相位分布的补偿相位板得到的远场光斑有一定的偏差,因此量子化后的相位板还需要再进行进一步的误差修正。再次利用衍射理论计算激光光束通过量子化的补偿相位板后的远场分布,并将量子化的补偿相位板下的超衍射极限的远场光斑与量子化前相位板的情况进行比较,改变相应的参数,使量子化的补偿相位板达到最佳化。最后将最佳化的量子化相位板输出。In the design of the phase plate, the present invention adopts the technical route shown in FIG. 2 to perform global optimization calculation on the structure of the compensation phase plate. It includes several parts such as backward transfer algorithm, optimized phase plate, phase plate quantization, error correction and phase plate output. Firstly, the backward transfer algorithm is used to give the structure of the qualified phase plate, and then the far-field distribution of the collimated and amplified Gaussian beam passing through the phase plate is calculated by using the diffraction theory, and the parameters in the reverse algorithm are adjusted, and they are kept far away. The results of the field distribution are compared, and the optimal phase plate structure conforming to the conditions is obtained. Usually, the phase of the phase plate given by the backpropagation algorithm is continuously distributed between [-π, π]. It is technically difficult or even impossible to make such a phase plate precisely, so the continuous The structure of the distributed phase plate performs phase plate quantization, that is, the continuous phase distribution is quantized into a stepped phase distribution. The far-field spot obtained by phase compensation using the quantized phase plate may have a certain deviation from the far-field spot obtained by using the continuous phase distribution compensation phase plate, so the quantized phase plate needs further error fix. Use the diffraction theory again to calculate the far-field distribution of the laser beam after passing through the quantized compensation phase plate, and compare the super-diffraction-limited far-field spot under the quantized compensation phase plate with the situation before the quantization phase plate, and change the corresponding parameters to optimize the quantized compensation phase plate. Finally, the optimized quantized phase plate is output.
本发明的具体技术解决方案如下:Concrete technical solution of the present invention is as follows:
1、由于本发明是在激光发射中运用超衍射极限技术,因此要求结构图1中激光器1的激光输出必须达到光学衍射极限,即为最低阶横模模式,这一模式通常用高斯光束来描述。并且之后的整型准直系统2和光束放大装置3必须保证对高斯光束进行准直放大的同时不会改变高斯光束的光束质量。由此获得的输出光束将达到或者非常接近高斯光束的衍射极限。置于发射系统之后的补偿相位板4对衍射极限或者接近衍射极限的高斯光束的波面进行相位补偿,从而实现激光光束发散度的压缩,但在光束发散度或者光束的远场衍射主瓣的宽度得到压缩的同时,衍射主瓣能量的减小低于主瓣压缩比,即能量密度比大于1,使本发明具有实际的意义。因此本发明原理上需采用高斯光束的传播。1. Since the present invention uses super-diffraction limit technology in laser emission, it is required that the laser output of the laser 1 in the structure diagram 1 must reach the optical diffraction limit, that is, the lowest-order transverse mode mode, which is usually described by a Gaussian beam . And the subsequent
2、本发明中补偿相位板的结构采用反向传递算法待定求解。在给定输入光波的振幅分布和远场衍射光斑光强分布(当然该衍射光斑满足一定的光斑压缩比且保证能够产生有效的发散度)的条件下,待定求解位于输入面上的相位板的相位结构。其具体步骤为:假设输出面上的目标光强分布,并随即或特殊选取远场光波的初始相位,将构造的这一远场复振幅进行逆傅立叶变换,将变换后的光波复振幅的幅值用已知的输入面上的光波的振幅代替,然后进行正傅立叶变换,将变换到远场的光波复振幅的幅值用设定的远场衍射光强的平方根表示,构造新的输出光波复振幅,进入下一轮的循环。整个迭代过程中输入输出的积分能量保持不变,并在循环的过程中不断地将输出波形与高斯光束的远场进行比较,当压缩比满足一定条件时输出此时在输入面上的相位分布,由此确定补偿相位板的结构。2. The structure of the compensating phase plate in the present invention adopts the backward transfer algorithm to be solved. Given the amplitude distribution of the input light wave and the light intensity distribution of the far-field diffraction spot (of course, the diffraction spot satisfies a certain spot compression ratio and is guaranteed to produce an effective divergence), the undetermined solution for the phase plate on the input surface phase structure. The specific steps are as follows: assuming the target light intensity distribution on the output surface, and randomly or specially selecting the initial phase of the far-field light wave, performing an inverse Fourier transform on the constructed far-field complex amplitude, and transforming the amplitude of the transformed light wave complex amplitude The value is replaced by the known amplitude of the light wave on the input surface, and then the positive Fourier transform is performed, and the amplitude of the complex amplitude of the light wave transformed into the far field is expressed by the square root of the set far field diffraction light intensity to construct a new output light wave Repeat the amplitude and enter the next cycle. The integral energy of the input and output remains unchanged throughout the iterative process, and the output waveform is continuously compared with the far field of the Gaussian beam during the cycle. When the compression ratio meets certain conditions, the phase distribution on the input surface at this time is output. , thus determining the structure of the compensating phase plate.
3、经反向传递算法得到的实现超衍射极限光斑压缩的相位板结构并非一二阶的相位结构而是连续的相位分布。对于连续分布的相位板,其制作工艺和精度都能以控制。为此我们将连续分布的相位结构进行量子化,得到台阶状的相位分布。量子化的相位板可利用二元光学的大规模集成电路的制作工艺精确实现。3. The phase plate structure obtained by backpropagation algorithm to achieve super-diffraction limit spot compression is not a first-order or second-order phase structure but a continuous phase distribution. For continuously distributed phase plates, the manufacturing process and precision can be controlled. To this end, we quantize the continuous distribution of the phase structure to obtain a step-like phase distribution. The quantized phase plate can be accurately realized by using the manufacturing process of the large-scale integrated circuit of binary optics.
4、在相位板的量子化过程中,由于相位转折位置的选取、相位板内外环的相位差的取值以及相位板的外环的尺寸等因素的影响都可能给实际远场衍射图样的结果带来不同程度的偏差。为此我们就这些相关因素的变化对远场衍射图样的影响进行了相应的数值计算。计算过程中,不断改变相位板量子化时相位的转折位置、相位板内外环的相位差以及相位板的外环的尺寸,进而对相位板的结构进行优化处理,得到最佳的超衍射极限光强分布,从而得到相位板量子化最优化时的参数。4. In the quantization process of the phase plate, due to the influence of factors such as the selection of the phase turning position, the value of the phase difference between the inner and outer rings of the phase plate, and the size of the outer ring of the phase plate, the results of the actual far-field diffraction pattern may be affected. lead to varying degrees of deviation. Therefore, we have carried out corresponding numerical calculations on the influence of the changes of these related factors on the far-field diffraction pattern. During the calculation process, the turning position of the phase when the phase plate is quantized, the phase difference between the inner and outer rings of the phase plate, and the size of the outer ring of the phase plate are constantly changed, and then the structure of the phase plate is optimized to obtain the best super-diffraction-limited light Strong distribution, so as to obtain the parameters of phase plate quantization optimization.
假设准直放大的激光光束是波腰为ω0=10mm的高斯光束。图3给出了在压缩前后远场衍射主瓣的积分能量比RI=Is/I0基本不降低的条件下,利用反向算法得到的补偿相位板的相位分布示意图。可以看出经反向算法得到的实现超衍射光斑压缩的相位板结构并非二阶的相位结构而具有连续的相位分布。对压缩比为0.8的相位板结构而言,其大的轮廓具有两个台阶,且这两个台阶的相位差近似为π,因此在相位量化时可采用两相位环再加上一光阑的形式。量子化时,设内外环的半径分别取r1和r2,相应的相位分别为1和2。量子化的结果如图4虚线所示,其中各参数分别取:r1=18.75mm、r2=25mm、Δ=2-1=3.14rad。Assume that the collimated and amplified laser beam is a Gaussian beam with a waist of ω 0 =10 mm. Fig. 3 shows the schematic diagram of the phase distribution of the compensation phase plate obtained by using the reverse algorithm under the condition that the integral energy ratio R I =I s /I 0 of the main lobe of the far-field diffraction before and after compression does not decrease substantially. It can be seen that the phase plate structure obtained by the reverse algorithm to achieve super-diffraction spot compression is not a second-order phase structure but has a continuous phase distribution. For the phase plate structure with a compression ratio of 0.8, its large profile has two steps, and the phase difference between the two steps is approximately π, so two phase rings plus a diaphragm can be used for phase quantization. form. When quantizing, assume that the radii of the inner and outer rings are r 1 and r 2 respectively, and the corresponding phases are 1 and 2 respectively. The result of quantization is shown by the dotted line in Fig. 4, where each parameter is set as follows: r 1 =18.75mm, r 2 =25mm, Δ= 2 - 1 =3.14rad.
图5给出了经相位板补偿前后高斯光束在远场的衍射光强分布,其中压缩比G=0.8,而远场衍射主瓣的积分能量比RI=0.93,能量密度比TI=1.16。Figure 5 shows the distribution of diffracted light intensity of Gaussian beams in the far field before and after phase plate compensation, where the compression ratio G=0.8, while the integral energy ratio R I of the main lobe of far-field diffraction =0.93, and the energy density ratio T I =1.16 .
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