CN120694651B - Micro-micro combined electrode based on MEMS technology and preparation method thereof - Google Patents
Micro-micro combined electrode based on MEMS technology and preparation method thereofInfo
- Publication number
- CN120694651B CN120694651B CN202511163966.1A CN202511163966A CN120694651B CN 120694651 B CN120694651 B CN 120694651B CN 202511163966 A CN202511163966 A CN 202511163966A CN 120694651 B CN120694651 B CN 120694651B
- Authority
- CN
- China
- Prior art keywords
- slit
- support sleeve
- stimulation
- metallic support
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
- A61B5/279—Bioelectric electrodes therefor specially adapted for particular uses
- A61B5/294—Bioelectric electrodes therefor specially adapted for particular uses for nerve conduction study [NCS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
- A61B5/25—Bioelectric electrodes therefor
- A61B5/263—Bioelectric electrodes therefor characterised by the electrode materials
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/02—Details
- A61N1/04—Electrodes
- A61N1/05—Electrodes for implantation or insertion into the body, e.g. heart electrode
- A61N1/0526—Head electrodes
- A61N1/0529—Electrodes for brain stimulation
- A61N1/0534—Electrodes for deep brain stimulation
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0209—Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
- A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Heart & Thoracic Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- General Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Biophysics (AREA)
- Surgery (AREA)
- Molecular Biology (AREA)
- Neurosurgery (AREA)
- Psychology (AREA)
- Physics & Mathematics (AREA)
- Neurology (AREA)
- Pathology (AREA)
- Cardiology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Electrotherapy Devices (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Abstract
本发明提供了一种基于MEMS技术的宏微结合电极及其制备方法。基于MEMS技术的宏微结合电极包括：脑深部刺激（DBS）宏电极，包括非金属支撑套管和至少一个金属刺激触点，金属刺激触点间隔排列在非金属支撑套管的第一端部的表面，第一端部为深入脑深部的一端；基于MEMS技术的柔性微纳电极阵列，包括并行排布的多个检测单元，每一个检测单元包括检测位点和导线，检测位点均贴附在第一端部的表面，每一个检测位点用于检测脑深部的一种电信号，每一个导线连接相应的检测位点，每一个导线以贴附在非金属支撑套管的表面或穿行在非金属支撑套管的内部的方式沿着非金属支撑套管远离第一端部的方向延伸。
This invention provides a macro-micro hybrid electrode based on MEMS technology and its fabrication method. The MEMS-based macro-micro hybrid electrode includes: a deep brain stimulation (DBS) macroelectrode, comprising a non-metallic support sleeve and at least one metallic stimulation contact, the metallic stimulation contacts being spaced apart on the surface of a first end of the non-metallic support sleeve, the first end being an end extending deep into the brain; and a flexible micro/nano electrode array based on MEMS technology, comprising multiple detection units arranged in parallel, each detection unit including a detection site and a wire, the detection sites being attached to the surface of the first end, each detection site being used to detect an electrical signal in the deep brain, each wire connecting to a corresponding detection site, and each wire extending along the direction away from the first end of the non-metallic support sleeve, either attached to the surface of the non-metallic support sleeve or passing through the interior of the non-metallic support sleeve.
Description
Technical Field
The invention relates to the technical field of brain-computer interfaces, in particular to a macro-micro combined electrode based on MEMS technology and a preparation method thereof.
Background
Neural electrodes are an effective tool for detecting neural signals. In the treatment of some mental diseases, the existing drug treatment and traditional operation methods often cannot realize accurate focus positioning and effective personalized intervention. Particularly, when performing deep brain stimulation (Deepbrain Stimulation, DBS) surgery, how to accurately identify and locate brain regions related to diseases, and perform careful surgical operation and treatment become key to improving the therapeutic effect. In addition, the existing regulation and control mode is human intervention, the later regulation and control difficulty of a patient is increased, and an electrode which can realize closed-loop regulation and control for the patient is urgently needed. However, the prior art fails to meet such high precision detection requirements, as well as performing more precise neuromodulation.
Disclosure of Invention
In view of the requirement of nerve information acquisition of electrodes for closed-loop regulation and control of refractory mental diseases, the invention provides a macro-micro combined electrode based on MEMS technology and a preparation method thereof.
The invention provides a macro-micro combined electrode based on MEMS technology, which comprises a brain deep stimulation macro electrode, a flexible micro-nano electrode array based on MEMS technology, wherein the brain deep stimulation macro electrode comprises a nonmetal support sleeve and at least one metal stimulation contact, the metal stimulation contacts are arranged on the surface of a first end part of the nonmetal support sleeve at intervals, the first end part is one end penetrating into the deep brain, each detection unit comprises a detection site and a wire, the detection sites are attached to the surface of the first end part, each detection site is used for detecting an electric signal of the deep brain, each wire is connected with the corresponding detection site, and each wire extends along the direction of the nonmetal support sleeve away from the first end part in a mode of being attached to the surface of the nonmetal support sleeve or penetrating through the inside of the nonmetal support sleeve.
According to the embodiment of the invention, the nonmetallic support sleeve comprises a middle part, a first slit and a second slit are respectively formed at two ends of the middle part, the first slit is positioned between the middle part and the first end part, and each wire penetrates into the nonmetallic support sleeve from the first slit and penetrates out of the nonmetallic support sleeve from the second slit.
According to the embodiment of the invention, at least one third slit is formed on the first end, each third slit is positioned on one side of the first slit away from the second slit and is positioned at the edge of a different metal stimulation contact, and each wire starts to the connected detection site, penetrates into or out of the third slit, and then penetrates into the non-metal support sleeve from the first slit.
According to an embodiment of the invention, each detection site is attached to a metal stimulation contact.
According to the embodiment of the invention, the nonmetal support sleeve further comprises a second end part, the middle part is positioned between the first end part and the second end part, each detection unit further comprises a bonding pad, each wire penetrates out of the second slit and then is connected with the corresponding bonding pad, and the bonding pad is attached to the surface of the second end part after being welded with an external extension circuit board.
According to an embodiment of the invention, each detection site is attached to the surface of the first end portion by a medical-grade biocompatible material.
According to an embodiment of the invention, the medical biocompatible material comprises any one of polyethylene glycol, polylactic acid-glycolic acid copolymer, fibroin, biocompatible UV glue, MED 2000 medical silicone glue or a combination thereof.
According to an embodiment of the invention, the electrical signal comprises one or more of an electrophysiological signal, a dopamine electrochemical signal or a glutamate electrochemical signal.
According to the embodiment of the invention, the flexible micro-nano electrode array comprises a base insulating layer, at least one signal transmission layer and an encapsulation insulating layer, wherein a plurality of detection units are positioned on the signal transmission layer, the materials of the base insulating layer and the encapsulation insulating layer comprise one or more of polyimide, parylene, epoxy resin, polylactic acid-glycolic acid copolymer, SU8, polyethylene terephthalate, polydimethylsiloxane, silica gel and silicone rubber, and the materials of the signal transmission layer comprise any one of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum iridium alloy, titanium alloy, graphite, carbon nano tube and PEDOT or a combination thereof.
The invention further provides a preparation method of the macro-micro combined electrode based on the MEMS technology, which comprises the steps of obtaining a brain deep stimulation macro electrode, attaching the detection sites to the surface of the first end part of a non-metal support sleeve and at least one metal stimulation contact, attaching each wire to the surface of the non-metal support sleeve or penetrating into the non-metal support sleeve along the direction of the non-metal support sleeve away from the first end part, wherein the first end part is one end penetrating into the deep brain, obtaining a flexible micro-nano electrode array based on the MEMS technology, and the flexible micro-nano electrode array comprises a plurality of detection units which are arranged in parallel, each detection unit comprises a detection site and a wire, each detection site is used for detecting an electric signal of the deep brain, each wire is connected with the corresponding detection site.
Compared with the prior art, the macro-micro combined electrode based on the MEMS technology and the preparation method thereof have at least the following beneficial effects:
1) The flexible electrode prepared by the MEMS technology can provide finer spatial resolution, has lower rigidity, can be in closer contact with the DBS macro electrode and brain tissue, improves the biocompatibility of the nerve electrode, can realize higher-precision acquisition and analysis of nerve electrophysiological signals, provides real-time feedback for nerve regulation and control, and supports adaptive closed-loop treatment at the cell level;
2) The deep brain DBS macro electrode and the flexible nerve micro-nano electrode array based on the MEMS technology are combined on the same device, so that multichannel high-space-time resolution nerve information can be recorded while the deep brain DBS stimulation regulation and control is realized;
3) By attaching the wires of the flexible micro-nano electrode array to the surface of the non-metallic support sleeve or threading the wires inside the non-metallic support sleeve, damage to the middle wire portion of the flexible micro-nano electrode array during the procedure can be avoided.
Drawings
The foregoing and other objects, features and advantages of the invention will be apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:
fig. 1 schematically shows a cross-sectional view of a macro-micro bonded electrode according to a first embodiment of the present invention;
FIG. 2 schematically illustrates a distribution of detection sites for macro-micro binding electrodes according to an embodiment of the present invention;
Fig. 3 schematically shows a cross-sectional view of a macro-micro bonded electrode according to a second embodiment of the present invention;
Fig. 4 schematically shows a structure diagram of a macro-micro bonding electrode according to a second embodiment of the present invention;
Fig. 5 schematically shows a cross-sectional view of a macro-micro bonded electrode according to a third embodiment of the present invention;
fig. 6 schematically shows a structure diagram of a macro-micro bonding electrode according to a third embodiment of the present invention;
FIG. 7 schematically illustrates a block diagram of a flexible micro-nano electrode array based on MEMS technology in accordance with an embodiment of the invention;
Fig. 8 schematically shows a flowchart of a method for manufacturing a macro-micro combined electrode according to an embodiment of the present invention.
Reference numerals illustrate:
10 parts of DBS macro electrode, 11 parts of nonmetal support sleeve, 12 parts of metal stimulation contact, 20 parts of flexible micro-nano electrode array, 21 parts of detection site, 22 parts of wire, 23 parts of bonding pad, 31 parts of first slit, 32 parts of second slit, 33 parts of third slit, 40 parts of extension circuit board, 71 parts of base insulating layer, 72 parts of signal transmission layer, 73 parts of packaging insulating layer.
Detailed Description
The following description of the preferred embodiments of the present invention refers to the accompanying drawings, which make the technical contents thereof more clear and easy to understand. The present invention may be embodied in many different forms of embodiments and the scope of the present invention is not limited to only the embodiments described herein.
In the drawings or description, like or identical parts are provided with the same reference numerals. And in the drawings, embodiments are presented in a simplified or convenient illustration. Furthermore, elements or implementations not shown or described in the drawings are of a form known to those of ordinary skill in the art. Additionally, although examples of parameters including particular values may be provided herein, the parameters need not be exactly equal to the corresponding values, but may approximate the corresponding values within acceptable error margins or design constraints.
Where a convention analogous to "at least one of A, B and C, etc." is used, in general such a convention should be interpreted in accordance with the meaning of one of skill in the art having generally understood the convention (e.g., "a system having at least one of A, B and C" would include, but not be limited to, systems having a alone, B alone, C alone, a and B together, a and C together, B and C together, and/or A, B, C together, etc.).
Fig. 1 schematically shows a cross-sectional view of a macro-micro binding electrode according to a first embodiment of the present invention, and fig. 2 schematically shows a distribution diagram of detection sites of a macro-micro binding electrode according to an embodiment of the present invention.
As shown in fig. 1, the macro-micro combined electrode based on the MEMS technology may include a DBS macro electrode 10 and a flexible micro-nano electrode array 20 based on the MEMS technology. That is, the flexible Micro-nano electrode array 20 is prepared based on Micro-Electro-MECHANICAL SYSTEM, MEMS. The electrode device based on the MEMS technology has the characteristics of high integration, microminiaturization and multifunctionality, and can realize the accurate record of the nerve electric activity of the high-density cell level on a single device. The flexible electrode prepared by the MEMS technology can provide finer spatial resolution, has lower rigidity, can be in closer contact with the electrode and brain tissue, and improves the biocompatibility of the nerve electrode. The micro-system chip based on the MEMS technology can realize the acquisition and analysis of the nerve electrophysiological signals with higher precision, provide real-time feedback for nerve regulation and control, and support the adaptive closed-loop treatment of the cell level.
With continued reference to fig. 1, the dbs macro electrode 10 may include a non-metallic support sleeve 11 and at least one metallic stimulation contact 12. In other words, the number of metal stimulation contacts 12 may be one or more. When there are a plurality of metal stimulation contacts 12, the metal stimulation contacts 12 are arranged at intervals on the surface of the first end portion of the non-metal support sleeve 11, which is the end that goes deep into the deep brain (not shown in the figure). The metal stimulation contacts 12 may provide nerve electrical stimulation at different locations when the DBS macro electrode 10 is implanted deep in the brain. For example, as shown in fig. 1, the number of metal stimulation contacts 12 may be 8, and the metal stimulation contacts 12 are disposed at fixed intervals at the end of the non-metal support sleeve 11, so that nerve stimulation at different locations at 8 is achieved.
As shown in fig. 1 and 2, the flexible micro-nano electrode array 20 may include a plurality of detection units arranged in parallel. Each detection unit may comprise a detection site 21 and a wire 22.
The detection sites 21 may be attached to the surface of the first end portion, and after the nerve electrical stimulation is generated by the metal stimulation contacts 12, nerve electrical signals at different stimulation sites are stably recorded. In some embodiments, the detection sites 21 may be attached to the metallic stimulation contacts 12 of the first end. In other embodiments, the detection sites 21 may also be attached to the first end in areas not covered by the metal stimulation contacts 12, for example in areas between two adjacent metal stimulation contacts 12. A part of the detection sites 21 may be attached to the metal stimulation contacts 12, and a part of the detection sites 21 may not be attached to the metal stimulation contacts 12, as the case may be.
In some embodiments, the detection site 21 may be attached to the surface of the first end portion by a medical-grade biocompatible material. For example, the medical-grade biocompatible material may be any one of polyethylene glycol, polylactic acid-glycolic acid copolymer, fibroin, biocompatible UV glue, MED 2000 medical-grade silicone glue, or a combination thereof.
The nerve electrical signals detected by the different detection sites 21 may be the same nerve electrical signal or different nerve electrical signals. The nerve electrical signal may be an electrophysiological signal, a dopamine electrochemical signal or a glutamate electrochemical signal. In some embodiments, the detection site 21 may be made of platinum black, PEDOT/PSS, PEDOT/DSS, PPy, carbon nanotubes, irO x, hydrogels, or the like for detecting electrophysiological signals. Further, nafion may be modified at the detection site 21 for detecting electrophysiological signals for detecting dopamine electrochemical signals, or a bioprotein molecule such as glutamate oxidase may be modified for detecting glutamate electrochemical signals. Thus, different detection sites 21 may enable a variety of different detection of the neuroelectric signal.
As shown in fig. 1, each wire 22 may extend in a direction away from the first end of the non-metallic support sleeve 11 in such a manner as to be attached to a surface of the non-metallic support sleeve 11. That is, in the present embodiment, both the detection sites 21 and the wires 22 of the flexible micro-nano electrode array 20 may be attached to the surface of the DBS macro electrode 10. Thus, securing the lead 22 to the non-metallic support sleeve 11 may avoid damaging the middle lead portion of the flexible micro-nano electrode array 20 during surgery.
In some embodiments, each wire 22 may extend in a direction of the non-metallic support sleeve 11 away from the first end in a manner that passes inside the non-metallic support sleeve 11. Fig. 3 schematically shows a cross-sectional view of a macro-micro bonding electrode according to a second embodiment of the present invention, and fig. 4 schematically shows a structural view of the macro-micro bonding electrode according to the second embodiment of the present invention. The second embodiment (fig. 3) differs from the first embodiment (fig. 1) mainly in that the positional relationship of the lead wires 22 with the nonmetallic support sleeves 11 is different, and the same reference numerals are given to the same elements.
As shown in fig. 3, the lead 22 passes through the interior of the nonmetallic support sleeve 11 after being connected to the detection site 21. As shown in fig. 4, the lead wires 22 in the middle portion of the nonmetallic support sleeve 11 are not visible from the outside. Compared with the surface of the nonmetallic support sleeve 11, the lead 22 passes through the nonmetallic support sleeve 11, so that the risk of failure and falling of the attaching material is reduced, and the damage to the middle lead part of the flexible micro-nano electrode array 20 in the operation process can be better avoided.
By way of example, the wires 22 may be routed through openings into the interior of the non-metallic support sleeve 11. As shown in fig. 3, a first slit 31 may be used to introduce a wire into the interior of the non-metallic support sleeve 11, the first slit 31 being located between the intermediate portion and the first end portion of the non-metallic support sleeve 11. It will be appreciated that the first slit 31 is not too large in size to reduce the impact on the structure of the non-metallic support sleeve 11. To facilitate passage of the lead 22 through the slit, a lead (e.g., tungsten wire) guide may be employed.
According to the macro-micro combined electrode of the embodiment, the mode of embedding or surface attaching the flexible nerve micro-nano electrode array and the deep brain DBS macro electrode is adopted, so that the integrated macro-micro electrode can record high-resolution cell level nerve signals while achieving deep brain stimulation, and closed-loop self-adaptive regulation and control of the serious brain nerve diseases are facilitated. The mode of embedding the flexible micro-nano electrode array can avoid damaging the middle lead part of the flexible micro-nano electrode array in the operation process so as to ensure the use effect of macro-micro combined electrodes.
Fig. 5 schematically shows a cross-sectional view of a macro-micro bonding electrode according to a third embodiment of the present invention, and fig. 6 schematically shows a structural view of the macro-micro bonding electrode according to the third embodiment of the present invention.
As shown in fig. 3, 5 and 6, in some embodiments, after the wire 22 is passed from the first slit 31 to the inside of the non-metallic support sleeve 11, a second slit 32 may be formed on the middle portion of the non-metallic support sleeve 11 to draw the wire 22 from the inside of the non-metallic support sleeve 11. The first slit 31 and the second slit 32 may have the same size. In a specific operation, the wire 22 may be threaded through the first slit 31 and then out through the second slit 32 by way of a lead (e.g., tungsten wire) to reduce the difficulty of threading the wire 22 through the slits 31, 32.
As shown in fig. 5 and 6, in some embodiments, after the lead 22 is routed out of the non-metallic support sleeve 11, it may be soldered to a solder pad 23, and the solder pad 23 may be located at the second end of the non-metallic support sleeve 11. The second end portion is opposite to the first end portion with the intermediate portion therebetween. The pads 23 may be soldered to an external elongate circuit board 40. The extended circuit board 40 includes, but is not limited to, a PCB, an FPC, and soldering means including, but not limited to, flip chip bonding, anisotropic conductive adhesive (ACF bonding). The extended circuit board 40 may be attached to the surface of the DBS macro electrode 10 and may be routed through the non-metallic support sleeve 11 as the leads 22 in some embodiments.
As shown in fig. 5, in some embodiments, at least one third slit 33 is further formed on the first end of the non-metallic support sleeve 11, each third slit 33 is located on a side of the first slit 31 away from the second slit 32 and on an edge of a different metallic stimulation contact 12, and each wire 22 starts to the connected detection site 21, passes into or out of the third slit 33, and then passes into the non-metallic support sleeve 11 from the first slit 31. For example, there may be three third slits 33 side by side, and the first third slit 33 may penetrate into the non-metallic support sleeve 11, then the second third slit 33 may penetrate out of the non-metallic support sleeve 11, and then the third slit 33 may penetrate into the non-metallic support sleeve 11, so that the detection sites 21 at different positions may be distributed to different positions at the first end, and the wires 22 at the first end of the non-metallic support sleeve 11 may be located as inside the non-metallic support sleeve 11 as much as possible, so as to avoid the wires 22 at the first end being damaged during the operation.
Fig. 7 schematically illustrates a block diagram of a flexible micro-nano electrode array based on MEMS technology according to an embodiment of the invention.
As shown in fig. 7, the flexible micro-nano electrode array 20 may include a base insulating layer 71, at least one signal transmission layer 72, and a package insulating layer 73, and a plurality of sensing units are located at the signal transmission layer 72. The materials of the base insulating layer 71 and the encapsulation insulating layer 73 include one or more of Polyimide (PI), parylene (EP), epoxy (EP), polylactic acid (PLA), polylactic acid-glycolic acid copolymer, SU8, polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), silicone rubber, and silicone rubber. The material of the signal transmission layer 72 includes any one of gold, platinum, iridium, titanium, magnesium, molybdenum, platinum iridium alloy, titanium alloy, graphite, carbon nanotubes, PEDOT, or a combination thereof. As an example, the thickness of the flexible micro-nano electrode array 20 may range from 300nm to 200 μm.
In some embodiments, the fabrication process of the flexible micro-nano electrode array 20 may include deposition of a base film, evaporation of a metal layer, lift-off, deposition of an insulating film, windowing, deep etching, and electrode release steps.
By way of example, the flexible micro-nano electrode array 20 can be prepared by cleaning a silicon wafer by oxygen plasma etching before coating, depositing an insulating layer of 200nm-50 mu m, adopting negative photoresist AZ5214 conducting layer photoetching to pattern a metal layer, comprising oxygen plasma etching to clean impurities on the surface of the insulating layer, spin-coating AZ5214, pre-baking, mask exposure, reverse baking to denature photoresist, flood exposure, naOH solution development, deionized water cleaning, nitrogen blow-drying, oven drying, oxygen plasma etching to clean superfluous organic matters on the surface and evaporate the metal layer, removing superfluous metal including but not limited to chromium, gold, silver, carbon and other metal or organic materials, stripping superfluous metal, depositing an insulating layer of 200nm-50 mu m, using positive photoresist AZ4620 to open window photoetching to pattern, using oxygen plasma etching to expose detection sites, using positive photoresist AZ4903 as a mask, and performing deep etching to thoroughly remove impurities such as photoresist and the like to complete electrode preparation.
Based on the macro-micro combined electrode in the embodiment, the invention further provides a preparation method of the macro-micro combined electrode. Fig. 8 schematically shows a flowchart of a method for manufacturing a macro-micro combined electrode according to an embodiment of the present invention.
As shown in FIG. 8, the preparation method of the macro-micro combined electrode may include steps S810 to S830.
In step S810, a Deep Brain Stimulation (DBS) macro electrode 10 is obtained. The DBS macro electrode 10 comprises a non-metallic support sleeve 11 and at least one metallic stimulation contact 12, the metallic stimulation contacts 12 being spaced apart on the surface of a first end of the non-metallic support sleeve 11, the first end being the end deeper into the brain.
In step S820, a flexible micro-nano electrode array 20 based on MEMS technology is obtained. The flexible micro-nano electrode array 20 comprises a plurality of detection units which are arranged in parallel, each detection unit comprises a detection site 21 and a conducting wire 22, each detection site 21 is used for detecting an electric signal of the deep brain, and each conducting wire 22 is connected with the corresponding detection site 21.
In step S830, the detection site 21 is attached to the surface of the first end portion, and each wire 22 is attached to the surface of the non-metallic support sleeve 11 or penetrates into the interior of the non-metallic support sleeve 11 in a direction in which the non-metallic support sleeve 11 is away from the first end portion.
Some details of the preparation method of the macro-micro combined electrode can be found in the content of the previous Wen Hong micro combined electrode. It should be noted that, the preparation method of the macro-micro combined electrode has the same or similar technical features and beneficial effects as those of the macro-micro combined electrode in the above embodiment, and will not be repeated here.
While the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those skilled in the art that the foregoing embodiments may be modified or equivalents may be substituted for some of the features thereof, and that the modifications or substitutions do not depart from the spirit and scope of the embodiments of the invention.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202511163966.1A CN120694651B (en) | 2025-08-20 | 2025-08-20 | Micro-micro combined electrode based on MEMS technology and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202511163966.1A CN120694651B (en) | 2025-08-20 | 2025-08-20 | Micro-micro combined electrode based on MEMS technology and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN120694651A CN120694651A (en) | 2025-09-26 |
| CN120694651B true CN120694651B (en) | 2025-11-21 |
Family
ID=97118413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202511163966.1A Active CN120694651B (en) | 2025-08-20 | 2025-08-20 | Micro-micro combined electrode based on MEMS technology and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN120694651B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105561469A (en) * | 2015-12-12 | 2016-05-11 | 西安交通大学 | Implanted multifunctional double-side micro brain electrode array chip |
| CN114631822A (en) * | 2022-02-17 | 2022-06-17 | 上海脑虎科技有限公司 | Flexible nerve electrode, preparation method and equipment |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2232257Y (en) * | 1995-06-16 | 1996-08-07 | 中国人民解放军南京军区南京总医院 | Implanted brain deep location electrode and its clamping apparatus |
| US9474894B2 (en) * | 2014-08-27 | 2016-10-25 | Aleva Neurotherapeutics | Deep brain stimulation lead |
| CN111348616A (en) * | 2020-03-06 | 2020-06-30 | 清华大学 | Implantable neural electrode and preparation method thereof |
| CN113041496A (en) * | 2021-03-19 | 2021-06-29 | 国家纳米科学中心 | Nerve electrical stimulation electrode, preparation method and implantation method thereof |
| CN113786198B (en) * | 2021-09-10 | 2023-12-05 | 中国科学院空天信息创新研究院 | An integrated implantable flexible neural electrode and testing system for sleep detection and regulation |
| CN113797441A (en) * | 2021-10-14 | 2021-12-17 | 杭州电子科技大学温州研究院有限公司 | Brain deep stimulation electrode based on MEMS technology |
| CN119302663A (en) * | 2022-06-17 | 2025-01-14 | 上海阶梯医疗科技有限公司 | A flexible electrode for peripheral nerves and a manufacturing method thereof |
| CN118416392A (en) * | 2024-04-28 | 2024-08-02 | 中国科学院空天信息创新研究院 | A high-throughput and high-storage bidirectional multi-shank flexible electrical stimulation electrode and method |
| CN118512182B (en) * | 2024-05-29 | 2025-11-28 | 中国科学院空天信息创新研究院 | Million-channel neural information detection stimulation dual-mode bidirectional brain-computer interface |
| CN119405322B (en) * | 2024-11-12 | 2026-01-20 | 南湖脑机交叉研究院 | Ultrasonic-electroencephalogram multifunctional electrode for deep brain stimulation |
-
2025
- 2025-08-20 CN CN202511163966.1A patent/CN120694651B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105561469A (en) * | 2015-12-12 | 2016-05-11 | 西安交通大学 | Implanted multifunctional double-side micro brain electrode array chip |
| CN114631822A (en) * | 2022-02-17 | 2022-06-17 | 上海脑虎科技有限公司 | Flexible nerve electrode, preparation method and equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN120694651A (en) | 2025-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11730953B2 (en) | Deep brain stimulation lead | |
| US9819074B2 (en) | Monolithically integrated implantable flexible antenna for electrocorticography and related biotelemetry devices | |
| US20250364154A1 (en) | Flexible electrode apparatus for bonding with seeg electrode and method for manufacturing same | |
| KR20210127692A (en) | Electrode manufacturing and design | |
| JP2008510506A (en) | Manufacturing process for forming narrow sensors | |
| CN106646048A (en) | Preparation method of microelectrode array | |
| CN112869747B (en) | Microelectrode, manufacturing method and using method thereof, plug device and microelectrode system | |
| US20250134433A1 (en) | Flexible electrode and manufacturing method therefor | |
| WO2024046186A1 (en) | Brain electrode apparatus, preparation method therefor, electrode apparatus, and electronic device | |
| WO2024046185A1 (en) | Implantable probe apparatus, preparation method therefor, electrode apparatus, and electronic device | |
| JP5075016B2 (en) | Penetration type flexible nerve electrode and manufacturing method thereof | |
| CN120694651B (en) | Micro-micro combined electrode based on MEMS technology and preparation method thereof | |
| CN103239800A (en) | Flexible multi-channel deep brain stimulation three-dimension electrode based on micromachining technology | |
| US20260007347A1 (en) | Linear flexible electrode for peripheral nerve and manufacturing method thereof | |
| WO2023240695A1 (en) | Flexible electrode for spinal cord and method for manufacturing same | |
| CN116473564A (en) | Multi-site tungsten filament microelectrode for clinical brain function positioning | |
| US20190254546A1 (en) | Neural multielectrode arrays and their manufacture and use | |
| CN116250842A (en) | Dual-mode flexible implantable photoelectric integrated microelectrode, preparation method and application | |
| KR20230127544A (en) | Neural probe | |
| CN112971843B (en) | Ultrasound-enabled invasive medical device and method of making same | |
| TWI781618B (en) | 3d printing neural probe and manufacturing method thereof | |
| CN120713531B (en) | Microwire electrode structure, preparation method thereof and implantation method thereof | |
| US20250331757A1 (en) | Electronic devices and methods thereof | |
| CN113946243B (en) | Sensing panel and its preparation method, sensing device | |
| KR20230127545A (en) | Neural probe |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |