CN120985071A - A method for optical path shaping of high-power lasers - Google Patents

Abstract

This invention provides an optical path shaping method for a waterjet-guided high-power laser, comprising: acquiring a high-power laser beam and its real-time parameters; determining, based on the real-time parameters, whether the initial diameter of the Gaussian beam is greater than a preset diameter threshold, or whether the beam energy distribution deviates from the center by more than a preset threshold; if the conditions are met, performing dynamic beam expansion adjustment to obtain an expanded beam; if the real-time beam parameters exceed a collimation threshold, performing dynamic collimation processing on the expanded beam to obtain a collimated beam; and then performing phase and amplitude modulation on the collimated beam according to the characteristic parameters of the target workpiece to finally output a stable shaped beam. This invention provides an optical path shaping method for a waterjet-guided high-power laser, which improves beam quality and processing adaptability through real-time control and precise shaping of the waterjet-guided high-power laser, effectively adapting to different workpiece characteristics and ensuring the stability and accuracy of the processing.

Description

Optical path shaping method of high-power laser

Technical Field

The invention belongs to the technical field of water-guided laser processing, and particularly relates to a light path shaping method of water-jet guided high-power laser.

Background

The water-guided laser processing technology utilizes extremely fine water jet to guide laser to reach the surface of a material, so as to realize material processing. The cooling and scouring effects of water can effectively reduce the area of a heat affected zone, avoid secondary damage of scraps, have the advantages of accuracy, environmental protection, high quality and the like, are widely applied to the processing and manufacturing of micro-nano devices and micro-structures in recent years, and realize the processing of micro deep grooves, complex modeling and the like. The quality of the high power laser beam directly determines the accuracy and efficiency of the final machining. In a traditional laser processing system, beam expansion, collimation and modulation of a beam often depend on fixed optical elements and static strategies, and are difficult to adapt to changes of different powers and workpiece characteristics, so that uneven beam energy distribution, insufficient collimation or wavefront distortion are caused, and further the coupling effect with water jet and the processing quality are affected.

Disclosure of Invention

Aiming at the defects of the prior art, the invention provides a light path shaping method for guiding high-power laser by water jet to solve the problems, according to the method, the high-power laser guided by the water jet is regulated, controlled and shaped accurately in real time, so that the quality and the processing adaptability of the light beam are improved, different workpiece characteristics can be effectively adapted, and the stability and the accuracy of the processing process can be guaranteed.

In order to solve the technical problems, the invention provides a method for shaping an optical path of water jet guided high-power laser, which comprises the following steps:

Obtaining a water jet guided high-power laser beam, and obtaining real-time parameters of the beam based on the high-power laser beam;

Acquiring a Gaussian beam initial diameter and a beam energy distribution offset center based on the beam real-time parameters;

If the initial diameter of the Gaussian beam is larger than a preset diameter threshold or the energy distribution offset center of the beam is larger than a preset center threshold, dynamically expanding and adjusting the high-power laser beam based on the water jet to obtain an expanded beam;

if the real-time beam parameters are larger than a preset collimation threshold, carrying out dynamic collimation treatment based on the beam expansion beam to obtain a collimated beam;

Acquiring characteristic parameters of a target workpiece;

and performing phase amplitude modulation based on the collimated light beam and the characteristic parameters of the target workpiece to obtain a stable shaping light beam.

In the scheme, the real-time beam parameters of the water jet guided high-power laser beam, including the initial diameter of the Gaussian beam and the energy distribution offset center, are obtained, and whether the initial diameter of the Gaussian beam exceeds a preset diameter threshold or a preset center threshold is judged. If the preset threshold value is exceeded, the dynamic beam expansion adjustment is carried out on the water jet guided high-power laser beam so as to adjust the beam size and correct the energy distribution deviation. And then carrying out dynamic collimation treatment on the beam expansion beam to ensure that the beam expansion beam meets the preset collimation requirement. And finally, according to the characteristic parameters of the target workpiece, carrying out phase amplitude modulation on the straight beam, thereby generating a shaped beam with uniform energy distribution and stable light path. The process realizes the real-time regulation and accurate shaping of the water jet guided high-power laser, improves the quality and processing adaptability of the light beam, can effectively adapt to the characteristics of different target workpieces and ensures the stability and the accuracy of the processing process.

Further, if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the beam expansion beam, and obtaining a collimated beam, wherein the preset collimation threshold comprises a preset angle deviation threshold, and the method comprises the following steps:

acquiring a beam angle based on the beam real-time parameter;

And if the beam angle is larger than a preset angle deviation threshold value, performing angle collimation based on the beam expansion beam to obtain a collimated beam.

In the scheme, the beam angle monitored in real time is compared with a preset deviation threshold value. If the angle deviation exceeds the preset angle deviation threshold value, carrying out angle collimation based on the beam expansion beam to obtain a collimated beam so as to compensate the angle deviation and realize the accurate collimation of the beam. By introducing an angle deviation threshold value as a collimation judgment basis, the propagation direction of the light beam can be accurately monitored and fed back in real time, and the angle deviation of the light beam can be effectively corrected, so that the output collimated light beam is ensured to have high directional consistency and collimation stability.

Further, if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the beam expansion beam, and obtaining a collimated beam, wherein the preset collimation threshold further comprises a preset direction deviation threshold, and the method comprises the following steps:

Acquiring a beam direction value based on the beam real-time parameter;

and if the beam direction value is larger than a preset direction deviation threshold value, performing direction collimation based on the beam expansion beam to obtain a collimated beam.

In the above scheme, the beam direction value is obtained through real-time monitoring, and if the beam direction value exceeds the preset direction deviation threshold, the direction collimation correction is performed on the beam expansion beam, so as to output the collimated beam. By introducing a direction deviation threshold value as a key basis for collimation judgment, accurate monitoring of the beam space directivity is realized, directivity deviation in a beam propagation path is effectively identified and corrected, and accurate alignment of an optical axis of an output beam and a reference axis is ensured, so that the stability of beam transmission and the accuracy of subsequent optical processing are ensured.

Further, the phase amplitude modulation is performed based on the characteristic parameters of the collimated beam and the target workpiece, so as to obtain a shaped beam, which comprises:

Material discrimination is carried out based on characteristic parameters of the target workpiece, and a target material phase amplitude value is obtained;

And carrying out phase amplitude modulation based on the phase amplitude of the collimated light beam and the target material to obtain a shaped light beam.

According to the technical scheme, firstly, material category distinction is carried out according to characteristic parameters of a target workpiece, a target material phase amplitude value matched with the material is determined, then, the collimated light beam is matched with the target material phase amplitude value, accurate regulation and control of the light beam phase and amplitude are achieved through a modulation process, and finally, a shaped light beam meeting processing requirements is obtained. The method and the device realize high adaptability and pertinence in the processing process by directly correlating the material characteristics with the beam modulation parameters, and the corresponding phase amplitude modulation parameters are configured according to the processing requirements of different materials to ensure that the shaped beam energy distribution and phase characteristics accurately match the processing requirements of specific materials, thereby improving the precision, quality and adaptability of subsequent laser processing.

It should be noted that the phase amplitude modulation can be flexibly configured according to the specific processing task and the material requirement of the target workpiece. The processing requirements can be classified into the following categories based on application scenarios (such as microelectronic device cutting, medical precision component processing, etc.), and correspond to different modulation methods:

For processing hard and brittle materials (such as ceramics and sapphire) and the like, in order to improve the energy density to overcome the hardness of the materials and reduce edge collapse, the amplitude can be adjusted to be in Gaussian-like distribution with high center intensity and low edge intensity (the center energy density is improved by 20% -30% compared with a flat-top beam), and the phase can be modulated by spherical phase so as to shorten the focusing focal length (such as being adjustable by 30-50 mm) and reduce the focusing light spot size (to 50-100 mu m).

For processing of materials such as high precision processing requirements, e.g., micro-scale dicing (e.g., chip pins, medical implants), uniform kerf width (deviation +.0.5 μm) is required. The amplitude should be strictly controlled to be flat-top distribution (energy deviation is less than or equal to + -3%) so as to ensure that the energy at two sides of the notch is uniform and avoid burr generated by single-side overheating, the phase can be led into inclined phase compensation, the angle deviation of the micro beam is corrected (less than or equal to 0.05 mrad), and the coincidence of the center of the light spot and the cutting path is ensured (the precision is within 0.1 μm).

For controlling the material processing of a heat affected zone, such as semiconductor device processing (the heat affected zone is less than or equal to 10 mu m), in order to reduce heat conduction and limit heat diffusion, the amplitude can be set to be pulse flat-top distribution, single pulse energy is concentrated to 10-50ns to shorten the heat action time, the phase can adopt wave front inclination modulation, and focused light spots are elongated along the processing direction (the length-diameter ratio is about 3:1), so that the energy is linearly distributed along a cutting path, and the local energy accumulation is lightened.

Aiming at the processing of materials with high-efficiency processing requirements, such as high-speed cutting (batch microelectronic device processing), the amplitude can be integrally improved by 50 percent (meanwhile, the flat top deviation is kept to be less than or equal to +/-5 percent) to increase the energy input in unit time, and the phase can be matched with wide focusing modulation to enlarge the transverse size (such as 50-100 mu m) of a light spot to adapt to high-speed feeding.

The invention also provides a light path shaping system of the water jet guided high-power laser, which comprises a light beam analysis module, a dynamic beam expansion module, a dynamic collimation module and a wavefront modulator, wherein:

The beam analysis module is used for obtaining a water jet guided high-power laser beam, obtaining real-time parameters of the beam based on the water jet guided high-power laser beam, obtaining characteristic parameters of a target workpiece, carrying out quality analysis based on the water jet guided high-power laser beam and the characteristic parameters of the target workpiece, and outputting a beam shaping instruction to the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module;

the dynamic beam expanding module is used for receiving the beam shaping instruction, and carrying out dynamic beam expanding processing based on the water jet guided high-power laser beam and the beam shaping instruction to obtain an expanded beam;

The dynamic collimation module is used for receiving the beam shaping instruction, and carrying out dynamic collimation processing based on the beam expansion beam and the beam shaping instruction to obtain a collimated beam;

The wavefront modulator is used for receiving the beam shaping instruction, and carrying out phase-amplitude modulation based on the collimated beam and the beam shaping instruction to obtain a shaped beam.

In the scheme, the real-time analysis and the self-adaptive shaping of the high-power laser beam are realized through the synergistic effect of the beam analysis module, the dynamic beam expansion module, the dynamic collimation module and the wavefront modulator. The beam analysis module is responsible for collecting real-time parameters of a beam and characteristics of a target workpiece, outputting a beam shaping instruction after quality analysis, the dynamic beam expanding module expands the laser beam according to the beam shaping instruction, the dynamic collimation module further carries out collimation correction on the expanded beam, and finally, the wave front modulator carries out phase and amplitude modulation on the collimated beam according to the instruction to output a shaped beam meeting the processing requirement. The laser beam shaping device realizes the whole-process accurate regulation and control from beam expansion, collimation to phase and amplitude modulation and laser beam shaping through multi-module cooperation and instruction closed-loop control, can adapt to different materials and processing requirements, improves the efficiency and accuracy of beam shaping, ensures the efficient coupling of laser and water jet, and further enhances the stability and applicability of the processing process.

The wave front modulator can adopt an intelligent LC-SLM wave front modulator, realizes modulation of the phase and amplitude of light waves based on the electric control birefringence effect of liquid crystals, finally generates a shaped beam by adopting a Gerchberg-Saxton algorithm, has the resolution of 1920 multiplied by 1080 pixels, adopts an intelligent control system which can be constructed based on an embedded processor and a Field Programmable Gate Array (FPGA), can rapidly acquire beam quality (divergence angle, flattop) and environmental parameter (temperature and vibration) data obtained by a beam quality analyzer, generates control signals in real time, and drives a dynamic beam expansion module, a dynamic collimation module and the wave front modulator to dynamically adjust, so as to realize closed loop control.

Further, the dynamic beam expanding module comprises a negative lens, a positive lens and a first MEMS micro-mirror, wherein:

The first MEMS micro-mirror is used for receiving the beam shaping instruction, so that the first MEMS micro-mirror dynamically adjusts the negative lens and the positive lens based on the beam shaping instruction, and further the water jet guides the high-power laser beam to sequentially pass through the negative lens and the positive lens for dynamic beam expansion treatment, and a beam expansion beam is obtained;

the negative lens is used for diverging the water jet guided high-power laser beam, and increasing the beam size to obtain a divergent beam;

And the positive lens is used for re-collimating and amplifying the divergent light beam to obtain an expanded light beam.

In the scheme, the dynamic beam expansion module realizes dynamic adjustment of the beam expansion ratio through the Galilean beam expander consisting of the negative lens and the positive lens driven by the MEMS. The first MEMS micro-mirror receives a beam shaping instruction from the beam analysis module, dynamically adjusts the relative position or angle of the negative lens and the positive lens based on the beam shaping instruction, the high-power laser beam firstly achieves beam divergence and size increase through the negative lens to form a divergent beam, and the divergent beam is re-collimated and amplified through the positive lens to finally output a beam expanding beam meeting the size requirement. The dynamic beam expansion module can dynamically control the lens configuration in real time through the precise driving of the first MEMS micro-mirror, so that the beam expansion times and the beam forms can be accurately adjusted according to the beam shaping instruction. The combination of the negative lens and the positive lens effectively expands the beam diameter and simultaneously maintains good beam quality, and provides the beams with size matching and energy distribution optimization for subsequent collimation and phase amplitude modulation, thereby improving the flexibility and accuracy of the whole light path shaping process.

Further, the dynamic collimation module comprises a pre-collimation lens, a precise collimation lens and a second MEMS micro-mirror, wherein:

the MEMS micro-mirror is used for receiving the beam shaping instruction, so that the second MEMS micro-mirror dynamically adjusts the pre-collimating mirror and the precise collimating mirror based on the beam shaping instruction, and the beam-expanding beam sequentially passes through the pre-collimating mirror and the precise collimating mirror to be dynamically collimated, and a collimated beam is obtained;

the pre-collimating mirror is used for carrying out preliminary correction on the beam expansion beam to obtain a preliminary collimated beam;

the precise collimating mirror is used for precisely correcting the primary collimated light beam to obtain a collimated light beam.

In the above scheme, the dynamic collimation module comprises a double-stage MEMS collimation lens group formed by a pre-collimation lens, a precise collimation lens and a second MEMS micro-lens so as to collimate light beams. The second MEMS micro-mirror receives the beam shaping instruction from the beam analysis module and dynamically adjusts the postures or positions of the pre-collimating mirror and the precise collimating mirror based on the beam shaping instruction. The beam expansion beam is first calibrated preliminarily by the pre-collimator to output the preliminary collimated beam, which is then collimated and optimized further by the precision collimator to output the high precision collimated beam. The scheme realizes the accurate driving of the two-stage collimating mirror through the real-time regulation and control of the second MEMS micro mirror, can rapidly compensate the angle and direction deviation of the light beam according to the light beam shaping instruction, and the grading correction mechanism of the pre-collimating mirror and the precise collimating mirror effectively improves the precision and efficiency of the collimation treatment and ensures that the output light beam has a very small divergence angle and good direction consistency.

The invention also provides a light path shaping processing system of the water jet guided high-power laser, which comprises the light path shaping system of the water jet guided high-power laser, wherein the light path shaping processing system is used for obtaining shaped light beams, and the light path shaping processing system also comprises a laser, a processing module and a real-time feedback module, wherein:

the laser is used for emitting water jet to guide high-power laser beams;

the processing module is used for carrying out water jet guided laser processing on the target workpiece based on the shaped light beam;

The real-time feedback module is used for monitoring the shaped light beam in real time and feeding back the shaped light beam, outputting feedback parameters to the light beam analysis module so that the light beam analysis module can conduct comparison analysis based on the feedback parameters, and outputting light beam shaping instructions to at least one of the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module so as to maintain stable light beam parameters.

In the scheme, the optical path shaping system for guiding the high-power laser through the water jet, the laser, the processing module and the real-time feedback module form a closed-loop control optical path shaping processing system. The laser emits high-power laser beams to a light path shaping system for processing, a shaping beam is output, a processing module utilizes the shaping beam to conduct water jet guided laser processing on a target workpiece, a real-time feedback module continuously monitors parameters of the shaping beam and feeds back the parameters to a beam analysis module, the beam analysis module conducts comparison analysis based on the feedback parameters and outputs a beam shaping instruction to a dynamic beam expansion module, a dynamic collimation module or a wavefront modulator so as to achieve dynamic correction and stable maintenance of the parameters of the beam. According to the scheme, by introducing real-time monitoring and closed-loop feedback control, the stability of the beam parameters can be continuously optimized and maintained in the processing process, the fluctuation of the beam quality caused by environmental change or the processing process is effectively and adaptively compensated, the stability and the processing precision of the coupling of laser and water jet are enhanced, and therefore the high-quality and high-efficiency laser processing effect is guaranteed.

It should be noted that the laser may be 1064nmnd:yag laser, for providing stable high-power laser energy input, and the beam quality factor M ² <1.3, and the real-time feedback module may use a beam quality analyzer for accurately measuring the spot size, shape and position of the laser beam, analyzing the energy distribution of the laser beam, and providing data support for the beam analysis module.

Further, the processing module comprises a focusing lens, a spectroscope and a nozzle, wherein:

the shaping light beam sequentially passes through the focusing lens, the spectroscope and the nozzle, so that the water jet guided laser processing is carried out on the target workpiece;

the focusing lens is used for focusing the shaped light beam to obtain a focused light beam;

the spectroscope is used for carrying out light splitting on the focused light beam to obtain a processing light beam and a feedback light beam;

The processing light beam is emitted to the nozzle so that the nozzle couples the focused light beam with a water jet to perform water jet guided laser processing on a target workpiece;

the feedback light beam is transmitted to the real-time feedback module, so that the real-time feedback module monitors the feedback light beam in real time and feeds back the feedback light beam in the processing process, and outputs feedback parameters to the light beam analysis module.

In the scheme, the collimated light beam is firstly subjected to energy convergence through the focusing lens to form a focused light beam, the focused light beam is divided into two paths by the spectroscope, one path is used as a processing light beam to be transmitted to the nozzle and is precisely coupled with the high-speed water jet to form a laser-water jet composite processing beam which acts on a target workpiece to realize precise processing, and the other path is used as a feedback light beam to be transmitted to the real-time feedback module. The focusing lens can ensure the concentrated distribution of laser energy at a processing point so as to improve the energy density and the processing efficiency, the spectroscope realizes the parallel processing and monitoring functions, provides real-time data support for closed-loop control on the premise of not interfering a main processing light path, and the nozzle structure ensures the stable coupling and accurate guiding of laser and water jet and enhances the consistency and reliability of the processing process. Through the cooperative work of the focusing lens, the spectroscope, the nozzle and the corresponding modules, the high-quality and high-efficiency laser processing of the workpiece is finally realized.

The focusing lens can be driven by an electrowetting effect, the response time is less than or equal to 10ms, the focusing lens is used for focusing the shaped light beam to enable the light beam to form proper light spot size and energy distribution, and the spectroscope can be a semi-transparent semi-reflective mirror to divide the focused light beam into two beams.

Further, the beam analysis module is configured to obtain a real-time beam parameter based on the water jet guiding high-power laser beam, obtain a characteristic parameter of a target workpiece, perform quality analysis based on the real-time beam parameter and the characteristic parameter of the target workpiece, and output a beam shaping instruction to the dynamic beam expansion module, the dynamic collimation module and the phase-amplitude modulation module, and further includes:

acquiring real-time environment data;

And comparing and analyzing based on the real-time environment data, a preset target parameter threshold set and the feedback parameter, and outputting a beam shaping instruction to at least one of the dynamic beam expanding module, the dynamic collimation module and the phase amplitude modulation module to maintain stable beam parameters if any one of the real-time environment data and the feedback parameter is larger than the preset target parameter threshold set.

In the above scheme, the beam analysis module collects real-time parameters of the high-power laser beam guided by the water jet, characteristic parameters of the target workpiece, real-time environment data in the processing process and feedback parameters from the real-time feedback module in real time, and compares and analyzes the data with a preset target parameter threshold set. When any one of the real-time environment data or the feedback parameters exceeds a preset threshold value, the beam analysis module immediately generates a corresponding beam shaping instruction and sends the corresponding beam shaping instruction to at least one module of the dynamic beam expansion module, the dynamic collimation module or the wavefront modulator, and the module is driven to carry out parameter adjustment so as to maintain stable output of the beam parameters. The scheme enhances the sensing and compensating capacity of the optical path shaping processing system to external interference factors by fusing multidimensional environment data and real-time feedback parameters, effectively inhibits the influence of environment changes such as temperature fluctuation, mechanical vibration and the like on a laser optical path, ensures the accuracy and timeliness of a beam shaping instruction based on the comparative analysis of a preset target parameter threshold set, and can effectively influence the environment changes such as temperature fluctuation, mechanical vibration and the like on the optical path, thereby ensuring the high stability and the repeated precision of the laser processing process and finally realizing high-quality and high-reliability water jet guided laser processing.

It should be noted that, the real-time environmental data may be collected by an environmental sensor, and may include data such as temperature and vibration, and compare with a preset target parameter, where the target parameter threshold set may include a preset divergence angle=0.1 mrad, a preset plateau (energy distribution deviation in a light spot) = ±5%, a preset light spot size is 80% -100% of a water jet caliber, an environmental temperature=18-28 ℃, a vibration amplitude=5 μm, and a frequency is less than or equal to 50 Hz.

Drawings

FIG. 1 is a schematic flow chart of a method for shaping an optical path of a water jet guided high-power laser according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of an optical path shaping system for guiding high-power laser by water jet according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a first system for shaping and processing a high-power laser beam by using a water jet according to an embodiment of the present invention;

Fig. 4 is a flow chart of a second method for shaping an optical path of a high-power laser guided by a water jet according to an embodiment of the invention.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Referring to fig. 1, the present embodiment provides a method for shaping an optical path of a high-power laser guided by a water jet, which includes the following steps:

Obtaining a water jet guided high-power laser beam, and obtaining real-time parameters of the beam based on the high-power laser beam;

Acquiring a Gaussian beam initial diameter and a beam energy distribution offset center based on the beam real-time parameters;

If the initial diameter of the Gaussian beam is larger than a preset diameter threshold or the energy distribution offset center of the beam is larger than a preset center threshold, dynamically expanding and adjusting the high-power laser beam based on the water jet to obtain an expanded beam;

if the real-time beam parameters are larger than a preset collimation threshold, carrying out dynamic collimation treatment based on the beam expansion beam to obtain a collimated beam;

Acquiring characteristic parameters of a target workpiece;

and performing phase amplitude modulation based on the collimated light beam and the characteristic parameters of the target workpiece to obtain a stable shaping light beam.

In this embodiment, by acquiring the beam real-time parameters of the water jet guided high-power laser beam, including the initial diameter of the gaussian beam and the energy distribution offset center, it is determined whether the beam exceeds the preset diameter threshold or the preset center threshold. If the preset threshold value is exceeded, the dynamic beam expansion adjustment is carried out on the water jet guided high-power laser beam so as to adjust the beam size and correct the energy distribution deviation. And then carrying out dynamic collimation treatment on the beam expansion beam to ensure that the beam expansion beam meets the preset collimation requirement. And finally, according to the characteristic parameters of the target workpiece, carrying out phase amplitude modulation on the straight beam, thereby generating a shaped beam with uniform energy distribution and stable light path. The process realizes the real-time regulation and accurate shaping of the water jet guided high-power laser, improves the quality and processing adaptability of the light beam, can effectively adapt to the characteristics of different target workpieces and ensures the stability and the accuracy of the processing process.

Further, if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the beam expansion beam, and obtaining a collimated beam, wherein the preset collimation threshold comprises a preset angle deviation threshold, and the method comprises the following steps:

acquiring a beam angle based on the beam real-time parameter;

And if the beam angle is larger than a preset angle deviation threshold value, performing angle collimation based on the beam expansion beam to obtain a collimated beam.

In this embodiment, the beam angle is monitored in real time and compared with a preset offset threshold. If the angle deviation exceeds the preset angle deviation threshold value, carrying out angle collimation based on the beam expansion beam to obtain a collimated beam so as to compensate the angle deviation and realize the accurate collimation of the beam. By introducing an angle deviation threshold value as a collimation judgment basis, the propagation direction of the light beam can be accurately monitored and fed back in real time, and the angle deviation of the light beam can be effectively corrected, so that the output collimated light beam is ensured to have high directional consistency and collimation stability.

Further, if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the beam expansion beam, and obtaining a collimated beam, wherein the preset collimation threshold further comprises a preset direction deviation threshold, and the method comprises the following steps:

Acquiring a beam direction value based on the beam real-time parameter;

and if the beam direction value is larger than a preset direction deviation threshold value, performing direction collimation based on the beam expansion beam to obtain a collimated beam.

In this embodiment, the beam direction value is obtained through real-time monitoring, and if the beam direction value exceeds a preset direction deviation threshold, the direction collimation correction is performed on the beam expansion beam, so as to output a collimated beam. By introducing a direction deviation threshold value as a key basis for collimation judgment, accurate monitoring of the beam space directivity is realized, directivity deviation in a beam propagation path is effectively identified and corrected, and accurate alignment of an optical axis of an output beam and a reference axis is ensured, so that the stability of beam transmission and the accuracy of subsequent optical processing are ensured.

Further, the phase amplitude modulation is performed based on the characteristic parameters of the collimated beam and the target workpiece, so as to obtain a shaped beam, which comprises:

Material discrimination is carried out based on characteristic parameters of the target workpiece, and a target material phase amplitude value is obtained;

And carrying out phase amplitude modulation based on the phase amplitude of the collimated light beam and the target material to obtain a shaped light beam.

In the embodiment, firstly, material category distinction is carried out according to characteristic parameters of a target workpiece, a target material phase amplitude value matched with the material is determined, then, the collimated light beam is matched with the target material phase amplitude value, accurate regulation and control of the light beam phase and the light beam amplitude are realized through a modulation process, and finally, a shaped light beam meeting processing requirements is obtained. The method and the device realize high adaptability and pertinence in the processing process by directly correlating the material characteristics with the beam modulation parameters, and the method and the device configure corresponding phase amplitude modulation parameters according to the processing requirements of different materials, ensure that the shaped beam energy distribution and phase characteristics accurately match the processing requirements of specific materials, thereby improving the precision, quality and adaptability of subsequent laser processing.

It should be noted that the phase amplitude modulation can be flexibly configured according to the specific processing task and the material requirement of the target workpiece. The processing requirements can be classified into the following categories based on application scenarios (such as microelectronic device cutting, medical precision component processing, etc.), and correspond to different modulation methods:

For processing hard and brittle materials (such as ceramics and sapphire) and the like, in order to improve the energy density to overcome the hardness of the materials and reduce edge collapse, the amplitude can be adjusted to be in Gaussian-like distribution with high center intensity and low edge intensity (the center energy density is improved by 20% -30% compared with a flat-top beam), and the phase can be modulated by spherical phase to shorten the focusing focal length (such as being adjustable by 30% -50 mm) and reduce the focusing light spot size (to 50% -100 mu m).

For processing of materials such as high precision processing requirements, e.g., micro-scale dicing (e.g., chip pins, medical implants), uniform kerf width (deviation +.0.5 μm) is required. The amplitude should be strictly controlled to be flat-top distribution (energy deviation is less than or equal to + -3%) so as to ensure that the energy at two sides of the notch is uniform and avoid burr generated by single-side overheating, the phase can be led into inclined phase compensation, the angle deviation of the micro beam is corrected (less than or equal to 0.05 mrad), and the coincidence of the center of the light spot and the cutting path is ensured (the precision is within 0.1 μm).

For controlling the material processing of a heat affected zone, such as semiconductor device processing (the heat affected zone is less than or equal to 10 mu m), in order to reduce heat conduction and limit heat diffusion, the amplitude can be set to be pulse flat-top distribution, single pulse energy is concentrated to 10-50ns to shorten the heat action time, the phase can be modulated by adopting wave front inclination, and a focusing light spot is elongated along the processing direction (the length-diameter ratio is about 3:1), so that the energy is linearly distributed along a cutting path, and the local energy accumulation is lightened.

Aiming at the processing of materials with high-efficiency processing requirements, such as high-speed cutting (batch microelectronic device processing), the amplitude can be integrally improved by 50 percent (meanwhile, the flat top deviation is kept to be less than or equal to +/-5 percent) to increase the energy input in unit time, and the phase can be matched with wide focusing modulation to enlarge the transverse size (such as 50-100 mu m) of a light spot to adapt to high-speed feeding.

The embodiment also provides a light path shaping system of the water jet guided high-power laser, which comprises a light beam analysis module, a dynamic beam expansion module, a dynamic collimation module and an intelligent LC-SLM wave front modulator, wherein:

The beam analysis module is used for obtaining a water jet guided high-power laser beam, obtaining real-time parameters of the beam based on the water jet guided high-power laser beam, obtaining characteristic parameters of a target workpiece, carrying out quality analysis based on the water jet guided high-power laser beam and the characteristic parameters of the target workpiece, and outputting a beam shaping instruction to the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module;

the dynamic beam expanding module is used for receiving the beam shaping instruction, and carrying out dynamic beam expanding processing based on the water jet guided high-power laser beam and the beam shaping instruction to obtain an expanded beam;

The dynamic collimation module is used for receiving the beam shaping instruction, and carrying out dynamic collimation processing based on the beam expansion beam and the beam shaping instruction to obtain a collimated beam;

The intelligent LC-SLM wavefront modulator is used for receiving the beam shaping instruction, and performing phase amplitude modulation based on the collimated beam and the beam shaping instruction to obtain a shaped beam.

In this embodiment, the real-time analysis and the adaptive shaping of the high-power laser beam are realized through the synergistic effect of the beam analysis module, the dynamic beam expansion module, the dynamic collimation module and the wavefront modulator. The beam analysis module is responsible for collecting real-time parameters of a beam and characteristics of a target workpiece, outputting a beam shaping instruction after quality analysis, the dynamic beam expanding module expands the laser beam according to the beam shaping instruction, the dynamic collimation module further carries out collimation correction on the expanded beam, and finally, the wave front modulator carries out phase and amplitude modulation on the collimated beam according to the instruction to output a shaped beam meeting the processing requirement. The laser beam shaping device realizes the whole-process accurate regulation and control from beam expansion, collimation to phase and amplitude modulation and laser beam shaping through multi-module cooperation and instruction closed-loop control, can adapt to different materials and processing requirements, improves the efficiency and accuracy of beam shaping, ensures the efficient coupling of laser and water jet, and further enhances the stability and applicability of the processing process.

It should be noted that, the wavefront modulator may adopt an intelligent LC-SLM wavefront modulator, implement modulation of the phase and amplitude of the light wave based on the electrically controlled birefringence effect of the liquid crystal, and finally generate a shaped beam by using the Gerchberg-Saxton algorithm, where the resolution is 1920×1080 pixels.

Further, the dynamic beam expanding module comprises a negative lens, a positive lens and a first MEMS micro-mirror, wherein:

The first MEMS micro-mirror is used for receiving the beam shaping instruction, so that the first MEMS micro-mirror dynamically adjusts the negative lens and the positive lens based on the beam shaping instruction, and further the water jet guides the high-power laser beam to sequentially pass through the negative lens and the positive lens for dynamic beam expansion treatment, and a beam expansion beam is obtained;

the negative lens is used for diverging the water jet guided high-power laser beam, and increasing the beam size to obtain a divergent beam;

And the positive lens is used for re-collimating and amplifying the divergent light beam to obtain an expanded light beam.

In this embodiment, the dynamic beam expansion module implements dynamic adjustment of the beam expansion ratio by using a galilean beam expander composed of a negative lens and a positive lens driven by an MEMS. The first MEMS micro-mirror receives a beam shaping instruction from the beam analysis module, dynamically adjusts the relative position or angle of the negative lens and the positive lens based on the beam shaping instruction, the high-power laser beam firstly achieves beam divergence and size increase through the negative lens to form a divergent beam, and the divergent beam is re-collimated and amplified through the positive lens to finally output a beam expanding beam meeting the size requirement. The dynamic beam expansion module can dynamically control the lens configuration in real time through the precise driving of the first MEMS micro-mirror, so that the beam expansion times and the beam forms can be accurately adjusted according to the beam shaping instruction. The combination of the negative lens and the positive lens effectively expands the beam diameter and simultaneously maintains good beam quality, and provides the beams with size matching and energy distribution optimization for subsequent collimation and phase amplitude modulation, thereby improving the flexibility and accuracy of the whole light path shaping process.

Further, the dynamic collimation module comprises a pre-collimation lens, a precise collimation lens and a second MEMS micro-mirror, wherein:

The second MEMS micro-mirror is used for receiving the beam shaping instruction, so that the second MEMS micro-mirror dynamically adjusts the pre-collimating mirror and the precise collimating mirror based on the beam shaping instruction, and the beam-expanding beam sequentially passes through the pre-collimating mirror and the precise collimating mirror to be dynamically collimated, and a collimated beam is obtained;

the pre-collimating mirror is used for carrying out preliminary correction on the beam expansion beam to obtain a preliminary collimated beam;

the precise collimating mirror is used for precisely correcting the primary collimated light beam to obtain a collimated light beam.

In this embodiment, the dynamic collimation module is a two-stage MEMS collimation lens set formed by a pre-collimation lens, a precision collimation lens and a second MEMS micro-mirror, so as to perform beam collimation. The second MEMS micro-mirror receives the beam shaping instruction from the beam analysis module and dynamically adjusts the postures or positions of the pre-collimating mirror and the precise collimating mirror based on the beam shaping instruction. The beam expansion beam is first calibrated preliminarily by the pre-collimator to output the preliminary collimated beam, which is then collimated and optimized further by the precision collimator to output the high precision collimated beam. By means of real-time regulation and control of the second MEMS micro-mirrors, the method and the device realize accurate driving of the two-stage collimating mirrors, can rapidly compensate angle and direction deviation of light beams according to the light beam shaping instruction, and effectively improve accuracy and efficiency of collimation processing by a grading correction mechanism of the pre-collimating mirrors and the precise collimating mirrors, and ensure that output light beams have extremely small divergence angles and good direction consistency.

The embodiment also provides a light path shaping processing system of the water jet guided high-power laser, which comprises the light path shaping system of the water jet guided high-power laser, wherein the light path shaping processing system is used for obtaining shaped light beams, and the light path shaping processing system further comprises a laser, a processing module and a real-time feedback module, wherein:

the laser is used for emitting water jet to guide high-power laser beams;

the processing module is used for carrying out water jet guided laser processing on the target workpiece based on the shaped light beam;

The real-time feedback module is used for monitoring the shaped light beam in real time and feeding back the shaped light beam, outputting feedback parameters to the light beam analysis module so that the light beam analysis module can conduct comparison analysis based on the feedback parameters, and outputting light beam shaping instructions to at least one of the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module so as to maintain stable light beam parameters.

In an embodiment, the dynamic beam expanding module comprises a negative lens, a positive lens, a first MEMS micro-mirror and a piezoelectric ceramic shifter, the relative positions of the elements are controlled by the first MEMS micro-mirror and the piezoelectric ceramic shifter (the positioning precision is less than or equal to 1 μm), and the dynamic beam expanding module realizes the beam expanding ratio adjustment in the range of 1:2 to 1:10 by changing the axial distance between the two lenses and the micro angle (+ -0.1 mrad) of the negative lens based on the Galilean beam expander principle. Specifically, when the real-time feedback module detects that the initial diameter of the light beam is larger (for example, more than 5 mm), a feedback parameter is output to the light beam analysis module, so that the light beam analysis module performs comparative analysis based on the feedback parameter, and a light beam shaping instruction is output to the dynamic beam expansion module, so that the dynamic beam expansion module reduces the distance between two lenses to reduce the beam expansion ratio, and the light beam is prevented from exceeding the effective aperture of a subsequent element. When the deviation center of the beam energy distribution is monitored to be more than 10%, the angle of the negative lens is finely adjusted through the first MEMS micro-mirror, and the correction of the beam center is realized by matching with the axial displacement of the positive lens, so that the alignment of the beam expansion beam energy distribution and the optical axis is ensured, and symmetrical and centered input conditions are provided for the follow-up wave front shaping.

The beam expansion beam diameter is required to be matched with the effective area of 1920 multiplied by 1080 pixels of the intelligent LC-SLM wave front modulator so as to ensure that the beam completely covers the modulation area and avoid shaping errors caused by insufficient utilization of edge pixels, the beam divergence angle is controlled within the range of 0.3-0.5 mrad in advance so as to reduce the adjustment load of a subsequent dynamic collimation module, and the energy gradient of the high-power laser beam tends to be gentle along with the increase of the beam expansion ratio after the dynamic beam expansion treatment. By optimizing the beam expansion ratio, the energy gradient of the beam can be reduced by 30% -50%, and the intelligent LC-SLM wavefront modulator can be used for generating a flat-top beam (the energy deviation is not more than +/-5%) through rapid iteration by adopting the Gerchberg-Saxton algorithm. And monitoring the quality of the shaped beam in real time through a beam quality analyzer, and if the deviation between the monitoring result and any one of the conditions exceeds 5%, finely adjusting the lens spacing by a dynamic beam expansion module in a step length of 0.5 mu m, and correcting the beam expansion ratio until the beam parameters completely meet the subsequent shaping requirements.

In this embodiment, the above-mentioned optical path shaping system for guiding high-power laser by using water jet, and the laser, the processing module and the real-time feedback module form a closed-loop control optical path shaping processing system. The laser emits high-power laser beams to a light path shaping system for processing, a shaping beam is output, a processing module utilizes the shaping beam to conduct water jet guided laser processing on a target workpiece, a real-time feedback module continuously monitors parameters of the shaping beam and feeds back the parameters to a beam analysis module, the beam analysis module conducts comparison analysis based on the feedback parameters and outputs a beam shaping instruction to a dynamic beam expansion module, a dynamic collimation module or a wavefront modulator so as to achieve dynamic correction and stable maintenance of the parameters of the beam. According to the embodiment, by introducing real-time monitoring and closed-loop feedback control, the stability of the beam parameters can be continuously optimized and maintained in the processing process, the fluctuation of the beam quality caused by environmental change or the processing process is effectively and adaptively compensated, the stability and the processing precision of the coupling of laser and water jet are enhanced, and therefore the high-quality and high-efficiency laser processing effect is ensured.

Further, the processing module comprises a focusing lens, a spectroscope and a nozzle, wherein:

the shaping light beam sequentially passes through the focusing lens, the spectroscope and the nozzle, so that the water jet guided laser processing is carried out on the target workpiece;

the focusing lens is used for focusing the shaped light beam to obtain a focused light beam;

the spectroscope is used for carrying out light splitting on the focused light beam to obtain a processing light beam and a feedback light beam;

The processing light beam is emitted to the nozzle so that the nozzle couples the focused light beam with a water jet to perform water jet guided laser processing on a target workpiece;

the feedback light beam is transmitted to the real-time feedback module, so that the real-time feedback module monitors the feedback light beam in real time and feeds back the feedback light beam in the processing process, and outputs feedback parameters to the light beam analysis module.

In the embodiment, the collimated light beam is firstly subjected to energy convergence through the focusing lens to form a focused light beam, and the focused light beam is divided into two paths by the spectroscope, wherein one path is used as a processing light beam to be transmitted to the nozzle and is precisely coupled with a high-speed water jet to form a laser-water jet composite processing beam which acts on a target workpiece to realize precise processing, and the other path is used as a feedback light beam to be transmitted to the real-time feedback module. The focusing lens can ensure the concentrated distribution of laser energy at a processing point so as to improve the energy density and the processing efficiency, the spectroscope realizes the parallel processing and monitoring functions, provides real-time data support for closed-loop control on the premise of not interfering a main processing light path, and the nozzle structure ensures the stable coupling and accurate guiding of laser and water jet and enhances the consistency and reliability of the processing process. Through the cooperative work of the focusing lens, the spectroscope, the nozzle and the corresponding modules, the high-quality and high-efficiency laser processing of the workpiece is finally realized.

The focusing lens can be driven by an electrowetting effect, the response time is less than or equal to 10ms, the focusing lens is used for focusing the shaped light beam to enable the light beam to form proper light spot size and energy distribution, and the spectroscope can be a semi-transparent semi-reflective mirror to divide the focused light beam into two beams.

Further, the beam analysis module is configured to obtain a real-time beam parameter based on the water jet guiding high-power laser beam, obtain a characteristic parameter of a target workpiece, perform quality analysis based on the real-time beam parameter and the characteristic parameter of the target workpiece, and output a beam shaping instruction to the dynamic beam expansion module, the dynamic collimation module and the phase-amplitude modulation module, and further includes:

acquiring real-time environment data;

And comparing and analyzing based on the real-time environment data, a preset target parameter threshold set and the feedback parameter, and outputting a beam shaping instruction to at least one of the dynamic beam expanding module, the dynamic collimation module and the phase amplitude modulation module to maintain stable beam parameters if any one of the real-time environment data and the feedback parameter is larger than the preset target parameter threshold set.

In this embodiment, the beam analysis module collects real-time parameters of the high-power laser beam guided by the water jet, characteristic parameters of the target workpiece, real-time environmental data in the processing process, and feedback parameters from the real-time feedback module in real time, and compares and analyzes the data with a preset target parameter threshold set. When any one of the real-time environment data or the feedback parameters exceeds a preset threshold value, the beam analysis module immediately generates a corresponding beam shaping instruction and sends the corresponding beam shaping instruction to at least one module of the dynamic beam expansion module, the dynamic collimation module or the wavefront modulator, and the module is driven to carry out parameter adjustment so as to maintain stable output of the beam parameters. The embodiment enhances the sensing and compensating capability of the optical path shaping processing system to external interference factors by fusing multidimensional environment data and real-time feedback parameters, effectively inhibits the influence of environment changes such as temperature fluctuation, mechanical vibration and the like on a laser optical path, ensures the accuracy and timeliness of a beam shaping instruction based on the comparative analysis of a preset target parameter threshold set, and can effectively influence the environment changes such as temperature fluctuation, mechanical vibration and the like on the optical path, thereby ensuring the high stability and the repeated precision of the laser processing process and finally realizing high-quality and high-reliability water jet guided laser processing.

It should be noted that, the real-time environmental data may be collected by an environmental sensor, and may include data such as temperature and vibration, and compare with a preset target parameter, where the target parameter threshold set may include a preset divergence angle=0.1 mrad, a preset plateau (energy distribution deviation in a light spot) = ±5%, a preset light spot size is 80% -100% of a water jet caliber, an environmental temperature=18-28 ℃, a vibration amplitude=5 μm, and a frequency is less than or equal to 50 Hz.

In one embodiment, the real-time feedback module triggers a corresponding beam shaping instruction according to the detection result, and the specific control logic is as follows, if the beam divergence angle is detected to be greater than 0.1mrad, the "optimize collimation" instruction is sent. The instruction is an MEMS micro-mirror angle control pulse signal (pulse frequency is 1kHz, angle adjustment precision is 0.01 mrad), and a dynamic collimation module is driven to finely adjust the angle of a light beam through a precise collimation mirror so as to compensate divergence angle deviation;

If the flatness error is + -5%, a 'optimize flatness' command is sent to the wavefront modulator. The instruction is a liquid crystal pixel driving voltage matrix signal (corresponding to 1920 multiplied by 1080 pixels, the voltage of each pixel is 0-5V, the precision is 10 mV), the phase modulation pattern is iteratively optimized based on the Gerchberg-Saxton algorithm, namely, higher voltage (3-5V) is applied to the pixels in the area with the excessively high energy, the light intensity of the area is reduced by changing the liquid crystal molecular orientation of a wave front modulator, lower voltage (0-2V) is applied to the area with the excessively low energy, so that the light intensity is enhanced, and the energy distribution is corrected until the deviation is not more than +/-5%;

If the spot size is not matched, sending an MEMS driving voltage adjustment instruction (the voltage range is 0-5V, the precision is 1 mV), driving the dynamic beam expanding module to adjust the distance between the negative lens and the positive lens, and changing the beam expanding ratio so as to enable the spot size to be matched with the expected requirement;

If the ambient temperature is below 18 ℃ or above 28 ℃ (conventional room temperature environment), a "temperature compensation" command is issued. The instruction is a piezoelectric ceramic displacement voltage signal (the voltage range is 0-10V), and the base of the pre-collimating mirror is driven to perform micro displacement (the precision is less than or equal to 1 mu m) so as to offset the light beam deflection caused by temperature deformation;

If the vibration amplitude or frequency exceeds the set range, a vibration compensation instruction is sent, namely a high-frequency MEMS response signal (response time is less than or equal to 10 ms), and the linkage dynamic collimation module controls the pre-collimation mirror to track the beam offset in real time (0.02 mrad is adjusted every 1 ms) so as to maintain the beam collimation state;

When all the real-time parameters are within the preset threshold range, the beam analysis module judges that the beam meets the processing requirement, no adjustment signal is generated, and the beam is directly output according to the current parameters.

Referring to fig. 4, in another embodiment, for a system for shaping and processing an optical path of a high-power laser guided by a water jet, the system construction and the installation of optical elements are completed first. The laser 1, the beam analysis module 7, the dynamic beam expansion module 2, the dynamic collimation module 3, the intelligent liquid crystal spatial light modulator 4, the processing module 5 and the real-time feedback module 6 are sequentially installed, and the collineation of optical axes of the modules is ensured;

The beam analysis module is internally provided with an intelligent control system, the dynamic beam expansion module 2 comprises a first MEMS micro-mirror 201, a negative lens 202 and a positive lens 203, the dynamic collimation module 3 comprises a second MEMS micro-mirror 301, a pre-collimation lens 302 and a precise collimation lens 303, the processing module 5 comprises a focusing lens 501, a spectroscope 502, a water jet generating device 503 and a target workpiece 504, and the real-time feedback module comprises a beam quality analyzer 6.

Firstly, starting a system and performing initialization setting, starting a laser 1 to enable the laser to enter a stable working state, calibrating a dynamic beam expanding module 2, a dynamic collimation module 3, an intelligent liquid crystal spatial light modulator 4, a processing module 5 and a real-time feedback module 6 to ensure the accuracy of initial positions and parameters of the modules, starting a water jet generating device 503 to adjust parameters such as flow speed, pressure and diameter to set values, starting a beam quality analyzer 6 and an intelligent control system 7 to establish communication connection for preparing real-time analysis and feedback, and according to the material, shape and processing requirements of a target workpiece 504, calling corresponding processing parameters (such as laser power, beam expanding ratio and the like) from a preset database and configuring the processing parameters into the intelligent control system 7 in the beam analysis module.

The laser beam emitted by the laser 1 first enters the dynamic beam expansion module 2. The module drives the negative lens 202 and the positive lens 203 to adjust positions and angles through the first MEMS micro-mirror 201 according to the beam expansion ratio preset by the intelligent control system 7, so as to realize beam expansion processing of the light beam. The expanded beam enters the dynamic collimation module 3, the pre-collimation mirror 302 performs preliminary angle correction based on the second MEMS micro-mirror 301, and the precision collimation mirror 303 optimizes the collimation degree to enable the beam to propagate at a very small divergence angle, so that a collimated beam is obtained.

The collimated light beam enters the intelligent liquid crystal spatial light modulator 4, and the intelligent liquid crystal spatial light modulator 4 modulates the phase and amplitude of the light beam by adjusting the orientation of liquid crystal molecules according to a 7-beam shaping instruction of an intelligent control system, so that the light beam is shaped into a flat-top light beam.

The shaped light beam is converged into a focused light beam by a focusing lens 501, and is divided into two paths by a spectroscope before entering a nozzle in a water jet generating device 503, wherein one beam is reflected to a beam quality analyzer 6 as a feedback light beam for real-time monitoring, and the other beam is transmitted to the position of the nozzle 503 as a processing light beam, is precisely coupled with the water jet generated by the water jet generating device 503 to form a laser-water jet composite processing light beam, acts on the surface of a target workpiece 504, and performs tasks such as cutting, micromachining and the like.

In the processing process, the beam quality analyzer 6 monitors the quality parameters of the beam in real time and feeds data back to the intelligent control system 7, and the intelligent control system 7 generates a beam shaping instruction according to the feedback parameters and the data of the environment sensor and dynamically adjusts the optical parameters of the beam expanding, collimating and modulating module so as to maintain stable output of the high-quality laser beam.

When the processing is completed, the laser 1 and the water jet generating device 503 are sequentially turned off, the laser emission and the water jet supply are stopped, and the intelligent control system 7 stops the regulation and control of the optical elements to restore the initial state.

In this embodiment, the above-mentioned optical path shaping system for guiding high-power laser by using water jet, and the laser, the processing module and the real-time feedback module form a closed-loop control optical path shaping processing system. The laser emits high-power laser beams to a light path shaping system for processing, a shaping beam is output, a processing module utilizes the shaping beam to conduct water jet guided laser processing on a target workpiece, a real-time feedback module continuously monitors parameters of the shaping beam and feeds back the parameters to a beam analysis module, the beam analysis module conducts comparison analysis based on the feedback parameters and outputs a beam shaping instruction to a dynamic beam expansion module, a dynamic collimation module or a wavefront modulator so as to achieve dynamic correction and stable maintenance of the parameters of the beam. According to the embodiment, by introducing real-time monitoring and closed-loop feedback control, the stability of the beam parameters can be continuously optimized and maintained in the processing process, the fluctuation of the beam quality caused by environmental change or the processing process is effectively and adaptively compensated, the stability and the processing precision of the coupling of laser and water jet are enhanced, and therefore the high-quality and high-efficiency laser processing effect is ensured.

While the foregoing is directed to the preferred embodiments of the present invention, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the invention, such changes and modifications are also intended to be within the scope of the invention.

Claims (10)

1. The light path shaping method of the water jet guided high-power laser is characterized by comprising the following steps of:

Obtaining a water jet guided high-power laser beam, and obtaining real-time parameters of the beam based on the high-power laser beam;

Acquiring a Gaussian beam initial diameter and a beam energy distribution offset center based on the beam real-time parameters;

If the initial diameter of the Gaussian beam is larger than a preset diameter threshold or the energy distribution offset center of the beam is larger than a preset center threshold, dynamically expanding and adjusting the high-power laser beam based on the water jet to obtain an expanded beam;

if the real-time beam parameters are larger than a preset collimation threshold, carrying out dynamic collimation treatment based on the beam expansion beam to obtain a collimated beam;

Acquiring characteristic parameters of a target workpiece;

and performing phase amplitude modulation based on the collimated light beam and the characteristic parameters of the target workpiece to obtain a stable shaping light beam.

2. The method for shaping the optical path of a high-power laser guided by a water jet according to claim 1, wherein if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the expanded beam to obtain a collimated beam, wherein the preset collimation threshold comprises a preset angle offset threshold, and wherein:

acquiring a beam angle based on the beam real-time parameter;

And if the beam angle is larger than a preset angle deviation threshold value, performing angle collimation based on the beam expansion beam to obtain a collimated beam.

3. The method for shaping the optical path of a high-power laser guided by a water jet according to claim 2, wherein if the real-time beam parameter is greater than a preset collimation threshold, performing dynamic collimation processing based on the expanded beam to obtain a collimated beam, wherein the preset collimation threshold further comprises a preset direction deviation threshold, and wherein:

Acquiring a beam direction value based on the beam real-time parameter;

and if the beam direction value is larger than a preset direction deviation threshold value, performing direction collimation based on the beam expansion beam to obtain a collimated beam.

4. The method for shaping the optical path of a high-power laser guided by a water jet according to claim 1, wherein the phase-amplitude modulation is performed based on characteristic parameters of a collimated beam and a target workpiece to obtain a shaped beam, comprising:

Material discrimination is carried out based on characteristic parameters of the target workpiece, and a target material phase amplitude value is obtained;

And carrying out phase amplitude modulation based on the phase amplitude of the collimated light beam and the target material to obtain a shaped light beam.

5. The light path shaping system of the water jet guided high-power laser is characterized by comprising a light beam analysis module, a dynamic beam expansion module, a dynamic collimation module and a wavefront modulator, wherein:

The beam analysis module is used for obtaining a water jet guided high-power laser beam, obtaining real-time parameters of the beam based on the water jet guided high-power laser beam, obtaining characteristic parameters of a target workpiece, carrying out quality analysis based on the water jet guided high-power laser beam and the characteristic parameters of the target workpiece, and outputting a beam shaping instruction to the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module;

the dynamic beam expanding module is used for receiving the beam shaping instruction, and carrying out dynamic beam expanding processing based on the water jet guided high-power laser beam and the beam shaping instruction to obtain an expanded beam;

The dynamic collimation module is used for receiving the beam shaping instruction, and carrying out dynamic collimation processing based on the beam expansion beam and the beam shaping instruction to obtain a collimated beam;

The wavefront modulator is used for receiving the beam shaping instruction, and carrying out phase-amplitude modulation based on the collimated beam and the beam shaping instruction to obtain a shaped beam.

6. The system of claim 5, wherein the dynamic beam expansion module comprises a negative lens, a positive lens, and a first MEMS micro-mirror, wherein:

The first MEMS micro-mirror is used for receiving the beam shaping instruction, so that the first MEMS micro-mirror dynamically adjusts the negative lens and the positive lens based on the beam shaping instruction, and further the water jet guides the high-power laser beam to sequentially pass through the negative lens and the positive lens for dynamic beam expansion treatment, and a beam expansion beam is obtained;

the negative lens is used for diverging the water jet guided high-power laser beam, and increasing the beam size to obtain a divergent beam;

And the positive lens is used for re-collimating and amplifying the divergent light beam to obtain an expanded light beam.

7. The system of claim 5, wherein the dynamic collimating module comprises a pre-collimator, a precision collimator, and a second MEMS micro-mirror, wherein:

The second MEMS micro-mirror is used for receiving the beam shaping instruction, so that the second MEMS micro-mirror dynamically adjusts the pre-collimating mirror and the precise collimating mirror based on the beam shaping instruction, and the beam-expanding beam sequentially passes through the pre-collimating mirror and the precise collimating mirror to be dynamically collimated, and a collimated beam is obtained;

the pre-collimating mirror is used for carrying out preliminary correction on the beam expansion beam to obtain a preliminary collimated beam;

the precise collimating mirror is used for precisely correcting the primary collimated light beam to obtain a collimated light beam.

8. An optical path shaping processing system for water jet guided high power laser, comprising an optical path shaping system for water jet guided high power laser according to any one of claims 5-7, for obtaining shaped beam, the optical path shaping processing system further comprising a laser, a processing module and a real-time feedback module, wherein:

the laser is used for emitting water jet to guide high-power laser beams;

the processing module is used for carrying out water jet guided laser processing on the target workpiece based on the shaped light beam;

The real-time feedback module is used for monitoring the shaped light beam in real time and feeding back the shaped light beam, outputting feedback parameters to the light beam analysis module so that the light beam analysis module can conduct comparison analysis based on the feedback parameters, and outputting light beam shaping instructions to at least one of the dynamic beam expansion module, the dynamic collimation module and the phase amplitude modulation module so as to maintain stable light beam parameters.

9. The system of claim 8, wherein the processing module comprises a focusing lens, a beam splitter, and a nozzle, wherein:

the shaping light beam sequentially passes through the focusing lens, the spectroscope and the nozzle, so that the water jet guided laser processing is carried out on the target workpiece;

the focusing lens is used for focusing the shaped light beam to obtain a focused light beam;

the spectroscope is used for carrying out light splitting on the focused light beam to obtain a processing light beam and a feedback light beam;

The processing light beam is emitted to the nozzle so that the nozzle couples the focused light beam with a water jet to perform water jet guided laser processing on a target workpiece;

the feedback light beam is transmitted to the real-time feedback module, so that the real-time feedback module monitors the feedback light beam in real time and feeds back the feedback light beam in the processing process, and outputs feedback parameters to the light beam analysis module.

10. The system of claim 8, wherein the beam analysis module is configured to obtain real-time parameters of a beam based on the water jet guided high-power laser beam, obtain characteristic parameters of a target workpiece, perform mass analysis based on the real-time parameters of the beam and the characteristic parameters of the target workpiece, and output beam shaping instructions to the dynamic beam expanding module, the dynamic collimation module, and the phase-amplitude modulation module, and further comprises:

acquiring real-time environment data;

And comparing and analyzing based on the real-time environment data, a preset target parameter threshold set and the feedback parameter, and outputting a beam shaping instruction to at least one of the dynamic beam expanding module, the dynamic collimation module and the phase amplitude modulation module to maintain stable beam parameters if any one of the real-time environment data and the feedback parameter is larger than the preset target parameter threshold set.