CN1217427C - Bending Vibration Mode Piezoelectric Step-Up Transformer - Google Patents
Bending Vibration Mode Piezoelectric Step-Up Transformer Download PDFInfo
- Publication number
- CN1217427C CN1217427C CN01120848.1A CN01120848A CN1217427C CN 1217427 C CN1217427 C CN 1217427C CN 01120848 A CN01120848 A CN 01120848A CN 1217427 C CN1217427 C CN 1217427C
- Authority
- CN
- China
- Prior art keywords
- transformer
- input
- output
- piezoelectric ceramic
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Dc-Dc Converters (AREA)
Abstract
Description
技术领域technical field
本发明涉及固态电子元器件,具体涉及一种压电陶瓷升压变压器。The invention relates to solid-state electronic components, in particular to a piezoelectric ceramic step-up transformer.
背景技术Background technique
人们以经知道在电子陶瓷电力器件应用领域中,用压电陶瓷正逆压电效应进行电压或电流转换的技术,具体的说,这种技术就是通过对压电陶瓷进行一定的极化取向和电极设计,利用逆压电效应使压电陶瓷在输入端电压激励下产生机械振荡,然后利用正压电效应使该机械振动能转化为输出端的电能,从而实现电力传输过程中以机械能为媒介的电能互换。在该能量转换过程中,压电陶瓷变压器的结构和尺寸,振动方式和电能取出方式影响了压电陶瓷变压器自身的输入和输出电阻抗特性。当输入和输出端的电阻抗不等时,输入和输出端间的电压在负载匹配情况下将不相等,这在效果上即等同于电磁式变压器,此即通常所谓的压电陶瓷变压器。It is known that in the application field of electronic ceramic power devices, the technology of using piezoelectric ceramics to convert voltage or current through the forward and reverse piezoelectric effect, specifically, this technology is to carry out certain polarization orientation and The electrode design uses the inverse piezoelectric effect to make piezoelectric ceramics produce mechanical oscillations under the excitation of the input voltage, and then uses the positive piezoelectric effect to convert the mechanical vibration energy into electrical energy at the output end, so as to realize the mechanical energy as the medium in the power transmission process. Power exchange. In the energy conversion process, the structure and size of the piezoelectric ceramic transformer, the vibration mode and the electric energy extraction mode affect the input and output electrical impedance characteristics of the piezoelectric ceramic transformer itself. When the electrical impedance of the input and output terminals is not equal, the voltage between the input and output terminals will not be equal under the condition of load matching, which is equivalent to the electromagnetic transformer in effect, which is usually called a piezoelectric ceramic transformer.
压电陶瓷变压器从功能上可分为升压和降压两种,前者是以高输出电压为主要目的,而后者是以降压,高输出功率为其主要目的。它们已成为近年来特别引入注目的电子陶瓷元件,其原因是与目前大量应用的电磁式变压器相比,具有不可燃,无电磁辐射,体积小,结构简单等特点,适合于近年来迅猛发展的小型化电子通信,计算机设备等。90年代初,日本主要的公司和研究机构,如NEC,Toshiba,Tokin等公司及东京大学即以计算机设备为应用目标,开展了压电陶瓷变压器应用研究。经过了近十年的研究工作后,最先在便携式手提计算机液晶屏幕显示器和计算机降压变压器领域实现大规模应用。因而,可以预计压电陶瓷变压器在未来的电子元件器中有着重要的地位。Piezoelectric ceramic transformers can be divided into two types from the function of step-up and step-down. The former is mainly aimed at high output voltage, while the latter is mainly aimed at step-down and high output power. They have become electronic ceramic components that have attracted special attention in recent years. The reason is that compared with the electromagnetic transformers that are widely used at present, they are non-flammable, no electromagnetic radiation, small in size, and simple in structure. They are suitable for the rapid development in recent years. Miniaturization of electronic communications, computer equipment, etc. In the early 1990s, major Japanese companies and research institutions, such as NEC, Toshiba, Tokin and the University of Tokyo, targeted computer equipment and carried out research on the application of piezoelectric ceramic transformers. After nearly ten years of research work, it is the first to realize large-scale applications in the field of portable computer LCD screen displays and computer step-down transformers. Therefore, it can be expected that piezoelectric ceramic transformers will play an important role in future electronic components.
图1所示的是1956年Rosen首先提出的压电陶瓷升压变压器结构。这种变压器是利用压电陶瓷的压电应变系数d31产生横向振动,然后利用压电应变系数d33来获得与振动方向平行的纵向电场来获得高输出电压在这种结构中,输入和输出端电阻抗相差大才能保证负载有高的输出电压,因而变压器一般采用的是不对称结构。目前大多数压电陶瓷升压变压器都是以Rosen型结构为基本雏形而发展的产品,用于便携式手提计算机液晶显示展幕的便是采用Rosen改进型多层陶瓷变压器而工作的。日本专利申请第09059969号是这种类型的压电变压器的一个实例。Figure 1 shows the piezoelectric ceramic step-up transformer structure first proposed by Rosen in 1956. This kind of transformer uses the piezoelectric gauge d 31 of piezoelectric ceramics to generate transverse vibration, and then uses the piezoelectric gauge d 33 to obtain a longitudinal electric field parallel to the vibration direction to obtain high output voltage. In this structure, the input and output A large difference in terminal resistance can ensure a high output voltage for the load, so the transformer generally adopts an asymmetric structure. At present, most piezoelectric ceramic step-up transformers are developed based on the Rosen type structure, and the ones used for portable computer liquid crystal display screens are based on Rosen's improved multilayer ceramic transformer. Japanese Patent Application No. 09059969 is an example of this type of piezoelectric transformer.
图2所示的是多层压电陶瓷升压变压器的基本结构。该压电变压器采用厚度模式振荡,首先它利用压电陶瓷的压电应变系数d33产生厚度方向振动,然后再利用压电应变系数d33来获得与振动方向平行的纵向电场来获得高输出电压。根据输入和输出端阻抗差异,从而获得较高的输出电压。该结构变压器的输入输出电流相对其它类型升压变压器较大,升压变压比介于1至30之间,因而能满足于日益增长的小型化,高变比交流-交流(AC-AC)和直流-直流(DC-DC)转换电路的应用要求。日本NEC公司就是采用了与图2相似的多层陶瓷片的输入和输出结构,制备了15倍纵向厚度振动模式升压变压器。美国专利第8313971号是这种压电陶瓷变压器的一个实例。Figure 2 shows the basic structure of a multilayer piezoelectric ceramic step-up transformer. The piezoelectric transformer adopts thickness mode oscillation, firstly it utilizes the piezoelectric strain coefficient d 33 of the piezoelectric ceramic to generate thickness direction vibration, and then uses the piezoelectric strain coefficient d 33 to obtain a longitudinal electric field parallel to the vibration direction to obtain high output voltage . According to the difference of input and output impedance, a higher output voltage is obtained. The input and output current of this structure transformer is larger than other types of step-up transformers, and the step-up transformation ratio is between 1 and 30, so it can meet the growing miniaturization and high transformation ratio AC-AC (AC-AC) and DC-DC (DC-DC) conversion circuit application requirements. NEC Corporation of Japan adopted the input and output structures of multilayer ceramic sheets similar to those shown in Figure 2, and prepared a 15-fold longitudinal thickness vibration mode step-up transformer. US Patent No. 8313971 is an example of such a piezoelectric ceramic transformer.
对于以上所述的压电变压器,输入和输出端的压电陶瓷采用互偶式工作原理。及与输入端部分相连的那部分压电陶瓷在电压驱动下使压电陶瓷器件产生整体的机械运动,通过驻波振动将机械能传递至另一作为输出端的压电陶瓷上来获得电能。图2所示厚度振动模式多层压电变压器,由于其结构特点,一般工作于较高的振动频率范围,因此器件的老化现象较严重。同时,采用此结构的多层压电变压器,其在制备工艺过程中的极化步骤也较复杂。(J.W.Wanders,Piezoelectric Ceramics:properties and applications,Philips,1991)。另外,传统工艺中采用粘结剂粘结法,将通过干压法制备的陶瓷片粘结成为的多层一体化结构,虽然成本低,工艺简单,但由于粘结剂与压电陶瓷机械阻抗不匹配,将大大降低器件的电功率转换效率。鉴于以上传统器件设计及制备工艺上的不足,因此,探索新的器件设计结构,和优化制备工艺方法,对于生产适用于不同工作环境条件的小型化电子器件有很大的实用价值。For the above-mentioned piezoelectric transformer, the piezoelectric ceramics at the input and output ends adopt a mutual-coupled working principle. And the part of the piezoelectric ceramic connected to the input end is driven by the voltage to make the piezoelectric ceramic device produce an overall mechanical movement, and the mechanical energy is transferred to another piezoelectric ceramic as the output end through standing wave vibration to obtain electrical energy. The thickness vibration mode multilayer piezoelectric transformer shown in Figure 2 generally works in a relatively high vibration frequency range due to its structural characteristics, so the aging phenomenon of the device is serious. At the same time, the polarization steps in the manufacturing process of the multilayer piezoelectric transformer with this structure are also relatively complicated. (J.W. Wanders, Piezoelectric Ceramics: properties and applications, Philips, 1991). In addition, in the traditional process, the adhesive bonding method is used to bond the ceramic sheets prepared by the dry pressing method into a multi-layer integrated structure. Although the cost is low and the process is simple, due to the mechanical resistance of the adhesive and the piezoelectric ceramic If they are not matched, the electrical power conversion efficiency of the device will be greatly reduced. In view of the deficiencies in the above traditional device design and manufacturing process, exploring new device design structures and optimizing the manufacturing process method are of great practical value for the production of miniaturized electronic devices suitable for different working environment conditions.
发明内容Contents of the invention
本发明的一个目的是提供一种弯曲振动模式的多层压电变压器的结构设计。An object of the present invention is to provide a structural design of a multilayer piezoelectric transformer in bending vibration mode.
本发明的另一个目的是提供制备弯曲振动模式的多层压电变压器的工艺方法。Another object of the present invention is to provide a process for preparing a multilayer piezoelectric transformer in bending vibration mode.
本发明所提供弯曲振动模式的多层压电变压器,其包括:The multilayer piezoelectric transformer in bending vibration mode provided by the present invention includes:
位于变压器两侧的两部分电压输入端,其相对于输出端左右对称分布。输入端由两层压电陶瓷与铂金属内电极共烧结构构成。输出端为单层压电陶瓷结构。输入端与输出端为一体化共烧结构。输入端及输出端的外表面设置外电极。外电极分别位于变压器的上下表面以及左右两侧。其中输入端地线引出端的外电极位置位于变压器的长度方向左右两侧,其连接于输入端两层压电陶瓷间的共烧内电极。输入端火线引出端外电极以及输出端外电极分别位于变压器上下表面,并沿变压器表面长度方向按照1/3变压器表面长度的关系均匀涂布。外电极连接输入及输出端的引线。其特征在于,位于变压器左右两侧的压电变压器输入端,其两层压电陶瓷极化方向一致,均为垂直于内外电极所在平面,激励两层压电陶瓷的输入端电压方向相反,从而产生弯曲模式振荡。输出端极化方向与输入端平行,根据压电陶瓷的正压电效应,将弯曲振荡的机械能转换为电能形式输出。The two-part voltage input terminals located on both sides of the transformer are symmetrically distributed relative to the output terminals. The input end is composed of two layers of piezoelectric ceramics and a platinum metal internal electrode co-fired structure. The output end is a single-layer piezoelectric ceramic structure. The input end and output end are integrated co-firing structure. External electrodes are arranged on the outer surfaces of the input end and the output end. The external electrodes are respectively located on the upper and lower surfaces and the left and right sides of the transformer. The external electrodes of the ground wire lead-out end of the input end are located on the left and right sides of the transformer in the length direction, and are connected to the co-fired internal electrodes between the two layers of piezoelectric ceramics at the input end. The outer electrodes of the live wire lead-out end of the input end and the outer electrodes of the output end are respectively located on the upper and lower surfaces of the transformer, and are evenly coated along the length direction of the transformer surface according to the relationship of 1/3 of the surface length of the transformer. The external electrodes are connected to the lead wires of the input and output ends. It is characterized in that the piezoelectric transformer input ends located on the left and right sides of the transformer have the same polarization direction of the two layers of piezoelectric ceramics, which are both perpendicular to the plane where the inner and outer electrodes are located, and the directions of the input voltages that excite the two layers of piezoelectric ceramics are opposite, so that produce bending mode oscillations. The polarization direction of the output end is parallel to the input end, and according to the positive piezoelectric effect of piezoelectric ceramics, the mechanical energy of bending oscillation is converted into electrical energy for output.
本变压器的又一方面特点,其整体为一扁平长方体结构。通过尺寸优化技术可以明显提高器件的工作效果,目前优化后的器件的长,宽,高为32∶8∶1.5。两部分输入端和一部分输出端沿变压器长度方向平均分布,各自占据1/3长度径向大小。输入端位于输出端两侧,输入端含有两层压电陶瓷及所述内电极。输出端位于变压器中间,输出端为单层压电陶瓷结构。Another feature of the transformer is that it is a flat cuboid structure as a whole. The working effect of the device can be obviously improved through the size optimization technology. The length, width and height of the optimized device are 32:8:1.5. Two parts of input terminals and a part of output terminals are evenly distributed along the length direction of the transformer, each occupying 1/3 of the radial size of the length. The input end is located on both sides of the output end, and the input end contains two layers of piezoelectric ceramics and the inner electrode. The output end is located in the middle of the transformer, and the output end is a single-layer piezoelectric ceramic structure.
本发明的变压器,其又一特征在于:输入端两层压电陶瓷厚度相等,其金属内电极位于两层压电陶瓷中间。输入端为多层—体化共烧结构。Another feature of the transformer of the present invention is that the thickness of the two layers of piezoelectric ceramics at the input end is equal, and the metal inner electrode is located between the two layers of piezoelectric ceramics. The input end is a multi-layer-integrated co-fired structure.
本发明的变压器,其又一方面特征在于:所述变压器以得d31方式激励并沿长度方向产生驻波振荡,通过多层结构的不同振荡方向下的组合效果产生弯曲模式运动,进而采用弯曲模式正压电效应实现升压输出。振动模态包括低阶和高阶的振动模态。Another aspect of the transformer of the present invention is characterized in that: the transformer is excited in a d 31 manner and generates standing wave oscillation along the length direction, and the bending mode motion is generated through the combined effect of the multilayer structure in different oscillation directions, and then the bending mode is adopted. Mode positive piezoelectric effect to achieve boost output. Vibration modes include low-order and high-order vibration modes.
本发明的变压器,其又一方面特征在于:输入端至少包含两层压电陶瓷结构,所述压电陶瓷片在电学上并联,在机械结构上串联,从而进一步提高输出和输入电压之间的比例。Another aspect of the transformer of the present invention is characterized in that: the input end includes at least two layers of piezoelectric ceramic structures, and the piezoelectric ceramic sheets are electrically connected in parallel and mechanically connected in series, thereby further increasing the voltage between the output and the input voltage. Proportion.
本发明的变压器,其又一方面特征在于:所述两片压电陶瓷片为由轧膜法,流延法中的一种方法制成的不同厚度的陶瓷片。Another aspect of the transformer of the present invention is characterized in that: the two piezoelectric ceramic sheets are ceramic sheets of different thicknesses made by rolling film method or casting method.
本发明的变压器,其又一方面特征在于:陶瓷素胚和金属内电极的一体化结构是由热压工艺及加压烧结方法实现。Another aspect of the transformer of the present invention is characterized in that: the integrated structure of the ceramic blank and the metal inner electrode is realized by a hot pressing process and a pressure sintering method.
本发明的变压器,其又一方面特征在于:所述输入输出端压电陶瓷片为一体化烧结结构,包括输入端陶瓷素胚与铂内电极的共烧结构,以及与所述陶瓷片一体化烧结的银外电极。Another aspect of the transformer of the present invention is characterized in that: the piezoelectric ceramic sheet at the input and output ends is an integrated sintered structure, including a co-fired structure of a ceramic blank at the input end and a platinum inner electrode, and is integrated with the ceramic sheet Sintered silver outer electrodes.
本发明的多层共烧结构弯曲振动模式的压电升压变压器的制备方法如下:The preparation method of the piezoelectric step-up transformer of the multilayer co-fired structure bending vibration mode of the present invention is as follows:
1).利用轧膜法或流延法制备200微米厚度的压电陶瓷新鲜膜料。1). Prepare a piezoelectric ceramic fresh film material with a thickness of 200 microns by rolling film method or casting method.
2).输入端内电极采用丝网印刷方法涂布,内电极涂布面积与输入端面积相等,同样位于变压器长度方向左右两侧分布。2). The internal electrode of the input end is coated by screen printing method, and the coating area of the internal electrode is equal to the area of the input end, and is also distributed on the left and right sides of the transformer length direction.
3).利用热压工艺和加压烧结实现陶瓷素胚与铂金属内电极的一体化结构。3). The integrated structure of the ceramic green body and the platinum metal internal electrode is realized by using the hot pressing process and pressure sintering.
4).利用高温共烧工艺在变压器表面涂布银外电极。输入端外电极地线引出端连接金属内电极,分别位于变压器左右两侧。4).Using the high temperature co-firing process to coat the silver external electrode on the surface of the transformer. The lead-out ends of the ground wires of the external electrodes at the input end are connected to the metal internal electrodes, which are respectively located on the left and right sides of the transformer.
5).再在输入端和输出端所有外电极的中间位置分别焊接导线作为变压器的对外工作连线。5). Then weld wires in the middle of all the external electrodes at the input end and output end respectively as the external working connection of the transformer.
6).利用分步极化法对变压器的输入输出端进行极化。6). Polarize the input and output terminals of the transformer by using the step-by-step polarization method.
本发明所提供的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器,其特点是:变压器结构简单,制备方便,器件厚度小,工作频率范围低,耐老化,能有效地提高输出电压,并具有高电功率转换效率。The bending vibration mode piezoelectric ceramic step-up transformer with multi-layer integrated co-fired structure provided by the present invention is characterized in that the transformer has simple structure, convenient preparation, small device thickness, low operating frequency range, aging resistance, and can effectively improve output voltage, and has high electrical power conversion efficiency.
1.从制备工艺看,本发明采用轧膜或流延法制备新鲜陶瓷膜料,采用热压工艺以及一体化烧结方法制备多层结构压电升压变压器。结构简单,工艺手段成熟。1. From the perspective of the preparation process, the present invention adopts film rolling or casting method to prepare fresh ceramic film material, and adopts hot pressing process and integrated sintering method to prepare multilayer structure piezoelectric step-up transformer. The structure is simple and the technological means are mature.
2.从器件结构看,由于存在两部分输入端提供激励振荡,因而,器件的工作模态可以在低阶以及高阶均获得稳定的驻波振荡。同时减少寄生振动,降低能量消耗。2. From the perspective of the device structure, since there are two parts of the input end to provide excitation oscillation, the working mode of the device can obtain stable standing wave oscillation in both low-order and high-order. At the same time reduce parasitic vibration and reduce energy consumption.
3.从器件的振动产生以及机械能电转换方式看,由于采用压电系统d31横向长度伸缩模式,通过多层组合运动效果,在长度方向产生弯曲振荡,因而,可以获得较低的工作频率。同时,采用共烧方法和弯曲振荡模式,即使在器件厚度很薄的情况下,也使器件获得较高的机械能电能转换效率。3. From the perspective of the vibration generation of the device and the conversion of mechanical energy to electricity, due to the use of the piezoelectric system d 31 transverse length stretching mode, through the multi-layer combined motion effect, bending oscillations are generated in the length direction, so a lower operating frequency can be obtained. At the same time, the co-firing method and the bending oscillation mode are used to obtain high mechanical energy and electrical energy conversion efficiency of the device even when the thickness of the device is very thin.
4.从器件尺寸看,由于器件采用扁平长方体结构,因而实际所占用的空间小,便于装配在集成电路系统中充当小型电压调控器件。同时采用尺寸优化技术,器件具有好的工作效果。4. From the perspective of device size, since the device adopts a flat cuboid structure, the actual occupied space is small, and it is easy to assemble in an integrated circuit system as a small voltage regulation device. At the same time, the size optimization technology is adopted, and the device has a good working effect.
5.从压电变压器的激励方式看,其通过输入端多层结构分别产生的长度方向振荡效果的组合,而产生器件整体的弯曲振荡模式,进而在输出端以弯曲振荡模式的正压电效应将机械能转换为电能,并获得较高压输出。这也是本发明结构的关键所在:它使压电陶瓷升压变压器具有以上各优点,使升压变压器的设计和制作更趋灵活性。5. From the perspective of the excitation method of the piezoelectric transformer, the combination of the longitudinal oscillation effects generated by the multi-layer structure at the input end generates the overall bending oscillation mode of the device, and then the positive piezoelectric effect of the bending oscillation mode at the output end Convert mechanical energy into electrical energy and obtain higher voltage output. This is also the key point of the structure of the present invention: it enables the piezoelectric ceramic step-up transformer to have the above advantages, and makes the design and manufacture of the step-up transformer more flexible.
附图说明Description of drawings
以下参照附图用具体实例来进一步阐明本发明结构的特征和优点。The features and advantages of the structure of the present invention will be further clarified below with specific examples with reference to the accompanying drawings.
图1为Rosen型压电陶瓷升压变压器的结构示意图。Figure 1 is a structural schematic diagram of a Rosen-type piezoelectric ceramic step-up transformer.
图2为多层压电陶瓷升压变压器的结构示意图。Fig. 2 is a schematic structural diagram of a multilayer piezoelectric ceramic step-up transformer.
图3为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的结构示意图。Fig. 3 is a structural schematic diagram of a piezoelectric ceramic step-up transformer in a bending vibration mode with a multi-layer integrated co-fired structure according to the present invention.
图4为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的纵向截面示意图。Fig. 4 is a schematic longitudinal cross-sectional view of a piezoelectric ceramic step-up transformer in bending vibration mode with a multi-layer integrated co-fired structure of the present invention.
图5为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的左右输出端截面示意图,图中箭头所指为压电陶瓷极化方向。5 is a cross-sectional view of the left and right output ends of the bending vibration mode piezoelectric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention, and the arrows in the figure indicate the polarization direction of the piezoelectric ceramic.
图6(a)为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的第三阶弯曲振荡形变模式示意图。Fig. 6(a) is a schematic diagram of the third-order bending oscillation deformation mode of the bending vibration mode piezoelectric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention.
图6(b)为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的第三阶弯曲振荡应力分布示意图。Fig. 6(b) is a schematic diagram of the third-order bending oscillation stress distribution of the bending vibration mode piezoelectric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention.
图7为本发明的多层一体化共烧结构的弯曲振动模式电陶瓷升压变压器的纵向振动的等效电路示意图。Fig. 7 is a schematic diagram of an equivalent circuit of longitudinal vibration of the bending vibration mode electric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention.
图8为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器在负载电阻一定(1187欧姆),输入电压一定(有效值0.7伏特)的条件下,其输入输出电压的升压比随工作频率变化的曲线示意图。Fig. 8 is the bending vibration mode piezoelectric ceramic step-up transformer of multi-layer integrated co-fired structure of the present invention under the condition of constant load resistance (1187 ohms) and constant input voltage (effective value 0.7 volts), its input and output voltage Schematic diagram of the curve of boost ratio versus operating frequency.
图9为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器在负载电阻一定(1187欧姆),输入电压一定(有效值0.7伏特)的条件下,其输出电功率随工作频率变化的曲线示意图。Fig. 9 is the bending vibration mode piezoelectric ceramic step-up transformer of multi-layer integrated co-fired structure of the present invention under the conditions of constant load resistance (1187 ohms) and constant input voltage (effective value 0.7 volts), its output electric power varies with the working Schematic diagram of the curve of frequency change.
图10为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器在负载电阻一定(1187欧姆),输入电压一定(有效值0.7伏特)的条件下,其电功率传输效率随工作频率变化的曲线示意图。Fig. 10 shows the bending vibration mode piezoelectric ceramic step-up transformer with multilayer integrated co-fired structure of the present invention under the conditions of constant load resistance (1187 ohms) and constant input voltage (effective value 0.7 volts), its electric power transmission efficiency varies with Schematic diagram of the curve of the operating frequency change.
图11为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器在工作频率一定(近似205K赫兹)的条件下,其输入输出电压的升压比随负载电阻变化的曲线示意图。Fig. 11 is the curve of the step-up ratio of the input and output voltage changing with the load resistance under the condition of constant operating frequency (approximately 205K Hz) of the bending vibration mode piezoelectric ceramic step-up transformer with multi-layer integrated co-fired structure of the present invention schematic diagram.
具体实施方式Detailed ways
参照图3所示,本发明所提供的为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器,它包括:位于变压器长度方向两侧的两个输入端陶瓷及金属内电极共烧结构,位于变压器长度方向中间位置的输出端单层压电陶瓷结构。输入端与输出端为一体化共烧结构。输入端内电极采用耐高温烧结的铂电极。输入端及输出端的外表面设置外电极。外电极分别位于变压器的上下表面以及左右两侧。其中输入端地线引出端的外电极位置位于变压器的长度方向左右两侧,其连接于输入端两层压电陶瓷间的共烧内电极。输入端火线引出端外电极以及输出端外电极分别位于变压器上下表面,并沿变压器表面长度方向按照1/3长度关系均匀涂布。外电极连接输入及输出端的引线。其特征在于,位于变压器左右两侧的压电变压器输入端,其两层压电陶瓷极化方向一致,均为垂直于内外电极所在平面,激励两层压电陶瓷的输入端电压通过外电极引线分别施加于两层已经极化的压电陶瓷片上,由于引线的连接方式造成输入端两层压电陶瓷片上的电压方向刚好相反,从而产生振动方向相反的长度方向伸缩运动,两方面的长度方向伸缩运动的合成效果,即构成弯曲模式振荡。输出端极化方向与输入端平行,根据压电陶瓷的正压电效应,将弯曲振荡的机械能转换为电能形式输出。Referring to Fig. 3, what the present invention provides is the bending vibration mode piezoelectric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention, which includes: two input end ceramics and metal The internal electrode co-fired structure, the single-layer piezoelectric ceramic structure at the output end located in the middle of the transformer length direction. The input end and output end are integrated co-firing structure. The inner electrode of the input end adopts a high temperature resistant sintered platinum electrode. External electrodes are arranged on the outer surfaces of the input end and the output end. The external electrodes are respectively located on the upper and lower surfaces and the left and right sides of the transformer. The external electrodes of the ground wire lead-out end of the input end are located on the left and right sides of the transformer in the length direction, and are connected to the co-fired internal electrodes between the two layers of piezoelectric ceramics at the input end. The outer electrodes of the live wire lead-out end of the input end and the outer electrodes of the output end are respectively located on the upper and lower surfaces of the transformer, and are evenly coated along the length direction of the transformer surface according to a 1/3 length relationship. The external electrodes are connected to the lead wires of the input and output ends. It is characterized in that the piezoelectric transformer input terminals located on the left and right sides of the transformer have the same polarization direction of the two layers of piezoelectric ceramics, both of which are perpendicular to the plane where the inner and outer electrodes are located, and the voltage at the input terminals of the excitation two layers of piezoelectric ceramics passes through the leads of the outer electrodes They are respectively applied to two layers of polarized piezoelectric ceramic sheets. Due to the connection method of the lead wires, the voltage directions on the two layers of piezoelectric ceramic sheets at the input end are just opposite, resulting in a stretching motion in the length direction opposite to the vibration direction. The length direction of the two aspects The synthetic effect of the stretching motion, that constitutes the bending mode oscillations. The polarization direction of the output end is parallel to the input end, and according to the positive piezoelectric effect of piezoelectric ceramics, the mechanical energy of bending oscillation is converted into electrical energy for output.
本发明的压电升压变压器为扁平长方体,其尺寸优化后的长度,宽度,及厚度之比大致为:32∶8∶1.5。The piezoelectric step-up transformer of the present invention is a flat cuboid, and the ratio of its length, width, and thickness after size optimization is roughly 32:8:1.5.
本发明的压电升压变压器以d31横向长度方向振动模式激励,以弯曲振荡模式实现升压输出,振动模态包括低阶和高阶的振动模态。The piezoelectric step-up transformer of the present invention is excited by the vibration mode in the d 31 transverse length direction, and realizes boost output by the bending oscillation mode, and the vibration modes include low-order and high-order vibration modes.
本发明的压电升压变压器的输入端为多层结构,输入端两片压电陶瓷在电学上互相并联,输入和输出端各陶瓷片在机械上互相串联。The input end of the piezoelectric step-up transformer of the present invention has a multi-layer structure, two piezoelectric ceramics at the input end are electrically connected in parallel, and the ceramic sheets at the input and output ends are mechanically connected in series.
在本发明中,压电陶瓷新鲜磨料采用榨膜法或流延法制备,再通过热压及加压烧结方法实现其一体化结构,表面银外电极采用高温共烧工艺制备。In the present invention, fresh abrasive materials for piezoelectric ceramics are prepared by extrusion film method or tape casting method, and then their integrated structure is realized by hot pressing and pressure sintering methods, and the surface silver external electrodes are prepared by high temperature co-firing process.
在本发明中,位于变压器左右两侧的压电变压器输入端,其两层压电陶瓷极化方向一致,均为垂直于内外电极所在平面,以横向d31振动模式激励。激励两层压电陶瓷的输入端电压分别施加于两层已经极化的压电陶瓷片上,极化方向如图3或4中P所示,方向刚好相反,从而产生振动方向相反的长度方向伸缩运动,两方面的长度方向伸缩运动的合成效果,即构成弯曲模式振荡。输出端极化方向与输入端平行,根据压电陶瓷的正压电效应,将弯曲振荡的机械能转换为电能形式输出。In the present invention, the input ends of the piezoelectric transformer located on the left and right sides of the transformer have the same polarization direction of the two layers of piezoelectric ceramics, both of which are perpendicular to the plane where the inner and outer electrodes are located, and are excited in the transverse d 31 vibration mode. The input terminal voltages for exciting the two layers of piezoelectric ceramics are respectively applied to the two layers of polarized piezoelectric ceramics. The polarization direction is shown as P in Figure 3 or 4, and the direction is just opposite, so that the longitudinal direction of the vibration direction is opposite. The motion, the composite effect of both lengthwise stretching motions, constitutes bending mode oscillations. The polarization direction of the output end is parallel to the input end, and according to the positive piezoelectric effect of piezoelectric ceramics, the mechanical energy of bending oscillation is converted into electrical energy for output.
本发明的多层共烧结构弯曲振动模式的压电升压变压器的制备方法包括:The preparation method of the piezoelectric step-up transformer of the multilayer co-fired structure bending vibration mode of the present invention comprises:
1).利用榨膜法或流延法制备200微米厚度的压电陶瓷新鲜膜料。根据设计要求,按一定尺寸对膜料进行切割。1). Prepare a piezoelectric ceramic fresh membrane material with a thickness of 200 microns by squeezing the membrane method or casting method. According to the design requirements, the membrane material is cut according to a certain size.
2).输入端内电极采用丝网印刷方法涂布,并在80摄氏度条件下烘干。2). The inner electrode of the input terminal is coated by screen printing and dried at 80 degrees Celsius.
3).利用热压工艺和加压烧结实现陶瓷素胚与铂金属内电极的一体化结构。3). The integrated structure of the ceramic green body and the platinum metal internal electrode is realized by using the hot pressing process and pressure sintering.
4).利用高温共烧工艺在变压器表面涂布银外电极。其中输入端外电极地线引出端连接金属内电极,分别位于变压器左右两侧。外电极涂布位置如图3中深灰色阴影部分所示。4).Using the high temperature co-firing process to coat the silver external electrode on the surface of the transformer. Wherein, the lead-out end of the external electrode ground wire of the input terminal is connected to the metal internal electrode, which are respectively located on the left and right sides of the transformer. The coating position of the external electrode is shown in the dark gray shaded part in Figure 3.
5).再在输入端和输出端所有外电极的中间位置分别焊接导线作为变压器的对外工作连线。5). Then weld wires in the middle of all the external electrodes at the input end and output end respectively as the external working connection of the transformer.
6).利用分步极化法对变压器得输入输出端进行极化。6).Use the stepwise polarization method to polarize the input and output ends of the transformer.
实施例:Example:
以硬性掺杂PZT基压电陶瓷材料作为本发明结构的基本材料,制备陶瓷新鲜膜料,印刷铂内电极后,通过热压工艺及加压烧结方法制备变压器粗胚,被覆上银电极后在高温下烧结该银电极,在最小应变位置焊接导线,再分步极化该变压器的输入输出端。得到最终产品:多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器,其尺寸如下:The hard-doped PZT-based piezoelectric ceramic material is used as the basic material of the structure of the present invention to prepare a fresh ceramic membrane material. After printing the platinum inner electrode, the transformer rough blank is prepared by hot pressing process and pressure sintering method, and then coated with silver electrode. The silver electrodes are sintered at high temperature, the wires are welded at the position of minimum strain, and the input and output terminals of the transformer are polarized step by step. The final product is obtained: a multilayer integrated co-fired structure piezoelectric ceramic step-up transformer with bending vibration mode, and its dimensions are as follows:
长度L=32毫米,Length L = 32 mm,
厚度H=1.5毫米,Thickness H = 1.5 mm,
宽度W=8毫米。Width W = 8mm.
对上述实施例中所采用的PZT材料,其所制备的单层压电陶瓷性能如下:压电耦合系数d33=320,机械品质因数Qm=960,介电系数ε33(1KHz)=1300。For the PZT materials used in the above examples, the properties of the prepared single-layer piezoelectric ceramics are as follows: piezoelectric coupling coefficient d 33 =320, mechanical quality factor Q m =960, dielectric coefficient ε 33 (1KHz)=1300 .
图6所示为本发明的多层一体化共烧结构的弯曲振动模式压电陶瓷升压变压器的输入及输出端压电振动的等效电路。对该电路进行测量,得到结果为:Fig. 6 shows the equivalent circuit of piezoelectric vibration at the input and output ends of the bending vibration mode piezoelectric ceramic step-up transformer of the multi-layer integrated co-fired structure of the present invention. The circuit is measured and the result is:
输入端:共振频率=204.8千赫,反共振频率=221.18千赫,Input: resonant frequency = 204.8 kHz, anti-resonant frequency = 221.18 kHz,
压电耦合系数d33=160,等效内电阻=2.54欧姆,Piezoelectric coupling coefficient d 33 = 160, equivalent internal resistance = 2.54 ohms,
等效电感=0.79微亨,等效电容Ca=850皮法Equivalent inductance = 0.79 microhenry, equivalent capacitance C a = 850 picofarads
等效电容Cb=4970皮法,机械品质因数Qm=436.13Equivalent capacitance C b = 4970 picofarads, mechanical quality factor Q m = 436.13
输出端:共振频率=196.1千赫,反共振频率=209.7千赫,Output: resonant frequency = 196.1 kHz, anti-resonant frequency = 209.7 kHz,
压电耦合系数d33=300,等效内电阻=16.3欧姆,Piezoelectric coupling coefficient d 33 = 300, equivalent internal resistance = 16.3 ohms,
等效电感=7.2微亨,等效电容Ca=89.9皮法Equivalent inductance = 7.2 microhenries, equivalent capacitance C a = 89.9 picofarads
等效电容Cb=667皮法,机械品质因数Qm=587.5Equivalent capacitance C b = 667 picofarads, mechanical quality factor Q m = 587.5
从以上测量结果,可以看到采用共烧手法,引入内电极对压电器件整体的性能有一定影响,如压电耦合系数或贡械品质因数都有一定程度的下降,但由于下降幅度不大,因而在实际工作中对器件的工作表现不会造成妨碍。From the above measurement results, it can be seen that the co-firing method and the introduction of the inner electrode have a certain impact on the overall performance of the piezoelectric device, such as the piezoelectric coupling coefficient and the mechanical quality factor have decreased to a certain extent, but due to the small decrease , so it will not hinder the performance of the device in actual work.
图8示出在测量输入有效电压为0.7伏特时,负载电阻为1187欧姆条件下,输入输出电压比例随工作频率的变化。由图可见,在197.3千赫,接近共振频率位置,输入输出电压比例有最高值,达到5.7。Fig. 8 shows the variation of the input-output voltage ratio with the operating frequency under the condition that the measured input effective voltage is 0.7 volts and the load resistance is 1187 ohms. It can be seen from the figure that at 197.3 kHz, close to the resonance frequency, the input-to-output voltage ratio has the highest value, reaching 5.7.
图9示出在测量输入有效电压为0.7伏特时,负载电阻为1187欧姆条件下,输出电功率值随工作频率的变化。由图9可见,在197千赫,接近共振频率位置,输出电功率有最高值,达到31.5微瓦特。Fig. 9 shows the variation of the output electric power value with the operating frequency under the condition that the measured input effective voltage is 0.7 volts and the load resistance is 1187 ohms. It can be seen from Fig. 9 that at 197 kHz, close to the resonant frequency, the output electric power has the highest value, reaching 31.5 microwatts.
图10示出在测量输入有效电压为0.7伏特时,负载电阻为1187欧姆条件下,电能传输效率随工作频率的变化。由图可见,在205千赫,接近反共振频率位置,能量传输效率有最高值,达到80.17%。Fig. 10 shows the variation of power transmission efficiency with operating frequency under the condition that the measured input effective voltage is 0.7 volts and the load resistance is 1187 ohms. It can be seen from the figure that at 205 kHz, close to the anti-resonance frequency, the energy transmission efficiency has the highest value, reaching 80.17%.
图11示出在测量中,当输入工作频率大致不变的条件下,输入与输出电压有效值的比例随负载电阻的变化。由图可见,负载电阻越高,输入输出电压的升压比变越高,当负载电阻达到4兆欧姆时,升压比基本达到稳定最高值,约9。以上压电陶瓷变压器性能测量过程中,压电陶瓷变压器的温度未发生变化。Figure 11 shows that in the measurement, when the input operating frequency is roughly constant, the ratio of the effective value of the input voltage to the output voltage changes with the load resistance. It can be seen from the figure that the higher the load resistance is, the higher the step-up ratio of the input and output voltage becomes. When the load resistance reaches 4 megaohms, the step-up ratio basically reaches a stable maximum value of about 9. During the performance measurement of the above piezoelectric ceramic transformer, the temperature of the piezoelectric ceramic transformer did not change.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN01120848.1A CN1217427C (en) | 2001-05-30 | 2001-05-30 | Bending Vibration Mode Piezoelectric Step-Up Transformer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN01120848.1A CN1217427C (en) | 2001-05-30 | 2001-05-30 | Bending Vibration Mode Piezoelectric Step-Up Transformer |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1388596A CN1388596A (en) | 2003-01-01 |
CN1217427C true CN1217427C (en) | 2005-08-31 |
Family
ID=4664327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN01120848.1A Expired - Lifetime CN1217427C (en) | 2001-05-30 | 2001-05-30 | Bending Vibration Mode Piezoelectric Step-Up Transformer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1217427C (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100539229C (en) * | 2004-05-19 | 2009-09-09 | 中国科学院上海硅酸盐研究所 | The multilayer chip piezoelectric ceramic is from manifold type step-down transformer and preparation method thereof |
CN100502075C (en) * | 2006-02-14 | 2009-06-17 | 先进自动器材有限公司 | Piezoelectric devices with amplifying means |
CN101872834B (en) * | 2010-05-20 | 2014-04-02 | 中山大学 | Flexual vibration mode piezoelectric transformer |
CN109888086A (en) * | 2019-02-27 | 2019-06-14 | 北京信息科技大学 | A kind of piezoelectric transformer based on shear vibration and preparation method thereof |
CN113162461B (en) * | 2021-04-15 | 2024-05-17 | 北京大学 | Three-dimensional multilayer cofiring piezoelectric ceramic intelligent structure and programmable multi-vibration mode excitation method |
-
2001
- 2001-05-30 CN CN01120848.1A patent/CN1217427C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1388596A (en) | 2003-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1418380A (en) | Composite piezoelectric transformer | |
CN1589504A (en) | Multilayer Piezoelectric Transformer | |
CN1217427C (en) | Bending Vibration Mode Piezoelectric Step-Up Transformer | |
JP3170642B1 (en) | Piezoelectric ceramic transformer and circuit for driving cold cathode fluorescent tube using the same | |
CN104882277B (en) | The method of the controllable electric capacity of layered composite structure and piezoelectric stress regulation and control dielectric | |
CN1160804C (en) | Piezoelectric transformer | |
JP2001316181A (en) | Piezoelectric ceramic composition, and high power piezoelectric transformer | |
JP3706509B2 (en) | Piezoelectric transformer | |
JP2001316180A (en) | Piezoelectric ceramic composition, and high power piezoelectric transformer | |
CN1211815C (en) | Self-coupling piezoelectric ceramic step-down transformer and preparation method thereof | |
JPH11163433A (en) | Laminating piezoelectric ceramics vibrator and manufacture thereof | |
JP3551078B2 (en) | Multilayer piezoelectric transformer and electronic equipment using it | |
CN107196554A (en) | A kind of fractal structure vibration transducer and its manufacture method based on piezoelectric ceramics | |
JP4166867B2 (en) | Piezoelectric transformer element and casing method thereof | |
JP2940282B2 (en) | Thickness vertical vibration piezoelectric transformer and method of driving the same | |
CN101404318A (en) | Circular piezoelectric transformer | |
Hemsel et al. | Model based analysis of piezoelectric transformers | |
CN1700485A (en) | Multilayer chip piezoelectric ceramic self-coupling step-down transformer and manufacturing method thereof | |
CN1551381A (en) | Piezoelectric transducer, power supply circuit and lighting device using the same | |
JP4743936B2 (en) | Piezoelectric transformer and converter | |
JP2003017772A (en) | Piezoceramic transformer circuit | |
JP2003017771A (en) | Piezoelectric transformer | |
TWI345322B (en) | Piezoelectric transformer | |
CN112803830B (en) | A dumbbell piezoelectric force-electric transducer | |
JP3445552B2 (en) | Piezoelectric transformer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20050831 |