CN120991719A - A Model Analysis Method for the Superposition Effect of Interference Signals in Optical Interferometric Displacement Measurement - Google Patents
A Model Analysis Method for the Superposition Effect of Interference Signals in Optical Interferometric Displacement MeasurementInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
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Abstract
本发明公开了一种光干涉位移测量中干涉信号叠加效应的模型分析方法，包括建立干涉叠加模型，所述模型用于仿真一次反射光与二次反射光分别与参考光干涉后的叠加效应；所述参考光为经光纤端面反射的光束；获取模型关键参数，基于所述模型关键参数，通过模型计算一次反射光与参考光的干涉信号、二次反射光与参考光的干涉信号，以及两者的叠加信号；利用所述叠加信号的仿真结果，分析干涉信号的非线性效应，用于优化光纤法布里‑珀罗干涉仪的位移测量精度；本发明通过建立反射光干涉叠加模型，构建多次反射干涉的非线性效应，优化了信号处理方法，从而提高位移测量的精度、稳定性和适用性。
This invention discloses a model analysis method for the superposition effect of interference signals in optical interferometric displacement measurement. The method includes establishing an interference superposition model to simulate the superposition effect of primary and secondary reflected light interfering with a reference light, where the reference light is a beam reflected from the end face of an optical fiber. Key parameters of the model are obtained, and based on these parameters, the interference signals of the primary and secondary reflected light, as well as their superposition, are calculated. The simulation results of the superposition signals are used to analyze the nonlinear effects of the interference signals, which are then used to optimize the displacement measurement accuracy of the fiber optic Fabry-Perot interferometer. This invention improves the accuracy, stability, and applicability of displacement measurement by establishing a reflection light interference superposition model, constructing the nonlinear effect of multiple reflection interference, and optimizing the signal processing method.
Description
Technical Field
The invention relates to the field of optical fiber sensing and interferometry, in particular to a model analysis method for interference signal superposition effect in optical interference displacement measurement.
Background
The optical interference displacement measurement technology has become a core support technology in the fields of precision manufacture, micro-nano processing, aerospace precision calibration, optical element detection and the like by virtue of ultra-high measurement precision of nano-scale or sub-nano-scale, the principle of the optical interference displacement measurement technology is based on quantitative mapping relation between interference fringe change and displacement quantity generated by coherent light superposition, typical technologies such as Michelson interferometer, fabry-Perot interferometer, laser interferometer and the like realize accurate measurement of micro displacement by detecting phase, intensity or frequency change of interference signals,
However, in an actual measurement scene, the superposition effect of interference signals often causes deviation of measurement precision from a theoretical value and becomes a key bottleneck for restricting performance improvement of the interference signals, the superposition effect mainly comes from the factors that multiple reflection and scattering of optical elements (such as a reflector and a spectroscope) in an optical system generate stray light, the stray light and a main interference beam form non-ideal superposition, the fringe contrast is reduced, the signal to noise ratio (SNR) is reduced, even false phase jump is introduced, environmental factors such as thermal expansion and contraction of the optical elements caused by temperature fluctuation, light path length micro-variation caused by mechanical vibration, air refractive index non-uniformity and the like can cause additional dynamic offset of interference light path difference to be superposed with ideal light path difference caused by displacement to cause signal phase drift, and the system characteristics such as insufficient coherence of a light source, nonlinear response of a detector, light path polarization state change and the like can cause nonlinear superposition of interference signal intensity and phase, and destroy the linear mapping relation between displacement and signal change,
At present, the analysis of interference signal superposition effect in the prior art is concentrated on qualitative description of single factor (such as stray light or temperature interference), and quantitative modeling of multi-factor coupling superposition is lacking, so that it is needed to establish an interference signal superposition effect model analysis method capable of comprehensively considering multi-factor coupling, and theoretical support and optimization direction are provided for high-precision optical interference displacement measurement by quantitatively describing correlation mechanism of superposition effect and displacement measurement error, so as to meet the requirements of high-end manufacturing, micro-nano technology and other fields on sub-nano measurement precision, and therefore, a model analysis method of interference signal superposition effect in optical interference displacement measurement is needed.
Disclosure of Invention
The invention aims to provide a model analysis method for interference signal superposition effect in optical interference displacement measurement.
In order to achieve the above purpose, the invention is implemented according to the following technical scheme:
the invention comprises the following steps:
(1) Establishing an interference superposition model, wherein the model is used for simulating superposition effects of primary reflected light and secondary reflected light after interference with reference light respectively, the primary reflected light is a measuring light beam which is reflected back to the optical fiber end face for the first time by a target reflector, the secondary reflected light is a measuring light beam which is reflected back to the optical fiber core by an optical fiber cladding or a coating layer after the primary reflected light deviates from the optical fiber core due to the inclination of the target reflector, and the reference light is a light beam reflected by the optical fiber end face;
(2) Obtaining model key parameters, wherein the model key parameters comprise the fiber core diameter, the cladding diameter, the fiber end face reflectivity R 1, the target reflector reflectivity R 2, the cladding reflectivity R 3, the coating layer reflectivity R 4 and the offset distance d of primary reflected light on the fiber end face;
(3) Calculating interference signals of the primary reflected light and the reference light, interference signals of the secondary reflected light and the reference light and superposition signals of the two signals through a model based on the key parameters of the model;
(4) Analyzing the nonlinear effect of the interference signal by using the simulation result of the superimposed signal, and optimizing the displacement measurement precision of the optical fiber Fabry-Perot interferometer;
In the simulation process, the light intensity of the incident light reflected back to the fiber core and the light intensity of the incident light on the cladding when the light is reflected back to the fiber end face for the first time is calculated through integration, and simulation interference signals of the first and second reflections are simulated respectively, wherein the simulation interference signals are represented by the following formula:
Signal1＝A1*sin(2πf1t)+B1
Signal2＝A2*sin(2πf2t)+B2
Combined_Signal=Signal1+Signal2
Wherein A 1、A2、B1、B2 is determined according to the light power incident back to the fiber core and striking the cladding when reflected back to the fiber end face for the first time, and f 2＝2f1.
f1＝f0+m*sin(2πΩt)
f2＝2f1
Wherein f 0 is the center frequency, m is the modulation depth, and Ω is the modulation frequency.
Further, the optical fiber of the interference superposition model is a single-mode optical fiber, the fiber core diameter of the FC/PC joint is 8.2 mu m, and the cladding diameter is 125 mu m.
Further, the optical fiber end face reflectivity R 1 =3.6%, the target reflector reflectivity R 2 >96%, the cladding reflectivity R 3 =3.5%, and the coating layer reflectivity R 4 =13% of the interference superposition model.
Further, in the step (3), the interference signal period of the reference light of the secondary reflected light is 1/2 of the interference signal period of the primary reflected light and the reference light.
Further, in the step (4), the simulation result of the superimposed signal is used to analyze the influence of the reflectivity R 2 of different target reflectors on the interference signal, so as to optimize the design of the sensor head.
Furthermore, a 1550nm tunable distributed feedback laser is adopted, and the interference signal is detected and recorded through an InGaAs detector and a data acquisition card.
The beneficial effects of the invention are as follows:
The invention relates to a model analysis method for interference signal superposition effect in optical interference displacement measurement, which has the following technical effects compared with the prior art:
According to the invention, the nonlinear effect of the multiple reflection interference is studied deeply by establishing the reflected light interference superposition model, and the signal processing method is optimized, so that the accuracy, stability and applicability of displacement measurement are improved.
Drawings
FIG. 1 is a schematic diagram of an optical fiber Fabry-Perot interference experimental device of a model analysis method of interference signal superposition effect in optical interference displacement measurement;
FIG. 2 is a diagram of a secondary reflection optical path of a sensing cavity of a model analysis method of interference signal superposition effect in optical interferometry displacement measurement;
FIG. 3 is a schematic view of the position of a light spot reflected to the end face of an optical fiber for the first time by a model analysis method of interference signal superposition effect in optical interferometry displacement measurement according to the present invention;
FIG. 4 is a schematic diagram of interference signals in the superimposed state by a model analysis method of interference signal superposition effect in optical interferometry displacement measurement according to the present invention;
FIG. 5 is a schematic diagram of simulated interference fringes and Lissajous diagrams of signals 1 and 2 in a superimposed state by a method for analyzing the superimposed effect of interference signals in optical interferometry;
Detailed Description
The invention is further described by the following specific examples, which are presented to illustrate, but not to limit, the invention.
The invention discloses a model analysis method of interference signal superposition effect in optical interference displacement measurement, which comprises the following steps:
The invention establishes a model aiming at the interference superposition phenomenon of the reflected light in the displacement measurement process of the optical fiber Fabry-Perot interferometer, and the interference superposition phenomenon of the primary reflected light and the secondary reflected light in the interference process is simulated and reproduced by establishing the model, so that the requirements of high-precision measurement and scientific research experiments are greatly met.
The experimental device diagram of the method is shown in fig. 1, a 1550nm tunable distributed feedback laser is adopted in an experimental system, laser output light is input through an optical fiber circulator port 1, an optical fiber circulator port 2 is output, then the optical fiber circulator port is connected with a single-mode optical fiber jumper wire through an optical fiber flange, the other output end of the single-mode optical fiber is an FC/PC joint, the end face of the optical fiber forms a first reflecting surface of a Fabry-Perot cavity, the reflectivity is about 4 percent, when a light beam passes through the end face of the optical fiber, about 4 percent of light is reflected back to the single-mode optical fiber to serve as a reference light beam, 96 percent of emergent light is coupled into the cavity to be emitted to the surface of an object, and at the moment, the light beam returns along an original path after being reflected, is re-coupled into the single-mode optical fiber to form a measuring light beam and interferes with the reference light beam, so that an interference signal is generated. The interference signal is detected at port 3 of the fiber optic circulator by an InGaAs detector and the interference signal information is recorded by a data acquisition card.
As shown in FIG. 2, when the target reflector of the sensing cavity is slightly inclined at the inclination angle alpha, incident light is not vertically incident on the surface of the reflector, and then reflected light returns to the end face of the optical fiber at a certain angle, at this time, part of the light is directly incident on the fiber core, and the other part of the light passes through the cavity after being reflected by the cladding layer, and is incident back to the fiber core again after being secondarily reflected on the target reflector.
Because of the tilt of the target, the reflected beam is not directly coupled back into the fiber core, but rather forms a small radial offset at the fiber end surface, characterized by the distance d from the center of the core of the spot reflected back into the fiber end surface for the first time, as shown in fig. 3. When d changes, the position of the light spot of primary reflection, which strikes the end face of the optical fiber, is also changed, and the position of the light spot can be judged according to the value of d.
As shown in fig. 3, the FC/PC head of the single mode fiber is composed of a core, a cladding, and a coating, the diameter of the fiber core is 8.2 μm, the reflectance r1=3.6%, the diameter of the cladding is 125 μm, the reflectance r3=3.5%, and the reflectance r4=13% of the coating.
As shown in fig. 4, the primary reflected light and the secondary reflected light are distributed to interfere with the reference light, and the superposition of the two interference signals causes the shape of the interference signal detected by the photodetector to change. The primary reflected interference signal, the secondary reflected interference signal, and the superimposed signals thereof can be simulated by modeling, as shown in fig. 5. The Signal 1 (Signal 1) and the Signal 2 (Signal 2) are analog interference signals of primary and secondary reflections in this state, respectively, and the superimposed Signal (superimposed Signal) is a superposition of both, that is, a simulation of the actual Signal (INTERFERENCE SIGNAL). When the light beam passes through the sensing cavity twice (double pass), the interference signal period is 1/2 of that of the light beam passing through the sensing cavity once, and the phenomenon is caused by the interference characteristic of the Fabry-Perot cavity. In the simulation process, first, the light intensity incident back to the fiber core and striking the cladding when the light is reflected back to the fiber end face for the first time needs to be calculated through integration. And simulate the primary and secondary reflected analog interference signals respectively, as shown in the following formula:
Signal1＝A1*sin(2πf1t)+B1
Signal2＝A2*sin(2πf2t)+B2
Combined_Signal=Signal1+Signal2
Wherein a 1、A2、B1、B2 is determined according to the optical power incident back to the fiber core and impinging on the cladding when first reflected back to the fiber end face, f 1 and f 2 are related to modulation depth and modulation frequency and satisfy f 2＝2f1, respectively. As can be seen from fig. 4, the superposition causes nonlinear effects on the interference signal of the optical fiber interference system, which reduces the accuracy of displacement measurement and reduces the sine degree and usability of the interference signal.
f1＝f0+m*sin(2πΩt)
f2＝2f1
Wherein f 0 is the center frequency, m is the modulation depth, and Ω is the modulation frequency.
The invention builds a mathematical model to simulate the superposition effects thereof. The model can be used for analyzing nonlinear effects of interference signals, improving the accuracy of displacement measurement and the optimization capability of a system, when a target reflector is slightly inclined, reflected light deviates from an optical fiber core, so that a part of light is secondarily reflected, and the relation among primary reflected light, secondary reflected light and a combined signal thereof is verified through numerical simulation and experimental data comparison. The double pass effect enables the period of the interference signal to be changed into 1/2 of the original period, which has important significance for error compensation and optimization of a measuring system, and can analyze the influence of the reflectivity of different target reflecting surfaces on the interference signal and optimize the design of a sensor head.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.
Claims (8)
1. A model analysis method of interference signal superposition effect in optical interferometry displacement measurement is characterized by comprising the following steps:
(1) Establishing an interference superposition model, wherein the model is used for simulating superposition effects of primary reflected light and secondary reflected light after interference with reference light respectively, the primary reflected light is a measuring light beam which is reflected back to the optical fiber end face for the first time by a target reflector, the secondary reflected light is a measuring light beam which is reflected back to the optical fiber core by an optical fiber cladding or a coating layer after the primary reflected light deviates from the optical fiber core due to the inclination of the target reflector, and the reference light is a light beam reflected by the optical fiber end face;
(2) Obtaining model key parameters, wherein the model key parameters comprise the fiber core diameter, the cladding diameter, the fiber end face reflectivity R 1, the target reflector reflectivity R 2, the cladding reflectivity R 3, the coating layer reflectivity R 4 and the offset distance d of primary reflected light on the fiber end face;
(3) Calculating interference signals of the primary reflected light and the reference light, interference signals of the secondary reflected light and the reference light and superposition signals of the two signals through a model based on the key parameters of the model;
(4) Analyzing the nonlinear effect of the interference signal by using the simulation result of the superimposed signal, and optimizing the displacement measurement precision of the optical fiber Fabry-Perot interferometer;
In the simulation process, the light intensity of the incident light reflected back to the fiber core and the light intensity of the incident light on the cladding when the light is reflected back to the fiber end face for the first time is calculated through integration, and simulation interference signals of the first and second reflections are simulated respectively, wherein the simulation interference signals are represented by the following formula:
Signal1＝A1*sin(2πf1t)+B1
Signal2＝A2*sin(2πf2t)+B2
Combined_Signal=Signal1+Signal2
Wherein A 1、A2、B1、B2 is determined by the optical power incident back to the fiber core and impinging on the cladding when first reflected back to the fiber end face and f 2＝2f1, respectively.
2. The method of claim 1, wherein in step (2), the optical fiber of the interference superposition model is a single mode fiber, the core diameter of the FC/PC splice is 8.2 μm, and the cladding diameter is 125 μm.
3. The method of claim 1, wherein in step (2), the fiber end face reflectivity r1=3.6%, the target reflectivity r2>96%, the cladding reflectivity r3=3.5%, and the coating reflectivity r4=13% of the interference superposition model.
4. The method of claim 1, wherein in the step (2), the distance d between the light spot reflected back to the fiber end face for the first time and the center of the fiber core is calculated by the effective focal length f of the collimating lens and the target reflector inclination angle α, and the light spot position of the primary reflected light on the fiber end face is determined by the value of the distance d.
5. The method of claim 1, wherein in step (3), the interference signal period of the reference light of the secondary reflected light is 1/2 of the interference signal period of the primary reflected light and the reference light.
6. The method of claim 1, wherein in step (4), the simulation results of the superimposed signals are used to analyze the effect of different target reflector reflectivities R2 on the interference signal to optimize sensor head design.
7. The method of claim 1, wherein in step (4), f1 and f2 have a sinusoidal relationship with time as shown in the following formula:
f1＝f0+m*sin(2πΩt)
f2＝2f1
Wherein f 0 is the center frequency, m is the modulation depth, and Ω is the modulation frequency.
8. The method of claim 1 wherein the interference signal is recorded by an InGaAs detector and a data acquisition card using a 1550nm tunable distributed feedback laser.
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