CN121026889A - A device, system, and method for detecting and treating exhaust dust in gallium nitride production. - Google Patents
A device, system, and method for detecting and treating exhaust dust in gallium nitride production.Info
- Publication number
- CN121026889A CN121026889A CN202511577154.1A CN202511577154A CN121026889A CN 121026889 A CN121026889 A CN 121026889A CN 202511577154 A CN202511577154 A CN 202511577154A CN 121026889 A CN121026889 A CN 121026889A
- Authority
- CN
- China
- Prior art keywords
- dust collecting
- dust
- flue gas
- air curtain
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The invention discloses an exhaust dust detection device, a processing system and a method for gallium nitride production, which relate to the technical field of semiconductor devices and comprise a collection assembly and a testing assembly, wherein the collection assembly comprises a dust collecting pipe and an adjusting assembly, the input end of the dust collecting pipe is communicated with the output end of dust collecting equipment, a fan is arranged in the dust collecting pipe and is used for generating an annular air curtain, the air curtain is used for dividing the dust collecting pipe and the inside of the testing component into a central area and an annular edge area, the air curtain is also used for collecting and lifting air pressure of a collecting area in the testing component, the adjusting component is used for changing the collecting position of the air curtain, and the testing component is used for receiving flue gas output by the collecting component and counting particles in the flue gas so as to test the accuracy of the quantity and concentration data of dust acquired by the component.
Description
Technical Field
The invention relates to the technical field of semiconductor devices, in particular to an exhaust dust detection device, a processing system and a processing method for gallium nitride production.
Background
Gallium nitride (GaN) is a core of third generation semiconductor materials and plays an important role in the fabrication of optoelectronic and microwave devices. The production process, especially Metal Organic Chemical Vapor Deposition (MOCVD) technology, can produce superfine dust and various gaseous by-products, which are mainly made of gallium nitride, in exhaust gas. The dust particle sizes are mainly distributed on submicron and nanometer levels, and the dust particle sizes form significant challenges for production process safety, environmental pollution control and equipment performance evaluation. Therefore, accurate detection of exhaust dust has become an indispensable technical link in the industry.
The existing monitoring scheme for the dust concentration in the waste gas of the gallium nitride production process mainly comprises two types of online monitoring and offline analysis. The off-line analysis generally adopts a gravimetric (gravimetric method) method such as a conical element oscillation microbalance (TEOM) method, and the like, and the mass concentration is determined by directly measuring the mass change of the collected particles, so that the accuracy is high, but the response is slow, and the real-time monitoring cannot be realized. On-line monitoring is mainly based on the light scattering principle, namely, the quantity concentration and the particle size distribution of the particles are inverted by measuring the scattered light intensity generated by the particles under the irradiation of laser. A common device used in such methods is an air particle counter.
In the using process of the air particle counter, negative pressure is generated in the air particle counter to suck the air at the air inlet position into the detection cavity, meanwhile, a high-intensity incident light source and a photoelectric detector exist in the detection cavity, scattered light is captured by the photoelectric detector and converted into electric pulses by utilizing particle scattering laser, and the times of the pulses are counted. To ensure accuracy and representativeness of the acquired data, solutions for isokinetic sampling and representative position sampling are often used in the prior art. However, in the actual operation process, along with the flow of the waste gas generated in gallium nitride production, the dust distribution carried in the waste gas is easy to generate uneven distribution in time and space, and if the waste gas is quantitatively collected by using the test cavity, although the problem of uneven distribution of the dust driven by the flow of the waste gas can be solved, the dust is inevitably settled in the test cavity and the communication pipeline in the actual operation process, so that the finally obtained quantity concentration deviates from the actual quantity concentration.
Disclosure of Invention
The invention aims to provide an exhaust dust detection device, a processing system and a processing method for gallium nitride production, so as to solve the problems.
The invention is realized by the following technical scheme:
The utility model provides an exhaust dust detection device for gallium nitride production, includes collection subassembly and test subassembly, collection subassembly includes dust collecting pipe and adjusting part, the input of dust collecting pipe communicates with the output of dust collecting equipment, be equipped with the fan in the dust collecting pipe, the fan is used for producing and is annular air curtain, the air curtain is used for with dust collecting pipe and test subassembly inside is cut apart into central region and is annular marginal region, the air curtain is still used for gathering and promoting the atmospheric pressure of gathering the region in test subassembly inside, adjusting part is used for changing the position of gathering of air curtain, test subassembly is used for receiving the flue gas of collection subassembly output and to count the particulate matter in the flue gas, test subassembly intercommunication has processing assembly, processing assembly is used for classifying and handling the flue gas;
The system comprises a dust collecting pipe, a processing component, a control system and a control system, wherein the dust collecting pipe is used for collecting dust, the control system is used for obtaining the volume of the flue gas entering the dust collecting pipe, calculating the first quantity concentration of the particulate matters by combining the quantity of the particulate matters, controlling the processing component to perform secondary processing on the flue gas when the first quantity concentration is larger than or equal to a set threshold value, and controlling the processing component to discharge the flue gas when the first quantity concentration is smaller than the set value.
According to the scheme, through the design of the air curtain, the air curtain is utilized to isolate the smoke, the dust collecting pipe and the like, and the smoke adhesion or sedimentation is reduced to the inside of the dust collecting pipe, so that the smoke and dust content actually entering the testing component is lower than the dust content of the smoke processed by the dust collecting equipment due to the dust adhesion or sedimentation, and the accuracy of data acquired by the testing component is affected.
Meanwhile, the scheme is further characterized in that the air curtain is used for collecting the inside of the testing assembly, so that the flow rate of gas entering the testing assembly and the uniformity of particle distribution are reduced, and the influence of the flow rate of flue gas and the like on the testing result is reduced.
Further, the test assembly comprises a test chamber and an air particle counter, the adjusting assembly is installed in the test chamber, the test chamber is communicated with the output end of the dust collecting pipe, the air inlet of the air particle counter is arranged in the test chamber, and the air inlet of the air particle counter and the dust collecting pipe are coaxially arranged.
Further, the regulation subassembly include the pump subassembly with set up in the test chamber keep away from the ring channel of the inside wall of dust collecting pipe, the lateral wall of ring channel articulates there is a plurality of baffles, and is equipped with on the baffle lateral wall and link the board, it has a plurality of cavitys to link to open in the board, just the cavity lateral wall all opens there is the deformation groove, the deformation groove is used for guiding cavity lateral wall deformation, adjacent the cavity intercommunication each other, the intercommunication department of adjacent cavity is equipped with the spacer of memory metal material, the phase transition temperature of spacer is the ladder type setting, it has the storage chamber to open in the test chamber lateral wall, the storage chamber with arbitrary cavity intercommunication, the spacer is used for changing the aperture of adjacent cavity intercommunication department, the phase transition temperature of spacer increases along with the spacer with the reduction of the distance of storage chamber, sliding connection has the piston in the storage chamber, the storage intracavity is filled with the particulate matter, the pump subassembly is used for changing the position of piston, the piston is used for promoting the particulate matter gets into or keeps away from the cavity, the particulate matter is used for adjusting and prescribing a limit to the shape of linking the board.
Further, the collecting assembly further comprises a plurality of electrode plates, wherein the electrode plates are used for generating at least two electric fields in the dust collecting tube, and the electric fields are completely offset at the axial center position of the dust collecting tube. According to the scheme, through the design that the electric fields are offset at the axis position of the base layer pipe, the influence of the electric fields on dust flowing in the center of the dust collecting pipe is reduced, and therefore the probability that the electric fields promote the dust to pass through the air curtain along with the gas flow is reduced.
Further, a first filter screen is arranged in the edge area of the dust collecting pipe and is used for collecting particles in the edge area of the dust collecting pipe.
Further, the control system is also configured to obtain a second number concentration of particles collected by the first screen and to modify the first number concentration based on the second number concentration.
Further, the dust collecting pipe is internally provided with a temperature adjusting component, the temperature adjusting component is used for changing the temperature of the air curtain, the control system is further used for obtaining the proper test flow rate of the air particle counter, obtaining the flow rate of the mixed gas of the air curtain and the flue gas entering the dust collecting pipe, when the flow rate of the mixed gas is larger than the proper test flow, the control system reduces the included angle between the air curtain and the horizontal plane when the air curtain is converged by controlling the temperature adjusting component, and when the flow rate of the mixed gas is smaller than the schematic test flow rate, the control system increases the included angle between the air curtain and the horizontal plane when the air curtain is converged by controlling the temperature adjusting component until the flow rate of the mixed gas is equal to the proper test flow rate, and the control system maintains the temperature of the air curtain by controlling the temperature adjusting component.
Further, the test assembly further comprises a linear actuator, the linear actuator is mounted on the outer side of the test chamber, the linear actuator is used for adjusting the linear distance between the input end of the air particle counter and the output end of the dust collecting pipe, and the control system is further used for controlling the linear actuator to adjust the position of the input end of the air particle counter while controlling the temperature adjusting assembly to adjust the included angle between the air curtain and the horizontal plane when the air curtain is converged.
Further, the exhaust dust treatment system for gallium nitride production based on the exhaust dust detection device for gallium nitride production comprises a cooling unit, a washing unit, a detection unit and a post-purification unit;
the cooling unit is used for reducing the temperature of the waste gas discharged by the gallium nitride production equipment to obtain pretreated gas;
The washing unit is used for carrying out dust removal treatment on the pretreatment gas and eluting organic metal, volatile organic matters and ammonia in the pretreatment gas to obtain flue gas;
The detection unit is used for acquiring a first quantity concentration of dust in the flue gas by using the detection device, judging whether the first quantity concentration meets the emission requirement, discharging the flue gas into the washing unit for secondary treatment when the first quantity concentration does not meet the emission requirement, and discharging the flue gas into the rear purification unit when the first quantity concentration meets the emission requirement;
and the rear purification unit is used for discharging the flue gas after neutralizing the pH value of the flue gas.
Further, the exhaust dust detection method for gallium nitride production based on the exhaust dust detection device for gallium nitride production comprises the following steps:
s1, receiving flue gas processed by dust collecting equipment;
S2, driving the flue gas to collide, and promoting the uniform distribution of the flue gas;
S3, adjusting the flow rate of the flue gas until the flow rate of the flue gas falls into a proper flow rate range of the air particle counter, guiding the flue gas into the air particle counter, and counting dust in the flue gas by using the air particle counter;
and S4, judging whether the smoke meets the emission requirement or not according to the counting result, discharging the smoke into the next treatment process when the smoke meets the emission requirement, and discharging the smoke into dust collecting equipment again for treatment when the smoke does not meet the emission requirement.
Compared with the prior art, the invention has the following advantages and beneficial effects:
1. According to the invention, through the design of the air curtain, the air curtain is utilized to isolate the flue gas from the inner wall of the dust collecting pipe so as to prevent dust in the flue gas from adhering to or settling in the dust collecting pipe in the flowing process, thereby effectively avoiding the situation that the number concentration of the dust in the flue gas entering the air particle counter is smaller than the number concentration of the dust in the flue gas actually discharged into the device. Meanwhile, due to the design of the air curtain, smoke entering the device can be drained, the condition of backflow and the like in the smoke flowing process is reduced, the working efficiency of the device is effectively improved, meanwhile, after the air curtain collides with the testing chamber, the direction of the air curtain is changed to be converged at the air inlet position of the air particle counter, and the flow velocity at the converging position is reduced and the pressure is increased along with the mutual collision of the air curtain, so that the influence on the counting accuracy of the air counter caused by overlarge smoke flow velocity is avoided.
Compared with the scheme that the air inlet of the air counter is directly arranged at the output end of the dust collecting device, the invention can effectively avoid the problem that the acquired data of the air counter is not representative because of the non-uniform distribution of dust in space and time caused by vortex dead angles and the like in the smoke discharging process. And this scheme utilizes the air curtain to reduce the loss of flue gas flow in-process dust, thereby also makes this scheme in the face because restriction such as installation environment makes dust collecting equipment and test assembly installation distance far away thereby cause the longer circumstances of flue gas flow distance, also can ensure the accuracy of the data of finally acquireing to a certain extent to under the same condition, compare in prior art, this scheme is less and the accuracy is higher to the installation environment requirement.
2. According to the invention, through the design of the connecting plate, the spacer and the particles, the bending degree of the connecting plate is regulated and monitored by using the temperature, the particles are used for transmission and the shape of the connecting plate is limited, compared with the driving schemes such as an oil cylinder, dust is not easy to adsorb in the using process, the structure for driving in the scheme can be impacted by an air curtain in the using process, so that the dust adhesion of an adjusting component is further reduced, the accuracy of the finally obtained first mass fraction is influenced, the hinge position of the baffle is shielded by the design of the connecting plate, and the influence of the position of the hinge recess or the protrusion on the air curtain flow in the using process is effectively avoided.
3. In the invention, the design of the electric field and the first filter screen is also utilized, and the dust passing through the air curtain is collected and fixed through the electric field and the first filter screen so as to make up for the disadvantage that the air curtain can not completely isolate the gas exchange, compared with the prior art, the method can further improve the accuracy of the quantity and concentration of the finally obtained dust, compared with the scheme that dust is directly attached to the inner wall of the dust collecting pipe through the air curtain, the dust collecting pipe is convenient and fast because the dust is collected by the first filter screen and can be cleaned by removing the first filter screen after the dust collecting pipe is used.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:
FIG. 1 is a front view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a cross-sectional view taken along the direction A-A in FIG. 1;
FIG. 4 is a cross-sectional view taken along the direction B-B in FIG. 1;
FIG. 5 is a cross-sectional view taken along the direction C-C in FIG. 2;
FIG. 6 is a schematic diagram of the structure of the present invention;
fig. 7 is a flow chart of the present invention.
The reference numerals are 1, dust collecting pipe, 11, fan, 12, first filter screen, 2, testing room, 21, annular groove, 22, baffle, 23, connecting plate, 24, spacer, 25, cavity, 26, deformation groove, 27, connecting pipe, 3, air particle counter, 4, cooling unit, 41, heat exchanger, 42, cooling tower, 5, washing unit, 51, dust collecting device, 52, acid washing tower, 53, thermal oxidation furnace, 6, detecting unit, 61, three-way valve, 7, post-purifying unit, 71, active carbon adsorption tower.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention. It should be noted that the present invention is already in a practical development and use stage.
Example 1
As shown in fig. 1 to 5, the present embodiment includes a collection assembly and a test assembly.
The collecting assembly comprises a dust collecting pipe 1 and an adjusting assembly, the input end of the dust collecting pipe 1 is communicated with the output end of dust collecting equipment 51, a fan 11 is arranged in the dust collecting pipe 1, the fan 11 is fixedly connected with the inner side wall of the dust collecting pipe 1 through bolts, the fan 11 is used for generating an annular air curtain, the air curtain is used for dividing the dust collecting pipe 1 and the inside of the testing assembly into a central area and an annular edge area, the air curtain is also used for collecting and lifting air pressure in a collecting area in the testing assembly, the adjusting assembly is used for changing the collecting position of the air curtain, and the testing assembly is used for receiving flue gas output by the collecting assembly and counting particles in the flue gas.
The testing component comprises a testing chamber 2 and an air particle counter 3, the adjusting component is installed in the testing chamber 2, the testing chamber 2 is communicated with the output end of the dust collecting pipe 1, an air inlet of the air particle counter 3 is arranged in the testing chamber 2, and the air inlet of the air particle counter 3 and the dust collecting pipe 1 are coaxially arranged.
The lateral wall of test room 2 is equipped with the connecting tube 27, the input of connecting tube 27 and test room 2 intercommunication, the output of connecting tube 27 and fan 11's input intercommunication, just the input of connecting tube 27 is equipped with the second filter screen.
The adjusting component comprises a pump component and an annular groove 21 which is arranged on the inner side wall of the testing chamber 2 far away from the dust collecting pipe 1, the pump component used in the embodiment is a water pump, a plurality of baffles 22 are hinged on the side wall of the annular groove 21 in a damping way, a connecting plate 23 is arranged at the hinge position of the baffles 22 and the annular groove 21, the connecting plate 23 is made of elastic materials, the side wall of the connecting plate 23 close to the baffles 22 is fixedly adhered to the baffles 22, the side wall of the connecting plate 23 close to the annular cavity is fixedly adhered to the side wall of the annular cavity, a plurality of cavities 25 are arranged in the connecting plate 23, deformation grooves 26 are arranged on the side wall of the cavity 25 far away from the baffles 22, adjacent cavities 25 are mutually communicated, a spacer 24 made of memory metal is arranged at the communication position of the adjacent cavities 25, the spacer 24 is used for changing the aperture of storage chamber with deformation chamber intercommunication department, the austenite state of spacer 24 is the exhibition flat state to close the intercommunication between the cavity 25, the phase transition temperature of spacer 24 is the ladder type setting, open in the test chamber 2 lateral wall has the storage chamber, is located the cavity 25 of link plate 23 tip with the storage chamber intercommunication, the distance of spacer 24 and storage chamber is the smaller, and the phase transition temperature is higher, and along with the distance progressively increases, the phase transition temperature of spacer 24 progressively descends, sliding connection has the piston in the storage chamber, and the storage chamber of the one side that the piston is close to cavity 25 is filled with the particulate matter, and pump assembly and the storage chamber intercommunication of piston opposite side.
The test assembly is communicated with a processing assembly, the processing assembly is used for classifying and processing the flue gas, the processing assembly in the embodiment comprises an electromagnetic three-way valve 61, the input end of the electromagnetic three-way valve 61 is communicated with the output end of the stored cavity, the first output end of the electromagnetic three-way valve 61 is communicated with the input end of the next processing device, and the second output end of the electromagnetic three-way valve 61 is communicated with the input end of the dust collecting device 51.
The control system further comprises a control system, the control system comprises a controller, the pump assembly, the dust collecting device 51, the electromagnetic three-way valve 61, the air particle counter 3 and the fan 11 are electrically connected with the controller, the controller is used for obtaining the volume of the flue gas discharged from the output end of the dust collecting device 51 and entering the dust collecting tube 1, and calculating the first quantity concentration of the particulate matters by combining the quantity of the particulate matters, when the first quantity concentration is greater than or equal to a set threshold value, the second output end of the electromagnetic three-way valve 61 is controlled to be opened, so that the flue gas enters the dust collecting device 51 again to carry out secondary treatment on the flue gas, and when the first quantity concentration is smaller than the set value, the first output end of the electromagnetic three-way valve 61 is controlled to be opened to discharge the flue gas into next treatment equipment, so that the flue gas enters the next treatment flow.
The temperature adjusting component is further arranged in the dust collecting pipe 1 and used for changing the temperature of the air curtain, the temperature adjusting component comprises a semiconductor refrigerating piece, a coil is wound on the outer side wall of the semiconductor refrigerating piece, the coil is wound on the inner side wall of the dust collecting pipe 1, cooling liquid is filled in the coil, the control system further comprises a temperature sensor, the temperature sensor is arranged in the test chamber 2 and used for collecting temperature information of gas in the test chamber 2, the controller is further used for acquiring a proper test flow rate of the air particle counter 3 input by a user, acquiring the flow rate of mixed gas of the air curtain and flue gas entering the dust collecting pipe 1, controlling the pump component and the semiconductor refrigerating piece to work when the flow rate of the mixed gas is larger than the proper test flow rate, calculating the angle between the baffle 22 and the inner side wall of the test chamber 2 according to the temperature information, enabling the angle between the baffle 22 and the inner side wall of the test chamber 2 to be increased, reducing the included angle between the baffle 22 and the inner side wall of the test chamber 2 and the air curtain to be equal to the proper test flow rate of the mixed gas when the mixed gas is collected by the user, controlling the flow rate of the mixed gas to be smaller than the test flow rate of the air curtain and the air curtain to be equal to the proper flow rate of the mixed gas passing through the test piece, and the control of the air curtain is controlled to be equal to the air flow rate.
And the controller is also used for adjusting the flow rate of the air curtain according to the flow rate of the flue gas at the output end of the dust collecting device 51.
The test assembly further comprises a linear actuator (not shown in the figure), the linear actuator is an electric lever, the electric lever is fixedly connected with the outer side wall of the test chamber 2 through bolts, the output end of the electric lever is fixedly connected with the air particle counter 3 through bolts, the linear actuator is mounted on the outer side of the test chamber 2, and the linear actuator is used for adjusting the linear distance between the input end of the air particle counter 3 and the output end of the dust collecting tube 1.
The controller is also used for controlling the linear actuator to adjust the position of the input end of the air particle counter 3 while controlling the temperature adjusting assembly to adjust the included angle between the air curtain and the horizontal plane when the air curtain is assembled.
The device comprises a fan 11, a dust collecting pipe 1, a test chamber 2, a connecting pipe 27, a dust collecting pipe 1, a connecting pipe 27, a connecting pipe and a connecting pipe, wherein the fan 11 works to spray pressurized pure gas into the dust collecting pipe 1 and the test chamber 2, the connecting pipe 27 is designed to enable a part of gas output by the fan 11 to return to the fan 11 again, so that the gas output by the fan 11 is prevented from causing the air pressure in the test chamber 2 to rise suddenly, and further causing a safety accident, the gas flows along the inner side wall of the dust collecting pipe 1, the inner top wall, the inner bottom wall and the two side walls of the test chamber 2 to form an annular air curtain, and the discharged flue gas in the gallium nitride production process is discharged into the dust collecting pipe 1 intermittently after being processed by the dust collecting equipment 51, and at the moment, most of the flue gas is prevented from approaching the inner side walls of the dust collecting pipe 1 and the test chamber 2 due to the formation of the air curtain, so that the probability that dust particles carried by the flue gas in the flowing process is settled or adhered to the inner side walls of the dust collecting pipe 1 is reduced.
After the air curtain enters the test chamber 2, the side wall of the baffle 22 is impacted by the annular groove 21, the air curtain is attached to the side wall and the bottom wall of the annular cavity under the guiding action of the annular cavity, the direction of the air curtain is turned over after the air curtain passes through the bottom wall of the annular cavity, the air curtain continues to move along the side wall of the baffle 22 after the air curtain passes through the baffle 22, and finally, collision is collected in the test chamber 2, and at the moment of collision of the air curtain in all directions, the kinetic energy of the air curtain is mostly converted into pressure potential energy, namely, the speed of the air flow forming the air curtain is rapidly reduced, and local high pressure occurs in a collecting area.
Meanwhile, in the process, the air particle counter 3 continuously works, and the air at the position of the air inlet is driven to enter the air particle counter 3 by generating negative pressure at the air inlet, so that dust in the test chamber 2 is counted. At this time, the air pressure difference between the periphery of the air inlet and the position where the air curtain is converged is far higher than that of other positions in the test chamber 2, under the action of the air pressure difference, the air at the position where the air curtain is converged more easily enters the air particle counter 3, and because the air curtain impacts the inner wall of the annular groove 21, dust raising in the test chamber 2 is realized, dust settling or adhesion on the inner wall of the test chamber 2 is reduced, so that the acquired particle quantity is smaller, and the accuracy of the finally acquired dust quantity concentration is affected.
At the same time as the approximate number of dust particles inside the test chamber 2 is acquired by the air particle counter 3, the controller acquires the volume of the flue gas which it discharges into the dust collecting tube 1 by the dust collecting device 51, thereby acquiring the first number concentration.
And then comparing and calculating the first quantity concentration with a set threshold value (namely, the quantity concentration of the emission standard which needs to be met by the smoke), when the first quantity concentration is larger than or equal to the set threshold value, controlling the second output end of the electromagnetic three-way valve 61 to be opened, so that the smoke enters the dust collecting device 51 again to carry out secondary treatment on the smoke, and when the first quantity concentration is smaller than the set value, controlling the first output end of the electromagnetic three-way valve 61 to be opened, discharging the smoke into next treatment equipment, so that the smoke enters the next treatment flow.
In the above process, the controller can also continuously obtain the flow rate of the flue gas discharged into the dust collecting pipe 1 through the dust collecting device 51, when the flow rate of the flue gas is not less than the flow rate of the air curtain, the flow rate of the flue gas is less than the flow rate of the air curtain, but the difference value of the flow rate and the flow rate of the flue gas is not greater than a set value, the air curtain is difficult to achieve the effect of isolating the flue gas from the inside of the dust collecting pipe 1, the controller controls the fan 11 to increase the working power at the moment, so that the flow rate of the air curtain is ensured to be always greater than the flue gas, and the difference value of the air curtain and the air curtain is always greater than the set value.
Along with the increase of the air curtain flow velocity, the flow velocity increases after the air curtain impacts the annular groove 21, and at this time, if the angle of the baffle 22 is maintained, so that the air curtain is collected in the original position, the flow velocity of the collected air curtain along the radial direction of the test chamber 2 increases, and the flow velocity of the gas in the collection area increases, so that the flow velocity of the gas entering the air particle counter 3 increases, and the accuracy of the counting of the air particle counter 3 is affected.
At this moment, the controller controls the semiconductor refrigeration piece to work, simultaneously, temperature sensor continuously acquires the temperature information of the gas in the detection cavity, make the semiconductor refrigeration piece cool down to the inside coolant liquid of coil pipe, and cool down the inside gas of dust collecting pipe 1 through the coil pipe and handle, the air curtain after cooling is used in annular groove 21 and baffle 22, thereby cool down baffle 22 and link plate 23 that upper portion set up, along with the decline of link plate 23 temperature, the inside spacer 24 temperature of link plate 23 also descends thereupon, after the phase transition temperature of spacer 24 is less than the temperature, spacer 24 changes from austenite state into martensite state, simultaneously, the controller controls the pump assembly work, pump assembly pumps into liquid into the holding chamber, the liquid drives the piston motion, compared with the spacer 24 of austenite state, the spacer 24 of martensite state has less hardness, make the particulate matter more difficult to promote the spacer 24 deformation of austenite state, and more easily promote the spacer 24 deformation that is in martensite state, the cavity 25 intercommunication of spacer 24 both sides of martensite state, the particulate matter can get into corresponding cavity 25, along with the entering of particulate matter, the particulate matter promotes cavity 25, the recess 26 is concentrated in the design of recess 26, thereby the horizontal plane deformation of baffle 22 is changed along with the horizontal plane deformation of the recess 26, the horizontal plane deformation of the side wall is formed between the recess 22. The bending degree of the connecting plate 23 is influenced by the state of the spacers 24, the controller can judge the number of the spacers 24 in the martensitic state according to the temperature in the dust collecting pipe 1, and further judge the bending state of the connecting plate 23, so that the angle between the baffle 22 and the horizontal plane is judged, and the position of the air curtain is basically determined by the angle before the air curtain is converged, and the angle before the air curtain is converged is determined by the angle of the baffle 22, so that the position of the air curtain converged after impacting the annular groove 21 can be judged according to the temperature in the dust collecting pipe 1.
After the collecting position of the air curtain reaches a proper position, the controller adjusts the working state of the semiconductor refrigerating sheet again, so that all the spacers 24 return to the phase transition temperature, namely all the spacers 24 return to the state of closing the communication between the cavities 25, then the pump assembly pumps back the liquid in the storage cavity, the piston gradually resets, negative pressure appears on one side of the piston far away from the liquid, the particles at the communication position between the storage cavity and the cavities 25 are reset due to the negative pressure and the like, the air pressure in the cavities 25 is reduced, the air in each cavity 25 flows between the spacers 24 and the gaps of the adjacent side walls, the final cavities 25 are in the negative pressure state, the particles are mutually extruded under the action of the air pressure, the friction force among the particles is influenced, and the like, so that the particles are difficult to displace under the action of external force, the probability of deformation of the connecting plate 23 under the action of the air curtain is reduced, the damping hinge between the baffle 22 and the annular groove 21 is simultaneously acted, and the angle fixing of the baffle 22 is realized.
Therefore, after the air curtain flows through the attaching baffle 22, the angle of the air curtain when the air curtain is mutually converged and impacted is larger, and further more kinetic energy of the air curtain is converted into pressure potential energy, so that the probability that the detection accuracy of the air particle counter 3 is still influenced due to the fact that the flow speed of the air curtain after being converged is reduced.
At the same time, the controller controls the linear actuator to work, and adjusts the air inlet position of the air particle counter 3 so that the air inlet of the air particle counter 3 can be basically coincident with the air curtain collecting position.
Utilize particulate matter and pump assembly to adjust even board 23 deformation state and fix even board 23 shape in this scheme, compare in gas-driven scheme, particulate matter compression volume is little in this scheme, even board 23 stability after the deformation is high for even board 23 and baffle 22 are difficult for rocking under the effect of air curtain, and simultaneously compare in using traditional liquid driven scheme, this scheme is after accomplishing the adjustment to even board 23 form, even the inside driven particle of board 23 is difficult for taking place to slide under the exogenic action, further promotes baffle 22's stability.
Simultaneously, the cylinder, the electric cylinder, the oil cylinder and other linear driving devices are used under the conventional scheme, dust in surrounding gas is adsorbed by static electricity and greasy dirt in the working process of the cylinder body, so that the accuracy of the first quantity concentration is influenced, even if an elastic protective sleeve is sleeved outside the cylinder body, static electricity and greasy dirt generated in the cylinder body moving process are easily transferred to the protective sleeve, so that the dust is attached to the protective sleeve, and the problem that the dust is adsorbed in the surrounding gas due to static electricity or greasy dirt and the like in the working process of the adjusting component is effectively reduced.
Meanwhile, in the initial state, namely, the scheme that the included angle between the air curtains is close to one hundred eighty degrees through the baffle 22, although most of kinetic energy of the air curtains can be converted into pressure potential energy to reduce the influence of the gas flow speed on the accuracy of data acquired by the air particle counter 3, in the air curtain flow process, the air curtains tend to flow against the inner wall of the test chamber 2, so that the central area of the test chamber 2 is difficult to drive to flow, dust distribution at all positions of the test chamber 2 is not uniform enough, and therefore, the gas at the position of the air inlet of the air particle counter 3 is not representative.
Meanwhile, the baffle 22 can also enable any two air flows which form the air curtain to be symmetrical along the axis of the annular groove 21 to be maintained at a ninety-degree angle, and the directional kinetic energy of the air curtain can be more completely converted into turbulent energy at the moment, so that the air curtain and dust in the flue gas are promoted to be mixed, the uniform distribution of the dust in the test chamber 2 is promoted, and the representativeness of the data acquired by the air particle counter 3 is greatly improved. However, in the implementation process of the above scheme, the flow rate after the air curtain is collected cannot be adjusted, and when the air curtain faces the flue gas with the too high flow rate, the condition that the air particle counter 3 is affected by the too fast flow rate of the collected gas may occur.
From this, this scheme utilizes particulate matter and pump assembly to adjust the angle of baffle 22 through the design of baffle 22 and link plate 23 etc. to adjust the contained angle between the air curtain when converging, with the realization is reduced the air velocity of gas of air particle counter 3 air inlet and promote into the dust and distribute the uniformity and trade-off between the two, ensure that the gas that gets into air particle counter 3 is less to air particle counter 3 data acquisition's precision and representative influence.
Meanwhile, in the scheme, through the design of the temperature adjusting component, the temperature of the air particle counter 3 finally entering is adjusted in the process of adjusting the angle of the baffle 22, and the temperature of exhaust gas discharged in the gallium nitride processing process is higher and always exceeds the recommended temperature interval (the recommended interval is always 15-35 ℃) of the air particle counter 3, so that the influence of high-temperature flue gas on the internal structure of the air particle counter 3 is effectively reduced through the cooling treatment of the inside of the dust collecting pipe 1.
Through the design of air curtain in this scheme, utilize the air curtain to reduce in the flue gas dust by a wide margin and attach to dust collecting tube 1 and test chamber 2 inner wall, compare in prior art only use inside glossy test chamber 2 etc. this scheme can reduce the dust and attach on the inner wall, influence the accuracy of the data that air particle counter 3 gathered. And in this scheme, utilize link 23 deformation to drive baffle 22 and adjust the angle of air curtain, link 23 can also fill baffle 22 hinge sunken and arch through self elastic deformation simultaneously, when reducing the air curtain and pass through baffle 22 articulated position, the sunken or protruding position of hinge destroys the laminar flow state of air curtain, causes the air curtain layering, finally causes the air curtain to be difficult to collect the collision at air particle counter 3's air inlet.
Example 2
The difference from the above embodiment is that the collecting assembly further includes a plurality of electrode plates, the number of the electrode plates set in the embodiment is two, one of the electrode plates is mounted on the outer top wall of the dust collecting tube 1, the other electrode plate is mounted on the outer bottom wall of the dust collecting tube 1, the electric fields generated by the two electrode plates have the same electric field intensity and opposite directions, the electrode plates are used for generating at least two electric fields in the dust collecting tube 1, and the electric fields are completely offset from each other at the axial center position of the dust collecting tube 1. The edge area of the dust collecting pipe 1 is internally provided with a first filter screen 12, the first filter screens 12 are adhered and fixed with the inner side wall of the dust collecting pipe 1, and the first filter screens 12 are used for collecting particles in the edge area of the dust collecting pipe 1.
The control system further comprises a laser scattering type sensor, the laser scattering type sensor is fixedly connected with the inner side wall of the dust collecting pipe 1 through bolts, the laser scattering type sensor is electrically connected with the controller, the laser scattering type sensor is used for acquiring second number concentration of particles collected by the first filter screen 12, and the controller corrects the first number concentration according to the second number concentration.
The specific implementation mode is that when the flue gas passes through the dust collecting pipe 1, if the flow rate of the flue gas at the output end of the dust collecting device 51 suddenly increases, the flow rate of the air curtain is insufficient to block the flue gas from entering the edge area, and meanwhile, the air curtain cannot completely block the gas exchange between the central area and the edge area, so that part of dust necessarily enters the edge area when the flue gas passes through the dust collecting pipe 1.
Therefore, in the use process of the device, two electric fields with opposite directions can be provided in the dust collecting pipe 1 through the electrode plates, the electric fields enable dust particles to be charged, the charged dust is driven to move towards the electrode plates, and finally, the dust is captured by the first filter screen 12, so that the relative fixation of the dust position is realized.
Compared with the prior art, the dust attached to the inner wall of the dust collecting pipe 1 can be avoided, and the dust is raised by the smoke when the smoke is introduced next time, so that the quantity concentration of the dust of the smoke at the input end of the dust collecting pipe 1 is lower than that of the dust flowing to the testing chamber 2, and the accuracy of finally acquired data is affected.
Meanwhile, in the process that dust falls into the first filter screen 12, the laser scattering sensor continuously collects the second quantity concentration of the dust, because the size of the dust collecting pipe 1 and the position of the air curtain are known, namely the volume of the edge area is known, the quantity of the dust entering the edge area can be approximately obtained through the obtained second quantity concentration, after the quantity of the dust in the edge area and the quantity of the dust in the test chamber 2 are added, the correction of the first quantity concentration can be realized by combining the volume of the flue gas discharged into the device, and at the moment, the obtained first quantity concentration is higher in accuracy, and the influence on the accuracy of the first quantity concentration after part of the dust enters the edge area is effectively avoided.
Example 3
As shown in fig. 6, the difference from the above embodiment is that an exhaust dust treatment system for gallium nitride production based on the exhaust dust detection device for gallium nitride production described above is also disclosed, comprising a cooling unit 4, a washing unit 5, a detection unit 6, and a post-purification unit 7;
The cooling unit 4 is used for reducing the temperature of the exhaust gas exhausted by the gallium nitride production equipment to obtain pretreatment gas, the cooling unit 4 comprises a heat exchanger 41 and a cooling tower 42, the output end and the input end of the cooling tower 42 are both communicated with the heat exchanger 41, the input end of the heat exchanger 41 is communicated with the exhaust gas output end of the gallium nitride production equipment, cooling liquid enters the heat exchanger 41 in the use process and then cools the exhaust gas passing through the heat exchanger 41, and the cooling liquid after heat exchange enters the cooling tower 42 again to be cooled and then enters the next heat exchange process.
The washing unit 5 is used for carrying out dust removal treatment on the pretreatment gas, eluting organic metal, volatile organic compounds and ammonia in the pretreatment gas, and obtaining flue gas. The washing unit 5 includes an acid washing tower 52, a thermal oxidation furnace 53, and a dust collecting device 51.
In the use process, the pretreated gas passes through the dust collecting device 51, wherein the dust collecting device 51 uses PTFE coating filter materials, most of dust carried by the pretreated gas is captured and then discharged into the acid washing tower 52, the filler in the acid washing tower 52 is polypropylene pall ring, the absorption liquid is sulfuric acid solution, alkaline gases such as ammonia in the pretreated gas are treated by the acid washing tower 52 and then discharged into the thermal oxidation furnace 53, the pretreated gas is heated by the thermal oxidation furnace 53, and organic metals and volatile organic compounds in the pretreated gas are removed, so that the flue gas is finally obtained.
The detecting unit 6 is configured to obtain a first number concentration of dust in the flue gas by using a detecting device, determine whether the first number concentration meets an emission requirement, and when the first number concentration does not meet the emission requirement, discharge the flue gas into the washing unit 5 for secondary treatment, and when the first number concentration meets the emission requirement, discharge the flue gas into the rear purifying unit 7;
the post-purification unit 7 is used for discharging the flue gas after the pH value of the flue gas is neutralized, and the post-purification unit 7 comprises an activated carbon adsorption tower 71, wherein the filler of the activated carbon adsorption tower 71 is honeycomb activated carbon and an acid reagent is impregnated. To adsorb residual alkaline gas and organic metal in the flue gas, etc.
Example 4
As shown in fig. 7, the difference from the above embodiment is that an exhaust dust detection method for gallium nitride production based on the exhaust dust detection device for gallium nitride production is also disclosed, comprising:
s1, receiving the flue gas processed by the dust collecting device 51;
S2, driving the flue gas to collide, and promoting the uniform distribution of the flue gas;
S3, adjusting the flow rate of the flue gas until the flow rate of the flue gas falls into a proper flow rate range of the air particle counter 3, guiding the flue gas into the air particle counter 3, and counting dust in the flue gas by using the air particle counter 3;
And S4, judging whether the smoke meets the emission requirement or not according to the counting result, discharging the smoke into the next treatment process when the smoke meets the emission requirement, and discharging the smoke into the dust collecting equipment 51 again for treatment when the smoke does not meet the emission requirement.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the scope of the invention, but to limit the invention to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. The exhaust dust detection device for gallium nitride production comprises a collection assembly and a test assembly, and is characterized in that the collection assembly comprises a dust collecting pipe (1) and an adjusting assembly, the input end of the dust collecting pipe (1) is communicated with the output end of dust collecting equipment (51), a fan (11) is arranged in the dust collecting pipe (1), the fan (11) is used for generating an annular air curtain, the air curtain is used for dividing the interiors of the dust collecting pipe (1) and the test assembly into a central area and an annular edge area, the air curtain is also used for collecting and lifting the air pressure of a collecting area in the test assembly, the adjusting assembly is used for changing the collecting position of the air curtain, the test assembly is used for receiving flue gas output by the collection assembly and counting particles in the flue gas, and the test assembly is communicated with a processing assembly which is used for classifying and processing the flue gas;
The dust collecting device comprises a dust collecting pipe (1), a dust collecting assembly, a control system and a treatment assembly, wherein the dust collecting pipe is used for collecting dust from the dust collecting pipe (1), the control system is used for acquiring the volume of the flue gas entering the dust collecting pipe, calculating the first quantity concentration of the particulate matters according to the quantity of the particulate matters, controlling the treatment assembly to carry out secondary treatment on the flue gas when the first quantity concentration is larger than or equal to a set threshold value, and controlling the treatment assembly to discharge the flue gas when the first quantity concentration is smaller than the set value.
2. The exhaust dust detection device for gallium nitride production according to claim 1, wherein the test assembly comprises a test chamber (2) and an air particle counter (3), the adjusting assembly is installed in the test chamber (2), the test chamber (2) is communicated with the output end of the dust collecting pipe (1), an air inlet of the air particle counter (3) is arranged in the test chamber (2), and the air inlet of the air particle counter (3) is coaxially arranged with the dust collecting pipe (1).
3. The exhaust dust detection device for gallium nitride production, as set forth in claim 1, wherein the adjusting assembly comprises a pump assembly and an annular groove (21) arranged on the inner side wall of the testing chamber (2) far away from the dust collecting pipe (1), a plurality of baffles (22) are hinged on the side wall of the annular groove (21), connecting plates (23) are arranged on the side wall of the baffles (22), a plurality of cavities (25) are arranged in the connecting plates (23), deformation grooves (26) are arranged on the side wall of the cavities (25), the deformation grooves (26) are used for guiding the side wall of the cavities (25) to deform, adjacent cavities (25) are communicated with each other, a spacer (24) made of memory metal is arranged at the communicating position of the adjacent cavities (25), the phase change temperature of the spacer (24) is arranged in a step-like manner, a storage cavity is arranged in the side wall of the testing chamber (2), the storage cavity is communicated with any cavity (25), the spacer (24) is used for changing the opening of the communicating position of the adjacent cavities, the phase change temperature of the spacer (24) is used for changing the communicating position of the adjacent cavities, the piston (25) is used for pushing the piston to move away from the storage cavity, the piston (25) is used for changing the distance of the piston (25), the particles are used to adjust and define the shape of the web (23).
4. The exhaust dust detection device for gallium nitride production according to claim 1, wherein the collecting assembly further comprises a plurality of electrode plates, the electrode plates are used for generating at least two electric fields in the dust collecting tube (1), and the electric fields are completely offset from each other at the axial center position of the dust collecting tube (1).
5. The exhaust dust detection device for gallium nitride production according to claim 4, wherein a first filter screen (12) is provided in an edge region of the dust collecting tube (1), and the first filter screen (12) is used for collecting particles in the edge region of the dust collecting tube (1).
6. An exhaust dust detection apparatus for gallium nitride production according to claim 5, wherein the control system is further configured to acquire a second number concentration of particles collected by the first screen (12), and to correct the first number concentration based on the second number concentration.
7. An exhaust dust detection device for gallium nitride production according to claim 3, wherein a temperature adjusting component is further arranged in the dust collecting pipe (1), the temperature adjusting component is used for changing the temperature of the air curtain, the control system is further used for obtaining the proper test flow rate of the air particle counter (3) and the flow rate of the mixed gas of the air curtain and the flue gas entering the dust collecting pipe (1), when the flow rate of the mixed gas is larger than the proper test flow, the control system reduces the included angle between the air curtain and the horizontal plane when the flow rate of the mixed gas is smaller than the schematic test flow rate, and when the flow rate of the mixed gas is smaller than the schematic test flow rate, the control system increases the included angle between the air curtain and the horizontal plane when the flow rate of the mixed gas is equal to the proper test flow rate through the temperature adjusting component, and the control system maintains the temperature of the air curtain.
8. The exhaust dust detection device for gallium nitride production according to claim 7, wherein the test assembly further comprises a linear actuator, the linear actuator is mounted on the outer side of the test chamber (2), the linear actuator is used for adjusting the linear distance between the input end of the air particle counter (3) and the output end of the dust collecting pipe (1), and the control system is further used for controlling the linear actuator to adjust the position of the input end of the air particle counter (3) while controlling the temperature adjusting assembly to adjust the included angle between the air curtain and the horizontal plane during collection.
9. An exhaust dust treatment system for gallium nitride production based on the exhaust dust detection device for gallium nitride production according to any one of claims 1 to 8, characterized by comprising a cooling unit (4), a washing unit (5), a detection unit (6) and a post-purification unit (7);
the cooling unit (4) is used for reducing the temperature of the waste gas discharged by the gallium nitride production equipment to obtain pretreated gas;
the washing unit (5) is used for carrying out dust removal treatment on the pretreatment gas and eluting organic metal, volatile organic matters and ammonia in the pretreatment gas to obtain flue gas;
The detection unit (6) is used for acquiring a first quantity concentration of dust in the flue gas by using the detection device, judging whether the first quantity concentration meets the emission requirement, discharging the flue gas into the washing unit (5) for secondary treatment when the first quantity concentration does not meet the emission requirement, and discharging the flue gas into the rear purification unit (7) when the first quantity concentration meets the emission requirement;
and the rear purification unit (7) is used for discharging the flue gas after neutralizing the pH value of the flue gas.
10. The detection method based on the exhaust dust detection device for gallium nitride production according to any one of claims 1 to 8, characterized by comprising the following steps:
S1, receiving flue gas processed by dust collecting equipment (51);
S2, driving the flue gas to collide, and promoting the uniform distribution of the flue gas;
s3, adjusting the flow rate of the flue gas until the flow rate of the flue gas falls into a proper flow rate range of the air particle counter (3), and guiding the flue gas to enter the air particle counter (3) for counting;
And S4, judging whether the smoke meets the emission requirement or not according to the counting result, discharging the smoke into the next treatment process when the smoke meets the emission requirement, and discharging the smoke into dust collecting equipment (51) again for treatment when the smoke does not meet the emission requirement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202511577154.1A CN121026889B (en) | 2025-10-31 | 2025-10-31 | A device, system, and method for detecting and treating exhaust dust in gallium nitride production. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202511577154.1A CN121026889B (en) | 2025-10-31 | 2025-10-31 | A device, system, and method for detecting and treating exhaust dust in gallium nitride production. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN121026889A true CN121026889A (en) | 2025-11-28 |
| CN121026889B CN121026889B (en) | 2026-01-23 |
Family
ID=97758334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202511577154.1A Active CN121026889B (en) | 2025-10-31 | 2025-10-31 | A device, system, and method for detecting and treating exhaust dust in gallium nitride production. |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN121026889B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798465A (en) * | 1986-04-14 | 1989-01-17 | Particle Measuring Systems, Inc. | Particle size detection device having high sensitivity in high molecular scattering environment |
| US20120031200A1 (en) * | 2009-04-01 | 2012-02-09 | Nobuaki Ito | Device and method for continuously measuring horizontal flux of dustfall in atmosphere |
| CN118670930A (en) * | 2024-05-31 | 2024-09-20 | 东北大学 | Experimental platform for diffusion treatment and multiphase flow measurement of environmental pollutants in deep engineering |
| CN119574813A (en) * | 2025-02-06 | 2025-03-07 | 雅安宇焜芯材材料科技有限公司 | A gas source purity detection device and gallium nitride production system |
| CN120142423A (en) * | 2025-02-26 | 2025-06-13 | 恩德斯豪斯(北京)科技有限公司 | Device and method for collecting heavy metal particles in exhaust gas |
-
2025
- 2025-10-31 CN CN202511577154.1A patent/CN121026889B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4798465A (en) * | 1986-04-14 | 1989-01-17 | Particle Measuring Systems, Inc. | Particle size detection device having high sensitivity in high molecular scattering environment |
| US4798465B1 (en) * | 1986-04-14 | 1991-09-17 | Particle Measuring Syst | |
| US4798465B2 (en) * | 1986-04-14 | 1994-08-30 | Particle Measuring Syst | Particle size detection device having high sensitivity in high molecular scattering environment |
| US20120031200A1 (en) * | 2009-04-01 | 2012-02-09 | Nobuaki Ito | Device and method for continuously measuring horizontal flux of dustfall in atmosphere |
| CN118670930A (en) * | 2024-05-31 | 2024-09-20 | 东北大学 | Experimental platform for diffusion treatment and multiphase flow measurement of environmental pollutants in deep engineering |
| CN119574813A (en) * | 2025-02-06 | 2025-03-07 | 雅安宇焜芯材材料科技有限公司 | A gas source purity detection device and gallium nitride production system |
| CN120142423A (en) * | 2025-02-26 | 2025-06-13 | 恩德斯豪斯(北京)科技有限公司 | Device and method for collecting heavy metal particles in exhaust gas |
Non-Patent Citations (2)
| Title |
|---|
| TOMIDA, D: "Facile method for the synthesis of zinc- or magnesium-doped gallium nitride powders from gallium metal", JOURNAL OF CRYSTAL GROWTH, vol. 570, 15 September 2021 (2021-09-15) * |
| 吴钧: "新型附壁旋流风幕集尘系统技术研究", 中国优秀硕士学位论文全文数据库工程科技I辑, no. 2025, 15 July 2025 (2025-07-15), pages 71 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN121026889B (en) | 2026-01-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9976957B2 (en) | Device for measuring floating micro-organisms and air conditioner including device for measuring floating micro-organisms | |
| Zheng et al. | Evolution of condensable fine particle size distribution in simulated flue gas by external regulation for growth enhancement | |
| CN105954070B (en) | A kind of aerosol particle harvester | |
| CN103091291B (en) | Bioaerosol real-time monitoring device | |
| CN111928365A (en) | Integral factory building air purification device with telescopic air suction and supply structure | |
| CN105223046A (en) | Stationary source flue gas particles dilution method automatic constant speed acquisition method | |
| CN104587789A (en) | Helmholtz resonator array based suspended particles sound wave agglomerating system and method | |
| CN121026889A (en) | A device, system, and method for detecting and treating exhaust dust in gallium nitride production. | |
| CN205120434U (en) | Fixed source smoke particulate two -stage dilution method sampling system | |
| CN117405566A (en) | An airborne particle acoustic wave agglomeration observation system and working method | |
| CN118846787B (en) | A precise ammonia injection and efficient denitrification system for waste incinerators | |
| CN118807377B (en) | Atomized spraying system and method for controlling amine escape from a carbon capture system | |
| CN205120442U (en) | Fixed source smoke particulate dilution method sampling system | |
| CN221840902U (en) | Online monitoring device for concentration of discharged flue gas particles | |
| CN203587373U (en) | Environment test cabin | |
| CN109876925A (en) | Flue gas waste heat utilization and intelligent electric field intensity adjusting system thereof | |
| CN109882878A (en) | An intelligent flue gas waste heat utilization and flue gas pollutant treatment system | |
| CN220708859U (en) | Be applied to miniature environmental air monitoring system's gas circuit structure | |
| CN116087333B (en) | Symmetrical ultrasonic imaging device | |
| CN117232077A (en) | Regulating and controlling system of nano photon purifier | |
| CN114992665B (en) | Power station boiler temperature dust monitoring equipment and monitoring method thereof | |
| CN216173214U (en) | Zinc smoke dust removal acid mist trapping integrated treatment tower | |
| CN214844949U (en) | Flue gas SO3On-line monitoring device | |
| CN205174562U (en) | Air purifying device | |
| CN117942686B (en) | A method and device for efficiently agglomerating, drying and recovering fine particles |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |